TWI695441B - Workpiece processing device, workpiece conveying system - Google Patents

Abstract

[Question] It is that the conventional technology has not been able to properly detect the defects of the workpiece. [Solution Means] The workpiece processing device of the present invention includes: a first rotation distance information storage section 101 for storing a plurality of first rotation distance information, the first rotation distance information having a rotation angle when a circular workpiece is rotated Corresponding to the first distance information, and the first distance information is information about the distance from the center of rotation of the workpiece to the edge of the corresponding rotation angle; the obtaining section 103 uses a plurality of numbers stored in the first rotating distance information storage section 101 The first rotation distance information is used to obtain the information for aligning the workpiece, the information for specifying the orientation of the workpiece, and the information about the defect portion of the workpiece edge; and the output unit 104 is used to output the workpiece obtained by the acquisition unit 103 Information for alignment, information for specifying the orientation of the workpiece, and information about defective parts. With this work piece processing device, it is possible to properly detect work piece defects.

Description

Workpiece processing device, workpiece conveying system

The present invention relates to a workpiece processing device and the like for performing positioning of a workpiece.

In the conventional technology, the wafer is rotated, and its edge position is detected and memorized according to the rotation angle. According to the maximum and minimum values of the detection signal, the eccentricity and direction of the wafer position are calculated, and the crystal is crystallized according to the eccentricity data. The center of the circle is aligned. At the start point and end point of the flat part of the wafer, etc., the edge position changes more rapidly than other parts, so by calculating the part of the edge position data change rate to a certain degree or more, and in the same device It is known that the flat portion and the like are positioned at a specific position with respect to other workbenches such as conveying devices (for example, refer to Patent Document 1).

[Conventional Technical Literature] [Patent Literature] [Patent Document 1] Japanese Patent No. 2729297 (Page 1, Figure 1, etc.)

[Problems to be solved by the invention] By using a workpiece conveying device, a workpiece that is positioned using, for example, the above-described conventional device is conveyed to a device that performs CVD (Chemical Vapor Deposition) or CMP (Chemical Mechanical Polishing), etc. To perform the required processing.

When a workpiece such as a wafer with burrs or chipping on the edge is subjected to CVD, polishing, etc., the workpiece may be damaged due to heat or pressure applied to the workpiece. Therefore, before processing the workpiece, it is preferable to inspect to detect the presence or absence of defective parts such as burrs or chipping. For this purpose, it is desirable to be able to inspect the defective part of the workpiece before positioning the workpiece using the above-mentioned conventional technique.

However, when inspecting the defective part of the workpiece, the workpiece conveying device is first used to convey the workpiece to the defective part inspection device to inspect the defective part. After the inspection, the workpiece conveying device must also be used to convey the workpiece to the device that performs workpiece positioning The positioning is performed, so there is a problem that it takes time to inspect the workpiece and transport the workpiece to the inspection device.

In addition to the positioning device, it is also necessary to install an inspection device. Therefore, while increasing the cost, it is also necessary to ensure the installation site of the inspection device on the workpiece conveying path, and it is extremely difficult to achieve space saving. The problem.

As a result, in the conventional technology, there is a problem that the defect detection of the workpiece cannot be properly performed.

The present invention was developed to solve the above-mentioned problems, and its object is to provide a workpiece processing apparatus and the like that can appropriately detect workpiece defects.

[Methods used to solve the problem] The workpiece processing device of the present invention includes: a first rotation distance information storage section for storing a plurality of first rotation distance information, the first rotation distance information is formed by having a rotation angle when rotating a circular workpiece and the first distance information Corresponding information, and the first distance information is the distance information from the center of rotation of the workpiece to the edge of the corresponding rotation angle; the obtaining section obtains the first rotation distance information stored in the first rotation distance information storage section Information for alignment of the workpiece, information for the orientation of the specific workpiece, and information about the defective part of the edge of the workpiece; and an output section for outputting the information for the alignment of the workpiece acquired by the acquisition section, for the orientation of the specific workpiece Information, and information about defective parts.

With such a configuration, when the position and orientation of the aligned workpiece are combined, the edge defect of the workpiece can be detected, and the defect of the workpiece can be appropriately detected.

Furthermore, the workpiece processing apparatus of the present invention further includes: a moving unit that uses the information about the defective part of the workpiece edge output by the output unit to move the workpiece so that the defective part of the workpiece edge is arranged in a predetermined area In the shooting area; the shooting section, used to shoot the defective part of the workpiece edge arranged in the shooting area; and the image output section, used to output the image shot by the shooting section.

With this configuration, it is possible to easily confirm the defective portion on the edge of the workpiece.

Furthermore, the workpiece conveyance system of the present invention includes: the aforementioned workpiece processing device; and a workpiece conveyance device that conveys the workpiece to the workpiece processing device.

With this configuration, the processing of combining the position and orientation of the workpiece and the processing of detecting the defective portion can be performed together in the workpiece processing device during transportation, so that the processing required to combine the processing of the position and orientation of the workpiece and the detection of the defective portion can be shortened time. Moreover, the movement of the workpiece during transportation can be suppressed to a minimum.

[Efficacy of invention] According to the workpiece processing apparatus of the present invention, etc., the defect detection of the workpiece can be appropriately performed.

Hereinafter, embodiments of the workpiece processing apparatus and the like will be described with reference to the drawings. In addition, in the embodiment, since the constituent elements with the same reference signs perform the same operation, there is a case where the explanation will be omitted.

(Embodiment 1) FIG. 1 is a block diagram of a workpiece processing apparatus 1 of this embodiment.

The workpiece processing apparatus 1 includes a first rotation distance information storage unit 101, an edge position detector 102, an acquisition unit 103, an output unit 104, an evaluation-related information reception unit 105, and a setting unit 106.

The acquisition unit 103 includes, for example, a synthesis device 1031, a synthesis processing device 1032, a correction information acquisition device 1033, a second distance information acquisition device 1034, a calculation device 1035, a notch detection device 1036, and a defect detection device 1037.

FIG. 2 is a schematic diagram for explaining an example of a circular workpiece that is the target of acquiring the first rotation distance information in the present embodiment (FIG. 2(a)), and a schematic diagram for explaining the process of acquiring the workpiece correction information (FIG. 2 (b)).

FIG. 3 is a schematic diagram of an example of the edge position detector 102 of this embodiment.

FIG. 4 is a plan view of an example of a workpiece conveying system 1000 provided with the workpiece processing apparatus 1 of this embodiment.

The workpiece processing device 1 is, for example, a device that performs information acquisition processing for the position and orientation combination of the workpiece 10 and detection processing of edge defects on a circular workpiece (hereinafter also simply referred to as a workpiece) 10. The information for combining the position and orientation of the workpiece 10 refers to, for example, information used to arrange the workpiece 10 at a predetermined position in a predetermined direction.

The round workpiece 10 is, for example, a round semiconductor wafer (hereinafter referred to as a wafer), a wafer mounted on a round wafer base for reinforcement, or a substrate such as a round glass substrate. The material of the round workpiece (such as the material of the wafer) is not limited. In addition, the circular workpiece 10 may also be an incomplete circle. For example, a portion of the edge 11 may have a notch such as an orientation flat 17 or a V-notch (not shown). . The workpiece 10 may have two or more notch portions. The edge 11 of the workpiece 10 refers to, for example, the peripheral portion of the workpiece 10.

The first rotation distance information storage unit 101 is for storing a plurality of first rotation distance information. The first rotation distance information means that when the circular workpiece 10 is rotated about a point on the workpiece 10 as the rotation center O, for example, the rotation angle corresponds to the first distance information corresponding to the rotation angle. It is information about the distance from the rotation center of the workpiece 10 to the edge. The rotation center O of the workpiece 10 does not necessarily need to coincide with the center Q of the workpiece 10.

The first distance information is information about the distance from the rotation center O of the workpiece 10 to the edge 11 of the workpiece 10. The first distance information is, for example, distance information about a predetermined line segment with the rotation center O of the workpiece 10 as one end to a position overlapping the edge 11 of the workpiece 10. The first distance information is, for example, the distance from the rotation center O of the workpiece 10 to the edge 11. For example, as shown in FIG. 2, the first distance information is the relevant edge 11 obtained by using a sensor 15 such as a line sensor disposed along the line segment on the pre-designated line segment 14 with the rotation center O of the workpiece 10 as one end The measured value of the position of, or the value obtained using the measured value.

In the following, in the present embodiment, the first distance information is described by taking the distance r from the rotation center O of the workpiece 10 to the edge 11 as an example, and the distance r is obtained from the sensor 15 to indicate the The position information of the edge 11 is obtained.

In addition, the first distance information may be information that substantially represents a value corresponding to the distance from the rotation center O of the workpiece 10 to the edge 11 of the workpiece 10. The first distance information may be, for example, information indicating the distance to the edge 11 from a position (for example, 0 o'clock) as a reference of the sensor 15. Furthermore, it may be information indicating that the sensor 15 detects the edge 11, for example, the element or the arrangement position of the edge 11 is detected.

The rotation angle is, for example, an angle value at which the workpiece 10 is rotated before the rotation or when a value in a predetermined state such as a state in which the first distance information is started is regarded as an initial value such as 0 degrees. The plurality of first rotation distance information stored in the first rotation distance information storage unit 101 is, for example, first distance information obtained by sequentially rotating the workpiece 10 at a predetermined angle and its rotation angle information. The plurality of pieces of first rotation distance information have rotation angles that are consecutive at predetermined angular intervals, for example. The predetermined angle refers to a certain angle, for example, the minimum unit of the rotation angle when the workpiece 10 is rotated to obtain the first distance information. The predetermined angle is preferably a value obtained by dividing 360 degrees by a multiple of 4, for example. The pre-specified angle refers to a value obtained by dividing 360 degrees into 1000, or 10000, etc., for example, 0.36 degrees, 0.036 degrees, or the like. In addition, the unit of rotation angle is not limited.

The first rotation distance information storage unit 101 is for storing, for example, a plurality of first rotation distance information obtained for one or more workpieces 10 respectively. For example, a workpiece identifier forming a plurality of pieces of first rotation distance information corresponding to each workpiece 10 and an identifier of the workpiece 10 is stored.

The first rotation distance information storage unit 101 stores a plurality of first rotation distance information corresponding to, for example, a plurality of rotation angles of at least one rotation amount, specifically, a plurality of rotation angles of one rotation amount It is a plurality of rotation angles ranging from 0 to 360 degrees. However, it is also possible to store a plurality of first rotation distance information corresponding to a plurality of rotation angles that have not reached one rotation. For example, a plurality of pieces of first rotation distance information may be stored. The rotation distance information corresponds to a rotation amount smaller than one rotation (0 to 360 degrees), and the angle of the rotation amount is smaller than the minimum unit of the rotation angle. In addition, a plurality of rotation angles of a rotation amount of more than one rotation (0 to 360 degrees) may also be stored, for example, a plurality of first rotation distance information corresponding to a plurality of rotation angles of 1.5 rotations or 2 rotations .

In this embodiment, the case where a plurality of pieces of first rotation distance information acquired by the edge position detector 102 is stored in the first rotation distance information storage unit 101 is described as an example. However, the manner in which the plurality of first rotation distance information is stored in the first rotation distance information storage unit 101 is not limited. For example, a plurality of first rotation distance information received via a memory medium, a communication line, or the like in a reception unit (not shown) may be stored in the first rotation distance information storage unit 101.

In addition, the storage here also includes the concept of temporary memory. For example, a case where the plurality of pieces of first rotation distance information acquired by the edge position detector 102 for the workpiece is temporarily stored is also regarded as storage here.

The first rotation distance information storage unit 101 is preferably a non-volatile recording medium, but it can also be realized by a volatile recording medium. This situation is the same for other storage units.

The edge position detector 102 obtains a plurality of pieces of first rotation distance information for the workpiece 10. Specifically, the edge position detector 102 detects the edge position of the workpiece 10 and obtains a plurality of pieces of first rotation distance information for the workpiece. The edge position detector 102 stores the obtained plurality of first rotation distance information in the first rotation distance information storage unit 101.

The edge position detector 102 includes a sensor 15 such as a line sensor, a turntable 52 that rotates the placed workpiece 10, and the like, and uses an edge position that is measured every time the workpiece 10 is rotated by a predetermined rotation angle The measured value of, for example, uses the measured value of the distance from the rotation center of the workpiece 10 to the edge, etc. to sequentially acquire the first distance information and the rotation angle. The center of rotation of the workpiece 10 is, for example, the center of rotation of a turntable that rotates the rotating workpiece 10.

The edge position detector 102 may also be provided with a moving device (not shown), and uses the workpiece 10 output from the output section 104 described later to align position information, such as correction information, to move the position of the turntable 52, etc., so that the center of the workpiece 10 is located Specify the location in advance. In addition, the edge position detector 102 may also include a control device (not shown), etc., and use the orientation specific information of the workpiece 10 (for example, information indicating a notch) output by the output unit 104 described later to rotate the turntable 52 so that The workpiece 10 is directed in a predetermined direction.

The edge position detector 102 associates, for example, a plurality of pieces of first rotational distance information acquired for each workpiece with the workpiece identifier of each workpiece, and stores them in the first rotational distance information storage unit 101.

The obtaining section 103 uses a plurality of first rotation distance information corresponding to one workpiece stored in the first rotation distance information storage section 101 to obtain information for aligning the workpiece 10 and information for specifying the orientation of the workpiece 10 And information about the defective part of the edge 11 of the workpiece 10.

The information for aligning the workpiece 10 with the position refers to information used for arranging the workpiece 10 at a predetermined position, for example. The information used to align the position of the workpiece 10 refers to, for example, information about the deviation of the position where the workpiece 10 is originally arranged and the position where the workpiece 10 is actually arranged, or correction information. The correction information is, for example, correction information obtained by the correction information obtaining device 1033. The acquisition unit 103 may acquire information for aligning the workpiece 10 in any manner. For example, the acquisition unit 103 may acquire the information for alignment using the above-mentioned conventional technique. In addition, in this embodiment, the process of acquiring the information for the alignment position by the correction information acquisition device 1033 will be described later as a specific example.

The information for specifying the orientation of the workpiece 10 refers to, for example, information used for arranging the workpiece in a predetermined orientation, for example, information indicating a notch such as an oriented flat portion or a V-shaped groove portion for specifying the orientation of the workpiece. The information indicating the notch is, for example, information indicating the position of the notch. In addition, information such as the specifications of the notch can also be provided. Information indicating the notch can be obtained by, for example, notch detection device 1036. The acquisition unit 103 may acquire the information for specifying the orientation of the workpiece 10 in any manner. For example, the acquiring unit 103 may acquire the information for specifying the orientation of the workpiece using the above-mentioned conventional technique.

For example, the acquiring unit 103 may use one or more critical values regarding the size of the notch to detect the notch, and after the detection, obtain information indicating the notch. The one or more critical values regarding the size of the notch refers to, for example, at least one critical value among the width of the notch and the distance from the edge. For example, the critical value regarding the size of the notch refers to a critical value indicating the lower limit of the distance from the edge of the notch, or a critical value indicating the lower and upper limits of the width of the notch, respectively. The lower limit of the distance from the edge of the notch refers to, for example, a portion where the distance from the edge of the notch is large, for example, a portion with the largest distance, and a distance from the original edge position when there is no notch.

For example, the acquiring unit 103 may use a plurality of pieces of first rotation distance information to detect a continuous area at the edge 11 of the workpiece 10 that is concave toward the inside of the workpiece 10, and determine the depth from the edge in the concave area (also That is, the distance from the edge) has a portion above the critical value, that is, whether the distance from the edge has a portion above the critical value of the lower limit of the distance from the edge of the notch, and if there is a portion above the critical value, then The concave region is determined as a notch, and information indicating the position of the region is obtained, for example, information on the rotation angle range is used as information indicating the notch.

In addition, the continuous area refers to, for example, a portion where the order of acquiring the first distance information is continuous, or a portion where the corresponding rotation angle of the first distance information is continuous. For example, the acquisition unit 103 may detect the continuous concave portion or the continuous convex portion from the difference between the first rotation distance information and the radius of the workpiece 10 or the distance from the rotation center of the workpiece 10 to the edge. In addition, the two ends of the concave portion or the convex portion existing on the edge 11 of the workpiece 10 may be detected by, for example, performing second-order differentiation on the continuous first distance information. Therefore, it can be judged whether the detected area is concave or convex from the value of the first rotational distance information within the area of the portion detected in this way, or the difference from the radius of the same workpiece 10 as described above, etc. shape. Therefore, by using the threshold value as described above to determine whether the region of the edge 11 of the workpiece 10 determined to be concave in this way is a notch, the acquisition part 103 can also detect the notch. In addition, the process of detecting the notch or defect of the edge 11 by performing second-order differentiation or the like in this way is a well-known technique, and its detailed description will be omitted.

In addition, the use of plural first rotation distance information also includes concepts that can be obtained by using plural first rotation distance information (for example, using distance difference information described later).

In addition, the acquiring unit 103 may also use a plurality of pieces of first rotation distance information to detect a continuous region that is concave toward the inner side of the workpiece 10 at the edge 11 of the workpiece 10, and determine whether the width of the concave region is expressed separately. The critical value range of the lower limit value and the upper limit value of the width of the notch, if it is within the range, the concave region is judged as a notch, and information indicating the position of the region (for example, information on the rotation angle range) is obtained as Information about the notch.

Alternatively, it is possible to combine the judgment by the distance from the above edge and the judgment by the width. When the distance from the edge is more than the critical value and the width is within the range shown by the critical value, it is about to be continuous The area is judged as a notch.

In addition, in the present embodiment, the process of acquiring the information indicating the notch part by the notch detection device 1036 will be described later as a specific example of the process that the acquiring unit 103 acquires the information for direction identification.

The information about the defective part is, for example, information indicating the existence position of the defective part of the workpiece 10, specifically, information indicating the rotation angle or the area where the defective part exists (for example, information indicating the rotation angle range). Moreover, the information about the defective part is information indicating the size of the defective part, for example, the distance from the edge, specifically, information indicating the depth or height of the defective part, and the width of the defective part. The information about the defective part may further have an identifier for identifying the defective part, or an identifier for the workpiece 10. The defective portion refers to, for example, burrs, chipping, dust, and the like of the edge 11 of the work 10. In addition, the information about the defective part may also be information indicating whether there is a defective part. Furthermore, the information about the defective portion may also be information indicating that the defective portion is a concave or convex portion of the edge 11 of the workpiece 10. For example, the information about the defective part is information about the defective part to be acquired by the defect detection device 1037.

The obtaining unit 103 uses, for example, one or more critical values regarding the size of the defective part to detect the defective part, and after the detection, obtains information about the defective part. The one or more critical values regarding the size of the defective portion refer to, for example, one or more critical values regarding at least one or more of the width of the defective portion and the distance from the edge.

The acquiring unit 103 calculates, for example, for a plurality of pieces of first rotation distance information, the distance indicating the difference between the distance from the rotation center of the workpiece 10 to the edge (or the radius of the workpiece 10) when the edge 11 has no defective part, and detects the The first rotation distance information whose distance is above the lower limit value of the defective part, after detection, obtains information about the defective part. For example, the obtaining unit 103 obtains the rotation angle information and the like of the first rotation distance information as the information about the defective part. In addition, the detection of the first rotation distance information also includes the concept of detecting the first distance information possessed by the first rotation distance information or detecting the rotation angle.

In addition, the acquiring unit 103 may also use a plurality of pieces of first rotation distance information to detect a continuous area that is concave toward the inner side of the workpiece 10 or a continuous area that is convex toward the outer side of the workpiece 10 at the edge 11 of the workpiece 10 And determine whether there is a part in the concave or convex region whose distance from the edge is above the critical value of the lower limit of the distance from the edge of the defective part, and if there is a part above the critical value, the concave region Or the convex area is judged as a defective part, and obtains information about the defective part, for example, the information of the rotation angle range.

Here, the distance from the edge means, for example, the distance from the edge when there is no defect or notch, or the distance of the ideal workpiece without defects or notch from the edge. Here, the distance from the edge means, for example, the distance from the edge of the workpiece 10 in the direction of the rotation center of the workpiece 10 or the distance from the edge in the direction opposite to the rotation center of the workpiece 10. For example, the distance from the edge here refers to the distance from the edge to the notch or the distance from the edge to the defect when the workpiece has no notch or defect. Here, the distance from the edge may be the depth of the concave region of the edge or the height of the convex region. Here, the distance from the edge may be the size of the distance from the edge, or the size or absolute value of the depth or height of the notch or defect. This situation is the same below.

The two ends of the concave portion or the convex portion existing on the edge 11 of the workpiece 10 can be detected by, for example, performing second-order differentiation on continuous first distance information. Moreover, the acquiring unit 103 may also use the above-mentioned threshold value to determine whether the region sandwiched between the edges 11 of the workpiece 10 detected in this way is a defective part, so as to detect the defective part.

Furthermore, the acquiring unit 103 may use, for example, a plurality of first rotation distance information to perform a continuous region that is concave toward the inner side of the workpiece 10 at the edge 11 of the workpiece 10 or a continuous region that is convex toward the outer side of the workpiece 10 Detect and determine whether the width of the concave region or convex region is greater than the critical value of the lower limit of the width of the defective portion, and if it is greater than the lower limit, the concave region or convex region is determined as a defective part, and Get information about the defective part. In addition, as the critical value of the lower limit value, when the continuous region is concave and convex, different critical values may be used, or the same critical value may be used.

Alternatively, it is also possible to combine the judgment by the distance from the edge and the judgment by the width. When the distance from the edge is more than the critical value and the width is more than the critical value, the continuous area is judged as a defective part.

In addition, the acquiring unit 103 may also compare the number of workpiece orientation-specific notches detected using the plurality of first rotation distance information with the number of notches originally provided in the workpiece 10, and when the numbers are different, the representation Information about defective parts with defective edges.

In addition, when detecting a defective portion, the acquiring unit 103 may detect the area where the orientation-specific notch portion of the workpiece is disposed, or when the detected defective portion is located in the region where the notch portion is disposed, It is also possible not to obtain information about the detected defective part.

In addition, in this embodiment, it is specifically mentioned that the acquisition unit 103 includes a synthesis device 1031, a synthesis processing device 1032, a correction information acquisition device 1033, a second distance information acquisition device 1034, a calculation device 1035, a gap detection device 1036, and a defect The case of the detection device 1037 will be described as an example.

The synthesizing device 1031 is used to synthesize a plurality of first distance information whose corresponding rotation angles are successively different by 90 degrees in the first distance information included in the plurality of first rotation distance information. The plurality of first rotation distance information herein refers to, for example, the plurality of first rotation distance information about the workpiece 10 as one of the processing objects stored in the first rotation distance information storage unit 101.

The so-called synthesis of a plurality of first distance information whose rotation angles are successively different by 90 degrees may be, for example, a combination of a plurality of pairs of first distance information whose corresponding rotation angle difference is an integer multiple of 90 degrees. The integer multiple of 90 degrees is, for example, 90 degrees, 180 degrees, and 270 degrees.

The synthesizing device 1031 synthesizes four pieces of first distance information corresponding to different rotation angles successively different by 90 degrees in the first distance information included in the plurality of first rotation distance information, respectively, to obtain a plurality of synthesized distance information, or For example, it is a case where a plurality of pairs of first distance information are synthesized separately for a corresponding rotation angle difference of 90 times n times (n is an integer of 1 to 3).

The first distance information that is synthesized with a plurality of first distance information is referred to herein as synthesized distance information. The synthesis device 1031 generally obtains a plurality of synthesis distance information. The synthesis here refers to, for example, combining a plurality of first distance information of a group into one. The synthesis here may be, for example, obtaining an average value of the plurality of first distance information, or may be a case of adding the plurality of first distance information. In addition, it can also be the average of calculating the difference of the plurality of first distance information. For example, the synthesis device 1031 will include a plurality of first rotation angles corresponding to the first distance information included in the plurality of first rotation distance information as θ ₀ , θ ₀ +90 degrees, θ ₀ +180 degrees, and θ ₀ +270 degrees The pair of distance information is synthesized and the synthesized distance information is obtained.

The synthesizing device 1031 can also synthesize a plurality of first distance information with corresponding rotation angles different from each other by 90 degrees one by one in any way. For example, the synthesizing device 1031 may also divide the plurality of first rotation distance information with corresponding rotation angle values into a plurality of groups continuously, the range of the rotation angle value becomes 90 degrees, and arrange the divided groups The first distance information possessed by the first rotation distance information in the same order is synthesized with each other to perform the above-mentioned synthesis.

