KR900014855A - 박층들의 굴절률과 두께 결정방법 - Google Patents

박층들의 굴절률과 두께 결정방법 Download PDF

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Publication number
KR900014855A
KR900014855A KR1019900003787A KR900003787A KR900014855A KR 900014855 A KR900014855 A KR 900014855A KR 1019900003787 A KR1019900003787 A KR 1019900003787A KR 900003787 A KR900003787 A KR 900003787A KR 900014855 A KR900014855 A KR 900014855A
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KR
South Korea
Prior art keywords
thickness
layers
refractive index
layer
inspected
Prior art date
Application number
KR1019900003787A
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English (en)
Inventor
히켈 베르너
크놀 볼프강
Original Assignee
방에르트, 바르츠
바스트 악티엔게젤샤프트
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 방에르트, 바르츠, 바스트 악티엔게젤샤프트 filed Critical 방에르트, 바르츠
Publication of KR900014855A publication Critical patent/KR900014855A/ko

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

내용 없음.

Description

박층들의 굴절률과 두께 결정방법
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제1도는 본 발명에 이용된 표면 플라즈몬 현미법을 도시한 개략도,
제2도는 굴절률과 두께에 관한 결정체와 등방질 영역의 특징을 나타내는 도면.

Claims (5)

  1. 입사 레이저 비임의 입사각의 작용으로 표면 플라즈몬 현미법에 의해서, 고체 지지부에 부착된 층들에 대한 굴절률과 두께 측정결과를 기록하는 것에 의하면 1㎛이하 두께의 층들에 대한 굴절률과 두께를 결정하는 방법.
  2. 제1항에 있어서, 층들의 두께는 두께 0.1㎜ 이상에서의 수직 분해능과 동시에 두께 5 ㎛ 이상에서의 측변 분해능에 의해 결정되는 것을 특징으로 하는 1㎛ 이하 두께의 층들에 대한 굴절률과 두께를 결정하는 방법.
  3. 상기 항들중 어느 한 항에 있어서, 검사할 상기 층들은 금속이나 반도체층에 부착되었던 것을 특징으로 하는 1㎛ 이하의 두께의 층들에 대한 굴절률과 두께를 결정하는 방법.
  4. 상기 항들중 어느 한 항에 있어서, 검사할 층의 두께는 화학적으로, 물리화학적으로 또는 생물학적으로 활동하는 것을 특징으로 하는 1㎛ 이하의 두께의 층들에 대한 굴절률과 두께를 결정하는 방법.
  5. 제4항에 있어서, 검사할 상기 층은 시간 의존성인 간지기를 설치하는 데 사용되는 것을 특징으로 하는 1 ㎛ 이하의 두께의 층들에 대한 굴절률과 두께를 결정하는 방법.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019900003787A 1989-03-21 1990-03-21 박층들의 굴절률과 두께 결정방법 KR900014855A (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DEP3909144.9 1989-03-21
DE3909144A DE3909144A1 (de) 1989-03-21 1989-03-21 Verfahren zur bestimmung von brechungsindex und schichtdicke duenner schichten

Publications (1)

Publication Number Publication Date
KR900014855A true KR900014855A (ko) 1990-10-25

Family

ID=6376799

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019900003787A KR900014855A (ko) 1989-03-21 1990-03-21 박층들의 굴절률과 두께 결정방법

Country Status (9)

Country Link
US (1) US5237392A (ko)
EP (1) EP0388874B1 (ko)
JP (1) JPH02285205A (ko)
KR (1) KR900014855A (ko)
AT (1) ATE105403T1 (ko)
AU (1) AU622992B2 (ko)
CA (1) CA2012598A1 (ko)
DE (2) DE3909144A1 (ko)
FI (1) FI98660C (ko)

