KR20210068337A - workpiece processing device and workpiece conveying system - Google Patents

Abstract

A workpiece processing device of the present invention comprises a first rotation distance information storage unit for storing a plurality of first rotation distance information, which is information acquired by correlating a rotation angle when a circular workpiece is rotated with the first distance information, which is distance information from the rotation center of the workpiece to the edge corresponding to the rotation angle; an acquisition part that obtains information for aligning the workpiece using the plurality of first rotation distance information accumulated in the first rotation distance information storage part, information for specifying the direction of the workpiece, and information on the defective part of the edge of the workpiece; and an output part for outputting information for aligning the work acquired by the acquisition part, information for specifying the direction of the workpiece, and information on the defective part. Therefore, the present invention can properly perform the defect detection of the workpiece.

Description

Workpiece processing device and workpiece conveying system TECHNICAL FIELD

BACKGROUND OF THE INVENTION Field of the Invention [0001] The present invention relates to a workpiece processing apparatus and the like that perform positioning of a workpiece.

In the prior art, the wafer is rotated to detect and store the edge position corresponding to the rotation angle, and the eccentricity and direction of the wafer position are calculated from the maximum and minimum values of the detection signal, and by this eccentricity data As the centering of the wafer is performed, by calculating a place where the rate of change of the edge position data becomes more than a certain level at the start point and end point of the flat portion etc. formed on the wafer, the change in the edge position is more rapid than in other portions. It is known that it is carried out in the same equipment so as to be in a specific position with respect to other steps such as a conveying device. (See, for example, Patent Document 1)

Japanese Patent Publication No. 2729297 (Clause 1, Fig. 1, etc.)

For example, by transferring the workpiece positioned using the conventional apparatus as described above to an apparatus that performs CVD (Chemical Vapordeposition) or CMP (Chemical Mechanical Polishing) by means of a workpiece transfer device, a predetermined processing for the workpiece is performed. can be done appropriately.

When a process such as CVD or polishing is performed on a workpiece such as a wafer having burrs or chipping at the edge, the workpiece may be damaged by heat or pressure applied to the workpiece. For this reason, it is desirable to conduct an inspection to detect the presence or absence of defective parts such as burrs and chipping before processing the workpiece. It is desirable to conduct an inspection of the defective part.

However, when inspecting a defective part of a workpiece, once the workpiece is transferred from the workpiece conveying device to the device for inspecting the defective part, the defective part is inspected, and after inspection, the workpiece is transferred from the workpiece conveying device to the workpiece positioning device Therefore, it is necessary to perform positioning, and there is a problem in that it takes time to transport the workpiece to an apparatus for inspecting or inspecting the workpiece.

In addition, in addition to the positioning device, it is necessary to install a device for performing the inspection, and at the same time as the cost is high, it is necessary to secure an installation place for the inspection device in the conveyance path of the workpiece, and there was a problem that it is difficult to achieve space saving.

As a result, in the prior art, there was a problem in that it was not possible to properly detect a workpiece defect.

An object of the present invention is to solve the above problems, and an object of the present invention is to provide a work processing apparatus and the like capable of appropriately performing defect detection of a work.

The workpiece processing apparatus of the present invention relates to a plurality of first rotation distances that are information having a rotation angle when a circular workpiece is rotated and first distance information that is distance information from a rotation center to an edge of the workpiece corresponding to the rotation angle. A first rotation distance information storage unit in which information is stored, information for aligning the work using the plurality of first rotation distance information accumulated in the first rotation distance information storage unit, information for specifying the direction of the work, and A work processing apparatus comprising: an obtaining unit which obtains information on a defective portion of a work edge; and an output unit for outputting information for aligning the work acquired by the obtaining unit, information for specifying a work direction, and information on the defective portion; to be.

With this configuration, when the position and orientation of the work are aligned, edge defect detection of the work can be performed, and defect detection of the work can be appropriately performed.

In addition, the work processing apparatus of the present invention, in the work processing apparatus, by using the information on the edge defective portion of the work output by the output unit to move the work so that the edge defective portion of the work is placed in the imaging area that is a predetermined area It is a work processing apparatus which further comprises a moving part, and an imaging part which images the edge defect part of the workpiece|work arrange|positioned in the imaging area, and an image output part which outputs the image picked up by the imaging part.

With this configuration, the edge defect portion of the work can be easily confirmed.

Moreover, the work conveying system of this invention is a work conveying system provided with the said work processing apparatus and the work conveying apparatus which delivers a workpiece|work to the work processing apparatus.

With this configuration, the processing for aligning the position and orientation of the workpiece and the processing for detecting the defective part can be performed at once in the workpiece processing device during transport, and necessary for the processing for aligning the position and orientation of the workpiece and processing for detecting the defective part time can be shortened. In addition, the movement of the workpiece during transport can be minimized.

According to the work processing apparatus and the like according to the present invention, it is possible to appropriately detect defects in the work.

1 is a block diagram of a work processing apparatus according to a first embodiment of the present invention.
Fig. 2(a) is a schematic diagram for explaining an example of a circular work used in the work processing apparatus.
Fig. 2(b) is a schematic diagram for explaining a process of obtaining correction information of the work processing apparatus.
It is a schematic diagram which shows an example of the edge position detector of the same work processing apparatus.
It is a top view which shows an example of the workpiece|work conveyance system provided with the same workpiece processing apparatus.
5 is a diagram for explaining a relational expression used by the work processing apparatus.
6 is a flowchart for explaining the operation of the work processing apparatus.
It is a flowchart explaining the operation|movement of the workpiece|work conveyance system provided with the same workpiece processing apparatus.
8 is a diagram illustrating a first rotation distance information management table of the work processing apparatus.
9 is a graph for explaining first rotation distance information of the work processing apparatus.
Fig. 10(a) is a graph of a range in which the rotation angle of the first rotation distance information of the work processing apparatus is 0 degrees or more and less than 90 degrees.
Fig. 10(b) is a graph of a range in which the rotation angle of the first rotation distance information of the work processing apparatus is 90 degrees or more and less than 180 degrees.
10( c ) is a graph of a range in which the rotation angle of the first rotation distance information of the work processing apparatus is 180 degrees or more and less than 270 degrees.
10( d ) is a graph of a range in which the rotation angle of the first rotation distance information of the work processing apparatus is 270 degrees or more and less than 360 degrees.
Fig. 10(e) is a graph in which first rotation distance information of the work processing apparatus is synthesized.
10(f) is a graph of a portion in which the change of the first rotation distance information of the work processing apparatus is small.
11 is a diagram showing a combined distance information management table of the work processing device.
12 is a diagram illustrating a second rotation distance information management table of the work processing apparatus.
It is a figure which shows the some 2nd rotation distance information of the same work processing apparatus.
14 is a diagram illustrating a distance difference information management table of a work processing device.
15 (a) is a graph showing the relationship between the distance difference information and the rotation angle obtained by the work processing apparatus.
Fig. 15(b) is a graph for explaining the processing executed by the notch detection means of the work processing apparatus.
Fig. 15(c) is a graph for explaining the processing executed by the defect detecting means of the work processing apparatus.
Fig. 16 is a diagram showing an example of output of the work processing apparatus.
Fig. 17 is a block diagram of a work processing apparatus according to the second embodiment.
Fig. 18 is a schematic diagram (Fig. 18(a)) showing an example of the same work processing apparatus, and a schematic diagram (Fig. 18(b)) showing an example of an edge position detector of the same work processing apparatus.
Fig. 19 is a view before rotation (Fig. 19(a)) and a view after rotation (Fig. 19(b)) for explaining a process for moving a defective part of the workpiece processing apparatus into an imaging area.
20 is a flowchart for explaining the operation of the work processing apparatus.
Fig. 21 is a diagram showing an example of an image management table of the work processing apparatus.
Fig. 22 is a diagram showing a display example of the work processing apparatus.
Fig. 23 is a diagram showing an example of an image condition information management table of the work processing apparatus.
Fig. 24 is a diagram showing a display example of the work processing apparatus.
Fig. 25 is a block diagram showing another example of the work processing apparatus in the first embodiment.

Examples of the following work processing apparatus and the like will be described with reference to the drawings. In addition, since components with the same reference numerals perform similar operations in the embodiments, a description thereof may be omitted.

1 is a block diagram of a work processing apparatus 1 of the present embodiment.

The work processing apparatus 1 includes a first rotation distance information storage unit 101 , an edge position detector 102 , an acquisition unit 103 , an output unit 104 , an evaluation-related information receiving unit 105 , and a setting unit 106 . ) is provided.

The acquiring unit 103 includes, for example, a synthesizing means 1031 , a synthesizing processing means 1032 , a correction information acquiring means 1033 , a second distance information acquiring means 1034 , a calculating means 1035 , and a notch detection means. (1036), and a defect detection means (1037).

Fig. 2 is a schematic diagram (Fig. 2(a)) for explaining an example of a circular work as an object of obtaining first rotation distance information in this embodiment (Fig. 2(a)) and a schematic view for explaining a process for obtaining correction information of the work (Fig. 2) (b)).

3 is a schematic diagram showing an example of the edge position detector 102 of the present embodiment.

4 : is a top view which shows an example of the workpiece|work conveyance system 1000 provided with the workpiece processing apparatus 1 of this embodiment.

The work processing apparatus 1 detects, for example, a process for obtaining information for aligning the position and orientation of the work 10 with respect to a circular work (hereinafter, also simply referred to as a work) 10 , and a defective portion of an edge. A device that performs processing. The information for aligning the position and direction of the work 10 is, for example, information used to arrange the work 10 in a pre-specified direction at a pre-specified position.

The circular workpiece 10 is, for example, a circular semiconductor wafer (hereinafter referred to as a wafer), a wafer attached to a circular wafer table for reinforcement, or a substrate such as a circular glass substrate. The material of the circular workpiece (for example, the material of the wafer) is irrespective of the material. In addition, the circular work 10 may not be perfectly circular, for example, an orientation flat part 17 and a notch part (not shown) in a part of the edge 11, such as a notch, You may have a cut out). The work 10 may have two or more cutouts. The edge 11 of the work 10 is, for example, a periphery of the work 10 .

A plurality of first rotation distance information is stored in the first rotation distance information storage unit 101 . The first rotation distance information is a circular work 10, for example, a rotation angle when one point of the work 10 is rotated with a rotation 　 center (O) and first distance information corresponding to the rotation angle. It is the corresponding information. It is information about the distance from the rotation center of the work 10 to the edge. The rotation center O of the workpiece 10 does not necessarily coincide with the center Q of the workpiece 10 .

The first distance information is information about a distance from the rotation center O of the work 10 to the edge 11 of the work 10 . The first distance information is, for example, information about a distance to a position where a line segment designated in advance having the rotation center O of the work 10 as one end overlaps with the edge 11 of the work 10 . The first distance information is, for example, a distance from the rotation center O of the work 10 to the edge 11 . The first distance information is, for example, on a predetermined line segment 14 having the rotation center O of the work 10 as one end as shown in FIG. 2, a sensor 15 such as a line sensor arranged along this line segment It is a measured value for the position of the edge 11 obtained by using , or a value obtained using the measured value.

Hereinafter, in the present embodiment, the edge 11 at the rotation center O of the work 10 obtained from information indicating the position of the edge 11 of the work 10 in which the first distance information is obtained by the sensor 15 ) to the distance (r) will be described as an example.

In addition, the first distance information may be substantially any information indicating a value corresponding to the distance from the rotation center O of the work 10 to the edge 11 of the work 10, and the first distance information is, for example, , may be information indicating the distance to the edge 11 at a reference position (for example, 0 point) of the sensor 15 . In addition, information indicating a portion where the edge 11 of the sensor 15 was detected, for example, an element that detected the edge 11, an arrangement position thereof, and the like may be used.

The rotation angle is, for example, a value of the angle at which the workpiece 10 is rotated when a predetermined situation value such as before rotation or a situation in which the acquisition of the first distance information is started is an initial value such as 0 degrees.

A plurality of first rotation distance information stored in the first rotation distance information storage unit 101 is, for example, the first distance information that can be obtained when the workpiece 10 is sequentially rotated by a predetermined angle and It is information having the rotation angle. The plurality of pieces of first rotation distance information has, for example, consecutive rotation angles at predetermined angular intervals. The predetermined angle is a constant angle, for example, a minimum unit of a rotation angle when the first distance information is obtained by rotating the workpiece 10 . The predetermined angle is preferably a value obtained by dividing 360 degrees by a multiple of 4, for example. The predetermined angle is, for example, a value obtained by dividing 360 degrees by 1000 or 10000, for example, 0.36 degrees or 0.036 degrees. In addition, the unit of a rotation angle, etc. are irrelevant.

The first rotation distance information storage unit 101 stores, for example, a plurality of first rotation distance information each obtained for one or two or more workpieces 10 . For example, a plurality of pieces of first rotation distance information corresponding to each work 10 is stored in correspondence with a work identifier that is an identifier of the work 10 .

In the first rotation distance information storage unit 101, for example, a plurality of rotation angles for at least one rotation, specifically, a plurality of first rotation distance information corresponding to a plurality of rotation angles ranging from 0 to 360 degrees is stored. is saved However, a plurality of pieces of first rotation distance information corresponding to a plurality of rotation angles less than 　 1 rotation may be stored. For example, a plurality of pieces of first rotation distance information corresponding to rotations that are smaller than the minimum unit of rotation angle by 1 rotation may be stored. In addition, a plurality of first rotation distance information corresponding to a plurality of rotation angles corresponding to a number of rotations greater than one rotation, for example, a plurality of rotation angles corresponding to 1.5 rotations or 2 rotations may be stored.

In this embodiment, as an example, a case in which a plurality of first rotation distance information acquired by the edge position detector 102 is accumulated in the first rotation distance information storage unit 101 will be described. However, it does not matter how the plurality of first rotation distance information is accumulated in the first rotation distance information storage unit 101 . For example, a plurality of pieces of first rotation distance information received by a receiver (not shown) through a storage medium or a communication line is accumulated in the first rotation distance information storage unit 101 .

In addition, storage here is a concept including temporary storage. For example, temporary storage of a plurality of first rotation distance information acquired by the edge position detector 102 with respect to the workpiece may also be regarded as storage herein.

The first rotation distance information storage unit 101 is preferably a non-volatile recording medium, but can also be realized in a volatile recording medium. This is also true for other storage units.

The edge position detector 102 acquires a plurality of first rotation distance information with respect to the work 10 . The edge position detector 102 specifically detects the edge position of the work 10 to obtain a plurality of first rotation distance information for the work. The edge position detector 102 accumulates the acquired plurality of first rotation distance information in the first rotation distance information storage unit 101 .

The edge position detector 102 includes, for example, a sensor 15 such as a line sensor, a turntable 52 for rotating the mounted workpiece 10, and the like, and rotates the workpiece 10 by a predetermined rotation angle. The first distance information and the rotation angle are sequentially obtained using a measurement value indicating the position of the edge measured each time, for example, a measurement value of the distance from the rotation center of the work 10 to the edge. The rotation center of the work 10 is, for example, a rotation center of a turntable that rotates the work 10 .

The edge position detector 102 is a turntable so that the center of the work 10 is located at a predetermined position using information for aligning the work 10 output by the output unit 104 to be described later, for example, correction information. A moving means (not shown) for moving the position of (52) and the like may be provided. In addition, the edge position detector 102 uses information specifying the direction of the work 10 output by the output unit 104 to be described later, for example, the direction in which the work 10 is specified in advance using information indicating the cutout. A control means (not shown) for rotating the turntable 52 to face may be provided.

The edge position detector 102 accumulates in the first rotation distance information storage unit 101, for example, a plurality of pieces of first rotation distance information obtained with each work are matched with the work identifier of each work.

Acquisition unit 103 is information for aligning the work 10 using a plurality of first rotation distance information corresponding to one work stored in the first rotation distance information storage unit 101, the work 10 Information for specifying the direction of , and information about the defective portion of the edge 11 of the work 10 are acquired.

The information for aligning the work 10 is, for example, information used for arranging the work 10 at a predetermined position. The information for aligning the work 10 is, for example, information or correction information indicating a difference between the position at which the work 10 is originally arranged and the position at which the work 10 is actually arranged. The correction information is, for example, correction information obtained by the correction information obtaining means 1033 . The acquisition unit 103 may acquire information for aligning the work 10 in any way. For example, the acquiring unit 103 may acquire information for alignment by using the conventional technique as described above. Further, in the present embodiment, as a specific example, processing for obtaining information for the correction information obtaining means 1033 to align will be described later.

The information for specifying the direction of the work 10 is, for example, information used for arranging the work toward a predetermined direction, for example, a clause such as an orientation flat portion or a notch portion for specifying the direction of the work. It is information indicating a connection. The information indicating the notch is, for example, information indicating the position of the notch. Moreover, you may have information about the size of a cutout part, etc. further. Information indicating this cutout is obtained, for example, by cutout detection means 1036 . The acquisition unit 103 may acquire information for aligning the work 10 in any way. For example, the acquiring unit 103 may acquire information for specifying the direction of the work by using the conventional technique as described above.

For example, the acquiring unit 103 detects the notch by using one or two or more thresholds for the size of the notch, and when detected, acquires information indicating the notch. The threshold of 1 or 2 or more for the size of the cutout is, for example, a threshold for at least 1 or more of the width of the cutout and the distance from the edge. For example, the threshold for the size of the cutout is a threshold representing a lower limit for the distance from the edge of the cutout or a threshold representing a lower limit and an upper limit of the width of the cutout, respectively. The lower limit for the distance from the edge of the cutout is, for example, the lower limit of the distance from the original edge position in the case where there is no cutout of the portion having a large distance from the edge of the cutout, for example, the longest portion of the cutout. to be.

For example, the acquisition unit 103 detects a concave continuous area from the edge 11 of the work 10 toward the inside of the work 10 by using the plurality of first rotation distance information, and from the edge within the concave area. It is determined whether there is a portion in which the depth of, that is, the distance from the edge, is greater than or equal to the threshold, which is the lower limit of the distance from the edge of the cutout, and if there is a portion greater than the threshold, this concave area is determined as the cutout, and the position of this area is determined Information indicating, for example, information on a range of rotation angles may be acquired as information indicating the notch.

Further, the continuous region is, for example, a portion in which the order in which the first distance information is acquired is continuous or a portion in which a corresponding rotation angle of the first distance information is continuous. For example, the acquisition unit 103 may detect a continuous concave portion or a continuous convex portion from the difference between the first rotation distance information and the radius of the workpiece 10 or the distance from the rotation center of the workpiece 10 to the edge. . Further, both ends of the concave portion or the convex portion present in the edge 11 of the work 10 may be detected by performing second-order differentiation with respect to the continuous first distance information, for example. In this way, it is possible to determine whether the area in which 　 is detected is concave or convex through the difference between the first rotation distance information value in the area sandwiched by the detected portion or the radius of the workpiece 10 as described above. And by judging whether or not the area of the edge 11 of the work 10 judged to be concave in this way is a cutout using the threshold value as described above, the acquisition unit 103 may detect the cutout. In addition, since the process of detecting the notch part and defect part of the edge 11 by implementing second-order differentiation etc. in this way is well-known, detailed description is abbreviate|omitted here.

In addition, using the plurality of first rotation distance information is a concept including using information obtained by using the plurality of first rotation distance information, for example, distance difference information to be described later.

In addition, the acquiring unit 103 detects a continuous region concave inward of the work 10 at the edge 11 of the work 10 using, for example, a plurality of first rotation distance information, and the It is determined whether the width is within a range of a threshold value representing the lower limit and the upper limit of the width of the cutout, respectively, and if it is within the range, the concave area is determined as the cutout, and information indicating the position of this area, for example, of the rotation angle range The information may be acquired as information indicating the notch.

Alternatively, by combining the judgment based on the distance from the edge and the judgment based on the width, when the distance from the edge is greater than or equal to the threshold and the width is within the range indicated by the threshold, the continuous area may be judged as a cutout. .

Incidentally, in the present embodiment, as a specific example of the processing in which the acquiring unit 103 acquires information for specifying the direction, the processing in which the notch detection means 1036 acquires information indicating the notch will be described later.

Information on the defective portion includes, for example, information indicating a position at which a defective portion of the workpiece 10 exists, specifically, a rotation angle or information indicating a range of a region in which a defective portion exists (eg, indicating a range of a rotation angle) information). Further, the information about the defective portion is information indicating the size of the defective portion, for example, the distance from the edge, specifically, the depth and height of the defective portion, and the width of the defective portion. The information regarding the defective part may further have an identifier for identifying the defective part or an identifier of the work 10 . Defective parts are, for example, burrs, chippings, dust, etc. of the edge 11 of the workpiece 10 . Further, the information regarding the defective portion may be information indicating whether or not there is a defective portion. In addition, the information regarding a defective part may be information which shows whether a defective part is a recessed part or a convex part of the edge 11 of the workpiece|work 10. As shown in FIG. For example, the information about the defective part is information about the defective part that the defect detecting means 1037 acquires.

The acquisition unit 103 detects the defective portion using, for example, one or two or more thresholds for the size of the defective portion, and when detected, acquires information on the defective portion. The 1 or 2 or more thresholds for the size of the defective part are, for example, 1 or 2 or more thresholds for at least 1 or more of the width of the defective part and the distance from the edge.

The acquisition unit 103 determines, for example, the distance from the rotation center of the workpiece 10 to the edge (or the radius of the workpiece 10 ) when there is no defective part on the edge 11 for the plurality of pieces of first rotation distance information. ) is calculated, and the first rotation distance information of which the distance is equal to or greater than the lower limit of the distance of the defective part is detected, and when detected, information about the defective part is obtained. For example, the acquiring unit 103 acquires rotation angle information having the first rotation distance information, etc. as information about the defective part. Also, detecting the first rotation distance information is a concept including detecting first distance information included in the first rotation distance information or detecting a rotation angle.

In addition, the acquisition unit 103, for example, using a plurality of first rotation distance information from the edge 11 of the work 10 to the inside of the work 10 concave continuous area or 　 outwardly convex of the work 10 Detect a continuous region, and determine whether there is a portion in this concave or convex region whose distance from the edge is greater than or equal to a threshold, which is the lower limit of the distance from the edge of the defective part, and if there is a portion greater than or equal to the threshold, this concave or convex region It may be determined that the area is a defective part, and information about this defective part, for example, information on a range of rotation angles may be acquired.

Here, the distance from the edge is, for example, the distance from the edge in the case where there are no defects or cutouts, or the distance based on the edge of an ideal workpiece without defects or cutouts. Here, the distance from the edge is, for example, a distance in a direction from the edge of the workpiece 10 toward the rotation center of the workpiece 10 or a distance in a direction opposite to the rotation center of the workpiece 10 from the edge. For example, here, the distance from the edge is the distance from the edge to the cutout or the distance from the edge to the defective part when the workpiece has no cutouts or defective portions. Here, the distance from the edge may be regarded as the depth of the concave region of the edge or the height of the convex region. Here, the distance from the edge may be regarded as the magnitude of the distance from the edge, or the magnitude or absolute value of the depth or height of the cutout or defective portion. This is also the case below.

Both ends of the concave portion and the convex portion present at the edge 11 of the work 10 may be detected, for example, by performing second-order differentiation with respect to the continuous first distance information as described above.

And by judging whether or not the edge 11 region of the workpiece 10 sandwiched by the detected portion is a defective portion using the threshold value described above, the acquiring unit 103 may detect the defective portion.

In addition, the acquisition unit 103, for example, by using the plurality of first rotation distance information from the edge 11 of the work 10 to the work 10 in the concave continuous region or the outer convex of the work 10 Detect a continuous region, determine whether the width of this concave region or convex region is equal to or greater than a threshold value that is a lower limit value of the width of the defective portion, and if it is greater than or equal to the lower limit value, this concave region or convex region is determined as a defective portion, and related to this defective portion It may be possible to obtain information. In addition, as a threshold value which is a lower limit, different threshold values may be used for the case where the continuous area is concave and the case where it is convex, and the same threshold value may be used.

or 　 In combination with the judgment based on the distance from the edge and the judgment based on the width, the distance from the edge should be greater than or equal to a threshold value, and if the width is greater than or equal to the threshold, the continuous area may be determined as a defective part.

