KR890702240A - 내구성 패턴 형성용 부재 - Google Patents

내구성 패턴 형성용 부재

Info

Publication number
KR890702240A
KR890702240A KR1019880701566A KR880701566A KR890702240A KR 890702240 A KR890702240 A KR 890702240A KR 1019880701566 A KR1019880701566 A KR 1019880701566A KR 880701566 A KR880701566 A KR 880701566A KR 890702240 A KR890702240 A KR 890702240A
Authority
KR
South Korea
Prior art keywords
forming
durability
compound
general formula
pattern according
Prior art date
Application number
KR1019880701566A
Other languages
English (en)
Other versions
KR930001852B1 (ko
Inventor
시게오 모리
아쯔노리 야구찌
Original Assignee
홍고오 므쯔미
이데미쯔세끼유 가가꾸 가부시기가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP19963687A external-priority patent/JPH077207B2/ja
Application filed by 홍고오 므쯔미, 이데미쯔세끼유 가가꾸 가부시기가이샤 filed Critical 홍고오 므쯔미
Publication of KR890702240A publication Critical patent/KR890702240A/ko
Application granted granted Critical
Publication of KR930001852B1 publication Critical patent/KR930001852B1/ko

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/38—Masks having auxiliary features, e.g. special coatings or marks for alignment or testing; Preparation thereof
    • G03F1/48—Protective coatings
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S428/00—Stock material or miscellaneous articles
    • Y10S428/901—Printed circuit
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S428/00—Stock material or miscellaneous articles
    • Y10S428/913—Material designed to be responsive to temperature, light, moisture
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/21—Circular sheet or circular blank
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/23—Sheet including cover or casing
    • Y10T428/239—Complete cover or casing
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24802—Discontinuous or differential coating, impregnation or bond [e.g., artwork, printing, retouched photograph, etc.]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24802—Discontinuous or differential coating, impregnation or bond [e.g., artwork, printing, retouched photograph, etc.]
    • Y10T428/24851—Intermediate layer is discontinuous or differential
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24802—Discontinuous or differential coating, impregnation or bond [e.g., artwork, printing, retouched photograph, etc.]
    • Y10T428/24851—Intermediate layer is discontinuous or differential
    • Y10T428/24868—Translucent outer layer
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24802—Discontinuous or differential coating, impregnation or bond [e.g., artwork, printing, retouched photograph, etc.]
    • Y10T428/24851—Intermediate layer is discontinuous or differential
    • Y10T428/24868—Translucent outer layer
    • Y10T428/24876—Intermediate layer contains particulate material [e.g., pigment, etc.]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24802—Discontinuous or differential coating, impregnation or bond [e.g., artwork, printing, retouched photograph, etc.]
    • Y10T428/24917—Discontinuous or differential coating, impregnation or bond [e.g., artwork, printing, retouched photograph, etc.] including metal layer
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/31504—Composite [nonstructural laminate]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/31504—Composite [nonstructural laminate]
    • Y10T428/31855—Of addition polymer from unsaturated monomers
    • Y10T428/31909—Next to second addition polymer from unsaturated monomers
    • Y10T428/31928—Ester, halide or nitrile of addition polymer

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Paints Or Removers (AREA)
  • Materials For Photolithography (AREA)
  • Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
  • Non-Metallic Protective Coatings For Printed Circuits (AREA)

Abstract

내용 없음

Description

내구성 패턴 형성용 부재
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음

Claims (9)

