JP6348789B2 - Work processing equipment, work transfer system - Google Patents

Description

  The present invention relates to a workpiece processing apparatus for positioning a workpiece.

  As a conventional technique, the wafer is rotated and its edge position is detected and stored in correspondence with the rotation angle, and the eccentric amount and direction of the wafer position are calculated from the maximum and minimum values of the detection signal. Since the edge position changes more rapidly than the other parts at the start point and end point of the flat portion provided on the wafer, the rate of change of the edge position data is increased. It has been known that the flat portion or the like is calculated by the same device so that the flat portion or the like is located at a specific position with respect to another stage such as a transport device by calculating a place where the value exceeds a certain value (for example, , See Patent Document 1).

Japanese Patent No. 2729297 (first page, FIG. 1 etc.)

  For example, a workpiece positioned using a conventional apparatus as described above is transferred to a device that performs CVD (Chemical Vapor Deposition), CMP (Chemical Mechanical Polishing), or the like by a workpiece transfer device. Thus, it is possible to appropriately perform desired processing on the workpiece.

  Here, when processing such as CVD or polishing is performed on a workpiece such as a wafer where burrs, chipping, etc. are present at the edge, the workpiece is damaged by heat, pressure, etc. applied to the workpiece. There is a risk. For this reason, it is preferable to perform an inspection for detecting the presence or absence of defective parts such as burrs and chipping before processing the workpiece. For this purpose, first, the conventional technique as described above is used. Therefore, it is desired to inspect the defective part of the workpiece before positioning the workpiece.

  However, when inspecting a defective part of a work, the work is once transported to an apparatus for inspecting the defective part by a work transporting device, and the defective part is inspected. There is a problem that it takes time to inspect the workpiece and to convey the workpiece to the inspection device, because it needs to be transferred to the positioning device and positioned.

  Moreover, it is necessary to provide an inspection device in addition to the positioning device, which increases the cost and requires a space for installation of the inspection device in the workpiece conveyance path, thus saving space. There was a problem that it was difficult to plan.

  As a result, the conventional technique has a problem that it is not possible to appropriately detect the defect of the workpiece.

  The present invention has been made to solve the above-described problems, and an object of the present invention is to provide a workpiece processing apparatus and the like that can appropriately detect a workpiece defect.

  The workpiece processing apparatus according to the present invention associates a rotation angle when rotating a circular workpiece with first distance information that is information on a distance from the rotation center to the edge of the workpiece corresponding to the rotation angle. The first rotation distance information storage unit storing a plurality of first rotation distance information, which is information having, and the plurality of first rotation distance information stored in the first rotation distance information storage unit are used to position the workpiece. Information for aligning, information for identifying the orientation of the workpiece, information regarding the defective portion of the workpiece edge, information for aligning the workpiece acquired by the acquisition portion, and workpiece It is a work processing apparatus provided with the output part which outputs the information for pinpointing information, and the information regarding a defective part.

  With this configuration, when aligning the position and orientation of the workpiece, it is possible to detect a defect on the edge of the workpiece, and to appropriately detect a defect on the workpiece.

  In the work processing apparatus of the present invention, in the work processing apparatus, the acquisition unit detects a defective part using one or more threshold values related to the size of the defective part, and when the defective part is detected, the defect is detected. This is a work processing apparatus that acquires information about a part.

  With this configuration, it is possible to determine the defect of the edge of the workpiece based on the size.

  Further, in the work processing apparatus according to the present invention, in the work processing apparatus, the output unit further performs an abnormal output, which is an output when there is an abnormality in the edge of the work, according to the information regarding the defective portion acquired by the acquisition unit. It is a work processing device.

  With this configuration, when a defect is detected in the workpiece, an appropriate response can be performed.

  Further, the work processing apparatus of the present invention uses an evaluation related information receiving unit and an evaluation related information receiving unit that receives evaluation related information that is information related to the evaluation of the defective part of the edge of the work in the work processing apparatus, A setting unit that acquires one or more thresholds related to the size used by the acquisition unit for detection of the defective portion, and sets one or more thresholds related to the size used by the acquisition unit for detection of the defective portion using the acquired threshold; Is a work processing apparatus.

  With this configuration, the edge defect detection result can be evaluated, and the evaluation can be fed back to the threshold value, and the edge defect detection accuracy can be optimized in accordance with the processing performed on the workpiece.

  In the work processing apparatus according to the present invention, in the work processing apparatus, the acquisition unit may include a plurality of first distance information in which the corresponding rotation angle is different by 90 degrees among the first distance information included in the plurality of first rotation distance information. Combining means for combining one distance information, and a plurality of combined distance information that is information acquired by combining the first distance information by the combining means, and a plurality of combined distance information in which corresponding rotation angles are continuous. , Detecting a plurality of combined distance information with a small change in value magnitude, a plurality of first distance information before combining corresponding to one or more of the detected plurality of combined distance information, and one or more before combining As the information for aligning the workpiece using the combination processing means for acquiring the rotation angle corresponding to the first distance information, and the plurality of first distance information and rotation angles acquired by the combination processing means, Work center of rotation Using the correction information acquisition means for acquiring correction information for alignment with the center, and the correction information acquired by the correction information acquisition means, the rotation angle and the rotation angle when the workpiece is a circle having no irregularities on the edge To obtain a relational expression indicating the relationship with the second distance information, which is information related to the distance to the edge of the workpiece according to each of the plurality of rotation angles corresponding to the plurality of first rotational distance information, respectively. The same rotation angle using the second distance information acquisition means for substituting and acquiring the second distance information, the plurality of first rotation distance information, and the plurality of second distance information acquired by the second distance information acquisition means The direction of the work is specified using the calculation means for acquiring the difference between the first distance information and the second distance information associated with the first distance information and the second distance information calculated by the calculation means. Direction of work as information Using the difference between the first distance information and the second distance information calculated by the notch detection means for acquiring information indicating the notch portion for identification and the calculation means, information on the defective portion of the workpiece edge is obtained. And a defect processing means.

  With this configuration, by combining information on edge distances with different rotation angles by 90 degrees, it is possible to remove edge fluctuation information from information obtained by removing fluctuations in information about edge distances that occur when the rotation center is different from the wafer center. Since the correction information can be acquired by acquiring information regarding the distance between the portions having no unevenness, the information for correcting the rotation center of the wafer can be appropriately acquired. Also, by using the difference from the information about the ideal edge distance, it is possible to accurately acquire and output information about the wafer edge irregularities, thereby accurately displaying the information indicating the notch and the defect. Information about the part can be obtained.

  Further, the work processing apparatus of the present invention is characterized in that, in the work processing apparatus, the synthesis processing means detects a first process of detecting one or more combined distance information in descending order of the plurality of composite distance information, At least one of the second process for detecting one or more combined distance information in order from the smallest one is executed once or more, and the correspondence among the remaining combined distance information not detected in the first process and the second process A plurality of first distance information before combining corresponding to one or more of the combined distance information in which at least a predetermined number of rotation angles are continuous, and a rotation angle corresponding to one or more first distance information before combining It is a work processing device which acquires a set of.

  With such a configuration, it is possible to acquire information for accurately correcting the center of rotation using information on the edge distance of a portion excluding irregularities such as a notch portion and a defective portion of the edge.

  In the work processing apparatus of the present invention, in the work processing apparatus, the notch detection means is one or more related to a difference between the first distance information and the second distance information calculated by the calculation means and a size of the notch. This is a workpiece processing apparatus that detects a notch provided on the edge of the workpiece using the threshold value and acquires information indicating the notch.

  With this configuration, it is possible to appropriately indicate the position of the notch.

  In the work processing apparatus according to the present invention, in the work processing apparatus, the defect detection means may include one or more threshold values relating to the difference between the first distance information and the second distance information calculated by the calculation means and the size of the defect portion. Is used to detect a defect portion at the edge of the workpiece and acquire information on the detected defect portion.

  With this configuration, it is possible to show appropriate information regarding the defective portion.

  In the workpiece processing apparatus according to the present invention, in the workpiece processing apparatus, the combining means includes four first rotation information different from each other by 90 degrees in the first distance information included in the plurality of first rotation distance information. This is a work processing apparatus that obtains a plurality of combined distance information by combining one distance information.

  With such a configuration, information for correcting the rotation center with high accuracy using the information obtained by removing the fluctuation of the information on the edge distance generated when the rotation center is different from the center of the wafer, and the notch are shown. Information and information regarding the defective portion can be acquired.

  In the work processing apparatus according to the present invention, in the work processing apparatus, the defect portion of the workpiece edge is an area in which the defect portion of the workpiece edge is designated in advance using information on the defect portion of the workpiece edge output from the output unit. A moving unit that moves the workpiece, an imaging unit that images a defective portion of the edge of the workpiece arranged in the imaging region, and an image output unit that outputs an image captured by the imaging unit, A workpiece processing apparatus provided.

  With this configuration, it is possible to easily confirm the defective portion of the workpiece edge.

  In the work processing apparatus of the present invention, in the work processing apparatus, the moving unit is arranged at a position where the center of the work is specified in advance, and a defective portion of the edge of the work is arranged in the imaging region of the imaging unit. It is a work processing apparatus which moves a work so that it may be carried out.

  With this configuration, it is possible to align the positions of the defective portions of the edges in the image obtained by capturing the defective portions. Thereby, for example, a comparison of a defective part becomes easy.

  In the work processing apparatus of the present invention, in the work processing apparatus, information for aligning the work output by the output unit, information for specifying the direction of the work, and information on a defective portion of the edge of the work And a correction defect position acquisition unit that acquires correction defect position information, which is information indicating the position of the defect portion of the workpiece, with reference to the center of the workpiece and the orientation specified for the workpiece, and the image output unit The work processing apparatus outputs an image captured by the imaging unit in association with corrected defect position information corresponding to a defect portion captured in the image.

  With this configuration, the position of the defective portion of the edge can be indicated with reference to a specific direction, and the position of the defective portion can be easily indicated.

  In the workpiece processing apparatus according to the present invention, in the workpiece processing device, one or more defective portions having a large size of the defective portion of the workpiece edge using information on the defective portion of the workpiece edge output from the output unit. And a moving unit moves a defective part of the edge of the workpiece detected by the detecting unit to the imaging region, and the imaging unit picks up a workpiece that detects the defective part of the edge of the workpiece detected by the detecting unit. It is a processing device.

  With such a configuration, only a large defect portion can be selectively imaged. Thereby, for example, it is possible to prevent an image such as a small defect portion having little influence on quality or the like from being output.

  The work processing apparatus of the present invention is an evaluation unit that evaluates a defect portion indicated by an image using an image output from the image output unit and an evaluation result output that outputs an evaluation result of the evaluation unit. A work processing apparatus further comprising a section.

  With this configuration, it is possible to evaluate a defective portion using an image.

  Further, the work processing apparatus of the present invention is the situation after the imaging of the defective part of the work in which the imaging unit has imaged the defective part in the work processing apparatus, after performing the process specified in advance. Image status information storage that stores image status information that is information including a status reception unit that receives work status information that is status information, information on an image of a defect portion output by the image output unit, and work status information Status information storage for storing, in the image status information storage unit, image status information including information on the image of the defective portion output by the image output unit and the work status information on the defective portion received by the status reception unit The evaluation unit is a work processing apparatus that evaluates a defective portion using image state information stored in the image state information storage unit.

  With this configuration, it is possible to accumulate information relating to the image of the defective portion and the state of the workpiece having the defective portion in association with each other. As a result, for example, the image of the defective part and the influence of the defective part on the workpiece 10 are accumulated in association with each other, and the accuracy when the defective part is evaluated using the image of the defective part is improved. be able to.

  The work processing apparatus according to the present invention is a work transfer system including the work processing apparatus and a work transfer apparatus that delivers the work to the work processing apparatus.

  With this configuration, the processing for aligning the position and orientation of the workpiece and the processing for detecting the defective portion can be performed together in the workpiece processing apparatus during conveyance. It is possible to reduce the time required for the process of detecting In addition, the movement of the workpiece during conveyance can be minimized.

  According to the workpiece processing apparatus and the like according to the present invention, it is possible to appropriately detect a workpiece defect.

Block diagram of work processing apparatus according to Embodiment 1 Schematic diagram for explaining an example of a circular workpiece used in the workpiece processing apparatus (FIG. 2A), and a schematic diagram for explaining processing for obtaining workpiece correction information (FIG. 2B) ) Schematic diagram showing an example of an edge position detector of the work processing apparatus Top view showing an example of a workpiece transfer system equipped with the workpiece processing apparatus Diagram for explaining the relational expression used by the work processing device Flow chart for explaining the operation of the work processing apparatus Flowchart for explaining the operation of a workpiece transfer system provided with the workpiece processing apparatus The figure which shows the figure which shows the 1st rotation distance information management table | surface of the work processing apparatus The figure which shows the graph for demonstrating the 1st rotation distance information of the workpiece processing apparatus In the first rotation distance information of the workpiece processing apparatus, a graph in a range where the rotation angle is 0 ° or more and less than 90 ° (FIG. 10A), a graph in a range where the rotation angle is 90 ° or more and less than 180 ° (FIG. 10 ( b)), a graph with a rotation angle in the range of 180 degrees to less than 270 degrees (FIG. 10C), a graph with a rotation angle in the range of 270 degrees to less than 360 degrees (FIG. 10D), and a synthesized graph ( FIG. 10 (e)), a graph of a small change portion (FIG. 10 (f)) The figure which shows the synthetic | combination distance information management table | surface of the work processing apparatus The figure which shows the 2nd rotation distance information management table | surface of the work processing apparatus. The figure which shows the some 2nd rotation distance information of the workpiece processing apparatus The figure which shows the distance difference information management table | surface of the work processing apparatus A graph (FIG. 15 (a)) showing the relationship between the distance difference information acquired by the work processing apparatus and the rotation angle (FIG. 15 (a)), a graph (FIG. 15 (b)) for explaining the processing executed by the notch detection means, and , A graph for explaining the processing executed by the defect detection means (FIG. 15C) The figure which shows the output example of the work processing device Block diagram of work processing apparatus in embodiment 2. Schematic diagram showing an example of the work processing apparatus (FIG. 18A), and schematic diagram showing an example of an edge position detector of the work processing apparatus (FIG. 18B) The figure before rotation (FIG. 19 (a)) and the figure after rotation (FIG. 19b) for explaining the process of moving the defective part of the work processing apparatus into the imaging region. Flow chart for explaining the operation of the work processing apparatus The figure which shows an example of the image management table | surface of the work processing apparatus The figure which shows the example of a display of the work processing apparatus The figure which shows an example of the image condition information management table | surface of the work processing apparatus The figure which shows the example of a display of the work processing apparatus

  Hereinafter, embodiments of a work processing apparatus and the like will be described with reference to the drawings. In addition, since the component which attached | subjected the same code | symbol in embodiment performs the same operation | movement, description may be abbreviate | omitted again.

(Embodiment 1)
FIG. 1 is a block diagram of a work processing apparatus 1 in the present embodiment.

  The work processing apparatus 1 includes a first rotation distance information storage unit 101, an edge position detector 102, an acquisition unit 103, an output unit 104, an evaluation related information reception unit 105, and a setting unit 106.

  The acquisition unit 103 includes, for example, a combining unit 1031, a combining processing unit 1032, a correction information acquiring unit 1033, a second distance information acquiring unit 1034, a calculating unit 1035, a notch detecting unit 1036, and a defect detecting unit 1037.

  FIG. 2 is a schematic diagram (FIG. 2A) for explaining an example of a circular workpiece that is an acquisition target of the first rotation distance information according to the present embodiment, and a process of acquiring workpiece correction information. It is a schematic diagram (FIG.2 (b)) for demonstrating.

  FIG. 3 is a schematic diagram illustrating an example of the edge position detector 102 according to the present embodiment.

  FIG. 4 is a plan view illustrating an example of a workpiece transfer system 1000 including the workpiece processing apparatus 1 according to the present embodiment.

  The workpiece processing apparatus 1 detects, for example, processing for acquiring information for aligning the position and orientation of the workpiece 10 with respect to a circular workpiece (hereinafter also simply referred to as workpiece) 10 and a defective portion of an edge. It is a device that performs processing. The information for matching the position and orientation of the workpiece 10 is information used for enabling the workpiece 10 to be arranged in a predetermined direction at a predetermined position, for example.

  The circular workpiece 10 is, for example, a substrate such as a circular semiconductor wafer (hereinafter referred to as a wafer), a wafer attached to a reinforcing circular wafer table, or a circular glass substrate. . The material of the circular workpiece (for example, the material of the wafer) does not matter. The circular workpiece 10 does not have to be a perfect circle. For example, the circular workpiece 10 has a cutout portion such as an orientation flat (orientation flat) portion 17 or a notch portion (not shown) at a part of the edge 11. May be. The workpiece 10 may have two or more notches. The edge 11 of the workpiece 10 is, for example, a peripheral portion of the workpiece 10.

  The first rotation distance information storage unit 101 stores a plurality of pieces of first rotation distance information. The first rotation distance information is obtained by associating the rotation angle with the first distance information corresponding to the rotation angle when the circular workpiece 10 is rotated, for example, with one point on the workpiece 10 as the rotation center O. It is information to have. This is information regarding the distance from the rotation center of the workpiece 10 to the edge. The rotation center O of the work 10 does not necessarily need to coincide with the center Q of the work 10.

  The first distance information is information related to the distance from the rotation center O of the workpiece 10 to the edge 11 of the workpiece 10. The first distance information is, for example, information related to the distance to a position where a previously designated line segment with the rotation center O of the workpiece 10 as one end overlaps the edge 11 of the workpiece 10. The first distance information is, for example, the distance from the rotation center O of the workpiece 10 to the edge 11. The first distance information is, for example, as shown in FIG. 2, a sensor 15 such as a line sensor arranged along a predetermined line segment 14 with the rotation center O of the workpiece 10 as one end. Is a measured value related to the position of the edge 11 obtained by using, and a value obtained by using the measured value.

  Hereinafter, in the present embodiment, the first distance information is the distance r from the rotation center O of the workpiece 10 to the edge 11 acquired from the information indicating the position of the edge 11 of the workpiece 10 acquired by the sensor 15. A case will be described as an example.

  Note that the first distance information may be information indicating a value corresponding to the distance from the rotation center O of the workpiece 10 to the edge 11 of the workpiece 10. Information indicating a position from a reference position (for example, 0 point) to the edge 11 may be used. Further, it may be information indicating a part of the sensor 15 where the edge 11 is detected, for example, an element where the edge 11 is detected or an arrangement position thereof.

  The rotation angle is, for example, an angle at which the workpiece 10 is rotated when a value in a predesignated state such as a state before starting rotation or a state in which acquisition of the first distance information is started is set to an initial value such as 0 degrees. Value. The plurality of first rotation distance information stored in the first rotation distance information storage unit 101 includes, for example, first distance information obtained when the workpiece 10 is sequentially rotated by a predetermined angle and its rotation angle. Information. The plurality of first rotation distance information has, for example, rotation angles that are continuous at a predetermined angle interval. The angle designated in advance is a fixed angle, and is, for example, the minimum unit of the rotation angle when the workpiece 10 is rotated to acquire the first distance information. The angle designated in advance is preferably a value obtained by dividing 360 degrees by a multiple of 4, for example. The angle designated in advance is, for example, a value obtained by dividing 360 degrees by 1000 or 10,000, for example, 0.36 degrees, 0.036 degrees, or the like. The unit of the rotation angle is not limited.

  The first rotation distance information storage unit 101 stores, for example, a plurality of pieces of first rotation distance information acquired for each of one or more workpieces 10. For example, a plurality of pieces of first rotation distance information corresponding to each workpiece 10 is stored in association with a workpiece identifier that is an identifier of the workpiece 10.

  In the first rotation distance information storage unit 101, for example, a plurality of first rotation distance information corresponding to a plurality of rotation angles corresponding to at least one rotation, specifically, a plurality of rotation angles in a range from 0 to 360 degrees, for example. Stored. However, a plurality of pieces of first rotation distance information corresponding to a plurality of rotation angles less than one rotation may be stored. For example, a plurality of pieces of first rotation distance information corresponding to a rotation amount that is smaller than the minimum unit of the rotation angle by less than one rotation may be stored. Also, a plurality of first rotation distance information corresponding to a plurality of rotation angles corresponding to the number of rotations greater than one rotation, for example, a plurality of rotation angles corresponding to 1.5 rotations or two rotations may be stored. .

  In the present embodiment, as an example, a case where a plurality of pieces of first rotation distance information acquired by the edge position detector 102 is accumulated in the first rotation distance information storage unit 101 will be described. However, it does not matter how a plurality of first rotation distance information is accumulated in the first rotation distance information storage unit 101. For example, a plurality of first strong rotation information received by a receiving unit (not shown) via a storage medium, a communication line, or the like may be accumulated in the first rotational distance information storage unit 101.

  The storage here is a concept including temporary storage. For example, temporarily storing a plurality of pieces of first rotation distance information acquired for the workpiece by the edge position detector 102 may be considered as storage.

  The first rotation distance information storage unit 101 is preferably a non-volatile recording medium, but can also be realized by a volatile recording medium. The same applies to other storage units.

  The edge position detector 102 acquires a plurality of pieces of first rotation distance information for the workpiece 10. Specifically, the edge position detector 102 detects the edge position of the workpiece 10 and acquires a plurality of pieces of first rotation distance information about the workpiece. The edge position detector 102 accumulates the acquired plurality of first rotation distance information in the first rotation distance information storage unit 101.

  The edge position detector 102 includes, for example, a sensor 15 such as a line sensor, a turntable 52 that rotates the workpiece 10 placed thereon, and the like, each time the workpiece 10 is rotated by a rotation angle specified in advance. The first distance information and the rotation angle are sequentially acquired using the measured value indicating the position of the edge, for example, the measured value of the distance from the rotation center of the workpiece 10 to the edge. The rotation center of the workpiece 10 is, for example, the rotation center of a turntable that rotates the workpiece 10.

  The edge position detector 102 uses information for aligning the workpiece 10 output by the output unit 104 described later, for example, correction information, so that the center of the workpiece 10 is positioned at a position designated in advance. A moving means (not shown) for moving the position of the turntable 52 or the like may be provided. Further, the edge position detector 102 uses the information specifying the orientation of the workpiece 10 output from the output unit 104 described later, for example, information indicating the notch, so that the workpiece 10 faces the direction specified in advance. A control means (not shown) for rotating the turntable 52 may be provided.

  For example, when the edge position detector 102 acquires the first rotation distance information for different workpieces, the first rotation distance is obtained by associating the plurality of first rotation distance information acquired for each workpiece with the workpiece identifier of each workpiece. Accumulate in the information storage unit 101.

  A specific example of the edge position detector 102 will be described later.

  The acquisition unit 103 uses a plurality of pieces of first rotation distance information corresponding to a single workpiece stored in the first rotation distance information storage unit 101, and information for aligning the workpiece 10 and the orientation of the workpiece 10 And information on the defect portion of the edge 11 of the workpiece 10 are acquired.

  The information for aligning the workpiece 10 is information used for arranging the workpiece 10 at a predetermined position, for example. The information for aligning the workpiece 10 is, for example, information indicating a deviation between a position where the workpiece 10 is originally arranged and a position where the workpiece 10 is actually arranged. Further, the information for aligning the workpiece 10 is, for example, correction information. This correction information is, for example, correction information acquired by the correction information acquisition unit 1033. The correction information will be described later. Information for aligning the workpiece 10 may be acquired by the acquisition unit 103 in any manner. For example, the acquisition unit 103 may acquire information for alignment using a conventional technique as described above. In the present embodiment, as a specific example of processing for acquiring information for alignment by the acquisition unit 103, processing for acquiring information for alignment by the correction information acquisition unit 1033 will be described later.

  The information for specifying the direction of the workpiece 10 is information used for arranging the workpiece in a predetermined direction, for example. The information for specifying the orientation of the workpiece 10 is information indicating a notch portion such as an orientation flat portion or a notch portion for specifying the orientation of the workpiece, for example. The information indicating the notch is information indicating the position of the notch, for example. Further, the information indicating the notch portion may further include information such as the size of the notch portion. Information indicating this notch is acquired by, for example, the notch detection means 1036. Information for specifying the direction of the workpiece 10 may be acquired by the acquisition unit 103 in any manner. For example, the acquisition unit 103 may acquire information for specifying the orientation of the workpiece using the conventional technique as described above.

  For example, the acquisition unit 103 detects a notch using one or more threshold values related to the size of the notch, and acquires information indicating the notch when the notch is detected. . The threshold value of 1 or 2 or more relating to the size of the notch is, for example, 1 or 2 or more of thresholds for at least one of the width of the notch and the distance from the edge. For example, the threshold value of 1 or 2 or more regarding the size of the notch portion indicates a threshold value indicating a lower limit value for the distance from the edge of the notch portion, and a lower limit value and an upper limit value of the width of the notch portion, respectively. It is a threshold value. The lower limit of the distance from the edge of the notch is, for example, from the original edge position when the notch has a notch at the part of the notch that has a large distance from the edge, for example, the part with the largest distance. Is the lower limit of the distance.

