TWI911616B - 基板搬送機器人系統 - Google Patents

基板搬送機器人系統

Info

Publication number
TWI911616B
TWI911616B TW112151407A TW112151407A TWI911616B TW I911616 B TWI911616 B TW I911616B TW 112151407 A TW112151407 A TW 112151407A TW 112151407 A TW112151407 A TW 112151407A TW I911616 B TWI911616 B TW I911616B
Authority
TW
Taiwan
Prior art keywords
aforementioned
substrate
robotic arm
control unit
movement
Prior art date
Application number
TW112151407A
Other languages
English (en)
Chinese (zh)
Other versions
TW202435344A (zh
Inventor
小野良太
今西泰希
Original Assignee
日商川崎重工業股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日商川崎重工業股份有限公司 filed Critical 日商川崎重工業股份有限公司
Publication of TW202435344A publication Critical patent/TW202435344A/zh
Application granted granted Critical
Publication of TWI911616B publication Critical patent/TWI911616B/zh

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/33—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations into and out of processing chamber
    • H10P72/3302—Mechanical parts of transfer devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J13/00—Controls for manipulators
    • B25J13/08—Controls for manipulators by means of sensing devices, e.g. viewing or touching devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00—Gripping heads and other end effectors
    • B25J15/0014—Gripping heads and other end effectors having fork, comb or plate shaped means for engaging the lower surface on a object to be transported
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J19/00—Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
    • B25J19/02—Sensing devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/10—Program-controlled manipulators characterised by positioning means for manipulator elements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/16—Program controls
    • B25J9/1656—Program controls characterised by programming, planning systems for manipulators
    • B25J9/1664—Program controls characterised by programming, planning systems for manipulators characterised by motion, path, trajectory planning
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/16—Program controls
    • B25J9/1679—Program controls characterised by the tasks executed
    • B25J9/1692—Calibration of manipulator
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D3/00—Control of position or direction
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/06—Apparatus for monitoring, sorting, marking, testing or measuring
    • H10P72/0606—Position monitoring, e.g. misposition detection or presence detection
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/50—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for positioning, orientation or alignment
    • H10P72/53—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for positioning, orientation or alignment using optical controlling means

Landscapes

  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Human Computer Interaction (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Manipulator (AREA)
TW112151407A 2022-12-28 2023-12-28 基板搬送機器人系統 TWI911616B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2022211864 2022-12-28
JP2022-211864 2022-12-28

Publications (2)

Publication Number Publication Date
TW202435344A TW202435344A (zh) 2024-09-01
TWI911616B true TWI911616B (zh) 2026-01-11

Family

ID=91718184

Family Applications (1)

Application Number Title Priority Date Filing Date
TW112151407A TWI911616B (zh) 2022-12-28 2023-12-28 基板搬送機器人系統

Country Status (5)

Country Link
JP (1) JP7767652B2 (https=)
KR (1) KR20250103716A (https=)
CN (1) CN120418948A (https=)
TW (1) TWI911616B (https=)
WO (1) WO2024143550A1 (https=)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20130121798A1 (en) * 2011-11-07 2013-05-16 Martin Hosek Robot system with independent arms
CN103676779B (zh) * 2012-09-05 2015-09-30 发那科株式会社 修正齿隙的电动机控制装置
CN114121740A (zh) * 2020-08-31 2022-03-01 东京毅力科创株式会社 基板输送系统的控制方法和基板输送系统

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5789890A (en) 1996-03-22 1998-08-04 Genmark Automation Robot having multiple degrees of freedom
JP2012231041A (ja) 2011-04-27 2012-11-22 Hitachi High-Tech Control Systems Corp 基板搬送装置
US8768513B2 (en) 2011-08-08 2014-07-01 Applied Materials, Inc. Systems having multi-linkage robots and methods to correct positional and rotational alignment in multi-linkage robots
CN104380452B (zh) 2012-04-12 2016-10-19 应用材料公司 具有独立能旋转机身中段的机械手系统、设备及方法
JP2015178161A (ja) 2014-03-19 2015-10-08 株式会社安川電機 搬送ロボットおよび搬送システム
JP2016062909A (ja) 2014-09-12 2016-04-25 キヤノン株式会社 基板搬送システム、基板搬送方法、リソグラフィ装置、および物品の製造方法
JP2017092246A (ja) * 2015-11-10 2017-05-25 株式会社Ｓｃｒｅｅｎホールディングス 基板搬送装置、基板処理システム、および基板搬送方法
JP6396360B2 (ja) 2016-04-13 2018-09-26 ファナック株式会社 モータ制御装置、モータ制御方法及びモータ制御プログラム
JP7712078B2 (ja) 2020-12-25 2025-07-23 川崎重工業株式会社 基板搬送ロボットの制御装置及び関節モータの制御方法
JP7568366B2 (ja) 2021-03-24 2024-10-16 東京エレクトロン株式会社 基板搬送方法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20130121798A1 (en) * 2011-11-07 2013-05-16 Martin Hosek Robot system with independent arms
CN103676779B (zh) * 2012-09-05 2015-09-30 发那科株式会社 修正齿隙的电动机控制装置
CN114121740A (zh) * 2020-08-31 2022-03-01 东京毅力科创株式会社 基板输送系统的控制方法和基板输送系统

Also Published As

Publication number Publication date
CN120418948A (zh) 2025-08-01
JP7767652B2 (ja) 2025-11-11
WO2024143550A1 (ja) 2024-07-04
KR20250103716A (ko) 2025-07-07
JPWO2024143550A1 (https=) 2024-07-04
TW202435344A (zh) 2024-09-01

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