KR870001000A - 리니어 모우터 부착 xy테이블 - Google Patents

리니어 모우터 부착 xy테이블 Download PDF

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Publication number
KR870001000A
KR870001000A KR1019860006118A KR860006118A KR870001000A KR 870001000 A KR870001000 A KR 870001000A KR 1019860006118 A KR1019860006118 A KR 1019860006118A KR 860006118 A KR860006118 A KR 860006118A KR 870001000 A KR870001000 A KR 870001000A
Authority
KR
South Korea
Prior art keywords
axis
fixed bed
linear motor
table body
stator
Prior art date
Application number
KR1019860006118A
Other languages
English (en)
Other versions
KR930001909B1 (ko
Inventor
히로시 데라마찌
Original Assignee
히로시 데라마찌
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 히로시 데라마찌 filed Critical 히로시 데라마찌
Publication of KR870001000A publication Critical patent/KR870001000A/ko
Application granted granted Critical
Publication of KR930001909B1 publication Critical patent/KR930001909B1/ko

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q5/00—Driving or feeding mechanisms; Control arrangements therefor
    • B23Q5/22—Feeding members carrying tools or work
    • B23Q5/34—Feeding other members supporting tools or work, e.g. saddles, tool-slides, through mechanical transmission
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C29/00—Bearings for parts moving only linearly
    • F16C29/008—Systems with a plurality of bearings, e.g. four carriages supporting a slide on two parallel rails
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/44—Movable or adjustable work or tool supports using particular mechanisms
    • B23Q1/56—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism
    • B23Q1/60—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism
    • B23Q1/62—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism with perpendicular axes, e.g. cross-slides
    • B23Q1/621—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism with perpendicular axes, e.g. cross-slides a single sliding pair followed perpendicularly by a single sliding pair
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C29/00—Bearings for parts moving only linearly
    • F16C29/04—Ball or roller bearings
    • F16C29/06—Ball or roller bearings in which the rolling bodies circulate partly without carrying load
    • F16C29/0633—Ball or roller bearings in which the rolling bodies circulate partly without carrying load with a bearing body defining a U-shaped carriage, i.e. surrounding a guide rail or track on three sides
    • F16C29/0635—Ball or roller bearings in which the rolling bodies circulate partly without carrying load with a bearing body defining a U-shaped carriage, i.e. surrounding a guide rail or track on three sides whereby the return paths are provided as bores in a main body of the U-shaped carriage, e.g. the main body of the U-shaped carriage is a single part with end caps provided at each end
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02—Linear motors; Sectional motors
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02—Linear motors; Sectional motors
    • H02K41/03—Synchronous motors; Motors moving step by step; Reluctance motors
    • H02K41/031—Synchronous motors; Motors moving step by step; Reluctance motors of the permanent magnet type
    • H02K41/033—Synchronous motors; Motors moving step by step; Reluctance motors of the permanent magnet type with armature and magnets on one member, the other member being a flux distributor
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2322/00—Apparatus used in shaping articles
    • F16C2322/39—General build up of machine tools, e.g. spindles, slides, actuators
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K1/00—Details of the magnetic circuit
    • H02K1/06—Details of the magnetic circuit characterised by the shape, form or construction
    • H02K1/22—Rotating parts of the magnetic circuit
    • H02K1/24—Rotor cores with salient poles ; Variable reluctance rotors
    • H02K1/246—Variable reluctance rotors
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K2201/00—Specific aspects not provided for in the other groups of this subclass relating to the magnetic circuits
    • H02K2201/18—Machines moving with multiple degrees of freedom
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K7/00—Arrangements for handling mechanical energy structurally associated with dynamo-electric machines, e.g. structural association with mechanical driving motors or auxiliary dynamo-electric machines
    • H02K7/08—Structural association with bearings

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Electromagnetism (AREA)
  • Power Engineering (AREA)
  • Machine Tool Units (AREA)
  • Linear Motors (AREA)

Abstract

내용 없음.

Description

리니어 모우터 부착 XY테이블
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제1도는 본발명의 제1실시예의 리니어 모우터 부착 XY 테이블의 평면도.
제2도는 제1도의 장치의 II-II선 단면도.
제3도는 제1도의 장치의 III-III선 단면도,
* 도면의 주요부분에 대한 부호의 설명
1 : 고정베드 2 : 테이블본체
5 : 리니어 베어링 20 : 리니어 모우터
22 : 제1가동자 22′ : 제2가동자
23 : 고정자 23a : 고정치(齒)

Claims (5)

