KR940002356B1 - 비접촉자동초점위치맞춤방법 및 장치 - Google Patents

비접촉자동초점위치맞춤방법 및 장치 Download PDF

Info

Publication number
KR940002356B1
KR940002356B1 KR1019870014764A KR870014764A KR940002356B1 KR 940002356 B1 KR940002356 B1 KR 940002356B1 KR 1019870014764 A KR1019870014764 A KR 1019870014764A KR 870014764 A KR870014764 A KR 870014764A KR 940002356 B1 KR940002356 B1 KR 940002356B1
Authority
KR
South Korea
Prior art keywords
light beam
reflected
measurement light
objective lens
optical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
KR1019870014764A
Other languages
English (en)
Korean (ko)
Other versions
KR880008043A (ko
Inventor
가쯔시게 나까무라
Original Assignee
미따까 고오끼 가부시끼가이샤
나까무라 기이찌
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 미따까 고오끼 가부시끼가이샤, 나까무라 기이찌 filed Critical 미따까 고오끼 가부시끼가이샤
Publication of KR880008043A publication Critical patent/KR880008043A/ko
Application granted granted Critical
Publication of KR940002356B1 publication Critical patent/KR940002356B1/ko
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Images

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
    • G02B7/04—Mountings, adjusting means, or light-tight connections, for optical elements for lenses with mechanism for focusing or varying magnification
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/28—Systems for automatic generation of focusing signals
    • G02B7/30—Systems for automatic generation of focusing signals using parallactic triangle with a base line
    • G02B7/32—Systems for automatic generation of focusing signals using parallactic triangle with a base line using active means, e.g. light emitter
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
    • G01S17/06—Systems determining position data of a target
    • G01S17/46—Indirect determination of position data

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Optics & Photonics (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Automatic Focus Adjustment (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Measurement Of Optical Distance (AREA)
KR1019870014764A 1986-12-25 1987-12-23 비접촉자동초점위치맞춤방법 및 장치 Expired - Fee Related KR940002356B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP61308029A JPS63163313A (ja) 1986-12-25 1986-12-25 非接触自動焦点位置合わせ装置
JP61-308029 1986-12-25
JP308,029 1986-12-25

Publications (2)

Publication Number Publication Date
KR880008043A KR880008043A (ko) 1988-08-30
KR940002356B1 true KR940002356B1 (ko) 1994-03-23

Family

ID=17976030

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019870014764A Expired - Fee Related KR940002356B1 (ko) 1986-12-25 1987-12-23 비접촉자동초점위치맞춤방법 및 장치

Country Status (5)

Country Link
US (1) US4843228A (https=)
EP (1) EP0273717B1 (https=)
JP (1) JPS63163313A (https=)
KR (1) KR940002356B1 (https=)
DE (1) DE3784231T2 (https=)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5061062A (en) * 1990-07-02 1991-10-29 General Electric Company Focus spot size controller for a variable depth range camera
DE4131737C2 (de) * 1991-09-24 1997-05-07 Zeiss Carl Fa Autofokus-Anordnung für ein Stereomikroskop
JPH0812046B2 (ja) * 1993-05-24 1996-02-07 三鷹光器株式会社 二段検出式非接触位置決め装置
US5912447A (en) * 1997-01-14 1999-06-15 United Parcel Service Of America, Inc. Concentric optical path equalizer with radially moving mirrors
JP3019835B2 (ja) * 1998-04-22 2000-03-13 日本電気株式会社 焦点検出装置
SE521173C2 (sv) * 1998-09-17 2003-10-07 Spectra Prec Ab Elektronisk distansmätanordning
DE69931885T2 (de) * 1999-02-26 2007-05-31 Yokogawa Electric Corporation Doppelmonochromator
US6486457B1 (en) * 1999-10-07 2002-11-26 Agilent Technologies, Inc. Apparatus and method for autofocus
JP3881498B2 (ja) * 2000-05-25 2007-02-14 ペンタックス株式会社 光波測距儀
AUPR183600A0 (en) * 2000-12-01 2001-01-04 Sci.com Imaging Australia Pty Ltd Lens assembly
DE10124433A1 (de) * 2001-05-18 2002-11-21 Bosch Gmbh Robert Vorrichtung zur optischen Distanzmessung
JP3825701B2 (ja) * 2001-06-07 2006-09-27 ペンタックス株式会社 測量機の光軸自動調整装置
JP4121803B2 (ja) * 2002-08-08 2008-07-23 株式会社トプコン 光波距離測定装置
JP2006308709A (ja) * 2005-04-27 2006-11-09 Tohoku Univ 顕微鏡ステージ、および、焦点位置計測装置と共焦点顕微鏡システム
KR100939679B1 (ko) * 2007-12-11 2010-02-03 (주)가하 자동 초점 조절 장치 및 그 방법
DE102009019290B4 (de) 2009-04-30 2011-09-01 Ludwig-Maximilian-Universität Mikroskopvorrichtung
JP5400499B2 (ja) * 2009-06-29 2014-01-29 オリンパス株式会社 焦点検出装置

