KR900007088A - 전기장치의 형성방법 - Google Patents

전기장치의 형성방법 Download PDF

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KR900007088A
KR900007088A KR1019890014618A KR890014618A KR900007088A KR 900007088 A KR900007088 A KR 900007088A KR 1019890014618 A KR1019890014618 A KR 1019890014618A KR 890014618 A KR890014618 A KR 890014618A KR 900007088 A KR900007088 A KR 900007088A
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lead frame
gas
electrical
vacuum chamber
electrical device
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KR1019890014618A
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KR930007519B1 (ko
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슌페이 야마자키
가즈오 우라다
나오기 히로세
이다루 고야마
신지 이마도오
가즈히사 나카시다
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슌페이 야마자키
세미콘덕터 에너지 라보라터리 캄파니 리미티드
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Priority claimed from JP63256701A external-priority patent/JP2681167B2/ja
Priority claimed from JP63256702A external-priority patent/JPH02102564A/ja
Application filed by 슌페이 야마자키, 세미콘덕터 에너지 라보라터리 캄파니 리미티드 filed Critical 슌페이 야마자키
Publication of KR900007088A publication Critical patent/KR900007088A/ko
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Publication of KR930007519B1 publication Critical patent/KR930007519B1/ko

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Abstract

내용 없음

Description

전기장치의 형성방법
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제2도는 본 발명의 실행시 사용하기 위한 플라즈마 CVD 장치를 나타내는 개략적인 다이어그램.
제3(A)도는 12개의 IC장치를 지지하기 위한 리드 프레임 구조를 나타내는 개략적인 평면도.
제3(B)도는 제3(A)도에서 설명된 12단위 리드 프레임중 한 단위를 나타내는 확대도.
제5(A)도 내지 제5(C)도는 본 발명에 따른 IC장치에서 Si,N,C 및 O의 심도 곡선을 나타내는 그래프.

Claims (7)

  1. 몰딩재로서 밀봉된 전기장치의 형성 방법으로서, 상기 방법은: 유기 도전성 페이스트에 의해 리드 프레임 상에 전기장치를 설치하고; 상기 전기장치와 상기 리드 프레임사이에 전기 연결부를 형성하고; 진공 챔버내에 상기 장치를 수반하는 상기 리드 프레임을 배치하고, 상기 유기 도전성 페이스트의 증발 가스를 제거하기 위해 10-2토르보다 작은 압력으로 상기 진공 챔버를 진공상태로 하고; 상기 전기장치를 밀봉시키는 단계로 구성되는 것을 특징으로 하는 전기장치의 형성방법.
  2. 제1항에 있어서, 진공화 단계후 그리고 밀봉단계전에 보호 필름을 용착시키는 단계를 포함하는 것을 특징으로 하는 전기장치의 형성방법.
  3. 제1항에 있어서, 상기 전기장치는 밀봉 단계에 앞서 5분 이상 10-2토르 이하의 상기 압력에서 보존되는 것을 특징으로 하는 전기장치의 형성방법.
  4. 몰딩재로서 전기장치의 형성방법으로서, 상기 방법은; 유기 도전성 페이스트에 의해 리드 프레임상에 전기 장치를 설치하고; 상기 전기장치와 상기 리드 프레임 사이에 전기 연결부를 형성하고; 진공 쳄버에 상기 장치를 수반하는 상기 리드 프레임을 배치시키고; 회분화제 가스를 주입시키고; 상기 진공쳄버로 전기 에너지를 입력시키고 플라즈마 회분화를 수행하기 위해 플라즈마로 상기 회분화제 가스를 전환시키고 상기 진공쳄버로부터 상기 전기장치를 제거하고; 상기 전기장치를 밀봉시키는 단계로 구성되는 것을 특징으로 하는 전기장치의 형성방법.
  5. 제4항에 있어서, 상기 회분화제 가스는 산화가스인 것을 특징으로 하는 전기장치의 형성방법.
  6. 제5항에 있어서, 상기 회분화제 가스는 산소 또는 N2O로 구성되는 것을 특징으로 하는 전기장치의 형성방법.
  7. 제4항에 있어서, 상기 쳄버로 세척가스를 주입시키고 상기 장치에 대해 플라즈마 세척을 수행하기 위해 상기 환원가스로 에너지를 입력시키는 단계를 포함하는 것을 특징으로 하는 전기장치의 형성방법.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019890014618A 1988-10-12 1989-10-12 전기장치의 패키지(package) 방법 KR930007519B1 (ko)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP63256701A JP2681167B2 (ja) 1988-10-12 1988-10-12 電子装置作製方法
JP63256702A JPH02102564A (ja) 1988-10-12 1988-10-12 電子装置およびその作製方法
JP63-256701 1988-10-12
JP63-256702 1988-10-12

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KR900007088A true KR900007088A (ko) 1990-05-09
KR930007519B1 KR930007519B1 (ko) 1993-08-12

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MY165522A (en) * 2011-01-06 2018-04-02 Carsem M Sdn Bhd Leadframe packagewith die mounted on pedetal that isolates leads

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JPS57111034A (en) * 1980-12-10 1982-07-10 Hitachi Ltd Semiconductor device and its manufacture

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EP0363936A3 (en) 1990-09-19
EP0363936B1 (en) 1996-03-27
DE68926086D1 (de) 1996-05-02
CN1041849A (zh) 1990-05-02
CN1023165C (zh) 1993-12-15
EP0363936A2 (en) 1990-04-18
DE68926086T2 (de) 1996-08-14

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