KR20210144570A - Holding mechanism of workpiece and machining apparatus - Google Patents

Abstract

An objective of the present invention is to provide a mechanism for holding a workpiece, capable of properly holding and simply separating a workpiece. To achieve the objective, the mechanism for holding a workpiece includes: a holding base having a holding surface of a shape and size corresponding to a workpiece including a ferromagnetic material; a magnet installed on the holding surface of the holding base, and generating a gravitational force between itself and the workpiece; and a release means applying a force getting away from the holding surface, with respect to the workpiece held on the holding surface of the holding base due to the gravitational force generated between itself and the magnet. The release means includes a cover sheet covering the holding surface, and a fluid supply part supplying fluids to between the holding surface and the cover sheet. On a surface opposite to the holding surface of the cover sheet, a layer including an uneven structure for suppressing the adsorption of the workpiece by the cover sheet, or a peeling accelerant for accelerating the peeling of the workpiece from the cover sheet, can be installed.

Description

A holding mechanism and a processing device for a workpiece

The present invention relates to a holding mechanism for holding a plate-shaped to-be-processed object, and a processing apparatus provided with the holding mechanism.

When a plate-shaped to-be-processed object typified by a semiconductor wafer, a package substrate, etc. is divided|segmented into a some chip|tip, processing apparatuses, such as a cutting apparatus and a laser processing apparatus, are used, for example. Such a processing apparatus is provided with a chuck table that sucks and holds a workpiece using a vacuum (negative pressure) generated by a pump or the like (see, for example, Patent Document 1).

The to-be-processed object is attracted|sucked and held by this chuck table with the adhesive tape called a dicing tape etc. being adhered to the lower surface, for example. In some cases, an annular frame is fixed to the outer peripheral portion of the adhesive tape in order to facilitate handling of the workpiece (a plurality of chips) after division.

By the way, since the above-mentioned adhesive tape used at the time of division|segmentation of a to-be-processed object is disposable, processing cost tends to become high. Therefore, a jig table etc. provided with the suction part corresponding to each chip|tip are proposed so that the to-be-processed object (plural chip|tips) after division|segmentation can be hold|maintained without using an adhesive tape (for example, refer patent document 2, 3).

On the other hand, in the jig table as described above, if the chip is miniaturized to a certain extent, the suction force acting on each chip is insufficient, and the chip cannot be properly held. The same problem has arisen also in the conveyance unit which attracts|sucks, holds|maintains, and conveys the to-be-processed object after division|segmentation. In order to solve this problem, in recent years, a holding mechanism which holds a workpiece (chip) by the magnetic force of a magnet and bulges a cover sheet arranged so as to cover the magnet has proposed a holding mechanism that allows the workpiece to be separated. (see, for example, Patent Document 4).

Japanese Laid-Open Patent Publication No. 2004-200440 Japanese Patent Laid-Open No. 2013-65603 Japanese Patent Laid-Open No. 2014-116486 Japanese Laid-Open Patent Publication No. 2017-228617

However, since the cover sheet of the holding mechanism described above is made of a soft resin such as rubber, when the magnet presses the workpiece against the cover sheet by a strong magnetic force, a vacuum is formed in the gap between the cover sheet and the workpiece, The surface tension of water remaining on the workpiece tends to act on the cover sheet. As a result, the to-be-processed object was adsorbed to the cover sheet, and even if the cover sheet was made to bulge, the to-be-processed object could not be separated from the cover sheet in some cases.

The present invention has been made in view of such a problem, and an object thereof is to provide a workpiece holding mechanism capable of realizing proper holding and simple separation of the workpiece, and a processing apparatus provided with the holding mechanism.

According to one aspect of the present invention, a holding base having a holding surface having a shape and size corresponding to a shape and size of a workpiece including a material exhibiting ferromagnetism, is provided on the holding surface of the holding base, and is an attractive force between the workpiece and a release means for applying a force in a direction away from the holding surface to the workpiece held on the holding surface side of the holding base by an attractive force generated between the magnets, The release means includes a cover sheet for covering the holding surface, and a fluid supply unit for supplying a fluid between the holding surface and the cover sheet, and on a surface of the cover sheet opposite to the holding surface, the cover A concave-convex structure for suppressing adsorption of the workpiece by the sheet, or a layer containing a peeling accelerator for accelerating peeling of the workpiece from the cover sheet, is provided between the magnet and the magnet through the cover sheet. There is provided a workpiece holding mechanism for holding the workpiece by the generated attractive force and generating a force in a direction away from the holding surface by bulging the cover sheet with a fluid supplied from the fluid supply unit. .

