TW201929116A - Workpiece processing apparatus and workpiece transfer system - Google Patents

Abstract

The subject of the invention concerns the detection of workpiece defect that cannot be appropriately carried out in the prior art. In order to solve the problem, the invention provides a workpiece processing apparatus includes: a first rotational distance information storage unit (101) that stores multiple pieces of first rotational distance information, each of which is information having, in association with each other, a rotational angle, and first distance information regarding a distance from a rotation center to an edge of a circular workpiece corresponding to the rotational angle, in a case where the workpiece is rotated; an acquiring unit (103) that acquires information for positioning the workpiece, information for specifying an orientation of the workpiece, and information regarding a defective portion at the edge of the workpiece, using the multiple pieces of first rotational distance information stored in the first rotational distance information storage unit (101); and an output unit (104) that outputs the information for positioning the workpiece, the information for specifying the orientation of the workpiece, and the information regarding the defective portion, which are acquired by the acquiring unit (103).

Description

Workpiece processing device, workpiece conveying system

The present invention relates to a workpiece processing apparatus or the like that performs positioning of a workpiece.

In the prior art, the wafer is rotated, and the edge position is detected and memorized according to the rotation angle. The eccentricity and direction of the wafer position are calculated according to the maximum value and the minimum value of the detection signal to perform crystal according to the eccentricity data. The center of the circle is aligned. Since the change in the edge position is sharper than the other portions at the start point and the end point of the flat portion of the wafer or the like, the portion where the rate of change of the edge position data is equal to or greater than a certain level is calculated and used in the same device. It is known that the flat portion or the like is placed at a specific position on another work table such as a transport device (see, for example, Patent Document 1).

[Practical Technical Literature]
[Patent Literature]
[Patent Document 1] Japanese Patent No. 2729297 (first page, first figure, etc.)

[Problems to be solved by the invention]
By using a workpiece transport device, a workpiece that is positioned using, for example, the above-described conventional device is transported to a device that performs CVD (Chemical Vapor Deposition) or CMP (Chemical Mechanical Polishing), etc. Perform the required processing.

When a workpiece such as a wafer having a burr or a chipping at the edge is subjected to CVD, polishing, or the like, the workpiece may be damaged due to heat or pressure applied to the workpiece. Therefore, before the workpiece is processed, it is preferable to perform inspection to detect the presence or absence of a defective portion such as a burr or a chipping. For this purpose, it is desirable to first perform inspection of the defective portion of the workpiece prior to workpiece positioning using the above-described conventional techniques.

However, when inspecting the defective portion of the workpiece, the workpiece is transported to the defective portion inspection device by the workpiece transport device to perform the inspection of the defective portion. After the inspection, the workpiece transport device is also required to transport the workpiece to the device for performing the workpiece positioning. Positioning is performed, so there is a problem that it takes time to inspect the workpiece and transport the workpiece to the inspection device.

In addition, in addition to the positioning device, it is also necessary to provide a device for performing inspection, so that it is necessary to ensure the installation place of the inspection device on the workpiece conveying path while increasing the cost, and it is extremely difficult to save space. The problem.

As a result, in the prior art, there is a problem that the workpiece defect cannot be properly detected.

The present invention has been made in order to solve the above problems, and an object of the present invention is to provide a workpiece processing apparatus and the like that can appropriately detect workpiece defects.

[Means for solving the problem]
The workpiece processing apparatus of the present invention includes: a first rotation distance information storage unit for storing a plurality of first rotation distance information, wherein the first rotation distance information is formed by rotating the angle and the first distance information when the circular workpiece is rotated Corresponding information, wherein the first distance information is distance information about a rotation center of the workpiece from a corresponding rotation angle; and the acquisition unit obtains a plurality of first rotation distance information stored in the first rotation distance information storage unit. Information for the position of the workpiece alignment, information for the orientation of the specific workpiece, and information on the defective portion of the workpiece; and an output portion for outputting the information for the alignment position of the workpiece obtained by the acquisition unit and the orientation of the specific workpiece Information and information about the defective part.

With such a configuration, when the position and orientation of the workpiece are aligned, the edge defect of the workpiece can be detected, and the defect of the workpiece can be appropriately detected.

Further, the workpiece processing apparatus according to the present invention further includes the moving unit that moves the workpiece using the information on the edge defect portion of the workpiece outputted by the output unit, and causes the defective portion of the workpiece edge to be disposed in a predetermined area. The photographing portion is configured to photograph a portion of the edge of the workpiece disposed in the photographing region; and the image output portion is configured to output an image captured by the photographing portion.

With such a configuration, the defective portion of the edge of the workpiece can be easily confirmed.

Furthermore, the workpiece transport system of the present invention includes: the workpiece processing device; and a workpiece transport device that transports a workpiece to the workpiece processing device.

According to this configuration, the processing for detecting the position and orientation of the workpiece and the processing of detecting the defective portion can be collectively performed in the workpiece processing apparatus during transportation, so that the processing for combining the position and orientation of the workpiece and the detection processing of the defective portion can be shortened. time. Moreover, the movement of the workpiece during transportation can be suppressed to a minimum.

[Effect of the invention]
According to the workpiece processing apparatus or the like of the present invention, the detection of the workpiece defects can be appropriately performed.

Hereinafter, embodiments of the workpiece processing apparatus and the like will be described with reference to the drawings. In the embodiment, the same components are denoted by the same reference numerals, and the description thereof will be omitted.

(Embodiment 1)
Fig. 1 is a block diagram of a workpiece processing apparatus 1 of the present embodiment.

The workpiece processing apparatus 1 includes a first rotation distance information storage unit 101, an edge position detector 102, an acquisition unit 103, an output unit 104, an evaluation related information receiving unit 105, and a setting unit 106.

The acquisition unit 103 includes, for example, a synthesis device 1031, a synthesis processing device 1032, a correction information acquisition device 1033, a second distance information acquisition device 1034, a calculation device 1035, a notch detection device 1036, and a defect detection device 1037.

2 is a schematic view (FIG. 2(a)) for explaining an example of a circular workpiece to be obtained as the first rotation distance information in the present embodiment, and a process for explaining the process of acquiring the workpiece correction information (FIG. 2). (b)).

Fig. 3 is a schematic diagram showing an example of the edge position detector 102 of the present embodiment.

4 is a plan view showing an example of a workpiece transport system 1000 including the workpiece processing apparatus 1 of the embodiment.

The workpiece processing apparatus 1 is, for example, a device that performs a process of acquiring the position and orientation of the workpiece 10 and a process of detecting the edge defect portion on a circular workpiece (hereinafter also simply referred to as a workpiece) 10. The information for combining the position and the orientation of the workpiece 10 is, for example, information used to position the workpiece 10 in a predetermined direction in a predetermined position.

The circular workpiece 10 is, for example, a circular semiconductor wafer (hereinafter referred to as a wafer), a wafer attached to a wafer such as a reinforcing wafer holder, or a substrate such as a circular glass substrate. The material of the circular workpiece (such as the material of the wafer) is not limited. Further, the circular workpiece 10 may have a non-complete circular shape. For example, a portion of the edge 11 may have a notch portion such as an orientation flat portion 17 or a notch portion (not shown). . The workpiece 10 can also have more than two notches. The edge 11 of the workpiece 10 refers to, for example, the peripheral portion of the workpiece 10.

The first rotation distance information storage unit 101 is configured to store a plurality of first rotation distance information. The first rotational distance information is information that has a rotation angle that corresponds to the first distance information corresponding to the rotation angle when the circular workpiece 10 is rotated, for example, at a point on the workpiece 10 as a rotation center O. It is information about the distance from the center of rotation of the workpiece 10 to the edge. The center of rotation O of the workpiece 10 does not necessarily have to coincide with the center Q of the workpiece 10.

The first distance information is information about the distance from the rotation center O of the workpiece 10 to the edge 11 of the workpiece 10. The first distance information is distance information about, for example, a pre-designated line segment having one end of the rotation center O of the workpiece 10 to a position overlapping the edge 11 of the workpiece 10. The first distance information is, for example, the distance from the rotation center O of the workpiece 10 to the edge 11. For example, as shown in FIG. 2, the first distance information is on the pre-designated line segment 14 having one end of the rotation center O of the workpiece 10, and the relevant edge 11 obtained by the sensor 15 such as a line sensor disposed along the line segment is used. The measured value of the position or the value obtained using the measured value.

Hereinafter, in the present embodiment, the first distance information is described by taking the distance r from the rotation center O of the workpiece 10 to the edge 11 as an example, and the distance r is obtained from the sensor 15 to represent the workpiece 10. The position information of the edge 11 is obtained.