In addition, the acquisition unit 103 compares the number of cutouts for specifying the direction of the work detected using the plurality of first rotation distance information and the number of cutouts originally installed in the work 10 , When the number of s is different, information on a defective portion indicating that an edge is defective may be acquired.

In addition, when detecting the defective part, the acquisition unit 103 may be configured to perform the detection except for the area where the cutout for specifying the direction of the work is disposed, or the detected defective part is arranged with the cutout. If it is within the area where there is a defect, information on this detected defective part may not be acquired.

Further, in this embodiment, in particular, the acquiring unit 103 includes the synthesizing means 1031 , the synthesizing processing means 1032 , the correction information acquiring means 1033 , the second distance information acquiring means 1034 , and the calculating means 1035 . ), the notch detection means 1036, and the defect detection means 1037 will be described as an example.

The synthesizing means 1031 synthesizes a plurality of pieces of first distance information having corresponding rotation angles different by 90 degrees from among the first distance information included in the plurality of pieces of first rotation distance information. Here, the plurality of pieces of first rotation distance information is, for example, a plurality of pieces of first rotation distance information stored in the first rotation distance information storage unit 101 for one workpiece 10 to be processed.

Synthesizing a plurality of first distance information having different rotation angles by 90 degrees may be regarded as, for example, synthesizing a plurality of pairs of first distance information whose corresponding rotation angle difference is an integer multiple of 90 degrees. . An integer multiple of 90 degrees is, for example, 90 degrees, 180 degrees, 270 degrees, or the like.

The synthesizing means 1031 synthesizes, for example, four pieces of first distance information each having a corresponding rotation angle of 90 degrees different from each other among the first distance information included in the plurality of pieces of first rotation distance information to generate a plurality of combined distance information. Acquisition may be regarded as, for example, synthesizing each of a plurality of first distance information pairs in which a difference in corresponding rotation angle is n (n is an integer from 1 to 3) times 90 degrees.

The first distance information obtained by synthesizing a plurality of first distance information is referred to herein as combined distance information. The synthesizing means 1031 generally acquires a plurality of synthesizing distance information. Here, the synthesis refers to, for example, combining a plurality of pairs of first distance information into one. Here, the synthesis may be, for example, obtaining an average value of a plurality of pieces of first distance information, or adding a plurality of pieces of first distance information. Alternatively, an average of differences between a plurality of pieces of first distance information may be calculated. For example, the synthesizing means 1031 may determine that the corresponding rotation angles among the first distance information included in the plurality of first rotation distance information are θ ₀ , θ ₀ + 90 degrees, θ ₀ + 180 degrees, and θ ₀ + 270 . Composite distance information is obtained by synthesizing a plurality of pairs of first distance information.

The synthesizing means 1031 may somehow synthesize a plurality of pieces of first distance information each having a corresponding rotation angle of 90 degrees each with each other. For example, the synthesizing means 1031 divides a plurality of pieces of first rotation distance information in which the corresponding rotation angle values are continuous into a plurality of pairs so that the range of the rotation angle values is 90 degrees, and an arrangement of each divided pair The above synthesis may be performed by synthesizing the first distance information included in the first rotation distance information in the same order.

The continuous rotation angle value means that, for example, the rotation angle value is continuous for each rotation angle unit when the workpiece 10 is rotated whenever the first distance information is obtained. A continuous rotation angle value is appropriately referred to herein as a continuous rotation angle value.

The arrangement order here is, for example, an arrangement order in the case of arranging the divided first rotation distance information of each pair in ascending or descending order of rotation angles of each of the first rotation distance information.

For example, if a plurality of first rotation distance information having a rotation angle of 0 degrees or more and less than 360 degrees obtained through rotating the work by one rotation is stored in the first rotation distance information storage unit 101, The synthesizing means 1031 first sets the first rotation distance information so that the corresponding rotation angle ranges from 0 degrees to less than 90 degrees, 90 degrees to less than 180 degrees, 180 degrees or more, less than 270 degrees, and 270 degrees to less than 360 degrees. Split. Then, the synthesizing means 1031 synthesizes the values of the first distance information included in the first rotation distance information of each divided range for each rotation angle arrangement order, for example, in ascending or descending order of rotation angle, and a plurality of continuous to obtain the synthesized distance information of For this reason, it is possible to synthesize four pieces of first distance information each having a corresponding rotation angle of 90 degrees each. In addition, the range of the rotation angle at the time of division|segmentation does not need to start from 0 degree, for example, you may set the range of rotation angle every 90 degree|times from 15 degrees etc.

In addition, the first rotation distance information is sequentially acquired one by one from a plurality of consecutive first rotation distance information in which the range of the rotation angle is within the range of 90 degrees, and 90 degrees, 180 degrees for each of the obtained first rotation distance information The first rotation distance information having a rotation angle added by degrees and 270 degrees may be detected, and the obtained first rotation distance information and the first distance information each of the detected first rotation distance information may be synthesized. . For this reason, it is possible to sequentially synthesize the four pieces of first distance information each having a corresponding rotation angle of 90 degrees as described above.

By sequentially synthesizing a plurality of pairs of first distance information having different rotation angles by 90 degrees in this way, for example, the rotation center O of the work 10 is the center ( It is possible to eliminate the increase or decrease of the first distance information caused by deviating from Q).

In addition, a plurality of pairs of rotation angles corresponding to a plurality of pieces of first distance information before synthesis are stored in association with each combined distance information obtained by combining, for example. Alternatively, a portion of the pair of rotation angles, for example, a rotation angle with the smallest value among a plurality of corresponding rotation angles may be stored in correspondence with each other.

The synthesis processing means 1032 is a plurality of combined distance information in which the corresponding rotation angles are continuous in the plurality of combined distance information, which is information obtained by the combining means 1031 by synthesizing the first distance information. A plurality of small pieces of combined distance information is detected. Then, the synthesis processing means 1032 is configured to configure a plurality of pieces of first distance information before synthesis corresponding to at least one of the detected pieces of combined distance information and a rotation angle corresponding to at least one first distance information from among a plurality of pieces of first distance information before synthesis. to acquire

The magnitude of the synthesized distance information value is, for example, an absolute value of the synthesized distance information. The plurality of pieces of combined distance information having a small change in value is, for example, continuous combined distance information in which the maximum value of the amount of change in the value is smaller than other consecutive pieces of combined distance information. A plurality of continuous combined distance information is combined distance information that is continuous in a number of 2 or more specified in advance. Here, continuation means that one or more of the one or more rotation angles corresponding to the combined distance information are continuous. As described above, in the composite distance information, since the increase or decrease of the first distance information generated by the rotation center O of the work 10 deviating from the center Q of the work 10 is offset, the size change is large. The composite distance information of the part is, for example, a part with unevenness of the edge 11 of the work 10 . The unevenness of the edge 11 is an orientation flat portion 17, cutouts such as a notch portion, burrs, chipping, dust, or the like of the work 10. Chipping is, for example, a defective portion such as a chip or a fragment of the edge of the work 10 . Composite distance information of a portion having a small change in size is, for example, a portion without irregularities or a small portion, and the size change of this portion is due to, for example, an error during measurement.

The synthesis processing means 1032 is a plurality of combined distance information with a small change in value, for example, a combined distance in which a corresponding rotation angle is continuous among the remaining combined distance information except for the combined distance information with a large change in value size. get information

The synthesis processing means 1032 includes, for example, a first process of detecting composite distance information equal to or greater than 1 in the order of increasing values from a plurality of pieces of combined distance information synthesized by the combining means 1031, and a combined distance from the smallest value to one or more. At least one of the second processing for detecting information is executed one or more times. Further, the combined distance information remaining undetected in the first and second processes corresponds to a plurality of pieces of combined distance information in which the magnitude change of the value detected by the combining processing means 1032 is small. In addition, the detection of the combined distance information here may be regarded as the detection of the combined distance information of an exclusion target.

The first process is a process of detecting, for example, the combined distance information of the maximum value for a plurality of pieces of combined distance information synthesized by the synthesizing means 1031 . Specifically, it is processing for detecting the maximum value of combined distance information among undetected combined distance information. In addition, the second process is, for example, a process of detecting the minimum value of combined distance information for a plurality of combined distance information synthesized by the combining means 1031 . Specifically, it is processing for detecting the minimum value of combined distance information among undetected combined distance information.

The synthesis processing means 1032 preferably executes the first processing and the second processing a plurality of times, respectively. The plurality of times of the first processing and the plurality of times of the second processing may be executed a plurality of times in any order. For example, the first processing and the second processing may be alternately executed once. In addition, after the first processing is completed a plurality of times, the second processing may be executed a plurality of times. Also, one of the first processing and the second processing may be performed first.

In addition, when the first process is repeated, the synthesized distance information already detected in the process up to immediately preceding is excluded from the detection target. For example, information such as a flag indicating completion of detection is made to correspond to the detected combined distance information, and combined distance information to which information such as this flag is associated is not detected in subsequent detection processing. This is also the case in the case of repeating the second process.

In addition, the combining processing means 1032 may sequentially delete the synthesized distance information detected in the first process and the second process or the like, or may provide information such as a flag indicating that the detected object has been deleted. In this case, for example, the combining processing means 1032 may be made to detect the combined distance information of the maximum value from the combined distance information not deleted in the first process. Further, for example, the combining processing means 1032 may be configured to detect the minimum combined distance information from the combined distance information not deleted in the second process.

In the case where the first process is repeatedly executed, the synthesis processing means 1032 repeatedly executes the first process until, for example, a predetermined condition is satisfied. For example, detecting the combined distance information until a predetermined condition is satisfied means detecting the combined distance information until a predetermined number is reached. Further, the predetermined condition may be that the difference between the maximum value and the minimum value of the combined distance information remaining undetected is equal to or less than a predetermined threshold value or the like. This is also the case in the second process.

When the predetermined condition described above for the repetition of the first processing and the repetition of the second processing is the number of times, the number of times as the first processing condition and the number of times as the second processing condition may be different times. For example, when the synthesized distance information is a synthesis of first distance information indicating the distance from the rotation center of the work 10 to the edge, the first distance generally obtained from a cutout such as an orientation flat part or a notch part The synthesized distance information obtained by synthesizing a plurality of first distance information including information has a smaller value than the synthesized distance information obtained from other parts. In order to detect the synthesized distance information corresponding to , as a part with a large change, it is preferable to set the number of detecting a small value of the combined distance information to be a number larger than the number of detecting a large value. Accordingly, in such a situation, it is preferable to set the value of the number of repetitions, which is a predetermined condition for the second processing, to a value greater than the value of the number of repetitions, which is a predetermined condition for the first processing.

The combining processing means 1032 may include, for example, a plurality of pre-combination first pieces of combined distance information remaining undetected in the first processing and second processing, corresponding to 1 or more, among a plurality of consecutive pieces of combined distance information equal to or greater than a predetermined number. Distance information 　 and 　 acquire a rotation angle corresponding to one or more of the plurality of first distance information. The predetermined number is a number greater than or equal to two.

Alternatively, the synthesis processing means 1032 may include, for example, among the combined distance information remaining undetected in the first and second processes, a plurality of pieces of pre-synthesis distance information corresponding to one or more of the plurality of pieces of combined distance information having the largest number in succession. A rotation angle corresponding to at least one of the first distance information and the plurality of first distance information is acquired.

The combining processing means 1032 detects, for example, a plurality of pieces of combined distance information with corresponding rotation angles that are continuous, and a plurality of pieces of combined distance information having a small change in the value, and assigns it to one of the detected pieces of combined distance information. A rotation angle corresponding to one of the corresponding four pieces of first distance information before synthesis and one piece of first distance information from among a plurality of pieces of first distance information before synthesis is obtained. The four pieces of first distance information before synthesis are four pieces of first distance information whose corresponding rotation angles differ by 90 degrees. The four first distance information is four points where two orthogonal straight lines passing through the center of rotation meet the edge of the work 10, and represents a distance from the center of rotation of the work.

As a rotation angle corresponding to one or more first distance information among a plurality of first distance information before synthesis, whether a rotation angle corresponding to any first distance information equal to or greater than 1 or 2 is obtained, for example, obtaining correction information to be described later It is determined according to which rotation angle the means 1033 uses when obtaining the correction information. For example, when one piece of combined distance information is a combination of four pieces of first distance information having different rotation angles by 90 degrees, the synthesis processing means 1032 detects a plurality of pieces of combined distance information with a small change in value, , is a rotation angle corresponding to the four pieces of first distance information before synthesis corresponding to one of the detected plurality of combined distance information, and a rotation angle having substantially the smallest value is obtained. Alternatively, it is a rotation angle corresponding to four pieces of first distance information before synthesis corresponding to one of the detected plurality of combined distance information, and one rotation angle within a range from 0 to 90 degrees may be obtained. Further, for example, a rotation angle of 360 degrees + D degrees (D being a positive value) may be regarded as substantially D degrees. Incidentally, the -D degree may be regarded as substantially 360 degree-D.

In addition, in order to detect the combined distance information corresponding to the orientation flat part 17 as described above, the combining processing means 1032 may detect a plurality of combined distance information smaller than the average value of the combined distance information together.

In addition, the synthesis processing means 1032 detects, for example, synthesized distance information with a large value and synthesized distance information with a small value, and excludes them, so as to detect a plurality of consecutive synthesized distance information with a small change in the value. However, in the present invention, the synthesis processing means 1032 may detect continuous synthesis distance information with a small change in the magnitude of the ? value.

For example, the synthesis processing means 1032 uses a value obtained by performing differentiation or second-order differentiation on the continuous synthesized distance information to detect continuous synthesized distance information having a large change in value, and excludes them. Accordingly, continuous combined distance information with a small change in the magnitude of the value may be detected. For example, the synthesis processing means 1032 detects a value equal to or greater than a predetermined threshold value from a value obtained by performing second-order differentiation or the like on the continuous combined distance information, and the next threshold value from the rotation angle at which a value equal to or greater than the threshold value is detected The synthesized distance information between the rotation angle at which the above value is detected is detected as the synthesized distance information with a large change in the value, and continuous synthesized distance information among the synthesized distance information excluding the detected synthesized distance information has a large change in the value. The detection may be made with small continuous combined distance information.

The correction information obtaining means 1033 sets the rotation center of the work 10 as information for aligning the work 10 using the plurality of first distance information and the rotation angle obtained by the synthesis processing means 1032 . ) to obtain correction information to fit the center of the The correction information may be regarded as information for moving the rotational center of the work 10 to the center of the work 10 or information indicating the direction and magnitude of positional deviation. The correction information is, for example, information indicating a movement direction of the rotation center, for example, a combination of an angle with respect to a predetermined direction and a movement distance. Further, the correction information may be a vector or the like indicating the moving direction and the moving distance of the center of the work 10 . In addition, the correction information is the amount of movement along each coordinate axis for moving the center of rotation of the work 10 to the center of the work 10 when the center of the work 10 and the center of rotation of the work 10 are arranged in the Cartesian coordinate system. may be information indicating

The correction information obtaining means 1033 uses, for example, the four first distance information obtained by the synthesis processing means 1032, each having a different rotation angle of 90 degrees, and a rotation angle corresponding to one of the four first distance information. ) to obtain correction information for moving the rotation center to the center of the work 10 .

Hereinafter, an example of the acquisition process of correction information is demonstrated using FIG.2(b). In addition, in FIG. 2B , the first distance information r _a , r _b , r _c , r _d has a corresponding rotation angle obtained by the combining processing means 1032 for one piece of combined distance information by 90 degrees. Four pieces of first distance information, and rotation angles corresponding to each are θ, θ+90, θ+180, and θ+270. However, it is said that θ is an arbitrary value. Here, for example, θ is said to be an angle ranging from 0 to 90 degrees. Points (P _a, P _b, P _c and P _d) is a point on the edge 11 of the work 10 corresponds to the first distance information (r _a, r _b, r _c and r _d), the center of rotation The distance of the line segment connecting (O) and the points P _a , P _b , P _c and P _d , respectively, is the first distance information ra _a , r _b , r _c and r _d . The _{line segment connecting the point P a} and the point P _c and the line segment connecting the point P _b and the point P _d are orthogonal to the rotation center O. Here, for convenience of explanation, the rotation center O of the work 10 is arranged at the origin of the xy coordinates. Here, the rotational direction of the workpiece 10 is said to be clockwise. It is assumed that an angle between the line segment corresponding to the first distance information ra and the x-axis is a rotation angle θ, and a counterclockwise direction is a positive value. The angle (θ) formed by the line segment connecting the rotation center (O) of the workpiece 10 and the center (Q) of the workpiece 10 with the x-axis is information indicating the movement direction among the correction information, and the counterclockwise direction is here is said to be a positive value. In addition, the length (h) of a line segment connecting the rotation center (O) of the work 10 and the center (Q) of the work 10 is information representing the movement amount (movement distance) of the correction information. A sensor (not shown) for acquiring the first distance information is disposed along the y-axis, for example, on the y-axis.

Also symmetrical to the line connecting the point (P _a) and the point (P _c), the segment and points (P _b) and the point (P _d) to connect to the center (Q) of the work 10 in 2 (b) When a line segment is drawn, the information (α) indicating the movement direction as correction information and the length (h) indicating the amount of movement can be obtained from the following equation.

In addition, in the above equation, since r _a -r _c and r _b -r _d are distance differences, it can be seen that the above equation holds even when the first distance information is a reading value of a sensor or the like or a distance from a reference point of the sensor. have.

Incidentally, the acquisition processing of the correction information shown above is an example, and the present invention is irrespective of how the synthesis processing means 1032 acquires the correction information from the obtained pair of the first distance information and the rotation angle.

In addition, the above correction information obtaining means 1033 obtains the correction information by using the four first distance information and one rotation angle obtained for one combined distance information obtained by the synthesis processing means 1032. , the synthesis processing means 1032 detects the correction information as described above for each pair of a plurality of first distance information and a rotation angle obtained for a plurality of combined distance information, respectively, and calculates the average value of the correction information obtained for each pair It can be obtained as final correction information.

The second distance information acquiring means 1034 uses the correction information acquired by the correction information acquiring means 1033 to determine the rotation angle and the rotation angle when the work 10 has a circular shape with no irregularities on the edge 11 . A relational expression representing a relationship with the second distance information is obtained. The second distance information is distance information from the rotation center of the workpiece 10 having no irregularities on the edge 11 to the edge 11 . Then, a plurality of rotation angles corresponding to a plurality of first rotation distance information stored in the first rotation distance information storage unit 101 are respectively substituted into the obtained relational expression to obtain second distance information.

The second distance information is, for example, information similar to the first distance information. The second distance information is, for example, distance information corresponding to the first distance information obtained when a circular work having no unevenness on the edge 11 is placed in place of the work 10 .

The circular workpiece which does not have irregularities on the edge 11 is, for example, a circular workpiece which does not contain an orientation flat part, a notch part, a burr, chipping, and dust in an edge, and an ideal shape workpiece|work of the same size as the workpiece|work 10. may be considered as

The relational expression is, for example, an expression showing the relationship between the rotation angle and the second distance information according to the rotation angle when the circular workpiece 10 having no unevenness in the edge 11 is rotated. The relational expression here may be regarded as an expression representing an ideal curve representing the relationship between the rotation angle of the workpiece 10 and the distance from the rotation center to the edge according to the rotation angle. Further, the second distance information may also be regarded as the distance from the rotation center of the ideal work 10 to the edge. In addition, the relational expression may be an approximate expression which approximates the relationship between the rotation angle in the case of rotating the circular workpiece|work 10 which does not have an unevenness|corrugation at the edge 11, and the 2nd distance information corresponding to the rotation angle.

Here, the acquisition of the relational expression is a concept including reading the relational expression stored in advance in a storage medium (not shown) or the like, determining the coefficient value of the read relational expression, or substituting the coefficient value.

The second distance information acquiring means 1034 may acquire a relational expression using, for example, the radius of the workpiece 10 as well as the angle indicating the movement direction as correction information and the length indicating the movement amount. The radius of the work 10 may be stored in a storage unit (not shown) in advance and read appropriately.

Hereinafter, an example of a relational expression will be given and demonstrated.

5 is a schematic diagram for explaining a relational expression used to obtain second distance information. In the drawings, the same reference numerals as in Fig. 2(b) indicate the same or equivalent parts. However, in Fig. 5, unlike Fig. 2 (b), the work 10 is a work of radius (a) without irregularities on the edge. In addition, in FIG. 5, the example in which the rotation center of the workpiece|work 10 is located in a place other than a workpiece|work is shown for the convenience of description. However, the rotation center may be located on the work piece.

As shown in FIG. 5, when the edge of the circular work 10 deviating from the center Q of the rotation center O is expressed in polar coordinates, it is as follows.

Expanding this expression for r _i , we get the following expression:

This formula (3) is an expression showing the relationship between the rotation angle and the second distance information according to the rotation angle when the circular workpiece 10 having no irregularities on the edge 11 is rotated. For example, Equation 3 is stored in advance in a storage unit (not shown), the second distance information obtaining means 1034 reads this Equation, and Equation 1 and Equation 2 are used for Equation 3 By substituting the obtained correction information, specifically, the value of the angle (α), which is information indicating the movement direction, the value of the length (h), which is information indicating the amount of movement, and the radius (a) of the workpiece 10, ) obtains a relational expression representing the relationship between the rotation angle θ when the edge 11 has a circular shape without irregularities and the second distance information r _{i according to the rotation angle.} Hereinafter, the relational expression obtained by substituting the values of α and the length (h) is referred to as an ideal curve equation.

In addition, it is most preferable to obtain the ideal curve equation shown here, but other approximation equations, for example, an approximation equation made using a sinusoid, etc., may be obtained as a relational equation.

In addition, the correction information obtaining means 1033 obtains the correction information with one or more pairs of the plurality of first distance information and the rotation angle obtained by the synthesis processing means 1032 in the Equations 1 and 2 did. However, in the present invention, in the present invention, the correction information obtaining means 1033 　 the synthesis processing means 1032 in Equation 3 above has obtained a plurality of first distance information and 　 each of the plurality of first distance information for 1 or more combined distance information. A system of equations may be created by substituting each of a plurality of pairs of rotation angles corresponding to , and correction information may be obtained by solving the simultaneous equations. Also, the radius of the workpiece 10 may be appropriately substituted for this equation. This is also the case when other approximations are used.

The second distance information obtaining means 1034 obtains a plurality of rotation angles corresponding to the plurality of first rotation distance information stored in the first rotation distance information storage unit 101 in the obtained relational expression, for example, an ideal curve expression. By substituting each, second distance information is obtained. In addition, the plurality of rotation angles corresponding to the plurality of first rotation distance information does not necessarily have to be read from the first rotation distance information storage unit 101, and the plurality of rotation angles of the plurality of first rotation distance information and the What is necessary is just to be substantially the same several rotation angle. For example, a plurality of substantially identical rotation angles may be obtained and used. For example, each time one piece of first distance information is obtained from the work 10, using an angle value for rotating the work 10, for example, by sequentially adding the angle values, etc. A plurality of rotation angles substantially equal to a plurality of rotation angles possessed by the first rotation distance information may be obtained.

The second distance information obtained by sequentially substituting a plurality of rotation angles in the relational expression for the second distance information obtaining means 1034 is, for example, _{storing the second distance information (r i} ) in correspondence with the rotation angle, not shown. accumulate wealth, etc. The accumulation here may be temporary storage. Each pair of the second distance information and the rotation angle acquired and accumulated by the second distance information obtaining means 1034 is referred to herein as second rotation distance information. Also, it may be considered that the second distance information acquiring means 1034 acquires the second rotation distance information.

