KR890011020A - 실리콘 웨이퍼의 수평 이송장치 - Google Patents

실리콘 웨이퍼의 수평 이송장치 Download PDF

Info

Publication number
KR890011020A
KR890011020A KR1019880017277A KR880017277A KR890011020A KR 890011020 A KR890011020 A KR 890011020A KR 1019880017277 A KR1019880017277 A KR 1019880017277A KR 880017277 A KR880017277 A KR 880017277A KR 890011020 A KR890011020 A KR 890011020A
Authority
KR
South Korea
Prior art keywords
wafer
feeder
horizontal
carrier
silicon wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
KR1019880017277A
Other languages
English (en)
Korean (ko)
Inventor
폴리 버나드
친촐 제라드
Original Assignee
레시프 에스.에이(소시에떼 아노님)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 레시프 에스.에이(소시에떼 아노님) filed Critical 레시프 에스.에이(소시에떼 아노님)
Publication of KR890011020A publication Critical patent/KR890011020A/ko
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67778—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving loading and unloading of wafers
    • H01L21/67781—Batch transfer of wafers

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Load-Engaging Elements For Cranes (AREA)
  • Specific Conveyance Elements (AREA)
KR1019880017277A 1987-12-22 1988-12-22 실리콘 웨이퍼의 수평 이송장치 Withdrawn KR890011020A (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR8718454A FR2624839B1 (fr) 1987-12-22 1987-12-22 Appareil pour le transfert horizontal de plaquettes de silicium notamment
FR8718454 1987-12-22

Publications (1)

Publication Number Publication Date
KR890011020A true KR890011020A (ko) 1989-08-12

Family

ID=9358503

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019880017277A Withdrawn KR890011020A (ko) 1987-12-22 1988-12-22 실리콘 웨이퍼의 수평 이송장치

Country Status (4)

Country Link
JP (1) JPH0214546A (enrdf_load_stackoverflow)
KR (1) KR890011020A (enrdf_load_stackoverflow)
DE (1) DE3843369A1 (enrdf_load_stackoverflow)
FR (1) FR2624839B1 (enrdf_load_stackoverflow)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH680317A5 (enrdf_load_stackoverflow) * 1990-03-05 1992-07-31 Tet Techno Investment Trust
DE4142671A1 (de) * 1991-12-21 1993-06-24 Wabco Westinghouse Fahrzeug Einrichtung zur messung einer verformung eines bauteils
JPH0662542U (ja) * 1993-01-29 1994-09-02 信越半導体株式会社 ウエーハカセット
US5590996A (en) * 1994-10-13 1997-01-07 Semitherm Wafer transfer apparatus
DE19535617A1 (de) * 1995-09-25 1997-03-27 Siemens Ag System zum Transport von Testboards
DE19845504A1 (de) * 1998-10-02 2000-04-20 Wacker Siltronic Halbleitermat Hordenaufnahmevorrichtung
FR3075771A1 (fr) * 2017-12-21 2019-06-28 Commissariat A L'energie Atomique Et Aux Energies Alternatives Systeme de transfert de plusieurs plaques entre deux paniers

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4534695A (en) * 1983-05-23 1985-08-13 Eaton Corporation Wafer transport system
US4536122A (en) * 1983-08-22 1985-08-20 Trilogy Computer Development Partners, Ltd. Wafer transfer device
JPS636857A (ja) * 1986-06-26 1988-01-12 Fujitsu Ltd ウエ−ハ移し替え装置

Also Published As

Publication number Publication date
DE3843369A1 (de) 1989-08-24
DE3843369C2 (enrdf_load_stackoverflow) 1991-02-14
FR2624839A1 (fr) 1989-06-23
JPH0214546A (ja) 1990-01-18
FR2624839B1 (fr) 1990-06-01

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Legal Events

Date Code Title Description
PA0109 Patent application

Patent event code: PA01091R01D

Comment text: Patent Application

Patent event date: 19881222

PG1501 Laying open of application
PC1203 Withdrawal of no request for examination
WITN Application deemed withdrawn, e.g. because no request for examination was filed or no examination fee was paid