The continuous rotation angle values mean that, for example, the rotation angle values of each rotation angle unit are continuous when the first distance information is obtained every time to rotate the workpiece 10. The case where the rotation angle values are continuous is referred to herein as the rotation angle is continuous.

Here, the arrangement order refers to, for example, the arrangement order when the divided first rotation distance information of each group is arranged along the ascending order or the descending order of the rotation angle each of the first rotation distance information has.

For example, when a plurality of first rotation distance information obtained by rotating the workpiece by one rotation or the like and having a rotation angle of 0 degrees or more and less than 360 degrees are stored in the first rotation distance information storage unit 101, the synthesis device 1031 first The first rotation distance information will be divided into 4 parts, so that the corresponding rotation angle range becomes: not more than 90 degrees above 90 degrees, not more than 90 degrees above 180 degrees, more than 180 degrees below 270 degrees, more than 270 degrees below 360 degree. Next, the synthesizing device 1031 synthesizes the first distance information values possessed by the divided first range of rotation distance information in each arrangement order of the rotation angle (for example, ascending order or descending order of the rotation angle), and Obtain a plurality of continuous synthetic distance information. In this way, the four first distance information forming corresponding rotation angles different from each other by 90 degrees can be synthesized separately from each other. In addition, the rotation angle range at the time of division does not need to start from 0 degrees, and the rotation angle range may be set every 90 degrees, for example, from 15 degrees.

Furthermore, it is also possible to obtain the first rotation distance information one by one sequentially from a plurality of consecutive first rotation distance information with a rotation angle range of 90 degrees, and according to each obtained first rotation distance information, there will be The rotation angles are respectively added to the first rotation distance information of the rotation angles of 90 degrees, 180 degrees and 270 degrees for detection, and the obtained first rotation distance information and the detected first rotation distance information respectively have the first distance Synthesize information. In this way, the four first distance information corresponding to the above-mentioned corresponding rotation angles successively different by 90 degrees can be sequentially synthesized with each other.

In this way, a plurality of pairs of rotation angles different from each other by 90 degrees, preferably four pairs of first distance information, are sequentially synthesized, for example, caused by the offset of the rotation center O of the workpiece 10 from the center Q of the workpiece 10 The situation in which the first distance information is reduced can be eliminated.

In addition, in each synthesized distance information obtained by synthesis, for example, a pair of plural pairs of rotation angles corresponding to plural first distance information before synthesis is stored in correspondence. Alternatively, a part of the pair of pairs that stores the rotation angle may be correspondingly stored, for example, the rotation angle of the minimum value among the corresponding plurality of rotation angles may be stored correspondingly.

The synthesis processing device 1032 will, among the plurality of synthesized distance information (the information obtained by synthesizing the first distance information synthesized by the synthesis device 1031), the plurality of synthesized distance information corresponding to the continuous rotation angle, and the value of the value changes little Multiple synthetic distance information is detected. Then, the synthesis processing device 1032 obtains a plurality of first distance information before synthesis corresponding to one or more of the detected plurality of synthesis distance information, and one or more first distances from the plurality of first distance information before synthesis The rotation angle corresponding to the information.

The size of the synthesized distance information value refers to, for example, the absolute value of the synthesized distance information. The plurality of synthesized distance information with a small change in value refers to, for example, the maximum value of the change in magnitude of the value, which is a smaller number of consecutive synthesized distance information than the other consecutive synthesized distance information of other phases. The so-called continuous plural pieces of synthetic distance information refer to two or more consecutive synthetic distance information specified in advance. The continuity here means a situation in which more than one phase corresponding to more than one rotation angle of the synthesized distance information is continuous. As described above, in the synthetic distance information, the decrease in the first distance information due to the offset of the rotation center O of the workpiece 10 from the center Q of the workpiece 10 has been eliminated, so the synthetic distance information with a larger change in size is, for example, the workpiece The edge 11 of 10 has an uneven portion. The unevenness of the edge 11 refers to the notch portion such as the flat portion 17 or the V-shaped groove portion, the burr or chipping of the workpiece 10, dust, and the like. The chipping refers to, for example, a broken part such as a crack or a gap in the edge of the work 10. The synthetic distance information of the part with a small change in size means, for example, that there is no unevenness or a part with a small unevenness, and the change in the size of the part is caused by, for example, an error in measurement.

The synthesis processing device 1032 excludes, for example, synthesis distance information with a large amount of change in value, and obtains a plurality of continuous synthesis distance information corresponding to the rotation angle in the remaining synthesis distance information, as a plurality of synthesis with small value change Distance information.

The synthesis processing device 1032 will, for example, in the plurality of synthesized distance information synthesized by the synthesis device 1031, first process to sequentially detect more than one synthesized distance information from the larger value, and to detect more than one sequentially from the smaller value At least one of the second processes of synthesizing distance information is executed more than once. In addition, the remaining synthetic distance information that is not detected by the first processing and the second processing is equivalent to a plurality of synthetic distance information with small changes in the magnitude of the value detected by the synthetic processing device 1032. In addition, the synthetic distance information detection here may also be the synthetic distance information detection of the excluded object.

The first process is a process of detecting the synthesized distance information whose maximum value is for a plurality of synthesized distance information synthesized by the synthesis device 1031, for example. Specifically, it is processing for detecting the synthesized distance information whose maximum value is from the undetected synthesized distance information. Furthermore, the second process is a process of detecting the synthesized distance information of the minimum value for plural synthesized distance information synthesized by the synthesizing device 1031, for example. Specifically, it is processing for detecting the minimum synthetic distance information from the undetected synthetic distance information.

The synthesis processing device 1032 preferably performs the first processing and the second processing a plurality of times, respectively. The plural first processing and the plural second processing may be performed plural times in any order. For example, the first processing and the second processing may be alternately executed one by one. In addition, after the plural first processes are completed, plural second processes may be performed. In addition, either of the first processing and the second processing may be implemented first.

Also, when the first process is repeatedly executed, the synthesized distance information that has been detected in the just-processed process is excluded from the detection target. For example, the detected synthetic distance information corresponds to information such as a flag indicating that the detection is completed, and the synthetic distance information corresponding to the flag and other information is no longer detected in the subsequent detection process. This method is the same when the second process is repeatedly executed.

Furthermore, the synthesis processing device 1032 may sequentially delete the synthesized distance information detected in the first process or the second process, or may add information indicating that the deleted flag or the like has been added to the detected person. At this time, for example, the synthesis processing device 1032 may detect the synthesis distance information of the maximum value from the synthesis distance information deleted in the first process. Secondly, for example, the synthesis processing device 1032 may detect the synthesis distance information whose minimum value is the synthesis distance information deleted from the second process.

Furthermore, when the first process is repeatedly executed, the synthesis processing device 1032, for example, repeatedly executes the first process until the predetermined conditions are met. For example, the detection of the synthesized distance information until the pre-specified condition is met refers to the detection of the synthesized distance information until the pre-specified number is reached. In addition, the pre-specified condition can also be the case where the difference between the maximum value and the minimum value of the remaining undetected synthesized distance information reaches below the pre-specified threshold value. This method is also the same in the second process.

When the above-mentioned pre-specified conditions for the iterative first processing and the iterative second processing are times, the number of times of the first processing condition and the number of times of the second processing condition may be different. For example, the synthesized distance information is information obtained by synthesizing the first distance information indicating the distance from the rotation center of the workpiece 10 to the edge, and generally includes the first distance to be obtained by the notched portion such as the oriented flat portion or the V-shaped groove portion The synthesized distance information obtained by synthesizing a plurality of first distance information of the information is smaller than the synthesized distance information obtained from other parts, and even because of the wide rotation angle range of such a gap, in order to The combined distance information corresponding to such a notch is detected as a part with a large change, and it is preferable to set the number of detections of the person with a smaller value of the combined distance information to more than the number of detections with a larger value. Therefore, in this case, it is preferable to set the value of the number of repetitions of the pre-specified condition for the second process to a value larger than the value of the number of repetitions of the pre-specified condition for the first process.

The synthesis processing device 1032 obtains, for example, among the remaining synthesis distance information not detected in the first process and the second process, a plurality of pre-synthesis multiple firsts corresponding to more than one of the plurality of synthesis distance information continuous with a predetermined number or more Distance information, and a rotation angle corresponding to more than one of the plurality of first distance information. The number specified in advance is 2 or more.

Alternatively, the synthesis processing device 1032 may obtain, for example, among the remaining synthesis distance information that is not detected in the first process and the second process, a plurality of pre-synthesis multiple corresponding to one or more of the plurality of synthesis distance information with the most consecutive numbers A distance information and a rotation angle corresponding to more than one of the plurality of first distance information.

The synthesis processing device 1032 detects, for example, a plurality of synthesized distance information that is continuous with the corresponding rotation angle, and is a plurality of synthesized distance information with a small change in the value, and obtains the information from the detected plurality of synthesized distance information. A corresponding four first distance information before synthesis and a rotation angle corresponding to the first distance information of one of the plurality of first distance information before synthesis. The four first distance information before synthesis refer to the four first distance information whose corresponding rotation angles are successively different by 90 degrees. The four pieces of first distance information represent the distance between four points that intersect the edge of the workpiece 10 through two orthogonal lines passing through the center of rotation and the center of rotation of the workpiece.

As the rotation angle corresponding to more than one first distance information among the plurality of first distance information before synthesis, to obtain the rotation angle corresponding to one or more than one first distance information, it is corrected according to, for example, described later The information obtaining device 1033 uses the rotation angle to determine the correction information. For example, when a synthesized distance information is synthesized by four first distance information whose rotation angles are successively different by 90 degrees, the synthesis processing device 1032 will detect a plurality of synthesized distance information with a small change in value, and obtain a The rotation angle corresponds to one of the detected plurality of synthesized distance information and corresponds to the first four pieces of first distance information synthesized, and the angle value is substantially the smallest. Alternatively, the first four pieces of first distance information corresponding to one of the detected plurality of pieces of synthesized distance information corresponding to one of the rotation angles ranging from 0 degrees to 90 degrees can also be obtained. In addition, for example, the rotation angle of 360 degrees + D degrees (D is a positive value) may be substantially D degrees. Moreover, the -D degree may be substantially 360 degrees -D degree.

In addition, in order to detect the synthesized distance information corresponding to the above-mentioned directional flat portion 17, the synthesis processing device 1032 may also detect a plurality of synthesized distance information that is smaller than the average value of the synthesized distance information.

Furthermore, in the above, the synthesis processing device 1032 detects, for example, the synthesized distance information with a larger value or the synthesized distance information with a smaller value, and detects a plurality of consecutive synthesized distance information with a small change in the magnitude of the value . However, in the present invention, in which way, the synthesis processing device 1032 may detect a plurality of consecutive synthesis distance information with a small change in the magnitude of the value.

For example, the synthesis processing device 1032 may also use values obtained by differentiating or synthesizing continuous synthetic distance information to detect and exclude continuous synthetic distance information with a large change in value, and change the magnitude of the value. A small number of consecutive composite distance information is detected. For example, the synthesis processing device 1032 may detect a value above a predetermined threshold value from values obtained by performing second-order differentiation and the like through successive synthesis distance information, and rotate the angle from the detected value above the threshold value to the next Synthetic distance information between rotation angles at a value above the critical value is detected as synthetic distance information with a large change in value, and the continuous synthetic distance in the synthesized distance information obtained except for the detected synthetic distance information The information is detected as a plurality of consecutive synthetic distance information with small changes in value.

The correction information obtaining device 1033 uses the plurality of first distance information and the rotation angle obtained by the synthesis processing device 1032 to obtain correction information for aligning the rotation center of the workpiece 10 with the center of the workpiece 10 as the alignment position of the workpiece 10 News. The correction information may be information for moving the rotation center of the workpiece 10 to the center of the workpiece 10, or information indicating the direction or magnitude of the positional deviation. The correction information is, for example, a combination of information indicating the moving direction of the rotation center (for example, an angle with respect to a predetermined direction) and the moving distance. In addition, the correction information may be a vector indicating the moving direction and moving distance of the center of the workpiece 10 and the like. In addition, the correction information may be information for moving the rotation center of the workpiece 10 to the center of the workpiece 10 when the center of the workpiece 10 and the rotation center of the workpiece 10 are arranged in the orthogonal coordinate system, indicating the amount of movement along each coordinate axis .

The correction information obtaining device 1033 uses, for example, four first distance information obtained by synthesizing the processing device 1032 corresponding to different rotation angles successively different by 90 degrees, and a rotation angle corresponding to one of them to obtain the rotation center for the workpiece 10 Correction information moved to the center of the workpiece 10.

Hereinafter, an example of processing for obtaining correction information will be described using FIG. 2(b). In addition, FIG. 2 (b), the first distance information _{r a, r b, r c} , r d is the synthesizing means 1032 for processing the information corresponding to the rotation angle obtained from a synthetic successively different by 90 degrees four first Distance information, and the corresponding rotation angles are set to θ, θ+90, θ+180, θ+270. However, θ is set to an arbitrary value. Here, θ is set to an angle ranging from 0 degrees to 90 degrees, for example. Point _{P a, P b, P c} , and P _d is the upper edge 10 of the workpiece 11 corresponds to the first distance information r _a, point r _b, r _c, r _d and the rotation center point O, respectively, P _a, the distance of the line segment connecting P _b, P _c and P _d is a first distance information r _a, r _b, r _c and r _d. Point P _c P _a point of the line segment connecting the point and the line segment connecting the point P _b and P _d is orthogonal to the rotational center O. Here, for convenience of explanation, the rotation center O of the workpiece 10 is arranged at the origin of the xy coordinates. Here, the rotation direction of the workpiece 10 is set to the clockwise direction. The angle formed by the line segment corresponding to the first distance information ra and the x-axis is the rotation angle θ, and the counterclockwise direction is set to a positive value. The angle α formed by the connecting line segment of the rotation center O of the workpiece 10 and the center Q of the workpiece 10 and the x-axis is information indicating the moving direction in the correction information; the counterclockwise direction is set to a positive value here. In addition, the length h of the connecting line segment between the rotation center O of the workpiece 10 and the center Q of the workpiece 10 is information indicating the movement amount (movement distance) in the correction information. A sensor (not shown) for obtaining the first distance information is arranged along the y-axis on the y-axis, for example.

Figure 2 (b), the line segment connecting points P _a and P _c of the point, and a line segment connecting the point P _b and P _d is the center of symmetry of a line segment drawn workpiece 10 Q, represents a moving direction of the correction information The information α and the length h representing the amount of movement are obtained from the following equation.

[Formula 1]

Further, in the above formula, since r _a -r _c and r _b -r _d is the distance difference, it was found that even if the read value of the first distance information to the sensor or the like, or from a reference point sensor The above formula can also be established when the distance is calculated.

In addition, the above-described correction information acquisition processing is only an example, and the method of the present invention is not limited to the method of acquiring the combination of the first distance information and the rotation angle from the synthesis processing device 1032.

In addition, in the above, the correction information obtaining device 1033 uses four first distance information and one rotation angle obtained for one combined distance information obtained by the combining processing device 1032 to obtain correction information, but the combining processing device 1032 may also be used for plural The plurality of pairs of the first distance information and the rotation angle obtained by synthesizing the distance information are respectively obtained in the same manner as above, and the average value of the obtained correction information for each pair is obtained as the final correction information.

The second distance information obtaining device 1034 uses the correction information obtained by the correction information obtaining device 1033 to obtain the relational expression representing the relationship between the rotation angle and the second distance information corresponding to the rotation angle when the workpiece 10 is a circle with no unevenness at the edge 11 . The second distance information refers to the distance information about the workpiece 10 with no unevenness on the edge 11 from the center of rotation to the edge 11. Next, a plurality of rotation angles corresponding to the plurality of first rotation distance information stored in the first rotation distance information storage unit 101 are respectively substituted into the obtained relational expression to obtain second distance information.

The second distance information is, for example, the same information as the first distance information. The second distance information is information equivalent to the first distance information distance that can be obtained when, for example, a round workpiece with no unevenness at the edge 11 is substituted for the workpiece 10.

The so-called round workpiece with no unevenness at the edge 11 refers to a round workpiece without an edge such as an oriented flat portion, or V-shaped groove portion, or burr, or chipping, or dust. It can also be ideal for the same specifications as the workpiece 10 Shaped workpiece.

The relational expression is, for example, an expression representing the relationship between the rotation angle when rotating the round workpiece 10 with no irregularities on the edge 11 and the second distance information corresponding to the rotation angle. The relational expression here may be an expression that represents an ideal curve of the relationship between the rotation angle of the workpiece 10 and the distance from the rotation center to the edge of the corresponding rotation angle. Furthermore, the second distance information may also be the distance from the center of rotation of the ideal workpiece 10 to the edge. In addition, the relational expression may be an approximate expression that approximates the relationship between the rotation angle when rotating the round workpiece 10 with no irregularities on the edge 11 and the second distance information corresponding to the rotation angle.

Here, the acquisition of the relational expression also includes the concept of reading the relational expression previously stored in a storage medium or the like not shown, or determining the coefficient value of the relational expression to be read, or substituting the coefficient value.

The second distance information obtaining device 1034 may obtain the relational expression using the radius of the workpiece 10 in addition to the angle indicating the direction of movement of the correction information and the length indicating the amount of movement, for example. The radius of the workpiece 10 may be stored in a storage unit (not shown) or the like in advance, and then read appropriately.

Hereinafter, an example of the relational expression will be described.

FIG. 5 is a schematic diagram for explaining the relationship used when obtaining the second distance information. In the figure, the same symbols as in FIG. 2(b) indicate the same or corresponding parts. However, in FIG. 5, unlike FIG. 2( b ), the workpiece 10 is a workpiece with a radius of a without unevenness at the edges. Meanwhile, for convenience of explanation, FIG. 5 shows an example in which the rotation center of the workpiece 10 is located at a position other than the workpiece. However, the center of rotation can also be located on the workpiece.

When the edge of the circular workpiece 10 whose rotation center O is shifted from the center Q as shown in FIG. 5 is represented by polar coordinates, the form of the following formula is formed.

[Form 2]

When this formula is expanded for r _i , the form of the following formula is formed.

[Form 3]

This formula (3) is a formula representing the relationship between the rotation angle when rotating the round workpiece 10 with no irregularities on the edge 11 and the second distance information corresponding to the rotation angle. For example, the formula (3) is stored in a storage unit (not shown) in advance, and the second distance information obtaining device 1034 reads the formula and corrects the information obtained by using the above formula (1) and formula (2), specifically , That is, the value of the angle α indicating the direction of movement, the value of the length h indicating the amount of movement, and the radius a of the work piece 10, substituting this equation (3), the work piece 10 can be obtained as a round work piece with no bumps 11 The time represents the relationship between the rotation angle θ and the second distance information r _i corresponding to the rotation angle. Hereinafter, the relational expression substituted with the value of α and the length h is called an ideal curve expression.

In addition, although the ideal curve formula shown here is the best, in terms of the relational formula, other approximate formulas may also be obtained, for example, an approximate formula prepared using a sine curve or the like.

In addition, in the above, the correction information acquisition device 1033 uses the plural first distance information acquired by the synthesis processing device 1032 and one or more pairs of rotation angles to obtain the correction information from equations (1) and (2). However, in the present invention, the correction information obtaining device 1033 may also combine the plural first distance information obtained by the synthesis processing device 1032 for more than one synthesized distance information, and the plural of the rotation angle corresponding to each of the plural first distance information Each pair of pairs is substituted into the above equation (3) to make simultaneous equations, and by solving the simultaneous equations, correction information is obtained. Moreover, the radius of the workpiece 10 may be appropriately substituted into this simultaneous equation as appropriate. This method is also the same when other approximations are used.

The second distance information obtaining device 1034 substitutes the plurality of rotation angles corresponding to the plurality of first rotation distance information stored in the first rotation distance information storage unit 101 into the obtained relational expression, such as an ideal curve type, to obtain the second Distance information. Also, the plurality of rotation angles corresponding to the plurality of first rotation distance information need not necessarily be those read from the first rotation distance information storage unit 101, as long as it is the plurality of rotations possessed by the plurality of first rotation distance information A plurality of rotation angles may be used if the angles are substantially the same. For example, a plurality of rotation angles that are substantially the same may be used. For example, an angle value for rotating the workpiece 10 by obtaining the first distance information from the workpiece 10 each time is used to obtain a complex number with the plurality of first rotation distance information by, for example, sequentially adding the angle value The rotation angles are substantially the same in plural rotation angles.

The second distance information obtaining device 1034 makes the second distance information (for example, the second distance information r _i ) obtained by sequentially substituting a plurality of rotation angles into the relational expression correspond to the rotation angle and stores it in a storage section (not shown) Wait. The storage here can also be a temporary memory. Each pair of the second distance information and the rotation angle acquired and stored by the second distance information obtaining device 1034 is referred to herein as second rotation distance information. In addition, the second rotation distance information may be obtained for the second distance information obtaining device 1034.

The computing device 1035 uses the plurality of first rotation distance information stored in the first rotation distance information storage unit 101 and the plurality of second distance information obtained by the second distance information acquisition device 1034 to obtain correspondences corresponding to the same rotation angle The difference between the first distance information and the second distance information. For example, the computing device 1035 sequentially obtains the difference between the first distance information and the second distance information corresponding to the same rotation angle. The difference here may be a value obtained by subtracting the second distance information value from the first distance information value, or may be the opposite value. In addition, as long as it is a simple detection of a defective edge, the difference here may be the magnitude of the difference, for example, the absolute value of the difference. In addition, the difference between the first distance information and the second distance information is referred to herein as distance difference information.

For example, the computing device 1035 associates the acquired distance difference information with the rotation angle and stores it in a storage unit (not shown). The storage here can also be a temporary memory.

The notch detection device 1036 uses the distance difference information calculated by the calculation device 1035 to obtain information indicating the notch portion of the workpiece 10 as orientation specific information of the workpiece 10. The notch portion refers to a portion such as an oriented flat portion or a V-shaped groove portion that is provided on the edge 11 of the work 10 as described above and specifies the direction of the work 10. The information indicating the notch refers to, for example, information indicating the rotation angle range of the part where the workpiece 10 is provided with the notch, or information indicating the plurality of first distance information acquired for the notch.

The notch detection device 1036 uses, for example, the distance difference information calculated by the calculation device 1035 and one or more critical values regarding the size of the notch portion to detect the notch portion provided at the edge 11 of the workpiece 10 and obtain information indicating the detected notch portion.

The one or more critical values regarding the size of the notch refers to the critical value regarding the distance from the edge of the aforementioned notch or the critical value regarding the width of the notch.

The notch detection device 1036 uses, for example, the distance difference information calculated by the calculation device 1035 to detect a continuous area where the edge 11 is concave toward the inner side of the workpiece 10, and the area is a lower limit indicating the distance from the edge of the pre-specified notch portion The distance difference information above the critical value of the value, and the width thereof respectively indicate the range of the critical value range in which the lower limit value and the upper limit value of the width of the notch portion are specified in advance. Next, information indicating the position corresponding to the detected area is acquired, for example, information indicating a plurality of first distance information acquired with respect to the rotation angle or the detected area is used as the indication of the notch provided at the edge 11 of the workpiece 10 News.

The edge 11 is a continuous area that is concave toward the inside of the workpiece 10, and is detected by, for example, forming a continuous area corresponding to the distance difference information that is closer to the inner side of the workpiece than the position shown by the first distance information than the second distance information. , Can be measured. For example, the first distance information is the distance from the rotation center of the workpiece 10 to the edge 11, and the distance difference information is the value obtained by subtracting the first distance information from the second distance information, the distance difference information of the edge 11 can be positive The continuous area is detected as a concave continuous area. In addition, a continuous region having a larger threshold value than the value of the measurement error and a predetermined threshold value compared to the value of the measurement error may be detected as a concave continuous region. The critical value at this time is set to a value around 0, for example. This method is also the same when detecting the defective part of the edge 11. In addition, this method is also the same when detecting continuous convex regions.

In addition, the critical value indicating the lower limit and the upper limit of the distance from the edge may be used instead of the critical value indicating the lower limit of the distance from the edge of the notch to determine the distance difference information of the continuous area. Is the maximum value or its pre- and post-values within the range indicated by the critical value, and the range value is used instead of the area indicating distance difference information above the critical value of the lower limit of the distance from the edge of the notch Judgment result. Similarly, the critical value indicating the lower limit of the width may be used instead of the critical value indicating the lower limit and the upper limit of the width, respectively, and the case where the width of the continuous region is greater than the lower limit of the width may be used instead of indicating the respective Judgment result when the width of the notch is within the critical value range of the lower limit and the upper limit. In addition, when determining whether the continuous area is a notch, it is possible to determine only the distance or width from the edge instead of determining the distance and width from the edge. In addition, these combinations can be appropriately changed. This method is also the same when detecting the defective part of the edge 11.

