KR20150116112A - Apparatus for each layer classifying defect for multi-layer having display panel - Google Patents

Apparatus for each layer classifying defect for multi-layer having display panel Download PDF

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KR20150116112A
KR20150116112A KR1020140040622A KR20140040622A KR20150116112A KR 20150116112 A KR20150116112 A KR 20150116112A KR 1020140040622 A KR1020140040622 A KR 1020140040622A KR 20140040622 A KR20140040622 A KR 20140040622A KR 20150116112 A KR20150116112 A KR 20150116112A
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panel
camera
defect
layers
angle
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KR1020140040622A
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Korean (ko)
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정상호
김동언
이성민
박규태
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솔브레인이엔지 주식회사
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Priority to KR1020140040622A priority Critical patent/KR20150116112A/en
Publication of KR20150116112A publication Critical patent/KR20150116112A/en

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
    • G01N21/896—Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N2021/9513—Liquid crystal panels

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  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Textile Engineering (AREA)
  • Engineering & Computer Science (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)

Abstract

The present invention relates to an apparatus and method for layered defects of a transparent object having a plurality of layers, and more particularly to a method for inspecting a layer of a transparent object composed of a plurality of layers, that is, It is possible to identify and improve the main processes in which defects occur, and it is possible to determine whether or not to discard the panels depending on the location of the defects, thereby improving the productivity of the panel, reducing the cost by recycling the material, The present invention relates to a layered defect classification apparatus and method for a transparent object having a plurality of layers, which can prevent an inspection error due to dust on the surface of a panel.
According to the present invention, there is provided a light emitting device comprising: a light irradiation part for emitting light in a direction perpendicular to a surface of a panel; A first camera disposed in a direction perpendicular to the surface of the panel to photograph the surface of the panel; A second camera disposed at an angle with respect to the surface of the panel to photograph the surface of the panel; And determining whether or not a defect is present in the panel through an image or an image photographed through the first camera and the second camera. If the defect exists, the reference point and the panel are positioned on the same vertical line as the defect, A controller for measuring a position of a defect through a predetermined singular point having a specific position; And a plurality of layered defect classification devices for the transparent object.

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to an apparatus and method for classifying defects of a transparent object having multiple layers,

The present invention relates to an apparatus and method for layered defects of a transparent object having a plurality of layers, and more particularly to a method for inspecting a layer of a transparent object composed of a plurality of layers, that is, It is possible to identify and improve the main processes in which defects occur, and it is possible to determine whether or not to discard the panels depending on the location of the defects, thereby improving the productivity of the panel, reducing the cost by recycling the material, The present invention relates to a layered defect classification apparatus and method for a transparent object having a plurality of layers, which can prevent an inspection error due to dust on the surface of a panel.

When inspecting an internal defect present in a film, a display panel, a touch panel, or the like, it is generally composed of a light for visualizing a defect, a camera for capturing the defect, and a software for automatically extracting a defect using the captured image .

In the conventional inspection, only the presence or absence of defects is detected, and the main function is to judge whether the defect is present. However, in recent years, the defect specification varies depending on the type of defects or defects, Layer) is requested, and a technique capable of measuring the height on the Z axis of the detected defect is required.

In addition, when a protective film is attached to a film or a panel, defects such as foreign matter / scratch on the protective film are not defective, so it is necessary to distinguish defects on the protective film from defects on the inside of the protective film to prevent over detection due to defects on the protective film , There is a limit in distinguishing surface defects from internal defects in the prior art.

Thus, for example, in "optical device and method for discriminating a foreign substance" disclosed in Patent Document 1, such a problem is solved.

However, in the case of the conventional technique as disclosed in Patent Document 1, the method of obtaining the position difference d between the cameras is not numerically or logically specified, and the formula h = d / (2 cotan?) + H_ref , There is no suggestion to compensate for the difference in h value depending on the error of the inclination angle? (The difference between the angle in design and the actual installation angle). Also, in the case of a general post-process inspection line, a considerable number of dusts are present on the protective film unlike the previous process, and when the oblique view is obtained at the same angle by the two cameras in the conventional patented method, the surface dust is mostly picked up . In order to separate the surface dust by the existing patent method, it is necessary to find the dust on the right image corresponding to the dust on the left image, but if the dust is finely distributed on the surface, An error has occurred and accurate depth information calculation has become impossible, and surface dust has been classified as an internal defect.

