TWI856467B - 檢查裝置及膜質檢查方法 - Google Patents

檢查裝置及膜質檢查方法 Download PDF

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Publication number
TWI856467B
TWI856467B TW111150350A TW111150350A TWI856467B TW I856467 B TWI856467 B TW I856467B TW 111150350 A TW111150350 A TW 111150350A TW 111150350 A TW111150350 A TW 111150350A TW I856467 B TWI856467 B TW I856467B
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TW
Taiwan
Prior art keywords
sample
light
signal
irradiating
charged particle
Prior art date
Application number
TW111150350A
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English (en)
Chinese (zh)
Other versions
TW202331771A (zh
Inventor
白崎保宏
內保美南
谷內一史
Original Assignee
日商日立全球先端科技股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Application filed by 日商日立全球先端科技股份有限公司 filed Critical 日商日立全球先端科技股份有限公司
Publication of TW202331771A publication Critical patent/TW202331771A/zh
Application granted granted Critical
Publication of TWI856467B publication Critical patent/TWI856467B/zh

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/22—Optical, image processing or photographic arrangements associated with the tube
    • H01J37/226—Optical arrangements for illuminating the object; optical arrangements for collecting light from the object
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/10—Lenses
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/22—Optical, image processing or photographic arrangements associated with the tube
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/22—Optical, image processing or photographic arrangements associated with the tube
    • H01J37/224—Luminescent screens or photographic plates for imaging; Apparatus specially adapted therefor, e. g. cameras, TV-cameras, photographic equipment or exposure control; Optical subsystems specially adapted therefor, e. g. microscopes for observing image on luminescent screen
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/244—Detectors; Associated components or circuits therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
TW111150350A 2022-01-28 2022-12-28 檢查裝置及膜質檢查方法 TWI856467B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
WOPCT/JP2022/003391 2022-01-28
PCT/JP2022/003391 WO2023145015A1 (ja) 2022-01-28 2022-01-28 検査装置および膜質検査方法

Publications (2)

Publication Number Publication Date
TW202331771A TW202331771A (zh) 2023-08-01
TWI856467B true TWI856467B (zh) 2024-09-21

Family

ID=87470952

Family Applications (1)

Application Number Title Priority Date Filing Date
TW111150350A TWI856467B (zh) 2022-01-28 2022-12-28 檢查裝置及膜質檢查方法

Country Status (5)

Country Link
US (1) US20250046569A1 (https=)
JP (1) JP7686797B2 (https=)
KR (1) KR20240105432A (https=)
TW (1) TWI856467B (https=)
WO (1) WO2023145015A1 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2025253595A1 (ja) * 2024-06-06 2025-12-11 株式会社日立ハイテク 光照射装置、計測装置、および荷電粒子線装置
WO2025262940A1 (ja) * 2024-06-21 2025-12-26 株式会社日立ハイテク 荷電粒子線装置および試料観察方法

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000357483A (ja) * 1999-06-11 2000-12-26 Hitachi Ltd 荷電粒子線画像に基づく検査または計測方法およびその装置並びに荷電粒子線装置
JP2008027737A (ja) * 2006-07-21 2008-02-07 Hitachi High-Technologies Corp パターン検査・計測装置
JP2009043960A (ja) * 2007-08-09 2009-02-26 Panasonic Corp 欠陥画像自動収集方法
JP2010097768A (ja) * 2008-10-15 2010-04-30 Topcon Corp 複合型観察装置
TW202123289A (zh) * 2019-08-30 2021-06-16 日商日立全球先端科技股份有限公司 帶電粒子束裝置

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11118738A (ja) * 1997-10-14 1999-04-30 Advantest Corp 微小な測定対象物を高速に分析できる分析装置
JP4828162B2 (ja) 2005-05-31 2011-11-30 株式会社日立ハイテクノロジーズ 電子顕微鏡応用装置および試料検査方法
US10410338B2 (en) * 2013-11-04 2019-09-10 Kla-Tencor Corporation Method and system for correlating optical images with scanning electron microscopy images
JP2017535914A (ja) * 2014-09-17 2017-11-30 オルボテック エルティーディーＯｒｂｏｔｅｃｈ Ｌｔｄ． 検査、テスト、デバッグ、及び表面の改変のための電子ビーム誘導プラズマ（ｅＢＩＰ）の適用
KR102347057B1 (ko) * 2015-08-12 2022-01-03 케이엘에이 코포레이션 전자 빔 이미지에서의 결함 위치 결정
WO2020234987A1 (ja) * 2019-05-21 2020-11-26 株式会社日立ハイテク 荷電粒子線装置
WO2022091180A1 (ja) * 2020-10-26 2022-05-05 株式会社日立ハイテク 荷電粒子線装置

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000357483A (ja) * 1999-06-11 2000-12-26 Hitachi Ltd 荷電粒子線画像に基づく検査または計測方法およびその装置並びに荷電粒子線装置
JP2008027737A (ja) * 2006-07-21 2008-02-07 Hitachi High-Technologies Corp パターン検査・計測装置
JP2009043960A (ja) * 2007-08-09 2009-02-26 Panasonic Corp 欠陥画像自動収集方法
JP2010097768A (ja) * 2008-10-15 2010-04-30 Topcon Corp 複合型観察装置
TW202123289A (zh) * 2019-08-30 2021-06-16 日商日立全球先端科技股份有限公司 帶電粒子束裝置

Also Published As

Publication number Publication date
WO2023145015A1 (ja) 2023-08-03
US20250046569A1 (en) 2025-02-06
TW202331771A (zh) 2023-08-01
JPWO2023145015A1 (https=) 2023-08-03
KR20240105432A (ko) 2024-07-05
JP7686797B2 (ja) 2025-06-02

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