KR950031825A - 반송시스템 - Google Patents

반송시스템 Download PDF

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Publication number
KR950031825A
KR950031825A KR1019950012041A KR19950012041A KR950031825A KR 950031825 A KR950031825 A KR 950031825A KR 1019950012041 A KR1019950012041 A KR 1019950012041A KR 19950012041 A KR19950012041 A KR 19950012041A KR 950031825 A KR950031825 A KR 950031825A
Authority
KR
South Korea
Prior art keywords
cassette
conveying
container
supporting
conveying system
Prior art date
Application number
KR1019950012041A
Other languages
English (en)
Other versions
KR100347194B1 (ko
Inventor
테베이 야마시타
마사나오 무라타
쓰요시 다나까
테루야 모리타
히로유끼 오요베
Original Assignee
스즈끼 아끼오
신꼬덴끼 가부시끼가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 스즈끼 아끼오, 신꼬덴끼 가부시끼가이샤 filed Critical 스즈끼 아끼오
Publication of KR950031825A publication Critical patent/KR950031825A/ko
Application granted granted Critical
Publication of KR100347194B1 publication Critical patent/KR100347194B1/ko

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67769—Storage means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67772—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving removal of lid, door, cover
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S414/00—Material or article handling
    • Y10S414/135—Associated with semiconductor wafer handling
    • Y10S414/14—Wafer cassette transporting

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Stacking Of Articles And Auxiliary Devices (AREA)

Abstract

본 발명은 예를 들어 반도체 웨이퍼. 액정표시기판. 데스크등의 전자기판등을 제조하는 장치내에 있어서, 반도체 웨이퍼등의 워크(Work)를 컨테이너(Container)내에 수용하여 반송하는 반송시스템에 관한 것이다.
즉, 본 발명은 핸드의 구성을 간략화. 경량화 할 수 있고, 제조원가를 제감할 수 있는 반송시스템을 제공할 목적으로, 내부에 워크(Work)를 수용하는 카세트(2)와, 이 카세트를 수용하는 컨테이너(30)와, 상기 카세트(2)를 지지하여 반송함과 함께 빈채로 또는 상기 카세트(2)가 수용된 컨테이너(30)를 지지하여 반송하는 이송수단(10)과를 구비하고, 상기 이송수단(10)은 상기 카세트(2)를 지지하는 지지수단(17)을 구비한 반송시스템이고, 컨테이너(30)의 상면에 지지수단(17)에 의해 지지가능한 홀더를 설치한 것을 특징으로 하도록 구성한 것이다.

Description

반송시스템
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제1도는 본 발명 실시예의 반송시스템이 배치된 스톡커(Stocker)의 내부 구성을 도시한 정면도, 제2도는 실시예에서의 컨테이너의 상세를 도시한 측단면도, 제3도는 실시예에서의 컨테이너 및 카세트를 도시한 사시도, 제4도는 카세트의 외관을 도시한 사시도.

Claims (4)

  1. 내부에 워크를 수용하는 카세트와, 이 카세트를 수용하는 컨테이너와, 상기 카세트를 지지하여 반송함과 함께, 빈체로 또는 상기 카세트가 수용된 컨테이너를 지지하여 반송하는 이송수단과를 구비하고, 상기 이송수단은 상기 카세트를 지지하는 지지수단을 갖춘 반송시스템에 있어서, 상기 컨테이너의 상면에 상기 지지수단에 의해 지지 가능한 홀더를 설치한 것을 특징으로 하는 반송시스템.
  2. 제1항에 있어서, 상기 지지수단은 서로 접근·이격 가능한 핸드를 구비함과 함께 이 핸드에 설치된 핑거에 상기 카세트를 파지 하도록 구성되고, 상기 홀더의 폭은 상기 핑거에 파지 가능한 길이로 되어 있음을 특징으로 하는 반송시스템.
  3. 제2항에 있어서, 상기 홀더의 측부 안에 상기 핑거에 파지되는 부분으로서의 이격거리는 상기 카세트의 측면 안에 상기 핑거에 파지되는 부분으로서의 이격거리와 거의 동등하게 되어 있음을 특징으로 하는 반송시스템.
  4. 제1항에 있어서, 상기 홀더는 그 하측에서 상기 지지수단에 의해 지지가능하게 구성되어 있음을 특징으로 하는 반송시스템.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019950012041A 1994-05-17 1995-05-16 반송시스템 KR100347194B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP12682894A JP3331746B2 (ja) 1994-05-17 1994-05-17 搬送システム
JP94-126828 1994-05-17

Publications (2)

Publication Number Publication Date
KR950031825A true KR950031825A (ko) 1995-12-20
KR100347194B1 KR100347194B1 (ko) 2002-11-07

Family

ID=14944927

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019950012041A KR100347194B1 (ko) 1994-05-17 1995-05-16 반송시스템

Country Status (4)

Country Link
US (1) US5628604A (ko)
JP (1) JP3331746B2 (ko)
KR (1) KR100347194B1 (ko)
TW (1) TW303875U (ko)

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Also Published As

Publication number Publication date
JPH07309440A (ja) 1995-11-28
JP3331746B2 (ja) 2002-10-07
US5628604A (en) 1997-05-13
TW303875U (en) 1997-04-21
KR100347194B1 (ko) 2002-11-07

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