The calculation means 1035 uses a plurality of pieces of first rotation distance information stored in the first rotation distance information storage unit 101 and a plurality of pieces of second distance information obtained by the second distance information acquisition means 1034 to be the same A difference between the first distance information corresponding to the rotation angle and the second distance information is obtained. For example, the calculating means 1035 sequentially acquires the difference between the first distance information and the second distance information corresponding to the same rotation angle. The difference here may be a value obtained by subtracting the second distance information value from the first distance information value or vice versa. Further, as long as it is merely to detect a portion having an edge defect, the difference may be the magnitude of the difference, for example, the absolute value of the difference. In addition, the difference between the first distance information and the second distance information is referred to as distance difference information here.

The calculation means 1035 stores the obtained distance difference information and rotation angle in correspondence with each other, for example, in a storage unit (not shown). The accumulation here may be temporary storage.

The notch detection means 1036 acquires information indicating the notch of the workpiece 10 as information for specifying the direction of the workpiece 10 using the distance difference information calculated by the calculation means 1035 . The notch is a part, such as an orientation flat part, a notch part, for specifying the direction of the workpiece|work 10 provided in the edge 11 of the workpiece|work 10 as mentioned above. The information indicating the notch is, for example, information indicating a range of a rotation angle indicating a portion where the notch of the work 10 is provided, or information indicating a plurality of pieces of first distance information obtained with respect to the notch.

The notch detection means 1036 detects the notch provided in the edge 11 of the work 10 using, for example, the distance difference information calculated by the calculation means 1035 and one or more thresholds regarding the size of the notch. and information indicating the detected cut-out portion may be acquired.

The at least one threshold for the size of the cutout is a threshold for the distance from the edge of the cutout or a threshold for the width of the cutout, as described above.

The notch detection means 1036 is, for example, a continuous area in which the edge 11 is concave inside the work 10 using the distance difference information calculated by the calculation means 1035, and the distance from the edge of the cut-out portion specified in advance. A region having distance difference information greater than or equal to a threshold indicating a lower limit of , and whose width is within a range of a threshold indicating a lower limit and an upper limit of the width of a predetermined cutout, respectively, is detected. And information indicating a position corresponding to the detected area, for example, information indicating a rotation angle or a plurality of first distance information obtained with respect to the detected area, the cutout provided on the edge 11 of the work 10 It is obtained as information indicating.

The continuous region in which the edge 11 is concave inside the work 10 corresponds to, for example, distance difference information indicating that a position indicating the first distance information is located inside the work rather than a position indicating the second distance information It can be detected by detecting a continuous region. For example, when the first distance information is a distance from the rotation center of the work 10 to the edge 11 , and the distance difference information is a value obtained by subtracting the first distance information from the second distance information, the edge 11 of A continuous region in which the distance difference information is a positive value can be detected as a concave continuous region. Also, a continuous region in which the magnitude of the distance difference information is greater than a preset threshold value in consideration of a measurement error or the like may be detected as one continuous region. In this case, the threshold is set to a value around 0, for example. This is also the case when detecting an edge 11 defective portion. Also, this is the same when detecting a continuous convex region.

In addition, instead of the threshold value indicating the lower limit value of the distance from the edge of the cutout, threshold values indicating the lower limit value and the upper limit value of the distance from the edge are used, and the maximum value of the distance difference information in the continuous region or the value before and after this threshold value It may be determined whether or not a value is within a range indicating , and a value within the range may be used instead of the determination result indicating an area having distance difference information equal to or greater than a threshold indicating the lower limit of the distance from the edge of the notch. Similarly, by using a threshold value indicating the lower limit value of the width instead of the threshold value indicating the lower limit value and the upper limit value respectively, the case where the width of the continuous area is equal to or greater than the lower limit value You may use it instead of a judgment result. Further, in judging whether or not the continuous area is a cut-out portion, instead of determining the distance and width from the edge, only the distance or width from the edge may be determined. In addition, combinations thereof can be appropriately changed. This is also the case when detecting the edge 11 defective portion.

Further, the notch detection means 1036 detects and detects a difference between the first distance information and the second distance information calculated by the calculation means 1035, that is, a portion in the distance difference information in which the magnitude of the value is greater than a predetermined first threshold. The information indicating the rotation angle corresponding to the cut portion may be acquired as information indicating the cutout portion of the work 10 . The distance from the edge of the cutout in the case where the work 10 is circular without irregularities is generally greater than a distance such as chipping that may exist at the edge of the work 10 . Also, the depth of the cutout (distance from the edge) is a known value. For this reason, one or more distance difference information corresponding to the cutout is detected by setting the first threshold to a value that is larger than the depth (distance from the edge) such as chipping and is smaller than the known depth (distance from the edge) of the cutout. and information indicating the cutout can be obtained.

The first threshold may be, for example, a threshold of the magnitude of the value. Detecting the distance difference information in which the magnitude of the value is larger than the first threshold value may mean, for example, detecting distance difference information whose absolute value is larger than the first threshold value. This also applies to a second threshold value, which will be described later.

In addition, whether the value of the distance difference information corresponding to the cutout becomes a positive value or a negative value is determined by subtracting the second distance information from the first distance information to obtain the distance difference information or from the second distance information 1 It depends on whether distance difference information is obtained by subtracting distance information.

The notch detection means 1036 may group the plurality of rotation angles when detecting a plurality of distance difference information in which corresponding rotation angles are continuous as a plurality of distance difference information whose values are larger than the first threshold value. And the notch detection means 1036 may be made to acquire information indicating the notch portion further having information indicating this group. The information indicating the group is, for example, information indicating the range of the corresponding rotation angle, a set of the corresponding rotation angle, a group identifier assigned to the corresponding rotation angle, and the like. The same applies to information indicating a group of defective parts, which will be described later. In this case, one group of rotation angles may be regarded as information indicating, for example, a plurality of rotation angles corresponding to a plurality of positions on one cutout or the range of the cutout.

In addition, the notch detection means 1036 is a plurality of distance difference information whose value is larger than the first threshold, and defines a region having a plurality of distance difference information consecutive with a corresponding rotation angle of 2 or more 　 or more. It may be detected as In general, since the cutout is set in a wide range on the edge of the work 10, it is possible to detect the cutout more reliably by detecting in this way.

The cutout detection means 1036 may detect a plurality of cutouts for one work 10 .

The defect detection means 1037 uses the difference between the first distance information and the second distance information calculated by the calculation means 1035 , that is, the distance difference information, to obtain information about the defect portion of the edge 11 of the work 10 . acquire

For example, the defect detecting means 1037 uses the difference between the first distance information and the second distance information calculated by the calculating means 1035 and one or more thresholds related to the size of the defective portion to the edge ( 11) detects the defective part, and obtains information about the detected defective part.

For example, the defect detecting means 1037 detects, for example, distance difference information in which the magnitude of a value in the distance difference information calculated by the calculating means 1035 is equal to or greater than a threshold indicating a lower limit value of the distance from the edge of the defective part, and , 　 If detected, information about the 　 defect is acquired. In addition, instead of using the lower limit value for the distance from the edge of the defective part as the threshold value, the threshold value indicating the lower limit value of the depth of the defective part and the threshold value indicating the lower limit value of the height of the defective part are used, the value is the lower limit of the depth of the defective part You may make it detect the distance difference information which is not a value between the threshold value shown and the threshold value which shows the lower limit of the height of the defective part.

In addition, the defect detection means 1037 is, for example, using the distance difference information calculated by the calculation means 1035, from the edge 11 of the workpiece 10 to the inside of the workpiece 10 concave continuous region or workpiece ( 10) detects an outwardly convex continuous region, and determines whether there is a portion in this concave region or convex region in which the magnitude of the distance difference information is equal to or greater than the threshold value indicating the lower limit of the distance from the edge of the defective part, If there is a part, it may be determined that this concave or convex region is a defective part, and information about this defective part, for example, rotation angle range information, may be acquired.

In addition, the defect detection means 1037 is, for example, using the distance difference information calculated by the calculation means 1035, from the edge 11 of the workpiece 10 to the inside of the workpiece 10 concave continuous region or workpiece ( 10) detects the outwardly convex continuous region, determines whether the width of the concave region or the convex region is equal to or greater than a threshold value, which is the lower limit of the width of the defective portion It may be determined, and information about the defective part may be obtained.

In addition, one or more threshold values used for detecting whether the continuous area as described above is a defective part may use different threshold values for the case where the continuous area is concave and convex, or the same threshold value may be used.

Alternatively, when the distance from the edge is equal to or greater than the threshold value by combining the determination by the depth and the determination by the width, and the width is equal to or greater than the threshold, the continuous area may be determined as a defective part.

In addition, the defect detecting means 1037 is configured to determine, for example, the difference between the first distance information and the second distance information calculated by the calculation means 1035 , that is, the magnitude of the value in the distance difference information is greater than a predetermined second threshold. detect the part. And you may make it acquire the information about the detected part as information about the edge 11 defect part of the workpiece|work 10.

The second threshold value is a threshold value for discriminating a defect-free portion at the edge 11 of the work 10 and a defective portion at the edge 11 of the work 10 . For example, in the portion where the defect of the edge 11 of the work 10 does not exist, the difference between the values of the first distance information and the second distance information is the difference in the degree of measurement error when the first distance information is obtained. do. On the other hand, in the part where the defect exists, this difference becomes a difference sufficiently larger than the measurement error. Accordingly, it is possible to detect a defective portion of the edge 11 of the work 10 by setting the second threshold to a value larger than the measurement error, for example.

Information about the detected part, that is, information about the detected distance difference information, includes, for example, information indicating a rotation angle corresponding to the detected distance difference information, information indicating a rotation angle corresponding to the detected distance difference information and is a pair For example, the detected distance difference information may be regarded as information indicating the depth and height of the defective part.

In addition, whether the defective part is convex to the outside of the work 10 like a burr or concave to the inside of the work 10 like chipping, for example, it can be determined by the sign of the distance difference information such as the first distance information reference point Therefore, the defect detecting means 1037 may be configured to determine whether the defect portion has an outwardly convex shape by the sign of the distance difference information. And the defect detection means 1037 may be made to acquire information about the defect part which further includes this detection result.

In addition, when the defect detecting means 1037 detects a plurality of distance difference information whose values are greater than the second threshold, and a plurality of distance difference information having a corresponding rotation angle consecutive, the plurality of distance difference information or the plurality of distance difference information You may group the rotation angles of . And the defect detection means 1037 may acquire information about the defect part which further has information indicating this group. In this case, one group of distance difference information may be regarded as distance difference information for a plurality of positions on one defective part, for example. Also, in this case, one group of rotation angles may be regarded as information indicating a plurality of rotation angles indicating a plurality of positions on one defective part or a range of a defective part, for example.

Moreover, in the case of the above processing, cutouts, such as an orientation flat part of the workpiece|work 10, are also detected as a defect part. If there is no problem even if the cut-out is detected as a defective part, the above treatment is preferable. However, if the cut-out is not detected as a defective part, it is not necessary to detect the cut-out as a defective part or exclude it from the defective part. have.

Therefore, for example, the defect detection means 1037 detects a plurality of distance difference information in which the corresponding rotation angle is continuous by a predetermined number of two or more from the distance difference information detected using the second threshold value. This predetermined number is set to the number corresponding to the length of the cutout provided in the workpiece|work 10, ie, a rotation angle, for example. In addition, by excluding a plurality of distance difference information detected in this way from the defective portion, it is possible to precisely detect the defective portion except for the notch.

Alternatively, the notch detection means 1036 may perform the detection processing of the defective portion using the second threshold value as described above only on the distance difference information corresponding to the rotation angle excluding the rotation angle indicating the notch.

Alternatively, the defect detecting means 1037 determines the difference between the first distance information and the second distance information calculated by the calculation means 1035, that is, the magnitude of the value in the distance difference information is smaller than a predetermined first threshold, and A portion larger than the second threshold value having a smaller value than the first threshold value may be detected. And information about the detected part is acquired as information about the edge 11 defect part of the workpiece|work 10. As shown in FIG. In addition, the defect detection means 1037 may also detect distance difference information whose value is equal to the first threshold value. The first threshold is, for example, a threshold for detecting the cut-out portion of the workpiece 10 as described above. The second threshold is as described above. By doing so, it is possible to precisely detect a defective portion so as not to include a cutout by not detecting distance difference information greater than the first threshold.

The output unit 104 outputs information for aligning the work acquired by the acquisition unit 103 . In addition, the output unit 104 outputs information for specifying the direction of the work acquired by the acquisition unit 103 . In addition, the output unit 104 outputs information about the defective part acquired by the acquisition unit 103 . For example, the output unit 104 outputs correction information that is information for aligning the work acquired by the acquisition unit 103 . In addition, the output unit 104 outputs information indicating the cutout, which is information for specifying the direction of the work obtained by the acquisition unit 103 . This output may have the identifier of the work 10 .

Output here includes display display, projection using a projector, sound output, warning light lighting, printer printing, transfer to an external device, recording media accumulation, delivery of processing results from other processing devices and other programs, etc. Concept. The output unit 104 is realized by, for example, an output device and a driver of the output device. This is also the same in the distance difference related output means 1039, which will be described later.

For example, the output part 104 may output the information for aligning the workpiece|work 10 and the information for specifying the direction of the workpiece|work 10 to the workpiece conveyance apparatus 2 mentioned later. And the work conveying apparatus 2 uses this information to take out the work 10 from the edge position detector 102, convey the work 10, or when placing the work 10 in a predetermined place, the work By correcting the direction and position of (10), the work 10 can be placed at an appropriate position in an appropriate direction.

Further, for example, the output unit 104 may transmit information for aligning the work 10 and information for specifying the direction of the work 10 to the edge position detector 102 or the like. Using this information, for example, the edge position detector 102 changes the position or direction of the work 10 to an appropriate position or direction, and transfers the work 10 to the work transfer apparatus 2, thereby transferring the work 10 to the work conveying apparatus. (2) can mount the workpiece|work 10 toward an appropriate direction at an appropriate position.

For example, when the output unit 104 outputs the correction information, the work transport device 2 or the like that has received the correction information uses the work 10, the rotation center of the work 10 is the work 10 It becomes possible to properly correct the position of the work 10 so that it becomes the center of the . For example, by outputting the correction information to the workpiece transport device 2 or the like that transports the workpiece 10, the workpiece transport device 2 or the like corrects the rotational center of the workpiece 10 to the center of the workpiece 10, 10) may be conveyed. In addition, by outputting correction information to the edge position detector 102 or the like having a moving means (not shown) or the like for correcting the position of the work 10 , the edge position detector 102 or the like moves or rotates the turntable 52 . When the work 10 is transferred to the work conveying device 2 by making the user to move the position of the work 10 so that the rotational center becomes the center of the work 10 , the position of the work 10 may be moved.

In addition, the output unit 104 outputs information indicating the notch of the work, so that the work conveying device 2, the edge position detector 102, etc. that have received this correction information change the direction in which the direction of the work 10 is specified in advance. It becomes possible to correct|amend the direction of the workpiece|work 10 suitably as much as possible.

The output unit 104 may further output an abnormal output according to the information about the defective part obtained by the acquisition unit 103 . The abnormal output is an output when there is an abnormality in the edge 11 of the work 10 . The abnormal output may be an output indicating that there is an abnormality in the edge 11 of the work 10, or may be an output to an external device of an instruction to perform an operation corresponding to the abnormality.

The abnormal output is, for example, an output such as a warning indicating that an abnormality has occurred. The output of a warning is, for example, output of a warning sound, warning display on a monitor, etc., lighting of a warning, etc. etc. The output of the warning may have the identifier of the workpiece|work 10 in which the defect part was detected, etc.

In addition, the abnormal output may be the output of the instruction|indication which stops the operation with respect to the workpiece|work 10. The operation on the workpiece 10 means that the workpiece 10 is transported by the workpiece transport device 2 or that the edge position detector 102 or the like performs positioning or the like on the workpiece 10. The transport destination of the work transport device 2 performs a process or the like designated in advance. The output unit 104 outputs, for example, an instruction to stop the operation operation to the workpiece conveying device 2 , the edge position detector 102 , or a processing device (not shown) that performs processing on the workpiece 10 . For this reason, it is possible to stop the operation of the workpiece 10 having an edge abnormality.

In addition, the abnormal output may be the output of the instruction|indication which collect|recovers the workpiece|work 10 in which the abnormality was detected, for example. The collection here includes, for example, moving the workpiece 10 to a previously designated collection location, removing the workpiece 10 from the normal processing route, evacuating, or removing the workpiece from the transport route. For example, the output part 104 outputs the instruction|indication of the workpiece|work conveyance apparatus 2 etc. which collect|recover the workpiece|work 10 in which abnormality was detected. By conveying the work 10 to a place for collection or the like designated in advance by the work conveying device 2 in accordance with this instruction, it is possible to prevent subsequent work or processing on the work for which an abnormality has been detected. Moreover, it becomes possible to perform defect inspection etc. with respect to the collect|recovered workpiece|work.

The output unit 104 may be configured to output abnormally, for example, when the acquisition unit 103 acquires information about one defective part. In addition, the output unit 104 may be configured to output abnormally when the information about the defective part acquired by the acquiring unit 103 satisfies a predetermined condition. For example, from the information about the defective part acquired by the acquiring unit 103, the acquiring unit 103 determines whether or not detecting a predetermined defective part of k or more (k is an integer of 2 or more), and selecting the k or more defective parts. When it is judged that detection is being made, an abnormal output may be performed. In addition, when the information on the defective portion acquired by the acquiring unit 103 includes information indicating a defective portion in which the maximum value of the distance from the edge is equal to or greater than a predetermined value, it may be abnormally output.

The evaluation-related information receiving unit 105 receives evaluation-related information, which is information related to evaluation of the defective portions of the edges 11 of one or two or more workpieces 10 . The evaluation-related information receiving unit 105 preferably receives evaluation-related information for the plurality of works 10 .

The evaluation-related information is, for example, information used to evaluate one or more thresholds used in a process for detecting a defective part. The one or more thresholds used in the process for detecting the defective portion are, for example, one or more thresholds relating to the size of the defective portion.

The evaluation-related information includes, for example, the workpiece 10 judged to have no defective part in the workpiece processing apparatus 1 (eg, the workpiece 10 for which the acquisition unit 103 has not acquired information regarding the defective part). Information including information indicating whether or not there was actually a defect in the In addition, the evaluation-related information includes, for example, the work 10 determined to have a defective part in the work processing apparatus 1 , for example, the work 10 for which the acquiring unit 103 acquired information regarding the defective part. Information that includes information indicating whether or not there was actually a defect in the . For example, information indicating whether or not there was actually a defect is information indicating whether the workpiece 10 was normally usable in a processing step after processing by the workpiece processing apparatus 1, for example, whether it was damaged or not. It may be information indicating whether or not there is, or may be information indicating a result of a re-inspection (including the naked eye) performed to detect the defective portion on the workpiece 10 in which the defective portion was detected. The workpiece 10 in which the defect part was detected may be the workpiece|work 10 collect|recovered by abnormal output.

Further, the evaluation-related information may be information including, for example, error correction information indicating error correction of detection of a defective part. The error correction information is information indicating whether or not the detection result of the defective part of the work processing apparatus 1 was correct. For example, the acquiring unit 103 evaluates whether or not there is actually a defect in the work 10 for which the information regarding the defective part has not been obtained, and if there is no defect, the evaluation-related information includes the defective part of the acquiring unit 103 . Error correction information indicating that the detection of ' was correct' is stored, and if there is a defect, error correction information indicating that the detection of the defective part is incorrect is stored. Further, for example, the acquiring unit 103 evaluates whether or not there is actually a defect in the work 10 that has obtained the information regarding the defective part, and if there is no defect, the evaluation-related information is the defect of the acquiring unit 103 . Error correction information indicating that the detection of the part is incorrect is stored, and if there is a defect, error correction information indicating that the detection of the defective part is correct is stored. The error correction in the detection of the defective portion is judged, for example, through the re-inspection result of the work 10 as described above or information indicating whether the work 10 can be used normally in the subsequent processing.

In addition, the evaluation-related information may further have information regarding the post-processing of the workpiece processing apparatus 1 . For example, information indicating the type of processing (eg, heat treatment, CVD, CMP, etching, etc.) of one or more post-processes, an identifier of an apparatus used for processing, processing time, pressure, temperature, etc. of the processing You may have parameters, the type and concentration of gas used for processing, the type and concentration of liquid used for processing, and the like.

In addition, the evaluation-related information may have information about the workpiece|work 10, such as the size of the workpiece|work 10, the material system of the workpiece|work, and a structure.

In addition, the evaluation-related information includes information about the defective part acquired by the acquiring unit 103, for example, information about the size of the defective part or information about a similar defective part obtained by re-inspection of the work 10, etc. good to be

Further, the evaluation-related information may have one or more threshold values relating to the size of the defective portion used in the process for detecting the defective portion. However, in the case of evaluating one or more threshold values currently used by the acquiring unit 103, and using evaluation related information on the work 10 to which the detection process of the defective portion has been performed by this current threshold value, evaluation related information is used. Information need not have thresholds.

Reception means reception of information input from input devices such as a keyboard, mouse, or touch panel, reception of information transmitted through a wired or wireless communication line, reception of information read from a recording medium such as an optical disk, magnetic disk, or semiconductor memory. It is a concept that includes

The evaluation-related information received by the evaluation-related information receiving unit 105 is stored, for example, in a storage unit (not shown).

The evaluation-related information receiving unit 105 may be realized as a driver of an input device, control software of a menu screen, receiving means, or the like.

The setting unit 106 acquires 1 or 2 or more threshold values related to the size used by the acquisition unit 103 to detect a defective part by using the evaluation-related information. Then, by using the acquired threshold, the acquiring unit 103 sets a threshold for the size used to detect the defective part. The setting here is a concept including, for example, updating, for example, overwriting, etc. of one or two or more threshold values used by the acquiring unit 103 configured by the user or the like to detect a defective part by default or the like.

For example, in the case where the acquiring unit 103 performs detection of the defective portion on the work 10 using one threshold for the distance from the edge 11 of the defective portion, the defective portion is not detected. When the evaluation-related information receiving unit 105 receives evaluation-related information including information indicating that there is actually a defective part in 1 or 2 or more of the predetermined number or more of the workpieces 10 judged not to have a defective part The setting unit 106 acquires a threshold that is easier to detect a defective part than a single threshold for the distance from the edge 11 of the defective part that the acquiring unit 103 was using, for example, a threshold of a small value. , update the threshold for the distance from the edge 11 used by the acquisition unit 103 at this threshold. Due to this, even a portion having a smaller change in distance from the edge 11 can be detected as a defective portion, thereby reducing omission of detection of the defective portion.

In addition, in this case, evaluation-related information having more information indicating the distance from the edge 11 of the defective portion obtained by re-inspection or the like is received so that the defective portion is not detected, but actually the defective portion of the workpiece 10 The information indicating the distance from the edge 11 of the defective portion may be used to obtain a threshold value equal to that at which this defective portion is detected.

Further, for example, the evaluation-related information receiving unit 105 transmits evaluation-related information including information indicating that, for example, a re-inspection of 1 or 2 or more predetermined number of workpieces 10 in which defective portions have been detected, that no defective portions are actually detected. ) is received, the setting unit 106 determines that the defect detection is greater than the value of one threshold for the distance from the edge 11 of the defective part that the acquisition unit 103 was using as the threshold for the distance from the edge. A threshold value that becomes difficult, for example, a large value threshold may be acquired, and the threshold value for the distance from the edge 11 used by the acquisition unit 103 may be updated from this threshold value.

