KR20240105432A - 검사 장치 및 막질 검사 방법 - Google Patents

검사 장치 및 막질 검사 방법 Download PDF

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Publication number
KR20240105432A
KR20240105432A KR1020247019418A KR20247019418A KR20240105432A KR 20240105432 A KR20240105432 A KR 20240105432A KR 1020247019418 A KR1020247019418 A KR 1020247019418A KR 20247019418 A KR20247019418 A KR 20247019418A KR 20240105432 A KR20240105432 A KR 20240105432A
Authority
KR
South Korea
Prior art keywords
sample
light
signal
charged particle
film quality
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
KR1020247019418A
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English (en)
Korean (ko)
Inventor
야스히로 시라사끼
미나미 우찌호
가즈후미 야찌
Original Assignee
주식회사 히타치하이테크
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 주식회사 히타치하이테크 filed Critical 주식회사 히타치하이테크
Publication of KR20240105432A publication Critical patent/KR20240105432A/ko
Pending legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/22—Optical, image processing or photographic arrangements associated with the tube
    • H01J37/226—Optical arrangements for illuminating the object; optical arrangements for collecting light from the object
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/10—Lenses
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/22—Optical, image processing or photographic arrangements associated with the tube
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/22—Optical, image processing or photographic arrangements associated with the tube
    • H01J37/224—Luminescent screens or photographic plates for imaging; Apparatus specially adapted therefor, e. g. cameras, TV-cameras, photographic equipment or exposure control; Optical subsystems specially adapted therefor, e. g. microscopes for observing image on luminescent screen
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/244—Detectors; Associated components or circuits therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
KR1020247019418A 2022-01-28 2022-01-28 검사 장치 및 막질 검사 방법 Pending KR20240105432A (ko)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2022/003391 WO2023145015A1 (ja) 2022-01-28 2022-01-28 検査装置および膜質検査方法

Publications (1)

Publication Number Publication Date
KR20240105432A true KR20240105432A (ko) 2024-07-05

Family

ID=87470952

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020247019418A Pending KR20240105432A (ko) 2022-01-28 2022-01-28 검사 장치 및 막질 검사 방법

Country Status (5)

Country Link
US (1) US20250046569A1 (https=)
JP (1) JP7686797B2 (https=)
KR (1) KR20240105432A (https=)
TW (1) TWI856467B (https=)
WO (1) WO2023145015A1 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2025253595A1 (ja) * 2024-06-06 2025-12-11 株式会社日立ハイテク 光照射装置、計測装置、および荷電粒子線装置
WO2025262940A1 (ja) * 2024-06-21 2025-12-26 株式会社日立ハイテク 荷電粒子線装置および試料観察方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000357483A (ja) 1999-06-11 2000-12-26 Hitachi Ltd 荷電粒子線画像に基づく検査または計測方法およびその装置並びに荷電粒子線装置
JP2006338881A (ja) 2005-05-31 2006-12-14 Hitachi High-Technologies Corp 電子顕微鏡応用装置および試料検査方法

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11118738A (ja) * 1997-10-14 1999-04-30 Advantest Corp 微小な測定対象物を高速に分析できる分析装置
JP4795883B2 (ja) * 2006-07-21 2011-10-19 株式会社日立ハイテクノロジーズ パターン検査・計測装置
JP2009043960A (ja) * 2007-08-09 2009-02-26 Panasonic Corp 欠陥画像自動収集方法
JP5325522B2 (ja) * 2008-10-15 2013-10-23 株式会社堀場製作所 複合型観察装置
US10410338B2 (en) * 2013-11-04 2019-09-10 Kla-Tencor Corporation Method and system for correlating optical images with scanning electron microscopy images
JP2017535914A (ja) * 2014-09-17 2017-11-30 オルボテック エルティーディーＯｒｂｏｔｅｃｈ Ｌｔｄ． 検査、テスト、デバッグ、及び表面の改変のための電子ビーム誘導プラズマ（ｅＢＩＰ）の適用
KR102347057B1 (ko) * 2015-08-12 2022-01-03 케이엘에이 코포레이션 전자 빔 이미지에서의 결함 위치 결정
WO2020234987A1 (ja) * 2019-05-21 2020-11-26 株式会社日立ハイテク 荷電粒子線装置
JP7148467B2 (ja) * 2019-08-30 2022-10-05 株式会社日立ハイテク 荷電粒子線装置
WO2022091180A1 (ja) * 2020-10-26 2022-05-05 株式会社日立ハイテク 荷電粒子線装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000357483A (ja) 1999-06-11 2000-12-26 Hitachi Ltd 荷電粒子線画像に基づく検査または計測方法およびその装置並びに荷電粒子線装置
JP2006338881A (ja) 2005-05-31 2006-12-14 Hitachi High-Technologies Corp 電子顕微鏡応用装置および試料検査方法

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
D. E. Aspnes, "Third-Derivative Modulation Spectroscopy with Low-Field Electroreflectance" Surface Science 37 (1973) 418-442

Also Published As

Publication number Publication date
WO2023145015A1 (ja) 2023-08-03
TWI856467B (zh) 2024-09-21
US20250046569A1 (en) 2025-02-06
TW202331771A (zh) 2023-08-01
JPWO2023145015A1 (https=) 2023-08-03
JP7686797B2 (ja) 2025-06-02

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