In one aspect of the present invention, the release means includes a first flow path connecting the holding surface and the fluid supply unit, a valve provided in the first flow path, and a second branching from the first flow path through the valve. An ejector further comprising a flow path, a suction port connected to the holding surface side of the valve of the first flow path, a supply port connected to the second flow path, and an outlet port through which the fluid supplied from the supply port is discharged, The valve includes a first state in which a fluid is supplied between the holding surface and the cover sheet through the first flow path, and a fluid is supplied to the supply port of the ejector through the second flow path to the suction port. It is preferred to transition to a second state that generates a negative pressure.

According to another aspect of the present invention, there is provided a chuck table for holding a workpiece including a material exhibiting ferromagnetic properties, a processing unit for processing the workpiece held on the chuck table, and loading the workpiece into the chuck table or or conveying means for unloading the workpiece from the chuck table, wherein the conveying means includes a holding base having a holding surface of a shape and size corresponding to the workpiece, and installed on the holding surface of the holding base a direction away from the holding surface with respect to the magnet generating an attractive force between the workpiece and the workpiece held on the holding surface side of the holding base by the attractive force generated between the magnet a release means for applying a force of On the surface opposite to the surface, a layer containing a concave-convex structure for suppressing adsorption of the workpiece by the cover sheet or a peeling accelerator for promoting peeling of the workpiece from the cover sheet is provided; The conveying means holds the work piece by an attractive force generated between the magnet and the magnet through the cover sheet, and from the holding surface by bulging the cover sheet with a fluid supplied from the fluid supply unit. A processing device for generating a force in a away direction is provided.

In another aspect of the present invention, the release means includes a first flow path connecting the holding surface and the fluid supply unit, a valve provided in the first flow path, and a first branched flow path from the first flow path through the valve. An ejector having a second flow path, a suction port connected to the holding surface side of the valve of the first flow path, a supply port connected to the second flow path, and an outlet port through which the fluid supplied from the supply port is discharged, , The valve includes a first state in which a fluid is supplied between the holding surface and the cover sheet through the first flow path, and the fluid is supplied to the supply port of the ejector through the second flow path to provide the suction port. It is preferable to switch to the second state to generate a negative pressure in the

A workpiece holding mechanism according to an aspect of the present invention is provided with a magnet for generating attractive force between a workpiece containing a material exhibiting ferromagnetism, on a holding surface of a holding base. Accordingly, the workpiece can be properly held by the attractive force generated between the magnet and the magnet. Similarly, the processing apparatus according to another aspect of the present invention can also properly hold the workpiece by the attractive force generated between the magnet and the magnet.

Further, the workpiece holding mechanism according to one aspect of the present invention includes release means for applying a force in a direction away from the holding surface to the workpiece held on the holding surface side of the holding base. And the cover sheet of this release means is provided with the uneven structure which suppresses adsorption|suction of the to-be-processed object by the cover sheet, or the layer containing the peeling promoter which accelerates|stimulates peeling of the to-be-processed object from the cover sheet.

Therefore, by applying a force to the work piece by this release means, the work piece can be easily separated from the holding base or the cover sheet. Similarly, in the processing apparatus according to another aspect of the present invention, the workpiece can be easily separated from the holding base or the cover sheet.

1 : is a perspective view which shows the structural example of a processing apparatus.
2 : is sectional drawing which shows the holding mechanism.
FIG. 3 is an enlarged cross-sectional view of a part of FIG. 2 .
Fig. 4 is a perspective view showing the structure on the holding surface side of the holding base.
Fig. 5(A) is a cross-sectional view showing a first step when a to-be-processed object is carried out, and Fig. 5(B) is a cross-sectional view showing a second step when a to-be-processed object is carried out.
Fig. 6(A) is a cross-sectional view showing a third step in carrying out a to-be-processed object, and Fig. 6(B) is a cross-sectional view showing a fourth step in carrying out a to-be-processed object.
7 is an enlarged cross-sectional view of a part of the holding mechanism according to the modification.

EMBODIMENT OF THE INVENTION With reference to an accompanying drawing, embodiment which concerns on one aspect of this invention is described. 1 : is a perspective view which shows the structural example of the processing apparatus (cutting apparatus) 2 which concerns on this embodiment. In addition, in this embodiment, although the processing apparatus 2 which cuts a plate-shaped to-be-processed object is demonstrated, the processing apparatus which concerns on this invention may be a laser processing apparatus etc. which process a to-be-processed object with a laser beam.

As shown in FIG. 1, the processing apparatus 2 is equipped with the base 4 which supports each structure. In the center of the base 4, an elongated rectangular opening 4a is formed in the X-axis direction (front-back direction, machining feed direction). In this opening 4a, an X-axis movement table 6, an X-axis movement mechanism (moving means) (not shown) for moving the X-axis movement table 6 in the X-axis direction, and an X-axis movement mechanism are provided. A dust-proof and drip-proof cover 8 is disposed.