In addition, the setting unit 106 may perform machine learning using the error correction information and evaluation-related information having a threshold value to obtain one or more threshold values for the size of the defective part. For example, the setting unit 106 may include error correction information of evaluation-related information for a plurality of works received by the evaluation-related information receiving unit 105, one or more thresholds regarding the size of the defective part, and the above-described work processing apparatus ( Learning is performed by using a combination of one or more information such as information on post-processing in 1), information on the workpiece 10 (for example, information on the type of workpiece, etc.) and information on defective parts as learning data. Conduct. And, for example, when the work processing apparatus 1 performs processing on one or more workpieces 10 when setting a threshold value for defect detection, a workpiece processing apparatus similar to that learned above with respect to this workpiece 10 One or more information such as information on post-processing in (1), information on the workpiece 10, information on defective parts, etc., and one or more thresholds on the size of the defective part (for example, the distance from the edge By inputting a pair with each of a plurality of threshold values prepared in advance for a threshold value or a threshold value for width) through the above-described evaluation-related information receiving unit 105 or the like, each pair is evaluated using the learning result. And, for the defective part, when an evaluation result having error correction information indicating that a correct judgment is obtained, one of the threshold values (eg, the largest threshold, etc.) included in the combination is set to one or more for the size of the defective part. It may be obtained as a threshold value. And you may make it set this threshold value as a threshold value for detecting a defective part.

In this way, the defect portion of the edge 11 of the work 10 can be precisely detected by using an appropriate threshold according to the post-processing process or the type of the work.

For learning using learning data, a learning model such as SVR can be used as a known technique. In this case, the learning data may be regarded as teacher data.

In addition, the error correction information is information about the defective part of one work 10 that has evaluation-related information and the setting unit 106 from information indicating whether there is actually a defective part on the edge 11 of the work 10 . may be obtained appropriately.

In addition, instead of the error correction information in the above, the processing result of the work 10, for example, whether the work 10 is damaged or not, is learned from the edge 11 of the defective part of the work 10 instead of the threshold value. may be made to learn the distance of , and in this case, at least one of information on post-processing of the workpiece processing apparatus 1, information on the workpiece 10, information on a defective part, etc. and the edge of the defective part By inputting a plurality of pairs each having a plurality of distances from the learning result, the distance from the edge of the defective part that does not cause breakage or the like in a post-process can be obtained, for example, using this distance as a threshold This makes it possible to appropriately detect a defective portion. It goes without saying that, by performing machine learning other than these, a threshold regarding the size used at the time of defect detection may be set.

In addition, the setting unit 106 uses multiple regression analysis from a combination of a threshold value used in the past included in the evaluation-related information and parameters obtained from post-processing and the type of work, etc., to create a prediction equation for the threshold, and this prediction equation , an appropriate threshold value may be calculated according to the post-processing process, the type of work, etc., and the calculated threshold value may be set.

Next, an example of the edge position detector 102 will be described with reference to FIG. 3 .

The edge position detector 102 is provided with the turntable rotation mechanism 53 for rotating the turntable 52 on which the workpiece|work 10 is mounted, The turntable rotation mechanism 53 is driven by the electric motor 54. As shown in FIG. The edge detection unit 55 for detecting the edge position of the work 10 includes a light projector 55a and a sensor 55b. The sensor 55b is, for example, an optical sensor. The sensor 55b continuously changes its output while maintaining a specific relationship depending on the amount of light received, and it is used that the output changes linearly with respect to the amount of incident light called CCD (charge coupled device) or PSD (Position Sensitive Detector, brand name). do. The sensor 55b corresponds to, for example, the sensor 15 of FIG. 2A . The sensor 55b of the edge detection unit 55 is emitted from the light projector 55a and is reduced by the work 10 directly below it and generates an output according to the amount of light reaching it. This output will indicate the edge position of the work 10 . The encoder 56 detects the amount of rotation of the electric motor 54 corresponding to the rotation angle of the turntable 52 and outputs a digital signal. The accumulator 57 accumulates the output of the sensor 55b and the output of the encoder 56 as a pair of data for each predetermined rotational angle of the turntable 52 . In addition, the accumulation|storage part 57 may convert the output of the sensor 55b into the distance from the rotation center of the workpiece|work 10 to the edge 11, and may output it. In this specific example, the accumulator 57 converts the rotation angle and the output of the sensor 55b into the distance from the rotation center of the workpiece 10 to the edge 11. A pair of first distance information is converted to the first rotation distance. It is accumulated in the first rotation distance information storage unit 101 as information. In the case where the output of the sensor 55b is an analog signal, an A/D converter or the like may be provided between the storage unit 57 and the sensor 55b.

In addition, the edge position detector 102 mentioned here is an example, and in the present invention, if it is possible to obtain a plurality of first rotation distance information for the workpiece 10 similar to the edge position detector 102, another edge position detector (102) may be used.

In addition, although the case where the edge position detector 102 is a part of the work processing apparatus 1 is shown here, the edge position detector 102 may be made into the apparatus different from the work processing apparatus 1, for example. .

Next, an example of the work conveyance system of this embodiment is demonstrated using FIG.

The work conveyance system 1000 is provided with the work processing apparatus 1 and the work conveyance apparatus 2 . The conveyance path 1001 of the work conveyance system 1000 is covered with a cover etc. (not shown), for example.

The work conveying apparatus 2 is an apparatus which conveys the work 10. As shown in FIG. For example, the workpiece conveying apparatus 2 is provided with an arm etc. which can move in a horizontal direction or a vertical direction, The workpiece|work 10 is conveyed by moving this arm in the situation where the workpiece|work 10 is mounted. do. The workpiece conveying apparatus 2 itself may have a structure which can move in a horizontal direction or a vertical direction. However, the structure of the workpiece conveyance apparatus 2, etc. are not questionable.

The work conveying apparatus 2 transfers the work 10 to the work processing apparatus 1 . The transfer of the workpiece 10 to the workpiece processing apparatus 1 means, for example, conveying the workpiece 10 to the workpiece processing apparatus 1 during transportation of the workpiece 10 to transfer the workpiece to the workpiece processing apparatus 1 . ), and then receives the work 10 from the work processing device 1 and transports it to another point.

The work conveying apparatus 2 is an apparatus which performs conveyance from a 1st point to the work processing apparatus 1, and conveyance from the work processing apparatus 1 to a 2nd point, for example. A 1st point is a point where the workpiece|work 10 used as a conveyance object is arrange|positioned. A 2nd point is a point used as the conveyance destination of the workpiece|work 10 used as conveyance object. In addition, you may make it convey the work conveying apparatus 2 further from the work processing apparatus 1 to the 3rd point which is a point where the collection|recovery work 10 is mounted. For example, the work conveying apparatus 2 may be made to convey the work 10 to either one of a 2nd point or a 3rd point according to an instruction input from the outside or the like.

Here, as an example, the workpiece conveying apparatus 2 conveys the workpiece 10 accommodated in the container 4 which is a 1st point up to the turntable 52 of the workpiece processing apparatus 1 above, 　work processing apparatus 1 ) of the work 10 placed on the turntable 52 of the second point, which is the second point, of the device (not shown) that performs the predetermined processing, to the place 6 or the third point to the inside of the collection container 5 A case will be described as an example. In this case, for example, the work conveying apparatus 2 receives the abnormal output output by the output unit 104 of the work processing apparatus 1 through a receiving unit (not shown), etc., and when the abnormal output is received, processing the work. The workpiece 10 placed on the turntable 52 of the device 1 is transported to the inside of the collection container 5, which is the third point, to recover the workpiece 10, and when no abnormal output is received, the workpiece is processed The workpiece 10 placed on the turntable 52 of the apparatus 1 is conveyed to the second point, the placement table 6 of the apparatus (not shown) performing a predetermined processing.

In addition, the work conveying apparatus 2 receives information for aligning the work, such as correction information output by the output unit 104 of the work processing apparatus 1, and corrects the position of the work 10, means or work You may include means for correcting the direction of the work 10 by receiving information specifying the direction of the work, such as information indicating the notch output by the output unit 104 of the processing apparatus 1 .

Moreover, even if the work conveying apparatus 2 is provided with a means etc. which receive the abnormal output outputted by the output part 104 of the work processing apparatus 1, and stop conveyance of the workpiece|work 10 according to the received abnormal output, etc. good.

In addition, since it is a well-known technique about the structure of the workpiece conveyance apparatus 2, detailed description is abbreviate|omitted here.

The mounting table 6 is a table for placing the workpiece 10 to be processed by an apparatus (not shown) that performs a predetermined process on the workpiece 10 . The mounting table 6 corresponds to the above-described second point. The apparatus for performing the predetermined treatment may be any apparatus such as a CVD apparatus or a surface polishing apparatus. For example, a predetermined process is performed with respect to the workpiece|work 10 mounted on this mounting table 6 .

The container 4 is a container for accommodating and conveying one or two or more workpieces 10 . The container 4 corresponds to the first point described above. The container 4 accommodates the workpiece 10 to be processed by the above-described not-shown apparatus. In the container 4 , the work 10 arranged on the mounting table 6 conveyed by the work conveying device 2 is accommodated. The container 4 is, for example, a cassette for accommodating and conveying one or two or more workpieces 10 . The container 4 is, for example, a so-called FOUP (front open unified pod). The container 4 can be installed and removed with respect to the cover (not shown) of the conveyance path 1001 . The cover of the conveyance path 1001 is provided with the door (not shown) etc. for installing the container 4, for example.

The container 5 is a container for accommodating and conveying one or two or more workpieces 10 . The container 5 corresponds to the third point described above. The container 5 is a container in which the work 10 recovered according to the abnormal output output by the output unit 104 is accommodated. The work 10 conveyed by the work conveying apparatus 2 according to the abnormal output is accommodated in the container 5. As shown in FIG. Other configurations of the container 5 and the like are the same as those of the container 4 .

In addition, although the 1st point demonstrated the case where the container 4 is the container 4, the 2nd point is the mounting table 6, and the 3rd point is the container 5, any point may be sufficient as each point. For example, the first point may be a mounting table or the like of an apparatus that performs a predetermined process on the work. Further, the second point may be a container similar to the container 4 . Moreover, the 3rd point may be the mounting table of the inspection apparatus (not shown) which inspects a workpiece|work, etc.

Next, an example of the operation|movement of the work processing apparatus 1 is demonstrated using the flowchart of FIG. In addition, since the process for which the edge position detector 102 acquires 1st rotation distance information is well-known, description is abbreviate|omitted here. In addition, the description is also abbreviate|omitted here about the process of accumulating in the 1st rotation distance information storage unit 101 a plurality of pieces of first rotation distance information obtained by the edge position detector 102 with respect to the work 10 . In addition, a case in which the setting unit 106 acquires a threshold regarding the size of a defective part without using machine learning will be described as an example.

The work processing apparatus 1 determines whether it is the timing for outputting the correction information, the information indicating the notch, and the information about the defective part (step S100). For example, the work processing apparatus 1 stores a plurality of first rotation distance information corresponding to a circumference of the work 10 obtained for one work 10 in the first rotation distance information storage unit 101 . It is determined whether or not it is stored, and if it is stored, it is determined that the above information is outputted, and when it is not stored, it is determined that it is not the output timing. Alternatively, when the processing for acquiring the plurality of first rotation distance information for one work 10 by the edge position detector 102 is finished, it may be determined that it is the timing to output. In the case of output, the process proceeds to step S101, and in the case of not outputting, the process proceeds to step S120.

The synthesizing means 1031 is configured to generate four pieces of first distance information each having a difference of 90 degrees from among a plurality of pieces of first distance information included in a plurality of pieces of first rotation distance information corresponding to one work 10 , respectively. A plurality of pieces of combined distance information are obtained by synthesizing (step S101). For example, the synthesizing means 1031 divides a plurality of first rotation distance information having consecutive rotation angle values into a plurality of pairs so that the range of rotation angle values is 90 degrees, and the arrangement order of each divided pair is the same. The first distance information having the first rotation distance information is synthesized. Synthesis here is, for example, calculation of an average value. The synthesizing means 1031 associates the obtained synthesized distance information with four rotation angles respectively corresponding to the four synthesized first distance information and accumulates them in a storage unit (not shown).

The synthesis processing means 1032 substitutes 1 as the value of the counter p (step S102).

The combining processing means 1032 detects the p-th combined distance information counting from the smallest value in the combined distance information synthesized in step S102 (step S103). The combining processing means 1032 gives information such as a flag indicating detection and a flag indicating deletion, for example, to the detected combined distance information. Also, instead of detecting the p-th combined distance information, the combined distance information representing the minimum value may be detected and deleted. In the case of deletion, the combined distance information representing the minimum value is detected again from the remaining combined distance information that is not deleted and then deleted.

The synthesis processing means 1032 increments the value of the counter p by 1 (step S104).

The synthesis processing means 1032 determines whether the value of the counter p is equal to or greater than a predetermined number (step S105). If it is equal to or greater than the predetermined number, the flow advances to step S106. If it is not equal to or greater than the predetermined number, the flow returns to step S103.

The synthesis processing means 1032 substitutes 1 as the value of the counter q (step S106).

The combining processing means 1032 detects the q-th combined distance information counting from the largest value in the combined distance information synthesized in step S102 (step S107). The combining processing means 1032 provides information such as a flag indicating detection and a flag indicating deletion to the detected combined distance information. Also, instead of detecting the q-th combined distance information, the combined distance information indicating the maximum value may be detected and deleted. In the case of deletion, the synthesized distance information indicating the maximum value is detected again from the remaining synthesized distance information that is not deleted and deleted.

The synthesis processing means 1032 increments the value of the counter q by one (step S108).

The synthesis processing means 1032 determines whether the value of the counter q is equal to or greater than a predetermined number (step S109). If it is equal to or greater than the predetermined number, the flow advances to step S110. If it is not equal to or greater than the predetermined number, the flow returns to step S107.

The combining processing means 1032 detects combined distance information that is not detected (or not deleted) in steps S103 and S107, and continuous combined distance information equal to or greater than a predetermined number (step S110).

The combining processing means 1032 detects one piece of combined distance information, for example, the combined distance information in the center order, from the continuous combined distance information detected in step S110, and 4 that becomes a synthesis source of the detected combined distance information. Acquire first distance information and a rotation angle corresponding to one of the first distance information (step S111). For example, as one rotation angle, the smallest value among the rotation angles corresponding to the four pieces of first distance information is acquired.

The correction information obtaining means 1033 obtains correction information for moving the rotation center of the work 10 to the center of the work 10 using the four first distance information and one rotation angle obtained in step S111. (Step S112). For example, correction information is obtained using Equations 1 and 2 described above. Then, the obtained correction information is temporarily stored in a storage unit (not shown).

The second distance information obtaining means 1034 uses the correction information obtained in step S112 to obtain second distance information according to the rotation angle and the rotation angle when the work 10 has a circular shape with no irregularities on the edge 11 and A relational expression representing the relationship of is obtained (step S113). For example, an ideal curve equation is obtained by substituting correction information into the coefficients of Equation 3 described above.

The second distance information obtaining means 1034 substitutes the plurality of rotation angles corresponding to the plurality of first rotation distance information corresponding to the one work 10 described above into the relational expression obtained in step S113, respectively, and for each rotation angle Second distance information is acquired (step S114). Then, a plurality of pieces of second rotation distance information having the rotation angle and second distance information are accumulated in a storage unit (not shown).

The calculating means 1035 acquires a plurality of distance difference information indicating a difference between the first distance information and the second distance information corresponding to the same rotation angle (step S115).

The notch detection means 1036 acquires information indicating the notch by using the plurality of distance difference information and the first threshold (step S116).

The defect detecting means 1037 performs a process of obtaining information about the defective portion by using the plurality of distance difference information and the second threshold (step S117).

The output unit 104 outputs abnormally according to the information about the defective part (step S118). In addition, abnormal output according to the information on the defective part includes not outputting abnormally depending on the information on the defective part, and not outputting abnormally when information on the defective part is not obtained. Concept.

The output unit 104 outputs correction information, information indicating a notch, and information about a defective portion (step S119). And it returns to step S100. In addition, when abnormal output is being performed in step S118, the output part 104 may be made not to output correction|amendment information or information indicating a notch. Further, the output unit 104 does not need to output the information about the defective part when the defect detecting means 1037 does not acquire the information about the defective part.

The evaluation-related information receiving unit 105 determines whether evaluation-related information has been received (step S120). If it is received, it proceeds to step S121, and if not, it proceeds to step S122.

The evaluation-related information receiving unit 105 accumulates the evaluation-related information received in step S120 in a storage unit (not shown) (step S121). And it returns to step S100.

The setting unit 106 determines whether it is the timing to set one or more thresholds related to the size of the defective part (step S122). For example, when an instruction for setting a threshold value is received from the user through a receiving unit (not shown), it is determined that the timing is set, and when not received, it is determined that the timing is not. Further, it may be determined that the timing is set when evaluation-related information is received in step S120 or when a predetermined number of evaluation-related information is received in step S121. In the case of timing, the process proceeds to step S123, and in the case of not timing, the flow returns to step S100.

The setting unit 106 acquires one or more threshold values regarding the size of the defective part by using the evaluation-related information accumulated in step S121 (step S123).

The setting unit 106 sets the threshold value obtained in step S123 to the threshold value used when the acquiring unit 103 detects the defective part (step S124). For example, the threshold value is accumulated in a storage unit (not shown). Further, when a threshold corresponding to the threshold obtained in step S123, for example, a threshold used for the same processing has already been set, for example, when a default threshold is set, the setting unit 106 sets this threshold update You may consider this update as a setting. And it returns to step S100.

In addition, although the case where the setting unit 106 obtains the threshold value without using machine learning has been described in FIG. 6 , when the setting unit 106 obtains the threshold value using machine learning, for example, step S121 Information on post-processing of the work processing device 1 similar to the evaluation-related information learned before acquiring the threshold in step S123 by causing the setting unit 106 to learn using the evaluation-related information accumulated in One or more pieces of information, such as information on the workpiece 10 or information on a defective portion, and one or more thresholds regarding the size of the defective portion (for example, a threshold for a distance from an edge and a threshold for a width) are prepared in advance A pair of each of the plurality of thresholds may be received through the above-described evaluation-related information receiving unit 105 or the like, and the setting unit 106 may receive the information received in step S123 to obtain a threshold from the learning result. In addition, a plurality of threshold values prepared in advance may be used as default values stored in a storage unit or the like not shown in advance.

In addition, in the flowchart of Fig. 6, the processing is terminated by the power supply shutting down or by the interruption of processing completion.

Next, an example of the operation|movement of the work conveyance system 1000 is demonstrated using the flowchart of FIG. In addition, here, as an example, when the workpiece|work 10 is mounted on the turntable 52 of the edge position detector 102 of the workpiece processing apparatus 1, the edge position detector 102 plural with respect to this workpiece|work 10. A case in which the first rotation distance information is obtained and the obtained rotation distance information is accumulated in the first rotation distance information storage unit 101 will be described as an example.

The work conveying apparatus 2 takes out the work 10 at the first point, for example, a single work 10 accommodated in the container 4, and conveys it to the work processing apparatus 1 (step S201). . Specifically, it is mounted on the turntable 52 of the edge position detector 102 .

The edge position detector 102 acquires a plurality of first rotational distance information for the work placed on the turntable 52, and accumulates the obtained first rotational distance information in the first rotational distance information storage unit 101 (step S202).

The work processing apparatus 1 performs a process of obtaining and outputting correction information for the work 10, information indicating a cutout portion, and information about a defective portion, or a process of outputting an abnormality (step S203). In addition, this process corresponds to the process of the work processing apparatus 1 shown to step S100 to step S119 in the flowchart of FIG. 6, for example.

The work conveying apparatus 2 determines whether an abnormal output has been received from the output part 104 of the work processing apparatus 1 (step S204). If received, the process proceeds to step S207, and if not, the process proceeds to step S205.

The work conveying apparatus 2 uses the correction information output by the output unit 104 to output the work placed on the turntable 52 of the edge position detector 102 and the information indicating the cutout, so that the position and direction are direction and lifted (step S205). This correction may be performed by changing the position or direction of supporting the work when the work conveying device 2 lifts the work 10, or by changing the position or direction of the turntable of the edge position detector 102 It may be carried out by

The work conveying apparatus 2 conveys and arranges the work 10 to a 2nd point, for example, the mounting table 6 (step S206). Then, the return process is finished.

The work conveying device 2 lifts the work 10 from the turntable of the edge position detector 102 and conveys it to the third point for collection, here, the container 5 for collection, and accommodates the work in the container 5 . (Step S207). Then, the return process is finished.

Hereinafter, an example of the specific operation|movement of the work conveyance system 1000 in this embodiment is demonstrated. Here, a case in which the edge position detector 102 is provided with means for changing the position or direction of the turntable 52 according to the correction information output by the output unit 104 or information indicating the cutout portion will be described. In addition, here, the case where the workpiece|work 10 is the wafer 10 is taken as an example and demonstrated.

The work conveying apparatus 2 takes out one wafer 10 stored in the container 4 and conveys it to the work processing apparatus 1, and the turntable 52 of the edge position detector 102 as shown in FIG. play on top

When the wafer 10 is placed on the turntable 52, the edge position detector 102 acquires the rotation angle and first distance information while rotating the wafer 10, and the accumulator 57 rotates the rotation angle and the first distance information. A plurality of first rotation distance information having a pair of is accumulated in the first rotation distance information storage unit 101 .

8 is a diagram illustrating a first rotation distance information management table for managing the first rotation distance information stored in the first rotation distance information storage unit 101 . It is assumed that this first rotation distance information is obtained using the edge position detector 102 shown in FIG. 3 as described above. Herein, for convenience of description, a case in which first rotation distance information sequentially acquired every 0.036 degrees is stored when the wafer 10 is rotated by 1 will be described as an example. That is, it is assumed that 10000 records of first rotation distance information are stored for one wafer.

The first rotation distance information management table has attributes such as 'wafer ID', 'rotation', and 'first distance information'. The 'wafer ID' is identification information of the wafer. The 'rotation angle' is the rotation angle of the wafer. The 'first distance information' is the distance from the rotation center of the wafer to the edge of the wafer. _{In addition, it is assumed that r m} (m is an integer from 1 to 10000) of 'first distance information' is first distance information whose corresponding rotation angle is 0.036 × m (degrees). The value of r _m is said to be an arbitrary value. In the first rotation distance information management table, each row (record) represents first rotation distance information, respectively.

9 is a graph for explaining a relationship between a rotation angle of first rotation distance information and first distance information. This graph is a graph showing the relationship between the rotation angle of the first rotation distance information and the first distance information for a wafer having a 'wafer ID' of 'W001' (hereinafter referred to as wafer W001). Assuming that the rotation center of the wafer is deviated from the center of the wafer, as shown in FIG. 9 , the entire graph is, for example, a curved waveform with 360 degrees as one period. In the drawing, the concave portion 20 is a portion corresponding to the orientation flat portion of the wafer 10 . Further, the concave portions 21 and 22 are portions corresponding to chipping of the wafer 10 . In addition, the convex portion 23 is a portion corresponding to the burr of the wafer 10 .

First, a user or the like performs an operation for designating, for example, the wafer W001 as an acquisition target such as correction.

10 is a graph showing the relationship between the rotation angle of the first rotation distance information and the first distance information for explaining the processing performed by the synthesizing means 1031 on the first rotation distance information, FIG. A range graph in which the rotation angle is 0 degrees or more and less than 90 degrees, Fig. 10 (b) is a graph of a range in which the rotation angle is 90 degrees or more and less than 180 degrees, and Fig. 10 (c) is a graph of a range in which the rotation angle is 180 degrees or more and less than 270 degrees , Fig. 10 (d) is a graph of a range in which the rotation angle is 270 degrees or more and less than 360 degrees, and Fig. 10 (e) is a graph from FIGS. 10 (a) to 10 (d) synthesized according to the arrangement order of the rotation angle. It is a graph. FIG. 10(f) is a graph illustrating a situation in which a portion having a large change in value is deleted from the graph of FIG. 10(e).

The synthesizing means 1031 obtains a record of 'W001' in the 'wafer ID' from the first rotation distance information management table shown in FIG. 8, and divides the acquired record into four 'rotation angles' every 90 degrees. Specifically, a pair of records with a 'rotation angle of 0 degrees or more and less than 90 degrees, a record pair with a 'rotation angle' of 90 degrees or more and less than 180 degrees, a pair of records with a 'rotation angle' of 180 degrees or more and less than 270 degrees, and ' It is divided into pairs of records whose 'rotation angle' is greater than or equal to 270 degrees and less than 360 degrees. A graph showing each pair of records is a graph shown in FIGS. 10(a) to 10(d).