Further, the first distance information may be information that substantially indicates a value corresponding to the distance from the rotation center O of the workpiece 10 to the edge 11 of the workpiece 10. The first distance information may also be, for example, information indicating a distance from a position (for example, 0 point) or the like as a reference of the sensor 15 to the edge 11. Further, it is also possible to indicate a portion where the sensor 15 detects the edge 11, for example, information of the element of the edge 11 or its arrangement position, and the like.

The rotation angle is, for example, an angle value at which the workpiece 10 is rotated when the value of the predetermined state is used as an initial value such as 0 degree before the rotation or when the first distance information is started. The plurality of first rotational distance information stored in the first rotational distance information storage unit 101 is information having, for example, first distance information obtained by sequentially rotating the workpiece 10 at a predetermined angle, and a rotation angle thereof. The plurality of first rotational distance information has, for example, a rotation angle that is continuous at a predetermined angular interval. The pre-specified angle refers to a certain angle, for example, a minimum unit of the rotation angle when the workpiece 10 is rotated to obtain the first distance information. The pre-designated angle is preferably a value obtained by dividing 360 degrees, for example, by a multiple of four. The pre-specified angle refers to a value obtained by, for example, dividing 360 degrees into 1000, or 10000 or the like, for example, 0.36 degrees, or 0.036 degrees, or the like. In addition, the unit of the rotation angle is not limited.

The first rotational distance information storage unit 101 is for storing a plurality of first rotational distance information acquired for each of the one or more workpieces 10, for example. For example, a workpiece identifier corresponding to the plurality of first rotation distance information of each workpiece 10 and the identifier of the workpiece 10 is stored.

The first rotation distance information storage unit 101 stores a plurality of first rotation distance information, and the first rotation distance information corresponds to, for example, a plurality of rotation angles of at least one rotation amount, specifically, a plurality of rotation angles of one rotation amount It is a plurality of rotation angles ranging from 0 to 360 degrees. However, a plurality of first rotation distance information corresponding to a plurality of rotation angles that do not reach one rotation may be stored. For example, a plurality of first rotational distance information may be stored, the rotational distance information corresponding to a smaller amount of rotation than one rotation (0 to 360 degrees), and the angle of the rotation amount is smaller than a minimum unit of the rotation angle. In addition, a plurality of rotation angles of the rotation amount of more than one rotation (0 to 360 degrees) may be stored, for example, a plurality of first rotation distance information corresponding to a plurality of rotation angles of 1.5 rotations or 2 rotations. .

In the present embodiment, a case where the plurality of first rotation distance information acquired by the edge position detector 102 is stored in the first rotation distance information storage unit 101 will be described as an example. However, the manner in which the plurality of first rotation distance information is stored in the first rotation distance information storage unit 101 is not limited. For example, a plurality of first rotational distance information received by a receiving unit or the like (not shown) via a memory medium or a communication line may be stored in the first rotational distance information storage unit 101.

In addition, the storage here also contains the concept of temporary memory. For example, the case where the edge position detector 102 temporarily memorizes the plurality of first rotation distance information acquired for the workpiece is also referred to herein as storage.

The first rotational distance information storage unit 101 is preferably a non-volatile recording medium, but may be implemented by a volatile recording medium. This situation is the same for other storage units.

The edge position detector 102 acquires a plurality of first rotational distance information for the workpiece 10. Specifically, the edge position detector 102 detects the edge position of the workpiece 10 and acquires a plurality of first rotation distance information for the workpiece. The edge position detector 102 stores the obtained plurality of first rotation distance information in the first rotation distance information storage unit 101.

The edge position detector 102 includes a sensor 15 such as a line sensor, a turntable 52 that rotates the mounted workpiece 10, and the like, and an edge position that is measured by rotating the workpiece 10 by a predetermined rotation angle. The measured value is, for example, the first distance information and the rotation angle are sequentially obtained using a measured value of the distance from the rotation center of the workpiece 10 to the edge. The center of rotation of the workpiece 10 is, for example, the center of rotation of the turntable that rotates the rotating workpiece 10.

The edge position detector 102 may be provided with a moving device (not shown), and the workpiece 10 outputted by the output unit 104, which will be described later, may be aligned with position information, for example, correction information, so that the position of the turntable 52 or the like is moved, so that the center of the workpiece 10 is located. Specify the location in advance. Further, the edge position detector 102 may include a control device (not shown) or the like, and may use the orientation-specific information (for example, information indicating the notch portion) of the workpiece 10 outputted by the output unit 104, which will be described later, to rotate the turntable 52. The workpiece 10 is oriented in a predetermined designated direction.

The edge position detector 102 associates, for example, a plurality of first rotation distance information acquired for each workpiece with the workpiece identifier of each workpiece, and stores it in the first rotation distance information storage unit 101.

The acquisition unit 103 uses the plurality of first rotation distance information corresponding to one workpiece stored in the first rotation distance information storage unit 101 to acquire information for aligning the workpiece 10 with the position, and information for specifying the orientation of the workpiece 10. And information about the defective portion of the edge 11 of the workpiece 10.

The information for aligning the workpiece 10 with the position refers to information used to arrange, for example, the workpiece 10 at a predetermined position. The information for aligning the workpiece 10 with the position refers to, for example, information on the position where the workpiece 10 is originally disposed and the position at which the workpiece 10 is actually disposed, or correction information. The correction information is, for example, correction information acquired by the correction information acquisition device 1033. The acquisition unit 103 can obtain information for aligning the workpiece 10 with the position. For example, the acquisition unit 103 can acquire the information for the alignment position using the above-described conventional technique. In the present embodiment, a process in which the correction information acquisition device 1033 acquires the information for the alignment position will be described later as a specific example.

The orientation-specific information of the workpiece 10 is, for example, information used to arrange the workpiece in a predetermined direction, and is, for example, information indicating a notch portion such as an oriented flat portion or a V-shaped groove portion for specifying the orientation of the workpiece. The information indicating the notch portion is, for example, information indicating the position of the notch portion. Further, it is also possible to have information such as specifications of the notch portion. Information indicating the notch portion can be obtained by, for example, the notch detecting device 1036. The acquisition unit 103 may obtain the orientation-specific information of the workpiece 10 in any manner. For example, the acquisition unit 103 may acquire the orientation-specific information of the workpiece using the above-described conventional technique.

For example, the acquisition unit 103 can detect the notch portion using one or two or more critical values of the size of the notch portion, and after the detection, acquire information indicating the notch portion. The one or more critical values regarding the size of the notch portion mean, for example, at least one or more of the width of the notch portion and the distance from the edge. For example, the critical value of the size of the notch portion refers to a critical value indicating a lower limit value of the distance from the edge of the notch portion, or a critical value indicating a lower limit value and an upper limit value of the notch portion width. The lower limit value of the distance from the edge of the notch portion is, for example, a portion where the distance from the edge of the notch portion is large, for example, the portion having the largest distance, and the lower limit of the distance from the original edge position when there is no notch portion.

For example, the obtaining unit 103 can detect a continuous area that is concave toward the inside of the workpiece 10 at the edge 11 of the workpiece 10 using a plurality of first rotation distance information, and determine the depth from the edge in the concave area (also In other words, the distance from the edge is greater than or equal to the critical value, that is, whether the distance from the edge is greater than or equal to the critical value of the lower limit of the distance from the edge of the notch, and if there is a portion having a critical value or more, The concave region is determined as a notch portion, and information indicating the position of the region is obtained. For example, information indicating a range of the rotation angle is used as information indicating the notch portion.

In addition, the continuous area means, for example, a portion in which the order of acquisition of the first distance information is continuous, or a portion in which the corresponding rotation angle of the first distance information is continuous. For example, the acquisition section 103 can detect the continuous recess or the continuous convex from the difference of the first rotational distance information, the radius of the workpiece 10, or the distance from the rotation center of the workpiece 10 to the edge. Further, it is also possible to detect both ends of the concave portion or the convex portion existing at the edge 11 of the workpiece 10 by, for example, performing second-order differentiation on the continuous first distance information. Therefore, it can be determined that the detected area is concave or convex from the difference between the value of the first rotational distance information in the region of the portion detected in this manner or the radius of the same workpiece 10 as described above. shape. Therefore, by using the critical value as described above, it is determined whether or not the region of the edge 11 of the workpiece 10 determined to be concave in this manner is a notch portion, and the acquisition portion 103 can detect the notch portion. Further, since the processing of detecting the notch portion or the defective portion of the edge 11 by performing the second-order differentiation or the like in this manner is a well-known technique, the detailed description is omitted.