In addition, the gap detection device 1036 may also detect that the value of the first distance information and the second distance information calculated by the computing device 1035 is larger than the first critical value specified in advance And obtain the rotation angle information corresponding to the detected portion as the information indicating the notch of the workpiece 10. When the workpiece 10 has a round shape without irregularities, the distance from the edge of the notch is generally deeper than the distance such as chipping that exists at the edge of the workpiece 10. In addition, the depth of the notch (distance from the edge) is a known value. Therefore, by setting the first critical value to a depth greater than the depth of the chipping (distance from the edge) and a smaller depth than the known depth of the notch (distance from the edge) to detect More than one distance difference information corresponding to the notch, and information indicating the notch can be obtained.

The first critical value may also be a critical value such as the magnitude of the value. The detection of distance difference information whose value is larger than the first critical value may be, for example, detection of distance difference information whose absolute value is larger than the first critical value. This situation is the same for the second critical value described later.

In addition, whether the value of the distance difference information corresponding to the notch becomes a positive value or a negative value, the second distance information is subtracted from the first distance information to obtain the distance difference information, or the first distance information is subtracted from the second distance information It is different to obtain distance difference information.

The notch detection device 1036 can also detect the plurality of distance difference information whose value is larger than the first critical value and detect the plurality of distance difference information whose corresponding rotation angles are continuous, and can also group the plurality of rotation angles . In addition, the notch detection device 1036 can also obtain information indicating a notch portion which further includes information indicating the group. The information indicating the group is, for example, information indicating the range of the corresponding rotation angle, or a set of the corresponding rotation angle, or a group identifier assigned to the corresponding rotation angle. This situation is also the same for the information indicating the defective part group described later. In addition, one group of rotation angles at this time may be, for example, a plurality of rotation angles corresponding to a plurality of positions on one notch, or information indicating the range of the notch.

In addition, the notch detection device 1036 may also use, as the notch portion, an area where the detected value is larger than the first critical value and the corresponding rotation angle has a plurality of consecutive distance difference information specified in advance over two or more values. Generally, since the notch is set in a wide range on the edge of the work 10, the detection in this way can more reliably detect the notch.

The notch detection device 1036 may detect a plurality of notch portions for one workpiece 10.

The defect detection device 1037 uses the difference between the first distance information and the second distance information calculated by the calculation device 1035 (ie, distance difference information) to obtain information about the defective portion of the edge 11 of the workpiece 10.

For example, the defect detection device 1037 uses the difference between the first distance information and the second distance information calculated by the calculation device 1035, and more than one critical value regarding the size of the defect portion to detect the defect portion of the edge 11 of the workpiece 10 and obtain Information about the detected defective parts.

For example, the defect detection device 1037 may, for example, in the distance difference information calculated by the computing device 1035, detect the distance difference information whose size is greater than the critical value indicating the lower limit of the distance from the edge of the defective part. Information about defective parts. In addition, instead of using the lower limit of the distance from the edge of the defective part as the critical value, a critical value indicating the lower limit of the depth of the defective part and a critical value indicating the lower limit of the height of the defective part can be used to detect the The value is not information on the distance difference between the critical value representing the lower limit of the depth of the defective part and the critical value representing the lower limit of the height of the defective part.

Furthermore, the defect detection device 1037 may use, for example, the distance difference information calculated by the calculation device 1035 to form a continuous area that is concave toward the inner side of the workpiece 10 at the edge 11 of the workpiece 10 or convex toward the outer side of the workpiece 10 Detect the continuous area and determine whether the distance difference information value in the concave or convex area is above the critical value of the lower limit of the distance from the edge of the defective part. If there is a portion above the critical value, it will be The concave region or the convex region is determined as a defective part, and information about the defective part, such as information on the rotation angle range, is obtained.

In addition, the defect detection device 1037 may also use the distance difference information calculated by the calculation device 1035, for example, to form a continuous region that is concave toward the inside of the workpiece 10 at the edge 11 of the workpiece 10, or a continuous region that is convex toward the outside of the workpiece 10 Detection of the area, to determine whether the width of the concave or convex area is above the critical value of the lower limit of the width of the defective part, and if it is above the lower limit, the concave or convex area is determined as the defective part And obtain information about the defective part.

In addition, when the continuous region is concave and convex, different critical values may be used, or the same critical value may be used as one or more critical values used to detect whether the continuous region is a defective part. .

Alternatively, the above-mentioned determination by depth and the determination by width may be combined, and when the distance from the edge is equal to or greater than the critical value and the width is equal to or greater than the critical value, the continuous area may be determined as a defective portion.

Furthermore, the defect detection device 1037 may also, for example, calculate the value of the difference between the first distance information and the second distance information calculated by the calculation device 1035 (that is, the distance difference information) as compared to the pre-specified second critical value The large part is inspected, and then information about the inspected part can be obtained as information about the defective part of the edge 11 of the workpiece 10.

The second critical value is a critical value for discriminating the defect-free portion of the edge 11 of the workpiece 10 and the defective portion of the edge 11 of the workpiece 10. For example, in a portion where there is no defect on the edge 11 of the workpiece 10, the difference between the values of the first distance information and the second distance information is the difference in the degree of measurement error when acquiring the first distance information. On the other hand, in the part where the defect exists, the difference will be a difference sufficiently larger than the measurement error. Therefore, by setting the second critical value to a value larger than the measurement error, for example, the defective portion of the edge 11 of the workpiece 10 can be detected.

Information about the detected part (that is, information about the detected distance difference) refers to, for example, information indicating the rotation angle corresponding to the detected distance difference information, or detected distance difference information and the corresponding rotation angle Pairs of information. For example, the detected distance difference information may be information indicating the depth or height of the defective part.

Also, whether the defective portion protrudes outside the workpiece 10 like a burr or is concave toward the inside of the workpiece 10 like a chipping can be judged by, for example, the reference point of the first distance information and the distance difference information code Therefore, the defect detection device 1037 can also use the distance difference information code to determine whether the defective portion is convex outward. Moreover, the defect detection device 1037 can also obtain information about the defect part that has the detection result again.

In addition, after detecting the plurality of distance difference information whose value is larger than the second critical value and the corresponding rotation angle is continuous, the defect detection device 1037 may also detect the plurality of distance difference information or the plurality of rotation angles Grouping. Moreover, the defect detection device 1037 can also obtain information about the defective part that has information indicating the group again. A group of distance difference information in this case may also be distance difference information for a plurality of positions on a defective portion, for example. In addition, a group of rotation angles at this time may be, for example, a plurality of rotation angles indicating a plurality of positions on one defective portion, or information indicating a range of the defective portion.

In addition, in the case of the above-mentioned processing, notch portions such as the oriented flat portion of the workpiece 10 are also detected as defective portions. In the case where the notched part is detected as a defective part and there is no problem, the above processing may be used, but when the notched part is detected as a defective part, the notched part should not be detected as a defective part, or the notch must be detected Department is excluded from the defective part.

Therefore, for example, the defect detection device 1037 detects the distance difference information obtained by using the second threshold value to detect a plurality of consecutive distance difference information whose rotation angle is more than two or more than a predetermined number. This predetermined number is set to a number corresponding to, for example, the length (that is, the rotation angle) of the notch provided in the workpiece 10. Moreover, by excluding the plurality of distance difference information obtained in this way from the defective part, the notch can be removed, and the defective part can be detected with excellent accuracy.

Alternatively, the notch detection device 1036 may exclude the obtained rotation angle indicating the notch portion, and use only the same second threshold value as described above for the detection process of the defective portion for the distance difference information corresponding to the rotation angle.

Alternatively, the defect detection device 1037 may also calculate the value of the difference between the first distance information and the second distance information calculated by the calculation device 1035 (that is, the distance difference information) as compared to the pre-specified first critical value And the part which is larger than the second critical value (the value of which is smaller than the first critical value) is detected. Then, the information about the detection part is obtained as the information about the defective part of the edge 11 of the workpiece 10. In addition, the defect detection device 1037 may also detect the distance difference information whose value is the same as the first critical value. The first critical value is, for example, the critical value for detecting the notch of the workpiece 10 as described above. The second threshold is the same as above. In this way, the distance difference information larger than the first threshold is not detected, and the defective portion is detected with excellent accuracy without including the notch.

The output unit 104 outputs the information acquired by the acquisition unit 103 for aligning the workpiece. Furthermore, the output unit 104 outputs the information acquired by the acquisition unit 103 to specify the orientation of the workpiece. In addition, the output unit 104 outputs the information about the defective part acquired by the acquisition unit 103. For example, the output unit 104 outputs the correction information obtained by the acquisition unit 103 to align the workpiece with the position. In addition, the output unit 104 outputs information indicating the notch of the specific work orientation information acquired by the acquisition unit 103. These outputs may also have the identifier of the workpiece 10.

The output here refers to the display on the display, the projection using the projector, the sound output, the lighting of the warning light, the printing with the printer, the transmission to the external device, the storage of the recording medium, and the processing result to other processing devices Or other concepts such as submission. The output unit 104 can be realized by, for example, an output device or a driver of the output device. This situation is also the same in the distance difference correlation output device 1039 described later.

For example, the output unit 104 may output information for aligning the position of the workpiece 10 and information for specifying the orientation of the workpiece 10 to the workpiece conveying device 2 described later. Moreover, the workpiece conveying device 2 can also use the information to take out the workpiece 10 from the edge position detector 102, convey the workpiece 10, or place the workpiece 10 in a predetermined place, and correct the orientation or position of the workpiece 10 to direct the workpiece 10 Place it in the right direction in the right direction.

In addition, for example, the output unit 104 may transmit the information for the alignment position of the workpiece 10 and the information for the orientation specification of the workpiece 10 to the edge position detector 102 and the like. By using this information, for example, the edge position detector 102 changes the position or direction of the workpiece 10 to an appropriate position or direction, and sends the workpiece 10 to the workpiece conveying device 2, and the workpiece conveying device 2 can place the workpiece 10 in an appropriate direction In place.

For example, the output unit 104 can correct the position of the workpiece 10 when using the workpiece 10 by outputting the correction information, and the workpiece conveying device 2 or the like that receives the correction information can make the center of rotation of the workpiece 10 the center of the workpiece 10. For example, by outputting the correction information to the workpiece conveying device 2 or the like that conveys the workpiece 10, the workpiece conveying device 2 or the like may correct the rotation center of the workpiece 10 to the center of the workpiece 10 and convey the workpiece 10. Furthermore, it is also possible to move or rotate the turntable 52 by the edge position detector 102 etc. by outputting the correction information to the edge position detector 102 etc. having a moving device (not shown) etc. for correcting the position of the work 10 On the other hand, when the workpiece 10 is delivered to the workpiece conveying device 2, the position of the workpiece 10 is moved so that the center of rotation becomes the center of the workpiece 10.

In addition, by outputting the information indicating the notch of the workpiece by the output unit 104, the workpiece conveying device 2 or the edge position detector 102 that receives the correction information can appropriately correct the orientation of the workpiece 10 so that the orientation of the workpiece 10 becomes predetermined The orientation.

The output unit 104 may perform abnormal output according to the information about the defective part acquired by the acquisition unit 103. The so-called abnormal output refers to the output when the edge 11 of the workpiece 10 is abnormal. The abnormal output may be an output indicating that there is an abnormality at the edge 11 of the workpiece 10, or may be an output instructing an external device or the like to perform a corresponding abnormal action.

The abnormal output refers to output such as a warning indicating that an abnormal situation has occurred. The output of the warning means, for example, output of a warning sound, warning indication of a monitor, etc., and lighting of a warning lamp. The output of the warning may also have an identifier of the workpiece 10 that has been inspected for defective parts, or the like.

In addition, the abnormal output may be an output instructing to stop the operation of the work 10. The operation of the workpiece 10 refers to the workpiece 10 being conveyed by the workpiece conveying device 2, the edge position detector 102 and the like to position the workpiece 10, and the conveying object of the workpiece conveying device 2 to perform a predetermined process on the workpiece 10. The output unit 104 outputs, for example, an instruction to stop the operation to the workpiece conveying device 2, the edge position detector 102, or a processing device (not shown) that performs processing on the workpiece 10. In this way, the operation of the workpiece 10 with an abnormal edge can be stopped.

In addition, the abnormal output may be, for example, the output of the recovery instruction of the workpiece 10 in which abnormality is detected. The collection here includes, for example, moving it to a predetermined collection location, removing the workpiece 10 from a general processing route, avoiding it, and removing it from the conveyance path. For example, the output unit 104 outputs a collection instruction of the workpiece 10 in which the abnormality is detected to the workpiece conveying device 2 or the like. In accordance with the instruction, the workpiece conveying device 2 conveys the workpiece 10 to a pre-specified collection place, etc., so that subsequent operations or processing of the workpiece in which the abnormality is detected need not be performed. In addition, defect inspection can be performed on the recovered work.

The output unit 104 may perform abnormal output when, for example, the acquisition unit 103 acquires information on one defective portion. In addition, the output unit 104 may perform abnormal output when the information about the defective part acquired by the acquisition unit 103 meets a predetermined condition. For example, it is possible to determine whether the acquiring unit 103 has detected more than k predetermined defects (k is an integer of 2 or more) from the information about the defective parts acquired by the acquiring unit 103, and it is determined that more than k defective parts are detected. In the case of a defective part, abnormal output is performed. In addition, when the information on the defective part acquired by the acquiring unit 103 includes information on the defective part indicating that the maximum distance from the edge is equal to or greater than a predetermined value, an abnormal output is performed.

The evaluation-related information acceptance section 105 accepts evaluation-related information, which is related information for evaluating the defective portion of the edge 11 of one or more workpieces 10. The evaluation-related information acceptance unit 105 preferably accepts evaluation-related information regarding a plurality of workpieces 10.

The evaluation-related information refers to, for example, information used to evaluate more than one critical value for the detection processing of the defective part. The one or more critical values used for the defective part detection process are, for example, one or more critical values regarding the size of the defective part.

The evaluation-related information refers to information including, for example, information indicating whether there is actually a defect in the workpiece 10 determined by the workpiece processing apparatus 1 to be a defect-free part (for example, the acquisition part 103 fails to acquire the workpiece 10 with information about the defective part). Furthermore, the evaluation-related information refers to information that indicates whether there is actually a defect in the workpiece 10 determined by the workpiece processing apparatus 1 as a defective portion (for example, the workpiece 10 that the acquisition section 103 has acquired information about the defective portion), or Whether there is information that is evaluated as defective. For example, information indicating whether there is actually a defect, or information indicating whether the workpiece 10 can be normally used in the processing process after being processed by the workpiece processing device 1 (for example, information indicating whether it is undamaged), or indicating that a defect is detected Part of the work piece 10 performs the re-inspection (including visual inspection, etc.) of the defective part detection result information. The workpiece 10 in which the defective portion is detected may be the workpiece 10 recovered through abnormal output.

In addition, the evaluation-related information may also be information including, for example, correct or incorrect information indicating that the defective part is detected correctly or incorrectly. The correct information is information indicating whether the detection result of the defective part of the workpiece processing device 1 is correct. For example, the work piece 10 for which the acquiring part 103 has not acquired information about the defective part is evaluated for actual defects. If there is no defect, correct or incorrect information indicating that the defective part of the acquiring part 103 is detected correctly is stored in the evaluation-related information. Store correct and incorrect information indicating that the detection of the defective part is incorrect. In addition, for example, the work piece 10 that obtains information about the defective part by the acquiring part 103 is evaluated for actual defects. If there is no defect, correct or incorrect information indicating that the defective part of the acquiring part 103 is detected incorrectly is stored in the evaluation-related information. Store correct and wrong information indicating that the defective part is detected correctly. The correctness of the detection of the defective part can be judged from, for example, the above-mentioned re-inspection result of the workpiece 10 or information indicating whether the workpiece 10 can be normally used in subsequent processing.

In addition, the evaluation-related information may also have information about the subsequent processing of the workpiece processing device 1. For example, it may also be information indicating the type of processing of one or more subsequent processes (eg, heat treatment, CVD, CMP, etching, etc.), the identifier of the device used for processing, the processing time or pressure of the processing, temperature, etc. Parameters, type or concentration of gas used for processing, type or concentration of liquid used for processing, etc.

In addition, the evaluation-related information may also include information about the workpiece 10 such as the specifications of the workpiece 10, the type or composition of the workpiece, and the like.

Furthermore, the evaluation-related information may also include information about the defective part acquired by the acquiring unit 103, for example, information about the size of the defective part, or information about the same defective part obtained by re-inspection of the workpiece 10, and the like.

Also, the evaluation-related information may also have more than one critical value regarding the size of the defective part used to detect the defective part. However, in the case where one or more critical values currently used by the acquiring section 103 are evaluated, and in order to evaluate relevant information using the current critical value for the workpiece 10 that has undergone the defect part detection processing, the relevant information is evaluated It may not have a critical value.

The so-called reception includes the reception of information input from input devices such as keyboards, mice, and touch pads, the reception of information transmitted via wired or wireless communication lines, and the information read from recording media such as optical disks or magnetic disks, semiconductor memory, etc. Acceptance and other concepts.

The evaluation-related information accepted by the evaluation-related information acceptance unit 105 is stored in, for example, a storage unit (not shown).

The evaluation-related information acceptance unit 105 can be realized by inputting a device driver, a menu screen control software, or a receiving device.

The setting section 106 uses the evaluation-related information to obtain one or more critical values for the size of the defective section detection by the obtaining section 103. Then, using the acquired critical value, the critical value regarding the size used by the acquiring unit 103 for detecting the defective portion is set. The setting here also includes, for example, the update of one or more critical values for the detection of the defective part by the acquisition unit 103 set by default (default) or the user (such as the concept of overwrite) .

For example, when the acquiring unit 103 has used a critical value for the distance from the edge 11 of the defective portion to detect the defective portion of the workpiece 10, it is determined that one or more predetermined number of workpieces 10 or more are not detected in the defective portion In the case where the evaluation-related information with information indicating that the workpiece 10 is judged to be actually a defective part has been accepted by the evaluation-related information acceptance unit 105, the setting unit 106 acquires the relevant defective part from the edge 11 as compared to the use by the acquisition unit 103 The value of a critical value of the calculated distance makes it easier to detect the critical value of the defective portion (for example, the smaller value of the critical value), and updates the critical value of the distance calculated from the edge 11 used by the acquiring unit 103 with the critical value. In this way, the part with a smaller change in distance from the edge 11 can also be detected as a defective part, and the detection omission of the defective part can be reduced. In addition, in this case, it is also possible to accept the evaluation-related information obtained by re-inspection, etc., which indicates the distance from the edge 11 of the defective part, and use the workpiece that actually has the defective part although the defective part is not detected The information 10 indicates the distance from the edge 11 of the defective part, and the critical value at which the defective part can be detected is obtained.

In addition, for example, in one or more than a predetermined number of workpieces 10 in which a defective portion is detected, upon re-examination, etc., evaluation-related information including information indicating that the defective portion is not actually detected has been accepted for evaluation-related information When the unit 105 accepts, the setting unit 106 may also obtain a critical value that is more difficult to detect defects than a critical value of the distance from the edge 11 used by the acquiring unit 103 in relation to the defect (for example, acquiring a larger critical value), The critical value is used to update the critical value of the distance from the edge 11 in use by the acquiring unit 103 as the critical value of the distance from the edge.

In addition, the setting unit 106 may also use machine-learning information with correctness information and critical value evaluation information to obtain more than one critical value regarding the size of the defective portion. For example, the setting unit 106 uses the correctness information of the evaluation-related information received by the evaluation-related information accepting unit 105 for the plurality of workpiece evaluations, more than one critical value regarding the size of the defective portion, and the subsequent processing regarding the above-mentioned workpiece processing apparatus 1 A combination of one or more pieces of information or information about the workpiece 10 (for example, information such as the type of the workpiece), or information about the defective part, etc. is used as learning data for learning. Further, for example, when the workpiece processing apparatus 1 processes one or more workpieces 10, etc., when setting a defect detection threshold, the workpiece 10 is processed in the same way as the above-mentioned learning, with regard to the information about the subsequent processing of the workpiece processing apparatus 1, or More than one piece of information such as information about the workpiece 10, or information about the defective part, and more than one critical value about the size of the defective part (for example, the critical value about the distance from the edge or the critical value of the width) Each pair of each threshold value is input through the above-mentioned evaluation-related information accepting unit 105 and the like, and each pair is evaluated using the learning result. Then, when obtaining the evaluation result with correct and wrong information indicating that the defective part can be correctly judged, one of the critical values (for example, the maximum critical value, etc.) included in the above-mentioned pair can also be obtained as one of the size of the defective part The above threshold. Furthermore, the threshold value may be set as a threshold value for detecting a defective portion.

In this way, the defect portion of the edge 11 of the workpiece 10 can be detected with excellent accuracy using appropriate threshold values according to the processing of the subsequent procedure or the type of the workpiece.

For learning using learning data, learning models such as SVR are well-known techniques that can be used. At this time, the learning data may also be teacher data.

In addition, the setting unit 106 may appropriately obtain correctness and error information from information on a defective part of the workpiece 10 included in the evaluation-related information and information indicating whether the edge 11 of the workpiece 10 is actually defective.

Furthermore, in the above, the processing result of the workpiece 10 (for example, whether the workpiece 10 is damaged, etc.) may be learned to replace the correct information, and the distance from the edge 11 of the defective portion of the workpiece 10 may be learned to replace the critical value. At this time, by combining more than one piece of information including information about the subsequent processing of the workpiece processing device 1, or information about the workpiece 10, or information about the defective part, and the plural distances from the edge of the defective part By inputting the learning result of a plurality of groups, the distance from the edge of the defective part that has not been damaged in the subsequent procedure can be obtained. For example, the defective part can be appropriately detected by using the distance as a threshold. In addition, it is possible to set the critical value of the specifications used in defect detection by performing machine learning other than these, and there should be no doubt.

In addition, the setting unit 106 may use a multiple regression analysis or the like to generate a prediction formula of the critical value from a combination of the critical values included in the past used in the evaluation-related information, the processing of the subsequent program, the type of work, and other parameters. Use the predictive formula to calculate the appropriate threshold value corresponding to the subsequent program processing, workpiece type, etc. to set the calculated threshold value.

Next, an example of the edge position detector 102 will be described using FIG. 3.

The edge position detector 102 includes a turntable rotation mechanism 53 for rotating the turntable 52 on which the workpiece 10 is placed. The turntable rotation mechanism 53 is driven by an electric motor 54. The edge detection unit 55 that detects the edge position of the work 10 has a light projector 55a and a sensor 55b. The sensor 55b is, for example, a light sensor. The sensor 55b is a device that continuously changes while keeping the output corresponding to the amount of received light, and can use so-called CCD (Charge Coupled Device), PSD (Position Sensitive Sensor, Position Sensitive Detector, trade name) etc. A device whose light quantity changes linearly. The sensor 55b corresponds to, for example, the sensor 15 of FIG. 2(a). The sensor 55b of the edge detection unit 55 emits light from the light projector 55a, and the light amount is reduced by the workpiece 10 directly below to generate an output corresponding to the amount of light reached. This output becomes an index indicating the edge position of the workpiece 10. The encoder 56 detects the rotation amount of the electric motor 54 and outputs a digital signal, and the rotation amount of the electric motor 54 is equivalent to the rotation angle of the turntable 52. The storage unit 57 sets the output of the sensor 55 b and the output of the encoder 56 as a pair of data, and stores the data in accordance with each rotation angle of the turntable 52. In addition, the storage unit 57 may convert the output of the sensor 55b into the distance from the center of rotation of the workpiece 10 to the edge 11 and then output it. In this specific example, the storage unit 57 converts the rotation angle and the output of the sensor 55b into the first distance information obtained by converting the distance of the workpiece 10 from the center of rotation to the edge 11 as the first rotation distance information, and stores In the first rotation distance information storage unit 101. In addition, when the output of the sensor 55b is an analog signal, an A/D (analog/digital) converter or the like may be provided between the storage unit 57 and the sensor 55b.

In addition, the edge position detector 102 mentioned here is just an example. In the present invention, as long as it is a device that can obtain a plurality of first rotation distance information about the workpiece 10 similar to the edge position detector 102, other edge position detection The device 102 can also be used.