Then, the synthesizing means 1031 combines the first distance information having the first rotation distance information in the same arrangement order of each divided pair. Here, the synthesis is the calculation of the average value. For example, the synthesizing means 1031 arranges each pair of records in order from the smallest rotation angle value to the first record, that is, the 'rotation angle' is '0', '90', '180' and ' The average value R _{1 of the values 'r 1} ', 'r ₂₅₀₁ ', 'r ₅₀₀₁ ' and 'r ₇₅₀₁ ' of the 'first distance information' of the record of 270' is obtained as the first composite distance information, and this rotation angle and Correspondingly, it is accumulated in a storage unit not shown. Also, R ₁ =(r ₁ + r ₂₅₀₁ + r ₅₀₀₁ + r ₇₅₀₁ )/4.

Also, similarly, the values 'r2', 'r2502', 'r2', 'r2502' of the 'first distance information' of the second record of each pair, i.e., the records where the 'rotation angle' is '0.036', '90.036', '180.036' and '270.036', _{The average value R 2} of 'r5002' and 'r7502' is acquired as second combined distance information, and is stored in a storage unit (not shown) in correspondence with this rotation angle. The same processing is performed for the third and subsequent records.

11 is a combined distance information management table in which the combining means 1031 manages the obtained combined distance information. The composite distance information management table has properties of 'rotation angle' and 'composite distance'. The 'rotation angle' is a rotation angle corresponding to each of the four pieces of synthesized first distance information. The 'composite distance' is synthesized distance information. Also, it is said that R _m =(r _m + r _m+2500 + r _m+5000 + r _m+7500 )/4.

10(e) is a graph showing the combined distance information obtained by the combining means 1031 . In addition, here, the angle with the smallest value among the 'rotation angles' is indicated on the horizontal axis. As shown in FIG. 10(e) , the first distance information with different rotation angles is synthesized by 90 degrees, and the waveform that occurs due to the rotation center deviating from the center of the wafer as shown in FIG. 9 is canceled and the entire graph becomes a straight line. However, the concave portions 20, 21 and 22 and the convex portions 23 corresponding to defective portions such as chippings and burrs, or cutout portions such as orientation flat portions existing in the plurality of consecutive first distance information before synthesis are Values change by synthesis, but do not cancel out, so they remain.

Next, the combining processing means 1032 repeats the process of detecting and deleting the minimum combined distance information with respect to the plurality of combined distance information synthesized by the combining means 1031 shown in Fig. 11 until a predetermined number of times is reached. do. Here, the deletion may include adding flag information indicating the deletion to the combined distance information. Through this, for example, in FIG. 10(e) , a plurality of combined distance information of the concave portion 20 corresponding to the orientation flat portion having a large change in the size of the value with respect to other portions is sequentially deleted from the information, and furthermore, the Subsequently, the combined distance information of the concave portions 21 and 22 corresponding to the chipping having a large change in the value of the other portions is sequentially deleted.

Next, the combining processing means 1032 repeats the process of detecting and deleting the combined distance information of the maximum value from the remaining plurality of combined distance information by deleting the minimum value by a predetermined number of times as described above until the predetermined number of times is reached. . Through this, for example, the combined distance information of the convex portion 23 corresponding to the burr having a large change in the value of the other portion in FIG. 10(e) is sequentially deleted. In addition, it is preferable to repeatedly determine the number of times of each deletion by experiment or the like. Also, for example, the number of detections and deletions on the side where cutouts such as orientation flat portions exist (here, the number of detection and deletion of the minimum value) is the number of detections and deletions on the side where cutouts such as orientation flat portions do not exist. (here, the number of times of detection and deletion of the maximum value) is preferable.

Through this, it is possible to detect and delete a large part of a change in the magnitude of a value in the combined distance information shown in FIG. 11, and the undetected combined distance information, that is, the remaining combined distance information that is not deleted, becomes as shown in FIG. 10(f). Among the undetected combined distance information, two or more consecutive combined distance information is a plurality of pieces of combined distance information having a small change.

Next, the combining processing means 1032 detects one piece of combined distance information from the remaining continuous combined distance information that is not detected (not deleted here). Here, the number of consecutive combined distance information is detected for each of a plurality of consecutive pieces of combined distance information, and one piece of combined distance information in which the arrangement order of the part having the largest consecutive number is the center is detected. Here, for example, the _{combined distance information in the range of the rotation angle θ of θ 600} to θ ₁₂₀₀ , specifically, the combined distance information of the region 25 in FIG. Assuming that there are more than continuous portions, the combining processing means 1032 detects combined distance information located in the middle of this range, specifically, combined distance information whose corresponding rotation angle is θ ₉₀₀ . In addition, θ _m (m is an integer from 1 to 10000) represents, for example, a rotation angle when the wafer W001 is rotated 600 times by 0.036 degrees, that is, a rotation angle of 0.036 × m (degrees). θ ₆₀₀ is, for example, a rotation angle when wafer W001 is rotated by 0.036×600 (degrees).

Further, the combining processing means 1032 obtains four rotation angles corresponding to the four first distance information before combining the detected combined distance information from the combined distance information management table shown in Fig. 11 . For example, in the combined distance information management table shown in FIG. 11, a record including a rotation angle θ corresponding to the synthesized distance information detected above is detected as a value of 'rotation angle', and all ' Get the value of 'rotation angle'. Alternatively, 90 degrees, 180 degrees, and 270 degrees are sequentially added to the rotation angle θ _{900 to obtain four rotation angles before synthesis.} Here, it is assumed that _{θ 900} , θ ₉₀₀ +90 degrees, θ ₉₀₀ +180 degrees, and θ ₉₀₀ +270 degrees are obtained as rotation angles. In addition, the synthesis processing means 1032 records the four first distance information (r ₉₀₀ , r ₃₄₀₀ , r ₅₉₀₀ and r ₈₄₀₀ ) corresponding to the obtained four rotation angles in the first rotation distance information management table shown in FIG. 8 . acquire

The four first distance information obtained in this way is the first distance information obtained for the edge where there are no cutouts, burrs, chippings, etc. of the wafer. become a distance

The correction information obtaining means 1033 reads the above-mentioned Equations 1 and 2, for example, from a storage unit (not shown), and the four first distance information obtained by the synthesis processing means 1032 and the first One of the rotation angles corresponding to the distance information, here, _{by substituting the smallest rotation angle (θ 900} ) obtained above into Equations 1 and 2 to move the rotation center of the wafer W001 to the center of the wafer W001 Correction information for this purpose, that is, an angle that is information indicating a movement direction and a length that is a movement amount are calculated. Here, it is assumed that the angle (α ₁ ) and the length (h ₁ ) are obtained as correction information. The correction information obtaining means 1033 temporarily stores the obtained correction information, for example, in a storage unit (not shown).

The second distance information obtaining unit 1034 that has received the correction information reads the above-described equation 3 from a storage unit (not shown), and substitutes the _{angle (α 1} ) and the length (h _{1 ), which are correction information, into equation 3} Thus, an ideal curve is obtained.

The second distance information obtaining means 1034 sequentially obtains second distance information by sequentially substituting a plurality of rotation angles corresponding to a plurality of first rotation distance information into the obtained ideal curve equation. Specifically, the second distance information is sequentially calculated by substituting each rotation angle in the case where the value is sequentially increased from 0 degrees to just before 360 degrees by 0.036 degrees to the ideal curve equation. Then, the second rotation distance information having the substituted rotation angle and the obtained second distance information is accumulated in a storage unit (not shown).

12 is a diagram illustrating a second rotation distance information management table for managing the second rotation distance information acquired and accumulated by the second distance information obtaining means 1034. Referring to FIG. The second rotation distance information management table has 'rotation angle' and 'second distance information'. The 'second distance information' is second distance information, for example, a distance from the rotation center of the wafer W001 to the edge according to a rotation angle in the case where the wafer W001 is an ideally circular wafer having no irregularities on the edge. _{It is assumed that r im} (m is an integer from 1 to 10000) of 'second distance information' is second distance information whose corresponding rotation angle is 0.036 x m (degrees).

13 is a graph illustrating a relationship between a rotation angle of a plurality of pieces of second rotation distance information obtained by the second distance information obtaining unit 1034 and the second distance information. The horizontal axis represents the rotation angle θ, and the vertical axis represents the second distance information r _i .

The calculating means 1035 is a first distance corresponding to the same rotation angle in a plurality of pieces of first distance information stored in the first rotation distance information and a plurality of pieces of second distance information obtained by the second distance information obtaining means 1034 . A difference between the information and the second distance information is sequentially acquired. Here, as an example, the calculating means 1035 obtains a value obtained by subtracting the first distance information from the second distance information. For example, the first distance information 'r _{1 ' corresponding to the rotation angle '0' is subtracted from the second distance information 'r i1} ' corresponding to the rotation angle '0 degrees', and the second distance information corresponding to the rotation angle '0 degrees' is subtracted. Acquire distance difference information 'r _i1 -r ₁ '. Also, for example, the first distance information 'r ₂ ' corresponding to the rotation angle '0.036' is subtracted from the second distance information 'r _i2 ' corresponding to the rotation angle '0.036 degrees', and the rotation angle '0.036 degrees' is obtained by subtracting the first distance information 'r 2 ' corresponding to the rotation angle '0.036'. Acquire the corresponding distance difference information 'r _i2 -r _{2 '.} The same processing is performed at different rotation angles. The calculation means 1035 stores the obtained value as distance difference information in a storage unit (not shown) in correspondence with the rotation angle.

14 is a distance difference information management table in which the calculating means 1035 manages the acquired distance difference information. The distance difference information management table has properties of 'rotation angle' and 'distance difference'. The 'distance difference' is distance difference information.

Fig. 15 is a graph showing the relationship between the distance difference information and the rotation angle obtained by the calculation means 1035 (Fig. 15(a)), and a graph for explaining the processing executed by the cutout detection unit 1036 (Fig. 15((a)). b)) and a graph (Fig. 15(c)) for explaining the processing executed by the defect detecting means 1037. In the drawing, a horizontal axis indicates a rotation angle, and a vertical axis indicates a value of distance difference information. In addition, for explanation, for example, a scale larger than the vertical scale of FIGS. 9 and 13 is used as a vertical axis scale of the graph of FIG. 15 .

When the distance difference information obtained by the calculation means 1035 is expressed as a graph, it becomes a graph as shown in FIG. 15(a). This graph is, for example, when the value in the vertical axis direction of the first distance information graph, which is an actual measured value, etc. having an orientation flat portion, burrs, chipping, etc., shown in FIG. 9 is rotated by a wafer having no irregularities on the edge shown in FIG. 13 It is a graph subtracted from the value in the vertical axis direction of the ideal graph. For this reason, for the distance difference information obtained from the uneven portion of the edge of the wafer W001, the value becomes a constant value close to 0, and only the uneven portion appears in the graph as a positive or negative value different from the other portions. For example, in the graph shown in Fig. 15, the convex portions 20a corresponding to the orientation flat portions, the convex portions 21a and 22a corresponding to chipping, and the concave portions 23a corresponding to the burrs show no change in value. part, and the other part has a shape that is close to a straight line that is almost parallel to the x-axis.

The notch detection means 1036 detects distance difference information having a magnitude greater than a _{predetermined first threshold T H1} from the distance difference information obtained by the calculation means 1035 . It is assumed that the first threshold T _H1 is a length longer than the depth of chipping generally occurring at the edge of the wafer, and is preset to a positive value indicating a length sufficiently shorter than the depth of the orientation flat portion. This first threshold T _H1 is, for example, a threshold for magnitude. Here, in order to detect positive or negative distance difference information having a magnitude greater than the first threshold value T _{H1 , distance difference information greater than T H1} or distance difference information having a value smaller than _{-T H1 is detected.}

When the first threshold value T _H1 is expressed as a graph representing the relationship between the distance difference information and the rotation angle, it is shown in FIG. 15( b ).

In addition, when it is known that the distance difference information is a value obtained by subtracting the first distance information from the second distance information, the value of the distance difference information corresponding to the orientation flat part becomes a positive value, so the distance difference information having a value smaller than _{-T H1} The processing for detecting ? may be omitted.

The notch detection means 1036 detects _{distance difference information having a magnitude greater than the first threshold T H1} , and obtains a rotation angle corresponding to the detected distance difference information. For example, the notch detection means 1036 is the convex portion 20a corresponding to the orientation flat portion in Fig. 15(b). Distance difference information having a value greater than T _{H1 is detected.} And the notch detection means 1036 acquires the minimum and maximum values of the rotation angle corresponding to the detected distance difference information as information indicating the position of the orientation flat part which is the notch part of the wafer W001. For example, it is assumed that the minimum value obtained by the notch detection means 1036 is θ ₃₈₀₀ , and the maximum value is θ _{4400 .} The notch detection means 1036 accumulates the obtained minimum value (θ ₃₈₀₀ ) and maximum value (θ ₄₄₀₀ ) in a storage unit (not shown).

The defect detecting means 1037 detects distance difference information having a magnitude greater than a _{predetermined second threshold T H2} from the distance difference information obtained by the calculating means 1035 . However, here, it is assumed that distance difference information larger than the above-described first threshold T _{H1 is not detected.} The second threshold value T _H2 is a value smaller than the first threshold _{value T H1} , and is set to a value greater than zero. In addition, since a value other than 0 can be obtained for the distance difference information due to a measurement error of the first distance information, the second threshold value T _H2 is set to a value in consideration of the minute value of the measurement error. This second threshold T _H2 is, for example, a threshold for the size for detecting an edge defect part. Here, in order to detect positive or negative distance difference information having a magnitude larger than the second threshold value T _H2 , distance difference information greater than _{T H2} or distance difference information having a value smaller than _{-T H2 is detected.}

When the second threshold value T _H2 is expressed as a graph representing the relationship between the distance difference information and the rotation angle, it is shown in FIG. 15( c ).

Here, similarly to the above, the process of detecting distance difference information having a value smaller than _{-T H2 may be omitted.}

The defect detection means 1037 detects _{distance difference information having a value greater than the second threshold value T H2} , and obtains a rotation angle corresponding to the detected distance difference information. _{For example, the defect detecting means 1037 includes a portion having a value greater than T H2} of the convex portions 21a and 22a corresponding to the defective portion in Fig. 15(c) and the concave portion 23a corresponding to the defective portion - A portion with a value smaller than T _{H2 is detected.} Then, the defect detection means 1037 detects distance difference information in which the corresponding rotation angles are continuous from the detection distance difference information, and sets the minimum and maximum values of the rotation angles corresponding to the continuous distance difference information, respectively, of the defective part of the wafer W001. It is obtained as information indicating the location. For example, it is assumed that _{the minimum value θ 550} and the maximum value θ ₅₅₈ of the rotation angle are obtained for the convex portion 21a . In addition, about the convex part 22a, for example. _{It is assumed that} the minimum value (θ 7446 ) and the maximum value (θ ₇₄₅₀ ) of the rotation angle are obtained. Further, for example, it is assumed that _{the minimum value (θ 8738} ) and the maximum value (θ ₈₇₄₃ ) of the rotation angle are obtained for the concave portion 23a .

In addition, _{with respect to the distance difference information detected as a part larger than T H2} , that is, the minimum and maximum values of the rotation angles respectively corresponding to the convex parts 21a and 22a, information indicating repeated chipping is used as information indicating the type of the defective part. acquire In addition, _{with respect to the rotation angle corresponding to the distance difference information detected as a part smaller than -T H2} , that is, the minimum value and the maximum value corresponding to the concave portion 23a, information indicating overlapping is used as information indicating the type of the defective part. acquire

Further, the defect detecting means 1037 obtains the maximum value of the absolute value of the distance difference information in which the rotation angles are continuous as information indicating the size of the defective part, for example, the height of the burr or the depth of chipping. For example, if the maximum value of the absolute value of the distance difference information within the range of the _{rotation angle θ 8738} to θ _{8743 is r i8741} -r ₈₇₄₁ , the defect detecting means 1037 uses this maximum value to represent the size of the defective part. obtained as information.

And the defect detecting means 1037 accumulates the acquired information on the defective part, that is, the rotation angle indicating the range of the defective part, information indicating the type of the defective part, and information indicating the size of the defective part in a storage unit (not shown). do.

The output unit 104 outputs an abnormality according to the information about the defective part obtained by the defect detection means 1037 . The output unit 104 outputs abnormally because the defect detecting means 1037 has detected one or more defective parts here. In addition, when the defect detection means 1037 outputs information about the defective part indicating that the defective part has been detected, the output unit 104 may output an abnormality. The output unit 104 transmits, as an abnormal output, information indicating that an abnormality has been detected to the work conveying apparatus 2 specifically.

In addition, the output unit 104 outputs information about the defective portion detected by the defect detecting means 1037 . For example, the output unit 104 outputs information indicating the range of the rotation angle as information indicating the defective portion among the information regarding the defective portion detected by the defect detecting means 1037 . Further, the output unit 104 outputs information indicating the type of the defective portion as information indicating the type of the defective portion. Also, the output unit 104 outputs information indicating the size of the defective part. For example, information indicating that a burr with a height of r _i8741 -r ₈₇₄₁ exists in a range of a rotation angle of θ ₈₇₃₈ to θ _{8743 is output.} For example, the output unit 104 accumulates information on the defective part in a predetermined storage unit or the like in correspondence with the identifier of the wafer 10 . The accumulated information regarding the defective part may be log information indicating the processing of the work processing apparatus 1, for example.

In addition, although the description is omitted here, the background of the range corresponding to the range of the rotation angle indicated by the information about the defective part such as the first distance information and the graph of the rotation angle shown in FIG. 9 is set as the background color that is different from other things The graph may be displayed on a monitor or the like. In addition, at this time, it is preferable to use different background colors for chipping and burr. In addition, a value indicating the size of the defective portion may be displayed in the range of each rotation angle.

When the workpiece transport device 2 receives information indicating that there was an abnormality in the output unit 104 of the workpiece processing device 1 , it lifts the wafer 10 placed on the turntable 52 of the edge position detector 102 . The wafer 10 is accommodated in the container 5 by lifting it up and moving it to the point of the recovery container 5 . Through this, the wafer 10 determined to be abnormal can be recovered from the container 5 without returning to a post-processing process.

Here, it is assumed that the defect detecting means 1037 does not detect 1 or more defective parts and has not acquired information about the defective parts.

The output unit 104 determines that the defect detection means 1037 does not detect one or more defective parts, and does not output an abnormality.

And the output unit 104 outputs the correction information acquired by the correction information obtaining means 1033 to the edge position detector 102 .

In addition, the output unit 104 outputs information indicating the notch detected by the notch detection means 1036 to the edge position detector 102 . For example, the output unit 104 outputs an information indicating the place additional orientation flat provided to θ in the range _{4400 3800} θ of the rotation angle a cut-out portion detection means (1036) is detected.

When the edge position detector 102 receives the correction information from the output unit 104, it moves the turntable 52 in the horizontal direction according to the correction information, so that the center of the wafer 10 is moved. The wafer 10 is moved so as to be positioned at the center of rotation of the wafer 10).

Further, when the edge position detector 102 receives the information indicating the cutout, it moves or rotates the turntable 52 in the horizontal direction so that the cutout faces a predetermined direction.

The work transport apparatus 2 lifts the wafer 10 whose arrangement or orientation has been changed by moving the turntable 52 from the turntable 52 , and transfers and places it on a mounting table 6 , which is a next mounting destination.

In this way, by transferring the wafer 10 having the position and orientation corrected by the correction information and the information indicating the notch portion to the workpiece transport device 2, the workpiece transport device 2 moves the wafer 10 to an appropriate position and in an appropriate direction. and can be placed on the mounting table 6 which is the next transport destination. As a result, the position of the wafer 10 can be determined for a wafer having no defective portion.

In addition, here, the edge position detector 102 changes the position or orientation of the wafer 10, but the output unit 104 transmits correction information and information indicating the cutout to the workpiece conveying apparatus 2, The work transport device 2 may change the position or direction of the wafer 10 .

In addition, the output unit 104 may output the information indicating the notch and the information regarding the defective part detected by the defect detecting means 1037 to a monitor (not shown) or the like.

16 : is a figure which shows the output example of the information which shows the cutout part by the output part 104, and the information regarding a defective part.

By the output of this output unit 104, for example, the user can easily know where the orientation flat part is on the edge of the wafer W001 or where there is any defect. In addition, when information indicating the position or type of the orientation flat part or the position or type of the defective part is output to another device (not shown), the other device can perform processing in consideration of the position of the orientation flat part and the defective part, for example. do.

Here, as a result of processing one wafer 10 transferred to the mounting table 6 by the workpiece transfer system 1000 , cracks resulting from chipping of the edge 11 of the wafer 10 are formed on the wafer 10 . is said to have occurred in It is considered that there was a defective portion that could not be detected by the defect detection process of the work processing apparatus 1 . Therefore, for example, it is assumed that the user has input evaluation-related information including information indicating that there is a defect portion that cannot be detected in the current defect detection process to the evaluation-related information receiving unit 105 .

When the evaluation-related information receiving unit 105 receives the evaluation-related information including information indicating that there is a defective part that has not been detected, the setting unit 106 may detect a defective part smaller than a threshold value used for defect detection. get the threshold. _{Specifically, a threshold value obtained by changing the value of the second threshold value T H2} used for detecting the defective part to a value smaller than the current value by a predetermined value is obtained. For example, a value obtained by subtracting a predetermined value from the value of the current second threshold T _{H2 is obtained as a new second threshold value.} It is preferable that the value to be subtracted here is made extremely small. In addition, it is preferable that the magnitude of the second threshold after subtraction does not become zero or less.

Then, the setting unit 106 updates the second threshold value used by the defect detection means 1037 from the acquired new second threshold value.

Through this, by feeding back the detection result of the defective portion, it is possible to detect a finer defective portion than in the case where the threshold value before updating is used, and the leakage of defect detection can be reduced.

(Modification 1)

Hereinafter, an example of a case in which the setting unit 106 obtains a threshold value when detecting a defective part using machine learning in the above specific example will be described.

Here, for example, it is assumed that the transport destination of the work transport system 1000 is a CVD apparatus (not shown) and the mounting table 6 is a mounting table of the CVD apparatus.

The evaluation-related information receiving unit 105 calculates the second threshold value used when detecting the defective portion on the wafer 10, and the processing temperature and processing time of the processing performed by the CVD apparatus that is the transfer destination of the wafer 10 to the workpiece. A plurality of evaluation-related information associated with error correction information indicating whether or not the detection result of the defective portion by the apparatus 1 is correct is received, and is accumulated in a storage unit (not shown).

The setting unit 106 sequentially learns the second threshold value, processing temperature, processing time, and error correction information included in the received plurality of evaluation-related information as teacher data.

And when the user uses the same CVD apparatus to process one wafer 10 under one processing condition, in order to obtain a threshold that can detect a defective portion that causes a problem such as cracking during processing, A plurality of pairs each corresponding to the processing temperature and processing time of the processing conditions and a plurality of values that are candidates for the second threshold are respectively input to the learning result, and the defective part is detected at the second threshold included in each pair. A judgment result of whether the detection result of the case is correct is obtained. Through this, with respect to the inputted combination of the processing temperature, processing time, and the second threshold, it may be determined whether it is appropriate to perform defect detection using the second threshold. The plurality of values as candidates for the second threshold are, for example, a plurality of values with a predetermined value therebetween. The plurality of values as candidates for the second threshold are, for example, a plurality of values around the second threshold used for default.

Then, one of the second threshold values corresponding to the judgment result determined to be correct, for example, the one having the largest value is acquired. Then, the second threshold value is set as a second threshold value used by the defect detection means 1037 for defect detection.

For this reason, using the learning results, it is possible to appropriately detect the wafer 10 having the defective portion that becomes a problem in the CVD process of the post-stroke, while the wafer 10 having the irregularities on the edge that is not a problem in the post-stroke ) can obtain a second threshold that can prevent detection. As a result, for example, it is possible to precisely select the wafer 10 .