[Prior Art Literature]

[Patent Literature]

(Patent Document 1) Korean Patent Publication No. 10-2013-0039266

The present invention has been made to solve the above-mentioned problems,

It is an object of the present invention to provide a transparent object having a plurality of layers, that is, a layer of a transparent object having a plurality of layers capable of detecting the presence or absence of defects of the panel, And a defect classification apparatus and method therefor.

Another object of the present invention is to provide a layered defect classification apparatus and a method therefor of a transparent object having a plurality of layers capable of determining whether or not a panel is discarded according to the position of a defect, thereby improving the productivity of the panel, .

It is still another object of the present invention to provide a layered defect classification apparatus and a method therefor, which can prevent an inspection error due to dust on the surface of a panel, .

According to an aspect of the present invention, there is provided an apparatus and method for layer-by-layer defect classification of a transparent object having a plurality of layers, comprising: a first light irradiation unit for irradiating light in a direction perpendicular to a surface of a panel; A first camera disposed in a direction perpendicular to the surface of the panel to photograph the surface of the panel; A second camera disposed at an angle with respect to the surface of the panel to photograph the surface of the panel; And determining whether or not a defect is present in the panel through an image or an image photographed through the first camera and the second camera. If the defect exists, the reference point and the panel are positioned on the same vertical line as the defect, A controller for measuring a position of a defect through a predetermined singular point having a specific position; The present invention also provides a layered defect classification apparatus and a method thereof for a transparent object having a plurality of layers.

And a second light irradiation portion arranged to have an angle corresponding to a vertical angle with an angle that the second camera has with respect to the surface of the panel to irradiate light to the surface of the panel.

The outlier can be predetermined to have a certain height, and the control unit can be configured to measure the height of the defect.

The outlier may be any one of a starting point for aligning the panel, a barcode formed on the panel, a surface of the panel, and a specific shape inside the panel that knows the height.

The panel may be composed of a plurality of layers, and the control section may be configured to grasp the layer of the panel corresponding to the position of the defect.

The second camera may be configured to change the angle depending on one or both of the material of the panel and the presence or absence of the cover film attached to the panel.

The first light irradiation unit may be configured to be disposed in the first camera.

The panel may be a flat panel display, a liquid crystal panel, or a glass panel.

One or both of the first camera and the second camera may be a camera using any one of a charge coupled device (CCD) and a complementary metal oxide semiconductor (CMOS) as an image sensor.

According to another aspect of the present invention, there is provided a layer defect classification method for a transparent object having a plurality of layers, comprising the steps of: irradiating a surface of a panel with light; A photographing step of photographing a surface of a panel through a first camera arranged in a direction perpendicular to a surface of the panel and a second camera arranged in an angle with respect to a surface of the panel; And determining whether or not a defect is present in the panel through an image or an image photographed through the first camera and the second camera. If the defect exists, the reference point and the panel are positioned on the same vertical line as the defect, A defect position measuring step of measuring a position of a defect through a predetermined singular point having a specific position; The method comprising the steps of:

According to the defect classification apparatus and method of a transparent object having a plurality of layers in accordance with the present invention, it is possible to inspect to which layer the defects and the defects of the transparent object composed of a plurality of layers, It is possible to grasp the main processes that occur.

Further, according to the present invention, it is possible to determine whether or not to discard the panel according to the position of the defect, thereby improving the productivity of the panel and reducing the cost by recycling the material.

Further, since the present invention can acquire an image which is relatively less sensitive to the dust on the surface of the panel, an inspection error due to dust on the surface of the panel can be prevented.

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a configuration diagram showing a structure of a layered defect classification apparatus for a transparent object having a plurality of layers according to a first embodiment of the present invention; FIG.
FIG. 2 is a block diagram showing the structure of a layered defect classification apparatus for a transparent object having a plurality of layers according to a second embodiment of the present invention.
3 is a diagram showing a state in which a distance between a reference point located on the same vertical line and a defect is calculated.
4 is a diagram showing a state in which coordinates between a first camera and a second camera are mapped using a calibration target having a Dot pattern.
FIG. 5 is a diagram illustrating a state in which defects appearing in an image of a first camera are found in an image of a second camera.
6 is a diagram showing a state in which a constant k is obtained by using a calibration target having a Dot pattern.

Hereinafter, the present invention will be described in detail with reference to the drawings. However, these drawings are for illustrative purposes only and the present invention is not limited thereto. The transparent object having a plurality of layers, that is, the panel, which is inspected through the layered defect classification apparatus for a transparent object having a plurality of layers according to the present invention, uses either a flat panel display, a liquid crystal panel, or a glass panel.

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a configuration diagram showing a structure of a layered defect classification apparatus for a transparent object having a plurality of layers according to a first embodiment of the present invention; FIG.