Further, the use of a plurality of first rotation distance information also includes a concept of information that can be obtained using a plurality of first rotation distance information (for example, using distance difference information to be described later).

Furthermore, the acquisition unit 103 may detect a continuous region that is concave toward the inside of the workpiece 10 at the edge 11 of the workpiece 10 by using a plurality of first rotation distance information, and determine whether the width of the concave region is respectively indicated. When the range of the lower limit value and the upper limit value of the notch width is within the range, the concave region is determined as a notch portion, and information indicating the position of the region (for example, information of a rotation angle range) is acquired as Indicates the information of the gap.

Alternatively, the determination by the distance from the edge and the determination by the width may be combined, and the distance from the edge is equal to or greater than the critical value, and the width is in the range indicated by the critical value, that is, continuous The area is judged as a notch.

In the present embodiment, the process of indicating the notch information is obtained by the notch detecting device 1036, and a specific example of the process of obtaining the information for specifying the information by the obtaining unit 103 will be described.

The information on the defective portion is, for example, information indicating the existence position of the defective portion of the workpiece 10, specifically, information indicating the rotation angle or the extent of the defective portion (for example, information indicating the range of the rotation angle). Moreover, the information on the defective portion is information indicating the size of the defective portion, for example, the distance from the edge, specifically, the depth or height indicating the defective portion, and the width of the defective portion. The information about the defective portion may further have an identifier for identifying the defective portion or an identifier of the workpiece 10. The term "defective portion" means, for example, a burr, a chipping, dust, or the like of the edge 11 of the workpiece 10. In addition, the information about the defective portion may also be information indicating whether or not there is a defective portion. Further, the information on the defective portion may also be information indicating that the defective portion is a concave portion or a convex portion of the edge 11 of the workpiece 10. For example, the information on the defective portion is information on the defective portion to be obtained by the defect detecting device 1037.

The acquisition unit 103 performs detection of the defective portion using, for example, one or two or more critical values regarding the size of the defective portion, and after the detection, acquires information on the defective portion. The one or more critical values regarding the size of the defective portion mean, for example, one or two or more critical values relating to at least one of the width of the defective portion and the distance from the edge.

The acquisition unit 103 calculates the distance from the rotation center to the edge of the workpiece 10 (or the radius of the workpiece 10) when the edge 11 has no defective portion, for example, for a plurality of first rotation distance information, and detects the difference. The first rotation distance information whose distance is greater than or equal to the lower limit value of the defect portion is detected, and information about the defective portion is obtained. For example, the acquisition unit 103 acquires the rotation angle information and the like of the first rotation distance information as information on the defective portion. In addition, the detecting the first rotation distance information described above also includes the concept of detecting the first distance information of the first rotation distance information or detecting the rotation angle.

Further, the acquisition unit 103 may detect a continuous region that is concave toward the inside of the workpiece 10 at the edge 11 of the workpiece 10 or a continuous region that is convex toward the outside of the workpiece 10, for example, using a plurality of first rotation distance information. And determining whether the distance from the edge in the concave region or the convex region is greater than a critical value of the lower limit value of the distance from the edge of the defect portion, and if there is a portion above the critical value, the concave region is Or the convex region is judged to be a defective portion, and information on the defective portion, such as information on the range of the rotation angle, is obtained.

Here, the distance from the edge refers to, for example, a distance from the edge when there is no defect or a notch, or a distance from the edge of the ideal workpiece having no defect or notch. The distance from the edge herein refers to, for example, the distance of the workpiece 10 from the edge toward the center of rotation of the workpiece 10 or the distance from the edge toward the opposite direction to the center of rotation of the workpiece 10. For example, the distance from the edge here refers to the distance from the edge to the notch portion or the distance from the edge to the defective portion when the workpiece has no notch or defective portion. The distance from the edge here may also be the depth of the concave region of the edge or the height of the convex region. The distance from the edge here may also be the size of the distance from the edge, or the size or absolute value of the depth or height of the notch or the defective portion. This situation is also the same in the following.

The concave portion or the both ends of the convex portion present at the edge 11 of the workpiece 10 can be detected by, for example, performing a second-order differentiation on the continuous first distance information as described above. Further, the acquisition unit 103 can also determine whether or not the region of the edge 11 of the workpiece 10 sandwiched between the portions detected in this manner is a defective portion by using the above-described threshold value to detect the defective portion.

Further, the acquisition unit 103 may perform, for example, a continuous region in which the edge 11 of the workpiece 10 is concave toward the inside of the workpiece 10 or a continuous region convex toward the outside of the workpiece 10, using a plurality of first rotation distance information. Detecting and determining whether the width of the concave or convex region is equal to or greater than a critical value of the lower limit value of the defect portion width, and if the value is greater than or equal to the lower limit value, the concave region or the convex region is determined as a defective portion, and Get information about the defect. Further, as the critical value of the lower limit value, when the continuous region is concave or convex, different critical values may be used, or the same critical value may be used.

Alternatively, the determination by the above-described edge-calculated distance may be combined with the judgment of the borrowing width. When the distance from the edge is equal to or greater than the critical value and the width is greater than or equal to the critical value, the continuous region is determined to be the defective portion.

Further, the acquisition unit 103 may compare the number of the workpieces that are detected by the plurality of first rotation distance information toward the specific notch portion with the number of the notch portions originally provided in the workpiece 10, and when the number of the workpieces is different, the acquisition unit may obtain the representation. Information on the defective part with defective edges.

Further, when detecting the defective portion, the acquisition unit 103 may detect that the portion of the workpiece facing the specific notch portion is excluded, or that the detected defective portion is located in the region where the notch portion is disposed. It is also possible not to obtain information about the detected defective portion.

Further, in the present embodiment, the acquisition unit 103 includes a synthesizing device 1031, a synthesizing device 1032, a correction information acquiring device 1033, a second distance information acquiring device 1034, a computing device 1035, a notch detecting device 1036, and a defect. The case of the detecting device 1037 will be described as an example.

The synthesizing device 1031 is configured to synthesize a plurality of first distance information in which the corresponding rotation angles of the first distance information included in the plurality of first rotation distance information are successively different by 90 degrees. The plurality of first rotational distance information herein is, for example, a plurality of first rotational distance information of the workpiece 10 stored as one of the processing targets stored in the first rotational distance information storage unit 101.

The plurality of first distance information, in which the rotation angles are successively different by 90 degrees, may be combined, for example, a pair of a plurality of first distance information in which the difference of the corresponding rotation angles is an integer multiple of 90 degrees may be combined. The integer multiple of 90 degrees is, for example, 90 degrees, 180 degrees, 270 degrees, or the like.

The synthesizing device 1031 combines, for example, four first distance information in which the corresponding rotation angles are respectively 90 degrees in the first distance information included in the plurality of first rotation distance information, to obtain a plurality of combined distance information, or For example, a pair of pairs of first distance information of n times (n is an integer of 1 to 3) in which the difference of the corresponding rotation angles is 90 degrees is separately synthesized.

The first distance information synthesized with a plurality of first distance information is referred to herein as a synthetic distance information. The synthesizing device 1031 generally acquires a plurality of combined distance information. The term "synthesis" as used herein refers to, for example, combining a plurality of first distance information of a group into one. The synthesis here may be, for example, obtaining an average of a plurality of first distance information, or may be a case of adding a plurality of first distance information. In addition, it is also possible to calculate an average of the differences of the plurality of first distance information. For example, the synthesizing device 1031 compares the rotation angles corresponding to the first distance information included in the plurality of first rotation distance information to a plurality of first angles of θ ₀ , θ ₀ +90 degrees, θ ₀ +180 degrees, and θ ₀ +270 degrees. The pair of distance information is synthesized and the synthetic distance information is obtained.

The synthesizing means 1031 may also synthesize the plurality of first distance information in which the corresponding rotation angles are successively different by 90 degrees in each other. For example, the synthesizing device 1031 may further divide the plurality of first rotation distance information consecutively into a plurality of groups by the corresponding rotation angle values, and set the rotation angle value to 90 degrees, and arrange the divided groups. The first distance information of the first rotation distance information having the same order is synthesized with each other to perform the above-described composition.

The continuous value of the rotation angle means a case where, for example, the first distance information is acquired one by one, and the rotation angle values of the one rotation angle unit when the workpiece 10 is rotated are continuous. The case where the values of the rotation angles are continuous is referred to herein as the rotation angle being continuous.

