KR900010426A - 고투광성 방진체(high light-transmissive dust-proof body) 및 그의 제조방법 - Google Patents
고투광성 방진체(high light-transmissive dust-proof body) 및 그의 제조방법 Download PDFInfo
- Publication number
- KR900010426A KR900010426A KR1019890018451A KR890018451A KR900010426A KR 900010426 A KR900010426 A KR 900010426A KR 1019890018451 A KR1019890018451 A KR 1019890018451A KR 890018451 A KR890018451 A KR 890018451A KR 900010426 A KR900010426 A KR 900010426A
- Authority
- KR
- South Korea
- Prior art keywords
- refractive index
- film
- index layer
- layer
- light
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/62—Pellicles, e.g. pellicle assemblies, e.g. having membrane on support frame; Preparation thereof
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
- G02B1/11—Anti-reflection coatings
- G02B1/113—Anti-reflection coatings using inorganic layer materials only
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
- Y10T428/24942—Structurally defined web or sheet [e.g., overall dimension, etc.] including components having same physical characteristic in differing degree
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/26—Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension
- Y10T428/263—Coating layer not in excess of 5 mils thick or equivalent
- Y10T428/264—Up to 3 mils
- Y10T428/265—1 mil or less
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Chemical & Material Sciences (AREA)
- Inorganic Chemistry (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Laminated Bodies (AREA)
- Glass Compositions (AREA)
- Surface Treatment Of Optical Elements (AREA)
- Surface Treatment Of Glass (AREA)
Abstract
내용 없음
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제1도는 본 발명의 고투광성 방진체의 일실시예의 횡단면도, 제2(a), 2(b) 및 2(c)도는 본 발명의 투광막의 제1실시예의 단면도, 제3(a) 및 3(b)도는 본 발명의 투광막의 제2실시예의 단면도.
Claims (8)
- 마스크기판상에 장착되는 지지프레임과, 이 지지프레임상에 투명투광막을 구비하며, 여기서 상기 투광막은 파장 240~500㎜의 투과광을 평균투과율 85% 이상으로 투과시킬 수 있는 두께 0.2㎛~10㎛의 무기막인 것이 특징인 고투광성 방진체.
- 제1항에서, 상기 무기막이 졸-겔법에 의해 제조되는 것이 특징인 고투과성 방진체.
- 제1항 또는 2항에서, 상기 무기막이 실리콘산화물을 주성분으로하여 조성된 것이 특징인 고투광성 방진체.
- 제1항, 제2항 또는 3항에서, 상기 무기막상에 반사방지막이 증착되는 것이 특징인 고투광성 방진체.
- 마스크기판상에 장착되는 지지프레임과, 이 지지프레임상에 투명투광막을 구비하며, 여기서 상기 투명투광막은(ⅰ) 저굴절률층/고굴절률층/기층(base layer)의 3층 구조, 또는 (ⅱ) 저굴절률층/고굴절률층/기층/고굴절률층/저굴절률층의 5층구조를 가지며, 여기서 상기 고굴절률층은 무기층이고, 상기 저굴절률층은 유기중합체인 것을 특징으로 하는 고투광성 방진체.
- 제5항에서, 상기 무기층이 PbCl2,PbF2, MgO, CsBr, TiO2, Sb2O3, Al2O3, In2O3, La2O3, CiO, ZrO2, SnO2, CeF3LaF3으로 이루어지는 그룹에서 선택된 적어도 하나의 화합물을 주성분으로 하는 것이 특징인 고투광성 방진체.
- 제1항에서, 상기 기층의 막두께가 0.5~10㎛인 것이 특징인 고투광성 방진체.