  For example, the acquisition unit 103 detects a continuous area that is concave toward the inside of the work 10 at the edge 11 of the work 10 by using a plurality of pieces of first rotation distance information, and the edge is included in the area that is the concave. It is determined whether or not there is a portion whose depth from the edge, that is, the distance from the edge is equal to or greater than a threshold value that is a lower limit value of the distance from the edge of the notch. A certain area may be determined as a notch, and information indicating the position of this area, for example, information on the range of the rotation angle may be acquired as information indicating the notch.

  In addition, a continuous area | region is a part in which the order which the 1st distance information acquired is continuous, for example, and the rotation angle which the 1st distance information respond | corresponds. For example, the acquisition unit 103 can detect continuous concave portions and continuous convex portions from the difference between the first rotation distance information and the radius of the workpiece 10 or the distance from the rotation center of the workpiece 10 to the edge. is there. Moreover, you may detect the both ends of the concave part which exists in the edge 11 of the workpiece | work 10, and the convex part, for example by performing a 2nd-order differentiation with respect to continuous 1st distance information. Then, from the difference between the value of the first rotation distance information in the area sandwiched between the parts thus detected and the radius of the workpiece 10 similar to the above, the detected area is concave or convex. Can be determined. Then, by determining whether or not the region of the edge 11 of the workpiece 10 determined to be concave in this way is a notch using the threshold value as described above, the acquisition unit 103 can May be detected. In addition, since the process which detects the notch part and defect part of the edge 11 by performing a 2nd-order differentiation etc. in this way is known, detailed description is abbreviate | omitted here.

  Note that using a plurality of pieces of first rotation distance information is a concept including using information obtained by using a plurality of pieces of first rotation distance information, for example, distance difference information described later.

  Further, the acquisition unit 103 detects, for example, a continuous region that is concave toward the inside of the workpiece 10 at the edge 11 of the workpiece 10 by using a plurality of pieces of first rotation distance information, and the width of the region that is the concave is determined. , It is determined whether or not the width of the cutout portion is within the range of the threshold value respectively indicating the lower limit value and the upper limit value, and if within the range, this concave region is determined as the cutout portion, You may make it acquire the information which shows the position of an area | region, for example, the information of the range of a rotation angle as information which shows a notch part.

  Alternatively, by combining the determination based on the distance from the edge and the determination based on the width described above, when the distance from the edge is equal to or greater than the threshold and the width is within the range indicated by the threshold, the continuous region is cut out. You may make it judge.

  In the present embodiment, as a specific example of the process in which the acquisition unit 103 acquires information for specifying the orientation, a process in which the notch detection unit 1036 acquires information indicating the notch will be described later.

  The information regarding the defective part is, for example, information indicating a position where the defective part of the workpiece 10 exists, specifically, a rotation angle or a range of a region where the defective part exists (for example, information indicating a range of the rotation angle). is there. The information on the defective part is information indicating the size of the defective part, for example, the distance from the edge, specifically the depth and height of the defective part, and the width of the defective part. The information regarding the defective part may further include an identifier for identifying the defective part and an identifier for the workpiece 10. The defective portion is, for example, a burr on the edge 11 of the workpiece 10, chipping, dust, or the like. Further, the information regarding the defective portion may be information indicating whether or not there is a defective portion. Further, the information regarding the defective portion may be information indicating whether the defective portion is a concave portion or a convex portion of the edge 11 of the workpiece 10. For example, the information regarding the defect portion is information regarding the defect portion acquired by the defect detection means 1037.

  For example, the acquisition unit 103 detects a defective part using one or two or more threshold values related to the size of the defective part, and acquires information on the defective part when the defective part is detected. The threshold value of 1 or 2 or more regarding the size of the defective portion is, for example, 1 or 2 or more threshold values for at least one of the width of the defective portion and the distance from the edge.

  For example, for the plurality of pieces of first rotation distance information, the acquisition unit 103 indicates a distance indicating a difference from the distance from the rotation center of the workpiece 10 to the edge (or the radius of the workpiece 10) when the edge 11 has no defective portion. The first rotation distance information that is calculated and the distance is equal to or greater than the lower limit value of the distance of the defective portion is detected, and when it is detected, information about the defective portion is acquired. For example, the acquisition unit 103 acquires information on the rotation angle included in the first rotation distance information, etc., as information regarding the defective portion. Note that detecting the first rotation distance information is a concept including detecting the first distance information included in the first rotation distance information and detecting the rotation angle.

  Moreover, the acquisition part 103 is convex toward the outer side of the workpiece | work 10 or the continuous area | region which is concave toward the inner side of the workpiece | work 10 in the edge 11 of the workpiece | work 10, for example using several 1st rotation distance information. A certain continuous area is detected, and whether or not there is a part within the concave area or the convex area whose distance from the edge is equal to or larger than a threshold that is the lower limit of the distance from the edge of the defective part. If it is determined that there is a portion that is equal to or greater than the threshold value, the concave region or the convex region may be determined as a defective portion, and information on the defective portion, for example, information on a rotation angle range may be acquired.

  The distance from the edge here is, for example, a distance from the edge when there is no defect or notch, or a distance based on an ideal workpiece edge without a defect or notch. . Here, the distance from the edge is, for example, a distance in a direction from the edge of the workpiece 10 toward the rotation center of the workpiece 10 or a distance in a direction from the edge in a direction opposite to the rotation center of the workpiece 10. For example, the distance from the edge here is the distance from the edge to the notch or the distance from the edge to the defect when the work has no notch or defect. The distance from the edge here may be considered as the depth of the region that is the concave of the edge or the height of the region that is convex. Here, the distance from the edge may be considered as the magnitude of the distance from the edge, the depth or height of the notch or defective part, or the absolute value. The same applies to the following.

  As described above, both ends of the concave portion and the convex portion existing on the edge 11 of the workpiece 10 may be detected by performing second-order differentiation on the continuous first distance information, for example. Then, the acquisition unit 103 detects the defective portion by determining whether the region of the edge 11 of the workpiece 10 sandwiched between the detected portions is a defective portion using the threshold value as described above. May be.

  Moreover, the acquisition part 103 is convex toward the outer side of the workpiece | work 10 or the continuous area | region which is concave toward the inner side of the workpiece | work 10 in the edge 11 of the workpiece | work 10, for example using several 1st rotation distance information. A certain continuous area is detected, and it is determined whether or not the width of the concave area or the convex area is equal to or larger than a threshold value that is a lower limit value of the width of the defect portion. Information regarding the defective portion may be acquired by determining a concave region or a convex region as a notch. In addition, as a threshold value which is a lower limit value, a different threshold value may be used depending on whether the continuous region is concave or convex, or the same threshold value may be used.

  Alternatively, the determination based on the distance from the edge and the determination based on the width are combined, and when the distance from the edge is equal to or larger than the threshold and the width is equal to or larger than the threshold, the continuous area is determined as the defective portion. It may be.

  The acquisition unit 103 compares the number of notches for specifying the orientation of the workpiece detected using the plurality of first rotation distance information with the number of notches originally provided in the workpiece 10. However, when the numbers of both are different, information regarding a defective portion indicating that the edge has a defect may be acquired.

  Further, when detecting the defective portion, the acquisition unit 103 may perform detection by excluding the region where the notch portion for specifying the orientation of the workpiece is arranged or detected. When the defective portion is in the region where the cutout portion is arranged, information regarding the detected defective portion may not be acquired.

  The acquisition unit 103 can be usually realized by an MPU, a memory, or the like. The processing procedure of the acquisition unit 103 is usually realized by software, and the software is recorded in a recording medium such as a ROM. However, it may be realized by hardware (dedicated circuit).

  In the present embodiment, in particular, the acquisition unit 103 includes a combining unit 1031, a combining processing unit 1032, a correction information acquiring unit 1033, a second distance information acquiring unit 1034, a calculating unit 1035, a notch detecting unit 1036, a defect A case where the detection unit 1037 is provided will be described as an example.

  The synthesizing unit 1031 synthesizes a plurality of pieces of first distance information whose corresponding rotation angles are different by 90 degrees from among the first distance information included in the plurality of first rotation distance information. The plurality of first rotation distance information here is a plurality of first rotation distance information for one workpiece 10 stored in the first rotation distance information storage unit 101.

  Combining a plurality of first distance information having different rotation angles by 90 degrees means, for example, combining a pair of a plurality of first distance information whose corresponding rotation angle difference is an integer multiple of 90 degrees. You may think. The integer multiple of 90 degrees is, for example, 90 degrees, 180 degrees, 270 degrees, or the like.

  The synthesizing unit 1031 synthesizes four pieces of first distance information having different corresponding rotation angles by 90 degrees from among the first distance information included in the plurality of first rotation distance information, for example. This may be considered, for example, as a combination of a plurality of sets of first distance information whose corresponding rotation angle difference is n (n is an integer from 1 to 3) times 90 degrees. Good.

Here, the first distance information obtained by combining a plurality of pieces of first distance information is referred to as combined distance information. The combining unit 1031 usually acquires a plurality of combined distance information. Here, combining means, for example, combining a plurality of pieces of first distance information into one. The synthesis here may be, for example, obtaining an average value of a plurality of pieces of first distance information or adding a plurality of pieces of first distance information. Moreover, you may calculate the average of the difference of several 1st distance information. For example, the synthesizing unit 1031 has corresponding rotation angles of θ ₀ , θ ₀ +90 degrees, θ ₀ +180 degrees, and θ ₀ +270 degrees among the first distance information included in the plurality of first rotation distance information. A combination of a plurality of first distance information is combined to acquire combined distance information.

  The synthesizing unit 1031 may synthesize a plurality of pieces of first distance information whose corresponding rotation angles are different by 90 degrees. For example, the synthesizing unit 1031 divides a plurality of pieces of first rotation distance information in which corresponding rotation angle values are continuous into a plurality of sets so that the rotation angle value range is 90 degrees. The combination as described above may be performed by combining the first distance information included in the first rotation distance information having the same arrangement order in each group.

  That the value of the rotation angle is continuous means that, for example, the value of the rotation angle is continuous for each unit of rotation angle when the workpiece 10 is rotated every time the first distance information is acquired. To do. Here, the fact that the values of the rotation angles are continuous is referred to as the rotation angles being continuous as appropriate.

  Here, the order of arrangement is, for example, the order of arrangement when the divided sets of first rotation distance information are arranged in ascending or descending order of rotation angles of the first rotation distance information.

  For example, assuming that a plurality of pieces of first rotation distance information having a rotation angle of 0 degree or more and less than 360 degrees acquired by rotating the workpiece once, etc. are stored in the first rotation distance information storage unit 101. First, the synthesizing unit 1031 performs the first rotation so that the corresponding rotation angle range is 0 degree or more and less than 90, 90 degree or more and less than 180 degree, 180 degree or more, less than 270 degree, 270 degree or more and less than 360 degree. Divide the distance information into four. The synthesizing unit 1031 then synthesizes the values of the first distance information included in the first rotation distance information of each divided range for each rotation angle arrangement order, for example, ascending order or descending order of the rotation angles. Acquire a plurality of composite distance information. Thereby, the four first distance information whose corresponding rotation angles are different by 90 degrees can be synthesized respectively. It should be noted that the range of the rotation angle at the time of division does not have to start from 0 degrees, and for example, the rotation angle range may be set every 15 degrees to 90 degrees.

  Further, the first rotation distance information is sequentially acquired one by one from a plurality of continuous first rotation distance information whose rotation angle range is within a range of 90 degrees, and the rotation is performed for each acquired first rotation distance information. First rotation distance information having a rotation angle obtained by adding 90 degrees, 180 degrees, and 270 degrees to the angle is detected, and the acquired first rotation distance information and the detected first rotation distance information respectively have You may make it synthesize | combine 1st distance information. As a result, the four pieces of first distance information whose corresponding rotation angles are different from each other by 90 degrees can be sequentially combined.

  In this way, by sequentially combining a plurality of, preferably four, sets of first distance information whose rotation angles are different by 90 degrees, for example, the rotation center O of the work 10 is deviated from the center Q of the work 10. The increase / decrease in the generated first distance information can be canceled out.

  In addition, each synthetic | combination distance information obtained by synthesize | combining is matched and stored the group of the some rotation angle corresponding to the some 1st distance information before a synthesis | combination, for example. Alternatively, a part of the set of rotation angles, for example, the rotation angle having the smallest value among the corresponding rotation angles may be stored in association with each other.

  The synthesizing unit 1031 can usually be realized by an MPU, a memory, or the like. The processing procedure of the synthesizing unit 1031 is usually realized by software, and the software is recorded on a recording medium such as a ROM. However, it may be realized by hardware (dedicated circuit).

  The combination processing unit 1032 is a plurality of combination distance information that is obtained by combining the first distance information by the combination unit 1031 and is a plurality of combination distance information in which corresponding rotation angles are continuous, A plurality of combined distance information having a small change in size is detected. The synthesis processing unit 1032 then includes a plurality of first distance information before synthesis corresponding to one or more of the detected plurality of synthesis distance information and one or more first distance information of the plurality of first distance information before synthesis. The rotation angle corresponding to the one-distance information is acquired.

  The magnitude of the value of the combined distance information is, for example, the absolute value of the combined distance information. A plurality of composite distance information with a small change in value size is, for example, a plurality of continuous composite distances in which the maximum value of the value magnitude change amount is smaller than other continuous composite distance information Information. The plurality of continuous composite distance information is composite distance information that is continuous two or more numbers specified in advance. Here, “continuous” means that one or more rotation angles corresponding to the combined distance information are continuous. As described above, in the combined distance information, the increase or decrease in the first distance information that occurs when the rotation center O of the workpiece 10 is deviated from the center Q of the workpiece 10 has been canceled out, and thus the magnitude change has occurred. The combined distance information of the large portion is, for example, a portion with unevenness of the edge 11 of the workpiece 10. The irregularities of the edge 11 are notched portions such as the orientation flat portion 17 and the notch portion, and burrs, chipping, dust, and the like of the workpiece 10. Chipping is, for example, a missing portion such as a crack or chip in the edge of the workpiece 10. The combined distance information of the portion where the change in size is small is, for example, a portion having no unevenness or a small portion, and the change in size in this portion is due to, for example, an error during measurement.

  The combination processing unit 1032 corresponds to, for example, the combination distance information remaining after excluding the combination distance information having a large amount of change in value as a plurality of combination distance information having a small change in value. A plurality of combined distance information with continuous rotation angles is acquired.

  The combination processing unit 1032 includes, for example, first processing for detecting one or more combined distance information in descending order of the plurality of combined distance information combined by the combining unit 1031 and one or more in order from the smallest value. At least one of the second process for detecting the combined distance information is executed once or more. Note that the composite distance information remaining without being detected in the first process and the second process corresponds to a plurality of composite distance information in which a change in the magnitude of the value detected by the composite processing unit 1032 is small. Note that the detection of synthesis processing information here may be considered as detection of synthesis processing information to be excluded.

  The first process is, for example, a process for detecting the maximum combined distance information for a plurality of combined distance information combined by the combining unit 1031. Specifically, it is a process of detecting the maximum value of the combined distance information from the undetected combined distance information. Further, the second process is a process of detecting the minimum combined distance information for a plurality of combined distance information combined by the combining unit 1031, for example. Specifically, it is a process of detecting the minimum synthetic distance information from the undetected synthetic distance information.

  The synthesis processing unit 1032 preferably executes the first process and the second process a plurality of times. The plurality of first processes and the plurality of second processes may be executed a plurality of times in any order. For example, the first process and the second process may be alternately performed once. Alternatively, the second process may be performed a plurality of times after the first process is performed a plurality of times. Further, either the first process or the second process may be executed first.

  When the first process is repeated, the combined distance information that has already been detected in the process up to immediately before is excluded from the detection target. For example, information such as a flag indicating that detection has been performed is associated with the detected combined distance information, and the combined distance information associated with the information such as the flag is not detected in the subsequent detection process. Do not detect. The same applies to the case where the second process is repeated.

  In addition, the synthesis processing unit 1032 sequentially deletes the composite distance information detected in the first process, the second process, and the like, or adds information such as a flag indicating deletion to the detected one. May be. In this case, for example, the combination processing unit 1032 may detect the maximum combination distance information from the combination distance information that has not been deleted in the first process. Further, for example, in the second process, the synthesis processing unit 1032 may detect the minimum value of the synthesis distance information from the synthesis distance information that has not been deleted.

  In the case where the first process is repeatedly executed, the composition processing unit 1032 repeatedly executes the first process until, for example, a condition specified in advance is satisfied. The predesignated condition is, for example, a predesignated number. For example, detecting the combined distance information until a prespecified condition is satisfied means detecting the combined distance information until a predetermined number is reached. Further, the condition designated in advance may be that the difference between the maximum value and the minimum value of the composite distance information remaining without being detected is equal to or less than a threshold value designated in advance. The same applies to the second process.

  When the above-described predesignated condition for the repetition of the first process and the repetition of the second process is the number of times, the number of times that is the condition of the first process and the number of times that is the condition of the second process May be a different number of times. For example, when the composite distance information is obtained by combining the first distance information indicating the distance from the rotation center of the workpiece 10 to the edge, the first distance usually acquired at a notch portion such as an orientation flat portion or a notch portion. The combined distance information obtained by combining a plurality of first distance information including information has a smaller value than the combined distance information acquired in other portions, and the range of the rotation angle where such a notch exists is wide. Therefore, in order to detect the synthetic distance information corresponding to such a notch as a portion having a large change, the number of detections with a small value of the synthetic distance information is more than the number of detections with a large value. It is preferable to set so as to be a large number. For this reason, in such a situation, the value of the number of repetitions, which is a predesignated condition for the second process, is greater than the value of the number of repetitions, which is a predesignated condition for the first process. It is preferable to set a small value.

  The combination processing unit 1032 may, for example, set one or more of a plurality of combination distance information that is continuous for a predetermined number or more among the combination distance information that remains without being detected in the first process and the second process. A plurality of corresponding first distance information before synthesis and a rotation angle corresponding to one or more of the plurality of first distance information are acquired. The number designated in advance is a number of 2 or more.

  Alternatively, the composition processing unit 1032 may, for example, set one or more of the plurality of composition distance information having the largest consecutive number of composition distance information remaining without being detected in the first process and the second process. A plurality of corresponding first distance information before synthesis and a rotation angle corresponding to one or more of the plurality of first distance information are acquired.

  The synthesis processing unit 1032 detects, for example, a plurality of synthesized distance information whose corresponding rotation angles are continuous and has a small change in the magnitude of the value, and the detected plurality of synthesized distance information. Four first distance information before synthesis corresponding to one of the information and a rotation angle corresponding to one first distance information among a plurality of first distance information before synthesis. The four pieces of first distance information before synthesis are four pieces of first distance information whose corresponding rotation angles are different by 90 degrees. The four first composite distances indicate the distances between the four points where two orthogonal straight lines passing through the rotation center intersect the edge of the workpiece 10 and the rotation center of the workpiece.

  For example, one or two or more of the first distance information to be acquired as the rotation angle corresponding to one or more first distance information of the plurality of first distance information before the synthesis is described later. When the correction information acquisition unit 1033 to acquire the correction information is determined according to what rotation angle is used. For example, when one composite distance information is obtained by combining four pieces of first distance information having different rotation angles by 90 degrees, the composite processing unit 1032 displays a plurality of composite distance information whose value magnitude is small. A rotation angle corresponding to one of the four first distance information before combining corresponding to one of the detected plurality of combined distance information and substantially having the smallest value is acquired. Alternatively, a rotation angle corresponding to four first distance information before combining corresponding to one of a plurality of detected combination distance information, and one rotation angle within a range from 0 to 90 degrees is acquired. You may make it do. For example, a rotation angle of 360 degrees + D degrees (D is a positive value) may be considered to be substantially D degrees. The -D degree may be considered to be substantially 360 degrees -D degrees.

  In order to detect the composite distance information corresponding to the orientation flat portion 17 as described above, the composite processing unit 1032 may collectively detect a plurality of composite distance information smaller than the average value of the composite distance information. good.

  In the above, the composition processing unit 1032 detects a plurality of composition distance information having a large value or a composition distance information having a small value and excludes them, thereby removing a plurality of continuous plural values having a small value change. Although the combined distance information is detected, in the present invention, the combining processing unit 1032 may detect a plurality of continuous combined distance information with a small change in value magnitude.

  For example, the synthesis processing unit 1032 detects continuous synthesized distance information having a large change in value using a value obtained by performing differentiation, second-order differentiation, or the like on continuous synthesized distance information. Then, by excluding these, it is also possible to detect a plurality of continuous synthetic distance information with small changes in value magnitude. For example, the synthesis processing unit 1032 detects a value that is equal to or greater than a predetermined threshold value in a value obtained by performing second-order differentiation or the like on continuous synthesized distance information, and a value that is equal to or greater than the threshold value is detected. The combined distance information from the rotation angle to the next rotation angle at which a value equal to or greater than the threshold value is detected is detected as the combined distance information with a large change in value, and the detected combined distance information is excluded. You may make it detect continuous synthetic | combination distance information among synthetic | combination distance information as several continuous synthetic | combination distance information with a small change of the magnitude | size of a value.

  The synthesis processing unit 1032 can be usually realized by an MPU, a memory, or the like. The processing procedure of the synthesis processing unit 1032 is usually realized by software, and the software is recorded on a recording medium such as a ROM. However, it may be realized by hardware (dedicated circuit).

  The correction information acquisition unit 1033 uses the rotation center of the workpiece 10 as the center of the workpiece 10 as information for aligning the workpiece 10 using the plurality of first distance information and rotation angles acquired by the synthesis processing unit 1032. The correction information for adjusting to is acquired. The correction information may be considered as information for moving the rotation center of the workpiece 10 to the center of the workpiece 10 or information indicating the direction and size of the positional deviation. The correction information is, for example, information indicating the movement direction of the rotation center, for example, a combination of an angle with respect to a direction specified in advance and a movement distance. Further, the correction information may be a vector indicating the moving direction and moving distance of the center of the workpiece 10. Further, the correction information is along each coordinate axis for moving the rotation center of the workpiece 10 onto the center of the workpiece 10 when the center of the workpiece 10 and the rotation center of the workpiece 10 are arranged in the orthogonal coordinate system. It may be information indicating the amount of movement.

  The correction information acquisition unit 1033 uses, for example, four pieces of first distance information with different corresponding rotation angles acquired by the synthesis processing unit 1032 by 90 degrees and the rotation angle corresponding to one of them, to rotate the workpiece 10. Correction information for moving the center to the center of the workpiece 10 is acquired.

Hereinafter, an example of the correction information acquisition process will be described with reference to FIG. Incidentally, in FIG. 2 (b), the first distance information _{r a, r b, r c} , r d the synthesis processing unit 1032 obtains the first synthetic distance information, rotation angle corresponding different by 90 degrees 4 It is assumed that the rotation angles corresponding to the first distance information are θ, θ + 90, θ + 180, and θ + 270, respectively. However, θ is an arbitrary value. Here, for example, θ is an angle in the range of 0 to 90 degrees. The points P _a , P _b , P _c , and P _d are points on the edge 11 of the workpiece 10 corresponding to the first distance information r _a , r _b , r _c , and r _d. The distances of the line segments connecting P _a , P _b , P _c , and P _d are the first distance information r _a , r _b , r _c , and r _d , respectively. A line segment connecting the point P _a and the point P _c and a line segment connecting the point P _b and the point P _d are orthogonal to each other at the rotation center O. Here, for convenience of explanation, the rotation center O of the workpiece 10 is arranged at the origin of the xy coordinates. Here, it is assumed that the rotation direction of the workpiece 10 is clockwise. It is assumed that the angle formed by the line segment corresponding to the first distance information ra and the x axis is the rotation angle θ, and the counterclockwise direction is a positive value. An angle α formed by a line segment connecting the rotation center O of the workpiece 10 and the center Q of the workpiece 10 with the x axis is information indicating the moving direction in the correction information, and the counterclockwise direction is a positive value here. Suppose that The length h of the line segment connecting the rotation center O of the workpiece 10 and the center Q of the workpiece 10 is information indicating the movement amount (movement distance) in the correction information. A sensor (not shown) for acquiring the first distance information is arranged on the y axis along the y axis, for example.

In FIG. 2B, when _a symmetric line segment is drawn to the line segment connecting the point P _a and the point P _c with respect to the center Q of the workpiece 10 and the line segment connecting the point P _b and the point P _d , The information α indicating the movement direction as correction information and the length h indicating the movement amount can be obtained from the following equations.

In the above equation, since r _a −r _c and r _b −r _d are the difference in distance, the above equation indicates that the first distance information is a reading value of a sensor or the like, or a reference point of the sensor. It can be seen that it is also established when the distance is from the same.

  The correction information acquisition process described above is merely an example, and in the present invention, how the correction information is obtained from the combination of the first distance information acquired by the synthesis processing unit 1032 and the rotation angle. It doesn't matter if you get it.