In addition, the edge position detector 102 here is shown as a part of the workpiece processing apparatus 1, but the edge position detector 102 may be a device different from the workpiece processing apparatus 1, for example.

Next, an example of the work conveyance system of this embodiment will be described using FIG. 4.

The workpiece conveying system 1000 includes a workpiece processing device 1 and a workpiece conveying device 2. The conveying path 1001 of the workpiece conveying system 1000 is covered with a cover (not shown), for example.

The workpiece conveying device 2 is a device that conveys the workpiece 10. For example, the workpiece conveying device 2 includes a conveying arm that can move the workpiece in a horizontal direction or a vertical direction. When the workpiece 10 is placed, the workpiece 10 can be conveyed by moving the conveying arm. The work conveying device 2 itself may have a structure movable in the horizontal direction or the vertical direction. However, the structure and the like of the work conveying device 2 are not limited.

The workpiece conveying device 2 conveys the workpiece 10 to the workpiece processing device 1. The conveyance of the workpiece 10 to the workpiece processing apparatus 1 refers to, for example, during the conveyance of the workpiece 10, the workpiece 10 is conveyed to the workpiece processing apparatus 1, the workpiece is delivered to the workpiece processing apparatus 1, and then received from the workpiece processing apparatus 1 The movement of the workpiece 10 to other locations.

The workpiece conveying device 2 is, for example, a device that performs conveyance from the first location to the workpiece processing device 1 and conveyance from the workpiece processing device 1 to the second location. The first point is a point where the workpiece 10 to be conveyed is arranged. The second location is the location of the transport destination of the workpiece 10 to be transported. In addition, the workpiece conveying device 2 may further perform conveyance from the workpiece processing device 1 to a third location, which serves as a location for placing the recovery workpiece 10. For example, the workpiece conveying device 2 may convey the workpiece 10 to any one of the second location or the third location according to an instruction input from the outside or the like.

Here, as an example, the workpiece conveying device 2 conveys the workpiece 10 stored in the container 4 as the first location to the turntable 52 of the workpiece processing device 1 and places it on the turntable 52 of the workpiece processing device 1 The case where the workpiece 10 is transported to the mounting table 6 of the pre-designated processing execution device (not shown) as the second location or the recovery container 5 as the third location will be described. In this case, for example, the workpiece conveying apparatus 2 receives the abnormal output from the output section 104 of the workpiece processing apparatus 1 via a receiving section or the like (not shown). When the abnormal output is received, the abnormal output is placed on the workpiece processing apparatus 1. The workpiece 10 on the turntable 52 is transported to the recovery container 5 as the third location to collect the workpiece 10; when no abnormal output is received, the workpiece 10 placed on the turntable 52 of the workpiece processing apparatus 1 is transported to The mounting table 6 of the pre-designated processing execution device (not shown) at the second location.

In addition, the workpiece conveying device 2 may also include: a device that receives correction information such as correction information output by the output unit 104 of the workpiece processing device 1 and corrects the position of the workpiece 10; or receives an output of the workpiece processing device 1 The notch output by the section 104 represents information such as information about the orientation of the workpiece, and corrects the orientation of the workpiece 10.

In addition, the workpiece conveying device 2 may include a device that receives the abnormal output from the output unit 104 of the workpiece processing device 1 and stops the conveyance of the workpiece 10 in response to the received abnormal output.

In addition, the configuration of the work conveying device 2 is a well-known technology, and therefore its detailed description is omitted here.

The mounting table 6 is a platform on which a workpiece 10 to be processed is placed on a device (not shown) that performs predetermined processing on the workpiece 10. The mounting table 6 corresponds to the second point mentioned above. The device performing the pre-specified processing may be any device such as a CVD device or a surface polishing device. For example, a device that performs predetermined processing on a workpiece 10 placed on the mounting table 6. .

The container 4 is a container for containing and conveying one or more work pieces 10. The container 4 corresponds to the first point mentioned above. The container 4 accommodates the workpiece 10 to be processed by the device (not shown). The workpiece 10 conveyed by the workpiece conveying device 2 and placed on the mounting table 6 is accommodated in the container 4. The container 4 is, for example, a cassette that accommodates and transports one or more work pieces 10. The container 4 is, for example, a so-called FOUP (Front 　 Open 　 Unified 　 Pod). The container 4 can be attached to or detached from a cover (not shown) of the conveying path 1001. The cover of the conveyance path 1001 is provided with, for example, a door (not shown) for mounting the container 4.

The container 5 is a container for storing and transporting one or more work pieces 10. The container 5 corresponds to the third point mentioned above. The container 5 is a container for storing the workpiece 10 recovered in response to the abnormal output from the output unit 104. The container 5 accommodates the workpiece 10 conveyed by the workpiece conveying device 2 corresponding to the abnormal output. The other configuration of the container 5 is the same as that of the container 4.

In addition, here, the case where the first point is the container 4, the second point is the mounting table 6, and the third point is the container 5 will be described, but each point may be a point for any purpose. For example, the first location may be a mounting table of an execution device that performs predetermined processing on a workpiece. Moreover, the second location may be the same container as the container 4. In addition, the third point may be a mounting table or the like for performing an inspection device (not shown) for inspecting a workpiece.

Next, an operation example of the workpiece processing apparatus 1 will be described using the flowchart of FIG. 6. In addition, since the process of obtaining the first rotational distance information by the edge position detector 102 is well known, its description is omitted here. In addition, the process of storing the plurality of first rotation distance information acquired by the edge position detector 102 for the workpiece 10 in the first rotation distance information storage unit 101 is also omitted here. At the same time, the case where the setting unit 106 acquires the critical value regarding the specification of the defective portion without using machine learning will be described as an example.

(Step S100) The workpiece processing apparatus 1 determines whether it is time to output correction information, information indicating a notch portion, and information about a defective portion. For example, the workpiece processing apparatus 1 determines whether the plurality of pieces of first rotation distance information acquired for one work piece 10 corresponding to one week of the work piece 10 have been stored in the first rotation distance information storage unit 101, and if it has been stored, it determines to output the above The timing of the information; if it is not saved, it is judged as a non-output timing. Alternatively, it may be determined as the output timing when the acquisition processing of the plurality of first rotation distance information about one workpiece 10 performed by the edge position detector 102 has ended. When outputting, proceed to step S101; when not outputting, proceed to step S120.

(Step S101) The synthesis device 1031 divides the difference in corresponding rotation angles among the plurality of first distance information included in the plurality of first rotation distance information corresponding to one workpiece 10 by successively different first distance information of 90 degrees Synthesize separately, and obtain a plurality of synthetic distance information. For example, the synthesis device 1031 continuously divides the plurality of first rotation distance information having continuous rotation angle values into a plurality of groups with a rotation angle value range of 90 degrees, and arranges the divided groups in the same order The first distance information possessed by the first rotation distance information is synthesized with each other. The synthesis here refers to, for example, calculation of an average value. The synthesizing device 1031 associates the acquired synthesized distance information with the four rotation angles corresponding to the synthesized four first distance information, respectively, and stores them in a storage section (not shown).

(Step S102) The synthesis processing device 1032 substitutes 1 as the value of the counter p.

(Step S103) The synthesis processing device 1032 detects the p-th synthesized distance information from the smaller value in the synthesized distance information synthesized in step S102. The synthesis processing device 1032 gives information such as the detected flag or the flag to be deleted to the detected synthesized distance information, for example. The synthetic distance information indicating the minimum value can also be detected and deleted, instead of detecting the p-th synthetic distance information. When it is to be deleted, the remaining synthetic distance information that has never been deleted will be detected and deleted again from the remaining synthetic distance information that represents the minimum value.

(Step S104) The synthesis processing device 1032 increments the value of the counter p by one.

(Step S105) The synthesis processing device 1032 determines whether the value of the counter p is a predetermined number or more. If it is more than the predetermined number, it proceeds to step S106; if it is not more than the predetermined number, it returns to step S103.

(Step S106) The synthesis processing device 1032 substitutes 1 as the value of the counter q.

(Step S107) The synthesis processing device 1032 detects the qth synthesis distance information from the larger value in the synthesis distance information synthesized in step S102. The synthesis processing device 1032, for example, gives information such as a detected flag or a deleted flag to the detected synthesized distance information. In addition, it is also possible to detect and delete the synthetic distance information indicating the maximum value, instead of detecting the qth synthetic distance information. If it is deleted, the remaining synthetic distance information that has never been deleted next time will be detected and deleted again.

(Step S108) The synthesis processing device 1032 increments the value of the counter q by one.

(Step S109) The synthesis processing device 1032 determines whether the value of the counter q is a predetermined number or more. If it is more than the predetermined number, it proceeds to step S110; if it is not more than the predetermined number, it returns to step S107.

(Step S110) The synthesis processing device 1032 detects the synthesis distance information that has not been detected (or not deleted) in steps S103 and S107 and has been consecutively specified in number or more.

(Step S111) The synthesis processing device 1032 detects one synthesized distance information (for example, synthesized distance information in the center) from the phase-continuous synthesized distance information that has been detected in step S110, and obtains the detected synthesized distance information as the synthesis source Four pieces of first distance information and a rotation angle corresponding to one of the first distance information. For example, the one with the smallest value among the rotation angles corresponding to the four first distance information is used as one rotation angle.

(Step S112) The correction information obtaining device 1033 uses the four first distance information obtained in step S111 and a rotation angle to obtain correction information for moving the rotation center of the workpiece 10 to the center of the workpiece 10. For example, the above formula (1) and formula (2) are used to obtain correction information. In addition, the obtained correction information is temporarily stored in a storage unit (not shown).

(Step S113) The second distance information obtaining device 1034 uses the correction information obtained in step S112 to obtain the relationship between the rotation angle of the workpiece 10 when the edge 11 has no unevenness and the second distance information corresponding to the rotation angle Relationship. For example, the correction information is substituted into the coefficient of the above formula (3) to obtain the ideal curve formula.

(Step S114) The second distance information obtaining device 1034 substitutes the plurality of rotation angles corresponding to the plurality of first rotation distance information corresponding to the above-mentioned one workpiece 10 into the relational expression obtained in step S113, and obtains each rotation angle Second distance information. Next, a plurality of second rotation distance information having a rotation angle and second distance information is stored in a storage section (not shown).

(Step S115) The computing device 1035 obtains a plurality of pieces of distance difference information indicating the difference between the first distance information and the second distance information corresponding to the same rotation angle.

(Step S116) The notch detection device 1036 uses a plurality of pieces of distance difference information and a first threshold to obtain information indicating the notch.

(Step S117) The defect detection device 1037 uses a plurality of pieces of distance difference information and the second critical value and performs acquisition processing on the defect part information.

(Step S118) The output unit 104 performs abnormal output based on the information about the defective part. In addition, the so-called abnormal output based on the information about the defective part also includes the concept of not performing abnormal output based on the information about the defective part, or not obtaining the abnormal output when the information about the defective part is not obtained.

(Step S119) The output unit 104 outputs the correction information, the information indicating the notch, and the information about the defective part. Then, it returns to step S100. In addition, when the abnormal output has been performed in step S118, the output unit 104 may not output the information indicating the correction information or the notch. Furthermore, the output unit 10 may not output the information about the defective part when the defect detection device 1037 has not acquired the information about the defective part.

(Step S120) The evaluation-related information acceptance unit 105 determines whether evaluation-related information has been accepted. When it has been accepted, it proceeds to step S121; when it has not been accepted, it proceeds to step S122.

(Step S121) The evaluation-related information acceptance unit 105 stores the evaluation-related information accepted in step S120 in a storage unit (not shown). Then, it returns to step S100.

(Step S122) The setting unit 106 determines whether it is time to set one or more critical values for the specification of the defective part. For example, when a threshold setting instruction is received from a user via an unillustrated reception unit or the like, it is determined that the timing is set; when it is not accepted, it is determined that it is not the timing. In addition, when the evaluation-related information has been accepted in step S120, or when a predetermined number of evaluation-related information has been accepted in step S121, it may be determined that the timing is set. When the timing is set, the process proceeds to step S123; when the timing is not set, the process returns to step S100.

(Step S123) The setting unit 106 uses the evaluation-related information stored in step S121 to obtain one or more critical values regarding the specifications of the defective part.

(Step S124) The setting unit 106 sets the threshold value obtained in step S123 as the threshold value to be used when the obtaining unit 103 detects the defective portion. For example, the threshold value is stored in a storage section (not shown). In addition, when the threshold value corresponding to the threshold value acquired in step S123 (for example, the threshold value for the same process) is already set (for example, when a default threshold value has been set), the setting unit 106 Then update the threshold. The update can be set. Then, it returns to step S100.

6 illustrates the case where the setting unit 106 obtains the threshold value without using machine learning. However, when the setting unit 106 uses machine learning to obtain the threshold value, for example, the setting unit 106 uses the evaluation correlation stored in step S121 Learning the information, and before obtaining the critical value in step S123, as long as the information related to the evaluation of the learning is processed, the information about the subsequent processing of the workpiece processing device 1, the information about the workpiece 10, or the information about the defective part, etc. More than one piece of information, and a pair of plural critical values prepared in advance for more than one critical value about the size of the defective part (for example, a critical value about the distance from the edge, or a critical value about the width), via The above-mentioned evaluation-related information acceptance unit 105 accepts, and in step S123, the setting unit 106 obtains a critical value from the received information and learning results. In addition, the plurality of threshold values prepared in advance may be stored in a storage unit (not shown) or the like in advance by default.

In addition, in the flowchart of FIG. 6, the process is terminated by the power-off or the insertion of the end of the process.

Next, an operation example of the workpiece conveying system 1000 will be described using the flowchart of FIG. 7. Moreover, here, when the workpiece 10 is placed on the turntable 52 of the edge position detector 102 of the workpiece processing apparatus 1, the edge position detector 102 acquires a plurality of pieces of first rotation distance information for the workpiece 10, and converts the acquired rotation The case 101 in which the distance information is stored in the first rotation distance information storage unit will be described as an example.

(Step S201) The workpiece conveying device 2 takes out the workpiece 10 at the first point, for example, one workpiece 10 accommodated in the container 4 and conveys it to the workpiece processing device 1. Specifically, the workpiece is placed on the turntable 52 of the edge position detector 102.

(Step S202) The edge position detector 102 acquires a plurality of pieces of first rotation distance information for the workpiece placed on the turntable 52, and stores the obtained first rotation distance information in the first rotation distance information storage unit 101.

(Step S203) The workpiece processing apparatus 1 performs processing to obtain correction information about the workpiece 10, information indicating the notch portion, and information about the defective portion and output, or processing to output abnormally. In addition, this processing corresponds to the processing of the workpiece processing apparatus 1 shown from step S100 to step S119 in the flowchart of FIG. 6, for example.

(Step S204) The workpiece conveying device 2 determines whether an abnormal output has been received from the output unit 104 of the workpiece processing device 1. When it has been received, it proceeds to step S207; when it has not been received, it proceeds to step S205.

(Step S205) The workpiece conveying device 2 corrects and picks up the workpiece placed on the turntable 52 of the edge position detector 102 using the correction information output by the output unit 104 and the information indicating the notch, so that the position and direction conform to the predetermined Location and direction. This correction can also change the workpiece support position or direction when the workpiece conveying device 2 picks up the workpiece 10. It can also be performed by changing the position or direction of the turntable of the edge position detector 102.

(Step S206) The workpiece conveying device 2 conveys and places the workpiece 10 at a second location (for example, the placing table 6). Then, the transportation process is ended.

(Step S207) The workpiece conveying device 2 picks up the workpiece 10 from the turntable of the edge position detector 102, and conveys it to the third point for collection, in this case the collection container 5, and stores the workpiece in the container 5. Then, the transportation process is ended.

Hereinafter, a specific operation example of the work conveyance system 1000 of this embodiment will be described. Here, the case where the edge position detector 102 has a device that changes the position or direction of the turntable 52 according to the correction information output by the output unit 104 or information indicating the notch portion, etc. will be described. In addition, here, the case where the workpiece 10 is the wafer 10 will be described as an example.

The workpiece conveying device 2 will take out one wafer 10 stored in the container 4, convey it to the workpiece processing device 1, and place it on the turntable 52 of the edge position detector 102 shown in FIG. 3.

When the wafer 10 is placed on the turntable 52, the edge position detector 102 obtains the rotation angle and the first distance information while rotating the wafer 10, and the storage unit 57 pairs the rotation angle and the first distance information. A plurality of first rotation distance information are stored in the first rotation distance information storage unit 101.

FIG. 8 is a diagram of a first rotation distance information management table that manages the first rotation distance information stored in the first rotation distance information storage unit 101. The first rotation distance information is obtained by using the edge position detector 102 shown in FIG. 3 in the manner described above. Here, for convenience of description, the first rotation distance information obtained by sequentially rotating each wafer 10 at 0.036 degrees is stored (that is, 10,000 records of first rotation distance information are stored for one wafer) The case is explained as an example.

The first rotation distance information management table has attributes such as so-called "wafer ID", "rotation angle", and "first distance information". "Wafer ID" is the identification information of the wafer. "Rotation angle" is the rotation angle of the wafer. "First distance information" is the distance from the center of rotation of the wafer to the edge of the wafer. In addition, r _m (m is an integer from 1 to 10000) of the “first distance information” is the first distance information corresponding to a rotation angle of 0.036×m (degrees). The value of r _m is set to an arbitrary value. In the first rotation distance information management table, each column (record) represents the first rotation distance information.

9 is a graph illustrating the relationship between the rotation angle of the first rotation distance information and the first distance information. The graph is a graph related to the first rotation distance information of the wafer whose "wafer ID" is "W001" (hereinafter, referred to as wafer W001), which shows the relationship between the rotation angle and the first distance information. When the rotation center of the wafer is shifted from the center of the wafer, as shown in FIG. 9, the graph as a whole depicts, for example, a curved waveform with a period of 360 degrees. In the figure, the concave portion 20 is a portion corresponding to the oriented flat portion of the wafer 10. In addition, the concave portions 21 and 22 are portions corresponding to the chipping of the wafer 10. At the same time, the convex portion 23 is a portion corresponding to the burr of the wafer 10.

First, the user or the like has performed, for example, an operation to specify the acquisition target of the wafer W001 as correction information.

FIG. 10 is a graph illustrating the relationship between the rotation angle of the first rotation distance information and the first distance information in the processing performed by the synthesis device 1031 on the first rotation distance information, and FIG. 10(a) shows the rotation angle at 0 degrees The graph above the range of less than 90 degrees, Figure 10(b) is the graph of the rotation angle of more than 90 degrees and less than 180 degrees, and the graph of Figure 10(c) is the curve of the rotation angle of more than 180 degrees and less than 270 degrees Figure 10(d) is a graph with a rotation angle of more than 270 degrees and less than 360 degrees. Figure 10(e) is an arrangement of the graphs from Figure 10(a) to Figure 10(d) according to the rotation angle. Graphs synthesized sequentially. FIG. 10(f) is a graph showing a state in which a portion with a large change in value is deleted from the graph of FIG. 10(e).

The synthesizing device 1031 obtains the record with the "wafer ID" as "W001" from the first rotation distance information management table shown in FIG. 8, and divides the obtained record into four by 90 degrees "rotation angle". Specifically, it is divided into: a group of records where the "rotation angle" is less than 90 degrees and less than 90 degrees, a group of records where the "rotation angle" is less than 90 degrees and less than 180 degrees, and the "rotation angle" is not more than 180 degrees The group with a record of 270 degrees and the group with a record of "rotation angle" of more than 270 degrees and less than 360 degrees. The graphs showing the records of each group are the graphs shown in FIGS. 10(a) to 10(d).

Then, the synthesizing device 1031 synthesizes the first distance information possessed by the first rotation distance information having the same arrangement order of the divided groups. The synthesis here refers to the calculation of the average value. For example, the synthesis device 1031 obtains the first record when the records of each group are arranged in order from the one with the smaller rotation angle value (that is, the "rotation angle" is "0", "90", "180", and "270" The "first distance information" values "r ₁ ", "r ₂₅₀₁ ", "r ₅₀₀₁ ", and "r ₇₅₀₁ "average R ₁ ) of the record are used as the first combined distance information and formed with these rotation angles Correspondingly, it is stored in a storage unit (not shown). In addition, R ₁ is equal to (r ₁ + r ₂₅₀₁ + r ₅₀₀₁ + r ₇₅₀₁ )/4.

Secondly, in the same way, obtain the second record of each group, that is, the "first distance information" value "r ₂ of the records whose "rotation angle" is "0.036", "90.036", "180.036", and "270.036" ”, “r ₂₅₀₂ ”, “r ₅₀₀₂ ”, and the average value R _{2 of} “r ₇₅₀₂ ”are used as the second synthesized distance information, and correspond to these rotation angles, and are stored in a storage section (not shown). The same is done for the third post-record.

FIG. 11 is a synthesis distance information management table that manages the synthesis distance information acquired by the synthesis device 1031. The synthetic distance information management table has attributes of so-called "rotation angle" and "synthetic distance". "Rotation angle" refers to the rotation angle corresponding to the synthesized four first distance information respectively. "Synthetic distance" refers to synthetic distance information. In addition, R _{m is} set equal to (r _m + r _{m + 2500} + r _{m + 5000} + r _{m + 7500} )/4.

FIG. 10(e) is a graph showing the synthesis distance information acquired by the synthesis device 1031. FIG. In addition, here, the angle system with the smallest median value of each "rotation angle" is shown on the horizontal axis. As shown in FIG. 10(e), by synthesizing the first distance information in which the rotation angles are successively different by 90 degrees, the waveform generated by the rotation center as shown in FIG. 9 shifted from the wafer center is eliminated, so that The graph as a whole becomes linear. However, the concave portions 20, 21, and 22 or the convex portions 23 corresponding to the defect portions such as chipping or burrs that exist in the first plurality of continuous distance information before synthesis, or notches such as oriented flat portions, although their values are generated due to synthesis Change, but it has not been eliminated, so it is still there.

Next, the synthesizing processing device 1032 repeatedly detects and deletes the minimum synthetic distance information among the plurality of synthetic distance information synthesized by the synthesizing device 1031 shown in FIG. 11 until a predetermined number of times is reached. The deletion may also be to add the flag information indicating that it has been deleted to the synthesized distance information. In this way, for example, in FIG. 10(e), the plurality of synthesized distance information of the concave portion 20 corresponding to the directional flat portion where the change in the magnitude of the value is larger than the other portions is sequentially deleted. Furthermore, after orienting the flat portion, the combined distance information of the concave portions 21 and 22 corresponding to the larger chipping of the value with respect to the other portion is sequentially deleted.

Next, the synthesis processing device 1032 will repeatedly detect and delete the synthesized distance information of the maximum value in the plural pieces of synthesized distance information remaining only by deleting the minimum value of the pre-specified number of times until it reaches the pre-specified number of times . In this way, for example, in FIG. 10(e), the synthetic distance information of the convex portions 23 corresponding to the burrs whose value changes more than other parts is sequentially deleted. In addition, the number of times of each deletion described above is preferably determined through repeated experiments and the like. In addition, for example, the number of detections and deletions on the side where the notch is present such as an oriented flat part (the minimum number of detections and deletions here) is preferably set to be greater than the number of detections and deletions on the side where the notch is not present such as the oriented flat part ( (This is the maximum number of detections and deletions).

In this way, it is possible to detect and delete the part whose value changes greatly from the synthesized distance information shown in FIG. 11. The remaining synthetic distance information that has not been detected (that is, the remaining synthetic distance information that has not been deleted) forms the state of FIG. 10(f). The two or more consecutive synthetic distance information in the remaining undetected synthetic distance information are plural synthetic distance information with little change.

Secondly, the synthesis processing device 1032 detects the synthesized distance information from the undetected (here, undeleted) continuous synthesized distance information of the remaining phases. Here, it is to detect the number of continuous synthetic distance information of each phase according to a plurality of continuous synthetic distance information, and to detect the synthetic distance information whose order is located in the center of the part with the largest number of consecutive phases. Here, for example, the synthesized distance information in the range of rotation angle θ from θ ₆₀₀ to θ ₁₂₀₀ , specifically, the synthesized distance information of region 25 in FIG. 10(f) is continuous, and its continuous number is more than that of other phases When it is long, the synthesis processing device 1032 detects the synthesis distance information located in the center of the range, specifically, the synthesis distance information corresponding to the rotation angle θ ₉₀₀ . In addition, θ _m (m is an integer of 1 to 10000) represents, for example, a rotation angle that moves the wafer W001 one by one at 0.036 degrees for 600 rotations, that is, a rotation angle of 0.036×m (degrees). θ ₆₀₀ is the rotation angle when the wafer W001 is rotated by 0.036×600 (degrees), for example.