Referring to FIG. 1, a layered defect classification apparatus for a transparent object having a plurality of layers according to a first embodiment of the present invention includes a first light irradiation unit 10, a first camera 20, a second camera 30, And a control unit 40.

The first light irradiation unit 10 is a component that irradiates light in a direction perpendicular to the surface of a transparent object having a plurality of layers (hereinafter referred to as "panel 50"), and includes a lamp, a light emitting diode LED), a laser diode or the like can be used. At this time, the first light irradiation unit 10 may be disposed apart from the first camera 20 described below, or may be configured to be disposed in the first camera 20. [

The first camera 20 is a component that is disposed in a direction perpendicular to the surface of the panel 50 and photographs the surface of the panel 50. The first camera 20 may be any one of a charge coupled device (CCD) or a complementary metal oxide semiconductor Can be used as the image sensor.

The second camera 30 is a component for taking an image of the surface of the panel so as to be inclined with respect to a vertical line toward the surface of the panel so as to have an angle? A camera having an image sensor different from that of the first camera 20 may be used. The angle of the second camera 30 with respect to the surface of the panel 50 may be changed according to the material of the panel 50 to be inspected or the presence or absence of a cover film attached to the panel 50, 90).

The control unit 40 is a component that collectively controls various components used in the present invention. In particular, in the present invention, the control unit 40 controls the operation of the first camera 20 and the second camera 30, For example, foreign matter or air bubbles, is present in the interior of the panel 50, and if there is a defect, it is positioned on the same vertical line as the defect and has a specific position on the panel 50 and a reference point having a different height And the position of the defect is measured through a predetermined singularity.

FIG. 2 is a block diagram showing the structure of a layered defect classification apparatus for a transparent object having a plurality of layers according to a second embodiment of the present invention.

As shown in FIG. 2, a layered defect classification apparatus for a transparent object having a plurality of layers according to a second embodiment of the present invention is configured similar to the first embodiment described above, but includes a second light irradiation unit 15 There is a difference.

That is, the second light irradiating portion (light irradiating portion) is disposed so as to have an angle corresponding to the angle? Perpendicular to the angle? Of the second camera 30 with respect to the surface of the panel 50, 15) is further included, whereby an image less sensitive to the dust on the surface of the panel 50 can be obtained.

Hereinafter, an apparatus and method for layer-by-layer defect classification of a transparent object having a plurality of layers according to the present invention will be described in detail with reference to the accompanying drawings.

FIG. 3 is a diagram showing a state in which a distance between a reference point located on the same vertical line and a defect (hereinafter referred to as "foreign object") is calculated, And maps the coordinates between the cameras. 5 is a diagram illustrating a state in which a foreign object appearing in an image of a first camera is found in an image of a second camera, and FIG. 6 is a diagram illustrating a state in which a constant k is obtained by using a calibration target having a Dot pattern .

A method of classifying defects in a layer using a layered defect classification apparatus for a transparent object having a plurality of layers according to the present invention is performed through a light irradiation step, an imaging step, and a defect position measurement step, And the photographing step of photographing with the first and second cameras 20 and 30 are general techniques, and thus a detailed description thereof will be omitted.

3, the panel 50 is composed of a plurality of layers. When the first camera 20 is positioned on the same vertical line and assumes two points a and b having different heights, The points a and b are picked up at the same position and viewed as one, and the images of the second camera 30 are picked up at a distance of a certain distance from each other.

The distance (Δ) is proportional to the difference in depth between two points a and b, and the depth of point b relative to point a is h (depth difference between points a and b) .

h = k *? (k = constant)

That is, if the position of the reference point (a) having the preset specific height in the image of the first camera 20 and the position of the image of the second camera 30 in the image of the second camera 30 are known, And the relative height or depth of the point b, which is located at the same position as the point b, can be obtained. At this time, the reference point (a) is a reference point within a measurable height range in the height measuring optical system implemented by the first camera (20) and the second camera (30), and can be set as the origin of future depth measurement.

Therefore, if a point b is a defect, that is, a foreign object, a reference point a existing on the same vertical line as the foreign object b appearing in the first camera 20 image is present at a certain position in the image of the second camera 30 (Step 1), and a point corresponding to the foreign object b in the image of the first camera 20 is searched from the image of the second camera 30 (step 2). Then, the distance (?) Between the reference point (a) and the foreign object (b) is obtained from the image of the second camera 30 (step 3) and the depth is obtained using the equation h = k * Δ (step 4). At this time, the constant k is calculated or measured separately, which will be described in detail below. Next, a specific point (a starting point for alignment of the panel 50, a bar code formed on the panel 50, a surface of the panel 50, a height of the panel 50, (E.g., a specific shape inside the panel 50 that knows the height of the panel 50) (step 5). By comparing the depth information of the foreign object (b) with the height information of each layer constituting the panel (50) by converting the depth information of the foreign object (b) b) to identify the layer in which it exists (step 6).

