KR940027543A - 투사형 화상표시장치용 광로조절장치 - Google Patents

투사형 화상표시장치용 광로조절장치 Download PDF

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Publication number
KR940027543A
KR940027543A KR1019930007678A KR930007678A KR940027543A KR 940027543 A KR940027543 A KR 940027543A KR 1019930007678 A KR1019930007678 A KR 1019930007678A KR 930007678 A KR930007678 A KR 930007678A KR 940027543 A KR940027543 A KR 940027543A
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KR
South Korea
Prior art keywords
image display
optical path
actuator
display device
path control
Prior art date
Application number
KR1019930007678A
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English (en)
Other versions
KR970003004B1 (ko
Inventor
전용배
Original Assignee
배순훈
대우전자 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 배순훈, 대우전자 주식회사 filed Critical 배순훈
Priority to KR1019930007678A priority Critical patent/KR970003004B1/ko
Priority to US08/238,132 priority patent/US5682260A/en
Priority to JP6094580A priority patent/JPH075501A/ja
Publication of KR940027543A publication Critical patent/KR940027543A/ko
Application granted granted Critical
Publication of KR970003004B1 publication Critical patent/KR970003004B1/ko

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Classifications

    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N5/00—Details of television systems
    • H04N5/74—Projection arrangements for image reproduction, e.g. using eidophor
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R17/00—Piezoelectric transducers; Electrostrictive transducers
    • H04R17/04—Gramophone pick-ups using a stylus; Recorders using a stylus
    • H04R17/08—Gramophone pick-ups using a stylus; Recorders using a stylus signals being recorded or played back by vibration of a stylus in two orthogonal directions simultaneously

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Multimedia (AREA)
  • Signal Processing (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Liquid Crystal (AREA)
  • Electrochromic Elements, Electrophoresis, Or Variable Reflection Or Absorption Elements (AREA)

Abstract

본 발명은 투사형 화상표시장치용 광로조절장치에 관한 것으로, 단결성 실리콘 웨이퍼로 이루어지며 액츄에이터를 구동시키기 위한 모스트랜지스터가 매트릭스 형태로 내장된 능동매트릭스 기판상에 액츄에이터를 신호전극이 접촉단자를 통해 모스트랜지스터의 드레인 전극과 전기적으로 접속되도록 실장한다. 따라서, 캐리어의 이동보다 큰 단결성 실리콘에 내장된 모스트랜지스터에 의해 액츄에이터를 고속으로 구동시킬 수 있으며, 또한 단결정 실리콘 웨이퍼에 입자 결합이 매우 적으므로 모스트랜지스터가 균일한 특성을 갖게 되어 수율을 향상시킬 수 있다.

Description

투사형 화상표시장치용 광로조절장치
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제1도는 종래의 투사형 화상표시장치용 과오조절장치의 단면도, 제2도는 본 발명에 따른 투사형 화상표시장치용 광로조절장치의 단면도.

Claims (3)

  1. 능동매트릭스기판과, 압전세라믹으로 이루어진 변형부와 신호 전극 및 공통접지 전극을 가지는 화소가 되는 M×N개의 액츄에이터와 거울을 구비하는 투사형 화상표시장치용 광로조절장치에 있어서, 상기 능동 매트릭스기판은 제1도전형의 단결정 실리콘 웨이퍼로 이루어진 기판에 매트릭스형태로 M×N개의 제2도전형의 모스트랜지스터가 내장되고, 상기 제2도전형의 모스트랜지스터의 드레인 전극이 접촉단자에 의해 액츄에이터의 신호전극과 전기적으로 연결되는 투사형 화상표시장치용 광로조절장치.
  2. 제1항에 있어서, 상기 제1도전형이 N형이고, 제2도전형이 P형인 투사형 화상표시장치용 광로조절장치.
  3. 제1항에 있어서, 상기 제2도전형 모스트랜지터는 게이트전극에 동기신호가 입력되고, 소오스전극에 화상신호가 입력되며 드레인 전극에 접촉단자를 통해 액츄에이터의 신호전극이 접속되는 투사형 화상표시장치용 광로조절장치.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019930007678A 1993-05-04 1993-05-04 투사형 화상표시장치용 광로조절장치 KR970003004B1 (ko)

Priority Applications (3)

Application Number Priority Date Filing Date Title
KR1019930007678A KR970003004B1 (ko) 1993-05-04 1993-05-04 투사형 화상표시장치용 광로조절장치
US08/238,132 US5682260A (en) 1993-05-04 1994-05-04 Actuated mirror array with active matrix substrate having array of MOSFETS
JP6094580A JPH075501A (ja) 1993-05-04 1994-05-06 アクチュエーチドミラーアレーおよびそれに用いられる能動マトリックス基板

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019930007678A KR970003004B1 (ko) 1993-05-04 1993-05-04 투사형 화상표시장치용 광로조절장치

Publications (2)

Publication Number Publication Date
KR940027543A true KR940027543A (ko) 1994-12-10
KR970003004B1 KR970003004B1 (ko) 1997-03-13

Family

ID=19354955

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019930007678A KR970003004B1 (ko) 1993-05-04 1993-05-04 투사형 화상표시장치용 광로조절장치

Country Status (3)

Country Link
US (1) US5682260A (ko)
JP (1) JPH075501A (ko)
KR (1) KR970003004B1 (ko)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6437767B1 (en) 1997-04-04 2002-08-20 Sharp Kabushiki Kaisha Active matrix devices

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5877889A (en) * 1996-08-30 1999-03-02 Daewoo Electronics Co., Ltd. Method for the manufacture of a thin film actuated mirror array
US6777856B2 (en) * 2001-08-02 2004-08-17 Kistler Holding Ag Crystal element for piezo sensors
JP4473532B2 (ja) * 2002-10-10 2010-06-02 日本碍子株式会社 圧電／電歪デバイス及び製造方法
CN110572758B (zh) * 2019-09-16 2021-04-13 Oppo广东移动通信有限公司 偏光片、显示屏、电子设备

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5172262A (en) * 1985-10-30 1992-12-15 Texas Instruments Incorporated Spatial light modulator and method
JPH03179327A (ja) * 1989-09-25 1991-08-05 Fuji Photo Film Co Ltd 導波路型音響光学素子
US5144472A (en) * 1990-05-17 1992-09-01 Xerox Corporation Electrical contacts for an electro-optic modulator
US5233456A (en) * 1991-12-20 1993-08-03 Texas Instruments Incorporated Resonant mirror and method of manufacture
KR970003007B1 (ko) * 1993-05-21 1997-03-13 대우전자 주식회사 투사형 화상표시장치용 광로조절장치 및 그 구동방법
US5585956A (en) * 1993-07-31 1996-12-17 Daewoo Electronics Co, Ltd. Electrostrictive actuated mirror array
KR970003466B1 (ko) * 1993-09-28 1997-03-18 대우전자 주식회사 투사형 화상 표시 장치의 광로 조절 장치 제조 방법
US5552923A (en) * 1993-10-20 1996-09-03 Daewoo Electronics Co., Ltd. Array of electrodisplacive actuated mirrors and method for the manufacture thereof

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6437767B1 (en) 1997-04-04 2002-08-20 Sharp Kabushiki Kaisha Active matrix devices
KR100342790B1 (ko) * 1997-04-04 2002-11-18 샤프 가부시키가이샤 액티브매트릭스장치

Also Published As

Publication number Publication date
US5682260A (en) 1997-10-28
KR970003004B1 (ko) 1997-03-13
JPH075501A (ja) 1995-01-10

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