Above the X-axis movement table 6, a chuck table 10 for holding a plate-shaped to-be-processed object 11 is provided. As shown in Fig. 1, the workpiece 11 is, for example, a rectangular package substrate, ceramic substrate, glass substrate, semiconductor wafer, etc. formed of a material such as iron, cobalt, and nickel exhibiting ferromagnetic properties. , an adhesive tape (adhesive film) 13 is attached.

However, there is no limitation on the shape of the workpiece 11 or the like. For example, a disk-shaped package substrate or the like can also be used as the to-be-processed object 11 . Moreover, you may fix an annular frame (support member) etc. to the outer edge part of the adhesive tape 13. As shown in FIG. In this case, the workpiece 11 is supported by an annular frame or the like via an adhesive tape 13 .

The chuck table 10 is connected to a rotational drive source (not shown) such as a motor, and rotates around a rotational axis substantially parallel to the Z-axis direction (vertical direction and height direction). In addition, when the X-axis movement table 6 is moved in the X-axis direction by the above-described X-axis movement mechanism, the chuck table 10 also moves in the X-axis direction.

For example, when the to-be-processed object 11 is loaded into the chuck table 10 or taken out from the chuck table 10, the front carrying-in/out area in which the to-be-processed object 11 is carried in and out, and the to-be-processed object 11 The chuck table 10 is moved in the X-axis direction between the machining areas in the center to be machined. In addition, when processing the to-be-processed object 11, the chuck table 10 is moved in the X-axis direction within the above-mentioned processing area|region (machining feed).

The upper surface of the chuck table 10 is formed in a shape corresponding to the to-be-processed object 11 (a substantially flat rectangle in this embodiment), and serves as a holding surface 10a for holding the to-be-processed object 11 . The holding surface 10a is substantially parallel to the X-axis direction and the Y-axis direction (left-right direction, indexing feed direction), and a suction source (not shown) passes through a flow path (not shown) formed inside the chuck table 10 . not connected).

On the upper surface of the base 4, a door-shaped support structure 14 that supports two sets of cutting units (processing units, processing means) 12 is disposed so as to extend over the opening 4a. Two sets of cutting unit moving mechanisms 16 for moving each cutting unit 12 in the Y-axis direction and the Z-axis direction are provided on the front upper portion of the support structure 14 .

Each cutting unit moving mechanism 16 is provided with a pair of Y-axis guide rails 18 which are arrange|positioned on the front surface of the support structure 14 and are parallel to a Y-axis direction in common. The Y-axis movement plate 20 constituting each cutting unit movement mechanism 16 is slidably attached to the Y-axis guide rail 18 . A nut part (not shown) is provided on the back side (rear side) of each Y-axis moving plate 20, and the Y-axis ball screw 22 parallel to the Y-axis guide rail 18 is provided in this nut part. ) are screwed together.

A Y-axis pulse motor 24 is connected to one end of each Y-axis ball screw 22 . When the Y-axis ball screw 22 is rotated by the Y-axis pulse motor 24 , the Y-axis moving plate 20 moves along the Y-axis guide rail 18 in the Y-axis direction.

A pair of Z-axis guide rails 26 parallel to the Z-axis direction are provided on the surface (front) of each Y-axis moving plate 20 . A Z-axis moving plate 28 is slidably attached to the Z-axis guide rail 26 . A nut part (not shown) is provided on the back side (rear side) of each Z-axis moving plate 28, and the Z-axis ball screw 30 parallel to the Z-axis guide rail 26 is provided in this nut part. ) are screwed together.

A Z-axis pulse motor 32 is connected to one end of each Z-axis ball screw 30 . When the Z-axis ball screw 30 is rotated by the Z-axis pulse motor 32 , the Z-axis moving plate 28 moves in the Z-axis direction along the Z-axis guide rail 26 .

A cutting unit 12 is provided under each Z-axis moving plate 28 . This cutting unit 12 has an annular cutting blade 34 attached to one end side of a spindle (not shown) serving as a rotating shaft. A nozzle 36 for supplying a cutting fluid (processing fluid) such as pure water is disposed in the vicinity of the cutting blade 34 . In addition, at a position adjacent to the cutting unit 12 , a camera 38 for imaging the workpiece 11 held by the chuck table 10 or the like is provided.

When the Y-axis moving plate 20 is moved in the Y-axis direction by each cutting unit moving mechanism 16, the cutting unit 12 and the camera 38 are moved in the Y-axis direction (indexing feed). Moreover, when the Z-axis movement plate 28 is moved in the Z-axis direction by each cutting unit moving mechanism 16, the cutting unit 12 and the camera 38 move in the Z-axis direction.

