FR2624839B1 - Appareil pour le transfert horizontal de plaquettes de silicium notamment - Google Patents

Appareil pour le transfert horizontal de plaquettes de silicium notamment

Info

Publication number
FR2624839B1
FR2624839B1 FR8718454A FR8718454A FR2624839B1 FR 2624839 B1 FR2624839 B1 FR 2624839B1 FR 8718454 A FR8718454 A FR 8718454A FR 8718454 A FR8718454 A FR 8718454A FR 2624839 B1 FR2624839 B1 FR 2624839B1
Authority
FR
France
Prior art keywords
silicon wafers
horizontal transfer
wafers
transfer
horizontal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR8718454A
Other languages
English (en)
Other versions
FR2624839A1 (fr
Inventor
Bernard Poli
Gerard Chincholle
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Recif SA
Original Assignee
Recif SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Recif SA filed Critical Recif SA
Priority to FR8718454A priority Critical patent/FR2624839B1/fr
Priority to DE3843369A priority patent/DE3843369A1/de
Priority to JP63324728A priority patent/JPH0214546A/ja
Priority to KR1019880017277A priority patent/KR890011020A/ko
Publication of FR2624839A1 publication Critical patent/FR2624839A1/fr
Application granted granted Critical
Publication of FR2624839B1 publication Critical patent/FR2624839B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67778—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving loading and unloading of wafers
    • H01L21/67781—Batch transfer of wafers

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Specific Conveyance Elements (AREA)
  • Load-Engaging Elements For Cranes (AREA)
FR8718454A 1987-12-22 1987-12-22 Appareil pour le transfert horizontal de plaquettes de silicium notamment Expired - Fee Related FR2624839B1 (fr)

Priority Applications (4)

Application Number Priority Date Filing Date Title
FR8718454A FR2624839B1 (fr) 1987-12-22 1987-12-22 Appareil pour le transfert horizontal de plaquettes de silicium notamment
DE3843369A DE3843369A1 (de) 1987-12-22 1988-12-22 Geraet fuer die horizontale ueberfuehrung von siliziumplaettchen insbesondere
JP63324728A JPH0214546A (ja) 1987-12-22 1988-12-22 特にシリコンウェーハの水平転送装置
KR1019880017277A KR890011020A (ko) 1987-12-22 1988-12-22 실리콘 웨이퍼의 수평 이송장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR8718454A FR2624839B1 (fr) 1987-12-22 1987-12-22 Appareil pour le transfert horizontal de plaquettes de silicium notamment

Publications (2)

Publication Number Publication Date
FR2624839A1 FR2624839A1 (fr) 1989-06-23
FR2624839B1 true FR2624839B1 (fr) 1990-06-01

Family

ID=9358503

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8718454A Expired - Fee Related FR2624839B1 (fr) 1987-12-22 1987-12-22 Appareil pour le transfert horizontal de plaquettes de silicium notamment

Country Status (4)

Country Link
JP (1) JPH0214546A (fr)
KR (1) KR890011020A (fr)
DE (1) DE3843369A1 (fr)
FR (1) FR2624839B1 (fr)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH680317A5 (fr) * 1990-03-05 1992-07-31 Tet Techno Investment Trust
DE4142671A1 (de) * 1991-12-21 1993-06-24 Wabco Westinghouse Fahrzeug Einrichtung zur messung einer verformung eines bauteils
JPH0662542U (ja) * 1993-01-29 1994-09-02 信越半導体株式会社 ウエーハカセット
US5590996A (en) * 1994-10-13 1997-01-07 Semitherm Wafer transfer apparatus
DE19535617A1 (de) * 1995-09-25 1997-03-27 Siemens Ag System zum Transport von Testboards
DE19845504A1 (de) * 1998-10-02 2000-04-20 Wacker Siltronic Halbleitermat Hordenaufnahmevorrichtung
FR3075771A1 (fr) * 2017-12-21 2019-06-28 Commissariat A L'energie Atomique Et Aux Energies Alternatives Systeme de transfert de plusieurs plaques entre deux paniers

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4534695A (en) * 1983-05-23 1985-08-13 Eaton Corporation Wafer transport system
US4536122A (en) * 1983-08-22 1985-08-20 Trilogy Computer Development Partners, Ltd. Wafer transfer device
JPS636857A (ja) * 1986-06-26 1988-01-12 Fujitsu Ltd ウエ−ハ移し替え装置

Also Published As

Publication number Publication date
JPH0214546A (ja) 1990-01-18
FR2624839A1 (fr) 1989-06-23
DE3843369A1 (de) 1989-08-24
KR890011020A (ko) 1989-08-12
DE3843369C2 (fr) 1991-02-14

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Legal Events

Date Code Title Description
ST Notification of lapse