- 금속알콕시드의 가수분해에 의해 형성된 졸을 도포하여 막을 형성하는 공정, 이 막을 가열 및 소성하여 무기막을 형성함과 동시에 분해처리에 의해 유기막들을 제거하는 과정으로 구성된 제1항 기재의 고투광성 방진체의 제조방법.※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP88-314611 | 1988-12-13 | ||
JP63314612A JPH02158735A (ja) | 1988-12-13 | 1988-12-13 | 高光線透過性防塵体 |
JP88-314612 | 1988-12-13 | ||
JP31461188A JP2733483B2 (ja) | 1988-12-13 | 1988-12-13 | 高光線透過性防塵体の製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR900010426A true KR900010426A (ko) | 1990-07-07 |
KR0151386B1 KR0151386B1 (ko) | 1998-12-15 |
Family
ID=26567999
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019890018451A KR0151386B1 (ko) | 1988-12-13 | 1989-12-13 | 고투광성 방진체 및 그의 제조방법 |
Country Status (7)
Country | Link |
---|---|
US (1) | US5246767A (ko) |
EP (1) | EP0373923B1 (ko) |
KR (1) | KR0151386B1 (ko) |
AT (1) | ATE119294T1 (ko) |
CA (1) | CA2005096C (ko) |
DE (1) | DE68921444T2 (ko) |
MY (1) | MY106942A (ko) |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2714450B2 (ja) * | 1989-08-10 | 1998-02-16 | ダイセル化学工業株式会社 | 防塵膜 |
FR2680245B1 (fr) * | 1991-08-06 | 1994-03-25 | Fabrication Instruments Mesure | Detecteur photoelectrique a transfert de charges a qualite d'image amelioree. |
JP2790946B2 (ja) * | 1992-08-21 | 1998-08-27 | 信越化学工業株式会社 | ペリクル膜の製造方法 |
US5446587A (en) * | 1992-09-03 | 1995-08-29 | Samsung Electronics Co., Ltd. | Projection method and projection system and mask therefor |
US5882773A (en) * | 1993-10-13 | 1999-03-16 | The Regents Of The University Of California | Optical coatings of variable refractive index and high laser-resistance from physical-vapor-deposited perfluorinated amorphous polymer |
US5728508A (en) * | 1994-03-14 | 1998-03-17 | Shin-Etsu Chemical Co., Ltd. | Method of forming resist pattern utilizing fluorinated resin antireflective film layer |
AU7451600A (en) | 1999-09-30 | 2001-04-30 | Nikon Corporation | Optical device with multilayer thin film and aligner with the device |
EP1227344A4 (en) * | 1999-11-05 | 2005-08-31 | Asahi Glass Co Ltd | ANTI-REFLECTION BASE FOR UV AND VACUUM UV AREAS |
EP1248148A1 (en) * | 2001-04-05 | 2002-10-09 | Asm Lithography B.V. | Lithographic patterning means with protective layer |
DE102004050371A1 (de) | 2004-09-30 | 2006-04-13 | Osram Opto Semiconductors Gmbh | Optoelektronisches Bauelement mit einer drahtlosen Kontaktierung |
US7935547B2 (en) | 2006-02-17 | 2011-05-03 | Freescale Semiconductor, Inc. | Method of patterning a layer using a pellicle |
JP2010152268A (ja) * | 2008-12-26 | 2010-07-08 | Seiko Epson Corp | 液晶表示装置及びプロジェクター |
Family Cites Families (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS53135348A (en) * | 1977-04-30 | 1978-11-25 | Toshiba Corp | Etching method for multilayer film |
US4269916A (en) * | 1978-07-03 | 1981-05-26 | Polaroid Corporation | Photographic prints utilizing lamellar pigment materials |
US4333983A (en) * | 1980-04-25 | 1982-06-08 | Optical Coating Laboratory, Inc. | Optical article and method |
US4377613A (en) * | 1981-09-14 | 1983-03-22 | Gordon Roy G | Non-iridescent glass structures |
JPS60237450A (ja) * | 1984-05-11 | 1985-11-26 | Asahi Chem Ind Co Ltd | 非反射性フオトマスク・レチクル用防塵カバ−体及びその製造方法 |
DE3425144A1 (de) * | 1984-07-07 | 1986-01-16 | Hochtemperatur-Reaktorbau GmbH, 4600 Dortmund | In der kaverne eines druckbehaelters angeordnete kernreaktoranlage |
JPS6153601A (ja) * | 1984-08-24 | 1986-03-17 | Asahi Chem Ind Co Ltd | 高性能なフオトマスク・レチクル用防塵カバ−体 |
JPS61209449A (ja) * | 1985-03-14 | 1986-09-17 | Asahi Chem Ind Co Ltd | 非反射性ペリクル体 |
US4704299A (en) * | 1985-11-06 | 1987-11-03 | Battelle Memorial Institute | Process for low temperature curing of sol-gel thin films |
US4759990A (en) * | 1985-11-27 | 1988-07-26 | Yen Yung Tsai | Composite optical element including anti-reflective coating |
JPS62288842A (ja) * | 1986-06-09 | 1987-12-15 | Tosoh Corp | フオトマスク,レチクルの保護防塵体 |