It is the front side of the support structure 14, and in the area|region on one side of the opening 4a in the left-right direction, the carrying-in side table (rod table) 40 which mounts the to-be-processed object 11 before a process is arrange|positioned. The upper surface of the carrying-in side table 40 is formed in the shape (in this embodiment, substantially flat rectangle) corresponding to the to-be-processed object 11, and becomes the holding surface 40a which holds the to-be-processed object 11. As shown in FIG. The holding surface 40a is connected to a suction source (not shown) via a flow path (not shown) or the like formed inside the carry-in side table 40 .

Below the carrying-in side table 40, the carrying-in side table moving mechanism 42 which moves the carrying-in side table 40 above the opening 4a is provided. The carrying-in side table moving mechanism 42 is provided with a pair of guide rails 44 extending toward the opening 4a from the area|region on the one side of the opening 4a, The carrying in by the force which arises from an air cylinder etc. The side table 40 is moved along the guide rail 44 . Specifically, the carry-in side table 40 moves between the load area adjacent to the carry-in/out area on one side of the opening 4a, and the area directly above the carry-in/out area.

A carrying-out side table (unloading table) 46 is arranged on the front side of the support structure 14 and on the other side of the opening 4a in the left-right direction on which the processed object 11 is placed. The upper surface of the carrying-out side table 46 is formed in the shape (in this embodiment, a substantially flat rectangle) corresponding to the to-be-processed object 11, and becomes the holding surface 46a which holds the to-be-processed object 11. As shown in FIG. The holding surface 46a is connected to the suction source 46d (refer to FIG. 6B) via a flow path 46b (refer to FIG. 6(B)), a valve 46c (refer to FIG. 6(B)), or the like. is becoming

Below the carrying-out-side table 46, the carrying-out-side table moving mechanism 48 which moves the carrying-out-side table 46 above the opening 4a is provided. The carrying-out side table moving mechanism 48 is provided with a pair of guide rails 50 extending toward the opening 4a from the area|region on the other side of the opening 4a, The carrying out is carried out by the force which generate|occur|produces from an air cylinder etc. The side table 46 is moved along the guide rail 50 . Specifically, the carrying-out side table 46 moves between the unloading area adjacent to the carrying-in/out area on the other side of the opening 4a, and the area directly above the carrying-in/out area.

In addition, although the carrying-in side table 40 and carrying-out side table 46 which can attract the to-be-processed object 11 are illustrated in this embodiment, the carrying-in side table and carrying-out side with which the processing apparatus 2 were equipped. The table should just be comprised so that the to-be-processed object 11 can be supported at least. That is, the carrying-in side table and the carrying-out side table may not necessarily attract the to-be-processed object 11. As shown in FIG.

Further above the region directly above the chuck table 10, and between the carrying-in side table 40 or the carrying-out side table 46, a conveying unit (conveying means) 52 for conveying and replacing the workpiece 11 is provided. is placed. This conveying unit 52 includes a holding mechanism (holding means) 54 for holding the workpiece 11 , and a linear movement mechanism (moving means) 56 for moving the holding mechanism 54 in the vertical direction. . The details of the holding mechanism 54 will be described later.

Between the opening 4a and the carrying-out side table 46, and in the area|region above the carrying-out-side table 46, the nozzle 58 which can inject air downward is arrange|positioned. This nozzle 58 blows out air to the to-be-processed object 11 etc. on the carrying-out side table 46, while the carrying-out side table 46 holding the to-be-processed object 11 moves from an upper area|region to an unloading area. Thereby, the cutting fluid adhering to the to-be-processed object 11 etc. can be dried and removed.

Next, the detail of the holding mechanism 54 with which the conveyance unit 52 was equipped is demonstrated. FIG. 2 is a cross-sectional view mainly showing the holding mechanism 54, and FIG. 3 is an enlarged cross-sectional view of a part of FIG. In Fig. 2, some constituent elements are expressed by functional blocks and symbols. 2 and 3 , the holding mechanism 54 according to the present embodiment holds a size corresponding to the workpiece 11 (a size capable of properly holding the entire upper surface of the workpiece 11 ). A base 60 is provided. Although the shape of the holding base 60 is arbitrary, it is set as the flat plate shape here.

The lower surface of the holding base 60 has a shape and size corresponding to the work piece 11 (a shape and size capable of properly holding the entire upper surface of the work piece 11 , in this embodiment, is substantially flat and has a shape and size for the work piece 11 ). ) is formed in a rectangle having the same size as the upper surface), and serves as a holding surface 60a for holding the workpiece 11 . 4 : is a perspective view which shows the structure of the holding surface 60a side of the holding base 60. As shown in FIG. 2, 3, and 4, a plurality of magnets 62 are provided on the holding surface 60a.