As mentioned above, according to this embodiment, when the position and direction of the workpiece are aligned during transport of the workpiece, the workpiece edge defect portion can be detected, and the workpiece defect detection can be performed appropriately.

In addition, according to the present embodiment, continuous combined distance information with a small change is detected from the combined distance information obtained by synthesizing a plurality of first distance information having different rotation angles by 90 degrees, and one of the detected combined distance information is synthesized. Using the first distance information of the composite circle corresponding to the distance information, the first distance information obtained from the part with few irregularities of the edge of the work is obtained by obtaining correction information for moving the rotation center of the work to the center of the work. Accurate correction information can be properly obtained by using

In addition, according to the present embodiment, a relational expression indicating a relationship between a rotation angle and a distance to an edge when a work is circular without irregularities is obtained using the correction information, and second distance information obtained from the obtained relational expression The unevenness of the edge of the work may be appropriately represented by obtaining information indicating the cutout portion of the work or information regarding the defective portion of the work by using the difference between the ? and the first distance information. For example, the position of the cut-out portion of the work can be appropriately indicated. In addition, the position and type of the workpiece edge defect portion can be appropriately indicated.

In the present application, like the work processing apparatus 5 shown in FIG. 25 , in the work processing apparatus described in the above embodiment, the first rotation distance information storage unit 101 , the synthesis unit 1031 , the synthesis processing unit ( 1032), correction information obtaining means 1033, second distance information obtaining means 1034, calculation means 1035, notch detection means 1036, and defect detection means 1037 are omitted appropriately, Furthermore, correction information output means 1038 for outputting the correction information obtained by the correction information obtaining means 1033, information about the difference between the first distance information and the second distance information obtained by the calculating means 1035, and a defect A distance difference related output means 1039 for outputting information about the defective part detected by the detection means 1037 is provided, and the second distance information obtaining means 1034 is corrected information outputted by the correction information output means 1038 may be used to obtain the second distance information.

The correction information output means 1038 outputs the correction information obtained by the correction information acquisition means 1033 . The output here is, for example, transferred to an external device such as an aligner (not shown) of the work, delivered to an internal processing means, etc., accumulated on a recording medium, displayed on a monitor (not shown), and other processing devices. It is a concept that includes delivery of processing results, etc., of other programs, etc.

For example, the correction information output means 1038 may provide an interface for outputting the correction information acquired by the correction information acquiring means 1033 to the second distance information acquiring means 1034 or the like or the correction information to the second distance information acquiring means ( 1034) is a means for temporarily storing in a storage medium such as a memory (not shown) that can be accessed. For example, the second distance information obtaining unit 1034 receives the correction information output by the correction information output unit 1038, and acquires the second distance information by using the received correction information. In addition, the second distance information obtaining means 1034 reads the correction information accumulated in the storage medium by the second distance information obtaining means 1034, for example, and uses the read out correction information to obtain second distance information do.

The distance difference related output means 1039 outputs information about the distance difference information corresponding to the same rotation angle calculated by the calculation means 1035 . The information about the difference may be, for example, distance difference information and information including itself, a rotation angle corresponding to one or more distance difference information, or a combination of distance difference information and rotation angle. For example, the output unit 104 may accumulate the information having the distance difference information and the rotation angle in correspondence with the distance difference information and the rotation angle in a storage unit (not shown), and output a graph indicating the relationship between the distance difference information and the rotation angle, for example, For example, you may indicate 　.

The information on the distance difference information is a concept that also includes information obtained by using the distance difference information. For example, the distance difference related output means 1039 relates to the difference calculated by the calculation means 1035 information indicating the cutouts of the workpiece 10 obtained by the cutout detection means 1036 using the distance difference information. You may output it as information. By outputting the information indicating the cutout, the user and other devices can recognize in which part of the work 10 the cutout exists. The distance difference related output means 1039 is an output of information indicating the cutout, for example, in a graph representing the relationship between the distance difference information and the rotation angle, the portion corresponding to the rotation angle indicating the cutout is different from the others , for example, the background of the range corresponding to the rotation angle indicating the cut-out portion of the graph may be displayed in a color or pattern different from the others.

In addition, the distance difference related output means 1039 calculates the information on the defective part obtained by the defect detection means 1037 by using the distance difference information calculated by the calculation means 1035 , the calculating means 1035 calculates the information about the defective part. You may make it output as information about one distance difference information. Since the information indicating the defective part is information having the position (eg, rotation angle) of the defective part and the distance difference information at that position, the user and other devices can determine which part of the work 10 and what size the defective part is. etc. can be recognized. If the information indicating the defective portion further has information indicating whether the defective portion is convex to the outside of the wafer 10, it is also possible to recognize whether the defective portion is a burr or chipping. The distance difference related output means 1039 outputs the information indicating the defective part, for example, on a graph indicating the relationship between the distance difference information and the rotation angle, the part corresponding to the rotation angle indicating the defective part in the case of the notch and Similarly, it may be displayed in an aspect different from the others.

In the work processing apparatus 5, for example, the difference between the distance from the rotation center to the edge and the distance to the actual edge in the case of having an ideal edge with respect to the work may be obtained and outputted, and the work (for example, , wafer) can be accurately represented. For this reason, for example, by the output of the distance difference related output means 1039, the position of the cutout part of 　work can be indicated appropriately. In addition, by obtaining and outputting the defect information, it is possible to indicate appropriate information regarding the edge defect portion of the work. For example, the location or type of the defective part can be appropriately indicated.

In addition, said work processing apparatus 5 is a workpiece processing apparatus as follows, for example. That is, a plurality of first rotation distance information, which is information having a rotation angle when the workpiece is rotated, and first distance information that is distance information from the rotation center to the edge of one workpiece corresponding to the rotation angle 　 corresponding to the rotation angle, is stored. A first rotation distance information storage unit, a synthesizing means for synthesizing a plurality of first distance information having corresponding rotation angles different by 90 degrees from among the first distance information included in the plurality of first rotation distance information, the synthesizing means includes a first A plurality of pieces of combined distance information in which a corresponding rotation angle is continuous from a plurality of pieces of combined distance information that is information obtained by synthesizing distance information, and a plurality of pieces of combined distance information having a small change in value size are detected and detected. synthesis processing means for obtaining a plurality of pieces of first distance information before synthesis corresponding to at least one of the one or more pieces of first distance information before synthesis and a rotation angle corresponding to the first distance information before synthesis, a plurality of pieces of first distance information obtained by the synthesis processing means and rotation Correction information obtaining means for obtaining correction information for aligning the rotational center of the work with the center of the work by using an angle, correction information outputting means for outputting the correction information obtained by the correction information obtaining means, the correction information outputting means Using this outputted correction information, a relational expression representing the relationship between the rotation angle when the workpiece has a circular shape without irregularities on the edge and the second distance information, which is information about the distance to the edge of the workpiece according to the rotation angle, is obtained and 　 a second distance information obtaining means for obtaining second distance information by substituting a plurality of rotation angles corresponding to the plurality of first rotation distance information into the obtained relational expression, the plurality of first rotation distance information and the Calculation means for obtaining a difference between the first distance information and the second distance information corresponding to the same rotation angle using a plurality of second distance information obtained by the second distance information obtaining means, and It is a work processing apparatus provided with the distance difference related output means for outputting information about the difference.

Further, in the work processing apparatus, the defect detecting means uses the difference between the first distance information and the second distance information calculated by the calculation means and one or more thresholds relating to the size of the defective portion, the edge defect portion of the work is a work processing apparatus that detects and acquires information on the detected defective part.

Further, in the above-described work processing apparatus 5 , the second distance information obtaining means 1034 , the calculating means 1035 , the notch detection means 1036 , the defect detecting means 1037 , and the distance difference related output means 1039 ) It is okay to omit 　 more. The work processing apparatus that can be obtained through this is, for example, an apparatus for obtaining correction information of the work.

With this configuration, by synthesizing the distance information of the edges with different rotation angles by 90 degrees, the distance information of the irregular portion of the edge is obtained from the information from which the fluctuation of the distance information of the edge caused by the rotation center is different from the center of the wafer is deleted, , since it is possible to obtain correction information for aligning the rotational center of the work with the center of the work, there is an effect of obtaining precise correction information.

For this reason, for example, an apparatus (not shown) for aligning the work using the correction information can properly correct the position of the work so that the rotation center of the work becomes the center of the work.

In addition, this work processing apparatus is the following work processing apparatus, for example. That is, a plurality of first rotation distance information that is information having a rotation angle when the workpiece is rotated and the first distance information that is distance information from the rotation center to the edge of the workpiece corresponding to the rotation angle corresponding to the rotation angle is stored. A rotation distance information storage unit, a synthesizing unit for synthesizing a plurality of first distance information having corresponding rotation angles different by 90 degrees from among the first distance information included in the plurality of first rotation distance information, wherein the synthesizing unit includes the first distance information A plurality of pieces of combined distance information in which a corresponding rotation angle is continuous from a plurality of pieces of combined distance information, which is information obtained by synthesizing , is detected, and a plurality of pieces of combined distance information with a small change in value size are detected, and among the detected pieces of combined distance information Combination processing means for obtaining a plurality of pieces of first distance information before synthesis corresponding to one or more and a rotation angle corresponding to one or more pieces of first distance information before synthesis, the plurality of first distance information and rotation angles obtained by the synthesis processing means A work processing apparatus comprising: correction information obtaining means for obtaining correction information for aligning the rotational center of the work with the center of the work by using, and correction information outputting means for outputting the correction information obtained by the correction information obtaining means to be.

In Embodiment 2 of the present invention, an image obtained by imaging the work edge defect portion in Embodiment 1 is output.

Fig. 17 is a block diagram of the work processing apparatus 3 of the present embodiment.

The work processing apparatus 3 includes a first rotation distance information storage unit 101 , an acquisition unit 103 , an output unit 104 , an evaluation-related information receiving unit 105 , a setting unit 106 , and an edge position detector 301 . , an imaging unit 303 , a corrected defect position obtaining unit 304 , an image output unit 305 , a detection unit 306 , an evaluation unit 307 , an evaluation result output unit 308 , a situation receiving unit 309 , an image situation An information storage unit 310 and an image condition information storage unit 311 are provided. The edge position detector 301 has a moving part 302 .

The acquiring unit 103 includes, for example, a synthesizing means 1031 , a synthesizing processing means 1032 , a correction information acquiring means 1033 , a second distance information acquiring means 1034 , a calculating means 1035 , and a notch detection means. (1036), a defect detection means (1037) is provided.

The first rotation distance information storage unit 101 , the obtaining unit 103 , the output unit 104 , the evaluation-related information receiving unit 105 , and the synthesizing means 1031 constituting the setting unit 106 or the obtaining unit 103 . ), composition processing means 1032, correction information obtaining means 1033, second distance information obtaining means 1034, calculation means 1035, notch detection means 1036, defect detection means 1037, etc. and operations are the same as those of the first embodiment, and detailed descriptions thereof are omitted herein.

18 : is a perspective view (FIG. 18(a)) which shows an example of the workpiece processing apparatus 3 of an Example, and schematic (FIG. 18(b)) which shows an example of the edge position detector 301 in this Example. The work processing device 3 is a stand for placing the work 10 . The mounting table 3021 and the imaging part 303 for imaging the edge defect part of the workpiece|work 10 mounted on the mounting table 3021 are provided. An edge detection unit 55 is provided inside the cover 3025 .

The edge position detector 301 acquires a plurality of pieces of first rotation distance information with respect to the work 10 . Specifically, the edge position detector 301 detects the edge position of the work 10 to obtain a plurality of first rotation distance information for the work 10, and accumulates in the first rotation distance information storage unit 101 .

The edge position detector 301 is provided with the edge detection part 55 which detects the edge position of the workpiece|work 10, the moving part 302, the encoder 56, and the accumulation|storage part 57, for example. The edge detection unit 55 has a light projector 55a and a sensor 55b. The configuration, processing, and the like of the edge detection unit 55, the encoder 56, and the accumulation unit 57 are the same as those of the edge position detector 102 shown in FIG. 3, and thus description thereof will be omitted.

The moving unit 302 moves the work 10 . The moving part 302 moves the workpiece|work 10 mounted on the mounting table 3021, for example. The movement of the workpiece|work 10 by the moving part 302 is the movement which rotates the workpiece|work 10, or the movement which moves the workpiece|work 10 in parallel, for example. Moving the work 10 in parallel means moving the work 10 in a plane including the surface of the work 10, for example.

The moving unit 302 rotates the work 10 . The moving part 302 has the rotating mechanism 3022 which rotates the mounting table 3021 about the central axis to a rotating shaft, for example. And for example, the workpiece 10 mounted on the mounting table 3021 is rotated by rotating the mounting table 3021 by the rotating mechanism 3022 so that the mounting surface may be located on the same plane. The rotating mechanism 3022 includes an electric motor (not shown) that transmits rotation to the mounting table 3021 . On the upper surface of the mounting table 3021 on which the work 10 is placed, for example, a so-called adsorption base (not shown) having a suction surface for adsorbing the placed work 10 is provided. The encoder 56 detects the rotation amount of the electric motor (not shown) of the rotation mechanism 3022 corresponding to the rotation angle of the work 10, for example, and outputs a digital signal.

The edge position detector 301 acquires, for example, a measured value indicating the edge position whenever the moving unit 302 rotates the workpiece 10 by a predetermined rotation angle. Then, using the rotation angle and the measured value, first distance information and the rotation angle are sequentially acquired. The measured value indicating the edge position is, for example, a measured value of the distance from the rotation center of the work 10 to the edge. The edge position detector 301, for example, when acquiring the first rotation distance information with respect to another work, a plurality of first rotation distance information obtained for each work 　 corresponding to the work identifier of each work, the first rotation It is stored in the distance information storage unit 101 .

The moving part 302 has a structure which moves the workpiece|work 10 mounted on the mounting table 3021 in the direction parallel to the surface of the workpiece|work 10 further. Parallelism here is a concept that includes almost parallelism. The direction parallel to the surface of the work 10 may be considered as a direction parallel to the mounting table of the mounting table 3021 on which the work 10 is placed. The moving part 302 moves the workpiece|work 10 in a horizontal direction, for example. For example, the moving part 302 has a structure which moves the workpiece|work 10 in the two-axis direction parallel to and perpendicular to the surface of the workpiece|work 10, respectively. The moving part 302 moves the workpiece|work 10 in parallel by the combination of the movement in each direction of these two axes, for example. Here, the two axes are referred to as the x-axis direction and the y-axis direction for convenience. Specifically, the moving unit 302 includes an x-axis moving mechanism 3023 for moving the rotating mechanism 3022 in the x-axis direction and a y-axis moving mechanism 3024 for moving the x-axis moving mechanism 3023 in the y-axis direction. is provided For example, the x-axis moving mechanism 3023 and the y-axis moving mechanism 3024 are configured by a combination of a ball screw and an electric motor installed to extend in the x-axis direction and the y-axis direction, respectively. However, the structure for moving the workpiece|work 10 mounted on the mounting table 3021 by the moving part 302 in the direction parallel to the surface of the workpiece|work 10, etc. is not questionable.

The moving unit 302 uses, for example, information such as correction information for aligning the work 10 output by the output unit 104 described in the first embodiment, a position in which the center of the work 10 is designated in advance. Move the work 10 so as to be located in The moving unit 302 is, for example, a movement of moving the mounting table 3021 on which the work 10 is placed in a direction parallel to the mounting surface of the mounting table 3021 and a movement of rotating the mounting table 3021. By appropriately combining, the work 10 is moved as described above.

The moving unit 302 uses the information on the edge defective portion of the work 10 output by the output unit 104 to move the work 10 so that the edge defective portion of the work 10 is placed in the imaging area. make it The imaging area is a previously designated area, specifically, an area in which the imaging unit 303 can image. The imaging area may be regarded as a range in which the imaging unit 303 can image. It is preferable that the moving part 302 moves the workpiece 10 so that the edge defect part of the workpiece 10 is located in a predetermined position in the imaging area, for example, in the center or the like.

For example, the moving unit 302 uses information indicating the position of the defective portion, which is information regarding the defective portion of the edge, for example, information indicating the angle of the defective portion with respect to the rotation center of the work 10, etc. , moves the work 10 so that the position of the defective part is located within the imaging area. The movement here is at least one of a movement for rotating the work 10 (hereinafter referred to as rotational movement) and a movement for moving the work 10 parallel to the surface of the work 10 (hereinafter referred to as parallel movement). It is a combination of more than

Hereinafter, the process in which the moving part 302 moves the position of a defect part in an imaging area is given and demonstrated as an example.

[1] When moving the center of the work so that it is placed in a pre-specified position

The moving part 302 moves the workpiece|work 10 so that the center of the workpiece|work 10 is arrange|positioned at a predetermined position, for example, and the edge defect part of the workpiece|work 10 is arrange|positioned in an imaging area, for example. The predetermined position is, for example, a position where the center of the work 10 is to be placed or a position as a reference when aligning the work 10, and for a specific example, the work conveying apparatus 2 described in Embodiment 1 above It is a position at which the center of the work 10 is disposed when delivering the work 10 to the back. The work 10 is, for example, by the work conveying device 2 or the like in a situation where the center of rotation of the mounting table 3021 of the moving unit 302 is arranged at this predetermined position, the mounting table 3021 . witty above. The moving part 302 moves the workpiece|work 10 to the position as mentioned above by combining a rotational movement and a parallel movement suitably, for example.

The moving unit 302 moves as described above using, for example, information for aligning the work 10 output by the output unit 104 and information about a defective part. For example, the moving unit 302 includes correction information for aligning the rotation center of the work 10 output by the output unit 104 to the center of the work 10 and a rotation angle indicating an edge defect portion of the work 10 . Using information (for example, angle information indicating the range of the defective portion), the center of the work 10 is placed at a predetermined position, and the edge defect portion of the work 10 is placed within the imaging area ( 10) is moved.

Fig. 19 is a view showing a situation before rotating the work 10 (Fig. 19(a)) and a view after rotating (Fig. 19(a)) for explaining an example of processing for moving a defective portion of the work 10 into the imaging area (Fig. 19(a)) 19(b)). In the drawings, the same reference numerals as in FIG. 2 indicate the same or corresponding parts.

In the drawing, the xy coordinate is a coordinate system preset with respect to the edge position detector 301 of the work processing apparatus 3 , and the origin O is a position at which the center of the work 10 is to be arranged. The rotational center of the mounting table 3021 on which the work 10 is placed is assumed to be in a position coincident with the origin O when the work 10 is placed, for example. When the work 10 is placed, the center Q of the work 10 is not located at the origin O, and the work 10 rotates at the position of the origin O as the rotation center. It is assumed that the center of the work 10 is arranged at a position separated by a distance h in the direction of the angle α from the origin.

The point P ₁ is a point, for example, the center point, of the imaging area AP ₁ , a position of a predetermined rotation angle with respect to the origin O, and a distance equal to the radius of the workpiece 10. It is set. Due to this, when the center of the work 10 is arranged at the origin (O), the point (P ₁ ) is located on the edge of the work (10).

In addition, in FIG. 19, in the positive range of the x-axis, the position of the line segment connecting the position where the edge of the work 10 intersects the x-axis and the rotation center O of the work 10, which is the origin, is a rotation angle of 0°. It is a position, and the rotation angle is assumed to increase in the counterclockwise direction.

Hereinafter, a specific example will be described with reference to FIG. 19 . In the situation shown in Fig. 19 (a), the moving unit 302 is a reference of the angle α for aligning the rotation center of the work 10 indicating the correction information described in the first embodiment to the center of the work 10. An angle θt formed by a line (here, y-axis) perpendicular to a line (here, x-axis) and a line connecting both ends of one defective part 1901 to be moved into the imaging area is obtained. This angle [theta]t may be regarded as an angle of deviation. For example, by using the information such as the radius of the work 10 and the rotation angle of the both ends (A, B) of the defective portion 1901 stored in advance in a storage unit (not shown), both ends ( Since the coordinates of A and B can be calculated, the angle θt can be calculated using the coordinates of both ends A and B. This angle θt is a line (for example, a line connecting the midpoint M on the line connecting both ends A and B of the defective part 1901 and the line QM connecting the center of the work 10) as the reference For example, it corresponds to the angle formed with the x-axis).

Next, when the midpoint M on the line connecting both ends of the defective portion 1901 and the line QM connecting the center of the work 10 are parallel to the line OP1, the rest of the work 10 is Horizontal direction, 　 For example, by moving in the x-axis direction and the y-axis direction, the midpoint (M) on the line connecting both ends of the defective part 1901 and the line (QM) connecting the center of the work 10 are connected to the line segment ( OP1) and 　 may overlap. Due to this, 　 the work 10 is rotated so that the midpoint M on the line connecting both ends of the defective portion 1901 and the line QM connecting the center of the work 10 are parallel to the line segment OP1. A rotation angle γ for rotating around the origin O is calculated. This rotation angle γ is, for example, the angle β formed by the straight line OP1 connecting the center point P1 and the origin O of the imaging region with the reference line (eg, the x-axis). Then, it becomes β-θt.

By rotating the workpiece 10 around the origin O by this rotation angle γ, the midpoint M on the line connecting both ends of the defective portion 1901 as shown in Fig. 19(b). A line QM connecting the center of the and the work 10 is parallel to the line segment OP1.

At this time, the center Q of the work 10 becomes a position separated by a distance h in the direction of the angle (α+γ) with respect to the origin O as the work 10 rotates γ. Therefore, by moving the work 10 so that the center Q of the work 10 overlaps the origin O, that is, by moving the work 10 by a distance h in the opposite direction of the angle (α+γ) , the line segment QM moves in parallel so that the center Q overlaps the origin O, overlaps the line segment OP1, and the midpoint M of the defective portion 1901 is disposed in the imaging area AP1. In addition, here, the midpoint M of the defective part 1901 is located on a straight line connecting the origin O, which is the position where the center point P1 of the imaging area AP1 and the center of the workpiece 10 are to be arranged .

Therefore, as described above, for each defective portion to be imaged, information indicating the defective portion and information indicating the position of the imaging area AP1 (for example, information indicating the central point P1, etc.) Calculate the angle θt formed by the midpoint of the line segment connecting both ends of the part with respect to the line orthogonal to the line serving as the standard of the angle, and use this angle θt to rotate the work 10 as the center of rotation The work ( ) at which the angle (γ) is rotated using the angle (α) indicating the movement direction for moving the work 10 to the center of the rotation center of the work 10 indicated by the correction information is calculated. 10) Calculates an angle (α+γ) indicating a moving direction for moving the center of the pole to a predetermined position. And in imaging each defective part, each defective part is rotated at a rotation angle γ in the initial state in which the workpiece 10 is placed on the mounting table 3021, and the direction opposite to the direction indicated by the angle α+γ. moves in the horizontal direction as much as the movement amount (h) indicated by the correction information.

Due to this, the center of the workpiece 10 can be arranged at a predetermined position, and the defective portion 1901 can be arranged within the imaging area AP1.

In addition, since the defective part can be imaged in a situation where the center of the work 10 is arranged at a predetermined position, for example, when the work 10 has a circular shape or the like, the work 10 of the image obtained by imaging It is possible to align the edge positions of the s to almost the same position, and it is possible to provide an image that is easy to see and has high convenience when comparing a plurality of images.

In addition, the order of the said rotational movement and horizontal movement, etc. is not questionable.

In addition, the calculation formulas and the like used above are examples, and in the present invention, other calculation formulas and the like may be used as long as substantially similar values can be obtained. In addition, the angle used above may be appropriately modified and used according to the rotation direction of the work 10, the position at 0°, the setting of a reference line, etc., as long as a substantially similar value can be obtained.