Here, the arrangement order is, for example, an arrangement order in which the divided first rotation distance information is arranged in the ascending order or descending order of the rotation angles of the first rotation distance information.

For example, when a plurality of first rotation distance information acquired by rotating the workpiece or the like and having a rotation angle of 0 degrees or more and less than 360 degrees is stored in the first rotation distance information storage unit 101, the synthesizing device 1031 first The first rotation distance information is divided into four parts, so that the corresponding rotation angle range becomes: 0 degrees or more, less than 90 degrees, 90 degrees or more, less than 180 degrees, 180 degrees or more, less than 270 degrees, and 270 degrees or more, not 360. degree. Next, the synthesizing means 1031 synthesizes the first distance information value which the first rotation distance information of the divided ranges is in accordance with each permutation order of the rotation angle (for example, the ascending order of the rotation angle or the descending order), and Obtain a continuous number of composite distance information. In this way, the corresponding first rotation distances in which the corresponding rotation angles are formed by 90 degrees successively can be combined with each other. Further, the range of the rotation angle at the time of division does not have to start from 0 degrees, and the range of the rotation angle may be set by, for example, 15 degrees from 15 degrees or the like.

Furthermore, the first rotation distance information may be sequentially obtained one by one from a plurality of consecutive first rotation distance information in a range of a rotation angle ranging from 90 degrees, and according to each of the obtained first rotation distance information, The rotation angle is respectively added to the first rotation distance information of the rotation angles of 90 degrees, 180 degrees, and 270 degrees, and the first distance of the obtained first rotation distance information and the detected first rotation distance information respectively Information is synthesized. In this way, the four first distance information whose corresponding rotation angles are successively different by 90 degrees can be sequentially combined with each other.

In this way, a plurality of groups of rotation angles of 90 degrees are successively differentiated, preferably groups of four first distance information are sequentially synthesized, for example, due to the rotation center O of the workpiece 10 being offset from the center Q of the workpiece 10. The first distance information reduction can be eliminated.

Further, in each of the combined distance information obtained by the synthesis, for example, a pair of a plurality of rotation angles corresponding to the plurality of first distance information before synthesis is stored in association. Alternatively, a part of the pair of pairs storing the rotation angle may be correspondingly stored, for example, the rotation angle of the minimum of the plurality of corresponding rotation angles may be stored.

The synthesis processing device 1032 converts a plurality of composite distance information corresponding to the rotation angles in a plurality of composite distance information (information obtained by the synthesis device 1031 to synthesize the first distance information), and the magnitude of the value changes little. A plurality of synthetic distance information is detected. Then, the synthesis processing device 1032 obtains a plurality of first distance information before synthesis corresponding to one or more of the plurality of detected combined distance information, and one or more first distances from the plurality of first distance information before synthesis. The rotation angle corresponding to the information.

The size of the synthetic distance information value refers to, for example, the absolute value of the synthesized distance information. The plurality of combined distance information having a small change in the magnitude of the value is, for example, a continuous plurality of combined distance information having a smaller value of the magnitude of the magnitude change of the value than the other plurality of consecutive composite distance information. The so-called continuous plurality of combined distance information refers to the composite distance information of two or more consecutive numbers specified in advance. The term "continuous" as used herein means a case where one or more phases corresponding to one or more rotation angles of the combined distance information are continuous. As described above, in the synthetic distance information, the reduction of the first distance information which occurs due to the deviation of the rotation center O of the workpiece 10 from the center Q of the workpiece 10 has been eliminated, so that the resultant distance information of the larger portion of the change is, for example, the workpiece. The edge 11 of 10 has a concave portion. The unevenness of the edge 11 is a notch portion such as a flat portion 17 or a V-shaped groove portion, a burr or a chipping of the workpiece 10, dust, or the like. The term "collapse" refers to, for example, a defective portion such as a crack or a slit of the edge of the workpiece 10. The composite distance information of the portion having a small change in size means, for example, a portion having no unevenness or unevenness, and the change in the size of the portion is caused by, for example, an error in measurement or the like.

The synthesis processing device 1032 excludes, for example, the composite distance information having a large change in the magnitude of the value, and obtains a plurality of composite distance information in which the corresponding rotation angles in the remaining combined distance information are continuous, as a plurality of composites whose value changes little. Distance information.

The synthesis processing device 1032, for example, among the plurality of combined distance information synthesized by the synthesizing device 1031, sequentially detects one or more synthetic distance information from the larger value, and sequentially detects one or more of the smaller values. At least one of the second processes of synthesizing the distance information is performed more than once. Further, the remaining combined distance information detected without the first processing and the second processing corresponds to a plurality of combined distance information having a small change in the magnitude of the value detected by the combining processing device 1032. In addition, the synthetic distance information detection here may also be the synthetic distance information detection of the excluded object.

The first processing is processing for detecting the combined distance information of the maximum value of the plurality of combined distance information synthesized by the synthesizing means 1031, for example. Specifically, it is a process of detecting the synthesized distance information of the maximum value of the undetected synthesized distance information. Furthermore, the second processing is processing for detecting the combined distance information of the minimum value of the plurality of combined distance information synthesized by the synthesizing means 1031, for example. Specifically, it is a process of detecting the combined distance information of the minimum value from the undetected synthesized distance information.

Preferably, the synthesis processing device 1032 performs the first process and the second process a plurality of times. The first processing of the plurality of times and the second processing of the plurality of times may be performed plural times in any order. For example, the first process and the second process may be alternately performed one after another. Further, the second processing may be performed plural times after the first processing of the plurality of times is completed. Further, any of the first processing and the second processing may be performed first.

Further, when the first process is repeatedly performed, the synthetic distance information that has been detected in the immediately-processed process is excluded from the detection target. For example, for the detected synthetic distance information, it is corresponding to the information indicating the flag indicating completion of the detection, and the synthetic distance information corresponding to the information such as the flag is not detected in the subsequent detection processing. This method is also the same when the second process is repeatedly performed.

Furthermore, the composition processing device 1032 may sequentially delete the detected synthetic distance information in the first processing or the second processing, or may also indicate the deleted flag or the like to the detected person. At this time, for example, the synthesis processing device 1032 may detect the composite distance information of the maximum value from the synthesized distance information deleted from the first process. Next, for example, the composition processing device 1032 may detect the composite distance information of the minimum value from the synthesized distance information deleted from the second process.

Furthermore, when the first process is repeatedly performed, the composition processing device 1032 performs the first process, for example, repeatedly until the predetermined condition is met. For example, the detection of the synthetic distance information until the pre-specified condition is met means that the synthetic distance information is detected until a predetermined number is reached. Further, the pre-specified condition may be such that the difference between the maximum value and the minimum value of the undetected remaining combined distance information is equal to or less than a predetermined threshold value. This way is also the same in the second process.

When the predetermined condition for the repeated first processing and the repeated second processing is the number of times, the number of times of the first processing condition and the number of times of the second processing condition may be set to different numbers. For example, when the synthetic distance information is information obtained by synthesizing the first distance information of the distance from the rotation center to the edge of the workpiece 10, generally, the first distance obtained by the notch portion such as the oriented flat portion or the V-shaped groove portion is included. The composite distance information obtained by combining the plurality of first distance information of the information is smaller than the synthetic distance information obtained by other parts, and even the rotation angle of the notch portion is wide, in order to The composite distance information corresponding to the notch portion is detected as a portion having a large change, and it is preferable to set the number of detections of the composite distance information value to be larger than the number of detections. Therefore, in this case, it is preferable to set the value of the number of times of the pre-specified condition for the second process to a value which is larger than the value of the number of times of the pre-specified condition for the first process.

The synthesis processing device 1032 obtains, for example, one or more of a plurality of composite distance information consecutive to a predetermined number or more among the remaining combined distance information detected by the first processing and the second processing, and a plurality of first The distance information and the rotation angle corresponding to one or more of the plurality of first distance information. The number specified in advance is 2 or more.

Alternatively, the synthesis processing device 1032 obtains, for example, a plurality of pre-synthesis numbers corresponding to one or more of the plurality of composite distance information having the largest number of consecutive phases among the remaining combined distance information not detected in the first processing and the second processing. a distance information and a rotation angle corresponding to one or more of the plurality of first distance information.

The synthesis processing device 1032 detects, for example, a plurality of composite distance information consecutive to the corresponding rotation angle, and detects a plurality of composite distance information whose value has a small change in magnitude, and obtains the plurality of combined distance information detected. A corresponding first four distance information of the synthesis and a rotation angle corresponding to the first distance information of one of the plurality of first distance information before the synthesis. The four first distance information before the synthesis refers to four first distance information whose corresponding rotation angles are successively different by 90 degrees. The four first distance information is a distance between the four points that intersect the edge of the workpiece 10 by the two straight lines that are orthogonal to each other and the center of rotation of the workpiece.