Each magnet 62 is, for example, a permanent magnet or an electromagnet. As described above, since the workpiece 11 contains a material exhibiting ferromagnetism, when the holding surface 60a of the holding base 60 is brought close to the workpiece 11, each magnet 62 and the An attractive force (magnetic force) can be generated between the workpieces 11 . The workpiece 11 is held on the holding surface 60a side of the holding base 60 by this attractive force. Conditions, such as the quantity and arrangement|positioning of the magnet 62, can be arbitrarily determined in the range which can hold the to-be-processed object 11 suitably.

The holding base 60 has a direction away from the holding surface 60a with respect to the to-be-processed object 11 held by the holding base 60 so that the workpiece 11 can be easily separated from the holding base 60 . A release mechanism (release means) 64 for applying a force is provided. The release mechanism 64 includes a cover sheet 66 that covers the holding surface 60a.

The cover sheet 66 is formed in the form of a thin film using, for example, a material such as rubber (natural rubber or synthetic rubber) or resin (for example, vinyl chloride or polyolefin) with high elasticity and low air permeability (liquid permeability), It is fixed to the holding base 60 by a fixing frame 68 surrounding the side of the holding base 60 . In this way, by fixing the cover sheet 66 to the entire circumference of the holding base 60 using the fixing frame 68 , the gap between the cover sheet 66 and the holding base 60 can be reduced and airtightness can be improved. .

Further, as shown in Fig. 3 , a plurality of convex portions (concave-convex structures) 66b are formed on the surface 66a of the cover sheet 66 on the opposite side to the holding surface 60a. Each convex portion 66b is provided, for example, at a position corresponding to each of a plurality of chips obtained by dividing the workpiece 11 (a position where each of the plurality of chips comes into contact), and the cover sheet 66 ) to suppress the adsorption of the workpiece 11 by the

That is, on the surface 66a of the cover sheet 66, the number of convex portions 66b equal to or greater than the number of chips obtained by dividing the workpiece 11 is provided. In addition, in this embodiment, although the some convex part 66b is provided in the surface 66a of the cover sheet 66, even if it provides a some concave part (concave-convex structure) instead of the some convex part 66b. good. Moreover, both the convex part 66b and the recessed part can also be provided.

The size, shape, and the like of each convex portion 66b (or concave portion) are also not particularly limited. For example, it has a size (length in the direction parallel to the surface 66a) of about 5% to 50% of the size of the chip (eg, the length of one side) obtained by dividing the workpiece 11, and the height difference ( If a convex portion 66b (or a concave portion) having a length in the direction perpendicular to the surface 66a) of about 50 μm to 500 μm is provided, the holding of the workpiece 11 is not inhibited and the cover sheet 66 is provided. ), the adsorption of the workpiece 11 can be appropriately suppressed.

A plurality of openings 60b are formed in the holding surface 60a, and one end side of the first flow path 70a is connected to the openings 60b. A fluid supply source (fluid supply unit) 72 for supplying a fluid is connected to the other end of the first flow path 70a. This fluid supply source 72 together with the cover sheet 66 constitutes a release mechanism 64 . In this embodiment, as the fluid supplied from the fluid supply source 72 , a gas such as air (air) is used.

A first valve 74a and a second valve 74b for controlling the supply of the fluid are provided on the fluid supply source 72 side of the first flow path 70a. The first valve 74a on the upstream side controls the supply of the fluid to the second valve 74b on the downstream side. Specifically, when the first valve 74a is opened, the fluid is supplied from the fluid supply source 72 to the second valve 74b. On the other hand, when the first valve 74a is closed, the fluid is not supplied to the second valve 74b from the fluid supply source 72 .

The second valve 74b transmits the fluid supplied from the fluid supply source 72 to one end side of the first flow path 70a (the holding surface 60a side, the opening 60b side) or the second valve 74b. ) through which it is supplied to any one of the second flow paths 70b branched from the first flow path 70a. Specifically, when the second valve 74b is placed in the first state, the fluid is supplied to one end side of the first flow path 70a. On the other hand, when the second valve 74b is placed in the second state, the fluid is supplied to the second flow path 70b.

For example, when the first valve 74a is opened and the second valve 74b is set to the first state, the fluid flows through the first flow path 70a, the opening 60b, and the like to the holding surface 60a and the cover sheet ( 66) is supplied. As described above, the cover sheet 66 is formed of a material having high elasticity and low air permeability (liquid permeability). Therefore, when a fluid is supplied between the holding surface 60a and the cover sheet 66, it is possible to bulge the cover sheet 66 downward (deform into a curved shape).

