KR20210127093A - 다이싱 다이 본드 필름 - Google Patents

다이싱 다이 본드 필름 Download PDF

Info

Publication number
KR20210127093A
KR20210127093A KR1020210044489A KR20210044489A KR20210127093A KR 20210127093 A KR20210127093 A KR 20210127093A KR 1020210044489 A KR1020210044489 A KR 1020210044489A KR 20210044489 A KR20210044489 A KR 20210044489A KR 20210127093 A KR20210127093 A KR 20210127093A
Authority
KR
South Korea
Prior art keywords
die
layer
adhesive layer
molecular weight
mass
Prior art date
Application number
KR1020210044489A
Other languages
English (en)
Korean (ko)
Inventor
아키히로 후쿠이
겐지 오니시
유타 기무라
슘페이 다나카
Original Assignee
닛토덴코 가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 닛토덴코 가부시키가이샤 filed Critical 닛토덴코 가부시키가이샤
Publication of KR20210127093A publication Critical patent/KR20210127093A/ko

Links

Images

Classifications

    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09JADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J7/00Adhesives in the form of films or foils
    • C09J7/30Adhesives in the form of films or foils characterised by the adhesive composition
    • C09J7/38Pressure-sensitive adhesives [PSA]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6835Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
    • H01L21/6836Wafer tapes, e.g. grinding or dicing support tapes
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09JADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J11/00Features of adhesives not provided for in group C09J9/00, e.g. additives
    • C09J11/02Non-macromolecular additives
    • C09J11/06Non-macromolecular additives organic
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09JADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J133/00Adhesives based on homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by only one carboxyl radical, or of salts, anhydrides, esters, amides, imides, or nitriles thereof; Adhesives based on derivatives of such polymers
    • C09J133/04Homopolymers or copolymers of esters
    • C09J133/06Homopolymers or copolymers of esters of esters containing only carbon, hydrogen and oxygen, the oxygen atom being present only as part of the carboxyl radical
    • C09J133/08Homopolymers or copolymers of acrylic acid esters
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09JADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J201/00Adhesives based on unspecified macromolecular compounds
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09JADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J7/00Adhesives in the form of films or foils
    • C09J7/20Adhesives in the form of films or foils characterised by their carriers
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09JADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J2203/00Applications of adhesives in processes or use of adhesives in the form of films or foils
    • C09J2203/326Applications of adhesives in processes or use of adhesives in the form of films or foils for bonding electronic components such as wafers, chips or semiconductors
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09JADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J2301/00Additional features of adhesives in the form of films or foils
    • C09J2301/30Additional features of adhesives in the form of films or foils characterized by the chemical, physicochemical or physical properties of the adhesive or the carrier
    • C09J2301/312Additional features of adhesives in the form of films or foils characterized by the chemical, physicochemical or physical properties of the adhesive or the carrier parameters being the characterizing feature
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2221/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof covered by H01L21/00
    • H01L2221/67Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere
    • H01L2221/683Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L2221/68304Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
    • H01L2221/68327Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support used during dicing or grinding

Landscapes

  • Organic Chemistry (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Dicing (AREA)
  • Adhesives Or Adhesive Processes (AREA)
  • Laminated Bodies (AREA)
  • Adhesive Tapes (AREA)
KR1020210044489A 2020-04-13 2021-04-06 다이싱 다이 본드 필름 KR20210127093A (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2020071684A JP7510270B2 (ja) 2020-04-13 2020-04-13 ダイシングダイボンドフィルム
JPJP-P-2020-071684 2020-04-13

Publications (1)

Publication Number Publication Date
KR20210127093A true KR20210127093A (ko) 2021-10-21

Family

ID=78079962

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020210044489A KR20210127093A (ko) 2020-04-13 2021-04-06 다이싱 다이 본드 필름

Country Status (4)

Country Link
JP (1) JP7510270B2 (ja)
KR (1) KR20210127093A (ja)
CN (1) CN113539926A (ja)
TW (1) TW202142659A (ja)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2019009203A (ja) 2017-06-22 2019-01-17 日東電工株式会社 ダイシングダイボンドフィルム
JP2019067996A (ja) 2017-10-04 2019-04-25 日立化成株式会社 ダイシング用粘着テープ及びダイシングダイボンディング一体型テープ

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4430085B2 (ja) * 2007-03-01 2010-03-10 日東電工株式会社 ダイシング・ダイボンドフィルム
JP6539336B2 (ja) * 2015-03-23 2019-07-03 リンテック株式会社 半導体加工用シートおよび半導体装置の製造方法
JP2017203149A (ja) * 2017-02-28 2017-11-16 株式会社クラレ アクリル系ブロック共重合体を含む樹脂組成物
JP7181087B2 (ja) * 2017-08-29 2022-11-30 積水化学工業株式会社 粘着剤組成物、粘着テープ及び半導体デバイスの保護方法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2019009203A (ja) 2017-06-22 2019-01-17 日東電工株式会社 ダイシングダイボンドフィルム
JP2019067996A (ja) 2017-10-04 2019-04-25 日立化成株式会社 ダイシング用粘着テープ及びダイシングダイボンディング一体型テープ

Also Published As

Publication number Publication date
JP7510270B2 (ja) 2024-07-03
TW202142659A (zh) 2021-11-16
JP2021168363A (ja) 2021-10-21
CN113539926A (zh) 2021-10-22

Similar Documents

Publication Publication Date Title
JP6580447B2 (ja) 粘着シート及び半導体装置の製造方法
WO2014156127A1 (ja) 積層フィルムの製造方法、積層フィルムおよびそれを用いた半導体装置の製造方法
JP6423242B2 (ja) ダイシングフィルムおよび半導体装置の製造方法
KR20200108785A (ko) 접착 필름을 갖는 다이싱 테이프
JP2007081060A (ja) ウエハ加工用粘接着テープ
JP5697061B1 (ja) 半導体ウェハ加工用粘着テープおよび半導体ウェハの加工方法
KR20210001953A (ko) 다이싱 테이프 및 다이싱 다이 본드 필름
KR20210127093A (ko) 다이싱 다이 본드 필름
KR20210080200A (ko) 다이싱 다이 본드 필름
JPWO2019131603A1 (ja) 放射線硬化型ダイシング用粘着テープ
JP7446773B2 (ja) ダイシングテープ及びダイシングダイボンドフィルム
JP7510283B2 (ja) ダイシングテープ及びダイシングダイボンドフィルム
JP7523956B2 (ja) ダイシングテープ及びダイシングダイボンドフィルム
JP6983200B2 (ja) ダイボンドフィルム及びダイシングダイボンドフィルム
JP2024094818A (ja) ダイシングテープ
KR20220077083A (ko) 반도체 웨이퍼 탑재용 기재, 다이싱 테이프 및 다이싱 다이 본드 필름
KR20210055599A (ko) 다이싱 테이프 및 다이싱 다이 본드 필름
KR20210001954A (ko) 다이싱 테이프 및 다이싱 다이 본드 필름

Legal Events

Date Code Title Description
A201 Request for examination