As a rotation angle corresponding to one or more first distance information of the plurality of first distance information before synthesis, a rotation angle corresponding to one or two or more first distance information is obtained, for example, according to the correction described later When the information acquisition device 1033 obtains the correction information, it is determined by using the rotation angle. For example, when a composite distance information is a combination of four first distance information whose rotation angles are successively different by 90 degrees, the synthesis processing device 1032 detects a plurality of composite distance information whose value changes little, and obtains one. The rotation angle is corresponding to one of the detected plurality of combined distance information and corresponds to the first four first distance information before the synthesis, and the substantially the angle value is the smallest. Alternatively, the first four first distance information corresponding to one of the detected plurality of combined distance information may be obtained, and the rotation angle is one of the range from 0 degrees to 90 degrees. Further, for example, a rotation angle of 360 degrees + D degrees (D is a positive value) may also be substantially D degrees. Moreover, the -D degree can also be substantially 360 degrees - D degrees.

Further, in order to detect the combined distance information corresponding to the above-described oriented flat portion 17, the synthesis processing device 1032 may detect a plurality of composite distance information that is smaller than the average value of the combined distance information.

Furthermore, in the above, the synthesizing processing device 1032 detects, for example, a synthetic distance information having a large value or a synthetic distance information having a small value, and excluding the same, and synchronizing a plurality of synthetic distance information having a small change in the detected value. . However, in the present invention, the synthesis processing device 1032 can detect a continuous plurality of composite distance information having a small change in the magnitude of the value in that manner.

For example, the synthesis processing device 1032 may detect and exclude the continuous composite distance information having a large change in the value of the value by using a value obtained by differentiating or synchronizing the continuous synthesis distance information, and excluding the value. A smaller continuous number of composite distance information is detected. For example, the synthesis processing device 1032 may detect a value equal to or greater than a predetermined threshold value in a value obtained by performing second-order differentiation or the like through the continuous combined distance information, and may rotate the angle from the detected value above the threshold to the next. The synthetic distance information between the rotation angles at which the value above the critical value is detected is detected, as the synthetic distance information whose value varies greatly, and the continuous synthetic distance in the synthetic distance information obtained by excluding the detected synthetic distance information The information is detected as a continuous plurality of synthetic distance information having a small change in the magnitude of the value.

The correction information acquisition device 1033 obtains correction information for aligning the center of rotation of the workpiece 10 with the center of the workpiece 10 using the plurality of first distance information and the rotation angle acquired by the combination processing device 1032, and uses the correction information as the workpiece 10 alignment position. News. The correction information may also be information for moving the center of rotation of the workpiece 10 to the center of the workpiece 10, or information indicating the direction or magnitude of the positional shift. The correction information is, for example, a combination of information indicating the moving direction of the rotation center (for example, an angle with respect to a predetermined direction) and a moving distance. Further, the correction information may be a vector indicating the moving direction and the moving distance of the center of the workpiece 10. Further, the correction information may be information for shifting the center of rotation of the workpiece 10 and the center of rotation of the workpiece 10 in the orthogonal coordinate system to move the center of rotation of the workpiece 10 to the center of the workpiece 10 to indicate the amount of movement along each coordinate axis. .

The correction information acquisition means 1033 obtains the rotation center for the workpiece 10 by using, for example, four first distance information which are successively different from each other by 90 degrees corresponding to the rotation angle obtained by the synthesis processing means 1032, and a rotation angle corresponding to one of them. Correction information moved to the center of the workpiece 10.

Hereinafter, an example of the acquisition processing of the correction information will be described using FIG. 2(b). In addition, in FIG. 2(b), the first distance information r _a , r _b , r _c , and r _d are the first ones in which the corresponding rotation angles obtained by the synthesis processing device 1032 for one combined distance information are successively different by 90 degrees. The distance information and the respective rotation angles are set to θ, θ+90, θ+180, and θ+270. However, θ is set to an arbitrary value. Here, θ is set to an angle ranging, for example, from 0 degrees to 90 degrees. Points P _a , P _b , P _c , and P _d are points on the edge 11 of the workpiece 10 corresponding to the first distance information r _a , r _b , r _c , and r _d , respectively, the rotation center O and the point P _a , The distance between the connecting lines of P _b , P _c and P _d is the first distance information r _a , r _b , r _c and r _d . The connecting line segment of the point P _a and the point P _{c and} the connecting line segment of the point P _b and the point P _d are orthogonal to the center of rotation O. Here, for convenience of explanation, the rotation center O of the workpiece 10 is placed at the origin of the xy coordinate. Here, the rotation direction of the workpiece 10 is set to be clockwise. The angle formed by the line segment corresponding to the first distance information ra and the x-axis is the rotation angle θ, and the counterclockwise direction is set to a positive value. The angle α formed by the connecting line segment of the rotation center O of the workpiece 10 and the center Q of the workpiece 10 and the x-axis is information indicating the moving direction in the correction information; the counterclockwise direction is set to a positive value here. Further, the length h of the connecting line segment of the rotation center O of the workpiece 10 and the center Q of the workpiece 10 is information indicating the amount of movement (moving distance) in the correction information. A sensor (not shown) for obtaining first distance information is disposed, for example, along the y-axis on the y-axis.

In Fig. 2(b), when the line segment which is symmetrical with the connecting line segment of the point P _a and the point P _{c and} the connecting line segment of the point P _b and the point P _d is pulled to the center Q of the workpiece 10, it indicates the moving direction as the correction information. The information α and the length h indicating the amount of movement are obtained from the following equation.

[Formula 1]

Further, in the above formula, since r _a -r _c and r _b -r _d are the difference in distance, it is understood that even if the first distance information is a reading value of a sensor or the like, or a reference point of the self-sensor The above formula can also be established when the distance is calculated.

Further, the above-described correction information acquisition processing is merely an example, and the method of obtaining the correction information by the combination of the first distance information and the rotation angle acquired from the synthesis processing device 1032 in the present invention is not limited.

Further, in the above, the correction information acquisition device 1033 obtains the correction information using the four first distance information and one rotation angle obtained by one combined distance information acquired by the synthesis processing device 1032, but the synthesis processing device 1032 may also be for a plurality of The plurality of sets of the first distance information and the rotation angle respectively obtained by the distance information are acquired, and the correction information is acquired in the same manner as described above, and the average value of the correction information obtained for each pair is obtained as the final correction information.

The second distance information acquisition device 1034 uses the correction information acquired by the correction information acquisition device 1033 to obtain a relationship between the rotation angle and the second distance information corresponding to the rotation angle when the workpiece 10 has a circular shape with no irregularities on the edge 11. . The second distance information refers to the distance information of the workpiece 10 from the center of rotation to the edge 11 with respect to the edge 11 without unevenness. Then, a plurality of rotation angles corresponding to the plurality of first rotation distance information stored in the first rotation distance information storage unit 101 are substituted into the acquired relational expression to obtain the second distance information.

The second distance information is, for example, the same information as the first distance information. The second distance information is information corresponding to, for example, the first distance information distance that can be obtained when the circular workpiece having no irregularities on the edge 11 is replaced by the workpiece 10.

The circular workpiece having no unevenness on the edge 11 means a circular workpiece having no edge, for example, a flat flat portion, or a V-shaped groove portion, or a burr, or a chipping or dust, and may be an ideal size of the workpiece 10 . Shape type workpiece.

The relational expression is, for example, an expression indicating a relationship between a rotation angle when the circular workpiece 10 having the edge 11 has no unevenness and a second distance information corresponding to the rotation angle. The relational expression here may also be an expression representing an ideal curve of the relationship between the rotation angle of the workpiece 10 and the distance from the rotation center to the edge of the corresponding rotation angle. Furthermore, the second distance information may also be the distance from the center of rotation of the ideal workpiece 10 to the edge. Further, the relational expression may be an approximate expression approximate to the relationship between the rotation angle when the circular workpiece 10 having the edge 11 has no unevenness and the second distance information corresponding to the rotation angle.

Here, the acquisition of the relational expression includes the concept of reading a relational expression stored in advance in a memory medium or the like (not shown), determining a coefficient value of a relational expression to be read, or the like, or substituting a coefficient value.

The second distance information acquiring means 1034 may obtain the relational expression using the radius of the workpiece 10 in addition to the angle indicating the moving direction of the correction information and the length indicating the amount of movement. The radius of the workpiece 10 may be stored in advance in a storage unit or the like (not shown), and may be appropriately read.