An ejector (aspirator) 76 is provided in the second flow path 70b. The suction port 76a of this ejector 76 is connected to the 1st flow path 70a between the 2nd valve 74b and the opening 60b (one end). That is, the suction port 76a is connected to the holding surface 60a side rather than the 2nd valve 74b of the 1st flow path 70a. In addition, the fluid that has passed through the second valve 74b is supplied to the supply port 76b of the ejector 76 through the second flow path 70b. In addition, the fluid supplied to the inside of the ejector 76 from the supply port 76b is discharged to the outside of the ejector 76 through the discharge port 76c.

For example, when the first valve 74a is opened and the second valve 74b is set to the second state, the fluid flows from the supply port 76b of the ejector 76 toward the discharge port 76c, and the ejector 76 is operated. A negative pressure is generated in the suction port 76a of the Therefore, by using this negative pressure, the fluid between the holding surface 60a and the cover sheet 66 can be discharged to the outside through the opening 60b, the first flow path 70a, the second flow path 70b, etc. have.

At one end side of the first flow path 70a, a pressure gauge 78 for measuring the pressure (in this embodiment, atmospheric pressure) of the first flow path 70a is provided. By measuring the pressure of the first flow path 70a with the pressure gauge 78, for example, it is possible to appropriately determine whether or not the fluid between the holding surface 60a and the cover sheet 66 has been sufficiently discharged.

Next, the conveying method of conveying the to-be-processed object 11 using the conveying unit 52 mentioned above is demonstrated. On the other hand, in this embodiment, the case where the workpiece 11 divided into a plurality of chips after cutting is transported from the chuck table 10 to the unloading side table 46 is described as an example. 11) from the carrying-in side table 40 to the chuck table 10 is also the same.

Fig. 5(A) is a cross-sectional view showing the first step when the to-be-processed object 11 is unloaded, and Fig. 5(B) is a cross-sectional view showing the second step when the to-be-processed object 11 is unloaded; Fig. 6(A) is a cross-sectional view showing a third step when the to-be-processed object 11 is carried out, and Fig. 6(B) is a cross-sectional view showing a fourth step when the to-be-processed object 11 is carried out.

When carrying out the to-be-processed object 11 from the chuck table 10 to the carrying-out side table 46, first, the position of the chuck table 10 is aligned with the carrying-in/out area, and the position of the carrying-out side table 46 is set directly above the area. other than (eg, unloading area). Further, after the fluid between the holding surface 60a and the cover sheet 66 is discharged, the first valve 74a is closed.

Thereafter, as shown in Fig. 5A, the holding mechanism 54 is lowered by the linear mechanism 56 (Fig. 1), and the holding base ( 60) of the holding surface (60a) is brought close. As described above, a plurality of magnets 62 are provided on the holding surface 60a. Therefore, when the holding surface 60a is brought closer to the workpiece 11 , an attractive force is generated between the magnet 62 and the workpiece 11 , and the workpiece 11 is held through the cover sheet 66 . It is held on the base 60 .

However, in the present embodiment, since the convex portions 66b are provided at positions corresponding to the respective chips on the surface 66a of the cover sheet 66, the work piece 11 is generated by the attractive force acting between the magnets 62 . ) (chips) are strongly pressed against the surface 66a of the cover sheet 66 , this to-be-processed object 11 is not adsorbed to the cover sheet 66 .

After holding the to-be-processed object 11 by the holding base 60, after stopping the suction of the to-be-processed object 11 (adhesive tape 13) by the holding surface 10a of the chuck table 10, As shown in FIG.5(B), the holding mechanism 54 is raised by the linear mechanism 56 (FIG. 1). Also at this time, the first valve 74a is closed.

Then, the carrying-out side table 46 is moved to an upper area|region, and as shown in FIG.6(A), the holding mechanism 54 is lowered. Moreover, the 1st valve 74a is opened, and the 2nd valve 74b is made into a 1st state. Thereby, the fluid is supplied between the holding surface 60a and the cover sheet 66 from the fluid supply source 72, and the cover sheet 66 bulges downward. In addition, the height of the holding mechanism 54 with respect to the holding surface 46a is adjusted in the range in which expansion (deformation) of the cover sheet 66 is not inhibited by the holding surface 46a.

When the cover sheet 66 bulges downward, the distance between the magnet 62 provided on the holding surface 60a and the workpiece 11 increases, and the attractive force acting between the magnet 62 and the workpiece 11 is gets smaller Therefore, in this state, for example, as shown in Fig. 6(B), when the valve 46c is opened and the negative pressure of the suction source 46d is applied to the holding surface 46a, the workpiece 11 (adhesive) is applied. The tape 13) is sucked and held by the carrying-out side table 46, and can be easily separated from the holding base 60 and the cover sheet 66.