  In the above description, the correction information acquisition unit 1033 acquires correction information using the four pieces of first distance information and one rotation angle acquired with respect to one combination distance information acquired by the combination processing unit 1032. However, correction information is acquired in the same manner as described above for a plurality of sets of first distance information and rotation angles acquired by the combination processing unit 1032 for each of a plurality of combination distance information, and the correction information acquired for each set is obtained. The average value may be acquired as final correction information.

  The correction information acquisition unit 1033 can be usually realized by an MPU, a memory, or the like. The processing procedure of the correction information acquisition unit 1033 is usually realized by software, and the software is recorded on a recording medium such as a ROM. However, it may be realized by hardware (dedicated circuit).

  The second distance information acquisition unit 1034 uses the correction information acquired by the correction information acquisition unit 1033 to change the rotation angle in the case where the workpiece 10 is a circle having no irregularities on the edge 11 and the rotation angle corresponding to the rotation angle. A relational expression indicating the relationship with the two-distance information is acquired. The second distance information is information related to the distance from the rotation center of the workpiece 10 having no irregularities on the edge 11 to the edge 11. Then, the second distance information is acquired by substituting a plurality of rotation angles corresponding to the plurality of first rotation distance information stored in the first rotation distance information storage unit 101 into the acquired relational expression.

  The second distance information is information similar to the first distance information, for example. The second distance information is, for example, distance information corresponding to the first distance information acquired when a circular workpiece having no irregularities on the edge 11 is placed instead of the workpiece 10.

  The circular workpiece having no irregularities on the edge 11 is, for example, a circular workpiece having no orientation flat portion, notch portion, burr, chipping or dust at the edge, and is ideally the same size as the workpiece 10. It may be considered as a workpiece of a simple shape.

  The relational expression is, for example, an expression showing the relation between the rotation angle and the second distance information corresponding to the rotation angle when the workpiece 10 that is a circle having no irregularities on the edge 11 is rotated. The relational expression here may be considered as an expression representing an ideal curve indicating the relation between the rotation angle of the workpiece 10 and the distance from the rotation center to the edge according to the rotation angle. The second distance information may also be considered as an ideal distance from the rotation center of the workpiece 10 to the edge. The relational expression is an approximate expression that approximates the relation between the rotation angle and the second distance information according to the rotation angle when the circular workpiece 10 having no irregularities on the edge 11 is rotated. Also good.

  The acquisition of the relational expression here refers to reading a relational expression stored in advance in a storage medium (not shown), determining a coefficient value or the like of the read relational expression, or substituting the coefficient value. It is a concept that includes things.

  For example, the second distance information acquisition unit 1034 may acquire the relational expression using the radius of the workpiece 10 in addition to the angle indicating the moving direction and the length indicating the moving amount as the correction information. The radius of the workpiece 10 may be read as appropriate by storing it in a storage unit (not shown) in advance.

  Hereinafter, an example of the relational expression will be described.

  FIG. 5 is a schematic diagram for explaining a relational expression used when acquiring the second distance information. In the figure, the same reference numerals as those in FIG. 2B indicate the same or corresponding parts. However, in FIG. 5, unlike FIG.2 (b), the workpiece | work 10 assumes that it is a workpiece | work of the radius a without an unevenness | corrugation in an edge. 5 shows an example in which the center of rotation of the workpiece 10 is located at a place other than the workpiece for convenience of explanation. However, the center of rotation may be located on the workpiece.

When the edge of the circular workpiece 10 in which the rotation center O is shifted from the center Q as shown in FIG. 5 is expressed in polar coordinates, the following equation is obtained.

When this expression is expanded with respect to r _i , the following expression is obtained.

This expression (3) is an expression showing the relationship between the rotation angle and the second distance information corresponding to the rotation angle when the workpiece 10 that is a circle having no irregularities on the edge 11 is rotated. For example, the expression (3) is stored in advance in a storage unit (not shown), and the second distance information acquisition unit 1034 reads this expression, and the expression (1) and the expression (1) are added to the expression (3). The correction information acquired using (2), specifically, the value of the angle α that is information indicating the moving direction, the value of the length h that is information indicating the moving amount, and the radius a of the workpiece 10 are substituted. doing, to obtain if the workpiece 10 is circular with no uneven edges 11, the rotation angle theta, the relational expression showing the relationship between the second distance information r _i corresponding to the rotation angle. Hereinafter, the relational expression in which α and the value of the length h are substituted is referred to as an ideal curve expression.

  It is most preferable to obtain the ideal curve equation shown here, but as a relational expression, another approximate expression, for example, an approximate expression created using a sine curve or the like may be acquired.

  In the above, the correction information acquisition unit 1033 uses one or more sets of the plurality of first distance information and rotation angles acquired by the synthesis processing unit 1032 from the equations (1) and (2). Correction information was acquired. However, in the present invention, the correction information acquisition unit 1033 adds the plurality of first distance information acquired by the combination processing unit 1032 for one or more pieces of combined distance information and the plurality of first distances to the above equation (3). The correction information may be obtained by creating simultaneous equations by substituting a plurality of sets of rotation angles corresponding to the respective information, and solving the simultaneous equations. Moreover, you may make it substitute the radius of the workpiece | work 10 suitably with respect to this simultaneous equation suitably. This is the same when other approximate equations are used.

  The second distance information acquisition unit 1034 substitutes a plurality of rotation angles corresponding to the plurality of first rotation distance information stored in the first rotation distance information storage unit 101 in the acquired relational expression, for example, an ideal curve expression. To obtain second distance information. Note that the plurality of rotation angles corresponding to the plurality of first rotation distance information does not necessarily have to be read from the first rotation distance information storage unit 101, and the plurality of rotations included in the plurality of first rotation distance information. A plurality of rotation angles may be substantially the same as the angle. For example, a plurality of substantially the same rotation angles may be acquired and used. For example, each time one piece of first distance information is acquired from the work 10, using a value of an angle for rotating the work 10 or the like, for example, by sequentially adding the values of this angle, a plurality of pieces of first rotation distance information are obtained. A plurality of rotation angles substantially the same as the plurality of rotation angles may be acquired.

The second distance information acquisition means 1034 associates the second distance information acquired by sequentially substituting a plurality of rotation angles into the relational expression, for example, the second distance information r _i with the rotation angle, a storage unit (not shown), etc. To accumulate. The accumulation here may be temporary storage. Each set of second distance information and rotation angle acquired and accumulated by the second distance information acquisition means 1034 is referred to as second rotation distance information here. Note that the second distance information acquisition unit 1034 may be considered to acquire the second rotation distance information.

  The second distance information acquisition unit 1034 can be usually realized by an MPU, a memory, or the like. The processing procedure of the second distance information acquisition unit 1034 is usually realized by software, and the software is recorded in a recording medium such as a ROM. However, it may be realized by hardware (dedicated circuit).

  The calculation unit 1035 uses the plurality of first rotation distance information stored in the first rotation distance information storage unit 101 and the plurality of second distance information acquired by the second distance information acquisition unit 1034 to perform the same rotation. The difference between the first distance information associated with the angle and the second distance information is acquired. For example, the calculation unit 1035 stores the first distance information and the second distance information associated with the same rotation angle in the storage unit (not shown) by the first rotation distance information and the second distance information acquisition unit 1034, respectively. Calls sequentially from the second rotation distance information, and obtains the difference. The difference here may be a value obtained by subtracting the value of the second distance information from the value of the first distance information, or the opposite value. Further, if only a portion having an edge defect is detected, the difference here may be the magnitude of the difference, for example, the absolute value of the difference. Note that the difference between the first distance information and the second distance information is referred to herein as distance difference information.

  For example, the calculation unit 1035 associates the acquired distance difference information with the rotation angle and accumulates the information in a storage unit (not shown) or the like. The accumulation here may be temporary storage.

  The calculation means 1035 can be usually realized by an MPU, a memory, or the like. The processing procedure of the calculation means 1035 is usually realized by software, and the software is recorded on a recording medium such as a ROM. However, it may be realized by hardware (dedicated circuit).

  The notch detection means 1036 uses the difference between the first distance information and the second distance information calculated by the calculation means 1035, that is, the distance difference information as information for specifying the orientation of the work 10, and the notch portion of the work 10 is used. Get information indicating The cutout portion is a portion such as an orientation flat portion or a notch portion provided on the edge 11 of the workpiece 10 for specifying the orientation of the workpiece 10 as described above. The information indicating the notch is, for example, information indicating a rotation angle range indicating a portion of the work 10 provided with the notch, or information indicating a plurality of first distance information acquired for the notch. is there.

  The notch detection unit 1036 uses, for example, the difference between the first distance information and the second distance information calculated by the calculation unit 1035, that is, the distance difference information, and one or more threshold values related to the size of the notch. A notch provided in the edge 11 of the workpiece 10 may be detected, and information indicating the detected notch may be acquired.

  As described above, the one or more threshold values regarding the size of the notch are a threshold value regarding the distance from the edge of the notch portion and a threshold value regarding the width of the notch portion.

  The notch detection means 1036 is, for example, a continuous region in which the edge 11 is concave toward the inside of the workpiece 10 using the distance difference information calculated by the calculation means 1035, and is a pre-designated notch portion. An area having distance difference information equal to or greater than a threshold value indicating a lower limit value of the distance from the edge and having a width within a threshold value range indicating a lower limit value and an upper limit value of the width of the notch portion specified in advance. Is detected. And the information which shows the position corresponding to the detected area, for example, the information which shows the plurality of first distance information acquired about the rotation angle and the detected area, shows the notch provided in the edge 11 of the workpiece 10 Obtain as information.

  For example, the continuous region in which the edge 11 is concave toward the inside of the work 10 is distance difference information indicating that the position indicated by the first distance information is located inside the work than the position indicated by the second distance information. It can be detected by detecting a continuous area associated with. For example, when the first distance information is the distance from the rotation center of the workpiece 10 to the edge 11 and the distance difference information is a value obtained by subtracting the first distance information from the second distance information, the distance difference information of the edge 11 A continuous area where is a positive value can be detected as a continuous area which is concave. When the measurement error or the like of the first distance information is taken into consideration, the value of the measurement difference information of the edge 11 is equal to or greater than a preset threshold value in consideration of the value of the measurement error or the like for detecting a concave region. May be detected as a continuous region that is concave. The threshold value in this case is set to a value around 0, for example. This is the same when detecting a defective portion of the edge 11. This also applies to the detection of a continuous convex region.

  In the above, instead of the threshold value indicating the lower limit value of the distance from the edge of the notch, the threshold value indicating the lower limit value and the upper limit value of the distance from the edge is used, and It is determined whether the maximum value or the values before and after the value are within the range indicated by the threshold value. If the value is within the range, the lower limit value of the distance from the edge of the notch is set. You may use instead of the judgment result in case it has distance difference information more than the threshold value to show. Similarly, instead of the threshold value indicating the lower limit value and the maximum value of the width, the threshold value indicating the lower limit value of the width is used, and when the width of the continuous region is equal to or larger than the lower limit value of the width, You may use it instead of the determination result of the area | region which is in the range of the threshold value which respectively shows the lower limit value and upper limit value of a width | variety. Further, when determining whether or not a continuous area is a defective portion, only the distance from the edge or only the width may be determined instead of determining the distance and width from the edge. These combinations can be changed as appropriate.

  Further, the notch detection unit 1036 has a difference between the first distance information calculated by the calculation unit 1035 and the second distance information, that is, the distance difference information, in which the magnitude of the value is larger than a first threshold value specified in advance. A portion may be detected, and information indicating a rotation angle corresponding to the detected portion may be acquired as information indicating a notch portion of the workpiece 10. The distance from the edge of the notch when the workpiece 10 is circular with no irregularities is usually deeper than the distance such as chipping that may exist at the edge of the workpiece 10. Further, the depth of the notch (distance from the edge) is a known value. For this reason, by setting the first threshold value to a value larger than the depth (distance from the edge) such as chipping and smaller than the depth of the known notch (distance from the edge), One or more distance difference information corresponding to the notch can be detected, and information indicating the notch can be acquired.

  The first threshold is, for example, a value magnitude threshold. Detecting distance difference information whose value magnitude is larger than the first threshold means, for example, that the absolute value of the distance difference information and the threshold value indicating the magnitude of the value (or the absolute value of the value threshold value) In comparison, distance difference information having a large absolute value is detected. The same applies to the second threshold value described later.

  Further, detecting distance difference information whose value is larger than the first threshold is, for example, a negative value whose absolute value is the same as the first threshold, and is smaller than this threshold. It is also possible to detect distance difference information that is a value (that is, distance difference information that is a negative value and whose absolute value is larger than the absolute value of the first threshold value). The same applies to the second threshold value described later.

  Further, detecting distance difference information in which the magnitude of the value is larger than the first threshold is, for example, using a positive value whose absolute value is the same as the first threshold as a threshold, Distance difference information that is a value smaller than this threshold value (that is, distance difference information that is a positive value and whose absolute value is larger than the absolute value of the first threshold value) may be detected. The same applies to the second threshold value described later.

  Whether the value of the distance difference information corresponding to the notch is a positive value or a negative value is obtained by subtracting the second distance information from the first distance information. It depends on whether the distance information is obtained by subtracting the first distance information from the second distance information.

  When the notch detection unit 1036 detects a plurality of distance difference information having a value larger than the first threshold value and corresponding to a plurality of distance difference information having continuous rotation angles, the plurality of distance difference information is detected. The rotation angles may be grouped. And the notch detection means 1036 may acquire the information which shows the notch part which further has the information which shows this group. The information indicating a group is, for example, information indicating a range of a corresponding rotation angle, a set of corresponding rotation angles, a group identifier assigned to the corresponding rotation angle, and the like. The same applies to information indicating a group of defective portions, which will be described later. Note that one group of rotation angles in this case may be considered as information indicating a plurality of rotation angles corresponding to a plurality of positions on one notch, or a range of the notch.

  The notch detection means 1036 is a plurality of pieces of distance difference information whose magnitude is larger than the first threshold value, and the corresponding rotation angles are a plurality of consecutive two or more specified numbers. You may make it detect distance difference information. Usually, the notch is set in a wide range on the edge of the workpiece 10, and thus the notch can be detected more reliably by detecting in this way.

  The notch detector 1036 may detect a plurality of notches for one workpiece 10.

  The notch detection means 1036 can be usually realized by an MPU, a memory, or the like. The processing procedure of the notch detection means 1036 is usually realized by software, and the software is recorded on a recording medium such as a ROM. However, it may be realized by hardware (dedicated circuit).

  The defect detection unit 1037 acquires information on the defect portion of the edge 11 of the workpiece 10 using the difference between the first distance information and the second distance information calculated by the calculation unit 1035, that is, the distance difference information.

  For example, the defect detection unit 1037 uses the difference between the first distance information and the second distance information calculated by the calculation unit 1035 and one or more threshold values related to the size of the defect portion to detect defects on the edge 11 of the workpiece 10. A portion is detected, and information regarding the detected defective portion is acquired.

  For example, the defect detection unit 1037 detects distance difference information whose magnitude is equal to or greater than a threshold value indicating a lower limit value of the distance from the edge of the defect portion in the distance difference information calculated by the calculation unit 1035, for example. If it is detected, information on the defective part is acquired. Instead of using the lower limit value for the distance from the edge of the defect portion as a threshold value, a threshold value indicating the lower limit value of the depth of the defect portion and a threshold value indicating the lower limit value of the height of the defect portion are used. However, distance difference information that is not a value between the threshold value indicating the lower limit value of the depth of the defective portion and the threshold value indicating the lower limit value of the height of the defective portion may be detected.

  Further, the defect detection unit 1037 uses, for example, the distance difference information calculated by the calculation unit 1035 to face a continuous region that is concave toward the inside of the workpiece 10 at the edge 11 of the workpiece 10 or toward the outside of the workpiece 10. In this concave region or convex region, the magnitude of the value of the distance difference information is greater than or equal to a threshold value indicating the lower limit value of the distance from the edge of the defective portion. It is determined whether or not there is a part, and if there is a part that is equal to or greater than a threshold, the concave area or the convex area is determined as a defective part, and information about the defective part, for example, information on the range of the rotation angle May be obtained.

  Further, the defect detection unit 1037 uses, for example, the distance difference information calculated by the calculation unit 1035 to face a continuous region that is concave toward the inside of the workpiece 10 at the edge 11 of the workpiece 10 or toward the outside of the workpiece 10. A continuous area that is convex and convex, and whether or not the width of the concave area or the convex area is equal to or greater than a threshold value that is a lower limit value of the width of the defective portion. For example, the concave area or the convex area may be determined as a notch, and information regarding the defective portion may be acquired.

  In addition, as one or more threshold values used for detecting whether or not a continuous region as described above is a defective portion, different threshold values are used depending on whether the continuous region is concave or convex. Alternatively, the same threshold value may be used.

  Alternatively, by combining the determination based on the depth and the determination based on the width, if the distance from the edge is equal to or larger than the threshold and the width is equal to or larger than the threshold, the continuous area is determined as the defective portion. Also good.

  Further, the defect detection unit 1037, for example, in the difference between the first distance information and the second distance information calculated by the calculation unit 1035, that is, in the distance difference information, the magnitude of the value is larger than a second threshold value specified in advance. Detect large parts. And you may make it acquire the information regarding the detected part as information regarding the defective part of the edge 11 of the workpiece | work 10. FIG.

  The second threshold value is a threshold value for discriminating between a portion where no defect exists on the edge 11 of the workpiece 10 and a defective portion of the edge 11 of the workpiece 10. For example, in the part where the defect of the edge 11 of the workpiece 10 does not exist, the difference between the values of the first distance information and the second distance information becomes a difference of about the measurement error when acquiring the first distance information. On the other hand, in the portion where the defect exists, this difference is sufficiently larger than the measurement error. For this reason, the defect part of the edge 11 of the workpiece | work 10 is detectable by setting a 2nd threshold value to a value larger than a measurement error, for example.

  Information on the detected part, that is, information on the detected distance difference information includes, for example, information indicating the rotation angle corresponding to the detected distance difference information, information on the detected distance difference information, and information indicating the corresponding rotation angle. It is a pair. For example, the detected distance difference information can be considered as information indicating the depth and height of the defective portion.

  In addition, whether the defective part is a convex part on the outside of the work 10 like a burr or a part that is dented toward the inside of the work 10 like a chipping, for example, in the first distance information Since the determination can be made based on the reference point or the like and the sign of the distance difference information, the defect detecting means 1037 judges whether or not the defect portion has an outwardly convex shape based on the sign of the distance difference information. Also good. And the defect detection means 1037 may acquire the information regarding the defect part which further has this detection result.

  In addition, when the defect detection unit 1037 detects a plurality of distance difference information whose values are larger than the second threshold value and corresponding rotation angles are consecutive, the plurality of distance difference information is detected. Distance difference information or a plurality of rotation angles may be grouped. And the defect detection means 1037 may acquire the information regarding the defect part which further has the information which shows this group. One group of distance difference information in this case may be considered as distance difference information for a plurality of positions on one defect portion, for example. In addition, one group of rotation angles in this case may be considered as information indicating a plurality of rotation angles indicating a plurality of positions on one defect portion and a range of the defect portion, for example.

  In the case of the above processing, a cutout portion such as an orientation flat portion of the workpiece 10 is also detected as a defective portion. In the case where there is no problem even if the notch is detected as a defective part, the above processing may be performed, but when the notch is not detected as a defective part, the notch is not detected as a defective part. Or it is necessary to exclude from a defective part.

  For this reason, for example, the defect detection means 1037 detects a plurality of distance difference information in which the corresponding rotation angle is continuous for a predetermined number of two or more in the distance difference information detected using the second threshold. This predetermined number is set, for example, to a number corresponding to the length of the notch provided in the workpiece 10, that is, the rotation angle. Then, by excluding the plurality of distance difference information detected in this way from the defective part, the defective part can be detected with high accuracy by removing the notch part.

  Alternatively, only the distance difference information corresponding to the rotation angle excluding the rotation angle indicating the notch acquired by the notch detection unit 1036 is subjected to the defect portion detection process using the second threshold value similar to the above. Anyway.

  Alternatively, the defect detection unit 1037 has a difference between the first distance information and the second distance information calculated by the calculation unit 1035, that is, in the distance difference information, the value magnitude is smaller than a first threshold value specified in advance. And you may make it detect the part larger than the 2nd threshold value whose magnitude | size is smaller than this 1st threshold value. And the information regarding the detected part is acquired as information regarding the defective part of the edge 11 of the workpiece 10. The defect detection means 1037 may also detect distance difference information whose value is the same as the first threshold value. The first threshold is, for example, a threshold for detecting the notch portion of the workpiece 10 as described above. The second threshold is the same as described above. By doing in this way, it is possible to detect the defective portion with high accuracy so as not to include the notch portion without detecting the distance difference information larger than the first threshold.

  The defect detection means 1037 can be usually realized by an MPU, a memory, or the like. The processing procedure of the defect detection means 1037 is usually realized by software, and the software is recorded on a recording medium such as a ROM. However, it may be realized by hardware (dedicated circuit).

  The output unit 104 outputs information for aligning the workpiece acquired by the acquisition unit 103. The output unit 104 also outputs information for specifying the workpiece orientation acquired by the acquisition unit 103. In addition, the output unit 104 outputs information regarding the defective portion acquired by the acquisition unit 103. For example, the output unit 104 outputs correction information that is information for aligning the workpiece acquired by the acquisition unit 103. In addition, the output unit 104 outputs information indicating a notch that is information for specifying the orientation of the workpiece acquired by the acquisition unit 103. These outputs may have the workpiece 10 identifier.

  Output here means display on a display, projection using a projector, sound output, lighting of a warning light, printing on a printer, transmission to an external device, accumulation in a recording medium, other processing devices, etc. This is a concept that includes delivery of processing results to other programs.

  For example, the output unit 104 may output information for aligning the workpiece 10 and information for specifying the orientation of the workpiece 10 to the workpiece transfer apparatus 2 described later. The workpiece transfer device 2 uses these pieces of information to pick up the workpiece 10 from the edge position detector 102, transfer the workpiece 10, or place the workpiece 10 on a predetermined location. By correcting the orientation and position of the workpiece 10, the workpiece 10 can be placed at an appropriate position with an appropriate direction.

  Further, for example, the output unit 104 may transmit information for aligning the workpiece 10 and information for specifying the orientation of the workpiece 10 to the edge position detector 102 or the like. Using these pieces of information, for example, the edge position detector 102 changes the position and direction of the workpiece 10 to an appropriate position and direction, and passes the workpiece 10 to the workpiece 10 with respect to the workpiece conveyance device 2. However, it is possible to place the workpiece 10 in an appropriate direction at an appropriate position.

  For example, when the output unit 104 outputs the correction information, the workpiece conveyance device 2 or the like that has received the correction information uses the workpiece 10 so that the rotation center of the workpiece 10 becomes the center of the workpiece 10. The position of 10 can be corrected as appropriate. For example, the correction information is output to the workpiece transfer device 2 or the like that transfers the workpiece 10 so that the workpiece transfer device 2 or the like corrects the rotation center of the workpiece 10 to the center of the workpiece 10 and transfers the workpiece 10. May be. Further, by outputting correction information to the edge position detector 102 having a moving means (not shown) for correcting the position of the workpiece 10, the edge position detector 102 etc. moves the turntable 52. By moving or rotating the workpiece 10, the workpiece 10 may be moved so that the center of rotation is the center of the workpiece 10 when the workpiece 10 is transferred to the workpiece conveyance device 2.

  Further, the output unit 104 outputs information indicating the cut-out part of the workpiece, so that the workpiece conveyance device 2, the edge position detector 102, and the like that have received the correction information have designated the orientation of the workpiece 10 in advance. It is possible to appropriately correct the orientation of the workpiece 10 so as to be oriented.

  The output unit 104 may further perform an abnormal output according to the information regarding the defective part acquired by the acquisition unit 103. The abnormal output is an output when the edge 11 of the workpiece 10 is abnormal. The abnormal output may be an output indicating that there is an abnormality in the edge 11 of the workpiece 10 or may be an output to an external device or the like for an instruction to perform an operation corresponding to the abnormality.

  The abnormal output is, for example, an output such as a warning indicating that an abnormality has occurred. The warning output includes, for example, output of a warning sound, warning display on a monitor or the like, lighting of a warning lamp, and the like. The warning output may include an identifier of the workpiece 10 in which the defective portion is detected.

  The abnormal output may be an output of an instruction to stop the operation on the workpiece 10. The operations on the workpiece 10 include conveying the workpiece 10 with the workpiece conveyance device 2, positioning the edge position detector 102 or the like with respect to the workpiece 10, or performing the workpiece conveyance device 2 on the workpiece 10. For example, a process in which a transport destination is designated in advance is performed. For example, the output unit 104 outputs an instruction to stop the operation to the workpiece transfer device 2, the edge position detector 102, a processing device (not shown) that processes the workpiece 10, and the like. Thereby, operation with respect to the workpiece | work 10 which has abnormality in an edge can be stopped.

