KR850001546A - 세라믹스의 열변형 측정장치 - Google Patents
세라믹스의 열변형 측정장치 Download PDFInfo
- Publication number
- KR850001546A KR850001546A KR1019840004936A KR840004936A KR850001546A KR 850001546 A KR850001546 A KR 850001546A KR 1019840004936 A KR1019840004936 A KR 1019840004936A KR 840004936 A KR840004936 A KR 840004936A KR 850001546 A KR850001546 A KR 850001546A
- Authority
- KR
- South Korea
- Prior art keywords
- measuring
- telephoto lens
- strain
- strain measuring
- measuring device
- Prior art date
Links
- 239000000919 ceramic Substances 0.000 title 1
- 238000005259 measurement Methods 0.000 claims 2
- 239000007787 solid Substances 0.000 claims 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N25/00—Investigating or analyzing materials by the use of thermal means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/16—Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analyzing Materials Using Thermal Means (AREA)
- Investigating Strength Of Materials By Application Of Mechanical Stress (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
내용 없음
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제1도는 본 발명의 변형 측정장치가 열팽창 계수를 측정하기 위한 장치에 연결된 한 실시형태의 배열관계를 보인 개략 설명도. 제2도는 제1도에서 보인 바와 같이 열팽창 계수를 측정하기 위한 장치에 기초하여 온도와 열팽창 게수 사이의 관계를 보인 그래프. 제3도는 제1도와 유사한 열팽창계수 측정 장치가 소형표본을 측정하기 위하여 프리즘을 사용한 다른 실시형태를 보인 개략 설명도.
Claims (7)
- 표본의 변부에 광선을 투사하기 위한 적어도 하나의 조명기, 망원렌즈와 적외선제거필터를 구비한 적어도 하나의 변형측정 카메라와, 데이타처리수단으로 구성됨을 특징으로 하는 세라믹스의 열변형측정장치.
- 표본의 변부에 광선을 투사하기 위한 적어도 하나의 조명기, 망원렌즈와 적외선제거필터를 구비한 적어도 하나의 변형측정 카메라와, 망원렌즈와 적외선제거필터를 구비한 적어도 하나의 변형측정카메라, 편향수단과, 데이타처리수단으로 구성됨을 특징으로 하는 열변형측정장치.
- 청구범위 1항 또는 2항에 있어서, 상기 각 변형측정카메라에 솔리드 스테이트 포로다이오드 라이너어레이가 구비된 바의 열변형측정장치.
- 청구범위 1항 또는 2항에 있어서, 상기 각 변형측정카메라에 광전증배관이 구비된 바의 열변형측정장치.
- 청구범위 1항 또는 2항에 있어서, 데이타처리수단이 컴퓨터와 디지탈 플로터에 연결된 바의 열변형측정장치.
- 청구범위 1항 또는 2항에 있어서, 상기 필터가 0.8㎛이상의 파장을 갖는 적외선을 제거하는 바의 열변형측정장치.
