KR920008002B1 - 자기조절식 압력제어밸브 - Google Patents

자기조절식 압력제어밸브 Download PDF

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Publication number
KR920008002B1
KR920008002B1 KR1019870007658A KR870007658A KR920008002B1 KR 920008002 B1 KR920008002 B1 KR 920008002B1 KR 1019870007658 A KR1019870007658 A KR 1019870007658A KR 870007658 A KR870007658 A KR 870007658A KR 920008002 B1 KR920008002 B1 KR 920008002B1
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KR
South Korea
Prior art keywords
pressure
control
regulating
signal
controlled
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
KR1019870007658A
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English (en)
Korean (ko)
Other versions
KR880001952A (ko
Inventor
요시히꼬 하세가와
Original Assignee
가부시끼가이샤 티엘브이
후지와라 가쓰지
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Application filed by 가부시끼가이샤 티엘브이, 후지와라 가쓰지 filed Critical 가부시끼가이샤 티엘브이
Publication of KR880001952A publication Critical patent/KR880001952A/ko
Application granted granted Critical
Publication of KR920008002B1 publication Critical patent/KR920008002B1/ko
Expired legal-status Critical Current

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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F3/00—Optical logic elements; Optical bistable devices
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/12—Heads, e.g. forming of the optical beam spot or modulation of the optical beam
    • G11B7/125—Optical beam sources therefor, e.g. laser control circuitry specially adapted for optical storage devices; Modulators, e.g. means for controlling the size or intensity of optical spots or optical traces
    • G11B7/128—Modulators
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K17/00—Safety valves; Equalising valves, e.g. pressure relief valves
    • F16K17/02—Safety valves; Equalising valves, e.g. pressure relief valves opening on surplus pressure on one side; closing on insufficient pressure on one side
    • F16K17/164—Safety valves; Equalising valves, e.g. pressure relief valves opening on surplus pressure on one side; closing on insufficient pressure on one side and remaining closed after return of the normal pressure
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/02—Actuating devices; Operating means; Releasing devices electric; magnetic
    • F16K31/04—Actuating devices; Operating means; Releasing devices electric; magnetic using a motor
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/0121—Operation of devices; Circuit arrangements, not otherwise provided for in this subclass
    • G02F1/0123—Circuits for the control or stabilisation of the bias voltage, e.g. automatic bias control [ABC] feedback loops
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1339—Gaskets; Spacers; Sealing of cells
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1341—Filling or closing of cells
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/15—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on an electrochromic effect
    • G02F1/153—Constructional details
    • G02F1/161—Gaskets; Spacers; Sealing of cells; Filling or closing of cells
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D16/00—Control of fluid pressure
    • G05D16/20—Control of fluid pressure characterised by the use of electric means
    • G05D16/2086—Control of fluid pressure characterised by the use of electric means without direct action of electric energy on the controlling means
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S359/00—Optical: systems and elements
    • Y10S359/90—Methods

Landscapes

  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Optics & Photonics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mathematical Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Automation & Control Theory (AREA)
  • Fluid Mechanics (AREA)
  • Control Of Fluid Pressure (AREA)
  • Fluid-Pressure Circuits (AREA)
  • Valves And Accessory Devices For Braking Systems (AREA)
  • Braking Systems And Boosters (AREA)
  • Control Of Transmission Device (AREA)
  • Vehicle Body Suspensions (AREA)
KR1019870007658A 1986-07-15 1987-07-15 자기조절식 압력제어밸브 Expired KR920008002B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP61167255A JPS6320603A (ja) 1986-07-15 1986-07-15 自動設定減圧弁
JP61-167255 1986-07-15

Publications (2)

Publication Number Publication Date
KR880001952A KR880001952A (ko) 1988-04-28
KR920008002B1 true KR920008002B1 (ko) 1992-09-21

Family

ID=15846341

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019870007658A Expired KR920008002B1 (ko) 1986-07-15 1987-07-15 자기조절식 압력제어밸브

Country Status (20)