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2325953A1 (fr) * 1975-09-29 1977-04-22 Thomson Brandt Senseur optique de focalisation et dispositif de focalisation comportant un tel senseur
JPS5541432A (en) * 1978-09-20 1980-03-24 Nippon Kogaku Kk <Nikon> Focus detector
US4383168A (en) * 1980-06-02 1983-05-10 Raytheon Company Automatic focusing apparatus
JPS5752006A (en) * 1980-08-19 1982-03-27 Olympus Optical Co Ltd Method and device for detecting focus
US4530600A (en) * 1982-02-22 1985-07-23 Northrop Corporation Variable attenuator for optical transceiver
JPS59109805A (ja) * 1982-12-16 1984-06-25 Matsushita Electric Ind Co Ltd 位置検出装置
US4630927A (en) * 1983-02-15 1986-12-23 General Electric Company Optical projector
US4611912A (en) * 1983-04-04 1986-09-16 Ball Corporation Method and apparatus for optically measuring distance and velocity
JPS60100114A (ja) * 1983-11-05 1985-06-04 Canon Inc 合焦検出装置
JPS62929A (ja) * 1985-06-27 1987-01-06 Matsushita Electric Ind Co Ltd カメラの自動焦点調節装置

Also Published As

Publication number Publication date
KR880008043A (ko) 1988-08-30
JPS63163313A (ja) 1988-07-06
EP0273717A3 (en) 1988-11-17
DE3784231D1 (de) 1993-03-25
JPH0563771B2 (https=) 1993-09-13
EP0273717B1 (en) 1993-02-17
DE3784231T2 (de) 1993-06-03
EP0273717A2 (en) 1988-07-06
US4843228A (en) 1989-06-27

Similar Documents

Publication Publication Date Title
KR940002356B1 (ko) 비접촉자동초점위치맞춤방법 및 장치
US6856381B2 (en) Method for carrying out the non-contact measurement of geometries of objects
JP2913984B2 (ja) 傾斜角測定装置
EP0627610B1 (en) Two-stage detection noncontact positioning apparatus
US5309214A (en) Method for measuring distributed dispersion of gradient-index optical elements and optical system to be used for carrying out the method
KR100878425B1 (ko) 표면 측정 장치
JPH01239404A (ja) 対象物のエッジ検出方法及びその装置
JPH11173821A (ja) 光学式検査装置
JPS62502421A (ja) 二次元の対象物を整向、検査及び／または測定するための装置
JPH08261734A (ja) 形状測定装置
JP3222214B2 (ja) 対象面の位置検出装置
JP2005003667A (ja) 基準軸設定光学系、並びにこれを用いた偏心量測定機及び偏心測定方法
JPH06148029A (ja) 光ファイバの傾斜角測定方法および光コネクタ
JPH1123953A (ja) 焦点検出装置を備えた顕微鏡および変位計測装置
JP3279815B2 (ja) 変位・傾き検出方法およびそれを用いた自動焦点装置
JPH0563772B2 (https=)
JPH06137827A (ja) 光学的段差測定器
JPH08106040A (ja) 位置検出装置
JP6791788B2 (ja) 形状測定装置
JPH0563773B2 (https=)
JPS6363907A (ja) 非接触式高さ測定方法
JPH0617934B2 (ja) 非接触自動位置合わせ装置
JP2989995B2 (ja) 位置合せ装置
JPS63199311A (ja) 二方向非接触自動焦点位置合わせ方法及び装置
CN112880585A (zh) 非接触形状测定装置

Legal Events

Date Code Title Description
PA0109 Patent application

St.27 status event code: A-0-1-A10-A12-nap-PA0109

R17-X000 Change to representative recorded

St.27 status event code: A-3-3-R10-R17-oth-X000

PG1501 Laying open of application

St.27 status event code: A-1-1-Q10-Q12-nap-PG1501

A201 Request for examination
PA0201 Request for examination

St.27 status event code: A-1-2-D10-D11-exm-PA0201

G160 Decision to publish patent application
PG1605 Publication of application before grant of patent

St.27 status event code: A-2-2-Q10-Q13-nap-PG1605

E701 Decision to grant or registration of patent right
PE0701 Decision of registration

St.27 status event code: A-1-2-D10-D22-exm-PE0701

GRNT Written decision to grant
PR0701 Registration of establishment

St.27 status event code: A-2-4-F10-F11-exm-PR0701

PR1002 Payment of registration fee

St.27 status event code: A-2-2-U10-U11-oth-PR1002

Fee payment year number: 1

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 4

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 5

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 6

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 7

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 8

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 9

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 10

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 11

FPAY Annual fee payment

Payment date: 20050224

Year of fee payment: 12

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 12

LAPS Lapse due to unpaid annual fee
PC1903 Unpaid annual fee

St.27 status event code: A-4-4-U10-U13-oth-PC1903

Not in force date: 20060324

Payment event data comment text: Termination Category : DEFAULT_OF_REGISTRATION_FEE

PC1903 Unpaid annual fee

St.27 status event code: N-4-6-H10-H13-oth-PC1903

Ip right cessation event data comment text: Termination Category : DEFAULT_OF_REGISTRATION_FEE

Not in force date: 20060324

P22-X000 Classification modified

St.27 status event code: A-4-4-P10-P22-nap-X000