KR920015604A - 반도체장치의 소자격리방법 - Google Patents
반도체장치의 소자격리방법 Download PDFInfo
- Publication number
- KR920015604A KR920015604A KR1019910000641A KR910000641A KR920015604A KR 920015604 A KR920015604 A KR 920015604A KR 1019910000641 A KR1019910000641 A KR 1019910000641A KR 910000641 A KR910000641 A KR 910000641A KR 920015604 A KR920015604 A KR 920015604A
- Authority
- KR
- South Korea
- Prior art keywords
- nitride film
- isolation method
- semiconductor device
- forming
- sidewall
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/76—Making of isolation regions between components
- H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
- H01L21/76202—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using a local oxidation of silicon, e.g. LOCOS, SWAMI, SILO
- H01L21/76213—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using a local oxidation of silicon, e.g. LOCOS, SWAMI, SILO introducing electrical inactive or active impurities in the local oxidation region, e.g. to alter LOCOS oxide growth characteristics or for additional isolation purpose
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/76—Making of isolation regions between components
- H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
- H01L21/76202—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using a local oxidation of silicon, e.g. LOCOS, SWAMI, SILO
- H01L21/76205—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using a local oxidation of silicon, e.g. LOCOS, SWAMI, SILO in a region being recessed from the surface, e.g. in a recess, groove, tub or trench region
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Local Oxidation Of Silicon (AREA)
Abstract
내용 없음
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제2도 (a)-(d)는 본 발명의 1실시예 따른 제조공정도이다.
Claims (2)
- 반도체 기판상에 산화막, 질화막을 차례로 도포하고 필드영역의 질화막만 제거하는 공정과, 상기 질화막의 측면에 산화막으로 완충용 측벽을 형성한 후 노출된 상기 산화막 양단의 제한된 부분에 고농도 불순물을 이온주입하는 공정과, 상기 완충용 측벽상에 질화막으로된 질화막 측벽을 형성하는 공정과, 필드영역에 필드산화막을 형성하는 공정으로 이루어진 반도체 장치의 소자격리방법.
- 제1항에 있어서, 상기이온주입공정은 n+형 불순물, 20-30KeV의 에너지, e16/㎠까지의 도즈량으로 실행함을 특징으로 하는 반도체 장치의 소자격리방법.※ 참고사항 : 최초출원 내용에 의하여 공개되는 것임.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019910000641A KR950007397B1 (ko) | 1991-01-16 | 1991-01-16 | 반도체 장치의 소자격리 방법 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019910000641A KR950007397B1 (ko) | 1991-01-16 | 1991-01-16 | 반도체 장치의 소자격리 방법 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR920015604A true KR920015604A (ko) | 1992-08-27 |
KR950007397B1 KR950007397B1 (ko) | 1995-07-10 |
Family
ID=19309896
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019910000641A KR950007397B1 (ko) | 1991-01-16 | 1991-01-16 | 반도체 장치의 소자격리 방법 |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR950007397B1 (ko) |
-
1991
- 1991-01-16 KR KR1019910000641A patent/KR950007397B1/ko not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
KR950007397B1 (ko) | 1995-07-10 |
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