KR20250103716A - 기판 반송 로봇 시스템 - Google Patents

기판 반송 로봇 시스템 Download PDF

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Publication number
KR20250103716A
KR20250103716A KR1020257018173A KR20257018173A KR20250103716A KR 20250103716 A KR20250103716 A KR 20250103716A KR 1020257018173 A KR1020257018173 A KR 1020257018173A KR 20257018173 A KR20257018173 A KR 20257018173A KR 20250103716 A KR20250103716 A KR 20250103716A
Authority
KR
South Korea
Prior art keywords
robot arm
substrate
misalignment
robot
control unit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
KR1020257018173A
Other languages
English (en)
Korean (ko)
Inventor
료타 오노
히로키 이마니시
Original Assignee
가와사끼 쥬고교 가부시끼 가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 가와사끼 쥬고교 가부시끼 가이샤 filed Critical 가와사끼 쥬고교 가부시끼 가이샤
Publication of KR20250103716A publication Critical patent/KR20250103716A/ko
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/33—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations into and out of processing chamber
    • H10P72/3302—Mechanical parts of transfer devices
    • H01L21/67742—
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J13/00—Controls for manipulators
    • B25J13/08—Controls for manipulators by means of sensing devices, e.g. viewing or touching devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00—Gripping heads and other end effectors
    • B25J15/0014—Gripping heads and other end effectors having fork, comb or plate shaped means for engaging the lower surface on a object to be transported
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J19/00—Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
    • B25J19/02—Sensing devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/10—Program-controlled manipulators characterised by positioning means for manipulator elements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/16—Program controls
    • B25J9/1656—Program controls characterised by programming, planning systems for manipulators
    • B25J9/1664—Program controls characterised by programming, planning systems for manipulators characterised by motion, path, trajectory planning
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/16—Program controls
    • B25J9/1679—Program controls characterised by the tasks executed
    • B25J9/1692—Calibration of manipulator
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D3/00—Control of position or direction
    • H01L21/67259—
    • H01L21/681—
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/06—Apparatus for monitoring, sorting, marking, testing or measuring
    • H10P72/0606—Position monitoring, e.g. misposition detection or presence detection
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/50—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for positioning, orientation or alignment
    • H10P72/53—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for positioning, orientation or alignment using optical controlling means

Landscapes

  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Human Computer Interaction (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Manipulator (AREA)
KR1020257018173A 2022-12-28 2023-12-28 기판 반송 로봇 시스템 Pending KR20250103716A (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2022211864 2022-12-28
JPJP-P-2022-211864 2022-12-28
PCT/JP2023/047313 WO2024143550A1 (ja) 2022-12-28 2023-12-28 基板搬送ロボットシステム

Publications (1)

Publication Number Publication Date
KR20250103716A true KR20250103716A (ko) 2025-07-07

Family

ID=91718184

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020257018173A Pending KR20250103716A (ko) 2022-12-28 2023-12-28 기판 반송 로봇 시스템

Country Status (5)

Country Link
JP (1) JP7767652B2 (https=)
KR (1) KR20250103716A (https=)
CN (1) CN120418948A (https=)
TW (1) TWI911616B (https=)
WO (1) WO2024143550A1 (https=)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2022102888A (ja) 2020-12-25 2022-07-07 川崎重工業株式会社 基板搬送ロボットの制御装置及び関節モータの制御方法

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5789890A (en) 1996-03-22 1998-08-04 Genmark Automation Robot having multiple degrees of freedom
JP2012231041A (ja) 2011-04-27 2012-11-22 Hitachi High-Tech Control Systems Corp 基板搬送装置
US8768513B2 (en) 2011-08-08 2014-07-01 Applied Materials, Inc. Systems having multi-linkage robots and methods to correct positional and rotational alignment in multi-linkage robots
US9202733B2 (en) * 2011-11-07 2015-12-01 Persimmon Technologies Corporation Robot system with independent arms
CN104380452B (zh) 2012-04-12 2016-10-19 应用材料公司 具有独立能旋转机身中段的机械手系统、设备及方法
JP5596093B2 (ja) * 2012-09-05 2014-09-24 ファナック株式会社 バックラッシを補正するモータ制御装置
JP2015178161A (ja) 2014-03-19 2015-10-08 株式会社安川電機 搬送ロボットおよび搬送システム
JP2016062909A (ja) 2014-09-12 2016-04-25 キヤノン株式会社 基板搬送システム、基板搬送方法、リソグラフィ装置、および物品の製造方法
JP2017092246A (ja) * 2015-11-10 2017-05-25 株式会社Ｓｃｒｅｅｎホールディングス 基板搬送装置、基板処理システム、および基板搬送方法
JP6396360B2 (ja) 2016-04-13 2018-09-26 ファナック株式会社 モータ制御装置、モータ制御方法及びモータ制御プログラム
JP7553191B2 (ja) * 2020-08-31 2024-09-18 東京エレクトロン株式会社 基板搬送システムの制御方法及び基板搬送システム
JP7568366B2 (ja) 2021-03-24 2024-10-16 東京エレクトロン株式会社 基板搬送方法

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2022102888A (ja) 2020-12-25 2022-07-07 川崎重工業株式会社 基板搬送ロボットの制御装置及び関節モータの制御方法

Also Published As

Publication number Publication date
CN120418948A (zh) 2025-08-01
JP7767652B2 (ja) 2025-11-11
WO2024143550A1 (ja) 2024-07-04
TWI911616B (zh) 2026-01-11
JPWO2024143550A1 (https=) 2024-07-04
TW202435344A (zh) 2024-09-01

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