- 청구범위 1항 또는 2항에 있어서, 상기 망원렌즈의 작동거리가 200-700mm인 바의 열변형측정장치.※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14796683A JPS6039540A (ja) | 1983-08-15 | 1983-08-15 | 熱膨張率測定装置 |
JP147966/83 | 1983-08-15 | ||
JP127526/84 | 1984-06-22 | ||
JP12752684A JPS617452A (ja) | 1984-06-22 | 1984-06-22 | セラミツク等の熱間における変位測定装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR850001546A true KR850001546A (ko) | 1985-03-30 |
KR910004158B1 KR910004158B1 (en) | 1991-06-22 |
Family
ID=26463472
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR8404936A KR910004158B1 (en) | 1983-08-15 | 1984-04-14 | Thermal deformation measuring system of ceranics and the like |
Country Status (5)
Country | Link |
---|---|
US (1) | US4636969A (ko) |
EP (1) | EP0145115B1 (ko) |
KR (1) | KR910004158B1 (ko) |
AT (1) | ATE42402T1 (ko) |
DE (1) | DE3477836D1 (ko) |
Families Citing this family (33)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5350899A (en) * | 1992-04-15 | 1994-09-27 | Hiroichi Ishikawa | Semiconductor wafer temperature determination by optical measurement of wafer expansion in processing apparatus chamber |
FR2595814A1 (fr) * | 1986-03-14 | 1987-09-18 | Bertin & Cie | Procede et dispositif de mesure du diametre d'une fibre, en particulier d'une fibre optique |
US5099096A (en) * | 1990-04-05 | 1992-03-24 | Martin Marietta Energy Systems, Inc. | Microwave furnace having microwave compatible dilatometer |
US5143689A (en) * | 1990-11-09 | 1992-09-01 | The Standard Oil Company | Method for determining the coefficient of thermal expansion of coke |
JP2976574B2 (ja) * | 1991-04-16 | 1999-11-10 | 住友電気工業株式会社 | セラミックスの評価方法 |
US5221142A (en) * | 1991-05-20 | 1993-06-22 | Peak Systems, Inc. | Method and apparatus for temperature measurement using thermal expansion |
JPH05223761A (ja) * | 1992-02-07 | 1993-08-31 | Nippon Seiko Kk | 焼入検査方法 |
JP3210073B2 (ja) * | 1992-04-24 | 2001-09-17 | 愛三工業株式会社 | ステップモータ制御装置 |
US5645351A (en) * | 1992-05-20 | 1997-07-08 | Hitachi, Ltd. | Temperature measuring method using thermal expansion and an apparatus for carrying out the same |
FR2706613B1 (fr) * | 1993-06-17 | 1995-09-01 | Aerospatiale | Procédé pour déterminer la résistance à la déchirure ductile d'un matériau. |
US5757473A (en) * | 1996-11-13 | 1998-05-26 | Noranda, Inc. | Optical strain sensor for the measurement of microdeformations of surfaces |
DE19748088A1 (de) * | 1997-10-30 | 1999-05-12 | Wacker Siltronic Halbleitermat | Verfahren und Vorrichtung zum Erkennen einer Fehllage einer Halbleiterscheibe |
US6303411B1 (en) | 1999-05-03 | 2001-10-16 | Vortek Industries Ltd. | Spatially resolved temperature measurement and irradiance control |
IT1315680B1 (it) * | 2000-10-13 | 2003-03-14 | Expert System Solutions Srl | Apparecchiatura per misurare variazioni dimensionali indotte su corpida variazioni di temperatura |
DE10052631C1 (de) * | 2000-10-24 | 2002-04-04 | Bosch Gmbh Robert | Vorrichtung zur Prüfung von einem durch Anlegen eines elektrischen und/oder magnetischen Feldes formändernden Material |
US6594446B2 (en) * | 2000-12-04 | 2003-07-15 | Vortek Industries Ltd. | Heat-treating methods and systems |
ITMO20010248A1 (it) * | 2001-12-12 | 2003-06-12 | Expert System Solutions Srl | Dilatometro ottico perfezionato |
AU2002350358A1 (en) * | 2001-12-26 | 2003-07-30 | Vortek Indusries Ltd. | Temperature measurement and heat-treating methods and systems |
JP4988202B2 (ja) | 2002-12-20 | 2012-08-01 | マトソン テクノロジー カナダ インコーポレイテッド | 工作物の支持及び熱処理の方法とシステム |
US7025498B2 (en) * | 2003-05-30 | 2006-04-11 | Asml Holding N.V. | System and method of measuring thermal expansion |
