KR930002238A - 등축정계 질화붕소 연마제 및 그의 제조방법 - Google Patents

등축정계 질화붕소 연마제 및 그의 제조방법 Download PDF

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Publication number
KR930002238A
KR930002238A KR1019920013294A KR920013294A KR930002238A KR 930002238 A KR930002238 A KR 930002238A KR 1019920013294 A KR1019920013294 A KR 1019920013294A KR 920013294 A KR920013294 A KR 920013294A KR 930002238 A KR930002238 A KR 930002238A
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South Korea
Prior art keywords
boron nitride
ideal structure
hbn
reaction mixture
microns
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KR1019920013294A
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English (en)
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레이몬드 코리간 프랜시스
스위팅 바바라
안토니 사뮤엘
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아더 엠. 킹
제네랄 일렉트릭 캄파니
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Application filed by 아더 엠. 킹, 제네랄 일렉트릭 캄파니 filed Critical 아더 엠. 킹
Publication of KR930002238A publication Critical patent/KR930002238A/ko

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    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B35/00—Boron; Compounds thereof
    • C01B35/08—Compounds containing boron and nitrogen, phosphorus, oxygen, sulfur, selenium or tellurium
    • C01B35/14—Compounds containing boron and nitrogen, phosphorus, sulfur, selenium or tellurium
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/58—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
    • C04B35/583—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on boron nitride
    • C04B35/5831—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on boron nitride based on cubic boron nitrides or Wurtzitic boron nitrides, including crystal structure transformation of powder

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Organic Chemistry (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Ceramic Products (AREA)
  • Polishing Bodies And Polishing Tools (AREA)

Abstract

내용 없음.

Description

등축정계 질화붕소 연마제 및 그의 제조방법
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음

Claims (10)

  1. 약10미크론 또는 그 이상의 평균 입경을 갖는 실질적으로 이상적인 구조(ideal structure)를 가진 육방정계 질화붕소 입자를 포함하는 반응 혼합물을, 이상적인 구조의 육방정계 질화붕소 입자를 등축정계 질화붕소로 전환 시키기에 충분한 시간동안 동시 압력 및 온도 조건(simultaneous pressure and temperature condition)으로 처리하는 단계; 반응 혼합물을 주변 조건으로 귀환시키는 단계; 및 상기 반응 혼합물로부터 등축정계 질화붕소를 회수하는 단계를 포함하는 등축정계 질화붕소의 제조방법.
  2. 제1항에 있어서, 상기 압력 및 온도가 질화붕소에 대한 상 다이아그램상의 평형곡선 윗쪽 지점에 상응하는 값을 갖는 방법.
  3. 제1항에 있어서, 상기 반응혼합물이 0.05 내지 40중량%의 촉매 물질을 추가로 포함하는 방법.
  4. 제1항에 있어서, 상기 반응혼합물이 1내지 50중량%의 동축정계 질화붕소 결정을 추가로 포함하는 방법.
  5. 제1항에 있어서, 상기 이상적인 구조의 HBN을 예열시킨 다음 진공 연소시켜 전환시키고, 상기 이상적인 구조의 HBN이 15 내지 50미크론의 입경을 갖는 방법.
  6. 제1항에 있어서, 상기 이상적인 구조의 HBN을 CBN클러스터(cluster)콤팩트 또는 CBN 복합 콤팩트로 전환시키는 방법.
  7. 제1항에 있어서, 상기 이상적인 구조의 HBN을 압축된 필(pressed-pill)로 압축시킨 다음, 전환에 적합한 압력 및 온도 조건으로 처리하는 방법.
  8. 제1항에 있어서, 상기 이상적인 구조의 육방정계 질화붕소 입자가 약30미크론 이상의평균입경을갖는 방법.
  9. 압축된 이상적인 구조의 HBN 입자를 필수로 하는, 2.00g/㎠ 이상의 밀도를 갖는 압축된 필.
  10. 15내지 50미크론 범위의 평균 입력 및 2.28g/㎠의 입자 밀도를 갖는 HBN입자로부터 수득된 CBN클러스터 콤팩트.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019920013294A 1991-07-25 1992-07-24 등축정계 질화붕소 연마제 및 그의 제조방법 KR930002238A (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US735503 1991-07-25
US07/735,503 US5194071A (en) 1991-07-25 1991-07-25 Cubic boron nitride abrasive and process for preparing same

Publications (1)

Publication Number Publication Date
KR930002238A true KR930002238A (ko) 1993-02-22

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KR1019920013294A KR930002238A (ko) 1991-07-25 1992-07-24 등축정계 질화붕소 연마제 및 그의 제조방법

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Country Link
US (2) US5194071A (ko)
EP (1) EP0524789B1 (ko)
JP (1) JPH05194938A (ko)
KR (1) KR930002238A (ko)
AT (1) ATE143915T1 (ko)
CA (1) CA2070437A1 (ko)
CZ (1) CZ230992A3 (ko)
DE (1) DE69214373T2 (ko)
HU (1) HUT63593A (ko)
MX (1) MX9204377A (ko)
PL (1) PL295386A1 (ko)
ZA (1) ZA925186B (ko)

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US8622787B2 (en) * 2006-11-16 2014-01-07 Chien-Min Sung CMP pad dressers with hybridized abrasive surface and related methods
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US8398466B2 (en) * 2006-11-16 2013-03-19 Chien-Min Sung CMP pad conditioners with mosaic abrasive segments and associated methods
US9138862B2 (en) 2011-05-23 2015-09-22 Chien-Min Sung CMP pad dresser having leveled tips and associated methods
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Also Published As

Publication number Publication date
MX9204377A (es) 1993-01-01
US5466269A (en) 1995-11-14
PL295386A1 (en) 1993-04-05
DE69214373T2 (de) 1997-04-10
EP0524789B1 (en) 1996-10-09
CZ230992A3 (en) 1993-02-17
EP0524789A1 (en) 1993-01-27
DE69214373D1 (de) 1996-11-14
CA2070437A1 (en) 1993-01-26
JPH05194938A (ja) 1993-08-03
ZA925186B (en) 1993-04-30
ATE143915T1 (de) 1996-10-15
US5194071A (en) 1993-03-16
HUT63593A (en) 1993-09-28

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