KR20240127396A - 플렉서블 센서 및 플렉서블 센서의 제조 방법 - Google Patents

플렉서블 센서 및 플렉서블 센서의 제조 방법 Download PDF

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Publication number
KR20240127396A
KR20240127396A KR1020247024154A KR20247024154A KR20240127396A KR 20240127396 A KR20240127396 A KR 20240127396A KR 1020247024154 A KR1020247024154 A KR 1020247024154A KR 20247024154 A KR20247024154 A KR 20247024154A KR 20240127396 A KR20240127396 A KR 20240127396A
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KR
South Korea
Prior art keywords
support substrate
flexible sensor
variable resistance
adhesive layer
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
KR1020247024154A
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English (en)
Korean (ko)
Inventor
슈스케 가나자와
모토시 이타가키
쇼헤이 고이즈미
요시아키 기토
가츠히로 하타야마
심창훈
Original Assignee
고쿠리츠켄큐카이하츠호진 상교기쥬츠 소고켄큐쇼
가부시키가이샤 니콘
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 고쿠리츠켄큐카이하츠호진 상교기쥬츠 소고켄큐쇼, 가부시키가이샤 니콘 filed Critical 고쿠리츠켄큐카이하츠호진 상교기쥬츠 소고켄큐쇼
Publication of KR20240127396A publication Critical patent/KR20240127396A/ko
Pending legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
    • G01L1/22—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
    • G01L1/225—Measuring circuits therefor
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N79/00—Integrated devices, or assemblies of multiple devices, comprising at least one solid-state element covered by group H10N70/00
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/16—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring the deformation in a solid, e.g. by resistance strain gauge
    • G01B7/18—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring the deformation in a solid, e.g. by resistance strain gauge using change in resistance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/18—Measuring force or stress, in general using properties of piezo-resistive materials, i.e. materials of which the ohmic resistance varies according to changes in magnitude or direction of force applied to the material
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
    • G01L1/22—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
    • G01L1/2206—Special supports with preselected places to mount the resistance strain gauges; Mounting of supports
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
    • G01L1/22—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
    • G01L1/2287—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges constructional details of the strain gauges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
    • G01L5/16—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force
    • G01L5/161—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force using variations in ohmic resistance
    • G01L5/1627—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force using variations in ohmic resistance of strain gauges

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
KR1020247024154A 2022-01-25 2022-11-22 플렉서블 센서 및 플렉서블 센서의 제조 방법 Pending KR20240127396A (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JPJP-P-2022-009277 2022-01-25
JP2022009277 2022-01-25
PCT/JP2022/043157 WO2023145220A1 (ja) 2022-01-25 2022-11-22 フレキシブルセンサ及びフレキシブルセンサの製造方法

Publications (1)

Publication Number Publication Date
KR20240127396A true KR20240127396A (ko) 2024-08-22

Family

ID=87471416

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020247024154A Pending KR20240127396A (ko) 2022-01-25 2022-11-22 플렉서블 센서 및 플렉서블 센서의 제조 방법

Country Status (5)

Country Link
US (1) US20240377180A1 (https=)
JP (1) JPWO2023145220A1 (https=)
KR (1) KR20240127396A (https=)
CN (1) CN118575064A (https=)
WO (1) WO2023145220A1 (https=)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11241903A (ja) 1997-12-26 1999-09-07 Toyoaki Kimura 導電性粒子―高分子系による歪みセンサ―

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0758234B2 (ja) * 1992-04-16 1995-06-21 株式会社エニックス 半導体マトリクス型微細面圧分布センサ
JP2003203523A (ja) * 2002-01-08 2003-07-18 Fujikura Ltd 導電ペースト
US20050110767A1 (en) * 2003-11-24 2005-05-26 Elo Touchsystems, Inc. Method of manufacturing touch sensor with switch tape strips
JP2005283329A (ja) * 2004-03-30 2005-10-13 Sanyo Electric Co Ltd 感圧センサーパネルの製造方法
JP2014228454A (ja) * 2013-05-24 2014-12-08 株式会社フジクラ 圧力センサ
JP6274029B2 (ja) * 2014-06-18 2018-02-07 大日本印刷株式会社 圧力センサ装置およびその製造方法
JP6358081B2 (ja) * 2014-12-25 2018-07-18 大日本印刷株式会社 圧力センサ
JP6198804B2 (ja) * 2015-12-01 2017-09-20 日本写真印刷株式会社 多点計測用のひずみセンサとその製造方法
JP6912170B2 (ja) * 2016-09-14 2021-07-28 エルジー ディスプレイ カンパニー リミテッド 接触検知装置及びその駆動方法
KR102772195B1 (ko) * 2017-02-28 2025-02-26 삼성디스플레이 주식회사 표시 장치 및 표시 장치의 제조 방법
JP2018189583A (ja) * 2017-05-10 2018-11-29 大日本印刷株式会社 圧力センサ装置
US11243126B2 (en) * 2017-07-27 2022-02-08 Nextinput, Inc. Wafer bonded piezoresistive and piezoelectric force sensor and related methods of manufacture
JP2020085613A (ja) * 2018-11-22 2020-06-04 ムネカタインダストリアルマシナリー株式会社 歪みセンサアレイおよびその製造方法
JP7367932B2 (ja) * 2020-01-23 2023-10-24 大日本印刷株式会社 センサモジュール
JP7567196B2 (ja) * 2020-04-20 2024-10-16 Ｔｏｐｐａｎホールディングス株式会社 圧力センサおよび圧力センサアレイ
CN111883556B (zh) * 2020-07-13 2022-11-25 浙江清华柔性电子技术研究院 柔性触觉传感器及其制备方法
CN112284581B (zh) * 2020-10-27 2022-04-15 湖北长江新型显示产业创新中心有限公司 一种传感器、显示面板及电子设备

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11241903A (ja) 1997-12-26 1999-09-07 Toyoaki Kimura 導電性粒子―高分子系による歪みセンサ―

Also Published As

Publication number Publication date
JPWO2023145220A1 (https=) 2023-08-03
WO2023145220A1 (ja) 2023-08-03
US20240377180A1 (en) 2024-11-14
CN118575064A (zh) 2024-08-30

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