  The abnormal output may be, for example, an instruction output for collecting the workpiece 10 in which an abnormality is detected. Here, the collection includes, for example, moving to a collection place designated in advance, removing the workpiece 10 from the normal processing route, evacuating, removing it from the conveyance path, and the like. For example, the output unit 104 outputs an instruction to collect the workpiece 10 in which an abnormality is detected to the workpiece conveyance device 2 or the like. In accordance with this instruction, the workpiece transfer device 2 transfers the workpiece 10 to a collection location or the like designated in advance, so that no subsequent operation or processing is performed on the workpiece in which an abnormality has been detected. Can be. In addition, it is possible to inspect the recovered workpiece for defects.

  For example, the output unit 104 may perform an abnormal output when the acquisition unit 103 acquires information on one defective portion. In addition, the output unit 104 may perform an abnormal output when the information regarding the defective portion acquired by the acquisition unit 103 satisfies a predetermined condition. For example, it is determined whether or not the acquisition unit 103 has detected a defect portion equal to or greater than k (k is an integer of 2 or more) specified in advance from the information regarding the defect portion acquired by the acquisition unit 103, and the defect portion is equal to or greater than k. When it is determined that the error is detected, an abnormal output may be performed. In addition, when the information regarding the defect portion acquired by the acquisition unit 103 includes information indicating a defect portion whose maximum distance from the edge is equal to or greater than a predetermined value, abnormal output is performed. It may be.

  The evaluation related information receiving unit 105 receives evaluation related information that is information related to the evaluation of the defective portion of the edge 11 of one or more workpieces 10. The evaluation related information receiving unit 105 preferably receives evaluation related information about the plurality of workpieces 10.

  The evaluation related information is information used for evaluating one or more threshold values used in the process of detecting a defective portion, for example. The one or more threshold values used in the process of detecting the defective portion are, for example, one or more threshold values related to the size of the defective portion.

  The evaluation related information is, for example, whether or not the workpiece 10 that is determined to have no defective portion in the workpiece processing apparatus 1, for example, the workpiece 10 for which the acquisition unit 103 has not acquired information on the defective portion, actually has a defect. It is information which has the information to show. The evaluation related information is, for example, whether or not the workpiece 10 that is determined to have a defective portion in the workpiece processing apparatus 1, for example, the workpiece 10 for which the acquisition unit 103 has acquired information on the defective portion, actually has a defect, Or it is the information which has the information which shows whether it was evaluated that there existed. For example, the information indicating whether or not there is actually a defect is information indicating whether or not the workpiece 10 has been normally used in a processing step after the processing by the workpiece processing apparatus 1, for example, whether or not the workpiece 10 has been damaged. The information which shows may show the result of the reexamination (including visual observation etc.) performed in order to detect a defective part with respect to the workpiece | work 10 in which the defective part was detected. The workpiece 10 in which the defective portion is detected may be the workpiece 10 collected by the abnormal output.

  Further, the evaluation related information may be information including correct / incorrect information indicating correct / incorrect detection of the defective portion, for example. Correct / incorrect information is information indicating whether or not the detection result of the defective portion in the work processing apparatus 1 is correct. For example, the acquisition unit 103 evaluates whether or not the workpiece 10 that has not acquired information on the defective portion actually has a defect. If there is no defect, the evaluation-related information includes detection of the defective portion of the acquisition unit 103. Correct / incorrect information indicating correctness is stored. If there is a defect, correct / incorrect information indicating that the detection of the defective portion is not correct is stored. Further, for example, the acquisition unit 103 evaluates whether or not the workpiece 10 having acquired information on the defective part actually has a defect. If there is no defect, the evaluation-related information includes detection of the defective part of the acquisition unit 103. Correct / incorrect information indicating that it is not correct is stored. If there is a defect, correct / incorrect information indicating that the detection of the defective portion was correct is stored. Whether or not the defective portion is detected is determined from, for example, the result of the re-inspection of the workpiece 10 as described above and information indicating whether or not the workpiece 10 has been normally used in the subsequent processing.

  In addition, the evaluation related information may further include information related to the subsequent process of the work processing apparatus 1. For example, information indicating the type of processing in one or more subsequent processes (for example, heat treatment, CVD, CMP, etching, etc.), an identifier of an apparatus used for processing, processing time, pressure, temperature, etc. of the processing Parameters, types and concentrations of gases used for processing, types and concentrations of liquids used for processing, and the like may be included.

  Further, the evaluation related information may include information about the workpiece 10 such as the size of the workpiece 10, the material system and composition of the workpiece.

  The evaluation related information includes information on the defect portion acquired by the acquisition unit 103, for example, information on the size of the defect portion, information on a similar defect portion acquired by re-inspection of the workpiece 10, and the like. Also good.

  Further, the evaluation related information may have one or more threshold values related to the size of the defect portion used in the process of detecting the defect portion. However, in the case where one or more threshold values currently used by the acquisition unit 103 are evaluated and the evaluation related information about the workpiece 10 in which the defect portion detection processing is performed using the current threshold values is used. The evaluation related information may not have a threshold value.

  Acceptance refers to accepting information input from an input device such as a keyboard, mouse, or touch panel, receiving information transmitted via a wired or wireless communication line, and reading from a recording medium such as an optical disk, magnetic disk, or semiconductor memory. It is a concept that includes accepting information that has been issued.

  The evaluation related information received by the evaluation related information receiving unit 105 is accumulated in, for example, a storage unit (not shown).

  The evaluation related information reception unit 105 can be realized by a device driver of an input unit such as a numeric keypad or a keyboard, control software for a menu screen, a reception unit, or the like.

  The setting unit 106 acquires one or more thresholds related to the size used by the acquisition unit 103 to detect a defective portion using the evaluation related information. And the threshold value regarding the magnitude | size which the acquisition part 103 uses for the detection of a defective part is set using the acquired threshold value. The setting here is a concept including, for example, updating of one or two or more threshold values set by the acquisition unit 103 for detection of a defective portion, for example, overwriting, which is set by a default or the user.

  For example, when the acquisition unit 103 detects a defective part with respect to the workpiece 10 using one threshold for the distance from the edge 11 of the defective part, it is determined that the defective part is not detected 1 or Set when the evaluation-related information receiving unit 105 receives evaluation-related information having information indicating that there is a workpiece 10 that is actually determined to have a defective portion in a predetermined number of workpieces 10 that is two or more. The unit 106 acquires a threshold value that makes it easier to detect a defective portion than the value of one threshold value for the distance from the edge 11 of the defective portion used by the acquisition unit 103, for example, a threshold value having a smaller value, The threshold for the distance from the edge 11 used by the acquisition unit 103 is updated. As a result, a portion having a smaller change in distance from the edge 11 can also be detected as a defective portion, and detection failure of the defective portion can be reduced. In this case, the defect-related portion is not detected by receiving the evaluation-related information further including the information indicating the distance from the edge 11 of the defect portion acquired by re-inspection or the like. You may make it acquire the threshold value which this defective part is detected using the information which shows the distance from the edge 11 of the defective part of the workpiece | work 10 which existed.

  In addition, for example, evaluation related information including information indicating that a defective portion has not been actually detected in a reinspection or the like on one or two or more predetermined number of workpieces 10 in which a defective portion has been detected. When the information receiving unit 105 receives the setting, the setting unit 106 detects a defect as a threshold value for the distance from the edge than the value of one threshold value for the distance from the edge 11 of the defective part used by the acquiring unit 103. A threshold value that is difficult to perform, for example, a large value threshold value may be acquired, and the threshold value for the distance from the edge 11 used by the acquisition unit 103 may be updated with this threshold value. Thereby, it becomes possible to prevent that the workpiece | work 10 without a defective part will be collect | recovered.

  The setting unit 106 may acquire one or more threshold values for the size of the defective portion by performing machine learning using evaluation-related information having correct / incorrect information and a threshold value. For example, the setting unit 106 determines whether the evaluation-related information is correct / incorrect for the plurality of workpieces received by the evaluation-related information receiving unit 105, one or more threshold values related to the size of the defective portion, and the workpiece processing apparatus 1 as described above. Learning is performed by using, as learning data, a combination of one or more of information relating to process processing, information relating to the workpiece 10, and information relating to a defective portion. For example, when the workpiece processing apparatus 1 performs processing on one or more workpieces 10, when setting a threshold for defect detection, the workpieces similar to those learned above with respect to the workpiece 10 are set. One or more pieces of information relating to processing in the post-process of the processing apparatus 1, information relating to the workpiece 10, information relating to the defective portion, and one or more thresholds relating to the size of the defective portion (for example, distance from the edge) By inputting a set of a plurality of threshold values prepared in advance for the threshold value and the threshold value for the width via the above-described evaluation related information receiving unit 105 or the like, each set is evaluated using the learning result. Then, one of the threshold values (for example, the largest threshold value) included in the above set in the case where an evaluation result having correct / incorrect information indicating that the defect portion can be correctly determined is obtained with respect to the size of the defect portion. The threshold value may be acquired as one or more threshold values. Then, this threshold value may be set as a threshold value for detecting a defective portion.

  By doing in this way, the defective part of the edge 11 of the workpiece | work 10 can be detected accurately using the suitable threshold value according to the process of a post process, the kind of workpiece | work, etc.

  For learning using learning data, a learning model such as SVR can be used as a known technique. In this case, the learning data may be considered as teacher data.

  Note that the correctness / incorrectness information is appropriately acquired by the setting unit 106 based on the information related to the defective portion of the workpiece 10 included in the evaluation related information and the information indicating whether or not the edge 11 of the workpiece 10 actually has a defective portion. May be.

  In the above, instead of correct / incorrect information, the processing result of the workpiece 10, for example, whether or not the workpiece 10 is damaged is learned, and the distance from the edge 11 of the defective portion of the workpiece 10 is learned instead of the threshold value. In this case, one or more pieces of information on the post-process processing of the workpiece processing apparatus 1, information on the workpiece 10, information on the defective portion, and the like, and a plurality of pieces from the edge of the defective portion The distance from the edge of the defective part that does not cause damage or the like in the subsequent process can be acquired by inputting a plurality of sets having each of the distances to the learning result, for example, using this distance as a threshold value Thus, it becomes possible to detect a defective part appropriately. Needless to say, by performing machine learning other than these, a threshold value related to the size used at the time of defect detection may be set.

  In addition, the setting unit 106 predicts a threshold value using a multiple regression analysis or the like from a combination of a threshold value used in the past included in the evaluation-related information and a parameter obtained from a post-process or a work type. An equation may be created, and an appropriate threshold value may be calculated according to the post-process, the type of workpiece, and the like using the prediction equation, and the calculated threshold value may be set.

  The setting unit 106 can usually be realized by an MPU, a memory, or the like. The processing procedure of the setting unit 106 is usually realized by software, and the software is recorded on a recording medium such as a ROM. However, it may be realized by hardware (dedicated circuit).

  Next, an example of the edge position detector 102 will be described with reference to FIG.

  The edge position detector 102 includes a turntable rotation mechanism 53 for rotating the turntable 52 on which the workpiece 10 is placed. The turntable rotation mechanism 53 is driven by an electric motor 54. The edge detection unit 55 that detects the edge position of the workpiece 10 includes a projector 55a and a sensor 55b. The sensor 55b is, for example, an optical sensor. The sensor 55b continuously changes its output according to the amount of received light while maintaining a specific relationship, and outputs an incident light amount called CCD (Charge Coupled Device) or PSD (Position Sensitive Detector: product name). That changes linearly is used. The sensor 55b corresponds to, for example, the sensor 15 in FIG. The sensor 55b of the edge detector 55 generates an output corresponding to the amount of light emitted from the projector 55a and reduced by the workpiece 10 directly below. This output indicates the edge position of the workpiece 10. The encoder 56 detects the amount of rotation of the electric motor 54 corresponding to the rotation angle of the turntable 52 and outputs a digital signal. The accumulation unit 57 accumulates the output of the sensor 55b and the output of the encoder 56 as a pair of data for each fixed rotation angle of the turntable 52. The storage unit 57 may convert the output of the sensor 55b into a distance from the rotation center of the workpiece 10 to the edge 11 and output the distance. In this specific example, the storage unit 57 uses, as the first rotation distance information, a pair of the rotation angle and the output of the sensor 55b and the first distance information converted into the distance from the rotation center of the workpiece 10 to the edge 11. It is assumed that the first rotation distance information storage unit 101 accumulates. If the output of the sensor 55b is an analog signal, an A / D converter or the like may be provided between the storage unit 57 and the sensor 55b.

  In addition, the edge position detector 102 mentioned here is an example, and in the present invention, as in the case of the edge position detector 102, as long as a plurality of first distance rotation information can be acquired for the workpiece 10, Another edge position detector 102 may be used.

  Here, although the case where the edge position detector 102 is a part of the workpiece processing apparatus 1 is shown, the edge position detector 102 may be an apparatus different from the workpiece processing apparatus 1, for example.

  Next, an example of the workpiece transfer system in the present embodiment will be described with reference to FIG.

  The workpiece transfer system 1000 includes a workpiece processing apparatus 1 and a workpiece transfer apparatus 2. The conveyance path 1001 of the workpiece conveyance system 1000 is covered with, for example, a cover (not shown).

  The workpiece transfer device 2 is a device that transfers the workpiece 10. For example, the workpiece transfer device 2 includes an arm or the like that can be moved in the horizontal direction or the vertical direction, and the workpiece 10 is transferred by moving the arm 10 while the workpiece 10 is placed. The workpiece transfer device 2 itself may have a structure that can move in the horizontal direction or the vertical direction. However, the structure of the workpiece transfer device 2 is not limited.

  The workpiece transfer device 2 delivers the workpiece 10 to the workpiece processing device 1. The delivery of the workpiece 10 to the workpiece processing apparatus 1 means, for example, that the workpiece 10 is conveyed to the workpiece processing apparatus 1 while the workpiece 10 is being conveyed, and the workpiece is delivered to the workpiece processing apparatus 10. The work 10 is received from the processing apparatus 1 and transported to another point.

  The workpiece transfer device 2 is, for example, a device that transfers from the first point to the workpiece processing device 1 and transfers from the workpiece processing device 1 to the second point. The first point is a point where the workpiece 10 to be transported is arranged. A 2nd point is a point used as the conveyance destination of the workpiece | work 10 used as conveyance object. Note that the workpiece transfer device 2 may further transfer the workpiece from the workpiece processing device 1 to a third point where the collection workpiece 10 is placed. For example, the workpiece transfer device 2 may transfer the workpiece 10 to either the second point or the third point according to an instruction or the like input from the outside.

  Here, as an example, the workpiece transfer device 2 transfers the workpiece 10 accommodated in the container 4 as the first point onto the turntable 52 of the workpiece processing device 1, and on the turntable 52 of the workpiece processing device 1. When the work 10 placed on the second place is transported to the placing table 6 of a device (not shown) that performs a predesignated process that is the second point, or the collection container 5 that is the third point. Will be described as an example. In this case, for example, the workpiece transfer device 2 receives an abnormal output output from the output unit 104 of the workpiece processing device 1 via a receiving unit (not shown) and receives the abnormal output. When the workpiece 10 placed on the turntable 52 is transported to the third container 5 for collection and the workpiece 10 is collected and no abnormal output is received, the workpiece processing is performed. The workpiece 10 placed on the turntable 52 of the device 1 is transported to the placing table 6 of a device (not shown) that performs a predesignated process that is the second point.

  The workpiece transfer device 2 receives information for aligning the workpiece such as correction information output by the output unit 104 of the workpiece processing device 1 and corrects the position of the workpiece 10 or the workpiece processing device 1. The information which specifies the direction of a workpiece | work, such as the information which shows the notch part which the output part 104 outputs, may receive the direction which correct | amends the direction of the workpiece | work 10.

  Further, the workpiece transfer device 2 may include a unit that receives the abnormal output output from the output unit 104 of the workpiece processing device 1 and stops the transfer of the workpiece 10 according to the received abnormal output.

  Note that the configuration of the work transfer device 2 is a known technique, and thus detailed description thereof is omitted here.

  The mounting table 6 is a table for mounting the workpiece 10 to be processed by an apparatus (not shown) that performs processing specified in advance on the workpiece 10. The mounting table 6 corresponds to the second point described above. The apparatus that performs the treatment designated in advance may be any apparatus such as a CVD apparatus or a surface polishing apparatus. For example, a previously designated process is performed on the workpiece 10 placed on the placement table 6.

  The container 4 is a container for accommodating and transporting one or more workpieces 10. The container 4 corresponds to the second point described above. The container 4 accommodates a workpiece 10 to be processed by the above-described apparatus (not shown). The container 4 accommodates a workpiece 10 that is conveyed by the workpiece conveying device 2 and placed on the placing table 6. The container 4 is, for example, a cassette that accommodates and transports one or more workpieces 10. The container 4 is, for example, a so-called FOUP (front open unified pod). The container 4 can be attached to and detached from a cover (not shown) of the transport path 1001. The cover of the conveyance path 1001 is provided with, for example, a door (not shown) for attaching the container 4.

  The container 5 is a container for accommodating and transporting one or more workpieces 10. The container 5 corresponds to the third point described above. The container 5 is a container in which the work 10 collected in response to the abnormal output output from the output unit 104 is accommodated. The container 5 accommodates the workpiece 10 conveyed by the workpiece conveyance device 2 according to the abnormal output. Other configurations of the container 5 are the same as those of the container 4.

  Here, the case where the first point is the container 4, the second point is the mounting table 6, and the third point is the container 5 has been described, but each point may be any point. Good. For example, the first point may be a mounting table of a device that performs a predetermined process on the workpiece. The second point may be a container similar to the container 4. The third point may be a mounting table for an inspection device (not shown) for inspecting a workpiece.

  Next, an example of operation | movement of the workpiece | work processing apparatus 1 is demonstrated using the flowchart of FIG. In addition, since the edge position detector 102 is well-known about the process which acquires 1st rotation distance information, description is abbreviate | omitted here. In addition, the description of the process of accumulating the plurality of first rotation distance information acquired by the edge position detector 102 for the workpiece 10 in the first rotation distance information storage unit 101 is also omitted here. Here, a case where the setting unit 106 acquires a threshold value related to the size of a defective portion without using machine learning will be described as an example.

  (Step S100) The work processing apparatus 1 determines whether it is the timing to output the correction information, the information indicating the notch, and the information regarding the defective portion. For example, the workpiece processing apparatus 1 determines whether or not the first rotation distance information storage unit 101 stores a plurality of pieces of first rotation distance information corresponding to one rotation of the workpiece 10 acquired for one workpiece 10. If it is stored, it is determined that it is time to output the above information, and if it is not stored, it is determined that it is not time to output it. Alternatively, when the process of acquiring a plurality of pieces of first rotation distance information for one workpiece 10 by the edge position detector 102 is completed, it may be determined that it is the timing to output. When outputting, it progresses to step S101, and when not outputting, it progresses to step S120.

  (Step S101) The synthesizing unit 1031 includes four pieces of four different first rotation distance information included in a plurality of first rotation distance information corresponding to one workpiece 10 and each corresponding to a difference in rotation angle by 90 degrees. A plurality of combined distance information is obtained by combining the one distance information. For example, the synthesizing unit 1031 divides a plurality of pieces of first rotation distance information having continuous rotation angle values into a plurality of sets such that the range of rotation angle values is 90 degrees, and each divided set The first distance information included in the first rotation distance information having the same arrangement order is synthesized. The synthesis here is, for example, calculation of an average value. The synthesizing unit 1031 associates the acquired synthesized distance information with the four rotation angles corresponding to the synthesized four first distance information, and accumulates them in a storage unit (not shown).

  (Step S102) The composition processing means 1032 substitutes 1 as the value of the counter p.

  (Step S103) The synthesis processing means 1032 detects the p-th synthesized distance information counted from the smallest value in the synthesized distance information synthesized in Step S102. For example, the combination processing unit 1032 adds information such as a flag indicating detection or a flag indicating deletion to the detected combination distance information. Instead of detecting the p-th composite distance information, the composite distance information indicating the minimum value may be detected and deleted. When deleting, the composite distance information indicating the minimum value is detected again from the composite distance information remaining without being deleted next time, and the deletion is performed.

  (Step S104) The composition processing unit 1032 increments the value of the counter p by 1.

  (Step S105) The composition processing unit 1032 determines whether or not the value of the counter p is equal to or greater than a predetermined number specified in advance. If it is greater than or equal to the predetermined number, the process proceeds to step S106, and if not greater than the predetermined number, the process returns to step S103.

  (Step S106) The composition processing unit 1032 substitutes 1 as the value of the counter q.

  (Step S107) The composition processing means 1032 detects the qth composite distance information counted from the composite distance information synthesized in Step S102 from the largest value. For example, the combination processing unit 1032 adds information such as a flag indicating detection or a flag indicating deletion to the detected combination distance information. Instead of detecting the qth composite distance information, the composite distance information indicating the maximum value may be detected and deleted. In the case of deletion, the combined distance information indicating the maximum value is detected again from the combined distance information that is not deleted next time, and is deleted.

  (Step S108) The composition processing unit 1032 increments the value of the counter q by 1.

  (Step S109) The composition processing unit 1032 determines whether or not the value of the counter q is a predetermined number or more. If it is equal to or greater than the predetermined number, the process returns to step S107.

  (Step S110) The composition processing means 1032 detects composition distance information that has not been detected (or has not been deleted) in Steps S103 and S107 and is continuous for a predetermined number or more. .

  (Step S111) The synthesis processing unit 1032 detects one synthesis distance information, for example, the synthesis distance information in the center order, from the continuous synthesis distance information detected in Step S110, and synthesizes the detected synthesis distance information. The original four first distance information and the rotation angle corresponding to one of the first distance information are acquired. For example, the smallest rotation angle corresponding to the four pieces of first distance information is acquired as one rotation angle.

  (Step S112) The correction information acquisition unit 1033 uses the four first distance information acquired in Step S111 and one rotation angle to correct the rotation center of the workpiece 10 to the center of the workpiece 10. Get information. For example, the correction information is acquired using the above-described equations (1) and (2). Then, the acquired correction information is temporarily stored in a storage unit (not shown).

  (Step S113) The second distance information acquisition unit 1034 uses the correction information acquired in Step S112, according to the rotation angle and the rotation angle when the workpiece 10 is a circle having no irregularities on the edge 11. A relational expression indicating the relationship with the second distance information is acquired. For example, the ideal curve equation is obtained by substituting the correction information into the coefficient of equation (3) described above.

  (Step S114) The second distance information acquisition unit 1034 substitutes a plurality of rotation angles corresponding to the plurality of first rotation distance information corresponding to the one workpiece 10 described above, in the relational expression acquired in Step S113. Second distance information is acquired for each rotation angle. Then, a plurality of second rotation distance information having the rotation angle and the second distance information is accumulated in a storage unit (not shown).

  (Step S115) The calculation unit 115 acquires a plurality of distance difference information indicating the difference between the first distance information and the second distance information associated with the same rotation angle.

  (Step S116) The notch detection means 1036 acquires information indicating the notch using the plurality of distance difference information and the first threshold value.

  (Step S <b> 117) The defect detection unit 108 performs processing for acquiring information on the defect portion using the plurality of distance difference information and the second threshold value.

  (Step S <b> 118) The output unit 104 performs an abnormal output according to information regarding the defective portion. Note that abnormal output according to information on defective parts means that abnormal output is not performed depending on information on defective parts, or abnormal output is not performed when information on defective parts is not acquired. It is a concept that includes things.

  (Step S119) The output unit 104 outputs correction information, information indicating a notch, and information regarding a defective portion. Then, the process returns to step S100. If abnormal output is performed in step S118, the output unit 104 may not output correction information or information indicating a notch. Further, when the defect detection unit 108 has not acquired information on the defective part, the output unit 104 does not need to output information on the defective part.

  (Step S120) The evaluation related information receiving unit 105 determines whether or not evaluation related information has been received. If accepted, the process proceeds to step S121. If not accepted, the process proceeds to step S122.

  (Step S121) The evaluation related information receiving unit 105 accumulates the evaluation related information received in step S120 in a storage unit (not shown). Then, the process returns to step S100.

  (Step S122) The setting unit 106 determines whether it is the timing for setting one or more threshold values related to the size of the defective portion. For example, when an instruction to set a threshold value is received from a user via a reception unit (not shown) or the like, it is determined that the timing is set, and when it is not received, it is determined that it is not timing. In addition, when the evaluation related information is received in step S120, or when a predetermined number of evaluation related information is received in step S121, it may be determined that the timing is set. If it is time, the process proceeds to step S123, and if not, the process returns to step S100.

  (Step S123) The setting unit 106 acquires one or more threshold values related to the size of the defective portion using the evaluation related information accumulated in Step S121.

  (Step S124) The setting unit 106 sets the threshold acquired in step S123 as a threshold used when the acquisition unit 103 detects a defective portion. For example, the threshold value is accumulated in a storage unit (not shown). Note that when a threshold value corresponding to the threshold value acquired in step S123, for example, a threshold value used for the same process has already been set, for example, when a default threshold value is set, the setting unit 106 sets the threshold value. Update. You can think of this update as a setting. Then, the process returns to step S100.