  1. 소망형상의 패턴이 형성된 포토마스크기판 또는 리스필름 기재위에, 경화성 화합물의 경화보호막을 형성해서 이루어진 것을 특징으로 하는 내구성 패턴형성용 부재.
  2. 제 1 항에 있어서, 상기 포토마스크기판이, 청판유리 또는 백판유리인 내구성 패턴형성용 기판.
  3. 제 1 항에 있어서, 상기 리스필름기재가 폴리에스테르인 내구성 패턴 형성용 부재.
  4. 제 1 항에 있어서, 상기 경화성 화합물이 경화성 포스파젠화합물인 내구성 패턴 형성용 부재.
  5. 제 4 항에 있어서, 상기 경화성 포스파젠화합물이, 일반식(I)
    (식중의 X 및 Y는, 각각 중합경화성기 또는 비중합경화성기로서, 그것들은 동일해도 좋고, 서로 상이해도 좋지만, 적어도 한 쪽은 중합경화성기이고, P 및 q는 각각 0 이상의 수이고, 그들의 합계는 2이며, n은 3 이상의 정수이다)로 표시되는 화합물인 내구성 패턴형성용 부재.
  6. 제 5 항에 있어서, 상기 일반식(I)에 있어서의 X 및 Y가, 일반식(II)
    (식중의 R는 탄소수 1∼12의 알킬렌기, Z는 수소원자 또는 메틸기이다)로 표시되는 기인 내구성 패턴형성용 부재.
  7. 제 6 항에 있어서, 상기 일반식(I)에 있어서의 X 및 Y가 메타크릴레이트류 또는 아크릴 레이트 류속의 수산기로부터 수소원자를 제외한 잔기인 내구성 패턴 형성용 부재.
  8. 제 7 항에 있어서, 상기 메타크릴레이트류가 2-히드록시에틸메타크릴레이트인 내구성 패턴 형성용 부재.
  9. 제 7 항에 있어서, 상기 아크릴레이트류가 2-히드록시에틸아크릴레이트인 내구성 패턴 형성용 부재.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019880701566A 1987-08-10 1988-06-06 내구성 패턴 형성용부재 KR930001852B1 (ko)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP87-199636 1987-08-10
JP62-199636 1987-08-10
JP19963687A JPH077207B2 (ja) 1987-05-16 1987-08-10 耐久性パタ−ン形成用部材
PCT/JP1988/000546 WO1989001650A1 (en) 1987-08-10 1988-06-06 Durable patterning member

Publications (2)

Publication Number Publication Date
KR890702240A true KR890702240A (ko) 1989-12-23
KR930001852B1 KR930001852B1 (ko) 1993-03-15

Family

ID=16411142

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019880701566A KR930001852B1 (ko) 1987-08-10 1988-06-06 내구성 패턴 형성용부재

Country Status (4)

Country Link
US (1) US5051295A (ko)
EP (1) EP0328648A4 (ko)
KR (1) KR930001852B1 (ko)
WO (1) WO1989001650A1 (ko)

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JPH034420A (ja) * 1989-05-31 1991-01-10 Idemitsu Petrochem Co Ltd タッチパネル
KR100343080B1 (ko) * 1990-06-20 2002-12-28 다이니폰 인사츠 가부시키가이샤 컬러필터및그제조방법
EP0464749B1 (en) * 1990-07-02 1995-10-04 Canon Kabushiki Kaisha Image holding member
JP4601769B2 (ja) * 2000-05-25 2010-12-22 株式会社きもと フォトマスク用保護膜転写シート及び保護膜転写方法
DE10255664B4 (de) * 2002-11-28 2006-05-04 Kodak Polychrome Graphics Gmbh Für lithographische Druckplatten geeignete Photopolymerzusammensetzung
US20040265704A1 (en) * 2003-06-26 2004-12-30 Taiwan Semiconductor Manufacturing Co., Ltd. Multiple-exposure defect elimination
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AU2011222600A1 (en) 2010-03-04 2012-10-04 Avery Dennison Corporation Non-PVC film and non-PVC film laminate
JP6084353B2 (ja) * 2010-12-28 2017-02-22 太陽インキ製造株式会社 光硬化性樹脂組成物の製造方法、ドライフィルムの製造方法、硬化物の製造方法およびプリント配線板の製造方法
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Also Published As

Publication number Publication date
EP0328648A1 (en) 1989-08-23
WO1989001650A1 (en) 1989-02-23
EP0328648A4 (en) 1991-05-15
US5051295A (en) 1991-09-24
KR930001852B1 (ko) 1993-03-15

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