In addition, the pre-specified straight line or line segment such as the x-axis may not necessarily be a straight line or line serving as a reference for the rotation angle α indicating a direction for moving the rotation center of the workpiece 10 to the center of the workpiece 10 . , 　 In this case, for example, the movement direction, movement distance, What is necessary is just to correct the rotation angle appropriately. In addition, the pre-designated position where the center of the work 10 is to be placed may not be a position where the rotation center of the work when the work 10 is placed on the moving unit 302 is located, even in this case, when it is placed The movement direction, movement distance, and rotation angle obtained when the workpiece 10 is moved according to the positional relationship between the position where the rotation center of the work 10 is placed and the previously designated position where the work 10 is placed may be appropriately corrected.

Note that, in the above processing, the direction of movement is mainly indicated by an angle or the like, but coordinates obtained from an angle, a movement amount, etc. may be used instead of the angle.

In addition, the above processing is an example, and if substantially the same rotation angle γ, the movement direction of the rotation center, etc. can be obtained, another method may be used in the present invention.

[2] When the workpiece is not moved in the horizontal direction

The moving part 302 may perform only rotational movement with respect to the workpiece|work 10 in the state mounted on the mounting table 3021 in order to obtain 1st rotation distance information, for example, and may move a defective part to an imaging area. Specifically, the moving unit 302 can properly place the defective portion in the imaging area by rotating the work 10 according to a rotation angle indicating the position of the defective portion output by the output unit 104 . For example, calculate the average angle of the angles indicating the positions of both ends of the defective part, and set the workpiece 10 so that this angle coincides with the angle indicating the direction of the center point of the imaging area with respect to the rotation center and a predetermined reference line. By rotating, the workpiece 10 can be moved so that the center of the defective part is located substantially at the center of the imaging area.

[3] When aligning the center of the workpiece with the axis of rotation of the mounting table that rotates the workpiece

For example, the moving unit 302 lifts the work 10 from the mounting table 3021 and then moves it in the horizontal direction, and lifts the work 10 again on the mounting table 3021. Lifting means (not shown) The work 10 is lifted from the mounting table 3021 by this lifting means using the correction information output from the output unit 104, and the correction information output from the output unit 104 is used. To move the center of the work 10 so as to overlap the rotation center of the mounting table 3021 for rotating the work 10, the work 10 is placed on the mounting table (3021). And, as described above, the defective portion may be rotated at the rotation angle γ using the angle θt indicating the position of the defective portion obtained from the defective portion, and the defective portion may be moved into the imaging area.

In addition, if the position of the workpiece|work 10 is movable on the mounting table 3021, you may use means other than the said lifting means.

In addition, in this embodiment, the case where the moving part 302 moves the workpiece|work 10 by the process of said [1] is taken as an example and demonstrated below.

When a plurality of defective portions exist at the edge of one work 10, the moving unit 302 may sequentially move each defective portion to the imaging area. For example, the moving part 302 moves the next defective part to the imaging area whenever the imaging by the imaging part 303 ends with respect to the defective part moved to the imaging area.

In addition, the moving part 302 may put together the some defect part located adjacently among the some defect part which exists in the edge of one work 10, and may move it to the same imaging area. The defective part located adjacently is, for example, a defective part located within a predetermined range, for example, is a defective part whose rotation angle indicating the position of the defective part is within a predetermined range. The predetermined range is, for example, a range less than or equal to the range that enters the imaging area at once of the edge of the workpiece 10 . For example, the moving part 302 may move the workpiece|work 10 so that the position which halves the position of the defect part at both ends among a plurality of defect parts located at the adjacent edge is located in the center of an imaging area. In this case, a plurality of adjacent defective portions may be regarded as a single defective portion, and a plurality of adjacent defective portions may be moved into the imaging area by using a rotation angle or the like indicating the positions of both ends. This process may be regarded as a process for grouping and moving adjacent defective parts.

The moving part 302 may be made to move only the one or more defect parts detected by the detection part 306 among the edge defect parts of the workpiece|work 10 to an imaging area. The defective portion detected by the detection unit 306 is one or more defective portions having a larger size than other defective portions of the edge of the work 10 . The processing of the detection unit 306 and the like will be described later.

In addition, when the imaging of one or more defective parts for one work 10 is finished, the moving unit 302 transfers, for example, the work 10 in an aligned state to the work conveying device 2 of the rear stage, etc. In order to be able to, using information for aligning the work 10 output by the output unit 104 or information for specifying the direction of the work 10, the center of the work 10 is as described above. It is arrange|positioned at a predetermined position, and you may make it move the workpiece|work 10 so that the direction of the workpiece|work 10 may become a predetermined direction.

In addition, when there is no defective part in one workpiece|work 10, the moving part 302 may make it not perform the process of moving the defective part as described above to the imaging area. For example, when the information about the defective part output by the output unit 104 indicates that the workpiece 10 has no defect, the process for moving the defective part to the imaging area as described above may not be performed.

Further, the moving unit 302 may appropriately perform operations similar to those of the turntable 52, the turntable rotating mechanism 53, the electric motor 54 and the like described in the first embodiment other than those described above.

The moving part 302 may have a structure, such as an MPU and memory for calculating information, such as a movement distance and a rotation angle. Processes and procedures for calculating the moving distance, rotation angle, etc. are generally implemented in software, and the software is recorded in a recording medium such as a ROM. However, it may be realized by hardware (dedicated circuit).

In addition, although the case where the moving part 302 comprises a part of the edge position detector 301 was mentioned as an example and demonstrated here, you may consider that the moving part 302 is not a part of the edge position detector 301 .

The imaging unit 303 images a defective portion of the work edge disposed in the imaging area. Imaging a defect part is imaging the inside of the imaging area in which the defect part was arrange|positioned, for example. The imaging unit 303 is a camera provided with an image sensor such as a CCD or CMOS. The imaging unit 303 is arranged such that, for example, it becomes a region including a part of the edge of the work 10 and its periphery in a situation in which the imaging region is arranged so that the center is arranged at a predetermined position. The imaging unit 303 is generally installed such that its optical axis is perpendicular to the surface of the work 10 . The installation position of the imaging unit 303 is preferably movable in the horizontal direction so that the imaging area is changed according to the size of the work 10 . The imaging unit 303 is provided in the work processing apparatus 3 with a jig or the like, for example. In this case, even if the moving unit 302 moves the work 10, the position of the imaging unit 303 is not moved.

The imaging unit 303 generally has an optical system for imaging the light of the imaging target on the light-receiving surface of the image sensor. Further, the imaging unit 303 may include a lighting device for illuminating the imaging area or its periphery, for example, a ring lighting or the like. It is preferable to use what can image the image of a defect part with high resolution as the imaging part 303. As an example of the imaging unit 303, for example, a CCD camera having a viewing angle of 3 mm and a number of pixels of 350,000 pixels or the like is used. It is also possible to use, for example, a civilian digital camera as the imaging unit 303 . The image picked up by the imaging unit 303 may be either a color image or a gray scale image. The chromaticity of the image, etc. is not relevant. The image captured by the imaging unit 303 is generally a still image, but may be a moving image. The imaging unit 303 may image with a fixed focus or may image with an automatic focus. The data format of the image acquired by the imaging unit 303, etc. is not limited. Moreover, you may use what is called a scanner etc. which scan and image a line sensor as the imaging part 303. As shown in FIG.

The imaging unit 303 images a defective part, for example, when the moving unit 302 moves one defective part or one pair of adjacent defective parts to the imaging area. However, a receiver (not shown) may be configured to capture an image according to an instruction of a receiving user or the like.

The imaging part 303 may make it image only the defect part which the detection part 306 mentioned later detected among the edge defect parts of the workpiece|work 10. For this reason, it is possible to selectively image only one or more defective portions having a size larger than that of other defective portions among the plurality of defective portions of the edge of the work 10 .

Further, the work processing apparatus 3 may include a plurality of imaging units 303 . For example, it is possible to provide a plurality of imaging units 303 having different imaging areas or partially overlapping imaging areas. The plurality of imaging units 303 are, for example, a plurality of imaging units each having an arrangement area along an edge of a work whose center is arranged at a predetermined position. The plurality of imaging units 303 may perform imaging or the like at the same time as substantially the same as one imaging unit, for example. In this way, it is possible to simultaneously image a plurality of pairs of defective portions existing in a wide range at the same time, and thus it is possible to shorten the moving time for imaging and imaging.

The correction defect position acquisition unit 304 includes information for aligning the work 10 output by the output unit 104 , information for specifying the direction of the work 10 , and the edge defect portion of the work 10 . Correction defect position information, which is information indicating the position of the defective part of the work, is obtained using the information, based on the center of the work 10 and the direction specified for the work. The corrected defect position information is, for example, the position information of the defect corrected on the basis of the direction in which the center of the work 10 is specified with respect to the work. The information for specifying the direction of the workpiece|work 10 is information which shows the position of the cutout part of the workpiece|work 10, such as an orientation flat surface, for example. The information indicating the position of the notch is, for example, information indicating the midpoint position of a line segment connecting both ends of the notch. Information indicating the position of the cutout is, for example, the rotation angle of the line segment connecting the center of the line connecting both ends of the cutout and the center of the work 10 . The corrected defect position information is, for example, information indicating the position of the edge defect of the work 10 on the basis of the position specified by the center of the work 10 and the position of the cutout. Specifically, the corrected defect position information includes a line segment connecting a point indicating the position of the cutout and the center of the work 10, a line connecting a point indicating an edge defect portion of the work 10, and the center of the work 10 is the angle formed. A point indicating the position of the cutout is, for example, a midpoint of a line segment connecting both ends of the cutout. The point indicating the position of the defective portion is, for example, the midpoint of the line segment connecting both ends of the defective portion.

To refer to the center of the work 10 and the direction specified for the work as a reference, even if the specified direction is set at a position corresponding to 0° as a reference of the rotation angle, any desired other than 0° A rotation angle may be set, or a direction specified along this direction may be set as a reference of the rotation angle or the like.

As described above with reference to FIG. 19, the line segment connecting the midpoint of both ends of the defective part and the center of the work 10 is formed by a straight line (eg, the y-axis of FIG. 19 ) orthogonal to a pre-specified straight line. The angle is the same as the angle formed by a straight line connecting both ends of the defective part with a predetermined straight line (eg, the x-axis of FIG. 19), and this angle can be obtained from information indicating the positions of both ends of the defective part. Therefore, by obtaining this angle with respect to each defective part, the rotation angle in the case of making the center of the workpiece|work 10 of the midpoint of the both ends of a defective part as a rotation center can be computed. The same rotation angle can also be calculated for the cutout using the position information of both ends of the cutout output by the output unit 104 or the like. And by subtracting the rotation angle of the notch from the rotation angle of each defective part calculated in this way, corrected defect position information that is the rotation angle of each defective part based on the line connecting the notch and the center of the work 10 can be obtained. can

In addition, the corrected defect position acquisition unit 304 is a straight line connecting the center of the defect portion and the center of the work 10 calculated when the moving unit 302 moves the work 10 when obtaining the corrected defect position information The rotation angle information and the like may be appropriately used. In this way, the information for aligning the work 10 output by the output unit 104, the information for specifying the direction of the work 10, and the information on the edge defect portion of the work 10 are directly used for correction Acquiring the defect location information, 　 The moving unit 302, etc., using the information obtained by using this information to obtain the corrected defect position information, 　 Here, the work 10 output by the output unit 104 is It is assumed that corrected defect position information is obtained using the information for aligning, the information for specifying the direction of the work 10, and the information about the edge defect portion of the work 10.

The image output unit 305 outputs the image captured by the imaging unit 303 . Output here is a concept including, for example, display on a monitor screen, projection using a projector, printing on a printer, transmission to an external device, storage on a recording medium, and delivery of processing results such as other processing devices or other programs.

The image output unit 305 outputs the image captured by the imaging unit 303 in correspondence with at least one of the identifier of the work 10 corresponding to the image and the identifier of the defective part, for example. The identifier of the work 10 may be a code individually assigned to the work 10, or an identifier indicating a lot of a work group consisting of a plurality of works including the work to be imaged (for example, code, etc.) and information indicating the order of the work to be imaged in the lot (for example, information such as the number of sheets) may be combined. The identifier of the defective part is a code such as a number assigned to the defective part. The identifier of the work 10 corresponding to the image is the identifier of the work 10 that is the object of capturing the image. In addition, the identifier of the defective part corresponding to an image is an identifier of one or more defective parts used as the imaging object of an image. The image output unit 305 may also output the corrected defect position information obtained by the corrected defect position acquisition unit 304 with respect to the defective part as the image capturing target in association with the image.

When the image output unit 305 displays an image, it is preferable to enlarge or reduce the displayed image, move the display range, etc. according to an instruction from a user who receives it through a receiver, etc. (not shown). By enabling magnification in this way, if the image picked up by the imaging unit 303 is high-resolution, the edge defect part can be enlarged and displayed, and the shape of the edge defect part which is difficult to confirm with the naked eye can be easily confirmed.

In addition, when an image is displayed, information indicating the proportion of the image, for example, a scale or a scale, may be displayed overlaid with the image. Through this, the size of the defective part can be easily identified. In addition, the position where information indicating the ratio of the image is displayed may be changed according to a user's instruction. In addition, the scale or scale is appropriately calculated according to the resolution of the imaging unit 303 or the distance from the imaging unit 303 to the workpiece 10, or a scale or scale designated in advance in a storage unit (not shown) according to the resolution or distance. You just have to get the back. The distance from the imaging unit 303 to the work 10 may be obtained using, for example, a distance measuring sensor (not shown).

The image output unit 305 may be regarded as including an output device such as a display, a printer, a communication means, and an accumulating means, or it may be regarded as not including it. The image output unit 305 may be realized by driver software of an output device or driver software of an output device and an output device or the like.

The detection unit 306 detects one or more defective portions having a large size among the edge defective portions of the work 10 by using the information about the edge defective portions of the work 10 output by the output unit 104 . One or more defective portions having a large size may be considered to be defective portions large enough to satisfy a predetermined condition for size.

The detection unit 306 detects one or more defective portions using, for example, information indicating the range of the rotation angle of the defective portion, which is information regarding the defective portion output by the output portion 104 . The detection unit 306 detects, for example, a defective portion in which the range of the rotation angle is equal to or greater than a threshold with respect to a predetermined rotation angle range as one or more defective portions in which the size of the defective portion is large. In addition, as one or more defective parts with a large size of the defective part, a predetermined number of defective parts may be detected in order from the largest in the range of the rotation angle in the defective part of one workpiece 10 .

In addition, the detection unit 306 detects one or more defective portions using, for example, information about distance difference information, which is information about the defective portion output by the output unit 104 . The detection unit 306 detects, for example, a defective portion in which the maximum value of distance difference information previously associated with the defective portion is equal to or greater than a threshold as one or more defective portions having a large size of the defective portion. In addition, as one or more defective parts with a large size of the defective part, a predetermined number of defective parts may be detected in order from the largest value of the distance difference information associated with the defective part of one work 10 . The distance difference information corresponding to the defective portion may be regarded as information indicating the depth or height of the defective portion.

In addition, the detection unit 306 may detect one or more defective portions having a large size according to a combination of the information indicating the range of the rotation angle and the information on the distance difference information. For example, you may detect the defect part whose rotation angle range is more than a threshold value, and the value of distance difference information is more than a threshold value. In addition, the defect portion in which both the order of magnitude of the rotation angle range and the order of magnitude of distance difference information are within a predetermined order may be detected.

In addition, the detection part 306 may detect the defective part which satisfy|fills the conditions other than the above as one or more defective parts whose size of a defective part is large.

The evaluation unit 307 uses the image output by the image output unit 305 to evaluate the defective portion indicated by the image. Evaluating a defective part means evaluating the influence of a defective part on the workpiece|work 10, for example. For example, when the workpiece 10 in which the defective part has been detected is used in subsequent strokes, it is evaluated whether the defective part affects the workpiece 10 or what kind of influence it has. The evaluation of the defective portion may mean, for example, evaluating whether or not there is a high possibility that the work 10 having the defective portion due to the defective portion will be damaged such as a crack in a post-stroke or the like. Evaluating a defective part may evaluate whether the workpiece|work 10 is a workpiece|work with abnormality.

For example, the evaluation unit 307 evaluates the defective portion indicated by the image by pattern matching. For example, one or more evaluation pattern management information, which is information having an image pattern and an evaluation result for a defective part in association with each other, is stored in a storage unit (not shown) in advance. Then, it is determined whether the image output by the image output unit 305 matches the image pattern included in each evaluation pattern management information, and when the image matches, an evaluation result corresponding to the image pattern is obtained. The image pattern is, for example, characteristic point information of an image. The feature point of the image is information indicating, for example, the number of corners of the defective portion, the position of the corner, the width or depth of the defective portion, and the like. It is determined that an image having a feature point determined to coincide with the feature point indicated by the pattern of the image is an image matching the pattern of the image. The evaluation unit 307 may perform image processing such as binarization on the image output by the image output unit 305 before pattern matching.

In addition, since it is a well-known technique about the process of pattern matching performed on an image, detailed description is abbreviate|omitted here.

In addition, you may make the evaluation part 307 evaluate the defect part shown by an image by performing a similar search of an image, for example. For example, one or more evaluation image management information is stored in advance in a storage unit (not shown) or the like, which is information having an image for evaluation and an evaluation result for a defective part in association with each other. The image output unit 305 obtains a degree of similarity between the image outputted by the image output unit and each evaluation image, and when the similarity is equal to or greater than a predetermined threshold, the evaluation unit 307 obtains an evaluation result corresponding to the evaluation image. . The image for evaluation is one or more of the images imaged by the imaging part 303, for example. The image for evaluation may be a color image, a gray scale image, or a binarized image. The degree of similarity between images may be, for example, an average comparison of pixel values constituting the image, a histogram of pixel values, a comparison of the deviation width for each frequency calculated from the image, or the like, or a ratio of pixels that match between the binarized images.

In addition, the evaluation unit 307 may use other known similar image retrievals such as similar image retrieval using a mean square error as the image similarity retrieval.

In addition, since the similarity search performed with respect to an image, the process of acquiring the similarity between images, etc. are well-known techniques, detailed description is abbreviate|omitted here.

As the evaluation result, for example, any information may be sufficient as long as it is information indicating the evaluation result related to the defective part, for example, information indicating whether it is a defective part with a high probability of leading to damage to the workpiece 10, or the range of the occurrence rate of damage; For example, information indicating 50% or more may be used. In addition, information indicating what kind of abnormality occurs may be sufficient, or information indicating that the work 10 is damaged may be sufficient. Moreover, a combination of 2 or more of these may be sufficient.

In addition, the evaluation unit 307 may evaluate the defective portion indicated by the image output by the image output unit 305 using the image condition information stored in the image condition information storage unit 310 to be described later. For example, the defective part is evaluated using the information about the image of the defective part captured by the imaging unit 303 included in the image status information and the work status information about the work 10 indicated by the image included in the image status information. also good The work status information will be described later. The information about the image of the defective part included in the image status information may be the image of the defective part itself, or may be information of characteristic points acquired from the image of the defective part.

For example, when the information about the image of the defective part is the image of the defective part, the evaluation unit 307 uses the image included in the image status information for the image output by the image output unit 305 as described above. A similar search is performed, and work context information corresponding to an image judged to be similar in the image context information is acquired as an evaluation result. In this case, the image condition information may be regarded as the above-described evaluation image management information.

Further, for example, when the information about the image of the defective part is characteristic point information of the image of the defective part, the evaluation unit 307 determines the characteristic points of the image that the image situation information has with respect to the image output by the image output unit 305 . The pattern matching as described above is performed using the information of , and work context information corresponding to the feature point information determined to be matched in the image context information is acquired as an evaluation result. In this case, the image condition may be regarded as the above-described evaluation pattern management information.

In addition, the evaluation unit 307 performs machine learning using the image condition information accumulated in the image condition information storage unit 310 to be described later, and the image output unit 305 uses the result of the machine learning to perform machine learning. You may make it image evaluation. For example, one or two or more pairs of the feature points of the image and the work condition information for the defective part indicated by the image are learned, and the image output unit 305 outputs using the learning result. Work situation information corresponding to the feature points obtained from the image can be obtained as an evaluation result. In addition, since the structure and process of machine learning are the same as that of the said Embodiment 1, detailed description is abbreviate|omitted here.

The evaluation result output unit 308 outputs the evaluation result obtained by the evaluation unit 307 . The evaluation result output unit 308 may output the evaluation result in association with the work identifier, the defect part identifier, and corrected defect position information to which the evaluation target image of the evaluation result corresponds, for example.

Output here is a concept including, for example, display on a monitor screen, projection using a projector, printing on a printer, transfer to an external device, storage on a recording medium, and delivery of processing results to other processing devices and other programs.

The evaluation result output unit 308 may be regarded as including an output device such as a display, a printer, a communication means, or an accumulating means, or may be regarded as not included. The image output unit 305 may be realized by driver software of an output device or driver software of an output device and an output device or the like.

The condition receiving unit 309 is the condition after the imaging unit 303 has imaged the defective portion of the workpiece 10 on which the defective portion has been imaged, and the condition after performing one or two or more processes specified in advance on the work 10 . Receive work status information, which is information indicating For example, the context receiving unit 309 receives work context information from a user or the like.

The predetermined processing is, for example, processing performed on the work 10 . The predetermined processing is, for example, one or more processing constituting a semiconductor manufacturing process if the workpiece 10 is a semiconductor wafer.

The condition of the work 10 may be regarded as the state of the work 10, for example, whether an abnormality such as damage or the like has occurred in the work 10 or what kind of abnormality it is. What kind of abnormality means how it was damaged, for example, when the abnormality is broken, broken or cracked. The condition of the work 10 may be the condition of the work 10 resulting from a single defective portion present in the work 10 . The condition of the work 10 resulting from a single defective portion existing in the work 10 means that, for example, a crack is formed from the defective portion at a position corresponding to one defective portion of the work 10 .

The work condition information is information indicating the condition of the work 10 as described above. The work condition information is, for example, information indicating whether the work 10 was normal in the processing after imaging. Alternatively, it may be information indicating what kind of abnormality occurred in the work 10 by the processing after imaging. Further, the work condition information may be a value, an index, or the like for evaluating the work 10 on which the processing after imaging has been completed.

For example, the condition receiving unit 309 receives work condition information corresponding to the identifier of the work 10 or the identifier of the defective part. For example, when abnormality is detected with respect to one workpiece|work 10 in the post-imaging process, work status information is received with the identifier of this workpiece|work 10. As shown in FIG.

Here, the reception means, for example, reception from an input means, reception of an input signal transmitted from another device, reading of information such as a recording medium, and the like. Any input means for receiving the work status information may be used, such as a numeric keypad, a keyboard, a mouse, or a menu screen. The situation receiving unit 309 may be realized by a device driver of an input means such as a numeric keypad or a keyboard, control software of a menu screen, or the like.

The image condition information storage unit 310 stores image condition information, which is information about the image of the defective part output by the image output unit 305 and information having work condition information. The information about the image of the defective part is information obtained from an image used for pattern matching or similar search of an image, for example. The information about the image of the defective part may be, for example, the image of the defective part itself, or an image processed such as binarization with respect to the image of the defective part, may be feature point information obtained from the image of the defective part, or the defective part. Information obtained by performing predetermined processing such as filter processing on the image of In addition, the information regarding the image of a defective part may be information which has two or more of such information. The work context information stored in the image context information storage unit 310 is, for example, context information received by the context receiver 309 .

The image condition information accumulating unit 311 stores image condition information having the work condition information on the defective portion received by the condition receiving unit 309 and the information regarding the image of the defective part output by the image output unit 305 and the image condition information. It is accumulated in the storage unit 310 . For example, the image condition information storage unit 311 accumulates the image of the defective portion output by the image output unit 305 and image condition information having work condition information on the defective portion. Further, for example, the image condition information storage unit 311 acquires information about this image as described above from the image of the defective part output by the image output unit 305, and obtains information about the acquired image and Image status information having work status information for the defective part may be stored.