Furthermore, the synthesis processing device 1032 obtains four rotation angles corresponding to the four first distance information before synthesis of the detected synthesis distance information from the synthesis distance information management table shown in FIG. 11. For example, in the synthetic distance information management table shown in FIG. 11, a record including the rotation angle θ degrees corresponding to the detected synthetic distance information is detected as the value of “rotation angle”, and all the records included in the record are obtained. Rotation angle" value. Alternatively, 90 degrees, 180 degrees, and 270 degrees are sequentially added to the rotation angle θ _{900 to} obtain four pre-combination rotation angles. Here, it is assumed that θ ₉₀₀ , θ ₉₀₀ +90 degrees, θ ₉₀₀ +180 degrees, and θ ₉₀₀ +270 degrees have been acquired as the rotation angle. Next, the synthesis processing device 1032 obtains four pieces of first distance information r ₉₀₀ , r ₃₄₀₀ , r ₅₉₀₀ , and r ₈₄₀₀ corresponding to the obtained four rotation angles from the first rotation distance information management table shown in FIG. 8. .

Since the four first distance information obtained in this way is the first distance information obtained for the edge of the wafer where there is no notch, burr, chipping, etc., it is from the less affected notch or defect The distance from the center of wafer rotation to the edge.

The correction information acquisition device 1033 reads the above equations (1) and (2) from, for example, a storage unit (not shown), and combines the four first distance information and the first distance information acquired by the synthesis processing device 1032 One of the corresponding rotation angles (here is the minimum rotation angle θ ₉₀₀ obtained above) is substituted into equations (1) and (2) to calculate the rotation center used to move the wafer W001 to the center of the wafer W001 Correction information (that is, the angle of the information indicating the moving direction and the length of the moving amount). Here, it is assumed that the angle α ₁ and the length h ₁ have been obtained as correction information. The correction information obtaining device 1033 temporarily stores the obtained correction information in, for example, a storage unit (not shown).

The second distance information acquisition device 1034 that has received the correction information reads the above equation (3) from a storage section not shown, and substitutes the angle α ₁ and the length h ₁ as the correction information into the equation (3) to obtain the ideal Curved.

The second distance information obtaining device 1034 sequentially substitutes the plurality of rotation angles corresponding to the plurality of first rotation distance information into the obtained ideal curve formula, and sequentially obtains the second distance information. Specifically, the rotation angles of 0.036 degrees are sequentially added from 0 degrees to each rotation angle until it reaches 360 degrees, and then substituted into the ideal curve formula to calculate the second distance information in sequence. Then, the second rotation distance information having the substituted rotation angle and the obtained second distance information is stored in a storage unit (not shown).

FIG. 12 is a diagram of a second rotation distance information management table for managing the second rotation distance information acquired and stored by the second distance information acquisition device 1034. The second rotation distance information management table has "rotation angle" and "second distance information". "Second distance information" refers to the distance from the center of rotation of the wafer W001 to the edge according to the rotation angle, for example, when the wafer W001 is an ideal round wafer with no irregularities on the edges. In addition, "second distance information" r _im (m is an integer from 1 to 10000) is set as the second distance information of the corresponding rotation angle of 0.036×m (degrees).

13 is a graph showing the relationship between the rotation angle of the plurality of second rotation distance information acquired by the second distance information acquisition device 1034 and the second distance information. The horizontal axis represents the rotation angle θ, and the vertical axis represents the second distance information r _i .

The computing device 1035 will sequentially obtain the plurality of first distance information stored in the first rotation distance information and the plurality of second distance information obtained by the second distance information obtaining device 1034 form a first distance corresponding to the same rotation angle The difference between the information and the second distance information. Here, the computing device 1035 is a value obtained by subtracting the first distance information from the second distance information as an example of the above-mentioned difference. For example, the first distance information "r ₁ "corresponding to the rotation angle "0" is subtracted from the second distance information "r _i1 " corresponding to the rotation angle "0 degree", and the corresponding to the rotation angle "0 degree" is obtained Distance difference information "r _i1- r ₁ ". In addition, for example, the first distance information "r ₂ "corresponding to the rotation angle "0.036" is subtracted from the second distance information "r _i2 " corresponding to the rotation angle "0.036 degrees", and the rotation angle "0.036 degrees" is obtained Corresponding distance difference information "r _i2- r ₂ ". The same processing is performed for other rotation angles. The computing device 1035 uses the obtained value as distance difference information, and stores it in a storage unit (not shown) corresponding to the rotation angle.

FIG. 14 is a distance difference information management table for managing the distance difference information acquired by the computing device 1035. The distance difference information management table has attributes of so-called "rotation angle" and "distance difference". "Distance difference" refers to distance difference information.

15 includes: a graph showing the relationship between the distance difference information obtained by the computing device 1035 and the rotation angle (FIG. 15(a)), and a graph illustrating the processing performed by the notch detection device 1036 (FIG. 15(b)) ), and a graph for explaining the processing performed by the defect detection device 1037 (FIG. 15(c)). In the figure, the horizontal axis represents the rotation angle, and the vertical axis represents the value of the distance difference information. In addition, the vertical axis scale used here to explain, for example, the graph of FIG. 15 is an enlarged scale from the vertical axis scale of FIG. 9 or FIG. 13 and the like.

When the distance difference information acquired by the computing device 1035 is represented by a graph, it becomes a graph as shown in FIG. 15(a). This graph is obtained by subtracting the direction value of the vertical axis of the graph having the first distance information such as the measured value of the oriented flat portion, burrs, or chipping shown in FIG. The graph of the vertical axis direction value of the ideal graph when the circle rotates. Therefore, the value of the distance difference information obtained for the portion with no unevenness on the edge of the wafer W001 will become a certain value that is approximately close to 0, and only the unevenness portion will appear as a positive or negative value different from other parts.于Graphs. For example, in the graph shown in FIG. 15, the convex portion 20a corresponding to the oriented flat portion, the convex portions 21a and 22a corresponding to the chipping, and the concave portion 23a corresponding to the burr appear as a part whose value changes. The other parts are almost linear in shape, roughly parallel to the x-axis.

The gap detection device 1036 detects the distance difference information whose value is larger than the pre-specified first threshold value T _H1 in the distance difference information obtained by the computing device 1035. The first threshold value T _H1 is a length greater than the chipping depth generally occurring at the edge of the wafer, and is preset to a positive value, which indicates that its length is sufficiently shorter than the depth of the oriented flat portion. The first threshold value T _H1 is, for example, a threshold value related to size. Here, in order to detect positive or negative distance difference information larger than the first critical value T _H1 , and detect distance difference information larger than T _H1 , or detect that the value is smaller than -T _H1 Distance difference information.

When the first critical value T _{H1 is} expressed in a graph showing the relationship between the distance difference information and the rotation angle, the state as shown in FIG. 15(b) is formed.

Further, in the known case where the distance information from the difference information by subtracting a first value from the second distance information, the distance information is the difference between the value corresponding to the orientation flat portion, so that the detection value is compared -T _H1 The processing of small distance difference information can be omitted.

The notch detection device 1036 detects distance difference information whose size is greater than the first threshold value T _H1 , and obtains a rotation angle corresponding to the detected distance difference information. For example, 15 (b) the orientation flat portion of the notch detecting means 1036 detects the corresponding convex portion 20a of FIG than T _H1 is a large difference in distance information value. Then, the notch detection device 1036 obtains the minimum value and the maximum value of the rotation angle corresponding to the detected distance difference information, as position indication information of the orientation flat portion of the notch portion of the wafer W001. For example, suppose that the minimum value obtained by the notch detecting hand device 036 is θ ₃₈₀₀ and the maximum value is θ ₄₄₀₀ . The notch detection device 1036 stores the obtained minimum value θ ₃₈₀₀ and maximum value θ ₄₄₀₀ in a storage unit (not shown).

The defect detection device 1037 detects the distance difference information whose size is larger than the second threshold T _H2 specified in advance from the distance difference information acquired by the computing device 1035. However, here, the distance difference information whose size is larger than the above-mentioned first threshold value T _H1 is not detected. The second threshold T _H2 is a value smaller than the first threshold T _H1 and is set to a value greater than zero. In addition, since the distance difference information acquires a value other than 0 due to the measurement error of the first distance information, etc., the second threshold value T _{H2 is} set to a value obtained by measuring the error score. The second threshold T _H2 is, for example, a threshold for detecting the size of the edge defect portion. Here, in order to detect the size than the second threshold value T _H2 to a large positive or negative distance difference information than T _H2 and the large difference in distance information, or a value smaller than -T _H2 distance difference information To be tested.

If the second critical value T _{H2 is} represented in a graph showing the relationship between distance difference information and rotation angle, it is as shown in FIG. 15(c).

Further, here, may, detection processing will be omitted compared with the difference information from a small value _H2 -T same manner as above.

The defect detection device 1037 detects the distance difference information whose value is greater than the second threshold value _TH2 , and obtains the rotation angle corresponding to the distance difference information obtained by the detection. For example, detects (parts corresponding to those in FIG. 15 (c) defect) projecting portions 21a, 22a of the T _H2 large portion of its value is compared with the fault detection apparatus 1037, and its value is compared (defect portions corresponding to) the concave portion 23a -T _H2 is the small part. Then, the defect detection device 1037 will detect the continuous distance difference information corresponding to the rotation angle among the detected distance difference information, and obtain the minimum and maximum values of the rotation angle corresponding to the continuous distance difference information, Respectively as the information indicating the position of the defective part of wafer W001. For example, regarding the convex portion 21a, the minimum value θ ₅₅₀ and the maximum value θ _{558 of} the rotation angle are obtained. In addition, for example, regarding the convex portion 22a, the minimum value θ ₇₄₄₆ and the maximum value θ _{7450 of} the rotation angle are obtained. In addition, for example, regarding the concave portion 23a, the minimum value θ ₈₇₃₈ and the maximum value θ _{8743 of} the rotation angle are obtained.

Furthermore, regarding the distance difference information detected as a portion larger than T _H2 , that is, the minimum and maximum values of the rotation angles corresponding to the convex portions 21a and 22a, respectively, the information indicating the collapse is also obtained as an indication Information about the types of defects. Further, as compared with the rotation angle -T _H2 distance difference corresponding to a small portion of the information detected, i.e., on the recessed portion 23a corresponding to the minimum and maximum values, but also to obtain information represented by a burr represents a defective portion of the type News.

In addition, the defect detection device 1037 obtains the maximum value of the absolute value of the distance difference information in which the rotation angle is continuous, as information indicating the size of the defect portion, for example, indicating the height of the burr or the depth of chipping. For example, when the maximum value of the absolute value of the distance difference information in the range of rotation angle from θ ₈₇₃₈ to θ ₈₇₄₃ is r _i8741- r ₈₇₄₁ , the defect detection device 1037 obtains the maximum value as the information indicating the size of the defective portion.

Next, the defect detection device 1037 stores the acquired information about the defective part, that is, the rotation angle indicating the range of the defective part, the information indicating the type of the defective part, and the information indicating the size of the defective part in a storage section (not shown) .

The output unit 104 performs abnormal output according to the information about the defective part acquired by the defect detection device 1037. Here, since the defect detection device 1037 detects more than one defective part, the output unit 104 performs abnormal output. In addition, in the case of outputting information indicating that the defect detection device 1037 has detected the defective part regarding the defective part, the output unit 104 may also perform abnormal output. Specifically, the output unit 104 transmits information indicating that an abnormality is detected to the workpiece conveying device 2 as an abnormal output.

Furthermore, the output unit 104 outputs information about the defective part detected by the defect detection device 1037. For example, the output unit 104 may output the information indicating the range of the rotation angle as the information indicating the defective part in the relevant information of the defective part detected by the defect detection device 1037. Furthermore, the output unit 104 outputs information indicating the type of the defective part as information indicating the type of the defective part. In addition, the output unit 104 outputs information indicating the size of the defective part. For example, information indicating that there is a burr with a height of r _i8741- r ₈₇₄₁ in the range of the rotation angle from θ ₈₇₃₈ to θ ₈₇₄₃ is output. For example, the output unit 104 associates the information about the defective portion with the identifier of the wafer 10 and stores it in a pre-designated storage unit. The stored information about the defective part may be, for example, log information indicating the processing of the workpiece processing device 1.

In addition, in the graph of the first distance information and the rotation angle shown in FIG. 9, the background of the range corresponding to the rotation angle range indicated by the information about the defective part can also be set as a graph with a different background color from other parts. It is displayed on a monitor, etc., but the description is omitted here. Moreover, at this time, it is better to set different background colors for chipping and burrs. In addition, the range of each rotation angle may also be displayed as a value indicating the size of the defective portion.

When the workpiece conveying device 2 receives the information indicating the abnormality from the output unit 104 of the workpiece processing device 1, it picks up the wafer 10 placed on the turntable 52 of the edge position detector 102 and moves it to the collection container 5 , The wafer 10 is stored in the container 5. By this operation, the wafer 10 determined to be abnormal can be recovered in the container 5 without being transported to the subsequent processing steps.

Here, for example, the defect detection device 1037 has not detected more than one defective part, and has not obtained information about the defective part.

When the output unit 104 determines that the defect detection device 1037 has not detected more than one defective part, it does not perform abnormal output.

Then, the output unit 104 outputs the correction information acquired by the correction information acquisition device 1033 to the edge position detector 102.

In addition, the output unit 104 outputs information indicating the notch detected by the notch detection device 1036 to the edge position detector 102. For example, the output unit 104 outputs the rotation angle range detected by the notch detection device 1036 from θ ₃₈₀₀ to θ ₄₄₀₀ as position information indicating that the directional flat portion is provided.

When the edge position detector 102 receives the correction information from the output unit 104, it moves the turntable 52 horizontally according to the correction information to move the wafer 10 so that the center of the wafer 10 is located on the turntable 52 before movement (wafer 10 before movement) ) Of the center of rotation.

In addition, when the edge position detector 102 receives the information indicating the notch, the turntable 52 is moved horizontally or rotationally, and the notch is oriented in a predetermined direction.

The workpiece conveying device 2 picks up the wafer 10 whose configuration or orientation has been changed by the movement of the turntable 52 from the turntable 52, conveys it, and places it on the stage 6 at the next placement destination.

By handing the wafer 10 whose position and orientation is corrected by the information representing the correction information and the notch in this way to the workpiece conveying device 2, the workpiece conveying device 2 can place the wafer 10 in the appropriate position in the appropriate direction Mount table 6 as the next transport destination. Thus, the wafer 10 can be positioned with respect to the wafer having no defect.

In addition, here, the position or orientation of the wafer 10 is changed by the edge position detector 102, but the output unit 104 may also transmit the information indicating the correction information and the notch to the workpiece conveying device 2, and the workpiece conveying device 2 may change The position or orientation of the wafer 10.

In addition, the output unit 104 outputs information indicating the notch and information about the defect detected by the defect detection device 1037 to a monitor or the like not shown.

FIG. 16 is a diagram showing an example in which the output unit 104 outputs the information indicating the notch and the information about the defective part.

With the output of such an output section 104, the user can easily know, for example, whether there is an oriented flat portion at the edge of the wafer W001, or where there is such a defect. Moreover, when such information indicating the position of the oriented flat portion or the position or type of the defective portion is output to other devices (not shown), in other devices, for example, the position of the defective portion of the oriented flat portion can be considered in Processing within.

Here, it is the result of processing one wafer 10 conveyed to the mounting table 6 by the workpiece conveyance system 1000, for example, and the wafer 10 is broken due to chipping of the edge 11. In this case, there may be a defective part that cannot be detected in the defect detection process of the workpiece processing device 1. Therefore, for example, the user inputs assessment-related information with relevant information to the assessment-related information acceptance unit 105, and the relevant information indicates that there is a defect portion that cannot be detected in the current defect detection process.

When the evaluation-related information accepting unit 105 accepts evaluation-related information having information indicating a defect portion that cannot be detected, the setting unit 106 obtains a threshold value that can detect a smaller defect portion than the threshold value for defect detection. Specifically, a critical value is obtained, which is changed from the value of the second critical value T _H2 for detecting the defective part to less than the current value (the second critical value T _H2 before the change) Specify values in advance to calculate values such as subtraction. For example, a value obtained by subtracting a predetermined value from the value of the current second critical value T _H2 as a new second critical value. The subtraction value here is preferably a small value. Moreover, the magnitude of the second critical value after subtraction is preferably not less than 0.

Next, the setting unit 106 updates the second threshold used by the defect detection device 1037 with the acquired new second threshold.

In this way, feedback of the detection result of the defective part can detect a smaller defect part than when the threshold value before the update is used, and can reduce the omission of defect detection.

(Modification 1) In the following, an example of a situation in which the setting unit 106 obtains the critical value when the defective portion is detected using machine learning in the above-mentioned specific example will be described.

Here, for example, the transport destination of the workpiece transport system 1000 is a CVD device (not shown), and the mounting table 6 is a mounting table of the CVD device.

The evaluation-related information receiving section 105 will receive a plurality of evaluation-related information and store it in a storage section (not shown). The plurality of evaluation-related information are the results of the inspection of the defective part performed by the workpiece processing device 1 as described below. Whether the correct information is correct: information corresponding to the second critical value used for the detection of the defective portion of the wafer 10, the processing temperature and the processing time to be processed at the transport destination (CVD device) of the wafer 10

The setting unit 106 sequentially learns the second critical value, processing temperature, processing time, and error information included in the received plurality of evaluation-related information as teacher data.

Secondly, in the case where the user uses the same CVD apparatus to process one wafer 10 under one processing condition, in order to obtain the critical value of the defective portion that can detect the problem such as cracking during processing, the processing under the one processing condition The temperature, the processing time, and the plurality of values that are candidates for the second critical value correspond to each other to form a plurality of groups, and the plurality of groups are input into the learning result respectively, and the second threshold value included in each group is used to detect defects The judgment result of the correctness of the partial test result. In this way, the combination of the input processing temperature, processing time, and second critical value can be used to determine whether it is appropriate to use the second critical value for defect detection. The plural values that are candidates for the second threshold value are, for example, plural values separated by a predetermined value. The plural values that are candidates for the second threshold value are, for example, plural values that are used around the default second threshold value.

Next, one of the second critical values corresponding to the judgment result judged to be correct, for example, the largest one is obtained. Then, the second critical value is set as the second critical value to be used by the defect detection device 1037 in defect detection.

In this way, the wafer 10 having the defective part that will cause problems in the CVD process of the subsequent process can be appropriately detected using the learning results, and at the same time, the wafer 10 having the unevenness that does not cause the problem in the subsequent process can be appropriately detected. , You can also get the second threshold without detection. As a result, the selection of the wafer 10 can be performed with excellent accuracy, for example.

As described above, according to the present embodiment, when aligning the position and orientation of the workpiece during the conveyance of the workpiece, the defect portion on the edge of the workpiece can be detected, so that the defect of the workpiece can be appropriately detected.

Furthermore, according to the present embodiment, in the synthetic distance information obtained by synthesizing a plurality of first distance information whose rotation angles are successively different by 90 degrees, the continuous plural synthetic distance information with a small change is detected by using The plurality of first distance information of the synthesis source corresponding to one of the detected plurality of synthesized distance information, to obtain the correction information for moving the center of rotation of the workpiece to the center of the workpiece, you can use the unevenness from the edge of the workpiece The first part of the distance information obtained by the lesser part properly obtains the correction information with high accuracy.

In addition, according to the present embodiment, by using the correction information described above, the relational expression indicating the relationship between the rotation angle and the distance to the edge is obtained when the workpiece is in a round shape without unevenness, and the second distance obtained from the acquired relational expression is used The difference between the information and the first distance information to obtain information indicating the notch of the workpiece or information about the defective part of the workpiece can appropriately indicate the unevenness of the edge of the workpiece. For example, the position of the notch of the workpiece can be appropriately indicated. Moreover, the position or type of the defective part at the edge of the workpiece can be appropriately indicated.

In addition, in this case, the workpiece processing apparatus 5 shown in FIG. 25 in the workpiece processing apparatus described in the above embodiment can store the first rotation distance information storage unit 101, the synthesis apparatus 1031, and the synthesis processing apparatus 1032 according to the situation. The components other than the correction information acquisition device 1033, the second distance information acquisition device 1034, the computing device 1035, the notch detection device 1036, and the defect detection device 1037 are omitted as appropriate, and a correction information output device 1038 is provided to convert the correction information acquisition device 1033 The obtained correction information is output; and the distance difference related output device 1039, the related information about the difference between the first distance information and the second distance information obtained by the computing device 1035, and the information about the defective part detected by the defect detection device 1037 Output, and the second distance information obtaining device 1034 can also use the correction information output by the correction information output device 1038 to obtain the second distance information.

The correction information output device 1038 outputs the correction information obtained by the correction information obtaining device 1033. The output here includes messages sent to external devices such as an aligner (not shown) of the workpiece, delivery to internal processing devices, storage of recording media, and display on a monitor (not shown) , The delivery of processing results, etc. to other processing devices or other programs, etc.

For example, the correction information output device 1038 is an interface for outputting the correction information obtained by the correction information obtaining device 1033 to the second distance information obtaining device 1034, etc., for temporarily storing the correction information to the accessible second distance information A device for acquiring a storage medium such as a memory (not shown) of the device 1034. For example, the second distance information obtaining device 1034 accepts the correction information output by the correction information output device 1038, and uses the received correction information to obtain the second distance information. In addition, the second distance information obtaining device 1034 is, for example, the second distance information obtaining device 1034 reads the correction information stored in the memory medium, and uses the read correction information to obtain the second distance information.

The distance difference correlation output device 1039 outputs the same rotation angle calculated by the calculation device 1035 to form information corresponding to the distance difference information. The information about the difference may be, for example, information having distance difference information itself, a rotation angle corresponding to one or more than two distance difference information, or a combination of distance difference information and rotation angle. For example, the output unit 104 may store information corresponding to the distance difference information and the rotation angle in a storage unit (not shown). It is also possible to output a graph showing the relationship between the distance difference information and the rotation angle, for example, to display it.

The so-called information about distance difference information also includes the concept of information obtained using distance difference information. For example, the distance difference correlation output device 1039 may also output the information indicating the notch portion of the workpiece 10 obtained by the gap detection device 1036 using the distance difference information as the information about the difference calculated by the calculation device 1035. By outputting information indicating the notch, the user or other device can recognize the part where the notch exists in the workpiece 10. The distance difference correlation output device 1039 may, for example, on a graph showing the relationship between the distance difference information and the rotation angle, use a different color or pattern to represent the different parts corresponding to the rotation angle of the notch. The aspect (for example, the background on the graph corresponding to the range corresponding to the rotation angle of the notch) is output as the information indicating the notch.

In addition, the distance difference related output device 1039 can also use the information about the distance difference information calculated by the computing device 1035 to output the information about the defective part obtained by the defect detection device 1037 as the information about the distance difference information calculated by the computing device 1035. Since the information indicating the defective part is information having information on the position (eg, rotation angle) of the defective part and the distance difference between the positions, the user or other devices can recognize the size of the defective part in the part of the workpiece 10. When the information indicating the defective portion has information indicating whether the defective portion is convex toward the outer side of the wafer 10, it can also be identified whether the defective portion is a burr or chipping. The distance difference correlation output device 1039 may, for example, on a graph showing the relationship between the distance difference information and the rotation angle, as in the case of the notch, use a different aspect from the part corresponding to the rotation angle of the defective part. Display as an output of information indicating the defective part.

In the workpiece processing device 5, for example, the difference between the distance from the rotation center to the edge and the actual distance to the edge when the workpiece has an ideal edge can be obtained and output, and the edge of the workpiece (eg, wafer) can be expressed with excellent accuracy Bump. In this way, the output of the distance difference correlation output device 1039 can appropriately indicate the position of the notch of the workpiece. Furthermore, by obtaining and outputting defect information, it is possible to express appropriate information about the defective part of the edge of the workpiece. For example, the position or type of the defective portion can be appropriately indicated.