After the workpiece 11 is separated from the holding base 60 or the cover sheet 66 , the holding mechanism 54 is raised. Further, the second valve 74b is switched to the second state. Accordingly, the fluid between the holding surface 60a and the cover sheet 66 is discharged to the outside, and the cover sheet 66 is in close contact with the holding surface 60a. That is, the shape of the holding surface 60a (a substantially flat shape in this embodiment) is reflected on the surface 66a of the cover sheet 66 . Thereby, it becomes possible to hold the to-be-processed object 11 again.

In addition, the state of discharging the fluid between the holding surface 60a and the cover sheet 66 can be determined based on the pressure in the first flow path 70a measured by the pressure gauge 78 . For example, when the pressure in the first flow path 70a measured by the pressure gauge 78 is higher than a predetermined threshold value (or higher than the threshold value), a space between the holding surface 60a and the cover sheet 66 is provided. It is determined that the fluid remains.

Further, when the pressure in the first flow path 70a measured by the pressure gauge 78 is equal to or less than a predetermined threshold value (or lower than the threshold value), between the holding surface 60a and the cover sheet 66 . It is determined that there is no fluid remaining in the In addition, in a state where the fluid remains between the holding surface 60a and the cover sheet 66 , the holding mechanism 54 cannot properly hold the to-be-processed object 11 , so the holding surface 60a and the cover sheet 66 . What is necessary is just to wait for the conveyance unit 52 until discharge|emission of the fluid between (66) is complete. When the discharge of the fluid between the holding surface 60a and the cover sheet 66 is completed, the shape of the holding surface 60a is reflected on the surface 66a of the cover sheet 66 .

As described above, the holding mechanism 54 and the processing device 2 of the workpiece 11 according to the present embodiment have a magnet 62 that generates an attractive force between the holding mechanism 54 and the workpiece 11 containing a material exhibiting ferromagnetism. ) is provided on the holding surface 60a of the holding base 60 . Therefore, the to-be-processed object 11 can be suitably hold|maintained by the attractive force which generate|occur|produces between the magnet 62.

Moreover, the holding mechanism 54 and the processing apparatus 2 of the to-be-processed object 11 which concern on this embodiment hold|maintain with respect to the to-be-processed object 11 hold|maintained on the holding surface 60a side of the holding base 60. A release mechanism (release means) 64 for applying a force in a direction away from the surface 60a is provided. And the cover sheet 66 of this release mechanism 64 is provided with the convex part (irregularity structure) 66b which suppresses adsorption|suction of the to-be-processed object 11 by the cover sheet 66. As shown in FIG. Therefore, by applying a force to the to-be-processed object 11 with this release mechanism 64, the to-be-processed object 11 can be easily separated from the holding base 60 or the cover sheet 66. As shown in FIG.

In addition, this invention is not restrict|limited to description of embodiment mentioned above, It can change variously and can implement. For example, in the above-described embodiment, a convex portion (concave-convex structure) 66b is provided on the surface 66a of the cover sheet 66 so that the to-be-processed object 11 can be easily separated from the cover sheet 66, However, the cover sheet provided with the holding mechanism of the present invention may be provided with a layer containing a peeling accelerator for promoting peeling of the workpiece 11 .

7 is an enlarged cross-sectional view of a part of the holding mechanism according to the modification. In addition, many of the components of the holding mechanism which concern on this modification are common with the component of the holding mechanism 54 which concerns on the above-mentioned embodiment. Therefore, the same code|symbol is attached|subjected to the component common to the holding mechanism 54 mentioned above, and the detailed description is abbreviate|omitted.

The release mechanism (release means) of the holding mechanism according to the modification also includes a cover sheet 86 covering the holding surface 60a. The material and the like of the cover sheet 86 are the same as those of the cover sheet 66 according to the above-described embodiment. As shown in Fig. 7, on the surface 86a opposite to the holding surface 60a of the cover sheet 86, a layer 86b containing a peeling accelerator for accelerating peeling of the workpiece 11 is provided. is being installed

The peeling accelerator used for the layer 86b is, for example, a fluororesin represented by polytetrafluoroethylene. By providing the layer 86b containing such a peeling accelerator on the surface 86a of the cover sheet 86, the workpiece 11 is peeled from the cover sheet 86 without inhibiting the holding of the workpiece 11. be able to do

In addition, for example, the size of the holding surface 60a of the holding base 60 may be larger than the upper surface of the to-be-processed object 11 . Further, for example, a pattern made of a conductive material may be formed on the surface of the cover sheet or the like. In this case, generation of static electricity due to deformation of the cover sheet or the like can be suppressed. In addition, as the fluid supplied from the fluid supply source, a liquid such as water may be used. Moreover, the holding mechanism of this invention can also be used for the chuck table of a processing apparatus, etc.

In addition, the structure, method, etc. which concern on the above-mentioned embodiment and modified example can be implemented by changing suitably, unless it deviates from the range of the objective of this invention.

