KR20210137447A - 진공 펌프, 케이싱 및 흡기구 플랜지 - Google Patents

진공 펌프, 케이싱 및 흡기구 플랜지 Download PDF

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Publication number
KR20210137447A
KR20210137447A KR1020217026366A KR20217026366A KR20210137447A KR 20210137447 A KR20210137447 A KR 20210137447A KR 1020217026366 A KR1020217026366 A KR 1020217026366A KR 20217026366 A KR20217026366 A KR 20217026366A KR 20210137447 A KR20210137447 A KR 20210137447A
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KR
South Korea
Prior art keywords
casing
vacuum pump
flange
intake
outer cylinder
Prior art date
Application number
KR1020217026366A
Other languages
English (en)
Korean (ko)
Inventor
나호코 요시하라
요시유키 사카구치
요헤이 오가와
Original Assignee
에드워즈 가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by 에드워즈 가부시키가이샤 filed Critical 에드워즈 가부시키가이샤
Priority claimed from PCT/JP2020/011071 external-priority patent/WO2020195942A1/ja
Publication of KR20210137447A publication Critical patent/KR20210137447A/ko

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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
KR1020217026366A 2019-03-26 2020-03-13 진공 펌프, 케이싱 및 흡기구 플랜지 KR20210137447A (ko)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JP2019058715 2019-03-26
JPJP-P-2019-058715 2019-03-26
JPJP-P-2019-171350 2019-09-20
JP2019171350A JP7378697B2 (ja) 2019-03-26 2019-09-20 真空ポンプ
PCT/JP2020/011071 WO2020195942A1 (ja) 2019-03-26 2020-03-13 真空ポンプ、ケーシング及び吸気口フランジ

Publications (1)

Publication Number Publication Date
KR20210137447A true KR20210137447A (ko) 2021-11-17

Family

ID=72716160

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020217026366A KR20210137447A (ko) 2019-03-26 2020-03-13 진공 펌프, 케이싱 및 흡기구 플랜지

Country Status (3)

Country Link
JP (1) JP7378697B2 (ja)
KR (1) KR20210137447A (ja)
CN (1) CN113557360A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2023063735A1 (ko) 2021-10-15 2023-04-20 주식회사 엘지에너지솔루션 가압 채널 및 이를 포함하는 이차전지 충방전 장치

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008075489A (ja) 2006-09-20 2008-04-03 Edwards Kk 真空ポンプ及びフランジ
JP2015059426A (ja) 2013-09-17 2015-03-30 エドワーズ株式会社 真空ポンプの固定部品

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6028298U (ja) * 1983-07-30 1985-02-26 株式会社島津製作所 タ−ボ分子ポンプ
JP4250353B2 (ja) 2001-06-22 2009-04-08 エドワーズ株式会社 真空ポンプ
JP4703279B2 (ja) 2004-06-25 2011-06-15 株式会社大阪真空機器製作所 複合分子ポンプの断熱構造
EP1811175B1 (en) * 2004-10-15 2011-10-05 Edwards Japan Limited Damper and vacuum pump
WO2006068014A1 (ja) 2004-12-20 2006-06-29 Boc Edwards Japan Limited 端部間の接続構造及び該構造を適用した真空システム
DE102005059208A1 (de) * 2005-12-12 2007-06-28 Pfeiffer Vacuum Gmbh Vakuumgehäuse
JP6664269B2 (ja) 2016-04-14 2020-03-13 東京エレクトロン株式会社 加熱装置およびターボ分子ポンプ

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008075489A (ja) 2006-09-20 2008-04-03 Edwards Kk 真空ポンプ及びフランジ
JP2015059426A (ja) 2013-09-17 2015-03-30 エドワーズ株式会社 真空ポンプの固定部品

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2023063735A1 (ko) 2021-10-15 2023-04-20 주식회사 엘지에너지솔루션 가압 채널 및 이를 포함하는 이차전지 충방전 장치

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Publication number Publication date
JP7378697B2 (ja) 2023-11-14
JP2020165422A (ja) 2020-10-08
CN113557360A (zh) 2021-10-26

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