In addition, the above-mentioned workpiece processing apparatus 5 is, for example, a workpiece processing apparatus of the following form. That is, the workpiece processing device 5 includes: a first rotation distance information storage section for storing a plurality of first rotation distance information when the workpiece rotates, the first rotation distance information is formed such that the rotation angle and the first distance information are formed Corresponding information, and the first distance information is information about the distance from the center of rotation of the workpiece corresponding to the rotation angle to the edge; the synthesis device is included in the first distance information included in the plurality of first rotation distance information, Synthesize a plurality of first distance information corresponding to different rotation angles successively different by 90 degrees; a synthesis processing device, in the plurality of synthesized distance information of the information obtained by synthesizing the first distance information and obtained by the aforementioned synthesis device, rotate the corresponding rotation A plurality of synthesized distance information having continuous angles and a plurality of synthesized distance information with a small change in value are detected, and a plurality of first distances before synthesis corresponding to more than one of the detected plurality of synthesized distance information are obtained Information, and a rotation angle corresponding to more than one first distance information before synthesis; a correction information acquisition device that uses a plurality of first distance information and rotation angles obtained by the synthesis processing device to obtain the rotation for rotating the workpiece The correction information centered on the center of the workpiece; the correction information output device outputs the correction information obtained by the correction information obtaining device; the second distance information obtaining device uses the correction information output by the correction information output device to obtain the foregoing When the workpiece is a circle with no unevenness, it represents the relationship between the rotation angle and the second distance information. The second distance information is information about the distance from the workpiece to the edge corresponding to the rotation angle. The plurality of rotation angles corresponding to the rotation distance information are respectively substituted into the obtained relational expression, and the second distance information is obtained; the computing device uses the plurality of first rotation distance information and the plurality of second distance information acquisition devices The second distance information is used to obtain the difference between the first distance information and the second distance information corresponding to the same rotation angle; and a distance difference related output device to output the information about the difference calculated by the calculation device.

Secondly, in the above-mentioned workpiece processing device, the defect detection device uses the difference between the first distance information and the second distance information calculated by the calculation device and one or more critical values regarding the size of the defect portion to detect the edge of the workpiece Defective parts, and obtain information about the detected defective parts.

In addition, in the workpiece processing device 5 described above, the second distance information acquisition device 1034, the calculation device 1035, the notch detection device 1036, the defect detection device 1037, and the distance difference correlation output device 1039 can be omitted. The workpiece processing device obtained in this way is, for example, a device for obtaining workpiece correction information.

With this configuration, by synthesizing the information about the edge distances where the rotation angles are successively different by 90 degrees, and removing the information about the edge distances due to the difference between the rotation center and the wafer center, the information is obtained The information on the distance of the part without the unevenness on the edge can obtain the correction information for aligning the rotation center of the workpiece with the center of the workpiece, so it has the effect of obtaining the correction information with high accuracy.

In this way, for example, using correction information, a device (not shown) that performs alignment of the workpiece can properly correct the position of the workpiece so that the rotation center of the workpiece becomes the center of the workpiece.

In addition, the workpiece processing apparatus is, for example, the following workpiece processing apparatus. That is, the workpiece processing device includes: a first rotation distance information storage section for storing a plurality of first rotation distance information, the first rotation distance information having a rotation angle when rotating the workpiece corresponding to the first distance information Information, and the first distance information is information about the distance of the workpiece corresponding to the rotation angle from the center of rotation to the edge; the synthesis device is included in the first distance information included in the plurality of first rotation distance information, Synthesize a plurality of first distance information corresponding to different rotation angles successively different by 90 degrees; a synthesis processing device, in the plurality of synthesized distance information of the information obtained by synthesizing the first distance information by the aforementioned synthesis device, rotate the corresponding rotation The angle is a plurality of continuous distance information with a plurality of combined distance information, and the change of the value of the value is small, and a plurality of first distances before synthesis corresponding to more than one of the detected plurality of combined distance information are detected Information, and a rotation angle corresponding to more than one first distance information before synthesis; a correction information acquisition device that uses a plurality of first distance information and rotation angles obtained by the synthesis processing device to obtain the rotation for rotating the workpiece The correction information centered on the center of the workpiece; and a correction information output device, which outputs the correction information obtained by the correction information obtaining device.

(Embodiment 2) The second embodiment of the present invention is to output a video obtained by photographing a defective part on the edge of the workpiece in the above-mentioned first embodiment.

FIG. 17 is a block diagram of the workpiece processing device 3 of this embodiment.

The workpiece processing device 3 includes a first rotational distance information storage unit 101, an acquisition unit 103, an output unit 104, an evaluation-related information acceptance unit 105, a setting unit 106, an edge position detector 301, an imaging unit 303, and a correction defect position acquisition unit 304 , An image output unit 305, a detection unit 306, an evaluation unit 307, an evaluation result output unit 308, a situation acceptance unit 309, an image situation information storage unit 310, and an image situation information accumulation storage unit 311. The edge position detector 301 includes a moving unit 302.

The acquisition unit 103 includes, for example, a synthesis device 1031, a synthesis processing device 1032, a correction information acquisition device 1033, a second distance information acquisition device 1034, a calculation device 1035, a notch detection device 1036, and a defect detection device 1037.

About the first rotation distance information storage unit 101, acquisition unit 103, output unit 104, evaluation-related information acceptance unit 105, and setting unit 106, and synthesis device 1031, synthesis processing device 1032, and correction information acquisition device 1033 constituting the acquisition unit 103 The configuration and operation of the second distance information acquisition device 1034, the computing device 1035, the notch detection device 1036, and the defect detection device 1037 are the same as those in the first embodiment described above, and detailed descriptions are omitted here.

FIG. 18 includes a perspective view (FIG. 18(a)) showing an example of an embodiment of the workpiece processing device 3, and a schematic diagram showing an example of the edge position detector 301 of the present embodiment (FIG. 18(b)). The workpiece processing device 3 includes a mounting table 3021 for mounting the workpiece 10 and an imaging unit 303 for imaging the edge defect of the workpiece 10 mounted on the mounting table 3021. An edge detection unit 55 is provided inside the cover 3025.

The edge position detector 301 acquires a plurality of pieces of first rotation distance information for the workpiece 10. Specifically, the edge position detector 301 detects the edge position of the workpiece 10, obtains a plurality of pieces of first rotation distance information for the workpiece 10, and stores it in the first rotation distance information storage unit 101.

The edge position detector 301 includes, for example, an edge detection unit 55 that detects the edge position of the work 10, a moving unit 302, an encoder 56, and a storage unit 57. The edge detection unit 55 has a light projector 55a and a sensor 55b. The configuration or processing of the edge detection unit 55, the encoder 56, and the storage unit 57 are the same as those of the edge position detector 102 shown in FIG. 3, and therefore their description is omitted.

The moving unit 302 moves the workpiece 10. The moving unit 302 moves, for example, the workpiece 10 placed on the mounting table 3021. The movement of the work 10 by the moving portion 302 refers to, for example, movement to rotate the work 10 or movement to move the work 10 in parallel. Moving the work piece 10 in parallel refers to, for example, moving the work piece 10 in a plane including the surface of the work piece 10.

The moving part 302 rotates the workpiece 10. The moving unit 302 includes, for example, a mounting table 3021 and a rotating mechanism 3022 that rotates the mounting table 3021 about the central axis. Then, for example, by rotating the mounting mechanism 3022 to rotate the mounting table 3021 so that its mounting surface is in the same plane, the workpiece 10 placed on the mounting table 3021 is rotated. The rotating mechanism 3022 has an electric motor (not shown) or the like that transmits rotation (power) to the mounting table 3021. The upper surface of the mounting table 3021 on which the workpiece 10 is placed is provided with, for example, a so-called suction seat (not shown) having a suction surface for sucking the mounted workpiece 10. The encoder 56 detects, for example, the rotation amount of an electric motor (not shown) included in the rotation mechanism 3022 and outputs a digital signal, and the rotation amount of the electric motor corresponds to the rotation angle of the workpiece 10.

The edge position detector 301 acquires, for example, a measurement value indicating the edge position every time the moving unit 302 rotates the workpiece 10 by a predetermined rotation angle. Then, the first distance information and the rotation angle are sequentially acquired using the rotation angle and the measured value. The measured value indicating the edge position is, for example, a measured value of the distance from the rotation center of the workpiece 10 to the edge. For example, when acquiring the first rotation distance information for different workpieces, the edge position detector 301 makes the plurality of first rotation distance information acquired for each workpiece correspond to the workpiece identifier of each workpiece and stores it in the first rotation distance Information storage 101.

The moving part 302 also has a structure for moving the workpiece 10 placed on the mounting table 3021 in a direction parallel to the surface of the workpiece 10. The parallel here also includes the concept of substantially parallel. The direction parallel to the surface of the workpiece 10 may be a direction parallel to the mounting surface of the mounting table 3021 on which the workpiece 10 is mounted. The moving unit 302 moves the workpiece 10 in the horizontal direction, for example. For example, the moving part 302 has a structure that moves the workpiece 10 in two orthogonal biaxial directions parallel to the surface of the workpiece 10. The moving part 302 moves the workpiece 10 in parallel by, for example, a combination of movements in the two directions of the two axes. Here, for convenience of explanation, the two axes are referred to as x-axis direction and y-axis direction. Specifically, the moving unit 302 includes an x-axis movement mechanism 3023 that moves the rotation mechanism 3022 in the x-axis direction, and a y-axis movement mechanism 3024 that moves the x-axis movement mechanism 3023 in the y-axis direction. For example, the x-axis movement mechanism 3023 and the y-axis movement mechanism 3024 are composed of a combination of a ball screw and an electric motor that are provided to extend in the x-axis direction and the y-axis direction, respectively. However, the configuration of the moving section 302 for moving the workpiece 10 placed on the mounting table 3021 in a direction parallel to the surface of the workpiece 10 is not limited.

The moving unit 302 uses information such as correction information for the alignment position of the work 10 output by the output unit 104 described in the first embodiment, for example, to move the work 10 so that the center of the work 10 is at a predetermined position. The moving unit 302 appropriately combines the movement method for moving the placement table 3021 on which the workpiece 10 is placed in a direction parallel to the placement surface of the placement table 3021 and the movement method for rotating the placement table 3021 to make the workpiece 10 as described above mobile.

The moving unit 302 uses the information about the edge defect portion of the workpiece 10 output by the output unit 104 to move the workpiece 10 so that the edge defect portion of the workpiece 10 is arranged in the imaging area. The imaging area is an area designated in advance, specifically, an area that can be captured by the imaging unit 303. The imaging area may be a range that the imaging unit 303 can image. The moving part 302 preferably moves the workpiece 10 to a predetermined position, such as the center, where the edge defect portion of the workpiece 10 is located in the imaging area.

For example, the moving part 302 may use information about the edge defect part to indicate the position of the defect part, such as information indicating the angle of the defect part relative to the rotation center of the workpiece 10, etc., in such a manner that the position of the defect part is within the shooting area The workpiece 10 is moved. The movement here is at least one or more combinations of a movement method for rotating the workpiece 10 (hereinafter referred to as rotational movement) and a movement method for moving the workpiece 10 parallel to the surface of the workpiece 10 (hereinafter referred to as parallel movement).

In the following, an example of a process in which the moving unit 302 moves the position of the defective portion into the imaging area will be described.

(1) When moving the workpiece so that the center of the workpiece is arranged at a predetermined position For example, the moving unit 302 moves the workpiece 10, arranges the center of the workpiece 10 at a predetermined position, and arranges the edge defect portion of the workpiece 10 in the imaging area. The pre-specified position refers to, for example, a position where the center of the workpiece 10 should be arranged, or a position that is used as a reference when the workpiece 10 is aligned. In a specific example, the workpiece 10 is delivered to the above-described first embodiment. The workpiece conveying device 2 is provided for isochronous positioning of the center of the workpiece 10. The workpiece 10 is placed on the mounting table 3021 by the workpiece conveying device 2 or the like, for example, in a state where the rotation center of the mounting table 3021 of the moving section 302 is arranged at the predetermined position. The moving unit 302 moves the workpiece 10 to the above-mentioned position by appropriately combining rotational movement and parallel movement, for example.

The moving unit 302 performs the above-mentioned movement using, for example, information for aligning the position of the workpiece 10 output by the output unit 104 and information about the defective portion. For example, the moving section 302 uses correction information for aligning the rotation center of the workpiece 10 output by the output section 104 with the center of the workpiece 10, and information indicating the rotation angle of the edge defect portion of the workpiece 10 (for example, indicating Angular information of the range), so that the workpiece 10 is moved in such a manner that the center of the workpiece 10 is arranged at a predetermined position and the edge defect portion of the workpiece 10 is arranged in the shooting area.

FIG. 19 is a diagram for explaining an example of processing for moving the defective portion of the workpiece 10 into the imaging area, including: a diagram showing the state of the workpiece 10 before rotation (FIG. 19(a)), and the rotation Illustration of the state after (FIG. 19(b)). In the figure, the same symbols as in FIG. 2 denote the same or corresponding parts.

In the figure, the xy coordinate is a coordinate system set in advance on the edge position detector 301 of the workpiece processing device 3, and the origin O is the position where the center of the workpiece 10 should be arranged. The center of rotation of the mounting table 3021 on which the workpiece 10 is placed is set to be at a position coincident with the origin O when the workpiece 10 is placed, for example. At a time point after the workpiece 10 is placed, the center Q of the workpiece 10 is not located at the origin O, and the workpiece 10 rotates using the position of the origin O as the rotation center. The center of the work 10 is set at a distance away from the origin O toward the angle α in the direction of the angle α.

The point P ₁ is a point within the imaging area AP ₁ , and is, for example, the center point of the imaging area. The point P ₁ is set at a predetermined rotation angle with respect to the origin O and is away from the same radius as the workpiece 10. In this way, when the center of the workpiece 10 is placed on the origin O, the point P _{1 is} located on the edge of the workpiece 10.

In addition, in FIG. 19, in the positive range of the x-axis, the position where the edge of the workpiece 10 intersects the x-axis and the rotation center O of the workpiece 10 as the origin connects the line segment is the position of the rotation angle 0°, the rotation angle It is set to increase its value in the direction of the anti-timer.

Hereinafter, a specific example will be described using FIG. 19. In the state shown in FIG. 19( a ), the moving unit 302 acquires the angle θ _t indicated by the correction information described in the first embodiment described above, and the angle θ _{t is} determined by aligning the rotation center of the workpiece 10 with the workpiece 10. The reference line (here, x-axis) for the angle α at the center is formed as a line (here, y-axis) orthogonal to each other, and is connected to the two ends of one defective portion 1901 that is an object moving into the imaging area. The angle θ _t may be an offset angle. For example, the coordinates of A and B at both ends of the defective portion 1901 can be calculated by using information such as the radius of the workpiece 10 stored in a storage section (not shown) and the rotation angles of the A and B at both ends of the defective portion 1901, etc. Therefore, the coordinates θ _{t of} the two ends A and B can be used to calculate the angle θ _t . This angle θ _t corresponds to the angle formed by the connecting line QM between the midpoint M on the connecting lines A and B at both ends of the defective portion 1901 and the center of the workpiece 10 with respect to the reference line (for example, x-axis).

Secondly, as long as the midpoint M on the connecting line at both ends of the defective portion 1901 and the connecting line QM at the center of the workpiece 10 are parallel to the line segment OP ₁ , the workpiece 10 is then passed horizontally (for example, the x-axis direction or the y-axis direction) moving, so that the defect portion 1901 can be connected to both ends of the line connecting the midpoint 10 of the center line M and the workpiece QM overlapping line segment OP _1. Therefore, the rotation angle γ for rotating the workpiece 10 about the origin O of the rotation center is calculated so that the midpoint M on the connecting line at both ends of the defective portion 1901 and the connecting line QM at the center of the workpiece 10 are parallel to the line segment OP ₁ . For example, when the angle formed by the connecting line OP ₁ between the center point P _{1 of the} imaging area and the origin O and the above-mentioned reference line (for example, x-axis) is β, the rotation angle γ is β-θ _t .

With this rotation angle γ, by rotating the workpiece 10 about the origin O, that is, as shown in FIG. 19(b), the midpoint M on the connecting line at both ends of the defective portion 1901 and the connecting line QM at the center of the workpiece 10 become Parallel to the line OP ₁ .

At this time, by rotating the workpiece 10 by γ, the center Q of the workpiece 10 is located at a distance h away from the origin O in the direction of angle α+γ. Therefore, the workpiece 10 is moved so that the center Q of the workpiece 10 overlaps the origin O. That is, by moving the workpiece 10 in the opposite direction of the angle α + γ by the distance h, the line segment QM will move parallel in such a way that the center Q overlaps the origin O, and overlaps with the line segment OP ₁ , the midpoint M of the defective portion 1901 becomes It is arranged in the shooting area AP ₁ . Further, here, the defect portion 1901 midpoint M will be located on a straight line connecting the origin O of the photographing area of an AP ₁ of the center point P should be configured with _a center position of the workpiece 10.

Therefore, as described above, for each defective portion as a photographing object, using information indicating the defective portion and information indicating the position of the shooting area AP ₁ (for example, information indicating the center point P ₁ , etc.), the connection between the two ends of the defective portion is calculated The midpoint of the line segment is the angle θ _t formed by the line orthogonal to the angle reference line, and the angle θ _{t is} used to calculate the rotation angle γ of the workpiece 10 rotating around the rotation center, and then used to make the correction information show The rotation center of the workpiece 10 is the angle α indicating the moving direction for the purpose of moving, and the angle α+γ indicating the moving direction for moving the center of the workpiece 10 at the rotation angle γ to a predetermined position is calculated. Then, when photographing each defective part, the workpiece 10 is placed from the initial state of the mounting table 3021, and each defective part is rotated at a rotation angle γ, and is moved horizontally in a direction opposite to the direction indicated by the angle α+γ. The movement h shown.

In this way, the center of the workpiece 10 can be arranged at a predetermined position, and the defective portion 1901 can be arranged in the shooting area AP ₁ .

In addition, since the center of the workpiece 10 is arranged at a predetermined position, the defective portion can be photographed. Therefore, for example, when the shape of the workpiece 10 is circular, the edge position of the workpiece 10 in the captured image can be aligned At approximately the same location, when comparing multiple images, it is easy to view and provides highly convenient images.

In addition, the order of the above-mentioned rotational movement and horizontal movement does not matter.

Furthermore, the calculation formulas and the like used in the above are only examples, and in the present invention, as long as substantially the same value can be obtained, other calculation formulas and the like may be used. In addition, as long as the angle and the like used in the above are substantially the same value, the rotation direction of the workpiece 10, the position as the 0°, the setting of the reference line, etc. can be appropriately changed and used.

In addition, the straight line or line segment that specifies the x-axis or the like in advance does not need to be a reference straight line or line segment that indicates the rotation angle α in the direction for moving the rotation center of the workpiece 10 to the center of the workpiece 10. In this case, as long as The degree of difference between the reference straight line of the rotation angle α and the pre-specified straight line such as the x-axis or the inclination of the line segment may be appropriately corrected when the workpiece 10 is moved, the obtained moving direction, moving distance, or rotating angle. In addition, the predetermined position where the center of the workpiece 10 should be arranged may not be the position of the center of rotation of the workpiece when the workpiece 10 is placed on the moving portion 302. In this case, the movement direction, the movement distance, or the rotation angle obtained when the workpiece 10 is moved may be appropriately corrected according to the positional relationship between the position of the rotation center at the time of mounting and the predetermined position where the workpiece 10 is placed.

In addition, the above-mentioned processing mainly uses the angle and the like to indicate the moving direction, but it is also possible to use coordinates obtained from the angle or the moving amount and the like instead of the angle.

In addition, the above-mentioned processing is only an example, and other methods may be used in the present invention as long as the rotation angle γ or the movement direction of the rotation center can be obtained substantially the same.

(2) The case where the workpiece is not moved in the horizontal direction For example, in order to obtain the first rotation distance information, the moving unit 302 may move the defective part to the imaging area by only rotating the workpiece 10 that is placed on the mounting table 3021. Specifically, the moving unit 302 can rotate the workpiece 10 according to the rotation angle indicating the position of the defective portion output by the output unit 104 to appropriately arrange the defective portion within the imaging area. For example, you can calculate the average angle that represents the angle of the two ends of the defective part. By rotating the workpiece 10, the angle matches the direction angle of the center point of the shooting area based on the rotation center and the pre-specified reference line, and the workpiece 10 Move so that the center of the defective part is approximately at the center of the shooting area.

(3) When the center of the workpiece is aligned with the rotation axis of the workpiece rotation mounting table For example, the moving section 302 is provided with the workpiece 10 picked up from the mounting table 3021 and then moved in the horizontal direction, and the workpiece 10 is placed on the carrier again. The lifting device (not shown) on the table 3021, etc., and using the correction information output by the output unit 104, the workpiece 10 is picked up from the mounting table 3021 by the lifting device, and the correction information output by the output unit 104 is used to make the workpiece 10 The center of is moved so as to overlap the rotation center of the mounting table 3021 that rotates the workpiece 10, and the workpiece 10 is placed on the mounting table 3021. Moreover, as described above, it is also possible to use the angle θ _t obtained from the defective portion to indicate the position of the defective portion, to rotate the defective portion by a rotation angle γ, and to move the defective portion into the imaging area.

In addition, as long as the position of the workpiece 10 can be moved on the mounting table 3021, a device other than the above-mentioned lifting device may be used.

In the following, the case where the moving part 302 moves the workpiece 10 by the above-mentioned processing (1) is explained as an example.

When a plurality of defective parts exist on the edge of one workpiece 10, the moving part 302 may also move each defective part to the imaging area in sequence. For example, when the imaging unit 303 completes the imaging of the defective portion moved to the imaging area every time, the moving portion 302 moves the next defective portion to the imaging area.

Furthermore, the moving part 302 may exist in the plurality of defective parts on the edge of one work 10, and move the plurality of defective parts close to the same imaging area in a unified manner. The so-called defective part in close proximity refers to, for example, a defective part located in a predetermined range. To be specific, the rotation angle indicating the position of the defective part is a defective part located in the predetermined range. The pre-specified range refers to, for example, a range where the edge of the workpiece 10 can fall within a range of the shooting area at a time. For example, the moving unit 302 may move the workpiece 10 so that a position that bisects the position of the defect portion at both ends among the plurality of defect portions that are close to and located at the edge is located in the center of the imaging area. In this case, as long as the plurality of adjacent defect parts are regarded as one defect part, the rotation angles indicating the positions of both ends thereof, etc. are used to move the plurality of adjacent defect parts into the shooting area. This process may also be a process of grouping and moving close defect parts.

The moving part 302 may move only one or more defective parts detected by the detecting part 306 to the imaging area among the edge defect parts of the workpiece 10. The defective portion detected by the detection unit 306 refers to one or more defective portions whose edge size of the workpiece 10 is larger than other defective portions. The processing of the detection unit 306 will be described later.

In addition, when the imaging of one or more defective parts of one workpiece 10 is completed, the moving unit 302 may use, for example, the output unit 104 to output the workpiece 10 in the aligned state to the subsequent workpiece conveying device 2 and the like. Information for the alignment position of the workpiece 10, or information for specifying the orientation of the workpiece 10, etc., to move the workpiece 10 so that the center of the workpiece 10 is arranged at the above-mentioned predetermined position, and the orientation of the workpiece 10 is formed into the predetermined direction .

In addition, when there is no defective part in one workpiece 10, the moving part 302 may not perform the process of moving the defective part to the imaging area. For example, when the output unit 104 outputs information about the defective part to indicate that the workpiece 10 is free of defects, the process of moving the defective part to the imaging area may not be performed.

In addition to the above description, the moving unit 302 may appropriately perform operations similar to those of the turntable 52, turntable rotating mechanism 53, and electric motor 54 described in the first embodiment.

The moving unit 302 may be provided with an MPU or a memory for calculating information such as a moving distance or a rotation angle. The processing program for calculating the moving distance, the rotation angle, etc. is generally realized by software, and the software is recorded in a recording medium such as ROM. However, it can also be implemented with hardware (dedicated circuits).

In addition, here, the case where the moving unit 302 constitutes a part of the edge position detector 301 will be described as an example, but the moving unit 302 may be a part not belonging to the edge position detector 301.

The imaging unit 303 photographs the edge defect portion of the workpiece arranged in the imaging area. The imaging of a defective portion refers to, for example, imaging an imaging area where the defective portion is arranged. The imaging unit 303 refers to a camera equipped with an image sensor such as a CCD (photosensitive coupling element) or CMOS (complementary metal oxide semiconductor). The imaging unit 303 may be configured such that, for example, its imaging area includes a part of the edge of the workpiece 10 and its surrounding area in an arrangement state where the center is arranged at a predetermined position. The imaging unit 303 is generally arranged such that its optical axis is perpendicular to the surface of the work 10. The installation position of the imaging unit 303 is preferably movable in the horizontal direction so that the imaging area can be changed according to the specifications of the workpiece 10. The imaging unit 303 is attached to the workpiece processing device 3 with, for example, a jig. In this case, even if the moving unit 302 moves the workpiece 10, the position of the imaging unit 303 does not move.