2: Machining unit (cutting unit) 4: Base
4a: Aperture 6: X-axis movement table
8: dust-proof cover 10: chuck table
10a: holding surface 12: cutting unit (machining unit, machining means)
14: support structure 16: cutting unit moving mechanism
18: Y-axis guide rail 20: Y-axis moving plate
22: Y-axis ball screw 24: Y-axis pulse motor
26: Z-axis guide rail 28: Z-axis moving plate
30: Z-axis ball screw 32: Z-axis pulse motor
34: cutting blade 36: nozzle
38: Camera 40: Carry-in side table (load table)
40a: holding surface 42: carrying-in side table moving mechanism
44: guide rail 46: carry-out side table (unload table)
46a: holding surface 46b: Euro
46c: valve 46d: suction source
48: transport side table moving mechanism 50: guide rail
52: conveying unit (conveying means) 54: holding mechanism (holding means)
56: linear mechanism (moving means) 58: nozzle
60: holding base 60a: holding surface
60b: opening 62: magnet
64: release mechanism (release means) 66: cover sheet
66a: Surface 66b: Convex (concave-convex structure)
68: fixed range 70a: first flow path
70b: second flow path 72: fluid supply source (fluid supply part)
74a: first valve 74b: second valve
76: ejector (aspirator) 76a: suction port
76b: inlet 76c: outlet
78: pressure gauge 86: cover sheet
86a: plane 86b: layer
11: workpiece 13: adhesive tape

Claims (4)

A holding base having a holding surface having a shape and size corresponding to a workpiece including a material exhibiting ferromagnetic properties;
a magnet installed on the holding surface of the holding base and generating an attractive force between it and the workpiece;
and release means for applying a force in a direction away from the holding surface to the workpiece held on the holding surface side of the holding base by an attractive force generated between the magnet and the holding surface;
The release means,
a cover sheet covering the holding surface;
a fluid supply unit for supplying a fluid between the holding surface and the cover sheet;
A layer containing, on a surface of the cover sheet opposite to the holding surface, an uneven structure for suppressing adsorption of the workpiece by the cover sheet, or a peeling accelerator for promoting peeling of the workpiece from the cover sheet. is installed,
A force in a direction away from the holding surface by holding the workpiece by an attractive force generated between the magnet and the cover sheet through the cover sheet and bulging the cover sheet with the fluid supplied from the fluid supply unit. A holding mechanism for a workpiece that generates According to claim 1,
The release means,
a first flow path connecting the holding surface and the fluid supply unit;
a valve installed in the first flow path;
a second flow path branched from the first flow path through the valve;
Further comprising an ejector having a suction port connected to the holding surface side than the valve of the first flow path, a supply port connected to the second flow path, and an outlet port through which the fluid supplied from the supply port is discharged,
The valve includes a first state in which a fluid is supplied between the holding surface and the cover sheet through the first flow path, and a fluid is supplied to the supply port of the ejector through the second flow path to the suction port. A workpiece holding mechanism that is switched to a second state for generating a negative pressure. a chuck table for holding a workpiece containing a material exhibiting ferromagnetic properties;
a processing unit for processing the workpiece held on the chuck table;
and conveying means for loading the workpiece into the chuck table or unloading the workpiece from the chuck table;
The conveying means is
a holding base having a holding surface having a shape and size corresponding to the workpiece;
a magnet installed on the holding surface of the holding base and generating an attractive force between it and the workpiece;
and release means for applying a force in a direction away from the holding surface to the workpiece held on the holding surface side of the holding base by an attractive force generated between the magnet and the holding surface;
The release means,
a cover sheet covering the holding surface;
a fluid supply unit for supplying a fluid between the holding surface and the cover sheet;
A layer containing, on a surface of the cover sheet opposite to the holding surface, an uneven structure for suppressing adsorption of the workpiece by the cover sheet, or a peeling accelerator for promoting peeling of the workpiece from the cover sheet. is being installed,
The conveying means holds the work piece by an attractive force generated between the magnet and the magnet through the cover sheet, and bulges the cover sheet with a fluid supplied from the fluid supply unit to bulge the holding surface. A processing device that generates a force in a direction away from it. 4. The method of claim 3,
The release means,
a first flow path connecting the holding surface and the fluid supply unit;
a valve installed in the first flow path;
a second flow path branched from the first flow path through the valve;
Further comprising an ejector having a suction port connected to the holding surface side than the valve of the first flow path, a supply port connected to the second flow path, and an outlet port through which the fluid supplied from the supply port is discharged,
The valve includes a first state in which a fluid is supplied between the holding surface and the cover sheet through the first flow path, and a fluid is supplied to the supply port of the ejector through the second flow path to the suction port. A machining device that transitions to a second state that generates a negative pressure.

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