  In FIG. 6, the case where the setting unit 106 acquires a threshold without using machine learning has been described. However, when the setting unit 106 acquires a threshold using machine learning, for example, accumulation is performed in step S <b> 121. The setting unit 106 performs learning using the evaluation related information, and the information related to the subsequent process of the work processing apparatus 1 is the same as the learned evaluation related information before the threshold value is acquired in step S123. One or more pieces of information related to the workpiece 10 or information related to the defective portion and one or more threshold values related to the size of the defective portion (for example, a threshold value for the distance from the edge and a threshold value for the width) are prepared in advance. A set with each of a plurality of threshold values is received via the evaluation related information receiving unit 105 or the like described above, and the setting unit 106 proceeds to step S123. There are, from the learning result of these information received, it is sufficient to acquire the threshold. Note that a plurality of threshold values prepared in advance may be stored in a storage unit (not shown) by default or the like.

  In the flowchart of FIG. 6, the process ends when the power is turned off or the process ends.

  Next, an example of operation | movement of the workpiece conveyance system 1000 is demonstrated using the flowchart of FIG. Here, as an example, when the workpiece 10 is placed on the turntable 52 of the edge position detector 102 of the workpiece processing apparatus 1, the edge position detector 102 has a plurality of first rotation distances for the workpiece 10. A case where information is acquired and the acquired rotation distance information is stored in the first rotation distance information storage unit 101 will be described as an example. In addition,

  (Step S <b> 201) The workpiece transfer device 2 takes out the workpiece 10 at the first point, for example, one workpiece 10 accommodated in the container 4, and transfers it to the workpiece processing device 1. Specifically, it is placed on the turntable 52 of the edge position detector 102.

  (Step S202) The edge position detector 102 acquires a plurality of first rotation distance information for the workpiece placed on the turntable 52, and stores the acquired first rotation distance information in the first rotation distance information storage unit 101. accumulate.

  (Step S <b> 203) The work processing apparatus 1 performs a process of acquiring and outputting correction information, information indicating a cut portion, information on a defective portion, and an abnormal output process for the work 10. This process corresponds to, for example, the process performed by the work processing apparatus 1 from step S100 to step S119 in the flowchart of FIG.

  (Step S204) The work transfer device 2 determines whether or not an abnormal output has been received from the output unit 104 of the work processing device 1. If received, the process proceeds to step S207. If not received, the process proceeds to step S205.

  (Step S205) The workpiece conveyance device 2 uses the correction information output from the output unit 104 and the information indicating the cutout portion of the workpiece placed on the turntable 52 of the edge position detector 102 to determine the position and direction. It is corrected and picked up so that it becomes a predetermined position and direction. This correction may be performed by changing the position and direction of supporting the workpiece when the workpiece conveying device 2 picks up the workpiece 10, or changing the position and direction of the turntable of the edge position detector 102. It may be done by doing.

  (Step S206) The workpiece transfer device 2 transfers the workpiece 10 to a second point, for example, the mounting table 6 and places it thereon. Then, the conveyance process is terminated.

  (Step S207) The workpiece transfer device 2 picks up the workpiece 10 from the turntable of the edge position detector 102, conveys the workpiece 10 to the third point for collection, here, the collection container 5 and moves the workpiece 10 into the container 5. To accommodate. Then, the conveyance process is terminated.

  Hereinafter, an example of a specific operation of the workpiece transfer system 1000 in the present embodiment will be described. Here, a case will be described in which the edge position detector 102 includes means for changing the position and direction of the turntable 52 according to the correction information output from the output unit 104 and the information indicating the notch. Here, a case where the workpiece 10 is the wafer 10 will be described as an example.

  The work transfer device 2 takes out one wafer 10 stored in the container 4, transfers the taken wafer 10 to the work processing device 1, and turnstable of the edge position detector 102 as shown in FIG. 3. 52.

  When the wafer 10 is placed on the turntable 52, the edge position detector 102 acquires the rotation angle and the first distance information while rotating the wafer 10, and the storage unit 57 detects the rotation angle and the first distance. A plurality of first rotation distance information having a combination with distance information is accumulated in the first rotation distance information storage unit 101.

  FIG. 8 is a diagram showing a first rotation distance information management table for managing the first rotation distance information stored in the first rotation distance information storage unit 101. As described above, the first rotation distance information is acquired using the edge position detector 102 as shown in FIG. Here, for convenience of explanation, a case where the first rotation distance information sequentially obtained every 0.036 degrees is stored when the wafer 10 is rotated once will be described as an example. That is, it is assumed that 10000 records of first rotation distance information are stored for one wafer.

The first rotation distance information management table has attributes of “wafer ID”, “rotation angle”, and “first distance information”. “Wafer ID” is identification information of a wafer. “Rotation angle” is the rotation angle of the wafer. “First distance information” is a distance from the rotation center of the wafer to the edge of the wafer. Note that r _m (m is an integer from 1 to 10000) of “first distance information” is first distance information whose corresponding rotation angle is 0.036 × m (degrees). The value of r _m is assumed to be an arbitrary value. In the first rotation distance information management table, each row (record) indicates the first rotation distance information.

  FIG. 9 is a graph for explaining the relationship between the rotation angle and the first distance information in the first rotation distance information. This graph is a graph showing the relationship between the rotation angle and the first distance information of the first rotation distance information for the wafer whose “wafer ID” is “W001” (hereinafter referred to as wafer W001). Assuming that the center of rotation of the wafer is deviated from the center of the wafer, as shown in FIG. 9, the entire graph has a curved waveform with one cycle of 360 degrees, for example. In the drawing, the concave portion 20 is a portion corresponding to the orientation flat portion of the wafer 10. The concave portions 21 and 22 are portions corresponding to chipping of the wafer 10. Further, the convex portion 23 is a portion corresponding to the burr of the wafer 10.

  First, for example, it is assumed that the user or the like performs an operation of designating the wafer W001 as an acquisition target of correction information or the like.

  FIG. 10 is a graph showing the relationship between the rotation angle of the first rotation distance information and the first distance information for explaining the processing performed by the synthesizing unit 1031 for the first rotation distance information. FIG. 10B is a graph in which the rotation angle is in the range of 90 degrees to less than 180 degrees, and FIG. 10C is a graph in which the rotation angle is in the range of 180 degrees to 270. 10 (d) is a graph in the range where the rotation angle is not less than 270 ° and less than 360 °, and FIG. 10 (e) is a graph from FIG. 10 (a) to FIG. 10 (d). It is the graph which synthesize | combined according to the arrangement | sequence order of the rotation angle. FIG. 10F is a graph showing a state in which a portion having a large value change is deleted from the graph of FIG.

  The synthesizing unit 1031 acquires the record whose “wafer ID” is “W001” from the first rotation information management table illustrated in FIG. 8, and divides the acquired record into four for each “rotation angle” of 90 degrees. To do. Specifically, a set of records whose “rotation angle” is 0 ° or more and less than 90 °, a set of records whose “rotation angle” is 90 ° or more and less than 180 °, and a “rotation angle” of 180 ° or more and less than 270 ° And a record set having a “rotation angle” of 270 degrees or more and less than 360 degrees. The graphs shown in FIGS. 10 (a) to 10 (d) show the records of each set in a graph.

Then, the synthesizing unit 1031 synthesizes the first distance information included in the first rotation distance information having the same arrangement order of the divided sets. The synthesis here is calculation of an average value. For example, the synthesizing unit 1031 has the first record when the records of each set are arranged in order from the smallest rotation angle value, that is, the “rotation angle” is “0”, “90”, “180”. , And “270”, “r ₁ ”, “r ₂₅₀₁ ”, “r ₅₀₀₁ ”, and “r ₇₅₀₁ ” average values R ₁ of the “first distance information” are the first combined distance information. And stored in a storage unit (not shown) in association with these rotation angles. Note that R ₁ = (r ₁ + r ₂₅₀₁ + r ₅₀₀₁ + r ₇₅₀₁ ) / 4.

Similarly, the second record of each set, that is, the “first” of the record whose “rotation angle” is “0.036”, “90.036”, “180.036”, and “270.036”. The average value R ₂ of the values “r ₂ ”, “r ₂₅₀₂ ”, “r ₅₀₀₂ ”, and “r ₇₅₀₂ ” of the “one distance information” is acquired as the second combined distance information, and is associated with these rotation angles. And stored in a storage unit (not shown). The same processing is performed for the third and subsequent records.

FIG. 11 is a combined distance information management table for managing the combined distance information acquired by the combining unit 1031. The composite distance information management table has attributes of “rotation angle” and “composite distance”. The “rotation angle” is a rotation angle corresponding to each of the combined four first distance information. “Composite distance” is composite distance information. It is assumed that R _m = (r _m + r _{m + 2500} + r _{m + 5000} + r _{m + 7500} ) / 4.

  FIG. 10E is a graph showing the combined distance information acquired by the combining unit 1031. Here, the horizontal axis indicates the angle of the smallest value among the “rotation angles”. As shown in FIG. 10E, by synthesizing the first distance information whose rotation angles are different by 90 degrees, the waveform generated when the rotation center as shown in FIG. 9 is shifted from the center of the wafer is The entire graph is straightened out. However, the concave portions 20, 21 and 22 and the convex portion 23 corresponding to the defective portions such as chipping and burrs, the notch portions such as the orientation flat portion, which existed in the plurality of continuous first distance information before the synthesis, The value changes with composition, but it remains because it is not canceled out.

  Next, the synthesis processing unit 1032 performs the process of detecting and deleting the minimum synthesis distance information from the plurality of synthesis distance information synthesized by the synthesis unit 1031 shown in FIG. 11 until the number of times specified in advance is reached. repeat. This deletion may be adding flag information indicating deletion to the combined distance information. Thus, for example, in FIG. 10 (e), the plurality of combined distance information of the recess 20 corresponding to the orientation flat portion having a large change in value relative to other portions is sequentially deleted, and further, Next, the combined distance information of the recesses 21 and 22 corresponding to the chipping having a large change in value with respect to the other portions is sequentially deleted.

  Next, the combination processing unit 1032 detects the maximum combination distance information and deletes it from a plurality of combination distance information remaining after deleting the minimum value a predetermined number of times. Repeat as above until the number is reached. Thereby, for example, in FIG. 10E, the combined distance information of the concave portions 21 and 22 corresponding to the burrs whose value changes greatly with respect to other portions is deleted in order. It should be noted that the number of each of the above deletions is preferably determined by repeating an experiment or the like. In addition, for example, the number of detections and deletions on the side where the notch part such as the orientation flat part is present (here, the minimum number of detections and deletions) is the number of detections and deletions on the side where the notch part such as the orientation flat part is not present ( Here, it is preferable to set the number of times larger than the maximum number of detection and deletion times).

  Accordingly, it is possible to detect and delete a portion having a large change in the magnitude of the value from the composite distance information shown in FIG. 11. The composite distance information that remains without being detected, that is, the composite that remains without being deleted. The distance information is as shown in FIG. Two or more continuous composite distance information among the composite distance information remaining without being detected is a plurality of composite distance information with small changes.

Next, the synthesis processing unit 1032 detects one synthesis distance information from the continuous synthesis distance information that remains without being detected (in this case, not deleted). Here, the number of continuous composite distance information is detected for each of a plurality of continuous composite distance information, and one composite distance information whose arrangement order is the center of the portion having the largest consecutive number Is detected. Here, for example, the combined distance information in the range of the rotation angle θ from θ ₆₀₀ to θ ₁₂₀₀ , specifically, the combined distance information of the region 25 in FIG. When it was greater than the portion of the continuous, synthesis processing unit 1032, the synthetic distance information located in the center of this range, specifically, the rotation angle corresponding to detect synthetic distance information is theta _900. Note that θ _m (m is an integer from 1 to 10,000) is, for example, a rotation angle when the wafer W001 is rotated 600 times by 0.036 degrees, that is, a rotation angle of 0.036 × m (degrees). Show. θ ₆₀₀ is, for example, a rotation angle when the wafer W001 is rotated by 0.036 × 600 (degrees).

Further, the synthesis processing unit 1032 acquires four rotation angles corresponding to the four first distance information before synthesis of the detected synthesized distance information from the synthesized distance information management table shown in FIG. For example, in the composite distance information management table shown in FIG. 11, a record including the rotation angle θ degree corresponding to the composite distance information detected above is detected as the value of “rotation angle”, and all the records included in this record are detected. Get the "Rotation angle" value. Alternatively, 90 degrees, 180 degrees, and 270 degrees are sequentially added to the rotation angle θ ₉₀₀ to obtain four rotation angles before synthesis. Here, as the rotation angle, and theta _900, and theta ₉₀₀ +90 degrees, and the theta ₉₀₀ +180 degrees, and the theta ₉₀₀ +270 degrees is acquired. Then, the synthesis processing unit 1032 uses the four first distance information r ₉₀₀ , r ₃₄₀₀ , r ₅₉₀₀ , and r ₈₄₀₀ respectively corresponding to the acquired four rotation angles as the first rotation distance information management table shown in FIG. Get from.

  The four pieces of first distance information acquired in this way are the first distance information acquired for a notch portion of a wafer, an edge that does not have burrs, chipping, etc., and therefore the influence of the notch portion and the defect portion. The distance from the rotation center of the wafer to the edge is small.

The correction information acquisition unit 1033 reads out the above-described equations (1) and (2) from, for example, a storage unit (not shown), and the four first distance information acquired by the synthesis processing unit 1032 and the first distance. One of the rotation angles corresponding to the information, here, the rotation angle θ ₉₀₀ having the smallest value acquired above is substituted into the equations (1) and (2), and the rotation center of the wafer W001 is used as the wafer W001. Correction information for moving to the center of W001, that is, an angle that is information indicating a moving direction and a length that is a moving amount are calculated. Here, it is assumed that the angle α ₁ and the length h ₁ are acquired as correction information. The correction information acquisition unit 1033 temporarily stores the acquired correction information in, for example, a storage unit (not shown).

The second distance information acquisition unit 1034 that has received the correction information reads the above-described equation (3) from a storage unit (not shown), and substitutes the angle α ₁ and the length h ₁ that are correction information into the equation (3). To obtain the ideal curve formula.

  The second distance information acquisition unit 1034 sequentially acquires the second distance information by sequentially substituting a plurality of rotation angles corresponding to the plurality of first rotation distance information into the acquired ideal curve equation. Specifically, the second distance information is sequentially calculated by substituting the respective rotation angles when the value is sequentially increased from 0 degree by 0.036 degrees to just before 360 degrees in the ideal curve equation. And the 2nd rotation distance information which has the substituted rotation angle and the acquired 2nd distance information is accumulate | stored in the storage part which is not shown in figure.

FIG. 12 is a diagram showing a second rotation distance information management table for managing the second rotation distance information acquired and accumulated by the second distance information acquisition unit 1034. The second rotation distance information management table includes “rotation angle” and “second distance information”. “Second distance information” is second distance information. For example, when the wafer W001 is an ideal circular wafer having no irregularities on the edge, the edge from the rotation center of the wafer W001 according to the rotation angle. It is the distance to. It is assumed that r _im (m is an integer from 1 to 10000) of “second distance information” is second distance information whose corresponding rotation angle is 0.036 × m (degrees).

FIG. 13 is a graph showing the relationship between the rotation angle and the second distance information of the plurality of second rotation distance information acquired by the second distance information acquisition unit 1034. The horizontal axis represents the rotation angle theta, the vertical axis represents the second distance information r _i.

The calculation means 1035 is associated with the same rotation angle in the plurality of first distance information stored in the first rotation distance information and the plurality of second distance information acquired by the second distance information acquisition means 1034. The difference between the first distance information and the second distance information is sequentially acquired. Here, as an example, the calculation unit 1035 acquires a value obtained by subtracting the first distance information from the second distance information. For example, the first distance information “r1” corresponding to the rotation angle “0” is subtracted from the second distance information “r _i1 ” corresponding to the rotation angle “0 degree” to correspond to the rotation angle “0 degree”. to get the distance difference information _"r i1 -r _1". Further, for example, the first distance information “r ₂ ” corresponding to the rotation angle “0” is subtracted from the second distance information “r _i2 ” corresponding to the rotation angle “0.036 degrees” to obtain the rotation angle “0”. to get the distance difference information corresponding to the degree "," _r i1 -r ₁ ". Similar processing is performed for other rotation angles. The calculation means 1035 stores the acquired value as distance difference information in a storage unit (not shown) in association with the rotation angle.

  FIG. 14 is a distance difference information management table for managing the distance difference information acquired by the calculation unit 1035. The distance difference information management table has attributes of “rotation angle” and “distance difference”. “Distance difference” is distance difference information.

  FIG. 15 is a graph showing the relationship between the distance difference information acquired by the calculation means 1035 and the rotation angle (FIG. 15A), and a graph for explaining the processing executed by the notch detection means 1036 (FIG. 15B). )) And a graph (FIG. 15C) for explaining the processing executed by the defect detection means 1037. In the figure, the horizontal axis indicates the rotation angle, and the vertical axis indicates the value of the distance difference information. Here, for the sake of explanation, for example, as the scale of the vertical axis of the graph of FIG. 15, a scale that is larger than the scale of the vertical axis of FIG. 9 or FIG.

  If the distance difference information acquired by the calculation means 1035 is shown in a graph, a graph as shown in FIG. This graph has unevenness on the edge shown in FIG. 9 from the value in the vertical axis direction of the graph of the first distance information, which is an actual measured value having an orientation flat part, burrs, chipping, etc. shown in FIG. This graph is obtained by subtracting the value in the vertical axis direction of an ideal graph when a non-wafer is rotated. For this reason, the value of the first distance information acquired in the edge-uneven portion of the wafer W001 is a constant value that is almost close to 0, and only the uneven portion has a positive size different from that of the other portions. Or appear in the graph as a negative value. For example, in the graph shown in FIG. 15, the convex portion 20a corresponding to the orientation flat portion, the convex portions 21a and 22a corresponding to chipping, and the concave portion 23a corresponding to the burr appear as a portion where the magnitude of the value is changed. This part has a shape close to a straight line substantially parallel to the x-axis.

The notch detection unit 1036 detects distance difference information having a size larger than a first threshold value _TH 1 specified in advance in the distance difference information acquired by the calculation unit 1035. The first threshold value _TH1 is longer than the chipping depth that normally occurs at the edge of the wafer, and is set in advance to a positive value indicating a length sufficiently shorter than the depth of the orientation flat portion. And The first threshold _TH1 is, for example, a threshold for size. Here, the positive or negative distance difference information is also larger than the first threshold value T _H1, to detect a large distance difference information than T _H1 or the distance difference information even value is less than -T _H1 Is detected.

FIG. 15B shows the first threshold _TH1 on a graph showing the relationship between the distance difference information and the rotation angle.

In addition, when it is known that the distance difference information is a value obtained by subtracting the first distance information from the second distance information, the value of the distance difference information corresponding to the orientation flat portion is a positive value. _The process of detecting distance difference information whose value is smaller than _H1 may be omitted.

The notch detection unit 1036 detects distance difference information equal to or greater than the first threshold _TH1, and acquires a rotation angle corresponding to the detected distance difference information. For example, notch detector 1036, FIG. 15 of the convex portions 20a corresponding to the orientation flat portion of _(b), to detect a large distance difference information than _{T H1.} Then, the notch detection unit 1036 acquires the minimum value and the maximum value of the rotation angle corresponding to the detected distance difference information as information indicating the position of the orientation flat part that is the notch part of the wafer W001. For example, it is assumed that the minimum value acquired by the notch detection means 1036 is θ ₃₈₀₀ and the maximum value is θ ₄₄₀₀ . The notch detection unit 1036 accumulates the acquired minimum value θ ₃₈₀₀ and maximum value θ ₄₄₀₀ in a storage unit (not shown).

Defect detecting means 1037, the distance difference information calculating unit 1035 obtains, for detecting a large distance difference information of the second threshold T _H2 size than is specified in advance. However, here, it is assumed that distance difference information having a size larger than the above-described first threshold value _TH1 is not detected. The second threshold T _H2 is a value smaller than the first threshold T _H1 and set to a value larger than 0. Since the distance difference information can take a value other than 0 due to the measurement error of the first distance information, the second threshold TH ₂ is set to a value that takes into account the value of this measurement error. The second threshold TH ₂ is a threshold for a size for detecting a defective portion of the edge, for example. Here, the second threshold value T positive or negative distance difference information is also larger than _H2 of, in order to detect, T greater distance difference information than _H2 or distance difference information even value is less than -T _H2, Is detected.

FIG. 15C shows the second threshold T _H2 in a graph showing the relationship between the distance difference information and the rotation angle.

Further, here, in the same manner as described above, the process of detecting the distance difference information to a value smaller than -T _H1 may be omitted.

The defect detection means 1037 detects distance difference information that is equal to or greater than the second threshold TH ₂ and acquires a rotation angle corresponding to the detected distance difference information. For example, the defect detection means 1037, the convex portions 21a corresponding to the defective portion of FIG. 15 (c), the in _22a, a large portion of than _{T H2,} the recesses 23a corresponding to the defective _{portion, T} value than _H2 of Detect small parts. The notch detection means 1036 detects distance difference information in which the corresponding rotation angle is continuous in the detected distance difference information, and the minimum value and the maximum value of the rotation angle corresponding to the continuous distance difference information. Are obtained as information indicating the position of the defective portion of the wafer W001. For example, it is assumed that the minimum value θ ₅₅₀ and the maximum value θ ₅₅₈ of the rotation angle are acquired for the convex portion 21a. For example, _assume that the minimum value θ ₇₄₄₆ and the maximum value θ ₇₄₅₀ of the rotation angle are acquired for the convex portion 22a. Further, for example, for the recess 23a, it is _assumed that the minimum value θ ₈₇₃₈ and the maximum value θ ₈₇₄₃ of the rotation angle are acquired.

Further, T distance difference information detected as a large portion than _H2, i.e. convex portion 21a, the minimum and maximum values of the angle of rotation corresponding to 22a, the type of information the defect indicating a further chipping Is acquired as information indicating. Further, for the rotation angle corresponding to the distance difference information detected as a portion smaller than −TH ₂ , that is, the minimum value and the maximum value corresponding to the concave portion 23 a, information indicating that it is further burr is used as the type of the defective portion. It is acquired as information to show.

Further, the defect detection means 1037 acquires the maximum absolute value of the distance difference information with continuous rotation angles as information indicating the size of the defect portion, for example, the height of burrs and the chipping depth. For example, if the maximum value of the absolute value of the distance difference information within the range of the rotation angle θ ₈₇₃₈ to θ ₈₇₄₃ is r _i8741 −r ₈₇₄₁ , the defect detection means 1037 uses this maximum value as the size of the defect portion. It is acquired as information to show.

  Then, the defect detection means 1037 stores information on the acquired defect portion, that is, a rotation angle indicating the range of the defect portion, information indicating the type of the defect portion, and information indicating the size of the defect portion in a storage unit (not shown). accumulate.

  The output unit 104 performs an abnormal output according to the information regarding the defect portion acquired by the defect detection unit 1037. The output unit 104 determines whether or not the defect detection unit 1037 has detected one or more defect portions, and performs an abnormal output when the defect portion is detected. Here, since the defect detection means 1037 has detected one or more defect portions, an abnormal output is performed. Note that the output unit 104 may perform an abnormal output when the defect detection unit 1037 outputs information on the defect portion indicating that the defect portion has been detected. Specifically, the output unit 104 transmits information indicating that an abnormality has been detected to the work transfer device 2 as an abnormal output.

Further, the output unit 104 outputs information related to the defect portion detected by the defect detection unit 1037. For example, the output unit 104 outputs information indicating the range of the rotation angle in the information related to the defect portion detected by the defect detection unit 1037 as information indicating the location where the defect exists. The output unit 104 outputs information indicating the type of the defective part as information indicating the type of the defective part. The output unit 104 outputs information indicating the size of the defective part. For example, information indicating that a burr whose height is r _i8740 -r ₈₇₄₀ exists in the rotation angle range of θ ₈₇₃₈ to θ ₈₇₄₃ is output. For example, the output unit 104 stores information relating to the defective portion in a storage unit or the like designated in advance in association with the identifier of the wafer 10. The information regarding the accumulated defective portion may be, for example, log information indicating the processing of the work processing apparatus 1.

  Although explanation is omitted here, the background of the range corresponding to the range of the rotation angle indicated by the information about the defective portion, such as the graph of the first distance information and the rotation angle shown in FIG. A graph with a different background color may be displayed on a monitor or the like. At this time, it is preferable to use different background colors for chipping and burrs. In addition, a value indicating the size of the defective portion may be displayed in each rotation angle range.

  When the workpiece transfer apparatus 2 receives information indicating that there is an abnormality from the output unit 104 of the workpiece processing apparatus 1, the workpiece transfer apparatus 2 picks up the wafer 10 placed on the turntable 52 of the edge position detector 102 and collects it. The wafer 10 is moved to the position of the container 5 and the wafer 10 is accommodated in the container 5. Thereby, the wafer 10 determined to be abnormal can be collected in the container 5 without being sent to the subsequent processing steps.