The imaging unit 303 generally has an optical system for imaging light from a subject on the light-receiving surface of the image sensor. In addition, the imaging unit 303 may include a lighting device for illuminating the imaging area or its surroundings, for example, ring lighting. For the imaging unit 303, it is preferable to use a high-resolution image capable of imaging a defective portion. As an example of the imaging unit 303, for example, a CCD camera with a viewing angle of 3 mm square and a pixel number of 350,000 pixels can be used. In addition, as the imaging unit 303, for example, a digital camera for livelihood can be used. The image captured by the imaging unit 303 may be a color image or a grayscale image. The color depth of the image is not limited. The image captured by the imaging unit 303 is generally a still image, but may also be a moving image. The shooting unit 303 may shoot with a fixed focus, or may shoot with autofocus. The data format of the video acquired by the imaging unit 303 is not limited. In addition, a so-called scanner or the like that scans and photographs with a line sensor may be used as the imaging unit 303.

When, for example, the moving unit 302 moves a defective portion or a group of close defective portions to the imaging area, the imaging unit 303 performs imaging of the defective portion. However, imaging may be performed in accordance with an instruction of a user accepted by an accepting unit or the like (not shown).

The imaging unit 303 may image only the defective part detected by the detection unit 306 described later among the edge defect parts of the workpiece 10. In this way, among the plurality of defective parts at the edge of the workpiece 10, only one or more defective parts whose size is larger than other defective parts can be selectively photographed.

In addition, the workpiece processing device 3 may include a plurality of imaging units 303. For example, a plurality of imaging units 303 with different imaging regions or partially overlapping imaging regions may be provided. The plurality of imaging units 303 are, for example, a plurality of imaging units each having an arrangement area along the center of the edge of the workpiece arranged at a predetermined position. The plurality of imaging units 303 may, for example, perform imaging at the same time as substantially one imaging unit. By adopting this method, it is possible to simultaneously photograph a plurality of groups of defective parts that exist in a wide range at the same time, and the time taken for photographing or moving for the purpose of photographing can be shortened.

The correction defect position obtaining unit 304 uses the information for aligning the workpiece 10 output by the output unit 104, the information for specifying the orientation of the workpiece 10, and the information about the edge defect portion of the workpiece 10, with the center of the workpiece 10 and The specific orientation of the workpiece is used as a reference to obtain corrected defect position information, which is information indicating the position of the defective portion of the aforementioned workpiece. The corrected defect position information is, for example, position information of a defect corrected based on the center of the workpiece 10 and the specific orientation of the workpiece as a reference. The information for specifying the orientation of the work 10 is, for example, information indicating the position of the notch of the work 10 such as an oriented flat surface. The information indicating the position of the notch is, for example, information indicating the position of the midpoint of the connecting line segment at both ends of the notch. The information indicating the position of the notch is, for example, the rotation angle of the connecting line between the midpoint of the two ends of the notch and the line connecting the center of the workpiece 10. The corrected defect position information is, for example, information indicating the edge defect position of the workpiece 10 based on the position specified by the center of the workpiece 10 and the position specified for the position of the notch. Specifically, the corrected defect position information is an angle formed by a connecting line segment indicating the position of the notch portion and the center of the workpiece 10 and a connecting line indicating the point of the edge defect portion of the workpiece 10 and the center of the workpiece 10. The point indicating the position of the notch is, for example, the midpoint of a line segment connecting both ends of the notch. The point indicating the position of the defective portion is, for example, the midpoint of a line segment connecting both ends of the defective portion.

The so-called reference is based on the center of the workpiece 10 and the orientation specified for the workpiece. Although the specific orientation is set as the reference of the rotation angle, for example, it is set at a position corresponding to 0°, but it may be set at a position other than 0°. The rotation angle is desired, and the direction specified according to the direction may be set as a reference for the rotation angle or the like.

As described above using FIG. 19, the angle formed by the connecting line segment between the midpoints of the two ends of the defective portion and the center of the workpiece 10 and a line orthogonal to a predetermined line (for example, the y-axis of FIG. 19, etc.) is equal to The angle formed by the straight line connecting the two ends of the defective portion and the pre-specified straight line (for example, the x-axis in FIG. 19) can be obtained from information indicating the positions of both ends of the defective portion. Therefore, by obtaining this angle for each defective portion, it is possible to calculate the rotation angle when the center point of both ends of the defective portion has the center of the workpiece 10 as the rotation center. The same rotation angle can also be calculated for the notch by using the information on the positions of both ends of the notch that are output by the output unit 104 or the like. Then, by subtracting the rotation angle of the notch from the rotation angle of each defective part calculated in this way, the corrected defect position information can be obtained, and the corrected defect position information is the connecting line between the notch and the center of the workpiece 10 The rotation angle of each defective part as a reference.

In addition, when obtaining the corrected defect position information, the corrected defect position obtaining unit 304 may appropriately use the rotation angle information of the straight line connecting the center point of the defect portion and the center of the workpiece 10 calculated when the moving unit 302 moves the workpiece 10. In this way, it is possible to use the information for correcting the position of the workpiece 10 directly output by the output unit 104, the information for specifying the orientation of the workpiece 10, the information about the edge defect of the workpiece 10, the movement unit 302, etc. The information obtained from these information is used to obtain the action of correcting the defect position information. At the same time, it can also be used for the alignment position information of the workpiece 10 output by the output unit 104, the orientation specific information of the workpiece 10, and the workpiece 10 about the edge defect Partial information to obtain the action to correct the defect location information.

The video output unit 305 outputs the video captured by the imaging unit 303. The output here includes concepts such as display on a monitor screen, projection using a projector, printing with a printer, transmission to an external device, storage to a recording medium, and delivery of processing results to other processing devices or other programs.

The video output unit 305 associates and outputs at least one of the identifier of the workpiece 10 corresponding to the image and the identifier of the defective portion, for example, the image captured by the imaging unit 303. The identifier of the workpiece 10 may be a code assigned to the workpiece 10 or the like, or may be an identifier (for example, a code, etc.) and a representation of a batch indicating a workpiece group including a plurality of workpieces to be photographed A combination of information (for example, information such as the number of pieces, etc.) of the order of workpieces to be photographed in the batch. The identifier of the defective part is a code such as a number assigned to the defective part. The identifier of the workpiece 10 corresponding to the video refers to the identifier of the workpiece 10 that is the object of image capture. In addition, the identifier of the defective part corresponding to a video refers to the identifier of one or more defective parts which are objects of video shooting. The image output unit 305 may further cause the corrected defect position acquisition unit 304 to obtain the corrected defect position information acquired for the defective portion of the image capturing object in correspondence with the image and output it.

The video output unit 305 is preferably capable of zooming in and out of the displayed video, moving the display range, etc. in accordance with an instruction from a user or the like received via an unshown receiving unit or the like when displaying the video. In this way, since it can be enlarged, as long as the image captured by the imaging unit 303 is a high-resolution person, the defective portion of the edge can be enlarged and displayed, making it easy to confirm the shape of the defective portion of the edge that is difficult to confirm with the naked eye.

Furthermore, when displaying an image, information indicating the scale of the image, such as scale or scale, can also be displayed overlapping with the image. In this way, the specifications of the defective part are easy to grasp. Moreover, the display position of the information indicating the scale of the image, etc., can also be changed according to the user's instruction. In addition, the scale or scale may be appropriately calculated according to the resolution of the imaging unit 303 or the distance from the imaging unit 303 to the workpiece 10, or the pre-designated scale or Scale and so on. The distance from the imaging unit 303 to the workpiece 10 and the like can also be obtained using, for example, a sensor (not shown) for distance measurement.

The image output unit 305 may be an output device including or not including a display, a printer, a communication device, a storage device, or the like. The image output unit 305 may be realized by the driver software of the output device, or the driver software and output device of the output device.

The detection unit 306 uses the output unit 104 to output information on the edge defect portion of the workpiece 10, and detects more than one defect portion having a larger defect size in the edge defect portion of the workpiece 10. The so-called more than one defective part of a larger size may be the larger defective part as the pre-specified condition of the relevant size is met.

The detection unit 306 detects more than one defective part using, for example, the output unit 104 outputs information about the defective part, which indicates the rotation angle range of the defective part. The detection unit 306 detects, for example, a defective part whose rotation angle range is greater than or equal to a predetermined threshold value for the rotation angle range, and regards it as one or more defective parts that are smaller and larger. In addition, it is also possible to sequentially detect a predetermined number of defective parts among the defective parts of one work piece 10 having a larger rotation angle range, and regard them as more than one defective part having a larger size of the defective part.

In addition, the detection unit 306 detects more than one defective part using, for example, the output unit 104 outputs information on the defective part indicating distance difference information. The detection unit 306 detects, for example, a defective part having a maximum value of distance difference information corresponding to a pre-defective part formation whose threshold value is greater than or equal to a critical value as one or more defective parts having a large size of the defective part. In addition, a predetermined number of defective parts may be detected in order from the one with a larger value of the corresponding distance difference information in the defective part of one work piece 10 as one or more defective parts having a larger size of the defective part. The distance difference information corresponding to the defective part may also be information indicating the depth or height of the defective part.

In addition, the detection unit 306 may detect as one or more defective parts having a larger size of the defective part according to the combination of the information indicating the rotation angle range and the information about the distance difference. For example, it is also possible to detect a defective portion where the rotation angle range is above the critical value and the value of the distance difference information is above the critical value. In addition, it is also possible to detect a defective part in which the magnitude order of the rotation angle range and the magnitude order of the distance difference information are within the predetermined order.

In addition, the detection unit 306 may detect a defective portion that meets the conditions other than the above as one or more defective portions having a larger size of the defective portion.

The evaluation unit 307 uses the image output from the image output unit 305 to evaluate the defective part represented by the image. The so-called evaluation of a defective part refers to, for example, evaluation of the influence of the defective part on the workpiece 10. For example, when the workpiece 10 in which a defective part is detected is used in a subsequent procedure, whether or not the defective part affects the workpiece 10 and what kind of influence are caused are evaluated. The so-called evaluation of the defective part may be, for example, when the defective part occurs, the work piece 10 having the defective part may be evaluated for the possibility of breakage or the like during subsequent procedures or the like. The evaluation of the defective part may also be an evaluation of whether the workpiece 10 is abnormal.

For example, the evaluation unit 307 evaluates the defective portion shown in the image by pattern matching. For example, more than one evaluation pattern management information of information composed of information corresponding to the graphics of the image and the evaluation result of the defective part is stored in a storage unit (not shown) in advance. Next, it is determined whether the image output by the image output unit 305 matches the image pattern possessed by each evaluation pattern management information. If there is a match, an evaluation result corresponding to the image pattern is obtained. The so-called image graphics refer to information such as image feature points. The so-called image feature points refer to information such as the number of convex corners of the defective portion, the position of the convex corner, and the width or depth of the defective portion. An image having a feature point that can be determined to match the feature point shown in the image graphic is determined to be an image that matches the image graphic. The evaluation unit 307 may perform image processing such as binarization on the image output from the image output unit 305 before performing pattern matching.

In addition, the process of performing image matching on images is a well-known technology, and a detailed description thereof will be omitted here.

Furthermore, the evaluation unit 307 may also perform evaluation of the defective portion shown in the image by performing image similarity search, for example. For example, one or more pieces of evaluation image management information consisting of information corresponding to the evaluation image and the evaluation result of the defective portion are stored in a storage unit (not shown) in advance. Then, the similarity between the image output by the image output unit 305 and each evaluation image is obtained. When the similarity is greater than a predetermined threshold value, the evaluation unit 307 obtains an evaluation result corresponding to the evaluation image. The evaluation image is, for example, one or more images captured by the imaging unit 303. The image for evaluation can be a color image, a grayscale image, or a binary image. The similarity between images may be, for example, comparison of average pixel values constituting the image, histogram of pixel values, comparison of amplitude width at each frequency calculated from the images, etc., or binarized images. The ratio of consistent pixels, etc.

Furthermore, the evaluation unit 307 may also use other known similar image searches such as similar image search using mean square error as similar search of images.

In addition, since similar searches performed on images, processes for obtaining similarity between images, and the like are well-known technologies, detailed descriptions thereof will be omitted here.

As long as the evaluation result is information indicating the evaluation result related to the defective part, any information is acceptable. For example, it may be information indicating whether there is a defective portion with a high possibility of being associated with the damage of the workpiece 10, or information indicating a range of damage occurrence rate (for example, 50% or more). In addition, it may be information indicating what kind of abnormality has occurred. In addition, it may be information indicating that the workpiece 10 is damaged. Moreover, it is also possible to combine two or more of these information.

In addition, the evaluation unit 307 may use the image situation information stored in the image situation information storage unit 310 described later to evaluate the defective portion displayed by the image output by the image output unit 305. For example, it is also possible to use the information about the defective part image captured by the shooting section 303 included in the image condition information and the workpiece condition information about the workpiece 10 displayed in the image included in the image condition information to evaluate the defective portion. Information about the condition of the workpiece will be described later. The so-called image condition information has information about the image of the defective part, which may be the image of the defective part itself, or the feature point information obtained from the image of the defective part.

For example, when the information about the image of the defective part refers to the image of the defective part, the evaluation unit 307 uses the image of the image condition information to search for the image output by the image output unit 305 similarly to the above, and obtains from the image condition information and It is judged that similar images form corresponding workpiece condition information as the evaluation result. The image situation information in this case can also be the above-mentioned evaluation image management information.

Furthermore, for example, when the information about the defective part image is the characteristic point information of the defective part image, the evaluation unit 307 performs the same as described above for the image output by the image output unit 305 using the image feature point information of the image situation information. Graphic matching, obtains the workpiece condition information corresponding to the feature point information determined to match from the image condition information as the evaluation result. The image situation at this time can be the management information for the above-mentioned evaluation graphics.

In addition, the evaluation unit 307 may use the image situation information stored in the image situation information storage unit 310 described later to perform machine learning, and use the results of the machine learning to perform evaluation of the image output by the image output unit 305. For example, one or two or more groups of the image feature points of the image condition information and the workpiece condition information for the defective part shown in the image may be learned, and the result of the learning may be used to obtain and output from the image output unit 305 The information of the workpiece corresponding to the feature points obtained by the image is used as the evaluation result. In addition, the structure and processing of machine learning are the same as in the first embodiment described above, and a detailed description thereof will be omitted here.

The evaluation result output unit 308 outputs the evaluation result obtained by the evaluation unit 307. The evaluation result output unit 308 may, for example, associate and output the evaluation result with the workpiece identifier corresponding to the image as the evaluation target of the evaluation result, the identifier of the defective part, or the corrected defect position information.

The output here includes, for example, display on a monitor screen, projection using a projector, printing on a printer, transmission to an external device, storage to a recording medium, and delivery of processing results to other processing devices or other programs, etc. concept.

The evaluation result output unit 308 may or may not include an output device such as a display, a printer, a communication device, or a storage device. The image output unit 305 may be realized by the driver software of the output device, or the driver software and output device of the output device.

The situation accepting unit 309 accepts workpiece condition information, which indicates that the defective part of the workpiece 10 is photographed by the imaging unit 303 after the defective part is photographed, and performs one or more pre-designated processes on the workpiece 10 Information on the latter situation. For example, the situation acceptance unit 309 accepts workpiece situation information from a user or the like.

The pre-designated processing refers to processing performed on the workpiece 10, for example. If the workpiece 10 is a semiconductor wafer, the pre-designated processing refers to, for example, one or more processing constituting a semiconductor manufacturing process.

The condition of the workpiece 10 can be regarded as the state of the workpiece 10, for example, whether an abnormality such as breakage occurs in the workpiece 10, and what kind of abnormality the abnormality is. What kind of abnormality is, for example, when the abnormality is damaged, refers to a situation in which cracks or cracks are damaged. The condition of the workpiece 10 may also be the condition of the workpiece caused by a defective portion existing in the workpiece 10. The so-called workpiece condition due to the presence of a defective portion of the workpiece 10 refers to, for example, a situation where cracks start to occur at a position corresponding to a defective portion of the workpiece 10 from the defective portion.

The workpiece condition information refers to information indicating the condition of the workpiece 10 described above. The workpiece condition information refers to, for example, information indicating whether or not the workpiece 10 is normal in processing after shooting. Alternatively, it may be information indicating what kind of abnormality occurred in the workpiece 10 during the processing after shooting. In addition, the workpiece condition information may also be an evaluation value or an index of the workpiece 10 whose processing after shooting has been completed.

For example, the situation acceptance unit 309 accepts the identifier of the workpiece 10 or the workpiece situation information corresponding to the identifier of the defective part. For example, when an abnormality is detected in a subsequent program after shooting for a workpiece 10, the identifier of the workpiece 10 and the workpiece condition information are simultaneously accepted.

The reception here refers to, for example, reception from an input device, reception of an input signal transmitted from another device, or reading of information from a recording medium. The input device used to receive the workpiece condition information can be any one of numeric keys, keyboard, mouse, or menu screen. The situation accepting unit 309 can be realized by a device driver of an input device such as a numeric key or a keyboard, control software of a menu screen, or the like.

The image condition information storage section 310 is for storing image condition information, and the information in the image condition information has information about the defective part image output by the image output section 305 and workpiece condition information. The information about the image of the defective part refers to, for example, information obtained by using an image searched for pattern matching or image similarity. The information about the image of the defective part may be, for example, the image of the defective part itself, the image obtained by performing binarization on the image of the defective part, or the information of the feature points obtained from the image of the defective part, or the information about the defective part Information obtained by pre-specified processing such as image filtering. Furthermore, the information about the image of the defective part may be more than two kinds of information among these information. The workpiece situation information stored in the image situation information storage unit 310 is, for example, situation information accepted by the situation acceptance unit 309.

The image condition information accumulation storage section 311 stores the image condition information in the image condition information storage section 310, the image condition information having information about the image of the defective portion output by the image output section 305, and the workpiece about the defective portion accepted by the condition acceptance section 309 Situation information. For example, the image condition information accumulation storage unit 311 accumulates the image condition information, and the image condition information has a defective part image output by the image output unit 305 and workpiece condition information about the defective part. In addition, for example, the image condition information accumulation storage unit 311 may also obtain the above-mentioned information about the image from the defective part image output by the image output unit 305, and will have the obtained information about the image and the workpiece condition information about the defective part The image information of the image is accumulated and stored.

The so-called workpiece condition information about the defective part may be the workpiece condition information about a defective part or the workpiece condition information about the workpiece having a defective part. The image condition information accumulation storage unit 311, when accepting, for example, information specifying more than one defective part image, and a piece of workpiece condition information about the defective part represented by these images, forms the information about the defective part image and the received workpiece condition information Correspondingly, and stored in the image situation information storage unit 310.

For example, when the situation acceptance unit 309 accepts the workpiece condition information corresponding to the workpiece identifier and the defective part identifier of the workpiece, the image situation information accumulation storage unit 311 may store the image situation information in the image situation information storage unit 310 , And the image situation information is formed in a corresponding manner: the defective part image output by the image output unit 305 corresponds to the workpiece identifier corresponding to the workpiece identifier and the defective part identifier corresponding to the defective part identifier corresponds to More than one defective part of the image, and the information of the accepted workpiece condition.

For example, when the situation acceptance unit 309 accepts the workpiece situation information corresponding to the identifier of the workpiece, the image situation information accumulation storage unit 311 may store the image situation information in the image situation information storage unit 310, and the image situation information is formed into a correspondence According to the method, one or more defective part images corresponding to the workpiece identifier corresponding to the workpiece identifier in the defective part image output by the image output unit 305 and the received workpiece condition information are formed.

In addition, the workpiece conveying system may be constituted by the workpiece processing apparatus 3 of the present embodiment and the workpiece conveying apparatus 2 described in the first embodiment described above. For example, this workpiece conveyance system is a workpiece conveyance system obtained by installing a workpiece processing device 3 in the workpiece conveyance system 1000 of the first embodiment shown in FIG. 4 etc. instead of the workpiece processing device.

Next, the operation of the workpiece processing device 3 of this embodiment will be described using the flowchart of FIG. 20. The processing performed by the workpiece processing apparatus 3 of this embodiment is the same as the workpiece processing apparatus 1 of the above-described embodiment 1 shown in FIG. 6, and at the same time, the processing shown in FIG. 6 performs the following processing shown in FIG. 20 as from step S119 to The process returns to step S100. Specifically, the process of FIG. 20 is started after step S119 of FIG. 6, and when the process of FIG. 20 ends, the process returns to step S100 of FIG. 6. Note that the description of the processing shown in FIG. 6 will be omitted here.

(Step S301) The moving part 302 outputs information about the defective part from the output part 104 to determine whether there is more than one defective part at the edge of the workpiece 10. If yes, go to step S302; if no, go to step S314.

(Step S302) The detection unit 306 detects one or more defective parts having a large size from the defective parts. In addition, when there is only one defective part, this process can be omitted. In addition, when a defective part with a large size cannot be detected, it is possible to proceed to step S314.

(Step S303) The moving unit 302 substitutes 1 into the counter k.

(Step S304) The moving part 302 uses the information indicating the position such as the rotation angle of the k-th defective portion to move the center of the workpiece 10 to a predetermined position, and acquires the workpiece required to move the k-th defective portion to the imaging area The rotation angle of 10.

(Step S305) The moving unit 302 obtains the amount of horizontal movement of the workpiece 10 required to move the workpiece 10 and the k-th defective portion to the same position as described above. The horizontal movement amount refers to information such as a distance, an angle, a movement direction, a movement distance in the x-axis direction, and a movement distance in the y-axis direction for moving the workpiece 10 in the horizontal direction.

(Step S306) The moving unit 302 moves the workpiece 10 according to the rotation angle information and the horizontal movement amount obtained in step S304 and step S305, and moves the k-th defective portion to the imaging area.

(Step S307) The imaging unit 303 images the k-th defective portion of the workpiece 10.

(Step S308) The corrected defect position obtaining unit 304 obtains corrected defect position information for the k-th defect portion. For example, for the k-th defect portion and the notch portion, the rotation angle when the center of the workpiece 10 is the rotation center is obtained, and the difference is obtained as corrected defect position information.

(Step S309) The video output unit 305 outputs the video captured by the imaging unit 303. For example, the image output unit 305 associates the image with the identifier of the workpiece 10 or the identifier of the k-th defect portion, or obtains corrected defect position information about the k-th defect portion in step 308, and outputs the result. For example, the image output unit 305 stores the image in a storage unit (not shown). Furthermore, the video output unit 305 may display the video on a monitor or the like.

(Step S310) The evaluation unit 307 uses the image stored in step S309 to evaluate the k-th defective portion displayed on the image. For example, from the image patterns included in the image condition information stored in the image condition information storage unit 310, the image patterns that match the image of the k-th defective portion are detected by pattern matching, and the pattern formed by the detection is obtained The corresponding workpiece condition information is used as the evaluation result.

(Step S311) The evaluation result output section 308 outputs the evaluation result. For example, it is displayed on a monitor.

(Step S312) The moving unit 302 increments the value of the counter k by one.

(Step S313) The moving unit 302 determines whether there is a k-th defective portion. If yes, go back to step S304; if no, go to step S314.

(Step S314) The moving part 302 moves the notch part in the predetermined direction, and acquires the rotation angle of the workpiece 10 necessary when the center of the workpiece 10 moves to the predetermined position.

(Step S315) The moving unit 302 moves the notch in a predetermined direction, and acquires the amount of horizontal movement of the workpiece 10 necessary to move the center of the workpiece 10 to the predetermined position.

(Step S316) The moving unit 302 moves the workpiece 10 in accordance with the rotation angle obtained in step S314 and the movement amount obtained in step S315. This movement is, for example, a movement to align and deliver the work 10 and the work conveying device 2. Then, the process ends. When this process ends, it returns to step S100 in FIG. 6.

In addition, in the workpiece processing device 3 of the present embodiment, after step S122 of the flowchart shown in FIG. 6 determines that the timing of the threshold is not set, the processing for determining whether the situation acceptance unit 309 has accepted the workpiece situation information is performed; When accepting workpiece condition information, the image condition information accumulation storage section 311 may store the image condition information having the accepted workpiece condition information and the information about the defective part image corresponding to the workpiece condition information in the image condition information storage section 310, And return to step S100; if not accepted, return to step S100.