Hereinafter, an example of the relational expression will be described.

FIG. 5 is a schematic diagram for explaining a relational expression used when the second distance information is to be acquired. In the drawings, the same reference numerals as in Fig. 2(b) denote the same or corresponding parts. However, in FIG. 5, unlike FIG. 2(b), the workpiece 10 is a workpiece having a non-concavo-convex edge and a radius a. Meanwhile, for convenience of explanation, an example in which the center of rotation of the workpiece 10 is outside the workpiece is shown in FIG. However, the center of rotation can also be placed on the workpiece.

When the edge of the circular workpiece 10 whose center of rotation O is shifted from the center Q as shown in FIG. 5 is represented by a polar coordinate, the following expression is formed.

[Formula 2]

When the equation is developed for r _i , the form of the following formula is formed.

[Formula 3]

This equation (3) is an expression showing the relationship between the rotation angle when the circular workpiece 10 having the edge 11 has no unevenness and the second distance information corresponding to the rotation angle. For example, the equation (3) is stored in a storage unit (not shown) in advance, and the second distance information acquisition device 1034 reads the expression and transmits the correction information obtained by using the above equations (1) and (2), specifically That is, the angle α value of the information indicating the movement direction, the length h value of the information indicating the movement amount, and the radius a of the workpiece 10, and substituting the equation (3), the workpiece 10 can be obtained as a circular workpiece having no irregularities on the edge 11 The relationship between the rotation angle θ and the relationship of the second distance information r _i corresponding to the rotation angle is expressed. Hereinafter, a relational expression in which the values of α and length h are substituted is referred to as an ideal curve.

Further, although the ideal curve type shown here is the best, other similar expressions can be obtained by the relational expression, for example, an approximate expression prepared using a sinusoid or the like.

Further, in the above, the correction information acquisition device 1033 acquires the correction information from the equations (1) and (2) using one or more sets of the plurality of first distance information and the rotation angle acquired by the combination processing device 1032. However, in the present invention, the correction information obtaining means 1033 may use the plurality of first distance information obtained by the combining processing means 1032 for one or more synthetic distance information and the plural of the rotation angles corresponding to each of the plurality of first distance information. The group pairs are substituted into the above formula (3) to form a simultaneous equation, and the correction information is obtained by unlocking the joint equation. Moreover, the radius of the workpiece 10 can also be appropriately substituted into the simultaneous equation. This approach is also the same in the case of using other approximations.

The second distance information acquiring device 1034 substitutes a plurality of rotation angles corresponding to the plurality of first rotation distance information stored in the first rotation distance information storage unit 101 into the obtained relational expression, for example, an ideal curve type, to obtain the second Distance information. Further, the plurality of rotation angles corresponding to the plurality of first rotation distance information do not necessarily have to be the readers from the first rotation distance information storage unit 101, as long as they are plural rotations with the plurality of first rotation distance information. A plurality of rotation angles having substantially the same angle may be used. For example, substantially the same plurality of rotation angles can be obtained and used. For example, using an angle value or the like for taking the first distance information from the workpiece 10 to rotate the workpiece 10, for example, by adding the angle values sequentially, etc., the complex number of the plurality of first rotation distance information is obtained. a plurality of rotation angles whose rotation angles are substantially the same.

The second distance information acquiring device 1034 associates the second distance information (for example, the second distance information r _i ) obtained by sequentially substituting the plurality of rotation angles into the relational expression, and stores the image in a storage unit (not shown). Wait. The storage here can also be a temporary memory. Each pair of the second distance information and the rotation angle acquired and stored by the second distance information obtaining means 1034 is referred to herein as the second rotational distance information. Further, the second distance information acquisition device 1034 may acquire the second rotation distance information.

The computing device 1035 uses a plurality of first rotation distance information stored in the first rotation distance information storage unit 101 and a plurality of second distance information acquired by the second distance information acquisition unit 1034 to obtain a corresponding rotation angle. The difference between the first distance information and the second distance information. For example, the computing device 1035 sequentially obtains the difference between the first distance information and the second distance information corresponding to the same rotation angle. The difference here may be a value obtained by subtracting the second distance information value from the first distance information value, or may be the opposite value. Further, as long as it is only a portion where the edge is defective, the difference here may be a difference, for example, an absolute value of the difference. In addition, the difference between the first distance information and the second distance information is referred to herein as distance difference information.

For example, the computing device 1035 associates the acquired distance difference information with the rotation angle, and stores it in a storage unit or the like (not shown). The storage here can also be a temporary memory.

The notch detecting device 1036 acquires information indicating the notch portion of the workpiece 10 using the distance difference information calculated by the computing device 1035 as the orientation specific information of the workpiece 10. The notch portion refers to a portion such as an oriented flat portion or a V-shaped groove portion which is provided at the edge 11 of the workpiece 10 as described above and which is used to specify the orientation of the workpiece 10. The information indicating the notch portion is, for example, information indicating a range of a rotation angle of a portion where the workpiece 10 is provided with a notch portion, or information indicating a plurality of first distance information acquired for the notch portion.

The notch detecting device 1036 detects the notch portion provided at the edge 11 of the workpiece 10 using, for example, the distance difference information calculated by the computing device 1035 and one or more threshold values for the size of the notch portion, and acquires information indicating the detected notch portion.

The one or more critical values regarding the size of the notch portion refer to a critical value of the distance from the edge of the notch portion described above or a critical value for the width of the notch portion.

The notch detecting means 1036 uses, for example, the distance difference information calculated by the calculating means 1035 to detect a continuous area in which the edge 11 is concave toward the inside of the workpiece 10, and the area is a lower limit having a distance from the edge indicating the predetermined notch portion. The distance difference information equal to or greater than the critical value of the value, and the width thereof is a region indicating a threshold value range in which the width lower limit value and the upper limit value of the notch portion are specified in advance. Next, information indicating a position corresponding to the detected area, for example, information indicating a plurality of pieces of first distance information acquired for the rotation angle or the detected area is obtained as a notch portion provided at the edge 11 of the workpiece 10. News.

The edge 11 is a continuous region that is concave toward the inner side of the workpiece 10, and is detected by, for example, forming a continuous region corresponding to the distance difference information between the position indicated by the first distance information and the position indicated by the second distance information on the inner side of the workpiece. , you can measure it. For example, the first distance information is the distance from the rotation center of the workpiece 10 to the edge 11. The distance difference information is the value obtained by subtracting the first distance information from the second distance information, and the distance difference information of the edge 11 is positive. The continuous area is detected as a concave continuous area. Further, the size of the distance difference information may be detected as a concave continuous area as compared with a continuous area having a predetermined threshold value which is determined by the value of the measurement error. The threshold value at this time is set to a value before and after, for example, 0. This is also the same when detecting the defective portion of the edge 11. In addition, this method is the same when detecting continuous convex regions.

In addition, a threshold value indicating a lower limit value and an upper limit value of the distance from the edge may be used instead of the threshold value indicating the distance lower limit value from the edge of the notch portion to determine the distance difference information of the continuous region. Whether the maximum value or the value before and after the value is a value in the range indicated by the threshold value, and the case where the value of the range is used instead of the region indicating the distance difference information having a threshold value or more from the edge of the notch portion The result of the judgment. Similarly, a critical value indicating the lower limit of the width may be used instead of the threshold value indicating the lower limit value and the upper limit value, and the width of the continuous region may be equal to or greater than the lower limit value of the width. The judgment result when the width of the notch portion is within the critical value range of the lower limit value and the upper limit value. Further, when judging whether or not the continuous region is a notch portion, it is also possible to determine only the distance or width from the edge instead of determining the distance and width from the edge. In addition, these combinations can be appropriately changed. This way is also the same when detecting the defective portion of the edge 11.

In addition, the gap detecting device 1036 may also detect, in the difference between the first distance information and the second distance information calculated by the computing device 1035 (ie, the distance difference information), that the value of the value is larger than a pre-specified first threshold value. The portion of the rotation angle information corresponding to the detected portion is obtained as information indicating the notch portion of the workpiece 10. The distance from the edge of the notch when the workpiece 10 is a circular shape having no irregularities is generally deeper than the distance such as collapse of the edge of the workpiece 10. Moreover, the depth of the notch portion (the distance from the edge) is a known value. Therefore, by setting the first critical value to a depth such as a collapse (distance from the edge) to be large, and a known value of the depth of the notch (the distance from the edge) is small, it is possible to detect One or more distance difference information corresponding to the notch portion, and information indicating the notch portion can be obtained.

