KR900702475A - 웨이퍼 디스크들의 프로세스 운반구들을 위한 바-코드 원격 감지시스템 - Google Patents

웨이퍼 디스크들의 프로세스 운반구들을 위한 바-코드 원격 감지시스템

Info

Publication number
KR900702475A
KR900702475A KR1019900700092A KR900700092A KR900702475A KR 900702475 A KR900702475 A KR 900702475A KR 1019900700092 A KR1019900700092 A KR 1019900700092A KR 900700092 A KR900700092 A KR 900700092A KR 900702475 A KR900702475 A KR 900702475A
Authority
KR
South Korea
Prior art keywords
bar code
carrier
coded
bar
processing operations
Prior art date
Application number
KR1019900700092A
Other languages
English (en)
Other versions
KR930012138B1 (ko
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of KR900702475A publication Critical patent/KR900702475A/ko
Application granted granted Critical
Publication of KR930012138B1 publication Critical patent/KR930012138B1/ko

Links

Classifications

    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06K—GRAPHICAL DATA READING; PRESENTATION OF DATA; RECORD CARRIERS; HANDLING RECORD CARRIERS
    • G06K7/00—Methods or arrangements for sensing record carriers, e.g. for reading patterns
    • G06K7/10—Methods or arrangements for sensing record carriers, e.g. for reading patterns by electromagnetic radiation, e.g. optical sensing; by corpuscular radiation
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06K—GRAPHICAL DATA READING; PRESENTATION OF DATA; RECORD CARRIERS; HANDLING RECORD CARRIERS
    • G06K19/00—Record carriers for use with machines and with at least a part designed to carry digital markings
    • G06K19/02—Record carriers for use with machines and with at least a part designed to carry digital markings characterised by the selection of materials, e.g. to avoid wear during transport through the machine
    • G—PHYSICS
    • G07—CHECKING-DEVICES
    • G07C—TIME OR ATTENDANCE REGISTERS; REGISTERING OR INDICATING THE WORKING OF MACHINES; GENERATING RANDOM NUMBERS; VOTING OR LOTTERY APPARATUS; ARRANGEMENTS, SYSTEMS OR APPARATUS FOR CHECKING NOT PROVIDED FOR ELSEWHERE
    • G07C3/00—Registering or indicating the condition or the working of machines or other apparatus, other than vehicles
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S414/00—Material or article handling
    • Y10S414/135—Associated with semiconductor wafer handling
    • Y10S414/14—Wafer cassette transporting

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Theoretical Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • Electromagnetism (AREA)
  • General Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Artificial Intelligence (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Indexing, Searching, Synchronizing, And The Amount Of Synchronization Travel Of Record Carriers (AREA)
KR1019900700092A 1988-05-18 1989-02-17 웨이퍼 디스크들의 프로세스 운반구들을 위한 바-코드 원격 감지 방법 KR930012138B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US196,132 1988-05-18
US07/196,132 US4833306A (en) 1988-05-18 1988-05-18 Bar code remote recognition system for process carriers of wafer disks
PCT/US1989/000652 WO1989011702A1 (en) 1988-05-18 1989-02-17 Bar code remote recognition system for process carriers of wafer disks

Publications (2)

Publication Number Publication Date
KR900702475A true KR900702475A (ko) 1990-12-07
KR930012138B1 KR930012138B1 (ko) 1993-12-24

Family

ID=22724212

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019900700092A KR930012138B1 (ko) 1988-05-18 1989-02-17 웨이퍼 디스크들의 프로세스 운반구들을 위한 바-코드 원격 감지 방법

Country Status (8)

Country Link
US (1) US4833306A (ko)
EP (1) EP0382797B1 (ko)
JP (1) JPH03500700A (ko)
KR (1) KR930012138B1 (ko)
AT (1) ATE140090T1 (ko)
CA (1) CA1314986C (ko)
DE (1) DE68926782T2 (ko)
WO (1) WO1989011702A1 (ko)

