CN113557360A - 真空泵、壳及吸气口凸缘 - Google Patents

真空泵、壳及吸气口凸缘 Download PDF

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Publication number
CN113557360A
CN113557360A CN202080020397.4A CN202080020397A CN113557360A CN 113557360 A CN113557360 A CN 113557360A CN 202080020397 A CN202080020397 A CN 202080020397A CN 113557360 A CN113557360 A CN 113557360A
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CN
China
Prior art keywords
vacuum pump
housing
flange
air inlet
inlet flange
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Application number
CN202080020397.4A
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English (en)
Chinese (zh)
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CN113557360B (zh
Inventor
吉原菜穗子
坂口祐幸
小川洋平
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Edwards Japan Ltd
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Edwards Japan Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by Edwards Japan Ltd filed Critical Edwards Japan Ltd
Priority claimed from PCT/JP2020/011071 external-priority patent/WO2020195942A1/ja
Publication of CN113557360A publication Critical patent/CN113557360A/zh
Application granted granted Critical
Publication of CN113557360B publication Critical patent/CN113557360B/zh
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
CN202080020397.4A 2019-03-26 2020-03-13 真空泵、壳及吸气口凸缘 Active CN113557360B (zh)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JP2019058715 2019-03-26
JP2019-058715 2019-03-26
JP2019171350A JP7378697B2 (ja) 2019-03-26 2019-09-20 真空ポンプ
JP2019-171350 2019-09-20
PCT/JP2020/011071 WO2020195942A1 (ja) 2019-03-26 2020-03-13 真空ポンプ、ケーシング及び吸気口フランジ

Publications (2)

Publication Number Publication Date
CN113557360A true CN113557360A (zh) 2021-10-26
CN113557360B CN113557360B (zh) 2024-07-26

Family

ID=72716160

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202080020397.4A Active CN113557360B (zh) 2019-03-26 2020-03-13 真空泵、壳及吸气口凸缘

Country Status (3)

Country Link
JP (1) JP7378697B2 (ja)
KR (1) KR20210137447A (ja)
CN (1) CN113557360B (ja)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20230053972A (ko) 2021-10-15 2023-04-24 주식회사 엘지에너지솔루션 가압 채널 및 이를 포함하는 이차전지 충방전 장치

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003003988A (ja) * 2001-06-22 2003-01-08 Boc Edwards Technologies Ltd 真空ポンプ
JP2006037951A (ja) * 2004-06-25 2006-02-09 Osaka Vacuum Ltd 複合分子ポンプの断熱構造
WO2008035497A1 (fr) * 2006-09-20 2008-03-27 Edwards Japan Limited Pompe À vide et bride
US20080085202A1 (en) * 2004-10-15 2008-04-10 Boc Edwards Japan Limited Damper and Vacuum Pump
US7495173B2 (en) * 2005-12-12 2009-02-24 Hilti Aktiengesellschaft Vacuum housing
JP2017190744A (ja) * 2016-04-14 2017-10-19 東京エレクトロン株式会社 加熱装置およびターボ分子ポンプ

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6028298U (ja) * 1983-07-30 1985-02-26 株式会社島津製作所 タ−ボ分子ポンプ
JPWO2006068014A1 (ja) * 2004-12-20 2008-06-12 エドワーズ株式会社 端部間の接続構造及び該構造を適用した真空システム
JP2015059426A (ja) 2013-09-17 2015-03-30 エドワーズ株式会社 真空ポンプの固定部品

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003003988A (ja) * 2001-06-22 2003-01-08 Boc Edwards Technologies Ltd 真空ポンプ
JP2006037951A (ja) * 2004-06-25 2006-02-09 Osaka Vacuum Ltd 複合分子ポンプの断熱構造
US20080085202A1 (en) * 2004-10-15 2008-04-10 Boc Edwards Japan Limited Damper and Vacuum Pump
US7495173B2 (en) * 2005-12-12 2009-02-24 Hilti Aktiengesellschaft Vacuum housing
WO2008035497A1 (fr) * 2006-09-20 2008-03-27 Edwards Japan Limited Pompe À vide et bride
JP2017190744A (ja) * 2016-04-14 2017-10-19 東京エレクトロン株式会社 加熱装置およびターボ分子ポンプ

Also Published As

Publication number Publication date
CN113557360B (zh) 2024-07-26
JP2020165422A (ja) 2020-10-08
JP7378697B2 (ja) 2023-11-14
KR20210137447A (ko) 2021-11-17

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