In step 1 and step 2, a coordinate mapping (reference point (a)) between the image of the first camera 20 and the image of the second camera 30 of the reference point a on the plane positioned at a specific height in the measurement range A calibration target having a grid pattern or a Dot pattern at a predetermined interval is used for indicating the position of the first camera image in the second camera image).

Accordingly, as shown in FIG. 4, the calibration target of the Dot pattern is set perpendicularly to the first camera 20 at a specific height (height origin) within the measurement range, thereby capturing an image. Dot origin points are respectively obtained from the images of the first camera 20 and the second camera 30 and the coordinates of the first camera 20 and the second camera 30 of the same Dot are mapped on a one-to-one basis.

That is, if the center coordinates of each dot are P1, P2, ... , Pj, ... In other words,

The center coordinates of the first camera Dot are P1 (h11, v11), P2 (h12, v12), ... , Pj (h1j, v1j), ... , And,

The center coordinates of the second camera Dot are P1 (h21, v21), P2 (h22, v22), ... , Pj (h2j, v2j), ... .

That is, P1: (h11, v11) -> (h21, v21)

P2: (h12, v12) -> (h22, v22)

...

Pj: (h1j, v1j) -> (h2j, v2j)

... .

At this time, an arbitrary value between Dots is obtained by using a linear interpolation method using a surrounding Dot value.

Next, the foreign object (b) appearing in the first camera 20 image is searched in the second camera image as shown in Fig.

The coordinates of the foreign object (b) in the image of the first camera (20) are converted into the coordinates of the image of the second camera (30) using the coordinate mapping method of step 1.

b (h1, j1) -> r (h2, j2)

Then, a candidate object near the coordinate r (h2, j2) is searched from the image of the second camera 30. A pattern matching technique is applied to the candidate candidate group using the foreign object b of the image of the first camera 20 to determine candidates having the highest matching rate as the same object as the foreign object b and obtain coordinates.

b '(h3, v3)

In step 3, the distance (?) Between r (h2, j2) and b '(h3, v3) is obtained. In step 4, the depth is obtained using equation (h = k *?).

As shown in FIG. 6, the constant k can be obtained by using the calibration target having the Dot pattern used in the step 1. That is, if the calibration target having the Dot pattern is performed twice at a different height, the Dot center coordinates are not changed in the vertically installed image of the first camera 20, but the coordinates in the image of the second camera 30 are Dot center coordinates change with height. Dh " when the height change of the calibration target having the Dot pattern is denoted by dh, and the central coordinate shift amount of the image Dot in the second camera 30 is denoted by d ".

Next, in step 5, the height of the singular point that is known in depth is found in the panel 50 to be inspected. This can be obtained through steps 2 to 4.

In step 6, all the depth coordinates are converted into a relative height having the height of the surface of the panel 50 to be inspected as an origin, and then compared with the thickness information of the respective layers constituting the panel 50, It is possible to grasp the layer where it exists.

Accordingly, the presence or absence of defects of the panel 50 made up of a plurality of layers and the layer in which the defects are located can be inspected, so that the main processes in which defects occur can be grasped and improved.

Further, in the case of the panel 50, particularly the display panel, the junction of the LCD panel and the touch panel is bonded with a transparent adhesive material such as OCR / OCA. When defects such as bubbles or foreign matter are present in the bonding layer, , The touch panel and LCD panel can be recycled, which improves the productivity of the panel and reduces the cost by recycling the material.

Moreover, in the present invention, since one of the two cameras 20, 30 is installed perpendicular to the surface of the panel, it is possible to acquire an image that is relatively less sensitive to the dust on the panel surface, thereby preventing inspection errors due to dust on the panel surface You can do it.

Thus, those skilled in the art will appreciate that the present invention may be embodied in other specific forms without departing from the spirit or essential characteristics thereof.

It is therefore to be understood that the embodiments described above are to be considered in all respects as illustrative and not restrictive and the scope of the invention is indicated by the appended claims rather than the foregoing description, It is intended that all changes and modifications derived from the equivalent concept be included within the scope of the present invention.