DE10336718B4 (de) * | 2003-08-08 | 2006-08-17 | Krüss GmbH, Wissenschaftliche Laborgeräte | Vorrichtung zur optischen Vermessung der Konturen von Probenkörpern bei hohen Temperaturen in einem gasdicht verschlossenem Rohrofen |
JP5630935B2 (ja) | 2003-12-19 | 2014-11-26 | マトソン テクノロジー、インコーポレイテッド | 工作物の熱誘起運動を抑制する機器及び装置 |
CN1936558B (zh) * | 2005-09-22 | 2010-11-24 | 富士康(昆山)电脑接插件有限公司 | 热变形测试装置 |
DE102006019433B4 (de) * | 2006-04-24 | 2013-07-25 | BÄHR-Thermoanalyse GmbH | Optisches Dilatometer |
CN100447546C (zh) * | 2006-08-31 | 2008-12-31 | 重庆交通大学 | 望远式全天候自标定挠度/位移测量装置及方法 |
WO2008058397A1 (en) * | 2006-11-15 | 2008-05-22 | Mattson Technology Canada, Inc. | Systems and methods for supporting a workpiece during heat-treating |
US20080122932A1 (en) * | 2006-11-28 | 2008-05-29 | George Aaron Kibbie | Remote video monitoring systems utilizing outbound limited communication protocols |
JP4515509B2 (ja) * | 2008-03-03 | 2010-08-04 | キヤノンアネルバ株式会社 | 基板表面温度計測方法、及び、これを用いた基板処理装置 |
US9070590B2 (en) | 2008-05-16 | 2015-06-30 | Mattson Technology, Inc. | Workpiece breakage prevention method and apparatus |
DE102010044969A1 (de) * | 2010-09-10 | 2012-03-15 | Carl Zeiss Smt Gmbh | Verfahren zum Betreiben einer Projektionsbelichtungsanlage sowie Steuervorrichtung |
US9464890B2 (en) * | 2010-09-21 | 2016-10-11 | James L. Arnone | Dynamic data acquisition, and apparatus and methods therefor |
EP2906501B1 (en) | 2012-10-12 | 2018-07-18 | Methanex New Zealand Limited | Tube monitor and process measurement and control in or for a reformer |
CN109323662B (zh) * | 2018-09-05 | 2020-07-10 | 西安交通大学 | 高温环境下环形包壳内外表面温度控制及变形测量装置 |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DD59943B (ko) * | ||||
US3433051A (en) * | 1966-02-28 | 1969-03-18 | Atomic Energy Commission | Apparatus for determining mechanical and thermal properties of metals |
US4173788A (en) * | 1976-09-27 | 1979-11-06 | Atmospheric Sciences, Inc. | Method and apparatus for measuring dimensions |
SU729493A1 (ru) * | 1977-10-28 | 1980-04-25 | Предприятие П/Я В-8624 | Пол ризационно-оптический микродилатометр |
DE2819395C2 (de) * | 1978-05-03 | 1980-01-10 | Hoesch Werke Ag, 4600 Dortmund | Verfahren und Vorrichtung zum Bestimmen der Breite von Walzerzeugnissen |
DE2919858A1 (de) * | 1978-05-17 | 1979-11-22 | British Steel Corp | Verfahren und vorrichtung zur bestimmung der abmessungen von werkstuecken |
GB2052734B (en) * | 1979-05-21 | 1983-10-19 | Daystrom Ltd | Position and dimension measuring apparaus |
FR2483070B1 (fr) * | 1980-05-21 | 1985-06-28 | Daystrom Ltd | Appareil de mesure de dimensions d'un objet eclaire |
FR2497341A1 (fr) * | 1980-12-30 | 1982-07-02 | Socles Goudrons Derives | Dispositif pour mesurer la deformation d'un materiau sous l'effet de la chaleur et son application a la determination du pouvoir mouillant des brais |
US4468136A (en) * | 1982-02-12 | 1984-08-28 | The Johns Hopkins University | Optical beam deflection thermal imaging |
US4522510A (en) * | 1982-07-26 | 1985-06-11 | Therma-Wave, Inc. | Thin film thickness measurement with thermal waves |
-
1984
- 1984-04-14 KR KR8404936A patent/KR910004158B1/ko not_active IP Right Cessation
- 1984-08-03 DE DE8484305300T patent/DE3477836D1/de not_active Expired
- 1984-08-03 EP EP84305300A patent/EP0145115B1/en not_active Expired
- 1984-08-03 AT AT84305300T patent/ATE42402T1/de not_active IP Right Cessation
-
1985
- 1985-09-17 US US06/776,920 patent/US4636969A/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
ATE42402T1 (de) | 1989-05-15 |
KR910004158B1 (en) | 1991-06-22 |
US4636969A (en) | 1987-01-13 |
EP0145115A1 (en) | 1985-06-19 |
DE3477836D1 (en) | 1989-05-24 |
EP0145115B1 (en) | 1989-04-19 |
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