JPS636553A (ja) * | 1986-06-27 | 1988-01-12 | Canon Inc | レチクルの塵埃付着防止方法 |
JPS6358739A (ja) * | 1986-08-29 | 1988-03-14 | Hitachi Ltd | 表示装置用面板 |
US4854670A (en) * | 1986-12-17 | 1989-08-08 | Gte Products Corporation | Wide angle optical filters |
JPS63262651A (ja) * | 1987-04-21 | 1988-10-28 | Seiko Epson Corp | フオトマスク保護膜 |
US4769058A (en) * | 1987-09-14 | 1988-09-06 | Glasstech, Inc. | Method of making a smooth silica glass body |
JP2625453B2 (ja) * | 1987-12-09 | 1997-07-02 | セントラル硝子 株式会社 | パターン膜形成法 |
US4929278A (en) * | 1988-01-26 | 1990-05-29 | United States Department Of Energy | Sol-gel antireflective coating on plastics |
US4977013A (en) * | 1988-06-03 | 1990-12-11 | Andus Corporation | Tranparent conductive coatings |
US4965121A (en) * | 1988-09-01 | 1990-10-23 | The Boc Group, Inc. | Solar control layered coating for glass windows |
-
1989
- 1989-12-11 CA CA002005096A patent/CA2005096C/en not_active Expired - Fee Related
- 1989-12-12 MY MYPI89001741A patent/MY106942A/en unknown
- 1989-12-12 US US07/449,000 patent/US5246767A/en not_active Expired - Fee Related
- 1989-12-13 KR KR1019890018451A patent/KR0151386B1/ko not_active IP Right Cessation
- 1989-12-13 DE DE68921444T patent/DE68921444T2/de not_active Expired - Fee Related
- 1989-12-13 AT AT89313051T patent/ATE119294T1/de not_active IP Right Cessation
- 1989-12-13 EP EP89313051A patent/EP0373923B1/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
US5246767A (en) | 1993-09-21 |
EP0373923A2 (en) | 1990-06-20 |
ATE119294T1 (de) | 1995-03-15 |
MY106942A (en) | 1995-08-30 |
DE68921444D1 (de) | 1995-04-06 |
CA2005096A1 (en) | 1990-06-13 |
DE68921444T2 (de) | 1995-06-29 |
KR0151386B1 (ko) | 1998-12-15 |
EP0373923B1 (en) | 1995-03-01 |
EP0373923A3 (en) | 1991-04-24 |
CA2005096C (en) | 1999-03-23 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
DE69700851D1 (de) | Widerstandsfähige gesputterte Glasartikel niedriger Emissivität die das Licht sichtlich nahezu farblos spiegeln, daraus hergestellte Isolierverglasungen und Verfahren zu deren Herstellung | |
KR900010426A (ko) | 고투광성 방진체(high light-transmissive dust-proof body) 및 그의 제조방법 | |
AU2003288275A1 (en) | Optical filter | |
BR9405295A (pt) | Vidraça e processo de obtenção da mesma. | |
EP0204562A3 (en) | Transparent photovoltaic module | |
DE69723392D1 (de) | Glasscheibe mit antireflektierender beschichtung | |
KR920008871A (ko) | 고광선 투과성 방진막 그 제조방법 및 방진체 | |
CA2157070A1 (en) | Optical lens of transparent plastic | |
ATE335211T1 (de) | Entspiegelungsfilm für fenster einer transportvorrichtung, glas mit entspiegelungsfilm,laminiertes glas und herstellungsverfahren | |
KR890004176A (ko) | 빛간섭막 | |
DE69315891D1 (de) | Glasscheibe mit einer Funktionsschicht | |
AU652452B2 (en) | Plastics packaged optical fibre | |
KR900008609A (ko) | 칼라 전기 램프 | |
KR880003388A (ko) | 표시장치용면판 | |
DE3778181D1 (de) | Hochleistungs optischer faser. | |
EP0794452A3 (en) | Display apparatus and process for production thereof | |
MY119036A (en) | Display device | |
JPS6435502A (en) | Reflecting mirror made of multi-layered films | |
JPS5559406A (en) | Color separating filter | |
JPS56135809A (en) | Filter for astronominal observation | |
JPS59144614U (ja) | 色感度補正具 | |
DE69121046D1 (de) | Organischer nichtlinear-optischer kristall mit schichtstruktur und seine herstellung | |
JPS5552001A (en) | Antireflection film of optical parts made of transparent synthetic resin | |
KR940000879A (ko) | 고굴절률 광학부품의 다층 반사 방지막 | |
RU93004782A (ru) | Состав стекла |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A201 | Request for examination | ||
E902 | Notification of reason for refusal | ||
E701 | Decision to grant or registration of patent right | ||
GRNT | Written decision to grant | ||
LAPS | Lapse due to unpaid annual fee |