The first threshold may also be a threshold such as the magnitude of the value. The detection of the distance difference information whose value is larger than the first threshold value may be, for example, the detection of the distance difference information in which the value of the absolute value is larger than the first threshold value. This situation is also the same for the second critical value described later.

Further, whether the value of the distance difference information corresponding to the notch portion becomes a positive value or a negative value, the second distance information is subtracted from the first distance information to obtain the distance difference information, or the first distance information is subtracted from the second distance information. It is different to get the distance difference information.

The notch detecting device 1036 may group the plurality of rotation angles when detecting a plurality of distance difference information whose value is larger than the first threshold value and the corresponding rotation angle is continuous. . Further, the gap detecting device 1036 can also acquire information indicating the notch portion indicating the information of the group. The information indicating the group is, for example, information indicating a range corresponding to the rotation angle, or a set corresponding to the rotation angle, or a group identifier given to the corresponding rotation angle. This situation is also the same for the information indicating the defective portion group described later. Further, one group of the rotation angles at this time may be, for example, a plurality of rotation angles corresponding to a plurality of positions on one notch portion or information indicating a range of the notch portion.

Further, the notch detecting device 1036 may have a region in which the magnitude of the detected value is larger than the first critical value and the corresponding rotation angle has a plurality of consecutive distance difference information in which two or more numerical values are specified in advance as the notch portion. In general, since the notch portion is set to a wide range on the edge of the workpiece 10, the detection is performed in this manner, and the notch portion can be more reliably detected.

The notch detecting device 1036 can also detect a plurality of notches for one workpiece 10.

The defect detecting device 1037 obtains information on the defective portion of the edge 11 of the workpiece 10 using the difference between the first distance information and the second distance information calculated by the computing device 1035 (i.e., the distance difference information).

For example, the defect detecting device 1037 calculates the difference between the obtained first distance information and the second distance information and one or more critical values regarding the size of the defective portion using the computing device 1035 to detect the defective portion of the edge 11 of the workpiece 10 and obtain Information about the defect portion detected.

For example, the defect detecting device 1037 detects, for example, the distance difference information calculated by the computing device 1035, the distance difference information indicating the value of the value from the edge of the defect from the edge, and the obtained Information about the defective part. Further, it is also possible to use a critical value indicating the lower limit value of the depth of the defective portion and a critical value indicating the lower limit value of the height of the defective portion instead of using the lower limit value of the distance from the edge of the defective portion as a critical value to detect The value is not the distance difference information indicating the value between the critical value indicating the depth lower limit value of the defective portion and the critical value indicating the lower limit value of the defect portion height.

Furthermore, the defect detecting device 1037 can also calculate the obtained distance difference information, for example, using the distance difference information at the edge 11 of the workpiece 10 toward the inner side of the workpiece 10 or convex toward the outer side of the workpiece 10. The continuous area is detected, and it is determined whether the size of the distance difference information value in the concave area or the convex area is greater than or equal to the critical value of the lower limit value of the defect portion from the edge, and if there is a portion above the critical value, The concave or convex region is judged to be a defective portion, and information on the defective portion, such as information on a range of rotation angles, is obtained.

Further, the defect detecting device 1037 can also calculate the obtained distance difference information, for example, a continuous region that is concave toward the inner side of the workpiece 10 at the edge 11 of the workpiece 10, or a convex continuous toward the outer side of the workpiece 10. The region is detected, and whether the width of the concave region or the convex region is greater than or equal to a critical value of the lower limit value of the defect portion width, and if the value is greater than or equal to the lower limit value, the concave region or the convex region is determined as a defective portion. And get information about the defect.

Further, when the continuous region is concave or convex, different critical values may be used, or the same critical value may be used as one or more critical values for detecting whether or not the continuous region is a defective portion. .

Alternatively, the determination based on the depth may be combined with the determination based on the width. When the distance from the edge is equal to or greater than the critical value and the width is equal to or greater than the critical value, the continuous region is determined as the defective portion.

Furthermore, the defect detecting device 1037 may also specify a second threshold value in advance in the difference between the first distance information and the second distance information calculated by the computing device 1035 (ie, the distance difference information). The large portion is tested, and then information about the detected portion can be obtained as information on the defective portion of the edge 11 of the workpiece 10.

The second critical value is a critical value for discriminating the defective portion of the edge 11 of the workpiece 10 and the defective portion of the edge 11 of the workpiece 10. For example, in the portion where the edge 11 of the workpiece 10 does not have a defect, the difference between the values of the first distance information and the second distance information is the difference in the degree of measurement error when the first distance information is obtained. On the other hand, in the portion where the defect exists, the difference is a difference sufficiently larger than the measurement error. Therefore, by setting the second critical value to, for example, a value larger than the measurement error, the defective portion of the edge 11 of the workpiece 10 can be detected.

The information about the detected portion (that is, regarding the detected distance difference information) means, for example, information indicating a rotation angle corresponding to the detected distance difference information, or the detected distance difference information and the corresponding rotation angle. Group of information. For example, the detected distance difference information may be information indicating the depth or height of the defective portion.

Further, whether the defective portion protrudes from the outer side of the workpiece 10 like a burr or the portion which is recessed toward the inner side of the workpiece 10 like a collapse is judged by, for example, a reference point of the first distance information and the distance difference information code. Therefore, the defect detecting device 1037 can also determine whether the defective portion is convex outward by the distance difference information code. Moreover, the defect detecting device 1037 can also obtain information on the defective portion having the detection result again.

In addition, after detecting the plurality of distance difference information whose value is larger than the second threshold value and the corresponding rotation angle is continuous, the defect detecting device 1037 may also use the plurality of distance difference information or a plurality of rotation angles. Grouping. Moreover, the defect detecting device 1037 can also obtain the defective portion information about the information indicating the group. A group of distance difference information in such a case may also be, for example, distance difference information for a plurality of positions on one defective portion. Further, a group of the rotation angles at this time may be, for example, a plurality of rotation angles indicating a plurality of positions on one defective portion, or information indicating a range of defective portions.

Further, in the case of the above-described processing, the notch portion such as the oriented flat portion of the workpiece 10 is also detected as a defective portion. In the case where the notch portion is detected as a defective portion and there is no problem, the above-described processing may be used. However, when the notched portion is detected as a defective portion, the notched portion is not detected as a defective portion, or the notch must be formed. The department is excluded from the defect.

Therefore, for example, the defect detecting device 1037 detects the plurality of distance difference information in which the corresponding rotation angle is more than two or more predetermined numbers in the distance difference information obtained by the second threshold value detection. The predetermined number is set to a number corresponding to, for example, the length (i.e., the rotation angle) of the notch portion provided in the workpiece 10. Moreover, by eliminating the plurality of distance difference information detected in this manner from the defective portion, the notch portion can be removed, and the defective portion can be detected with excellent precision.

Alternatively, the notch detecting device 1036 may exclude the obtained rotation angle indicating the notch portion, and perform the detection processing of the defective portion using the second critical value similar to the above only for the distance difference information of the corresponding rotation angle.

Alternatively, the defect detecting device 1037 may also use the difference between the first distance information and the second distance information calculated by the computing device 1035 (ie, the distance difference information) that the value is smaller than a pre-specified first threshold value. And detecting a portion having a larger value than the second critical value (the value of which is smaller than the first critical value). Then, information on the detecting portion is obtained as the defective portion information on the edge 11 of the workpiece 10. Further, the defect detecting device 1037 can also detect the distance difference information having the same value as the first critical value. The first critical value is, for example, a critical value for detecting the notch portion of the workpiece 10 as described above. The second critical value is the same as described above. In this way, the distance difference information larger than the first threshold value can be not detected, and the defective portion can be detected with excellent precision in a manner that does not include the notch portion.

The output unit 104 outputs information for acquiring the workpiece alignment position by the acquisition unit 103. Furthermore, the output unit 104 outputs the information obtained by the acquisition unit 103 for the orientation of the specific workpiece. Further, the output unit 104 outputs the information about the defective portion acquired by the acquisition unit 103. For example, the output unit 104 outputs the correction information acquired by the acquisition unit 103 for the information of the workpiece alignment position. Further, the output unit 104 outputs the information indicating the notch portion of the specific workpiece orientation information acquired by the acquisition unit 103. These outputs may also have an identifier for the workpiece 10.

The output here includes the display of the display, the projection using the projector, the sound output, the illumination of the warning light, the printing by the printer, the transmission to the external device, the storage of the recording medium, and the processing result to other processing devices. Or other concepts such as submitting programs. The output unit 104 can be realized by, for example, an output device, a driver of the output device, or the like. This case is also the same in the distance difference correlation output device 1039 and the like which will be described later.