Country Link
JP (1) JPS6320603A (cg-RX-API-DMAC10.html)
KR (1) KR920008002B1 (cg-RX-API-DMAC10.html)
CN (1) CN1009315B (cg-RX-API-DMAC10.html)
AU (1) AU586570B2 (cg-RX-API-DMAC10.html)
BE (1) BE1001187A5 (cg-RX-API-DMAC10.html)
CA (1) CA1281609C (cg-RX-API-DMAC10.html)
CH (1) CH677393A5 (cg-RX-API-DMAC10.html)
DE (2) DE3723284A1 (cg-RX-API-DMAC10.html)
DK (1) DK173181B1 (cg-RX-API-DMAC10.html)
ES (1) ES2004643A6 (cg-RX-API-DMAC10.html)
FR (1) FR2601748B1 (cg-RX-API-DMAC10.html)
GB (1) GB2192737B (cg-RX-API-DMAC10.html)
GR (1) GR871085B (cg-RX-API-DMAC10.html)
IT (1) IT1222025B (cg-RX-API-DMAC10.html)
NL (1) NL192353C (cg-RX-API-DMAC10.html)
NZ (1) NZ220980A (cg-RX-API-DMAC10.html)
PH (1) PH26990A (cg-RX-API-DMAC10.html)
PT (1) PT85326B (cg-RX-API-DMAC10.html)
SE (1) SE466321B (cg-RX-API-DMAC10.html)
ZA (1) ZA875096B (cg-RX-API-DMAC10.html)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3927110A1 (de) * 1989-08-17 1991-02-21 Bosch Gmbh Robert Magnetventil mit erregerstrom-steuervorrichtung
JPH0455607U (cg-RX-API-DMAC10.html) * 1990-09-14 1992-05-13
JP2787391B2 (ja) * 1992-04-15 1998-08-13 株式会社テイエルブイ 自動設定減圧弁
DE4233748A1 (de) * 1992-10-07 1994-02-03 Daimler Benz Ag Drucksteller
US5532922A (en) * 1994-09-30 1996-07-02 Honeywell Inc. Non-linear control system for a single input single output process
DE19524652A1 (de) * 1995-07-06 1997-01-09 Rexroth Mannesmann Gmbh Elektrisch ansteuerbares Proportional-Druckventil
US6138564A (en) * 1995-10-27 2000-10-31 Oce Printing Systems Gmbh Means for regulating pressure in a pressure chamber
US6056008A (en) * 1997-09-22 2000-05-02 Fisher Controls International, Inc. Intelligent pressure regulator
GB9804047D0 (en) 1998-02-27 1998-04-22 Normalair Garrett Ltd Method of controlling a parameter
US8910657B2 (en) 2007-09-06 2014-12-16 Cnh Industrial America Llc Electrically controlled pilot operated pressure regulator valve apparatus and method of operation of the same
CN102287549B (zh) * 2011-07-20 2012-10-03 安徽理工大学 一种组合式切换阀
CN102720843B (zh) * 2012-06-04 2013-07-10 西安交通大学 一种交流伺服电机直驱式大通径比例气动阀
CN102866713B (zh) * 2012-10-16 2015-03-25 深圳市安保科技有限公司 一种呼吸流量调节装置和呼吸机
BR112016019639A2 (pt) * 2014-02-26 2017-08-15 Zodiac Aerotechnics Redutor de pressao de gas e sistema de entrega de gas compreendendo tal redutor
CN107073525B (zh) * 2014-12-23 2020-05-12 阿尔弗雷德·卡赫欧洲两合公司 高压清洁器
CN109114268A (zh) * 2018-10-17 2019-01-01 江西洪都航空工业集团有限责任公司 一种起落架缓冲器用抗过载电子泄压阀
CN110360090A (zh) * 2019-07-10 2019-10-22 大唐半导体科技有限公司 一种空压机的气压调节方法和装置
CN110397582B (zh) * 2019-07-10 2020-11-27 大唐半导体科技有限公司 一种空压机的自我矫正方法和装置
KR20230018097A (ko) * 2021-07-29 2023-02-07 세메스 주식회사 유량 조절 시스템과 이를 포함하는 기판 처리 장치 및 이를 이용한 기판 처리 방법

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1197897A (en) * 1966-08-26 1970-07-08 Norris Systems Ltd Improvements in or relating to Fluid Control Valves
US3596873A (en) * 1968-12-04 1971-08-03 Optical Coating Laboratory Inc Valve assembly and servo system incorporating same
US3628129A (en) * 1970-10-01 1971-12-14 Gen Electric Process controller including a rate circuit responsive solely to process variable signal changes
JPS5591005A (en) * 1978-12-28 1980-07-10 Tlv Co Ltd Control valve
DE2916172C2 (de) * 1979-04-21 1983-08-18 Karl 7298 Loßburg Hehl Proportionalventil für hydraulische Anlagen
DE3046595A1 (de) * 1980-12-11 1982-07-22 G. Kromschröder AG, 4500 Osnabrück Regelventilanordnung
FR2512977A1 (fr) * 1981-09-11 1983-03-18 Thomson Csf Dispositif a servovalve electrohydraulique
US4585030A (en) * 1984-04-06 1986-04-29 Borg-Warner Corporation Proportional hydraulic solenoid controller
JPS6184715A (ja) * 1984-10-02 1986-04-30 Tlv Co Ltd 自動設定減圧弁

Also Published As

Publication number Publication date
DE8709700U1 (de) 1988-01-21
IT1222025B (it) 1990-08-31
NL8701652A (nl) 1988-02-01
SE466321B (sv) 1992-01-27
CN1009315B (zh) 1990-08-22
GR871085B (en) 1987-10-22
GB2192737B (en) 1990-11-21
CA1281609C (en) 1991-03-19
ES2004643A6 (es) 1989-01-16
AU7526587A (en) 1988-01-21
PH26990A (en) 1992-12-28
NZ220980A (en) 1990-11-27
KR880001952A (ko) 1988-04-28
GB8716496D0 (en) 1987-08-19
NL192353B (nl) 1997-02-03
DK353987D0 (da) 1987-07-09
DK353987A (da) 1988-01-16
DE3723284A1 (de) 1988-01-21
NL192353C (nl) 1997-06-04
AU586570B2 (en) 1989-07-13
GB2192737A (en) 1988-01-20
IT8721269A0 (it) 1987-07-14
ZA875096B (cg-RX-API-DMAC10.html) 1988-01-13
SE8702833D0 (sv) 1987-07-10
BE1001187A5 (nl) 1989-08-08
CH677393A5 (cg-RX-API-DMAC10.html) 1991-05-15
SE8702833L (sv) 1988-01-16
DK173181B1 (da) 2000-03-06
FR2601748A1 (fr) 1988-01-22
FR2601748B1 (fr) 1990-03-30
PT85326A (pt) 1988-07-29
PT85326B (pt) 1995-05-04
CN87104851A (zh) 1988-02-03
JPS6320603A (ja) 1988-01-28

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