GB1416638A - Pulse operated linear motor - Google Patents

Pulse operated linear motor

Info

Publication number
GB1416638A
GB1416638A GB5260273A GB5260273A GB1416638A GB 1416638 A GB1416638 A GB 1416638A GB 5260273 A GB5260273 A GB 5260273A GB 5260273 A GB5260273 A GB 5260273A GB 1416638 A GB1416638 A GB 1416638A
Authority
GB
United Kingdom
Prior art keywords
teeth
coils
movable
movable element
movement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB5260273A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Fanuc Corp
Original Assignee
Fujitsu Ltd
Fujitsu Fanuc Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd, Fujitsu Fanuc Ltd filed Critical Fujitsu Ltd
Publication of GB1416638A publication Critical patent/GB1416638A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02—Linear motors; Sectional motors
    • H02K41/03—Synchronous motors; Motors moving step by step; Reluctance motors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/44—Movable or adjustable work or tool supports using particular mechanisms
    • B23Q1/56—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism
    • B23Q1/60—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism
    • B23Q1/62—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism with perpendicular axes, e.g. cross-slides
    • B23Q1/621—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism with perpendicular axes, e.g. cross-slides a single sliding pair followed perpendicularly by a single sliding pair
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/44—Movable or adjustable work or tool supports using particular mechanisms
    • B23Q1/56—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism
    • B23Q1/60—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism
    • B23Q1/62—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism with perpendicular axes, e.g. cross-slides
    • B23Q1/621—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism with perpendicular axes, e.g. cross-slides a single sliding pair followed perpendicularly by a single sliding pair
    • B23Q1/626—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism with perpendicular axes, e.g. cross-slides a single sliding pair followed perpendicularly by a single sliding pair followed perpendicularly by a single sliding pair
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q11/00—Accessories fitted to machine tools for keeping tools or parts of the machine in good working condition or for cooling work; Safety devices specially combined with or arranged in, or specially adapted for use in connection with, machine tools
    • B23Q11/001—Arrangements compensating weight or flexion on parts of the machine
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q5/00—Driving or feeding mechanisms; Control arrangements therefor
    • B23Q5/22—Feeding members carrying tools or work
    • B23Q5/28—Electric drives
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K2201/00—Specific aspects not provided for in the other groups of this subclass relating to the magnetic circuits
    • H02K2201/18—Machines moving with multiple degrees of freedom

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Electromagnetism (AREA)
  • Power Engineering (AREA)
  • Linear Motors (AREA)

Abstract

1416638 Linear motors FUJITSU Ltd and FUJITSU FANUC Ltd 13 Nov 1973 [25 Nov 1972] 52602/73 Heading H2A A pulse operated linear motor providing output movement in each of three mutually orthogonal directions comprises three movable elements each associated with a respective electromagnetic drive device comprising relatively movable first and second members, the first member having a plurality of teeth made of magnetic material and arranged with a predetermined pitch along the appropriate direction, and the second member having a plurality of teeth arranged with a predetermined pitch along the same direction and magnetized by coils mounted on the second member. In a first embodiment, Fig. 6, a surface 15 is provided with teeth (not shown) extending in the X and Y directions. The first movable element 43 is mounted on wheels 47 to roll in the X direction and the second movable element 41 is mounted on wheels 42 to roll in the Y direction along the top of element 43. The coils and associated teeth providing movement in the X and Y directions are mounted on the base of a member 10 fixed to element 41 and slidable in a slot in element 43. The drive device for the third movable element 60, which, in use, supports an object to be moved to a desired position, comprises members 61, 62, of which 62 carries the coils and is mounted on the second movable element 41. For each direction of movement, the "movable" member of the electromagnetic drive device comprises a plurality of cores each having teeth of the same pitch as the "stationary" teeth and the teeth of the different cores are staggered by a fraction of the tooth pitch, the coils associated with the different cores then being energized in sequence to provide fine movement of the movable element. In a modification, Fig. 14, the drive devices for the X and Y directions are physically separate. The stationary teeth 111 for the X direction drive are formed on rails 110, 110<SP>1</SP> and the coils are mounted on movable elements 43, 43<SP>1</SP> which support a beam 113 carrying the "stationary" teeth 114 for the Y direction drive. The coils for the Y direction drive are mounted on movable element 41 which also carries, on its vertical side surfaces, the coils and associated teeth for the Z direction drive, these teeth interacting with further teeth formed on member 115 fixed to the third movable element 60. In a modification of the Fig. 14 motor, Fig. 19 (not shown), the teeth 114 for the Y direction drive are formed on the top and bottom surfaces of the beam 113. The weight of the third movable element 60 and the load mounted thereon may be counteracted by a high pressure air system, Fig. 20 (not shown), injecting air into the space between the second and third movable elements 41, 60, or by a bellows 134, Fig. 17 (not shown), filled with oil or other fluid maintained at a constant pressure despite movement of element 60 in the Z direction.
GB5260273A 1972-11-25 1973-11-13 Pulse operated linear motor Expired GB1416638A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11826572A JPS4976012A (en) 1972-11-25 1972-11-25

Publications (1)

Publication Number Publication Date
GB1416638A true GB1416638A (en) 1975-12-03

Family

ID=14732340

Family Applications (1)

Application Number Title Priority Date Filing Date
GB5260273A Expired GB1416638A (en) 1972-11-25 1973-11-13 Pulse operated linear motor

Country Status (2)

Country Link
JP (1) JPS4976012A (en)
GB (1) GB1416638A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2585277A1 (en) * 1985-07-26 1987-01-30 Teramachi Hiroshi TABLE X-Y FOR MACHINE TOOLS
EP1240974A2 (en) * 2001-03-13 2002-09-18 Jobs S.p.A. A machine tool with at least two machining units
EP2023470A2 (en) * 2007-08-01 2009-02-11 Canon Kabushiki Kaisha Planar pulse motor, exposure apparatus, and device manufacturing method

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5577365A (en) * 1978-12-06 1980-06-11 Ricoh Co Ltd Linear motor

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2585277A1 (en) * 1985-07-26 1987-01-30 Teramachi Hiroshi TABLE X-Y FOR MACHINE TOOLS
GB2179279A (en) * 1985-07-26 1987-03-04 Hiroshi Teramachi Linear motor-driven x-y table
GB2179279B (en) * 1985-07-26 1989-07-19 Hiroshi Teramachi Linear motor-driven x-y table
EP1240974A2 (en) * 2001-03-13 2002-09-18 Jobs S.p.A. A machine tool with at least two machining units
EP1240974A3 (en) * 2001-03-13 2003-04-02 Jobs S.p.A. A machine tool with at least two machining units
US6655884B2 (en) 2001-03-13 2003-12-02 Jobs S.P.A. Machine tool
EP2023470A2 (en) * 2007-08-01 2009-02-11 Canon Kabushiki Kaisha Planar pulse motor, exposure apparatus, and device manufacturing method
EP2023470A3 (en) * 2007-08-01 2012-05-09 Canon Kabushiki Kaisha Planar pulse motor, exposure apparatus, and device manufacturing method

Also Published As

Publication number Publication date
JPS4976012A (en) 1974-07-23
DE2358421B2 (en) 1975-05-28
DE2358421A1 (en) 1974-06-06

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Legal Events

Date Code Title Description
PS Patent sealed
PCNP Patent ceased through non-payment of renewal fee