  1. 고정베드 : 직교좌표에서 안내장치를 따라 X축 및 Y축 방향으로 이동가능한 상기 고정베드상에 배설된 테이블 본체 : 및 상기 고정베드에 대하여 상기 테이블본체를 구동 시키기 위하여 상기 고정베드와 상기 테이블본체와의 사이에 놓여진 리니어 모우터를 포함하며 : 상기 고정베드의 윗면과 상기 테이블 본체의 아랫면의 어느 한쪽에, 동일 평면내에 놓인 고정치를 갖는 고정자를 설치하고, 다른쪽 상기 테이블 본체의 아랫면과 고정베드의 윗면의 어느 한쪽에 상기 고정자와 작동 결합하는 제1가동자와 제 2가동자를 설치하고, 직교좌표에서 X축 및 Y축 방향으로 상기 제1가동자와 제2가동자를 이동시키기 위한 자석 부재를 설치한 것을 특징으로 하는 리니어 모우터 부착 XY 테이블.
  2. 제1항에 있어서, 상기 고정자의 고정치는 X축 및 Y축 방향으로 동일한 피치를 가진 격자상으로 형성된 것을 특징으로 하는 리니어 모우터 부착 XY 테이블.
  3. 제1항에 있어서, 상기 고정자의 고정치는 X축 및 Y축 방향으로 동일한 피치를 가진 복수열의 직각 평행육면체로 형성된 것을 특징으로 하는 리니어 모우터 부착 XY 테이블.
  4. 제1항에 있어서, 상기 자석부재는 복수의 자극, 각각의 상기 자극을 감는 코일 및 상기 코일에 전기적으로 접속된 펄스 발생원으로 이루어져 있는 것을 특징으로 하는 리니어 모우터 부착 XY 테이블.
  5. 제1항에 있어서, 상기 안내장치는 Y축 방향으로 연장되고 상기 고정베드의 윗면에 고정된 제1트랙부재와, 이동할 수 있는 상기 테이블 본체를 따라 X축 방향으로 연장된 제 2트랙부재로 이루어지고 상기 제1 및 제 2트랙부재는 리니어 베어링을 통해서 작동적으로 접속되어 있는 것을 특징으로 하는 리니어 모우터 부착 XY 테이블.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019860006118A 1985-07-26 1986-07-26 Xy 테이블장치 KR930001909B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP60-165297 1985-07-26
JP60165297A JPS6228146A (ja) 1985-07-26 1985-07-26 リニアモ−タ付ｘｙテ−ブル

Publications (2)

Publication Number Publication Date
KR870001000A true KR870001000A (ko) 1987-03-10
KR930001909B1 KR930001909B1 (ko) 1993-03-20

Family

ID=15809652

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019860006118A KR930001909B1 (ko) 1985-07-26 1986-07-26 Xy 테이블장치

Country Status (7)

Country Link
US (1) US4788477A (ko)
JP (1) JPS6228146A (ko)
KR (1) KR930001909B1 (ko)
DE (1) DE3625193A1 (ko)
FR (1) FR2585277B1 (ko)
GB (1) GB2179279B (ko)
IT (1) IT1213114B (ko)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20040106694A (ko) * 2003-06-11 2004-12-18 (주)새한 슬로팅 공작기계
KR100618441B1 (ko) * 2003-09-20 2006-08-30 한국전기연구원 리니어 모션 가이드와 리럭턴스형 선형 전동기의 결합시스템
KR100618446B1 (ko) * 2003-09-20 2006-08-31 한국전기연구원 리니어 모션 가이드와 선형 유도 전동기의 결합 시스템
KR100872082B1 (ko) * 2006-05-18 2008-12-05 캐논 가부시끼가이샤 구동장치, 노광 장치 및 디바이스 제조 방법

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JP2010539878A (ja) * 2007-09-20 2010-12-16 フェスト アーゲー ウント コー カーゲー 駆動キャリッジを線状にガイドするための２つのガイドレールを有する固定子を備える、ダイレクト駆動のリニア電磁駆動装置
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DE102012215783B4 (de) * 2012-09-06 2014-08-14 Aktiebolaget Skf Linearführung
JP5479569B1 (ja) * 2012-12-26 2014-04-23 株式会社ソディック 移動装置
JP6846943B2 (ja) * 2017-02-10 2021-03-24 東京エレクトロン株式会社 塗布装置、および塗布方法
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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20040106694A (ko) * 2003-06-11 2004-12-18 (주)새한 슬로팅 공작기계
KR100618441B1 (ko) * 2003-09-20 2006-08-30 한국전기연구원 리니어 모션 가이드와 리럭턴스형 선형 전동기의 결합시스템
KR100618446B1 (ko) * 2003-09-20 2006-08-31 한국전기연구원 리니어 모션 가이드와 선형 유도 전동기의 결합 시스템
KR100872082B1 (ko) * 2006-05-18 2008-12-05 캐논 가부시끼가이샤 구동장치, 노광 장치 및 디바이스 제조 방법

Also Published As

Publication number Publication date
DE3625193A1 (de) 1987-02-05
FR2585277A1 (fr) 1987-01-30
FR2585277B1 (fr) 1994-03-04
GB2179279B (en) 1989-07-19
GB2179279A (en) 1987-03-04
JPS6228146A (ja) 1987-02-06
IT1213114B (it) 1989-12-07
IT8621270A0 (it) 1986-07-25
DE3625193C2 (ko) 1990-05-03
KR930001909B1 (ko) 1993-03-20
US4788477A (en) 1988-11-29
JPH0480782B2 (ko) 1992-12-21
GB8618223D0 (en) 1986-09-03

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