Furthermore, in the flowchart shown in FIG. 20, after the moving part 302 moves the workpiece 10 in step S316, the workpiece 10 is conveyed from the workpiece processing apparatus 3 to other apparatuses, for example, by the workpiece conveying apparatus 2 or the like. In addition, the description is omitted here, but when the workpiece conveying device 2 places the workpiece on the mounting table 3021 of the moving section 302 or the like, the workpiece processing device 3 can rotate the workpiece 10 and obtain the workpiece 10 in the same manner as a so-called aligner or the like. The first rotation distance information is stored in the first rotation distance information storage unit 101.

In addition, in FIG. 20, the processes of step S310 and step S311, or the process of outputting, for example, the display of the image of the defective portion by the video output unit 305, can be appropriately performed according to the instruction of the user or the like.

In addition, in the flowchart shown in FIG. 20, the processing of step S314 and step S315 can be performed immediately before step S301; when it is determined that there is no defective portion in step S301, it proceeds to step S316; in step S313, it is determined that there is no When there are k defective parts, it is also possible to proceed to step S316 and use the information obtained in step S314 and step S315 to move the workpiece 10.

Next, a specific example of the workpiece processing device 3 of this embodiment will be described. In addition, here, the case where the workpiece processing device 3 and the workpiece conveying device 2 constitute a workpiece conveying system will be described as an example. In addition, although the workpiece processing apparatus 3 and the like can perform the same processing as the specific example described in the first embodiment, for example, detailed description of the processing and the like will be omitted here.

Similar to the specific example of the first embodiment described above, the workpiece processing device 3 acquires correction information as information for alignment of the workpiece, information about the defective portion, and information for specific workpiece orientation for one workpiece 10, and the output unit 104 has Output this information. The correction information output by the output unit 104 is set as the rotation angle α ₁ and the movement length h ₁ indicating the movement direction. Further, the information about the defective portion output by the output unit 104 is the same as, for example, as shown in FIG. 16, and is set to a group of a plurality of defective portions, a rotation angle range indicating the range of the defective portion, and a maximum value of the size of the defective portion, or It has information such as the length from the rotation center of the workpiece 10 to the ends of each defective portion. In addition, the information for the specific work orientation output by the output unit 104 is a range of rotation angles indicating the range of the oriented flat portion as shown in FIG. 16.

When the moving unit 302 receives the above information from the output unit 104, it first determines whether there is a defective part in the workpiece 10. Here, since the information about the defective part indicates that there is a defective part, it is determined as a defective part.

Since the moving part 302 determines that there is a defective part in the workpiece 10, the detection part 306 detects a large-sized defective part from the defective part. Here, the defect portion whose absolute value of the size of the defect portion is above the critical value is detected. Here, for example, it is determined that the size of all defective portions is equal to or greater than a critical value.

The moving part 302 locates the midpoint of the connecting line segment at both ends of the defective part in the imaging range of the imaging part 303 for the first defective part detected by the detection part 306, and acquires to move the workpiece 10 as follows The combination of the rotation angle of the rotation movement and the amount of movement of the horizontal movement allows the center of the workpiece 10 to be located at the position where it should be arranged when the pre-designated workpiece 10 is delivered to the workpiece conveying device 2.

Specifically, using the information indicating the range of the rotation angle indicating the range of the first defective portion, or the length from the rotation center of the workpiece 10 to the ends of the defective portion, etc., the coordinates and the like of both ends of the defective portion are obtained, and the The angle formed by a line segment to a line segment with a rotation angle of 90°. Here, a line segment having a rotation angle of 90° is a line segment having an angle of 90 degrees formed by a straight line representing 0° when the rotation angle α ₁ is obtained, and this angle corresponds to θ _{t in} FIG. 19.

Next, the moving unit 302 reads the rotation angle indicating the center position in the shooting area previously stored in a storage unit (not shown), and subtracts the rotation angle of the line segment passing through both ends of the defective part obtained above from the angle The angle formed by the 90° line segment. The angle obtained in this way is the rotation angle used when the workpiece 10 is rotated, and corresponds to the angle γ in FIG. 19.

Furthermore, the moving unit 302 obtains the value obtained by adding the rotation angle α ₁ of the correction information to the line segment with the rotation angle of 90° obtained through the line segments at both ends of the defective part obtained above as the rotation when the workpiece 10 is moved Angle, and the length h ₁ that the correction information has is obtained as the moving distance of the workpiece 10. However, since the rotation angle obtained here is an angle indicating the direction of movement so that the rotation center of the work 10 overlaps the center of the work 10, when the work 10 is moved, the direction opposite to the obtained rotation angle ( , That is, the direction that rotates 180°).

The moving portion 302 causes the workpiece 10 to rotate about the rotation center of the workpiece 10 by the angle indicated by the rotation angle obtained above, and moves the workpiece 10 by a length h ₁ in the opposite direction to the direction indicated by the rotation angle obtained above.

With this movement, the imaging unit 303 images the first defective portion of the workpiece 10 that is already in the imaging area.

Furthermore, the correction defect position obtaining unit 304 performs the same processing as the above-described moving unit 302 using the rotation angle of the orientation flat portion included in the correction information output by the output unit 104 to obtain a straight pair connecting both ends of the orientation flat portion The angle formed by a line segment with a rotation angle of 90°, and subtracted from the angle formed by the line segment at both ends of the first defective portion obtained by the moving section 302 to the line segment with a rotation angle of 90°, and obtained by the subtraction The value is used as the corrected defect position information about the first defect part. The corrected defect position information is the rotation angle of the first defect portion when the center of the workpiece 10 is used as the rotation center and the rotation angle of the oriented flat portion is used as a reference (that is, 0°).

The image output unit 305 makes an image obtained by shooting the first defective portion photographed by the imaging unit 303 with the identifier of the workpiece 10 (for example, the code assigned to the workpiece 10), the ID of the defective portion (for example, the number of the defective portion, etc.) ), the corrected defect position information, the shooting date, the depth (height) of the defect part output by the output unit 104, and the width of the defect part converted from the length of the defect part output by the output unit 104 to the length, and stored in a non-illustrated At the same time, the stored image is corresponding to the captured image and displayed on a monitor (not shown).

FIG. 21 is an image management table for managing defective partial images stored in the image output unit 305. The image management table has: "image", "workpiece ID", "defect ID", "corrected defect position", "date", "height", and "width". "Image" is the image of the defective part. Here, it is the file name of the image. "Workpiece ID" is the identifier of the work piece. The "defect ID" is an identifier of a defective part in the workpiece 10, and here is a number assigned to the defective part detected by the detection unit 306 in ascending order from the one with a smaller rotation angle. The “corrected defect position” is the corrected defect position information acquired by the corrected defect position acquisition unit 304. "Date" is the date the image was captured from a clock or the like not shown. "Height" is the height or depth of the defective part, and "Width" refers to the width of the defective part.

22 is a diagram showing an example of a video display of a defective part output by the video output unit 305. In the figure, the image of the defective part is displayed in the area 211. In the video displayed in the area 212, the video output unit 305 displays the pre-prepared image of the workpiece 10 in the defect-free position at the edge on the edge in the direction indicated by the rotation angle indicated by the defect position information. Marking of defective parts. In the area 213, the identifier of the workpiece corresponding to the defective part image is displayed. In the area 214, the rotation angle indicated by the corrected defect position information corresponding to the defective part image, and the width and depth of the defective part are displayed. In the area 215, the shooting date is displayed. In addition, the image displayed in the area 211 can be enlarged, reduced, moved in the display range, etc. in accordance with instructions from the user or the like.

FIG. 23 is a diagram of an image situation information management table for managing the image situation information stored in the image situation information storage unit 310. The image situation information management table has so-called "graphics", "situation" and other attributes. "Graphic" refers to a graphic of the characteristic amount of a defective part obtained from a defective part image. "Situation" refers to workpiece condition information about a workpiece with a defective portion corresponding to "Graph".

The evaluation unit 307 evaluates the first defective partial image output by the image output unit 305 using the image condition information shown in FIG. 23. Specifically, the evaluation unit 307 sequentially obtains the attribute value of "graphics" from each record (row) of the image situation information management table of FIG. 23, and sequentially determines whether the image graphic represented by the acquired attribute value is the same as the first Image matching of defective parts. When there is a match, the attribute value of the "case" corresponding to the matched attribute value is obtained as the evaluation result. In addition, when the graphics of a record have matching time points, the processing can be ended, or all records can be processed. At this time, a plurality of "case" attribute values can be obtained as the evaluation result. In addition, when there is no matching pattern, the evaluation unit 307 obtains the evaluation result specified by default, for example, "no abnormality" and the like. Here, for example, the image of the first defective part is photographed, and since it matches the "pattern 2" in the "pattern", the evaluation result of "large workpiece crack" is obtained.

Then, the evaluation result output unit 308 associates and stores the evaluation result obtained by the evaluation unit 307 with the image, and displays it on a monitor or the like (not shown).

24 is a diagram showing an example of output of the evaluation result obtained by the evaluation result output unit 308.

With this output, the user can identify the defective part as a defective part that may cause a large workpiece to break in the subsequent procedure.

In addition, the above processing is repeated for other defective parts detected by the detection unit 306.

Then, when the processing for all the defective parts detected by the detection unit 306 ends, the moving unit 302 arranges the oriented flat portion of the workpiece 10 in a predetermined direction in the same way as when the defective part is moved to the imaging area, and obtains The center of the work 10 is arranged at a predetermined angle of rotation of the work 10 and the amount of movement in the horizontal direction, and the work 10 is moved using the obtained rotation angle and the amount of movement in the horizontal direction. In this way, the workpiece 10 can be arranged at a predetermined position in a predetermined direction.

The workpiece conveying device 2 picks up and conveys the workpiece 10 aligned in position and direction in this way. The conveyance by the workpiece conveying device 2 is the same as the specific example of the first embodiment described above, and therefore its description is omitted here.

In addition, when the user receives an instruction to display a video of a defective part, for example, from a user via an unshown receiving part or the like, the video of the specified defective part may be displayed as shown in FIG. 21.

Here, for example, in a subsequent program, the user may set an abnormality, such as cracking, on the workpiece 10 that the workpiece with the identifier "W001" has been detected. Then, when the user inputs the identifier of the broken workpiece 10 and information about the broken workpiece by using an input interface (not shown), the situation accepting unit 309 accepts the information. For example, it is assumed that “W001” of the identifier of the workpiece 10 has been accepted, and “workpiece breakage” of the workpiece condition information.

Then, the image situation information accumulation storage unit 311 reads all the images corresponding to the identifier "W001" of the accepted workpiece 10 from the image management table shown in FIG. 21, specifically "img1001" to "img1005" , Get feature points from each image, and get graphic information of feature points of defective parts for each image. Next, each graphic information is matched with the workpiece situation information accepted by the situation acceptance unit 309 and stored in the image situation information storage unit 310. In this way, 5 records (rows) can be added to the image situation information management table shown in FIG. 23. In this way, the information about the image of the defective part and the influence of the defective part on the workpiece 10 can be correspondingly stored and stored, and the accuracy when using the defective part image to evaluate the defective part can be improved.

In addition, when the defective part of the cause of the workpiece breakage can be specified, the defective part of the workpiece 10 can be specified by, for example, a combination of the workpiece identifier and the defective part identifier, etc. enter. Alternatively, the designation of the defective portion is accepted from the image shown in the area 212 of the display screen shown in FIG. 22.

In addition, an abnormality detection device (not shown) or the like can be used to automate the detection of subsequent program abnormalities of the workpiece 10 and the acquisition of workpiece condition information indicating its abnormality. At this time, the device inputs the identifier of the broken workpiece 10 and the workpiece condition information output from the device or the like to the situation accepting unit 309.

In summary, according to this embodiment, by moving the edge defect portion of the workpiece into the shooting area to photograph the defect portion, it is easy to confirm the edge of the workpiece by image.

Furthermore, by outputting the defective portion of the edge by shooting the image, the defective portion of the edge can be easily enlarged and displayed, and the shape of the defective portion that is difficult to confirm with the naked eye can be easily confirmed.

Moreover, according to the present invention, the moving part 302 moves the workpiece 10 so that the center of the workpiece 10 can be arranged at a predetermined position (for example, when the workpiece 10 is delivered to the workpiece conveying device 2, the position where the center of the workpiece 10 should be arranged ), and by shooting the defective part in such a manner that the defective part is arranged in the imaging range of the imaging unit 303, the position of the defective part of the workpiece 10 within the image is captured between images captured for different defective parts of the workpiece 10 of the same specification , Or the edge position other than the defective part can be kept in the same position. In this way, the comparison between the images is relatively easy, and when obtaining feature points from the images or judging the similarity of the images, it can be processed with excellent accuracy.

In addition, in the above embodiments, each process (each function) may be implemented by a single device (system) performing centralized processing, or it may be implemented by a plurality of devices performing distributed processing.

In addition, in each of the above-mentioned embodiments, each constituent element may be constituted by dedicated hardware, or a constituent element that can be realized by software may also be realized by an execution program. For example, by reading and executing software-programs recorded on a recording medium such as a hard disk or semiconductor memory through a program execution unit such as a CPU, each constituent element can be realized. When executing a software-program, the program execution part can also execute the program while going in and out of the storage part (for example, a hard disk or a storage medium such as memory). In addition, the workpiece processing device of the above embodiment can also be realized by software.

The present invention is not limited to the above embodiments, but various changes can be made, and these changes should also be included in the scope of the present invention, and needless to say.

[Industry availability] As described above, the workpiece processing device of the present invention is suitable as a device for processing a workpiece, and is particularly useful as a device for performing positioning of a workpiece or the like.

1, 2, 3‧‧‧Workpiece processing device 4‧‧‧ container 5‧‧‧Container/workpiece processing device 6‧‧‧Mounting table 10‧‧‧Workpiece 11‧‧‧Workpiece edge 14‧‧‧Line 15‧‧‧Sensor 17‧‧‧Oriented flat part 20, 21, 22, 23a‧‧‧ concave part 20a, 21a, 22a, 23‧‧‧ convex part 25‧‧‧ region 52‧‧‧Turntable 53‧‧‧Turntable rotating mechanism 54‧‧‧Electric motor 55‧‧‧Edge detection department 55a‧‧‧Projector 55b‧‧‧Sensor 56‧‧‧ Encoder 57‧‧‧ Storage 101‧‧‧ First rotation distance information storage unit 102‧‧‧ Edge position detector 103‧‧‧ Acquisition section 104‧‧‧ Output section 105‧‧‧ Evaluation related information acceptance department 106‧‧‧ Setting department 211, 212, 213, 214, 215‧‧‧ region 301‧‧‧ edge position detector 302‧‧‧Moving Department 303‧‧‧Photography Department 304‧‧‧ Corrected defect position acquisition unit 305‧‧‧ video output 306‧‧‧ Testing Department 307‧‧‧ Evaluation Department 308‧‧‧ Evaluation result output department 309‧‧‧ Situation acceptance department 310‧‧‧Image condition information storage unit 311‧‧‧Image condition information accumulation storage unit 1000‧‧‧Work conveying system 1001‧‧‧Conveying path 1031‧‧‧synthesis device 1032‧‧‧synthesis processing device 1033‧‧‧ revised information acquisition device 1034‧‧‧ second distance information acquisition device 1035‧‧‧computing device 1036‧‧‧notch detection device 1037‧‧‧ Defect detection device 1038‧‧‧ Correction information output device 1039‧‧‧Distance related output device 1901‧‧‧Defective part 3021‧‧‧Platform 3022‧‧‧Rotating mechanism 3023‧‧‧x-axis moving mechanism 3024‧‧‧y-axis moving mechanism 3025‧‧‧Cover

1 is a block diagram of a workpiece processing device according to Embodiment 1; 2(a) is a schematic diagram illustrating an example of a round workpiece used in a workpiece processing device; 2(b) is a schematic diagram for explaining correction information acquisition processing of the workpiece processing device; 3 is a schematic diagram of an example of an edge position detector of a workpiece processing device; 4 is a plan view of an example of a workpiece conveying system provided with a workpiece processing device; 5 is a diagram for explaining the relationship used by the workpiece processing device; 6 is a flowchart for explaining the operation of the workpiece processing device; 7 is a flowchart illustrating the operation of a workpiece conveying system equipped with a workpiece processing device; 8 is a diagram of a first rotation distance information management table of a workpiece processing device; 9 is a graph for explaining the first rotation distance information of the workpiece processing device; 10(a) is a graph showing that the first rotation distance information of the workpiece processing device does not reach the range of 90 degrees when the rotation angle is above 0 degrees; FIG. 10(b) is a graph of the first rotation distance information of the workpiece processing device when the rotation angle is more than 90 degrees and does not reach the range of 180 degrees; FIG. 10(c) is a graph of the first rotation distance information of the workpiece processing device when the rotation angle is 180 degrees or more and does not reach 270 degrees; 10(d) is a graph of the first rotation distance information of the workpiece processing device that does not reach the range of 360 degrees when the rotation angle is more than 270 degrees; 10(e) is a synthetic curve diagram of the first rotation distance information of the workpiece processing device; FIG. 10(f) is a graph of the portion of the first rotation distance information of the workpiece processing device that changes less; 11 is a diagram of a synthetic distance information management table of a workpiece processing device; 12 is a diagram of the second rotation distance information management table of the workpiece processing device; 13 is a diagram of a plurality of second rotation distance information of the workpiece processing device; 14 is a diagram of the distance difference information management table of the workpiece processing device; 15(a) is a graph showing the relationship between the distance difference information acquired by the workpiece processing device and the rotation angle; 15(b) is a graph for explaining the processing performed by the notch detection device of the workpiece processing device; 15(c) is a graph for explaining the processing performed by the defect detection device of the workpiece processing device; 16 is an illustration of an output example of a workpiece processing device; 17 is a block diagram of a workpiece processing apparatus according to Embodiment 2; 18 is a schematic diagram of an example of a workpiece processing apparatus (FIG. 18(a)), and a schematic diagram of an example of an edge position detector of the workpiece processing apparatus (FIG. 18(b)); 19 is a diagram for explaining the process of moving the defective part of the workpiece processing device into the imaging area, wherein FIG. 19(a) is a diagram before rotation and FIG. 19(b) is a diagram after rotation; 20 is a flowchart for explaining the operation of the workpiece processing device; 21 is a diagram of an example of an image management table of a workpiece processing device; 22 is an illustration of a display example of a workpiece processing device; 23 is a diagram showing an example of an image situation information management table of a workpiece processing device; 24 is a diagram showing a display example of a workpiece processing device; and 25 is a block diagram of another example of the workpiece processing apparatus according to the first embodiment.

1‧‧‧Workpiece processing device

101‧‧‧ First Rotation Distance Information Storage

102‧‧‧Edge position detector

103‧‧‧ Acquisition Department

104‧‧‧ Output

105‧‧‧Evaluation related information acceptance department

106‧‧‧Setting

1031‧‧‧Synthetic device

1032‧‧‧synthesis processing device

1033‧‧‧Amendment information acquisition device

1034‧‧‧Second distance information acquisition device

1035‧‧‧computing device

1036‧‧‧Notch detection device

1037‧‧‧Defect detection device

Claims (15)

A workpiece processing device with: The first rotation distance information storage unit is configured to store a plurality of first rotation distance information, the first rotation distance information is information having a rotation angle when the circular workpiece rotates and the first distance information form a corresponding, and the first Distance information refers to the distance information from the rotation center of the workpiece corresponding to the rotation angle to the edge; The synthesizing device synthesizes the plurality of first distance information included in the first distance information of the plurality of first rotation distance information corresponding to different rotation angles successively different by 90 degrees; A synthesis processing device, in the plurality of synthesized distance information obtained by synthesizing and acquiring the first distance information in the aforementioned synthesizing device, the corresponding plurality of synthesized distance information whose rotation angles are continuous and whose value changes little is detected, and Obtaining multiple first distance information before synthesis corresponding to more than one of the plurality of synthesized distance information obtained by the detection and a rotation angle corresponding to more than one first distance information before synthesis; A correction information obtaining device, using the plurality of first distance information and the rotation angle obtained by the synthesis processing device, to obtain correction information for aligning the rotation center of the workpiece with the center of the workpiece; and The correction information output device outputs the correction information obtained by the aforementioned correction information obtaining device. The workpiece processing device as described in item 1 of the patent application scope includes: The second distance information obtaining device uses the correction information output by the correction information output device to obtain a relational expression indicating the relationship between the rotation angle and the second distance information when the workpiece is a circle with no unevenness on the edge, and the second distance The information is information about the distance between the workpiece and the edge corresponding to the rotation angle, and the plurality of rotation angles corresponding to the plurality of first rotation distance information are substituted into the obtained relational expression, and the second distance information is obtained; The computing device uses the plurality of first rotation distance information and the plurality of second distance information obtained by the second distance information obtaining device to obtain the first distance information and the second distance information corresponding to the same rotation angle Difference; and The distance difference correlation output device outputs information about the difference calculated by the aforementioned calculation device. The workpiece processing device according to item 1 of the scope of the patent application, wherein the synthesis processing device detects the first processing and the subordinate value of one or more synthetic distance information from the larger value among the plurality of synthetic distance information in sequence The smaller one executes at least one of the second processes that sequentially detect more than one synthesized distance information more than once, and obtains the corresponding rotation angle in the remaining synthesized distance information that is not detected by the first and second processes A pair of a plurality of first distance information before synthesis corresponding to more than one synthesized distance information of consecutively synthesized distance information of more than a predetermined number, and a rotation angle corresponding to more than one first distance information before synthesis. The workpiece processing device as described in item 2 of the patent application range, wherein the synthesis processing device detects the first processing and the subordinate values of one or more synthetic distance information from the larger value among the plurality of synthetic distance information sequentially The smaller one executes at least one of the second processes that sequentially detect more than one synthesized distance information more than once, and obtains the corresponding rotation angle in the remaining synthesized distance information that is not detected by the first and second processes A pair of a plurality of first distance information before synthesis corresponding to more than one synthesized distance information of consecutively synthesized distance information of more than a predetermined number, and a rotation angle corresponding to more than one first distance information before synthesis. The workpiece processing device according to item 3 of the patent application scope, wherein the synthesis processing device executes the first processing and the second processing at least once. The workpiece processing device according to item 4 of the patent application scope, wherein the synthesis processing device executes the first processing and the second processing at least once. The workpiece processing device described in item 2 of the scope of the patent application further includes: The notch detection device uses the difference between the first distance information and the second distance information calculated by the calculation device as orientation specific information of the workpiece to obtain information indicating the orientation specific notch of the workpiece; The aforementioned distance difference correlation output device outputs information indicating the notch portion obtained by the notch detection device as information about the difference calculated by the aforementioned calculation device. The workpiece processing device according to item 7 of the patent application scope, wherein the notch detection device uses the difference between the first distance information and the second distance information calculated by the calculation device and one or more critical values regarding the size of the notch To detect the notch at the edge of the workpiece and obtain information indicating the notch. The workpiece processing device described in any one of items 1 to 5 of the patent application scope further includes: The defect detection device uses the difference between the first distance information and the second distance information calculated by the calculation device to obtain information about the defect portion of the workpiece edge; The aforementioned distance difference correlation output device outputs the information about the defective part acquired by the defect detection device as the information about the difference calculated by the aforementioned calculation device. The workpiece processing device according to item 9 of the patent application scope, wherein the defect detection device uses the difference between the first distance information and the second distance information calculated by the calculation device and more than one critical value regarding the size of the defective portion, Detect the defective part at the edge of the aforementioned work piece and obtain information about the detected defective part. The workpiece processing device as described in item 1 of the patent application range, wherein the synthesis device includes four rotation angles different from each other by 90 degrees in the first distance information included in the plurality of first rotation distance information The first distance information is synthesized separately, and a plurality of synthesized distance information is obtained. The workpiece processing device as described in item 2 of the patent application range, wherein the synthesis device includes four rotation angles different from each other by 90 degrees in the first distance information included in the plurality of first rotation distance information The first distance information is synthesized separately, and a plurality of synthesized distance information is obtained. A workpiece conveying system with: The workpiece processing device as described in any one of the first to eighth, eleventh, and twelfth items of the patent application scope; and A workpiece conveying device that conveys workpieces to the workpiece processing device. A workpiece conveying system with: A workpiece processing device as described in item 9 of the patent application scope; and A workpiece conveying device that conveys workpieces to the workpiece processing device. A workpiece conveying system with: A workpiece processing device as described in item 10 of the patent application scope; and A workpiece conveying device that conveys workpieces to the workpiece processing device.

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