  Here, it is assumed that the defect detection unit 1037 has not detected one or more defect portions and has not acquired information on the defect portions.

  The output unit 104 determines that the defect detection unit 1037 has not detected one or more defective portions, and does not perform an abnormal output.

  Then, the output unit 104 outputs the correction information acquired by the correction information acquisition unit 1033 to the edge position detector 102.

Further, the output unit 104 outputs information indicating the cutout portion detected by the cutout detection unit 1036 to the edge position detector 102. For example, the output unit 104 outputs the rotation angle range θ ₃₈₀₀ to θ ₄₄₀₀ detected by the notch detection unit 1036 as information indicating the location where the orientation flat portion is provided.

  When the edge position detector 102 receives the correction information from the output unit 104, the turntable 52 is moved in the horizontal direction according to the correction information, and the center of the wafer 10 is turned to the turntable 52 before the movement (before the movement). The wafer 10 is moved so as to be positioned at the rotation center of the wafer 10).

  In addition, when the edge position detector 102 receives information indicating the notch, the turntable 52 is moved in the horizontal direction or rotated so that the notch is directed in a predetermined direction.

  The workpiece transfer device 2 picks up the wafer 10 whose arrangement and orientation have been changed by moving the turntable 52 from the turntable 52 and transfers the wafer 10 onto the mounting table 6 as the next mounting destination. Placed on.

  By passing the wafer 10 whose position and orientation have been corrected based on the correction information and the information indicating the notch in this way to the workpiece transfer device 2, the workpiece transfer device 2 places the wafer 10 in an appropriate position. It can be mounted on the mounting table 6 which is the next transport destination in an appropriate direction. As a result, the wafer 10 can be positioned for a wafer having no defective portion.

  Here, the edge position detector 102 changes the position and orientation of the wafer 10, but the output unit 104 transmits correction information and information indicating the notch to the work transfer device 2. The work transfer device 2 may change the position and orientation of the wafer 10.

  Further, the output unit 104 may output information indicating the notch portion and information regarding the defective portion detected by the defect detection means 1037 to a monitor or the like (not shown).

  FIG. 16 is a diagram illustrating an example of information output by the output unit 104 indicating a notch and information regarding a defective part.

  By such an output of the output unit 104, for example, the user can easily know where the orientation flat part is on the edge of the wafer W001 or what kind of defect is present. In addition, when information indicating the position of the orientation flat part or the position and type of the defective part is output to another device (not shown), in the other device, for example, the position of the orientation flat part or the defective part. It is possible to perform processing in consideration.

  Here, it is assumed that cracks derived from chipping of the edge 11 of the wafer 10 have occurred in the wafer 10 as a result of processing the one wafer 10 transferred to the mounting table 6 by the workpiece transfer system 1000. This is considered that there was a defective portion that could not be detected in the defect detection processing of the workpiece processing apparatus 1. For this reason, for example, it is assumed that the evaluation related information having information indicating that there is a defective portion that could not be detected by the current defect detection process is input to the user and the evaluation related information receiving unit 105.

When the evaluation-related information receiving unit 105 receives evaluation-related information having information indicating that there is a defective part that could not be detected, the setting unit 106 has a defective part smaller than the threshold used for defect detection. Get a detectable threshold. Specifically, the threshold value obtained by changing the value of the second threshold value _TH 2 used for detecting the defective portion to a value that is smaller than the current value by a value specified in advance is acquired. For example, to get the current second value obtained by subtracting the pre-specified value from the value of the threshold T _H2 as a new second threshold. The value to be subtracted here is preferably a very small value. In addition, it is preferable that the magnitude of the second threshold value after subtraction does not become 0 or less.

  And the setting part 106 updates the 2nd threshold value which the defect detection means 1037 was using with the acquired new 2nd threshold value.

  As a result, it becomes possible to detect a defect portion finer than when the threshold value before update is used, and to feed back the detection result of the defect portion, thereby reducing defect detection leakage.

(Modification 1)
Hereinafter, in the specific example described above, an example in which the setting unit 106 acquires a threshold value when detecting a defective portion using machine learning will be described.

  Here, for example, it is assumed that the transfer destination of the workpiece transfer system 1000 is a CVD apparatus (not shown), and the mounting table 6 is a mounting table of this CVD apparatus.

  The evaluation related information receiving unit 105 uses the second threshold value used when the defective portion is detected on the wafer 10, the processing temperature of the processing performed in the CVD apparatus as the transfer destination of the wafer 10, and the processing time. Are received in correspondence with correct / incorrect information indicating whether or not the detection result of the defective portion by the work processing apparatus 1 is correct, and are accumulated in a storage unit (not shown).

  The setting unit 106 sequentially learns, as teacher data, the second threshold value, the processing temperature, the processing time, and the correctness information included in the received plurality of evaluation related information.

  Then, when the user performs processing on one wafer 10 under one processing condition using the same CVD apparatus, a threshold value is acquired so that a defective portion that causes a problem such as cracking during the processing can be detected. Therefore, a plurality of sets each corresponding to the processing temperature and processing time of this one processing condition and a plurality of values that are candidates for the second threshold are input to the learning results, and each set is input. A determination result as to whether or not the detection result when the defective portion is detected with the second threshold value included in is correct is acquired. Thereby, it is possible to determine whether or not it is appropriate to perform defect detection using the second threshold for the combination of the input processing temperature, the processing time, and the second threshold. it can. The plurality of values that are candidates for the second threshold are, for example, a plurality of values that are separated from a predetermined value. The plurality of values that are candidates for the second threshold are, for example, a plurality of peripheral values such as a second threshold used as a default.

  Then, one of the second threshold values corresponding to the determination result determined to be correct, for example, the one having the largest value is acquired. Then, the second threshold value is set as a second threshold value used by the defect detection means 1037 for defect detection.

  As a result, the wafer 10 having a defect portion that causes a problem in the CVD process in the subsequent process can be appropriately detected by using the learning result, and the wafer 10 having an unevenness that does not cause a problem in the subsequent process in the edge. Can obtain a second threshold that can be undetected. As a result, for example, the wafer 10 can be selected with high accuracy.

  As described above, according to the present embodiment, when aligning the position and orientation of the workpiece during the conveyance of the workpiece, it is possible to detect the defective portion of the edge of the workpiece and appropriately detect the defect of the workpiece. Can do.

  Further, according to the present embodiment, in the combined distance information obtained by combining a plurality of first distance information whose rotation angles are different by 90 degrees, a plurality of continuous combined distance information with a small change is detected, By obtaining correction information for moving the rotation center of the workpiece to the center of the workpiece using the plurality of first distance information of the synthesis source corresponding to the one of the synthesis distance information of the synthesis distance information, It is possible to appropriately acquire highly accurate correction information using the first distance information acquired from a portion with few edge irregularities.

  Further, according to the present embodiment, using the correction information described above, a relational expression indicating the relation between the rotation angle and the distance to the edge when the workpiece is a circular shape without unevenness is obtained, and the obtained relation By using the difference between the second distance information obtained from the equation and the first distance information, information indicating the notch portion of the workpiece and information regarding the defective portion of the workpiece, the unevenness of the edge of the workpiece is appropriately indicated. be able to. For example, the position of the notch portion of the workpiece can be appropriately indicated. In addition, the position and type of the defective portion of the workpiece edge can be appropriately indicated.

(Embodiment 2)
In the second embodiment of the present invention, an image obtained by imaging a defective portion of the edge of the workpiece in the first embodiment is output.

  FIG. 17 is a block diagram of the work processing apparatus 3 in the present embodiment.

  The work processing apparatus 3 includes a first rotation distance information storage unit 101, an acquisition unit 103, an output unit 104, an evaluation related information reception unit 105, a setting unit 106, an edge position detector 301, an imaging unit 303, and a corrected defect position acquisition unit 304. , An image output unit 305, a detection unit 306, an evaluation unit 307, an evaluation result output unit 308, a situation reception unit 309, an image situation information storage unit 310, and an image situation information storage unit 311. The edge position detector 301 includes a moving unit 302.

  The acquisition unit 103 includes, for example, a combining unit 1031, a combining processing unit 1032, a correction information acquiring unit 1033, a second distance information acquiring unit 1034, a calculating unit 1035, a notch detecting unit 1036, and a defect detecting unit 1037.

  First rotation distance information storage unit 101, acquisition unit 103, output unit 104, evaluation related information reception unit 105, setting unit 106, synthesis unit 1031, synthesis processing unit 1032, and correction information acquisition unit 1033 constituting acquisition unit 103 The configuration and operation of the second distance information acquisition unit 1034, the calculation unit 1035, the notch detection unit 1036, the defect detection unit 1037, and the like are the same as those in the first embodiment, and a detailed description is given here. Omitted.

  FIG. 18 is a perspective view (FIG. 18A) showing an example of the work processing apparatus 3 of the embodiment, and a schematic diagram (FIG. 18B) showing an example of the edge position detector 301 in the present embodiment. The workpiece processing apparatus 3 includes a mounting table 3021 that is a table for mounting the workpiece 10, and an imaging unit 303 for imaging a defective portion of the edge of the workpiece 10 mounted on the mounting table 3021. An edge detector 55 is provided inside the cover 3025.

  The edge position detector 301 acquires a plurality of pieces of first rotation distance information for the workpiece 10. Specifically, the edge position detector 301 detects the edge position of the workpiece 10, acquires a plurality of pieces of first rotation distance information for the workpiece 10, and accumulates the first rotation distance information storage unit 101.

  The edge position detector 301 includes, for example, an edge detection unit 55 that detects the edge position of the workpiece 10, a moving unit 302, an encoder 56, and a storage unit 57. The edge detection unit 55 includes a projector 55a and a sensor 55b. The configuration and processing of the edge detection unit 55, the encoder 56, and the storage unit 57 are the same as those of the edge position detector 102 shown in FIG.

  The moving unit 302 moves the workpiece 10. For example, the moving unit 302 moves the workpiece 10 placed on the placing table 3021. The movement of the workpiece 10 by the moving unit 302 is, for example, a movement that rotates the workpiece 10 or a movement that moves the workpiece 10 in parallel. Moving the workpiece 10 in parallel means, for example, moving the workpiece 10 in a plane including the surface of the workpiece 10.

  The moving unit 302 rotates the workpiece 10. The moving unit 302 includes, for example, a rotation mechanism 3022 that rotates the mounting table 3021 around the central axis as a rotation axis. Then, for example, the work 10 placed on the placement table 3021 is rotated by rotating the placement table 3021 by the rotation mechanism 3022 so that the placement surface is located in the same plane. The rotation mechanism 3022 includes an electric motor (not shown) that transmits the rotation to the mounting table 3021. On the upper surface of the mounting table 3021 on which the workpiece 10 is mounted, for example, a so-called suction base (not shown) provided with a suction surface for sucking the workpiece 10 to be placed is provided. For example, the encoder 56 detects the amount of rotation of an electric motor (not shown) included in the rotation mechanism 3022 corresponding to the rotation angle of the workpiece 10 and outputs a digital signal.

  For example, the edge position detector 301 acquires a measurement value indicating the edge position each time the moving unit 302 rotates the workpiece 10 by a rotation angle specified in advance. And using this rotation angle and a measured value, 1st distance information and a rotation angle are acquired sequentially. The measured value indicating the position of the edge is, for example, a measured value of the distance from the rotation center of the workpiece 10 to the edge. For example, when the edge position detector 301 acquires the first rotation distance information for different workpieces, the first rotation distance is obtained by associating the plurality of first rotation distance information acquired for each workpiece with the workpiece identifier of each workpiece. Accumulate in the information storage unit 101.

  The moving unit 302 further has a structure for moving the workpiece 10 placed on the placement table 3021 in a direction parallel to the surface of the workpiece 10. Here, “parallel” is a concept including substantially parallel. The direction parallel to the surface of the workpiece 10 may be considered as a direction parallel to the mounting surface of the mounting table 3021 on which the workpiece 10 is mounted. For example, the moving unit 302 moves the workpiece 10 in the horizontal direction. For example, the moving unit 302 has a configuration in which the workpiece 10 is moved in two orthogonal directions that are parallel to the surface of the workpiece 10. The moving unit 302 moves the workpiece 10 in parallel, for example, by a combination of movements in the respective directions of the two axes. Here, for convenience, these two axes are referred to as an x-axis direction and a y-axis direction. Specifically, the moving unit 302 includes an x-axis moving mechanism 3023 that moves the rotating mechanism 3022 in the x-axis direction, and a y-axis moving mechanism 3024 that moves the x-axis mechanism 3023 in the y-axis direction. For example, each of the x-axis moving mechanism 3023 and the y-axis moving mechanism 3024 includes a combination of a ball screw and an electric motor provided so as to extend in the x-axis direction and the y-axis direction. However, the structure etc. for the moving part 302 to move the workpiece | work 10 mounted in the mounting base 3021 in the direction parallel to the surface of the workpiece | work 10 are not ask | required.

  The moving unit 302 uses, for example, information such as correction information for aligning the workpiece 10 output by the output unit 104 described in the first embodiment, so that the center of the workpiece 10 is positioned at a predesignated position. The workpiece 10 is moved so as to be positioned. For example, the moving unit 302 appropriately combines a movement for moving the mounting table 3021 on which the workpiece 10 is mounted in a direction parallel to the mounting surface of the mounting table 3021 with a movement for rotating the mounting table 3021. Then, the workpiece 10 is moved as described above.

  The moving unit 302 moves the workpiece 10 using the information regarding the defective portion of the edge of the workpiece 10 output from the output unit 104 so that the defective portion of the edge of the workpiece 10 is arranged in the imaging region. The imaging area is an area designated in advance, and specifically, an area that can be imaged by the imaging unit 303. The imaging region may be considered as a range that can be imaged by the imaging unit 303. It is preferable that the moving unit 302 moves the workpiece 10 so that the defective portion of the edge of the workpiece 10 is located at a predetermined position in the imaging region, for example, the center.

  For example, the moving unit 302 uses the information indicating the position of the defective portion, which is information related to the defective portion of the edge, for example, the information indicating the angle of the defective portion with respect to the rotation center of the workpiece 10, The workpiece 10 is moved so as to be positioned within the imaging region. The movement here is at least one of a movement for rotating the workpiece 10 (hereinafter referred to as rotational movement) and a movement for moving the workpiece 10 parallel to the surface of the workpiece 10 (hereinafter referred to as parallel movement). Is a combination.

  Hereinafter, an example of the process in which the moving unit 302 moves the position of the defective portion into the imaging region will be described.

(1) When moving so that the center of the workpiece is arranged at a predesignated position The moving unit 302 is, for example, the center of the workpiece 10 is arranged at a predesignated position, and an edge defect of the workpiece 10 is detected. The workpiece 10 is moved so that the portion is arranged in the imaging region. The predesignated position is, for example, a position where the center of the workpiece 10 is to be arranged or a reference position when aligning the workpiece 10, and a specific example will be described in the first embodiment. When the workpiece 10 is transferred to the workpiece transfer device 2 or the like, the center of the workpiece 10 is disposed. For example, the workpiece 10 is mounted on the mounting table 3021 by the workpiece transfer device 2 or the like in a state where the center of rotation of the mounting table 3021 of the moving unit 302 is disposed at the position designated in advance. . For example, the moving unit 302 moves the workpiece 10 to the above position by appropriately combining rotational movement and parallel movement.

  The moving unit 302 performs the above-described movement using, for example, information for aligning the workpiece 10 output from the output unit 104 and information regarding the defective portion. For example, the moving unit 302 outputs correction information for aligning the rotation center of the workpiece 10 output from the output unit 104 with the center of the workpiece 10 and rotation angle information indicating a defective portion of the edge of the workpiece 10 (for example, the defect portion). Using the angle information indicating the range), the workpiece 10 is moved so that the center of the workpiece 10 is arranged at a predesignated position and the defective portion of the edge of the workpiece 10 is arranged in the imaging region.

  FIG. 19 is a diagram (FIG. 19A) showing a state before the workpiece 10 is rotated for explaining an example of processing for moving the defective portion of the workpiece 10 into the imaging region, and the workpiece 10 is rotated. It is a latter figure (FIG.19 (b)). In the figure, the same reference numerals as those in FIG. 2 denote the same or corresponding parts.

  In the figure, the xy coordinate is a coordinate system set in advance with respect to the edge position detector 301 of the workpiece processing apparatus 3, and the origin O is a position where the center of the workpiece 10 is to be disposed. It is assumed that the rotation center of the mounting table 3021 on which the workpiece 10 is placed is at a position that coincides with the origin O when the workpiece 10 is placed, for example. When the workpiece 10 is placed, the center Q of the workpiece 10 is not located at the origin O, and the workpiece 10 rotates with the position of the origin O as the rotation center. It is assumed that the center of the workpiece 10 is located at a distance h from the origin in the direction of the angle α.

The point P ₁ is one point in the imaging area AP ₁ , for example, a center point, and is a position of a rotation angle specified in advance with respect to the origin O and is located at the same distance as the radius of the workpiece 10. Is set. Thus, when the center of the workpiece 10 is placed on the origin O, on the edge of the workpiece 10, so that the point P ₁ is located.

  In FIG. 19, in the positive range of the x-axis, the position of the line segment connecting the position where the edge of the work 10 intersects the x-axis and the rotation center O of the work 10 which is the origin has a rotation angle of 0 °. It is assumed that the rotation angle increases in the counterclockwise direction.

  Hereinafter, a specific example will be described with reference to FIG. In the state shown in FIG. 19A, the moving unit 302 is a line (reference line for the angle α for aligning the center of rotation of the workpiece 10 with the center of the workpiece 10 indicated by the correction information described in the first embodiment). Here, an angle θt formed by a line orthogonal to the x axis (here, the y axis) and a line connecting both ends of one defect portion 1901 to be moved into the imaging region is acquired. This angle θt may be considered as a deviation angle. For example, by using information such as the radius of the workpiece 10 stored in advance in a storage unit (not shown) and the rotation angles of both ends A and B of the defective portion 1901, the coordinates of both ends A and B of the defective portion 1901, etc. Can be calculated, the angle θt can be calculated using the coordinates A, B, etc. at both ends. This angle θt corresponds to the angle formed by the line QM connecting the midpoint M on the line connecting both ends A and B of the defect portion 1901 and the center of the workpiece 10 with the reference line (for example, the x axis). To do.

Next, the midpoint M of the line connecting both ends of the defect portion 1901, a line QM connecting the center of the workpiece 10, if parallel to the line segment OP _1, after the workpiece 10 horizontally, e.g., x by moving in the axial direction and the y-axis direction, a line QM connecting the center of the line midpoint M and workpiece 10 connecting both ends of the defect portion 1901 may overlap with the line segment OP _1. Therefore, the midpoint M of the line connecting both ends of the defect portion 1901, a line QM connecting the center of the workpiece 10 is, as to be parallel to the line segment OP _1, the workpiece 10, the origin O is the center of rotation A rotation angle γ for rotation as the center is calculated. For example, if the angle formed by the straight line OP ₁ connecting the center point P ₁ of the imaging region and the origin O with the reference line (for example, the x axis) is β, β−θt It becomes.

By rotating the workpiece 10 around the origin O with this rotation angle γ, as shown in FIG. 19B, the midpoint M on the line connecting both ends of the defective portion 1901 and the center of the workpiece 10 are connected. line QM becomes parallel to the line segment OP _1.

At this time, the center Q of the workpiece 10 is located at a distance h in the direction of the angle α + γ with respect to the origin O because the workpiece 10 is rotated by γ. For this reason, by moving the work 10 so that the center Q of the work 10 overlaps the origin O, that is, by moving the work 10 by the distance h in the opposite direction of the angle α + γ, the line segment QM becomes the center Q There was translation so as to overlap the origin O, the overlap between the line segment OP _1, the midpoint M of the defect portion 1901 is disposed in the imaging region AP _1. Further, here, the middle point M of the defect portion 1901 is positioned on a straight line connecting the center point P ₁ of the imaging area AP ₁ and the origin O which is the position where the center of the workpiece 10 is to be arranged.

Therefore, as described above, for each defect portion to be imaged, information indicating the defect portion and information indicating the position of the imaging region AP ₁ (for example, information indicating the center point P ₁ ) are used. An angle θt formed by a midpoint of a line segment connecting both ends of the portion with respect to a line orthogonal to a line serving as a reference of the angle is calculated, and the rotation center of the workpiece 10 is rotated using the angle θt. The rotation angle γ is calculated, and the center of the workpiece 10 rotated by the angle γ is designated in advance using the angle α indicating the moving direction for moving the rotation center of the workpiece 10 indicated by the correction information. An angle α + γ indicating a moving direction for moving to a position is calculated. Then, when imaging each defective portion, the correction information is rotated in a direction opposite to the direction indicated by the angle α + γ by rotating each defective portion with the rotation angle γ from the initial state where the workpiece 10 is mounted on the mounting table 3021. Is moved in the horizontal direction by the amount of movement h indicated by.

Thus it is arranged at a position where the center of the workpiece 10 is designated in advance, and can be defective portion 1901, to be placed in the imaging region AP _1.

  Further, since the defect portion can be imaged in a state where the center of the workpiece 10 is arranged at a position designated in advance, for example, when the workpiece 10 has a circular shape or the like, the workpiece in the image obtained by imaging is selected. It is possible to align the positions of the ten edges at substantially the same position, and it is possible to provide a highly convenient image that is easy to see when comparing a plurality of images.

  The order of the rotational movement and the horizontal movement is not limited.

  Further, the calculation formulas used in the above are examples, and other calculation formulas may be used in the present invention as long as substantially the same value can be obtained. In addition, the angle and the like used above may be appropriately changed depending on the rotation direction of the workpiece 10, the position where it is 0 °, the setting of a reference line, and the like as long as substantially the same value can be obtained. It may be used.

  In addition, the straight line or line segment such as the x axis designated in advance is not necessarily a straight line or line segment serving as a reference for the rotation angle α indicating the direction for moving the rotation center of the workpiece 10 to the center of the workpiece 10. In this case, for example, it is acquired when the workpiece 10 is moved by the difference between the straight line serving as the reference of the rotation angle α and the inclination or the like of a straight line or a line segment such as the x axis specified in advance. What is necessary is just to correct | amend a moving direction, a moving distance, and a rotation angle suitably. In addition, the position designated in advance where the center of the workpiece 10 should be arranged does not have to be the position where the rotation center of the workpiece when the workpiece 10 is placed on the moving unit 302. Depending on the positional relationship between the position at which the rotation center is placed and the position designated in advance where the work 10 is placed, the movement direction acquired when the work 10 is moved, the movement distance, What is necessary is just to correct | amend a rotation angle suitably.

  In the above processing, the movement direction is mainly indicated by an angle or the like. However, instead of the angle, coordinates acquired from the angle and the movement amount or the like may be used.

  Further, the above processing is an example, and other methods may be used in the present invention as long as a substantially similar rotation angle γ, movement direction of the rotation center, and the like can be acquired.

(2) When the workpiece is not moved in the horizontal direction The moving unit 302 performs, for example, only rotational movement on the workpiece 10 placed on the placement table 3021 in order to acquire the first rotation distance information. The defective part may be moved to the imaging region. Specifically, the moving unit 302 can appropriately arrange the defective part in the imaging region by rotating the workpiece 10 according to the rotation angle indicating the position of the defective part output from the output unit 104. it can. For example, an average angle of the angles indicating the positions of both ends of the defective portion is calculated, and this angle coincides with an angle indicating the direction of the center point of the imaging region with respect to the rotation center and a pre-specified reference line. As described above, by rotating the workpiece 10, the workpiece 10 can be moved so that the center of the defective portion is positioned substantially at the center of the imaging region.

(3) When the center of the workpiece is aligned with the rotation axis of the mounting table for rotating the workpiece. For example, after the moving unit 302 lifts the workpiece 10 from the mounting table 3021, it moves in the horizontal direction and loads the workpiece 10 again. Lifting means (not shown) or the like for placing on the mounting table 3021 is provided, and using the correction information output from the output unit 104, the workpiece 10 is lifted from the mounting table 3021 by this lifting unit, and the output unit 104 The center of the workpiece 10 is moved so as to overlap the rotation center of the mounting table 3021 that rotates the workpiece 10, and the workpiece 10 is mounted on the mounting table 3021. Then, as described above, by using the angle θt indicating the position of the defect portion acquired from the defect portion, the defect portion is rotated by the rotation angle γ, and the defect portion is moved into the imaging region. May be.

  Note that means other than the lift means described above may be used as long as the position of the workpiece 10 can be moved on the mounting table 3021.

  Hereinafter, in the present embodiment, a case where the moving unit 302 moves the workpiece 10 by the process (1) will be described as an example.

  When there are a plurality of defective portions on the edge of one workpiece 10, the moving unit 302 may sequentially move each defective portion to the imaging region. For example, the moving unit 302 moves the next defective portion to the imaging region every time the imaging unit 303 finishes imaging the defective portion moved to the imaging region.

