KR20240152920A - 하전 입자선 장치 - Google Patents

하전 입자선 장치 Download PDF

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Publication number
KR20240152920A
KR20240152920A KR1020247031822A KR20247031822A KR20240152920A KR 20240152920 A KR20240152920 A KR 20240152920A KR 1020247031822 A KR1020247031822 A KR 1020247031822A KR 20247031822 A KR20247031822 A KR 20247031822A KR 20240152920 A KR20240152920 A KR 20240152920A
Authority
KR
South Korea
Prior art keywords
electron source
filament
shield
single crystal
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
KR1020247031822A
Other languages
English (en)
Korean (ko)
Inventor
게이고 가스야
슈헤이 이시까와
다까시 오니시
다까시 도이
겐지 다니모또
Original Assignee
주식회사 히타치하이테크
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 주식회사 히타치하이테크 filed Critical 주식회사 히타치하이테크
Publication of KR20240152920A publication Critical patent/KR20240152920A/ko
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/18—Vacuum locks ; Means for obtaining or maintaining the desired pressure within the vessel
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/065—Construction of guns or parts thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/073—Electron guns using field emission, photo emission, or secondary emission electron sources
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J7/00—Details not provided for in the preceding groups and common to two or more basic types of discharge tubes or lamps
    • H01J7/14—Means for obtaining or maintaining the desired pressure within the vessel
    • H01J7/18—Means for absorbing or adsorbing gas, e.g. by gettering
    • H01J7/183—Composition or manufacture of getters
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/02—Details
    • H01J2237/022—Avoiding or removing foreign or contaminating particles, debris or deposits on sample or tube
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/06—Sources
    • H01J2237/063—Electron sources
    • H01J2237/06325—Cold-cathode sources
    • H01J2237/06341—Field emission

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Electron Sources, Ion Sources (AREA)
KR1020247031822A 2022-04-22 2022-04-22 하전 입자선 장치 Pending KR20240152920A (ko)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2022/018553 WO2023203755A1 (ja) 2022-04-22 2022-04-22 荷電粒子線装置

Publications (1)

Publication Number Publication Date
KR20240152920A true KR20240152920A (ko) 2024-10-22

Family

ID=88419459

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020247031822A Pending KR20240152920A (ko) 2022-04-22 2022-04-22 하전 입자선 장치

Country Status (5)

Country Link
US (1) US20250273422A1 (https=)
JP (1) JP7821274B2 (https=)
KR (1) KR20240152920A (https=)
TW (1) TWI900839B (https=)
WO (1) WO2023203755A1 (https=)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010010125A (ja) 2008-05-28 2010-01-14 Hitachi High-Technologies Corp 荷電粒子線装置

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS642352U (https=) * 1987-06-25 1989-01-09
JP4977399B2 (ja) * 2005-11-10 2012-07-18 株式会社日立ハイテクノロジーズ 荷電粒子線装置
EP1983548A1 (en) * 2007-04-20 2008-10-22 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Emitter chamber, charged particle apparatus and method for operating same
JP5194133B2 (ja) * 2009-01-15 2013-05-08 株式会社日立ハイテクノロジーズ イオンビーム装置
DE112010002551B4 (de) * 2009-06-16 2019-10-31 Hitachi High-Technologies Corporation Geladene teilchen abstrahlende vorrichtung
JP7068117B2 (ja) * 2018-09-18 2022-05-16 株式会社日立ハイテク 荷電粒子線装置
WO2020213109A1 (ja) * 2019-04-18 2020-10-22 株式会社日立ハイテク 電子源、及び荷電粒子線装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010010125A (ja) 2008-05-28 2010-01-14 Hitachi High-Technologies Corp 荷電粒子線装置

Also Published As

Publication number Publication date
TWI900839B (zh) 2025-10-11
TW202343514A (zh) 2023-11-01
US20250273422A1 (en) 2025-08-28
JP7821274B2 (ja) 2026-02-26
WO2023203755A1 (ja) 2023-10-26
JPWO2023203755A1 (https=) 2023-10-26

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