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SE9700384D0 (sv) * 1997-02-04 1997-02-04 Biacore Ab Analytical method and apparatus
US6052191A (en) * 1998-10-13 2000-04-18 Northrop Grumman Corporation Coating thickness measurement system and method of measuring a coating thickness
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US6683695B1 (en) 1999-07-21 2004-01-27 Electronic Design To Market, Inc. Method and apparatus for detecting properties of reflective transparent surface coatings on a sheet of transparent material
DE10008006C2 (de) 2000-02-22 2003-10-16 Graffinity Pharm Design Gmbh SPR-Sensor und SPR-Sensoranordnung
GB0013139D0 (en) * 2000-05-30 2000-07-19 Univ Nottingham Improvements in and relating to microscopy
US6731380B2 (en) 2001-06-18 2004-05-04 Applied Optics Center Of Delaware, Inc. Method and apparatus for simultaneous measurement of the refractive index and thickness of thin films
DE10163657B4 (de) * 2001-12-21 2008-05-08 Gedig, Erk, Dr. Vorrichtung und Verfahren zur Untersuchung dünner Schichten
US7088449B1 (en) * 2002-11-08 2006-08-08 The Board Of Trustees Of The Leland Stanford Junior University Dimension measurement approach for metal-material
US6970256B1 (en) * 2003-04-16 2005-11-29 Jackson John H Apparatus and methods for measuring thickness and refractive index
US7362442B2 (en) * 2004-02-20 2008-04-22 The University Of Maryland Far-field optical microscope with a nanometer-scale resolution based on the in-plane image magnification by surface plasmon polaritons
US7417749B1 (en) 2004-09-01 2008-08-26 Electric Design To Market, Inc. Method and apparatus for protecting an optical transmission measurement when sensing transparent materials
US20060054843A1 (en) * 2004-09-13 2006-03-16 Electronic Design To Market, Inc. Method and apparatus of improving optical reflection images of a laser on a changing surface location
US7327445B2 (en) * 2005-06-30 2008-02-05 The Board Of Trustees Of The Leland Stanford Junior University Enhanced surface plasmon resonance sensor using Goos-Hänchen effect
US20070177150A1 (en) * 2006-01-27 2007-08-02 Gruhlke Russell W Surface plasmon resonance biosensor using coupled surface plasmons to decrease width of reflectivity dip
US7652760B1 (en) 2006-04-05 2010-01-26 Electronic Design To Market, Inc. System for detecting coatings on transparent or semi-transparent materials
US7583368B1 (en) 2006-04-05 2009-09-01 Electronic Design To Market, Inc. Method of enhancing measurement of stress in glass
DE102008041825A1 (de) * 2008-09-05 2010-03-11 Manroland Ag Zerstörungsfreies Prüfverfahren des Aushärtungs- oder Trocknungsgrades von Farben und Lacken
US8530243B2 (en) 2009-04-20 2013-09-10 Bio-Rad Laboratories Inc. Non-scanning SPR system
US9360302B2 (en) * 2011-12-15 2016-06-07 Kla-Tencor Corporation Film thickness monitor
CN112683182B (zh) * 2020-12-30 2022-12-06 国高材高分子材料产业创新中心有限公司 一种金属线镀层厚度的测试方法

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US4625114A (en) * 1985-07-15 1986-11-25 At&T Technologies, Inc. Method and apparatus for nondestructively determining the characteristics of a multilayer thin film structure
GB8618159D0 (en) * 1986-07-25 1986-09-03 Pa Consulting Services Spectrometer based instruments
GB2197065A (en) * 1986-11-03 1988-05-11 Stc Plc Optical sensor device
CA1321488C (en) * 1987-08-22 1993-08-24 Martin Francis Finlan Biological sensors
DE3906521A1 (de) * 1989-03-02 1990-09-13 Basf Ag Verfahren zum auslesen von informationen, die in duennen polymerschichten gespeichert sind
DE3909143A1 (de) * 1989-03-21 1990-09-27 Basf Ag Verfahren zur untersuchung von oberflaechenstrukturen

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20030047567A (ko) * 2001-12-11 2003-06-18 한국전자통신연구원 표면 플라즈몬 공명 센서 시스템

Also Published As

Publication number Publication date
DE59005573D1 (de) 1994-06-09
FI98660B (fi) 1997-04-15
US5237392A (en) 1993-08-17
AU622992B2 (en) 1992-04-30
ATE105403T1 (de) 1994-05-15
JPH02285205A (ja) 1990-11-22
DE3909144A1 (de) 1990-09-27
EP0388874B1 (de) 1994-05-04
FI901418A0 (fi) 1990-03-21
CA2012598A1 (en) 1990-09-21
EP0388874A3 (de) 1992-05-20
FI98660C (fi) 1997-07-25
EP0388874A2 (de) 1990-09-26
AU5147590A (en) 1990-09-27

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