  Further, the moving unit 302 may collectively move a plurality of defect portions located close to each other among a plurality of defect portions present on the edge of one workpiece 10 to the same imaging region. The defect part located in proximity is, for example, a defect part located within a predesignated range. To give a specific example, the rotation angle indicating the position of the defect part is within a predesignated range. It is a defective part. The range designated in advance is, for example, a range equal to or less than the range of the edge of the workpiece 10 that can be accommodated in the imaging region at a time. For example, the moving unit 302 moves the workpiece 10 so that the positions of the defect portions at both ends among the plurality of defect portions that are close to each other at the edge are located at the center of the imaging region. May be. In this case, the plurality of adjacent defect portions may be considered as one defect portion, and the plurality of adjacent defect portions may be moved into the imaging region using a rotation angle or the like indicating the positions of both ends thereof. This process may be considered as a process of grouping and moving adjacent defect portions.

  The moving unit 302 may move only one or more defective portions detected by the detecting unit 306 among the defective portions at the edge of the workpiece 10 to the imaging region. The defect portion detected by the detection unit 306 is one or more defect portions that are larger in size than the other defect portions at the edge of the workpiece 10. The processing of the detection unit 306 will be described later.

  Note that the moving unit 302, when imaging of one or more defective portions of one workpiece 10 is completed, for example, allows the workpiece 10 in an aligned state to be transferred to the subsequent workpiece transfer device 2 or the like. The center of the work 10 is arranged at a predesignated position as described above using information for aligning the work 10 output by the output unit 104, information for specifying the orientation of the work 10, and the like. In addition, the workpiece 10 may be moved so that the orientation of the workpiece 10 is a predesignated orientation.

  Further, the moving unit 302 may not perform the process of moving the defective part as described above to the imaging region when the one workpiece 10 has no defective part. For example, when the information regarding the defective portion output from the output unit 104 indicates that the workpiece 10 has no defect, the processing for moving the defective portion to the imaging region as described above may not be performed.

  The moving unit 302 may appropriately perform operations similar to those of the turntable 52, the turntable rotating mechanism 53, the electric motor 54, and the like described in the first embodiment other than those described above. Good.

  The moving unit 302 may have a configuration such as an MPU or a memory for calculating information such as a moving distance and a rotation angle. A processing procedure for calculating a movement distance, a rotation angle, and the like are usually realized by software, and the software is recorded in a recording medium such as a ROM. However, it may be realized by hardware (dedicated circuit).

  Here, the case where the moving unit 302 constitutes a part of the edge position detector 301 has been described as an example, but the moving unit 302 may be considered not to be a part of the edge position detector 301. .

  The imaging unit 303 images a defective portion at the edge of the workpiece arranged in the imaging region. Taking an image of a defective part means, for example, taking an image of an imaging area in which the defective part is arranged. The imaging unit 303 is a camera including an image sensor such as a CCD or a CMOS. For example, the imaging unit 303 is arranged such that the imaging region is a region including a part of the edge of the workpiece 10 in a state where the center is arranged at a predetermined position and the periphery thereof. Yes. The imaging unit 303 is usually installed so that its optical axis is perpendicular to the surface of the workpiece 10. The position where the imaging unit 303 is installed is preferably movable in the horizontal direction so that the imaging region is changed according to the size of the workpiece 10. The imaging unit 303 is attached to the work processing apparatus 3 with a jig or the like, for example. In this case, even if the moving unit 302 moves the workpiece 10, the position of the imaging unit 303 is prevented from moving.

  The imaging unit 303 usually has an optical system for forming an image of light from the imaging target on the light receiving surface of the image sensor. In addition, the imaging unit 303 may include a lighting fixture for illuminating the imaging region and its surroundings, such as ring illumination. As the imaging unit 303, it is preferable to use an imaging unit that can capture an image of a high-resolution defect portion. As an example of the imaging unit 303, for example, a CCD camera having a viewing angle of 3 mm square and a number of pixels of 350,000 pixels is used. For example, a consumer digital camera may be used as the imaging unit 303. The image captured by the imaging unit 303 may be a color image or a gray scale image. The color depth of the image does not matter. The image captured by the imaging unit 303 is normally a still image, but may be a moving image. The imaging unit 303 may perform imaging with a fixed focus, or may perform imaging with autofocus. The data format of the image acquired by the imaging unit 303 is not limited. As the imaging unit 303, a so-called scanner that performs imaging by scanning a line sensor may be used.

  For example, when the moving unit 302 moves one defective part or a set of adjacent defective parts to the imaging region, the imaging unit 303 images the defective part. However, imaging may be performed in response to an instruction from a user or the like received by a reception unit (not shown).

  The imaging unit 303 may capture only a defective portion detected by a detection unit 306 described later among defective portions at the edge of the workpiece 10. Thereby, it is possible to selectively image only one or more defect portions having a size larger than that of other defect portions among the plurality of defect portions at the edge of the workpiece 10.

  Note that the work processing device 3 may include a plurality of imaging units 303. For example, a plurality of imaging units 303 having different imaging regions or partially overlapping imaging regions may be provided. The plurality of imaging units 303 are, for example, a plurality of imaging units each having an arrangement region along the edge of the workpiece with the center arranged at a predetermined position. The plurality of imaging units 303 may perform imaging or the like at the same time, for example, substantially like one imaging unit. By doing in this way, it is possible to simultaneously image a plurality of sets of defective portions existing in a wide range, and it is possible to shorten the time required for imaging and movement for imaging.

  The corrected defect position acquisition unit 304 uses information for aligning the workpiece 10 output from the output unit 104, information for specifying the orientation of the workpiece 10, and information regarding the defective portion of the edge of the workpiece 10. Then, correction defect position information, which is information indicating the position of the defective portion of the workpiece, is obtained with reference to the center of the workpiece 10 and the direction specified for the workpiece. The information for specifying the orientation of the workpiece 10 is information indicating the position of a notch portion of the workpiece 10 such as an orientation flat surface, for example. The information indicating the position of the notch is, for example, information indicating the position of the midpoint of the line segment connecting both ends of the notch. The information indicating the position of the notch is the rotation angle of the line connecting the midpoint of the line connecting both ends of the notch and the center of the workpiece 10. The corrected defect position information is, for example, information that represents the position of a defect on the edge of the workpiece 10 on the basis of the position specified by the center of the workpiece 10 and the position of the notch. Specifically, the corrected defect position information connects a line segment connecting the point indicating the position of the notch and the center of the workpiece 10, and a point indicating the defective portion of the edge of the workpiece 10 and the center of the workpiece 10. The angle formed by the line. The point indicating the position of the notch is, for example, the midpoint of a line segment that connects both ends of the notch. The point indicating the position of the defective portion is, for example, the midpoint of a line segment connecting both ends of the defective portion.

  The use of the center of the workpiece 10 and the orientation specified for the workpiece as a reference means that the specified orientation is set to a rotation angle reference, for example, at a position corresponding to 0 °, other than 0 °. The desired rotation angle may be set, and the direction specified according to this direction may be set as a reference for the rotation angle.

  As described above with reference to FIG. 19, a line connecting the midpoint of both ends of the defective portion and the center of the workpiece 10 is a straight line orthogonal to a predetermined line (for example, the y-axis in FIG. 19, etc.). ) Is the same as the angle formed by a straight line connecting both ends of the defect portion with a predetermined straight line (for example, the x-axis in FIG. 19), and this angle indicates the positions of both ends of the defect portion. It can be obtained from information. For this reason, by acquiring this angle for each defective portion, the rotation angle when the center of the workpiece 10 is the center of rotation at the midpoint of both ends of the defective portion can be calculated. A similar rotation angle can be calculated for the notch by using the information on the positions of both ends of the notch output by the output unit 104 and the like. Then, by subtracting the rotation angle of the notch portion from the rotation angle of each defect portion calculated in this way, the rotation angle of each defect portion based on the line connecting the notch portion and the center of the workpiece 10 It is possible to acquire correction defect position information.

  The correction defect position acquisition unit 304 rotates a straight line connecting the midpoint of the defect portion calculated when the moving unit 302 moves the workpiece 10 and the center of the workpiece 10 when acquiring the correction defect position information. You may make it utilize the information of an angle etc. suitably. As described above, the correction defect is obtained by directly using the information for aligning the workpiece 10 output by the output unit 104, the information for specifying the orientation of the workpiece 10, and the information regarding the defective portion of the edge of the workpiece 10. The position information is acquired, the moving unit 302 or the like acquires the corrected defect position information using the information acquired using these pieces of information, and here, the work 10 output by the output unit 104 is aligned. It is assumed that the corrected defect position information is acquired using the information for identifying the orientation of the workpiece 10 and the information regarding the defective portion of the edge of the workpiece 10.

  The image output unit 305 outputs an image captured by the imaging unit 303. The output here is, for example, display on a monitor screen, projection using a projector, printing on a printer, transmission to an external device, accumulation in a recording medium, other processing device or other program, etc. It is a concept including delivery of processing results.

  For example, the image output unit 305 outputs the image captured by the imaging unit 303 in association with at least one of the identifier of the workpiece 10 corresponding to this image and the identifier of the defective portion. The identifier of the workpiece 10 may be a code or the like individually assigned to the workpiece 10, and an identifier (for example, a code) indicating a lot of a workpiece group including a plurality of workpieces including the workpiece to be imaged. A combination with information indicating the order of workpieces to be imaged in the lot (for example, information such as what number) may be used. The identifier of the defective part is a code such as a number assigned to the defective part. The identifier of the workpiece 10 corresponding to the image is the identifier of the workpiece 10 that is the target of image capturing. In addition, the identifier of the defective portion corresponding to the image is an identifier of one or more defective portions that have been imaged. Further, the image output unit 305 may output the corrected defect position information acquired by the corrected defect position acquisition unit 304 in association with the image for the defect portion that is the imaging target of the image.

  When the image output unit 305 displays an image, the displayed image can be enlarged, reduced, or the display range can be moved in accordance with an instruction from a user or the like received via a receiving unit (not shown). It is preferable to do. In this way, by enabling enlargement, if the image captured by the imaging unit 303 is a high resolution, the defective portion of the edge can be enlarged and displayed, and the shape of the defective portion of the edge that is difficult to see with the naked eye Etc. can be easily confirmed.

  Further, when displaying an image, information indicating the scale of the image, for example, a scale, a scale, or the like, may be displayed so as to overlap the image. By doing in this way, the size of a defective part can be grasped easily. Further, the position where information indicating the scale of the image is displayed may be changed according to a user instruction. Note that the scale, scale, and the like are appropriately calculated according to the resolution of the imaging unit 303, the distance from the imaging unit 303 to the workpiece 10, and are designated in advance from a storage unit (not shown) according to the resolution and distance. What is necessary is just to acquire the scale and scale. You may make it acquire the distance from the imaging part 303 to the workpiece | work 10, for example using the sensor for distance measurement (not shown) etc.

  The image output unit 305 may or may not include an output device such as a display, a printer, a communication unit, or a storage unit. The image output unit 305 can be realized by output device driver software, or output device driver software and an output device.

  The detection unit 306 detects one or more defect portions having a large defect portion size among the defect portions of the edge of the workpiece 10 using the information regarding the defect portion of the edge of the workpiece 10 output from the output unit 104. . The one or more defect portions having a large size may be considered as a defect portion that is large enough to satisfy a predetermined condition for the size.

  For example, the detection unit 306 detects one or more defect portions using information indicating the range of the rotation angle of the defect portion, which is information on the defect portion output from the output unit 104. For example, the detection unit 306 detects a defective portion whose rotation angle range is equal to or greater than a threshold value related to a rotation angle range specified in advance as one or more defect portions having a large defect portion size. In addition, as one or more defect portions having a large defect portion size, a predetermined number of defect portions may be detected in order from the defect portion of one workpiece 10 in descending order of the rotation angle range.

  For example, the detection unit 306 detects one or more defect portions using information about distance difference information that is information about the defect portions output from the output unit 104. The detection unit 306 detects, for example, a defect portion having a maximum value of distance difference information associated with the defect portion in advance as a threshold value or more as one or more defect portions having a large defect portion size. In addition, as one or more defect parts having a large defect part size, a predetermined number of defect parts are detected in order from the one having the largest value of the distance difference information associated with the defect part of one workpiece 10. Also good. The distance difference information associated with the defective portion may be considered as information indicating the depth and height of the defective portion.

  In addition, the detection unit 306 may detect one or more defect portions having a large defect portion size according to a combination of the information indicating the range of the rotation angle and the information related to the distance difference information. Good. For example, a defective portion in which the rotation angle range is equal to or greater than a threshold value and the distance difference information value is equal to or greater than the threshold value may be detected. In addition, a defect portion in which the rank order of the range of the rotation angle and the rank order of the distance difference information are both within a predetermined rank may be detected.

  Note that the detection unit 306 may detect a defective portion that satisfies conditions other than the above as one or more defective portions having a large size of the defective portion.

  The evaluation unit 307 uses the image output from the image output unit 305 to evaluate a defective portion indicated by this image. Evaluating the defective part means, for example, evaluating the influence of the defective part on the workpiece 10. For example, when the workpiece 10 in which the defective portion is detected is used in the subsequent process, whether or not the defective portion affects the workpiece 10 and what kind of influence it has. It is to evaluate. Evaluating the defective part may be, for example, evaluating whether or not the work 10 having the defective part is likely to be broken or broken in the subsequent process due to the defective part. Good. Evaluating the defective part may be evaluating whether the workpiece 10 is a workpiece having an abnormality.

  For example, the evaluation unit 307 evaluates a defective portion indicated by the image by pattern matching. For example, one or more pieces of evaluation pattern management information, which is information having an image pattern and an evaluation result for a defective portion in association with each other, is stored in advance in a storage unit (not shown). Then, it is determined whether the image output by the image output unit 305 matches the image pattern included in each evaluation pattern management information. If the image pattern matches, the evaluation result associated with the image pattern is acquired. . The image pattern is, for example, information on feature points of the image. The feature point of the image is information indicating the number of corners of the defective portion, the position of the corner, the width and depth of the defective portion, and the like. An image having a feature point that is determined to match the feature point indicated by the image pattern is determined to be an image that matches the image pattern. The evaluation unit 307 may perform image processing such as binarization on the image output by the image output unit 305 before performing pattern matching.

  Note that the pattern matching process performed on the image is a known technique, and thus a detailed description thereof is omitted here.

  In addition, the evaluation unit 307 may perform an evaluation of a defective portion indicated by an image by performing a similarity search of the images, for example. For example, one or more pieces of evaluation image management information, which is information having an evaluation image and an evaluation result for the defective portion in association with each other, is stored in advance in a storage unit (not shown). Then, the similarity between the image output by the image output unit 305 and each evaluation image is acquired, and when the similarity is equal to or higher than a predetermined threshold value, the evaluation unit 307 displays the evaluation image. Get the evaluation result associated with. The evaluation image is, for example, one or more images captured by the imaging unit 303. The evaluation image may be a color image, a gray scale image, or a binarized image. The similarity between the images may be, for example, an average comparison of pixel values constituting the image, a histogram of pixel values, a comparison of fluctuation widths for each frequency calculated from the image, or the like. It may be the ratio of matching pixels.

  Further, the evaluation unit 307 may use another known similar image search such as a similar image search using a mean square error as the image similar search.

  In addition, since the similarity search performed about an image, the process which acquires the similarity between images, etc. are well-known techniques, detailed description is abbreviate | omitted here.

  The evaluation result may be any information as long as it is information indicating the evaluation result related to the defective portion, for example, indicating whether or not the defective portion is likely to lead to breakage of the workpiece 10. It may be information or information indicating the range of occurrence rate of damage, for example, 50% or more. Moreover, the information which shows what kind of abnormality generate | occur | produces may be sufficient, and the information which shows that the workpiece | work 10 will be damaged may be sufficient. Also, a combination of two or more of these may be used.

  Note that the evaluation unit 307 may evaluate a defective portion indicated by the image output from the image output unit 305 using image status information stored in an image status information storage unit 310 described later. For example, the defect portion may be evaluated using information regarding the image of the defective portion captured by the imaging unit 303 included in the image status information and the workpiece status information regarding the workpiece 10 indicated by the image included in the image status information. . The work status information will be described later. The information related to the image of the defective portion included in the image status information may be the image of the defective portion itself, or may be information on feature points acquired from the image of the defective portion.

  For example, when the information related to the image of the defective part is the image of the defective part, the evaluation unit 307 uses the image included in the image status information for the image output from the image output unit 305 to perform a similar search similar to the above. The work status information associated with the image determined to be similar from the image status information is acquired as the evaluation result. The image status information in this case may be considered as the evaluation image management information described above.

  Further, for example, when the information related to the image of the defective portion is the information about the feature points of the image of the defective portion, the evaluation unit 307 has the image characteristics included in the image status information with respect to the image output from the image output unit 305. Pattern matching similar to that described above is performed using the point information, and workpiece status information associated with feature point information determined to match from the image status information is acquired as an evaluation result. The image status in this case may be considered as the above-described evaluation pattern management information.

  Note that the evaluation unit 307 performs machine learning using image situation information accumulated in an image situation information storage unit 310 (to be described later), and uses the result of the machine learning to output an image output by the image output unit 305. An evaluation may be performed. For example, an image output by the image output unit 305 is learned by learning one or more sets of image feature points included in the image status information and work status information for the defect portion indicated by the image, and using the learning result. It is possible to acquire the work status information corresponding to the feature points acquired from as an evaluation result. Note that the configuration and processing of machine learning are the same as those in the first embodiment, and a detailed description thereof will be omitted here.

  The evaluation result output unit 308 outputs the evaluation result acquired by the evaluation unit 307. The evaluation result output unit 308 outputs, for example, the evaluation result in association with the workpiece identifier associated with the evaluation target image of the evaluation result, the defect portion identifier, or the corrected defect position information. Also good.

  The output here is, for example, display on a monitor screen, projection using a projector, printing on a printer, transmission to an external device, accumulation in a recording medium, other processing device or other program, etc. It is a concept including delivery of processing results.

  The evaluation result output unit 308 may or may not include an output device such as a display, a printer, a communication unit, or a storage unit. The image output unit 305 can be realized by output device driver software, or output device driver software and an output device.

  The situation accepting unit 309 is a situation after the imaging unit 303 has imaged the defective portion of the workpiece 10 that has imaged the defective portion, and performs one or more processes specified in advance on the workpiece 10. Work status information, which is information indicating the status after the operation, is received. For example, the status receiving unit 309 receives work status information from a user or the like.

  The process designated in advance is, for example, a process performed on the workpiece 10. If the workpiece 10 is a semiconductor wafer, the predesignated process is, for example, one or more processes constituting a semiconductor manufacturing process.

  The state of the workpiece 10 may be considered as the state of the workpiece 10, for example, whether or not an abnormality such as breakage has occurred in the workpiece 10 and what kind of abnormality is the abnormality. What is abnormal is how it was damaged, for example, if the abnormality was broken, cracked or cracked. The situation of the workpiece 10 may be the situation of the workpiece 10 caused by one defective portion existing in the workpiece 10. The situation of the workpiece 10 caused by one defective portion existing in the workpiece 10 is, for example, that a crack is formed from the defective portion at a position corresponding to one defective portion of the workpiece 10.

  The workpiece status information is information indicating the status of the workpiece 10 as described above. The workpiece status information is, for example, information indicating whether or not the workpiece 10 is normal in the processing after imaging. Alternatively, it may be information indicating what kind of abnormality has occurred in the workpiece 10 in the process after imaging. Further, the workpiece status information may be a value, an index, or the like for evaluating the workpiece 10 for which processing after imaging has been completed.

  For example, the status receiving unit 309 receives the workpiece status information associated with the identifier of the workpiece 10 or the identifier of the defective portion. For example, when an abnormality is detected in the subsequent process after imaging for one work 10, the work status information is received together with the identifier of the work 10.

  Here, reception is, for example, reception from an input unit, reception of an input signal transmitted from another device, reading of information from a recording medium, or the like. The input means for receiving the work status information may be anything such as a numeric keypad, a keyboard, a mouse, or a menu screen. The status receiving unit 309 can be realized by a device driver for input means such as a numeric keypad and a keyboard, control software for a menu screen, and the like.

  The image status information storage unit 310 stores image status information that is information including information regarding the defect portion image output by the image output unit 305 and work status information. The information regarding the image of the defective portion is information acquired from an image used for pattern matching or image similarity search, for example. The information regarding the image of the defective portion may be, for example, the image of the defective portion itself, or may be an image obtained by performing image processing such as binarization on the image of the defective portion. It may be information on feature points acquired from an image, or information obtained by performing a predesignated process such as a filter process on an image of a defective part. Moreover, the information regarding the image of a defective part may be information having two or more of these pieces of information. The work status information stored in the image status information storage unit 310 is status information received by the status reception unit 309, for example.

  The image status information storage unit 311 stores image status information including information related to the image of the defective portion output from the image output unit 305 and the work status information about the defective portion received by the status reception unit 309. Accumulate in unit 310. For example, the image status information accumulation unit 311 accumulates image status information including an image of a defective portion output from the image output unit 305 and work status information regarding the defective portion. In addition, for example, the image status information accumulation unit 311 acquires information related to the image as described above from the image of the defective portion output by the image output unit 305, and information about the acquired image and the work status about the defective portion. Image status information including information may be accumulated.

  The workpiece status information regarding the defective portion may be workpiece status information regarding one defective portion, or may be workpiece status information regarding a workpiece having one defective portion. For example, when the image status information storage unit 311 receives information specifying one or more defective portion images and one piece of work status information about the defective portion indicated by these images, the information about the image of the defective portion. And the received work status information are stored in the image status information storage unit 310 in association with each other.

  For example, when the status receiving unit 309 receives the workpiece status information associated with the identifier of the workpiece and the identifier of the defective portion of the workpiece, the image status information storage unit 311 displays the defect portion output by the image output unit 305. An image of one or more defective portions that is associated with an identifier of the workpiece that matches the identifier of the workpiece in the image and that is associated with the identifier of the defective portion that matches the identifier of the defective portion; The image status information having the received workpiece status information in association with each other may be accumulated in the image status information storage unit 310.

  For example, when the status receiving unit 309 receives the workpiece status information associated with the workpiece identifier, the image status information accumulating unit 311 includes the defect portion image output by the image output unit 305. The image status information storage unit 310 may store image status information having one or more defect part images associated with the identifier of the workpiece that matches the identifier and the received workpiece status information. Good.

  Note that a workpiece transfer system may be configured by the workpiece processing device 3 of the present embodiment and the workpiece transfer device 2 described in the first embodiment. For example, this workpiece transfer system is a workpiece transfer system in which the workpiece processing device 3 is provided in place of the workpiece processing device 1 in the workpiece transfer system 1000 of the first embodiment shown in FIG.

  Next, operation | movement of the workpiece | work processing apparatus 3 of this Embodiment is demonstrated using the flowchart of FIG. The processing of the work processing apparatus 3 according to the present embodiment performs the same processing as that of the work processing apparatus 1 according to the first embodiment shown in FIG. 6, and from step S119 to step S100 of the processing shown in FIG. The processing shown in FIG. 20 below is performed as the processing until the process returns to FIG. Specifically, after step S119 in FIG. 6, the process in FIG. 20 is started, and when the process in FIG. 20 ends, the process returns to step S100 in FIG. The description of the process shown in FIG. 6 is omitted here.

  (Step S <b> 301) The moving unit 302 determines whether or not there is one or more defective parts at the edge of the workpiece 10 from the information regarding the defective parts output from the output unit 104. If there is, the process proceeds to step S302; otherwise, the process proceeds to step S314.

  (Step S302) The detection unit 306 detects one or more defect portions having a large size from the defect portions. If there is only one defective part, this process may be omitted. Further, when a defective part having a large size cannot be detected, the process may proceed to step S314.

  (Step S303) The moving unit 302 substitutes 1 for the counter k.

  (Step S <b> 304) The moving unit 302 moves the center of the workpiece 10 to a predetermined position using information indicating the position such as the rotation angle of the k-th defective part, and the k-th defective part is captured in the imaging region. An angle for rotating the workpiece 10 necessary for moving the workpiece 10 is acquired.

  (Step S305) The moving unit 302 acquires the amount of movement of the workpiece 10 in the horizontal direction necessary for moving the workpiece 10 and the k-th defective portion to the same position as described above. The amount of movement in the horizontal direction is information such as the distance and angle for moving the workpiece 10 in the horizontal direction, the movement direction, the movement distance in the x-axis direction, the movement distance in the y-axis direction, and the like.

  (Step S306) The moving unit 302 moves the workpiece 10 according to the rotation angle information acquired in steps S304 and S305 and the amount of movement in the horizontal direction, and moves the kth defect portion to the imaging region. Let

  (Step S307) The imaging unit 303 images the k-th edge of the workpiece 10.

  (Step S308) The corrected defect position acquisition unit 304 acquires corrected defect position information for the kth defect portion. For example, for the k-th defect portion and the cut portion, the rotation angle when the center of the workpiece 10 is the center of rotation is acquired, and the difference is acquired as corrected defect position information.

