KR950014013A - 중간절연 박막을 이용한 실리콘(Si)기판 접합 방법 - Google Patents

중간절연 박막을 이용한 실리콘(Si)기판 접합 방법 Download PDF

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Publication number
KR950014013A
KR950014013A KR1019930023637A KR930023637A KR950014013A KR 950014013 A KR950014013 A KR 950014013A KR 1019930023637 A KR1019930023637 A KR 1019930023637A KR 930023637 A KR930023637 A KR 930023637A KR 950014013 A KR950014013 A KR 950014013A
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KR
South Korea
Prior art keywords
silicon
substrate
bonding
thin film
sio
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KR1019930023637A
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English (en)
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KR960015962B1 (ko
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박세광
Original Assignee
박세광
박재범
대성전기공업 주식회사
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Priority to KR1019930023637A priority Critical patent/KR960015962B1/ko
Publication of KR950014013A publication Critical patent/KR950014013A/ko
Application granted granted Critical
Publication of KR960015962B1 publication Critical patent/KR960015962B1/ko

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    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C27/00—Joining pieces of glass to pieces of other inorganic material; Joining glass to glass other than by fusing
    • C03C27/06—Joining glass to glass by processes other than fusing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B17/00—Layered products essentially comprising sheet glass, or glass, slag, or like fibres
    • B32B17/06—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material
    • B32B17/10—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin
    • B32B17/10005—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin laminated safety glass or glazing
    • B32B17/1055—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin laminated safety glass or glazing characterized by the resin layer, i.e. interlayer
    • B32B17/10798—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin laminated safety glass or glazing characterized by the resin layer, i.e. interlayer containing silicone
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C23/00—Other surface treatment of glass not in the form of fibres or filaments
    • C03C23/0075—Cleaning of glass
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C23/00—Other surface treatment of glass not in the form of fibres or filaments
    • C03C23/0095—Solution impregnating; Solution doping; Molecular stuffing, e.g. of porous glass

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Ceramic Engineering (AREA)
  • Formation Of Insulating Films (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Pressure Sensors (AREA)

Abstract

본 발명은 실리콘(Si)기판을 접합시키는 방법에 관한 것으로 특히 일반 반도체 세척공정인 RCA 세척공정으로 미세하게 표면에 산화규소(SiO2)가 생성된 실리콘(Si)기판의 표면을 깨끗하게 세척한후 산성용액에 넣어 깨끗하게 세척된 표면에 산화규소(SiO2)+0H-가 생성되는 하이드록실(hydroxyl)층이 형성되도록 하여 건조시키고, 일반온도인 상온의 온도와 깨끗하게 정화된 진공상태에서 상호접하는 부분인 절연박막(SiO2)층에 기공이 생기지 않도록 접합시키며, 상기와 같이 접합시킨 실리콘(Si)기판을 고온인 1000℃이상에서 습식산화 또는 건식산화 및 질소를 투입시켜 실리콘(Si)기판내의 결합력을 증대 시켜 접합함으로 P형규소 기판과 N형 규소기판의 접합을 수행하여 고전력용 PN접합 반도체소자의 제조를 용이하도록 하기위한 것이다.

Description

중간절연 박막을 이용한 실리콘(Si)기판 접합 방법
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음

Claims (2)

  1. 실리콘(Si)기판을 일반적 반도체 세척공정인 RCA세척공정으로 표면을 깨끗하게 세척하고, 황산(H2SO4) 질산(HNO3), 수산화암모늄(NH4OH), 불화수소(HF) 및 염산(Hcl)에 과산화수소수(H202)와 순수물(Dl water)를 섞은 OH-기 활성화 용액에 넣어 가열하면 실리콘기판표면에 OH-기가 생성되어 하이드록실(hydroxyl)층이 형성되게 한후 건조시켜서 이물질이 제거된 청정상태의 상합 또는 진공상태인 상온(20℃이상)에서 기공이 생기지 않게 접합하여 실라놀(Sllanol)결합을 생성한후, 실리콘(Si)기판사이의 보다 높은 결합력을 얻기위하여 고온(1000℃이상)의 대기압에서 습식산화 또는 건식산화 및 질소의 분위기에서 약1시간 가량 공정을 수행하는 중간절연 박막을 이용한 실리콘(Si)기판 접합방법.
  2. 제1항에 있어서, 상기 두장의 실리콘(Si)기판사이에 절연박막으로 SiO2, Si3N4또는 AL304로 형성된 중간절연박막을 이용한 실리콘(Si)기판 접합방법.
    ※참고사항:최초출원 내용에 의하여 공개하는 것임.
KR1019930023637A 1993-11-08 1993-11-08 중간 절연 박막을 이용한 실리콘 기판의 접합방법 KR960015962B1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1019930023637A KR960015962B1 (ko) 1993-11-08 1993-11-08 중간 절연 박막을 이용한 실리콘 기판의 접합방법

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019930023637A KR960015962B1 (ko) 1993-11-08 1993-11-08 중간 절연 박막을 이용한 실리콘 기판의 접합방법

Publications (2)

Publication Number Publication Date
KR950014013A true KR950014013A (ko) 1995-06-15
KR960015962B1 KR960015962B1 (ko) 1996-11-25

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Application Number Title Priority Date Filing Date
KR1019930023637A KR960015962B1 (ko) 1993-11-08 1993-11-08 중간 절연 박막을 이용한 실리콘 기판의 접합방법

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KR (1) KR960015962B1 (ko)

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KR960015962B1 (ko) 1996-11-25

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