The work status information for the defective part may be the work status information for one defective part, or the work status information for the work having one defective part. The image status information accumulating unit 311 receives, for example, information specifying an image of one or more defective parts and one piece of work status information for a defective part indicated by these images, information about the image of this defective part. and the received work condition information are stored in the image condition information storage unit 310 in association with each other.

For example, when the status receiving unit 309 receives the work status information corresponding to the work identifier and the identifier of the defective part of the work, the image status information accumulating unit 311 is the defect output by the image outputting unit 305 . Corresponding with the work identifier matching this work identifier in the image of the part, and also having the image of one or more defective parts corresponding to the identifier of the defective part matching the identifier of the defective part and the received work status information are associated with each other. The image context information may be stored in the image context information storage unit 310 .

For example, when the status receiving unit 309 receives the work status information corresponding to the work identifier, the image status information accumulating unit 311 outputs the work ID in the image of the defective part output by the image output unit 305 and The image condition information storage unit 310 may store images of one or more defective parts corresponding to the corresponding work identifiers and image condition information associated with the received work condition information.

In addition, according to the work processing apparatus 3 of this embodiment and the work conveying apparatus 2 demonstrated in the said Example 1, you may comprise the work conveyance system. For example, the work conveying system is a work conveying system in which the work processing apparatus 3 is provided instead of the work processing apparatus 1 in the work conveying system 1000 of the first embodiment shown in FIG. 4 or the like.

Next, the operation of the work processing apparatus 3 of the present embodiment will be described with reference to the flowchart of FIG. The processing of the work processing apparatus 3 of this embodiment performs the same processing as that of the workpiece processing apparatus 1 of the first embodiment shown in Fig. 6, and at the same time, until returning from step S119 to step S100 of the processing shown in Fig. 6 As the processing of , the following processing shown in FIG. 20 is performed. Specifically, following step S119 of FIG. 6 , the processing of FIG. 20 is started, and when the processing of FIG. 20 is finished, the process returns to step S100 of FIG. 6 . In addition, description of the process shown in FIG. 6 is abbreviate|omitted here.

The moving unit 302 determines whether there is one or more defective portions at the edge of the work 10 in the information about the defective portion output by the output unit 104 (step S301). If there is, the process proceeds to step S302; otherwise, the process proceeds to step S314.

The detection unit 306 detects one or more defective portions having a large size among the defective portions (step S302). In addition, when there is only one defective part, you may abbreviate|omit this process. In addition, when a large defect part is not detected, you may make it go to step S314.

The moving unit 302 substitutes 1 for the counter k (step S303).

The moving unit 302 moves the center of the workpiece 10 to a predetermined position by using information indicating the position, such as the rotation angle of the k-th defective part, and also moves the k-th defective part to the imaging area. An angle for rotating the required workpiece 10 is obtained (step S304).

The moving unit 302 acquires the amount of movement in the horizontal direction of the work 10 necessary when moving the work 10 and the k-th defective part to the above position (step S305). The horizontal movement amount is information such as a distance, an angle, and a movement direction for moving the workpiece 10 in the horizontal direction, a movement distance in the x-axis direction, and a movement distance in the y-axis direction.

The moving unit 302 moves the workpiece 10 according to the rotation angle information obtained in steps S304 and S305 and the amount of movement in the horizontal direction, and moves the k-th defective part to the imaging area (step S306).

The imaging unit 303 images the k-th defective portion of the work 10 (step S307).

The corrected defect position acquisition unit 304 acquires corrected defect position information for the k-th defect portion (step S308). For example, a rotation angle in the case where the center of the workpiece 10 is a rotation center is obtained for the k-th defect part and the cut-out part, respectively, and the difference is acquired as correction defect position information.

The image output unit 305 outputs the image captured by the imaging unit 303 (step S309). For example, the image output unit 305 outputs the image in association with the identifier of the work 10 or the identifier of the k-th defect part, corrected defect position information for the k-th defect part obtained in step 308, and the like. For example, the image output unit 305 accumulates images in a storage unit (not shown). In addition, the image output unit 305 may display an image on a monitor or the like.

The evaluation unit 307 evaluates the k-th defect portion displayed in the image using the image accumulated in step S309 (step S310). For example, an image pattern matching the image of the k-th defective part is detected by pattern matching among the image patterns possessed by the image context information stored in the image context information storage unit 310, and corresponding to the detected pattern Work status information is acquired as an evaluation result.

The evaluation result output unit 308 outputs the evaluation result (step S311). For example, it is displayed on a monitor or the like.

The moving unit 302 increments the counter k value by 1 (step S312).

The moving unit 302 determines whether there is a k-th defective part (step S313). If there is, the flow returns to step S304, and if not, the flow proceeds to step S314.

The moving unit 302 obtains an angle for rotating the work 10 required when moving the center of the work 10 to a pre-specified position by moving the cut-out in a predetermined direction (step S314).

The moving unit 302 moves the cut-out in a predetermined direction to obtain a horizontal movement amount of the work 10 necessary when moving the center of the work 10 to a predetermined position (step S315).

The moving unit 302 moves the work 10 according to the rotation angle obtained in step S314 and the movement amount obtained in step S315 (step S316). This movement is, for example, a movement for aligning and delivering the work 10 to the work conveying apparatus 2 or the like. And the process ends. When this process is completed, it returns to step S100 of FIG.

Further, in the work processing apparatus 3 of the present embodiment, after it is judged that it is not the timing to set the threshold in step S122 of the flowchart shown in Fig. 6, the condition receiving unit 309 further confirms whether the work condition information has been received. When the work condition information is received, the image condition information accumulating unit 311 stores the received work condition information and the image condition information having information on the image of the defective part corresponding to the work condition information as the image condition information. It may be accumulated in the storage unit 310 and returned to step S100, and if not received, it may be returned to step S100.

In addition, in the flowchart shown in FIG. 20, after the moving part 302 moves the workpiece|work 10 in step S316, the workpiece|work 10 is carried out in the workpiece processing apparatus 3 according to the workpiece conveyance apparatus 2 etc., for example. transferred to another device, etc. In addition, although description is abbreviate|omitted here, when the workpiece|work conveying apparatus 2 places a workpiece|work on the mounting table 3021 of the moving part 302, etc., for example, the workpiece processing apparatus 3 is generally a so-called aligner. The first rotation distance information for the workpiece 10 may be acquired by rotating the workpiece 10 similarly to the work 10 , and may be accumulated in the first rotation distance information storage unit 101 .

Further, in Fig. 20, the processing such as step S310 or S311 or the processing in which the image output unit 305 outputs the image of the defective part, for example, 'displays, may be appropriately performed according to the instruction of the user or the like.

Further, in the flowchart shown in Fig. 20, the processing of steps S314 and S315 is performed immediately before step S301, and when it is determined in step S301 that there is no defective part, the process proceeds to step S316, and in step S313, the k-th defective part is performed. If it is determined that there is no , the process proceeds to step S316 and the work 10 may be moved using the information obtained in steps S314 and S315.

Next, a specific example of the work processing apparatus 3 of the present embodiment will be described. In addition, the case where the workpiece|work processing apparatus 3 and the workpiece|work conveyance apparatus 2 comprise a workpiece conveyance system is mentioned as an example here and it demonstrates. In addition, although this work processing apparatus 3 etc. can perform the same process as the specific example demonstrated in the said Embodiment 1, for example, detailed description of this process etc. is abbreviate|omitted here.

As in the specific example of the first embodiment, the work processing apparatus 3 collects correction information that is information for aligning the work with respect to one work 10, information about a defective part, and information for specifying the direction of the work. is obtained, and it is assumed that the output unit 104 outputs this information. It is assumed that the correction information output by the output unit 104 is a rotation angle α ₁ indicating a moving direction and a moving length h ₁ . In addition, the information on the defective part output by the output unit 104 is, for example, the maximum value of the size of the range of the rotation angle indicating the range of the defective part for a plurality of defective parts as shown in FIG. 16 . It is said that it was information having a pair of conifers, a length from the rotation center of the workpiece 10 to both ends of each defective part, and the like. In addition, it is assumed that the information for specifying the direction of the workpiece output by the output unit 104 is a range of rotation angles indicating a range of an orientation flat similar to that shown in FIG. 16 .

When the moving unit 302 receives the above information from the output unit 104 , it is first determined whether there is a defect in the work 10 . Here, since the information on the defective portion indicates that there is a defective portion, it is determined that there is a defective portion.

Since it was judged by the moving part 302 that there is a defective part in the workpiece|work 10, the detection part 306 detects the large-size defect part among these defective parts. Here, a defective portion in which the absolute value of the size of the defective portion is equal to or greater than a threshold is detected. Here, for example, it is assumed that the size of all defective portions is determined to be equal to or greater than the threshold.

The moving unit 302 places the midpoint of the line segment connecting both ends of the defective portion with respect to the first defective portion among the defective portions detected by the detecting unit 306 in the imaging range of the image capturing unit 303, and further, the workpiece 10 ) of the rotation angle of the rotational movement and the amount of movement of the horizontal movement for moving the workpiece 10 so that the center of the workpiece 10 is placed at the position to be placed when the workpiece 10 with a predetermined center is delivered to the workpiece transport device 2 Combinations are obtained as follows:

Specifically, the coordinates of both ends of the defective portion are obtained using information indicating the range of rotation angles indicating the range of the first defective portion or the length from the rotation center of the workpiece 10 to both ends of the defective portion, An angle formed by a line segment passing through both ends of this defective portion with respect to a line segment having a rotation angle of 90° is obtained. Here, a line segment having a rotation angle of 90° is a line segment having an angle of 90° _{with respect to a straight line representing 0° when the above rotation angle α 1} is obtained, and this angle corresponds to θt in FIG. 19 .

Next, the moving unit 302 reads the rotation angle indicating the central position in the imaging area stored in advance in a storage unit, etc., not shown, and the angle of rotation of the line segment passing through both ends of the defective part obtained at this angle is Subtract the angle made for a line segment of 90°. The angle obtained through this 　 is a rotation angle used when rotating the workpiece 10, and corresponds to the angle γ in FIG. 19 .

In addition, the moving unit 302 adds the angle formed by the line segment passing through both ends of the defective part obtained above to the _{rotation angle α 1 of the correction information with respect to the line having a rotation angle of 90° to the work 10} ) is obtained as a rotation angle when moving, and a length h ₁ with correction information is obtained as a movement distance of the work 10 . However, since the rotation angle obtained here is an angle indicating the movement direction for overlapping the rotation center of the work 10 on the center of the work 10, when moving the work 10, the opposite direction of the obtained rotation angle, that is, It shall be moved in the direction rotated by 180°.

The moving unit 302 rotates the work 10 around the rotation center of the work 10 by an angle indicated by the rotation angle obtained above, and the length (h _{1) in the opposite direction to the direction indicated by the rotation angle obtained above.} ) to move the work 10.

The imaging unit 303 images the first defective portion of the work 10 positioned in the imaging area through this movement.

Further, the correction defect position acquisition unit 304 performs the same processing as the above-described moving unit 302 using the rotation angle indicating the range of the orientation flat included in the correction information output by the output unit 104, and performs the orientation A line segment passing both ends of the first defective part obtained by the moving unit 302 in the above obtained by obtaining an angle formed by a straight line connecting both ends of the flat with respect to a line segment having a rotation angle of 90° is a line segment having a rotation angle of 90° ? is subtracted from the angle formed with respect to , and a value obtained by subtraction is obtained as corrected defect position information for the first defect part. This corrected defect position information is the rotation angle of the 1st defect part in the case where the rotation angle of the orientation flat in the case of making the center of the workpiece|work 10 a rotation center is set as a reference|standard, ie, 0 degree.

The image output unit 305 displays the image captured by the imaging unit 303 of the first defective portion captured by the identifier of the work 10 (eg, a code assigned to the work 10), the ID of the defective portion ( For example, the number of defective parts), correction defect position information, imaging date and time, depth (height) of the defective part output by the output unit 104 , and the range of the defective part output by the output unit 104 are length The width of the defective part, which is a value converted to , is matched and accumulated in a storage unit (not shown), and a captured image is matched with such information and displayed on a monitor (not shown).

Fig. 21 is an image management table in which the image output unit 305 manages the image of the defective portion accumulated. The image management table has 'image', 'work ID', 'defect ID', 'correction defect position', 'date', 'height', and 'width'. An 'image' is an image of a defective part, and the image file name is shown here. The 'work ID' is an identifier of the work. The 'defect ID' is an identifier of a defective part in the work 10, and it is assumed here that it is a number assigned to the defective parts detected by the detection unit 306 in ascending order from the smallest rotation angle. The 'correction defect position' is corrected defect position information obtained by the corrected defect position acquisition unit 304 . The 'date and time' is an image pickup date and time obtained from a clock or the like not shown. 'Height' is the height or depth of the defective portion, and 'width' is the width of the defective portion.

22 : is a figure which shows the image display example of the defect part which the image output part 305 outputs. In the figure, an image of a defective part is displayed in the area 211 . The image output unit 305 displays a mark indicating that there is a defective portion at a position on the edge in the direction indicated by the rotation angle indicated by the corrected defect position information of the image representing the workpiece 10 having no defective portion prepared in advance in the area 212. Display the placed image. In the area 213, the identifier of the work corresponding to the image of the defective part is displayed. In the region 214, the rotation angle indicated by the corrected defect position information corresponding to the image of the defective portion, the width and depth of the defective portion, and the like are displayed. An imaging date and time is displayed in the area 215 . In addition, the image displayed in the area 211 can be enlarged, reduced, moved, or the like, according to an instruction from a user or the like.

23 is a diagram illustrating an image context information management table for managing image context information stored in the image context information storage unit 310 . The image context information management table has attributes of 'pattern' and 'situation'. The 'pattern' is a pattern of the characteristic amount of the defective portion obtained from the image of the defective portion. The 'situation' is work status information for a work having a defective part corresponding to the 'pattern'.

The evaluation unit 307 evaluates the image of the first defective portion output by the image output unit 305 using the image condition information shown in FIG. 23 . Specifically, the evaluation unit 307 sequentially acquires the attribute value of 'pattern' in each record (row) of the image condition information management table of FIG. 23, and the pattern of the image indicated by the acquired attribute value is the first defective part. It is sequentially determined whether it matches the image of . In the case of matching, an attribute value of 'situation' corresponding to the matching attribute value is obtained as an evaluation result. Further, the processing may be terminated when the pattern of one record is matched, or the processing may be performed on all records. In this case, attribute values of a plurality of 'situations' may be obtained as evaluation results. Also, when there is no matching pattern, the evaluation unit 307 acquires an evaluation result designated as a default, for example, an evaluation result such as 'no abnormality'. Here, for example, an evaluation result of 'work crack is large' is obtained because the image obtained by capturing the first defect portion matches 'pattern 2' among 'patterns'.

Then, the evaluation result output unit 308 accumulates the evaluation result obtained by the evaluation unit 307 in association with the image, and displays it on a monitor (not shown) or the like.

24 : is a figure which shows the example of the output of the evaluation result by the evaluation result output part 308. As shown in FIG.

By this output, the user can recognize that this defective portion is a defective portion that is likely to cause a large workpiece crack in the post-stroke.

Further, the same processing as described above is repeated for other defective portions detected by the detection unit 306 .

And when the processing for all the defective parts detected by the detection unit 306 is finished, the moving unit 302 moves the orientation flat of the workpiece 10 in a predetermined direction as in the case of moving the defective part to the imaging area, , 　 In addition, the rotation angle of the workpiece 10 and the amount of movement in the horizontal direction are obtained so that the center of the workpiece 10 is placed at a predetermined position, and the obtained rotation angle and the amount of movement in the horizontal direction are used to obtain the workpiece 10 move the Through this, the workpiece 10 can be arranged at a predetermined position and in a predetermined direction.

The workpiece conveying device 2 lifts and conveys the workpiece 10 aligned with the position and direction in this way. Since the conveyance etc. by the workpiece conveyance apparatus 2 are the same as the specific example of the said Example 1, description is abbreviate|omitted here.

In addition, when an instruction to display an image of one defective part is received from the user through the image output unit 305, for example, a receiving unit (not shown), the image of the designated defective part is displayed as shown in FIG. also good

Here, for example, it is assumed that the user detects that an abnormality such as a crack in the work whose identifier is 'W001' has occurred in one work 10 in the post-stroke. Then, when the user inputs the identifier of the work 10 in which the crack has occurred and work status information about the crack using an input interface (not shown), the situation receiving unit 309 receives this information. For example, it is assumed that 'W001', which is an identifier of the work 10, and 'work crack', which is work status information, has been received.

Then, the image situation information accumulation unit 311 reads all images corresponding to the identifier 'W001' of the received work 10, specifically 'img1001' to 'img1005' from the image management table shown in FIG. By acquiring the feature points from the image of , pattern information of the feature points of the defective part is obtained for each image. Then, the information of each pattern and the work condition information received by the condition receiving unit 309 are correlated and stored in the image condition information storage unit 310 . Through this, five records (rows) are added to the image condition information management table shown in FIG. Accordingly, information on the image of the defective portion and the effect of the defective portion on the work 10 can be accumulated in correspondence, and the accuracy when evaluating the defective portion using the image of the defective portion can be improved. can

In addition, if it is possible to specify the defective part that causes cracking of the work, instead of specifying the work 10 in which the abnormality has occurred and inputting work status information, the defective part of the work 10, for example, is the identifier of the work. and a combination with a defective part identifier or the like. Alternatively, the designation of the defective part in the image displayed in the area 212 of the display screen shown in FIG. 22 may be received.

In addition, the abnormal detection of the post-stroke for the workpiece 10 and the acquisition of the workpiece status information indicating the abnormal situation may be automated using an abnormality detection device not shown or the like. In this case, the device inputs the identifier of the cracked work 10 and work condition information output by this equipment and the like to the condition receiving unit 309 .

As mentioned above, according to this embodiment, the edge of a workpiece|work can be easily confirmed by an image by moving a workpiece|work edge defect part into an imaging area, and making this defective part image.

In addition, by outputting the defective portion of the edge from the captured image, the edge defective portion can be easily enlarged, and the shape of the defective portion that is difficult to confirm with the naked eye can be easily confirmed.

Further, according to the present invention, the center of the work 10 is set in advance by the moving unit 302 at a position (for example, the center of the work 10 when transferring the work 10 to the work conveying device 2) position to be arranged), and moving the workpiece 10 so that the defective part is arranged in the imaging range of the imaging unit 303 to perform imaging of the defective part, thereby Between the images picked up with respect to a defect part, the position of the defect part of the workpiece|work 10 in an image, and positions of edges other than a defect part can be maintained in the same position. This makes comparison between images easier, and moreover, precise processing is possible when acquiring feature points from images or judging the similarity of images.

Further, in each of the above embodiments, each processing (function) may be realized by centralized processing by a single device (system), or may be realized by distributed processing by a plurality of devices.

Further, in each of the above embodiments, each component may be configured by dedicated hardware, or a component that can be realized by software may be realized by executing a program. For example, each component can be realized by reading and executing a software program recorded on a recording medium such as a hard disk or a semiconductor memory by a program execution unit such as a CPU. During execution: The program execution unit may execute the program while accessing the storage unit (eg, a recording medium such as a hard disk or a memory). Further, the work processing apparatus of the above embodiment may be realized by software.

The present invention is not limited to the above embodiments, and various modifications are possible, and it is natural that they are also included in the scope of the present invention.

As described above, the work processing apparatus and the like according to the present invention are suitable as an apparatus for processing a work, and in particular, it is useful as an apparatus for positioning a work and the like.

Claims (13)

A plurality of first rotation distance information, which is information having a rotation angle when the circular work is rotated, and the first distance information, which is information about the distance from the rotation center to the edge of the work corresponding to the rotation angle, are stored. a first rotation distance information storage unit;
synthesizing means for synthesizing a plurality of pieces of first distance information having corresponding rotation angles different by 90 degrees from among the first distance information included in the plurality of pieces of first rotation distance information;
In the plurality of combined distance information, which is information obtained by synthesizing the first distance information by the synthesizing means, a plurality of combined distance information having a corresponding rotation angle is continuous and a plurality of combined distance information having a small change in value is detected, , synthesis processing means for acquiring a plurality of pieces of first distance information before synthesis corresponding to at least one of the detected pieces of combined distance information and a rotation angle corresponding to the one or more pieces of first distance information before synthesis;
correction information obtaining means for obtaining correction information for aligning the rotation center of the work with the center of the work by using the plurality of first distance information and the rotation angle obtained by the synthesis processing means; and
and correction information output means for outputting the correction information acquired by the correction information acquiring means. According to claim 1,
Using the correction information output by the correction information output means, the rotation angle when the workpiece has a circular shape without irregularities on the edge, and second distance information that is information about the distance to the edge of the workpiece according to the rotation angle; a second distance information obtaining means for obtaining a relational expression representing a relationship of , and substituting a plurality of rotation angles corresponding to the plurality of first rotational distance information into the obtained relational expression to obtain second distance information;
A difference between the first distance information and the second distance information corresponding to the same rotation angle is obtained by using the plurality of pieces of first rotation distance information and the plurality of pieces of second distance information obtained by the second distance information obtaining means. calculation means; and
and a distance difference related output means for outputting information on the difference calculated by the calculation means. According to claim 1,
The combining processing means performs at least one of a first process of detecting one or more pieces of combined distance information in an order of increasing value from the plurality of combined distance information, and a second process of detecting one or more pieces of combined distance information in an order of decreasing values. A plurality of first distances before synthesis corresponding to one or more pieces of combined distance information in which a corresponding rotation angle is a predetermined number or more consecutively among combined distance information remaining undetected in the first and second processes after being executed one or more times A work processing apparatus for acquiring a pair of rotation angles corresponding to the information and the at least one first distance information before synthesis. 3. The method of claim 2,
The combining processing means performs at least one of a first process of detecting one or more pieces of combined distance information in an order of increasing value from the plurality of combined distance information, and a second process of detecting one or more pieces of combined distance information in an order of decreasing values. A plurality of first distances before synthesis corresponding to one or more pieces of combined distance information in which a corresponding rotation angle is a predetermined number or more consecutively among combined distance information remaining undetected in the first and second processes after being executed one or more times A work processing apparatus for acquiring a pair of rotation angles corresponding to the information and the at least one first distance information before synthesis. 4. The method of claim 3,
The composition processing means executes each of the first processing and the second processing one or more times. 5. The method of claim 4,
The composition processing means executes each of the first processing and the second processing one or more times. 3. The method of claim 2,
Cutout detection means for obtaining information for specifying the direction of the work by using the difference between the first distance information and the second distance information calculated by the calculation means, and for obtaining information indicating a cutout for specifying the direction of the work provide more,
The distance difference related output means outputs the information indicating the cutouts obtained by the cutout detecting means as information about the difference calculated by the calculating means. 8. The method of claim 7,
The notch detection means detects the notch provided at the edge of the work by using the difference between the first distance information and the second distance information calculated by the calculation means and one or more thresholds related to the size of the notch, A work processing device for acquiring information indicating a cutout. 3. The method of claim 2,
Further comprising defect detection means for obtaining information on a defective portion of the edge of the work by using the difference between the first distance information and the second distance information calculated by the calculation means,
The distance difference related output means outputs the information on the defective part obtained by the joint detection means as information about the difference calculated by the calculation means. 10. The method of claim 9,
The defect detecting means detects a defective portion of the edge of the work by using the difference between the first distance information and the second distance information calculated by the calculating means and one or more thresholds related to the size of the defective portion, and the detection A work processing device that acquires information about a defective part. According to claim 1,
The synthesizing unit obtains a plurality of combined distance information by synthesizing four pieces of first distance information each having a corresponding rotation angle of 90 degrees from among the first distance information included in the plurality of first rotation distance information. 3. The method of claim 2,
The synthesizing unit obtains a plurality of combined distance information by synthesizing four pieces of first distance information each having a corresponding rotation angle of 90 degrees from among the first distance information included in the plurality of first rotation distance information. The work processing apparatus according to any one of claims 1 to 12;
A work conveying system provided with a work conveying device that delivers a work to the work processing apparatus.

Images