  (Step S309) The image output unit 305 outputs the image captured by the imaging unit 303. For example, the image output unit 305 outputs an image in association with the identifier of the workpiece 10, the identifier of the kth defect portion, the corrected defect position information about the kth defect portion acquired in step 308, and the like. For example, the image output unit 305 accumulates images in a storage unit (not shown). The image output unit 305 may display an image on a monitor or the like.

  (Step S310) The evaluation unit 307 uses the image accumulated in step S309 to evaluate the kth defect portion indicated in the image. For example, an image pattern that matches the image of the kth defect portion is detected by pattern matching from the image patterns included in the image status information stored in the image status information storage unit 310, and the detected pattern is converted into the detected pattern. The associated work status information is acquired as an evaluation result.

  (Step S311) The evaluation result output unit 308 outputs the evaluation result. For example, it is displayed on a monitor or the like.

  (Step S312) The moving unit 302 increments the value of the counter k by 1.

  (Step S313) The moving unit 302 determines whether there is a k-th defective portion. If there is, the process returns to step S304; otherwise, the process proceeds to step S314.

  (Step S314) The moving unit 302 acquires an angle for rotating the workpiece 10 that is necessary when the notch is moved in a predetermined direction and the center of the workpiece 10 is moved to a predetermined position. .

  (Step S315) The moving unit 302 moves the notch part in the direction specified in advance, and the amount of movement of the work 10 in the horizontal direction required when moving the center of the work 10 to the position specified in advance. get.

  (Step S316) The moving unit 302 moves the workpiece 10 according to the rotation angle acquired in step S314 and the movement amount acquired in step S315. This movement is, for example, a movement for aligning and transferring the workpiece 10 to the workpiece conveyance device 2 or the like. Then, the process ends. When this process ends, the process returns to step S100 in FIG.

  In the work processing apparatus 3 according to the present embodiment, whether or not the status receiving unit 309 further receives the work status information after determining that it is not the timing to set the threshold value in step S122 of the flowchart shown in FIG. When the work status information is received, image status information that includes the received work status information and information related to the image of the defective portion corresponding to the work status information is stored in the image status information. The unit 311 may accumulate in the image status information storage unit 310 and return to step S100. If not received, the unit 311 may return to step S100.

  In the flowchart shown in FIG. 6, after the moving unit 302 moves the workpiece 10 in step S316, the workpiece 10 is transferred from the workpiece processing apparatus 3 to another apparatus or the like by the workpiece transfer apparatus 2 or the like. The Although not described here, when the work transport device 2 places the work on the mounting table 3021 or the like of the moving unit 302, for example, the work processing device 3 is similar to a normal so-called aligner or the like. The first rotation distance information may be acquired for the workpiece 10 and accumulated in the first rotation distance information storage unit 101.

  In FIG. 20, the processing in step S310, step S311 and the like, and the processing in which the image output unit 305 outputs, for example, displays an image of the defective portion may be appropriately performed according to an instruction from the user or the like. .

  Also, in the flowchart shown in FIG. 20, the processing of step S314 and step S315 is performed immediately before step S301. If it is determined in step S301 that there is no defective portion, the process proceeds to step S316. If it is determined in S315 that there is no k-th defective portion, the process may proceed to step S316 and the workpiece 10 may be moved using the information acquired in steps S314 and S315.

  Next, a specific example of the work processing apparatus 3 according to the present embodiment will be described. Here, a case where the workpiece processing device 3 and the workpiece transfer device 2 constitute a workpiece transfer system will be described as an example. Further, the work processing device 3 and the like can perform the same processing as the specific example described in the first embodiment, for example, but detailed description of this processing and the like is omitted here. .

Similarly to the specific example of the first embodiment, the work processing apparatus 3 specifies correction information that is information for aligning the work, information on the defective portion, and the orientation of the work for one work 10. It is assumed that the output unit 104 outputs the information for acquiring the information. It is assumed that the correction information output from the output unit 104 is a rotation angle α ₁ indicating the moving direction and a moving length h ₁ . In addition, the information regarding the defect portion output by the output unit 104 includes, for example, a rotation angle range indicating a defect portion range and a size of the defect portion for a plurality of defect portions similar to those illustrated in FIG. It is assumed that the information has a pair with the maximum value of the distance from the rotation center of the workpiece 10 and the length from the center of rotation of the workpiece 10 to both ends of each defective portion. Further, it is assumed that the information for specifying the direction of the work output by the output unit 104 is a range of the rotation angle indicating the range of the orientation flat similar to that shown in FIG.

  When receiving the above information from the output unit 104, the moving unit 302 first determines whether or not the workpiece 10 has a defective portion. Here, since the information regarding the defective portion indicates that there is a defective portion, it is determined that there is a defective portion.

  Since the moving unit 302 has determined that the workpiece 10 has a defective portion, the detecting unit 306 detects a defective portion having a large size from the defective portion. Here, a defective portion whose absolute value of the size of the defective portion is greater than or equal to a threshold value is detected. Here, for example, it is assumed that the size of all defective portions is determined to be greater than or equal to the threshold value.

  The moving unit 302 locates the midpoint of the line connecting both ends of the defective portion of the first defective portion detected by the detecting unit 306 within the imaging range of the imaging unit 303 and the workpiece 10. The rotational angle of the rotational movement for moving the workpiece 10 so that the center is located at the position where the center of the workpiece 10 should be placed when the workpiece 10 designated in advance is transferred to the workpiece conveyance device 2, and the horizontal movement The combination with the movement amount is acquired as follows.

Specifically, using the information indicating the range of the rotation angle indicating the range of the first defective portion, the length from the rotation center of the workpiece 10 to both ends of the defective portion, etc., the coordinates of the both ends of the defective portion, etc. , And the angle formed by the line segment passing through both ends of the defective portion with respect to the line segment having a rotation angle of 90 ° is acquired. Here, the line segment with the rotation angle of 90 ° is a line segment having an angle of 90 degrees with respect to the straight line indicating 0 ° when the rotation angle α ₁ is acquired. It corresponds to θt of 19.

  Next, the moving unit 302 reads a rotation angle indicating the center position in the imaging region stored in advance in a storage unit or the like (not shown), and from this angle, a line segment passing through both ends of the defect portion acquired above is obtained. The angle formed with respect to the line segment whose rotation angle is 90 ° is subtracted. The angle thus obtained is a rotation angle used when the workpiece 10 is rotated, and corresponds to the angle γ in FIG.

Further, the moving unit 302 adds a value obtained by adding the angle formed by the line segment passing through both ends of the defect portion acquired above to the line segment having the rotation angle of 90 ° to the rotation angle α ₁ included in the correction information. The rotation angle at the time of moving the workpiece 10 is acquired, and the length h _{1 included} in the correction information is acquired as the movement distance of the workpiece 10. However, since the rotation angle acquired here is an angle indicating a moving direction for superimposing the rotation center of the workpiece 10 on the center of the workpiece 10, when the workpiece 10 is moved, it is opposite to the acquired rotation angle. It is assumed to move in the direction, that is, the direction rotated by 180 °.

The moving unit 302 rotates the workpiece 10 around the rotation center of the workpiece 10 by the angle indicated by the rotation angle acquired above, and the length h ₁ is opposite to the direction indicated by the rotation angle acquired above. The work 10 is moved.

  The imaging unit 303 images the first defective portion of the workpiece 10 that is located in the imaging region by such movement.

  Further, the correction defect position acquisition unit 304 performs the same processing as the processing on the moving unit 302 described above, and uses the rotation angle indicating the range of the orientation flat included in the correction information output from the output unit 104 or the like. The first defect portion acquired by the moving unit 302 is obtained by performing the same process as the process on the unit 302 and obtaining the angle formed by the straight line connecting both ends of the orientation flat with respect to the line segment whose rotation angle is 90 °. Is subtracted from the angle formed by the line segment having a rotation angle of 90 °, and a value obtained by this subtraction is obtained as corrected defect position information for the first defect portion. This corrected defect position information is the rotation angle of the first defect portion when the rotation angle of the orientation flat is set as a reference, that is, 0 ° when the center of the workpiece 10 is the center of rotation.

  The image output unit 305 displays an image obtained by imaging the first defect portion imaged by the imaging unit 303 with an identifier of the workpiece 10 (for example, a code assigned to the workpiece 10) and an ID of the defect portion (for example, the defect portion). Number), corrected defect position information, imaging date and time, depth (height) of the defect portion output by the output unit 104, and a value obtained by converting the range of the defect portion output by the output unit 104 into a length. The width of a certain defective portion is associated with and stored in a storage unit (not shown), and the captured image is displayed on a monitor (not shown) in association with these pieces of information.

  FIG. 21 is an image management table for managing images of defective portions accumulated by the image output unit 305. The image management table includes “image”, “work ID”, “defect ID”, “corrected defect position”, “date / time”, “height”, and “width”. “Image” is an image of a defective portion, and here, the file name of the image is shown. “Work ID” is an identifier of a work. The “defect ID” is an identifier of a defect portion in the work 10, and here, it is assumed that the defect portion detected by the detection unit 306 is a number assigned in ascending order from the smallest rotation angle. “Correction defect position” is correction defect position information acquired by the correction defect position acquisition unit 304. “Date and time” is the imaging date and time of an image acquired from a clock or the like (not shown). “Height” is the height or depth of the defective portion, and “width” is the width of the defective portion.

  FIG. 22 is a diagram illustrating a display example of an image of a defective portion output from the image output unit 305. In the figure, an image of a defective portion is displayed in a region 211. The image output unit 305 indicates that there is a defective portion in the region 212 at a position on the edge in the direction indicated by the rotation angle indicated by the corrected defect position information in the image showing the workpiece 10 without the defective portion prepared in advance. Display the image with the mark. In the area 213, the identifier of the image of the defective part is displayed. In the area 214, the rotation angle indicated by the corrected defect position information corresponding to the image of the defective portion, the width and depth of the defective portion are displayed. In the area 215, the imaging date and time is displayed. Note that the image displayed in the area 211 can be enlarged, reduced, moved in the display range, or the like in accordance with an instruction from the user or the like.

  FIG. 23 is a diagram showing an image status information management table for managing the image status information stored in the image status information storage unit 310. The image status information management table has attributes of “pattern” and “situation”. The “pattern” is a pattern of the feature amount of the defective part acquired from the image of the defective part. “Situation” is workpiece status information regarding a workpiece having a defective portion corresponding to “pattern”.

  The evaluation unit 307 evaluates the image of the first defect portion output from the image output unit 305 using the image status information illustrated in FIG. Specifically, the evaluation unit 307 sequentially acquires the attribute value of “pattern” from each record (row) of the image status information management table in FIG. 23, and the image pattern indicated by the acquired attribute value is the first. It is sequentially judged whether or not it matches the image of the defective portion. If a match is found, an attribute value of “situation” corresponding to the matched attribute value is acquired as an evaluation result. Note that the processing may be terminated when the pattern of one record matches, or the processing may be performed for all the records. In this case, a plurality of “situation” attribute values may be acquired as evaluation results. If there is no matching pattern, the evaluation unit 307 acquires an evaluation result designated by default or the like, for example, an evaluation result such as “no abnormality”. Here, for example, since the image obtained by imaging the first defective portion matches “Pattern 2” of “Pattern”, the evaluation result “Large work crack” is acquired.

  Then, the evaluation result output unit 308 accumulates the evaluation results acquired by the evaluation unit 307 in association with images, and further displays them on a monitor (not shown).

  FIG. 24 is a diagram illustrating an output example of the evaluation result by the evaluation result output unit 308.

  With this output, the user can recognize that the defective portion is a defective portion that may cause a large work crack in the subsequent process.

  Further, the above processing is repeated for other defective portions detected by the detection unit 306.

  When the processing for all the defective portions detected by the detection unit 306 is completed, the moving unit 302 directs the orientation flat of the workpiece 10 in a direction designated in advance, as in the case of moving the defective portion to the imaging region. The rotation angle of the workpiece 10 and the amount of movement in the horizontal direction are acquired so that the center of the workpiece 10 is arranged at a position specified in advance. The workpiece 10 is moved using the movement amount. Thereby, the workpiece | work 10 can be arrange | positioned to a predetermined position toward a predetermined direction.

  The workpiece conveyance device 2 picks up and conveys the workpiece 10 whose position and direction are matched in this way. Since the conveyance by the workpiece conveyance device 2 is the same as the specific example of the first embodiment, the description thereof is omitted here.

  Note that the image output unit 305, for example, receives an instruction to display an image of one defective portion from a user via a receiving unit (not shown) or the like, and the defective portion designated as shown in FIG. An image may be displayed.

  Here, for example, it is assumed that the user detects that an abnormality such as a work crack having the identifier “W001” has occurred in one work 10 in the subsequent process. And if a user inputs the identifier of the workpiece | work 10 which this crack generate | occur | produced using the input interface etc. which are not shown in figure, and the workpiece | work status information regarding this crack, the situation reception part 309 will receive such information. For example, it is assumed that “W001” that is an identifier of the workpiece 10 and “work break” that is workpiece status information are received.

  Then, the image status information accumulation unit 311 displays all the images associated with the received identifier “W001” of the workpiece 10, specifically, “img1001” to “img1005” in the image management table shown in FIG. The feature points are obtained from the respective images, and the feature point pattern information of the defective portion is obtained for each image. Then, the information of each pattern is associated with the work status information received by the status receiving unit 309 and accumulated in the image status information storage unit 310. As a result, five records (rows) are added to the image status information management table shown in FIG. As a result, information relating to the image of the defective portion and the influence of the defective portion on the workpiece 10 can be stored in association with each other, and the accuracy when evaluating the defective portion using the image of the defective portion is improved. Can be made.

  In addition, when the defect part which causes a work crack can be specified, instead of designating the workpiece | work 10 which abnormality occurred and inputting workpiece | work status information, the defect part of the workpiece | work 10 is identified with the identifier of a workpiece | work, and a defect. You may make it designate by the combination with the identifier of a part. Or you may make it receive designation | designated of a defective part from the image shown in the area | region 212 of the display screen shown in FIG.

  Further, detection of an abnormality in the subsequent process of the workpiece 10 and acquisition of workpiece status information indicating the status of the abnormality may be automated using an abnormality detection device (not shown) or the like. In this case, the apparatus inputs the identifier of the work 10 in which the crack generated by the apparatus and the like and the work situation information are input to the situation receiving unit 309.

  As described above, according to the present embodiment, the defect portion of the workpiece edge is moved into the imaging region, and the defect portion is imaged, whereby the workpiece edge can be easily confirmed from the image.

  Further, by outputting the defective portion of the edge in the captured image, the defective portion of the edge can be easily enlarged and displayed, and the shape of the defective portion that is difficult to be confirmed with the naked eye can be easily confirmed.

  Further, according to the present invention, the center of the workpiece 10 is arranged at a position designated in advance by the moving unit 302 (for example, a position where the center of the workpiece 10 should be arranged when the workpiece 10 is transferred to the workpiece conveyance device 2). In addition, by moving the workpiece 10 so that the defective portion is arranged in the imaging range of the imaging unit 303 and imaging the defective portion, images of different defective portions of the workpiece 10 of the same size are captured. It is possible to keep the position of the defective part of the work 10 in the image and the position of the edge other than the defective part in the same position between the images. As a result, comparison between images is easy, and moreover, accurate processing can be performed when acquiring feature points from images and determining similarity between images.

  In each of the above embodiments, each process (each function) may be realized by centralized processing by a single device (system), or by distributed processing by a plurality of devices. May be.

  In each of the above embodiments, each component may be configured by dedicated hardware, or a component that can be realized by software may be realized by executing a program. For example, each component can be realized by a program execution unit such as a CPU reading and executing a software program recorded on a recording medium such as a hard disk or a semiconductor memory. At the time of execution, the program execution unit may execute the program while accessing a storage unit (for example, a recording medium such as a hard disk or a memory). Further, the work information processing apparatus in the above embodiment may be realized by software.

  The present invention is not limited to the above-described embodiments, and various modifications are possible, and it goes without saying that these are also included in the scope of the present invention.

  As described above, the workpiece processing apparatus and the like according to the present invention are suitable as an apparatus for processing a workpiece, and are particularly useful as an apparatus for positioning a workpiece.

DESCRIPTION OF SYMBOLS 1, 3 Work processing apparatus 2 Work conveying apparatus 4, 5 Container 6 Mounting base 10 Work 15, 55b Sensor 52 Turntable 101 First rotation distance information storage part 102 301 Edge position detector 103 Acquisition part 104 Output part 105 Evaluation related information Reception unit 106 Setting unit 108 Defect detection unit 1000 Work transfer system 1031 Composition unit 1032 Composition processing unit 1033 Correction information acquisition unit 1034 Second distance information acquisition unit 1035 Calculation unit 1036 Notch detection unit 1037 Defect detection unit 302 Moving unit 303 Imaging unit 304 correction defect position acquisition unit 305 image output unit 306 detection unit 307 evaluation unit 308 evaluation result output unit 309 status reception unit 310 image status information storage unit 311 image status information storage unit

Claims (17)

When a circular workpiece is rotated, a plurality of pieces of information that are associated with a rotation angle and first distance information that is information related to the distance from the rotation center to the edge of the workpiece corresponding to the rotation angle. A first rotation distance information storage unit for storing one rotation distance information;
Using the plurality of first rotation distance information stored in the first rotation distance information storage unit, information for aligning the workpiece, information for specifying the orientation of the workpiece, An acquisition unit for acquiring information on a defective portion of the edge;
An output unit that outputs information for aligning the workpiece acquired by the acquisition unit, information for specifying the orientation of the workpiece, and information on the defective portion ;
The acquisition unit detects a defective part using one or more threshold values related to the size of the defective part, and when the defective part is detected, acquires information on the defective part;
An evaluation related information receiving unit that receives evaluation related information that is information related to the evaluation of the defect portion of the edge of the workpiece;
Using the evaluation related information, the acquisition unit acquires one or more threshold values related to a size used for detection of a defective portion, and using the acquired threshold values, the acquisition unit relates to a size used for detection of the defective portion. A work processing apparatus , further comprising: a setting unit that sets one or more threshold values .   The workpiece processing apparatus according to claim 1, wherein the output unit further performs an abnormality output, which is an output when there is an abnormality in the edge of the workpiece, according to information on the defective portion acquired by the acquisition unit. When a circular workpiece is rotated, a plurality of pieces of information that are associated with a rotation angle and first distance information that is information related to the distance from the rotation center to the edge of the workpiece corresponding to the rotation angle. A first rotation distance information storage unit for storing one rotation distance information;
Using the plurality of first rotation distance information stored in the first rotation distance information storage unit, information for aligning the workpiece, information for specifying the orientation of the workpiece, An acquisition unit for acquiring information on a defective portion of the edge;
An output unit that outputs information for aligning the workpiece acquired by the acquisition unit, information for specifying the orientation of the workpiece, and information on the defective portion;
The acquisition unit
Combining means for synthesizing a plurality of first distance information in which the corresponding rotation angle is different by 90 degrees among the first distance information included in the plurality of first rotation distance information;
The plurality of combined distance information, which is information obtained by combining the first distance information by the combining unit, is a plurality of combined distance information in which corresponding rotation angles are continuous, and the change in the magnitude of the value is small. A plurality of combined distance information is detected, a plurality of first distance information before combining corresponding to one or more of the detected plurality of combined distance information, and a rotation angle corresponding to one or more first distance information before combining And a synthesis processing means for obtaining
Using the plurality of first distance information and rotation angle acquired by the synthesis processing means, correction information for aligning the rotation center of the workpiece with the center of the workpiece is acquired as information for aligning the workpiece. Correction information acquisition means;
Using the correction information acquired by the correction information acquisition means, the information regarding the rotation angle and the distance to the edge of the workpiece according to the rotation angle when the workpiece is a circle having no irregularities on the edge. A second equation that acquires a relational expression indicating a relationship with the two-distance information, and acquires the second distance information by substituting a plurality of rotation angles corresponding to the plurality of first rotational distance information into the acquired relational expression, respectively. Distance information acquisition means;
The first distance information and the second distance information associated with the same rotation angle using the plurality of first rotation distance information and the plurality of second distance information acquired by the second distance information acquisition means. A calculation means for obtaining a difference between
Using the difference between the first distance information and the second distance information calculated by the calculation means, information indicating a notch for specifying the direction of the workpiece is acquired as information for specifying the direction of the workpiece. Notch detection means to
A workpiece processing apparatus comprising: defect detection means for acquiring information relating to a defective portion of the edge of the workpiece using the difference between the first distance information and the second distance information calculated by the calculation means . The work processing apparatus according to claim 3 , wherein the acquisition unit detects a defective portion using one or more threshold values related to a size of the defective portion, and acquires information on the defective portion when the defective portion is detected. The workpiece processing apparatus according to claim 4 , wherein the output unit further performs an abnormal output, which is an output when there is an abnormality in the edge of the workpiece, according to information on the defective portion acquired by the acquisition unit. An evaluation related information receiving unit that receives evaluation related information that is information related to the evaluation of the defect portion of the edge of the workpiece;
Using the evaluation related information, the acquisition unit acquires one or more threshold values related to a size used for detection of a defective portion, and using the acquired threshold values, the acquisition unit relates to a size used for detection of the defective portion. 1 or a setting unit which sets a threshold, further work processing apparatus according to claim 4 or claim 5, wherein with a. The synthesis processing means detects a first process of detecting one or more combined distance information in descending order of the plurality of combined distance information, and detects one or more combined distance information in order of increasing value. At least one of the two processes is executed once or more, and the corresponding rotation angle of the remaining composite distance information that is not detected in the first process and the second process is continuously more than a predetermined number. a synthetic distance first distance information of the plurality of corresponding pre-synthesis to one or more information are, either claim 6 a set of the rotation angle corresponding to one or more of the first distance information before combining claims 3 to obtain or work processing system of one claim. The notch detection means is provided at the edge of the workpiece using a difference between the first distance information and the second distance information calculated by the calculation means and one or more threshold values related to the size of the notch. The work processing apparatus according to any one of claims 3 to 7 , wherein the cut-out portion thus detected is detected, and information indicating the cut-out portion is acquired. The defect detection means uses the difference between the first distance information and the second distance information calculated by the calculation means and one or more threshold values relating to the size of the defect portion to determine a defect portion at the edge of the workpiece. The workpiece processing apparatus according to claim 3 , wherein the workpiece processing apparatus detects and acquires information on the detected defective portion. The synthesizing unit synthesizes four pieces of first distance information having different corresponding rotation angles by 90 degrees from among the first distance information included in the plurality of first rotation distance information, thereby obtaining a plurality of synthesized distance information. The work processing apparatus according to claim 3, which is acquired. Using the information regarding the defective part of the edge of the workpiece output from the output unit, the moving unit that moves the workpiece so that the defective part of the edge of the workpiece is arranged in an imaging region that is a predesignated region When,
An imaging unit that images a defective portion of an edge of the workpiece arranged in the imaging region;
An image output unit that outputs an image in which the imaging unit has captured, further work processing apparatus according to any one of claims 10 claim 1 comprising. The moving unit, the center of the workpiece is arranged in advance specified position, and, according to claim 11, wherein moving the workpiece so that the defective portion of the edge of the workpiece is positioned in the imaging area of the imaging unit Work processing equipment. Using the information for aligning the workpiece output by the output unit, the information for specifying the orientation of the workpiece, and the information on the defective portion of the edge of the workpiece, the center of the workpiece and the workpiece A correction defect position acquisition unit that acquires correction defect position information that is information indicating the position of the defect portion of the workpiece with reference to the specified orientation,
The work processing apparatus according to claim 11 or 12 , wherein the image output unit outputs an image captured by the imaging unit in association with correction defect position information corresponding to a defect portion captured in the image. A detector for detecting one or more defect portions having a large defect portion size on the edge of the workpiece using information on the defect portion of the edge of the workpiece output by the output portion;
The moving unit moves a defective portion of the edge of the workpiece detected by the detecting unit to the imaging region,
The imaging unit, the work processing apparatus according to claim 13, wherein any one of claims 11, wherein the detecting unit captures an image defect of the edge of the workpiece detected. Using the image output by the image output unit, an evaluation unit that evaluates a defect portion indicated by the image,
Workpiece processing apparatus according to claim 14 any one claim from claim 11 comprising evaluated further a result output unit for outputting the evaluation result of the evaluation unit. A situation accepting unit that accepts workpiece status information, which is a situation after the imaging of the defective part, and information indicating a situation after performing a predesignated process on the workpiece in which the imaging unit images the defective part When,
An image status information storage unit for storing image status information, which is information about the image of the defective portion output by the image output unit, and work status information;
Image status information for accumulating in the image status information storage unit image status information having information related to the image of the defective portion output by the image output unit and work status information about the defective portion received by the status receiving unit. With a storage unit,
The work processing apparatus according to claim 15 , wherein the evaluation unit evaluates the defective portion using image status information stored in the image status information storage unit. The work processing apparatus according to any one of claims 1 to 16 ,
A workpiece transfer system comprising: a workpiece transfer device that delivers a workpiece to the workpiece processing device.

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