10: first light irradiation part 15: second light irradiation part
20: first camera 30: second camera
40: control unit 50: panel

Claims (18)

1. A layered defect classification apparatus for a transparent object having a plurality of layers,
A first light irradiating portion for irradiating light in a direction perpendicular to the surface of the panel;
A first camera disposed in a direction perpendicular to a surface of the panel to photograph a surface of the panel;
A second camera disposed at an angle with respect to a surface of the panel to photograph a surface of the panel; And
The method comprising the steps of: determining whether a defect is present in the panel through an image or an image captured through the first camera and the second camera; determining whether the defect is present on the same vertical line as the defect, A controller for measuring a position of the defect through a predetermined point set to have a reference point and a specific position on the panel;
And a plurality of layers including the plurality of layers. The method according to claim 1,
Further comprising a second light irradiating portion arranged to have an angle corresponding to a vertical angle with an angle of the second camera with respect to the surface of the panel and to irradiate light to the surface of the panel A defect classification apparatus for a layer of a target object. 3. The method according to claim 1 or 2,
The singular point is preset to have a specific height,
Wherein the control unit measures the height of the defect. The method of claim 3,
The above-
Wherein the substrate is any one of a starting point for alignment of the panel, a barcode formed on the panel, a surface of the panel, and a specific shape inside the panel, the height of which is known. 5. The method of claim 4,
The panel comprises a plurality of layers,
Wherein,
And the layer of the panel corresponding to the position of the defect is grasped. 6. The method of claim 5,
Wherein the second camera comprises:
Wherein the angle is changeable according to one or both of the material of the panel and the presence or absence of a cover film attached to the panel. The method according to claim 6,
Wherein the first light irradiating unit is disposed in the first camera. 8. The method of claim 7,
Wherein the panel is one of a flat panel display, a liquid crystal panel, and a glass panel. 9. The method of claim 8,
Wherein one or both of the first camera and the second camera includes:
Wherein the defect detection device is a camera using any one of a charge coupled device (CCD) or a complementary metal oxide semiconductor (CMOS) as an image sensor. 1. A layer defect classification method for a transparent object having a plurality of layers,
A light irradiation step of irradiating the surface of the panel with light;
A photographing step of photographing a surface of the panel through a first camera arranged in a direction perpendicular to the surface of the panel and a second camera arranged so as to have an angle with respect to the surface of the panel; And
The method comprising the steps of: determining whether a defect is present in the panel through an image or an image captured through the first camera and the second camera; determining whether the defect is present on the same vertical line as the defect, A defect position measuring step of measuring a position of the defect through a reference point and a predetermined singularity set to have a specific position in the panel;
And a plurality of layers including the plurality of layers. 11. The method of claim 10,
Further comprising a second light irradiating portion arranged to have an angle corresponding to a vertical angle with an angle of the second camera with respect to the surface of the panel and to irradiate light to the surface of the panel A method for classifying defects in a target object. The method according to claim 10 or 11,
The singular point is preset to have a specific height,
Wherein the control unit measures the height of the defect. 13. The method of claim 12,
The above-
Wherein the substrate is any one of a starting point for alignment of the panel, a barcode formed on the panel, a surface of the panel, and a specific shape inside the panel, the height of which is known. 14. The method of claim 13,
The panel comprises a plurality of layers,
Wherein,
And determining the layer of the panel corresponding to the location of the defect. 15. The method of claim 14,
Wherein the second camera comprises:
Wherein the angle of the at least one layer is variable depending on one or both of the material of the panel and the presence or absence of a cover film attached to the panel. 16. The method of claim 15,
Wherein the light irradiating unit is disposed in the first camera. 17. The method of claim 16,
Wherein the panel is one of a flat panel display, a liquid crystal panel, and a glass panel. 18. The method of claim 17,
Wherein one or both of the first camera and the second camera includes:
Wherein the method is a camera using any one of a charge coupled device (CCD) or a complementary metal oxide semiconductor (CMOS) as an image sensor.
KR1020140040622A 2014-04-04 2014-04-04 Apparatus for each layer classifying defect for multi-layer having display panel KR20150116112A (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20190100616A (en) * 2018-02-21 2019-08-29 (주)오로스 테크놀로지 Surface defect inspection apparatus
JP2021085658A (en) * 2019-11-25 2021-06-03 株式会社Ihi Foreign matter detection device and foreign matter detection method

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20190100616A (en) * 2018-02-21 2019-08-29 (주)오로스 테크놀로지 Surface defect inspection apparatus
JP2021085658A (en) * 2019-11-25 2021-06-03 株式会社Ihi Foreign matter detection device and foreign matter detection method

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