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CA2011296A1 (en) 1989-05-15 1990-11-15 Douglas C. Bossen Presence/absence bar code
US5055832A (en) * 1989-06-09 1991-10-08 Dayco Products Canada Inc. Display element with notched disk
IT1235835B (it) * 1989-08-08 1992-11-03 Sgs Thomson Microelectronics Movimentazione automatica di contenitori diversi con punti di prelievo e di codificazione standarizzati
GB9007132D0 (en) * 1990-03-30 1990-05-30 Gen Foods Kraft Ltd Packages containing comestibles
US5570293A (en) * 1990-11-29 1996-10-29 Tokyo Seimitsu Co., Ltd. Method and device for manufacturing a semiconductor chip
US5399531A (en) * 1990-12-17 1995-03-21 United Micrpelectronics Corporation Single semiconductor wafer transfer method and plural processing station manufacturing system
US5559398A (en) * 1991-11-28 1996-09-24 Hitachi, Ltd. Cathode ray tube and method of making the same
CA2097204A1 (en) * 1992-06-15 1993-12-16 Paul William Spencer Maintenance monitoring system for detachable ski lift carrier vehicles
US5300762A (en) * 1992-06-25 1994-04-05 Siemens Power Corporation Non-contact shoe for bar code wands
JP2647795B2 (ja) * 1992-12-03 1997-08-27 日本バルカー工業株式会社 マークプレートの加熱融着方法
DE4309092C2 (de) * 1993-03-22 1998-11-12 Joachim Dr Scheerer Verfahren und Vorrichtung zur Handhabung und zum Transport von Wafern in Reinst-Räumen
US5521709A (en) * 1993-05-05 1996-05-28 International Business Machines Corporation Continuous barcode marking system
JPH0722490A (ja) * 1993-06-30 1995-01-24 Mitsubishi Electric Corp ロット自動編成装置及び方法
US5472086A (en) * 1994-03-11 1995-12-05 Holliday; James E. Enclosed sealable purgible semiconductor wafer holder
US6164530A (en) * 1994-04-08 2000-12-26 Fluoroware, Inc. Disk carrier with transponder
US5476176A (en) * 1994-05-23 1995-12-19 Empak, Inc. Reinforced semiconductor wafer holder
US5560775A (en) * 1994-05-23 1996-10-01 Advanced Micro Devices, Inc. Quartz marking system
US5537431A (en) * 1994-06-15 1996-07-16 International Business Machines Corporation Method and apparatus for bar code reading and decoding
US5581071A (en) * 1994-12-06 1996-12-03 International Business Machines Corporation Barcode scanner with adjustable light source intensity
US5770842A (en) * 1995-06-08 1998-06-23 Dressen; Larry G. Location monitoring of wafer batches
KR100207446B1 (ko) * 1995-07-08 1999-07-15 윤종용 반도체 제조관리용 카세트, 이의 제조방법 및 카세트 인식장치의 설치방법
US5742238A (en) * 1995-09-01 1998-04-21 Emtrak, Inc. System for communication between a central controller and items in a factory using infrared light
KR0182926B1 (ko) * 1996-06-29 1999-05-15 김광호 바-코드 시스템을 이용한 품질관리시스템 및 품질관리방법
DE19640425A1 (de) * 1996-09-30 1998-04-02 Siemens Ag Verfahren zur Waferidentifizierung in der Chipfertigung und Vorrichtung zur Durchführung des Verfahrens
US5942739A (en) * 1997-01-22 1999-08-24 Advanced Micro Devices, Inc. Process timer monitor
US6138058A (en) * 1998-01-06 2000-10-24 Jenoptik Infab, Inc. Method for electronically tracking containers to avoid misprocessing of contents
US6136614A (en) * 1998-03-04 2000-10-24 Agilent Technologies Apparatus and method for manufacturing integrated circuit devices
US7229017B2 (en) * 1999-11-23 2007-06-12 Xerox Corporation Laser locating and tracking system for externally activated tags
US6669253B2 (en) * 2000-12-18 2003-12-30 David W. Benzing Wafer boat and boat holder
US6451421B1 (en) * 2001-03-19 2002-09-17 Infosight Corporation Laser markable micro-pore aluminum tags and method of their fabrication
US6618640B1 (en) * 2001-04-11 2003-09-09 Advanced Micro Devices, Inc. Method and apparatus for using integrated remote identifier
CA2446419C (en) * 2001-05-31 2010-07-20 Inventio Ag Equipment for ascertaining the position of a rail-guided lift cage with a code carrier
CN1617792A (zh) * 2001-11-27 2005-05-18 诚实公司 信息聚合物的薄膜嵌入成型
IL158773A0 (en) * 2002-03-21 2004-05-12 Alcon Inc Surgical system
US6641039B2 (en) * 2002-03-21 2003-11-04 Alcon, Inc. Surgical procedure identification system
US7175026B2 (en) 2002-05-03 2007-02-13 Maxtor Corporation Memory disk shipping container with improved contaminant control
US6738294B2 (en) * 2002-09-30 2004-05-18 Agere Systems Inc. Electronic fingerprinting of semiconductor integrated circuits
CA2803828C (en) * 2005-03-31 2015-11-24 Alcon, Inc. Footswitch operable to control a surgical system
US8011905B2 (en) * 2005-11-17 2011-09-06 Novartis Ag Surgical cassette
US7392144B2 (en) * 2006-10-10 2008-06-24 Alcon, Inc. Method for data compression and encoding
US8465473B2 (en) * 2007-03-28 2013-06-18 Novartis Ag Surgical footswitch with movable shroud
AR072011A1 (es) * 2008-06-05 2010-07-28 Alcon Res Ltd Red inalambrica y metodos de comunicacion inalambrica para consolas quirurgicas oftalmicas
DE102018101439B4 (de) * 2018-01-23 2020-01-09 RF360 Europe GmbH Substratträger für einen Reflow-Ofen und Verwendung eines Substratträgers

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4263503A (en) * 1979-09-25 1981-04-21 Bianco James S Bar code label protection device
GB2153334B (en) * 1984-01-30 1987-06-24 John Gordon Bailey Identification means for containers
US4625101A (en) * 1984-02-27 1986-11-25 The Goodyear Tire & Rubber Company Bar code configuration and method of molding
WO1986003314A1 (en) * 1984-11-27 1986-06-05 Kappner Helmut A Process and arrangements for the identification marking and recognition of objects
JPS61257820A (ja) * 1985-05-09 1986-11-15 Fuji Facom Corp コンベアライン制御方式
EP0220380A2 (en) * 1985-07-05 1987-05-06 Irving N. Arnold Associates, Ltd. Data storage and retrieval apparatus for controlling systems
JPS62206695A (ja) * 1986-03-07 1987-09-11 Nec Corp バ−コ−ドラベル
JPS63108482A (ja) * 1986-10-27 1988-05-13 Matsushita Electric Works Ltd ソ−スマ−キングの表示方法

Also Published As

Publication number Publication date
DE68926782D1 (de) 1996-08-08
ATE140090T1 (de) 1996-07-15
US4833306A (en) 1989-05-23
EP0382797A1 (en) 1990-08-22
DE68926782T2 (de) 1996-10-31
KR930012138B1 (ko) 1993-12-24
CA1314986C (en) 1993-03-23
EP0382797B1 (en) 1996-07-03
EP0382797A4 (en) 1992-05-27
JPH03500700A (ja) 1991-02-14
WO1989011702A1 (en) 1989-11-30

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