For example, the output unit 104 may output information for aligning the position of the workpiece 10 and information for specifying the orientation of the workpiece 10 to the workpiece transport device 2 to be described later. Moreover, the workpiece transport device 2 can also direct the workpiece 10 by correcting the orientation or position of the workpiece 10 when the workpiece 10 is taken out from the edge position detector 102, or the workpiece 10 is transported using the information, or when the workpiece 10 is placed at a predetermined location. Place the appropriate direction in the appropriate position.

Further, for example, the output unit 104 may transmit the alignment position information of the workpiece 10 and the orientation specific information of the workpiece 10 to the edge position detector 102 and the like. By using this information, for example, the edge position detector 102 changes the position or orientation of the workpiece 10 to an appropriate position or orientation, and the workpiece 10 is sent to the workpiece transport device 2, and the workpiece transport device 2 can place the workpiece 10 in an appropriate orientation. In the right place.

For example, the output unit 104 can appropriately correct the position of the workpiece 10 when the workpiece 10 is used by outputting the correction information, and the workpiece transport device 2 or the like that receives the correction information, so that the center of rotation of the workpiece 10 becomes the center of the workpiece 10. For example, the workpiece conveyance device 2 or the like can be output to the workpiece conveyance device 2 or the like that transports the workpiece 10, and the workpiece transfer device 2 or the like can be corrected to the center of the workpiece 10 and the workpiece 10 can be conveyed. Further, the correction information may be output to the edge position detector 102 or the like having a moving device (not shown) or the like for correcting the position of the workpiece 10, and the turntable 52 may be moved or rotated by the edge position detector 102 or the like. When the workpiece 10 is delivered to the workpiece transport device 2, the position of the workpiece 10 is moved so that the center of rotation becomes the center of the workpiece 10.

Further, by outputting the information indicating the notch of the workpiece by the output unit 104, the workpiece transport device 2 or the edge position detector 102 that receives the correction information can appropriately correct the orientation of the workpiece 10, and the orientation of the workpiece 10 can be specified in advance. The orientation.

The output unit 104 may perform an abnormality output in accordance with the information on the defective portion acquired by the acquisition unit 103. The so-called abnormal output refers to an output when the edge 11 of the workpiece 10 has an abnormality. The abnormal output may be an output indicating that the edge 11 of the workpiece 10 has an abnormality, or may be an output for instructing an external device or the like to perform an abnormal operation.

The abnormal output is, for example, an output indicating a warning such as an abnormality. The output of the warning is, for example, an output of a warning sound, a warning indication of a monitor or the like, and lighting of a warning light. The output of the warning may also have an identifier of the workpiece 10 that has detected the defective portion, and the like.

Furthermore, the abnormal output may also be an output indicating that the operation of the workpiece 10 is stopped. The operation of the workpiece 10 means that the workpiece 10 is transported by the workpiece transport device 2, the edge position detector 102, and the like, and the workpiece 10 is positioned, and the object to be transported by the workpiece transport device 2 is subjected to a predetermined process or the like for the workpiece 10. The output unit 104 outputs, for example, an instruction to stop the operation to the workpiece transport device 2, the edge position detector 102, or a processing device (not shown) that performs processing on the workpiece 10. In this way, the operation of the workpiece 10 having an abnormal edge can be stopped.

Further, the abnormal output may be, for example, an output of a recovery instruction of the workpiece 10 in which an abnormality is detected. Here, the collection is carried out, for example, by moving it to a predetermined collection place, excluding the workpiece 10 from a general treatment route, avoiding it, and removing it from the conveyance path. For example, the output unit 104 outputs a recovery instruction of the workpiece 10 in which an abnormality is detected to the workpiece conveyance device 2 or the like. The workpiece conveyance device 2 conveys the workpiece 10 to a predetermined collection site or the like in accordance with the instruction, so that the subsequent operation or processing of the workpiece in which the abnormality is detected is not performed. In addition, it is also possible to perform defect inspection or the like on the recovered workpiece.

The output unit 104 may perform an abnormality output when, for example, the acquisition unit 103 acquires information on one defective portion. Furthermore, the output unit 104 may perform an abnormality output when the information about the defective portion acquired by the acquisition unit 103 meets the predetermined condition. For example, it is possible to determine whether or not the acquisition unit 103 has detected k (k is an integer of 2 or more) or more defective portions specified in advance by the acquisition unit 103, and determines that more than k defects have been detected. In the case of a defective part, an abnormal output is performed. Further, when the information on the defective portion acquired by the acquisition unit 103 includes the defective portion information indicating that the maximum value from the edge calculation distance is equal to or greater than a predetermined value, the abnormality output is performed.

The evaluation related information accepting unit 105 accepts evaluation related information which is related information for evaluating the defective portion of the edge 11 of one or more workpieces 10. The evaluation related information accepting unit 105 preferably accepts evaluation related information on a plurality of workpieces 10.

The so-called evaluation related information refers to, for example, information used to evaluate one or more critical values for the defective portion detection processing. One or more critical values for the defective portion detecting process are, for example, one or more critical values regarding the size of the defective portion.

The evaluation-related information refers to information indicating that there is actually a defect in the workpiece 10 (for example, the workpiece 10 in which the acquisition unit 103 fails to acquire information on the defective portion), for example, in the portion of the workpiece processing apparatus 1 that is determined to be non-defective. Further, the evaluation-related information refers to information indicating that there is actually a defect in the workpiece 10 (for example, the workpiece 10 in which the acquisition unit 103 has obtained information on the defective portion), for example, in the workpiece processing apparatus 1 determined to have a defective portion, or Has it been assessed as defective information? For example, the information indicating whether or not the defect is actually present may be information indicating whether the workpiece 10 can be normally used in the processing after the workpiece processing apparatus 1 is processed (for example, information indicating whether it is not broken), or indicates that the defect is detected. Part of the workpiece 10 performs information on the result of re-inspection (also including visual inspection, etc.) of the defective portion detection. The workpiece 10 in which the defective portion is detected may also be the workpiece 10 recovered via the abnormal output.

Moreover, the evaluation related information may also be a kind of information, which includes, for example, a positive or negative information indicating that the defective part is detected correctly or incorrectly. The correctness information is information indicating whether or not the detection result of the defective portion of the workpiece processing apparatus 1 is correct. For example, the workpiece 10 that has not obtained the information on the defective portion by the acquisition unit 103 evaluates whether or not there is a defect. If there is no defect, the defect information indicating that the defective portion of the acquisition unit 103 is detected in the evaluation related information is detected, and if there is a defect, Stores information indicating that the defective part is incorrectly detected. Further, for example, the workpiece 10 that has acquired the information on the defective portion of the acquisition unit 103 evaluates whether or not the defect is actually present. If there is no defect, the defective portion of the evaluation related information storage indicating acquisition unit 103 detects the incorrect information, and if there is a defect, Store the information indicating that the defective part is correct. The correctness of the defective portion detection can be judged from, for example, the result of the re-inspection of the workpiece 10 described above or information indicating whether or not the workpiece 10 can be normally used in subsequent processing.

Further, the evaluation related information may further have information on subsequent program processing of the workpiece processing apparatus 1. For example, it may be information indicating the type (for example, heat treatment, CVD, CMP, etching, etc.) of one or more subsequent program processing, the identifier of the device for processing, the processing time or pressure of the processing, the temperature, and the like. Parameters, type or concentration of gas used for treatment, type or concentration of liquid used for treatment, etc.

Further, the evaluation related information may also include information on the workpiece 10 such as the specification of the workpiece 10, the kind or composition of the workpiece material.

Further, the evaluation related information may have information on the defective portion acquired by the obtaining unit 103, for example, information on the size of the defective portion, information on the same defective portion obtained by re-inspection of the workpiece 10, and the like.

Also, the evaluation related information may have one or more critical values for processing the defective portion to process the size of the defective portion. However, in the case where the one or more threshold values in the utilization of the acquisition unit 103 are evaluated, and in the case where the related information is evaluated for the workpiece 10 that has undergone the defect portion detection processing by the current threshold value, the related information is evaluated. It may or may not have a critical value.

The so-called acceptance includes reception of information input from an input device such as a keyboard, a mouse, a touch panel, information received via a wired or wireless communication line, and information read from a recording medium such as a compact disc or a magnetic disk or a semiconductor memory. Acceptance and other concepts.

The evaluation related information accepted by the evaluation related information receiving unit 105 is stored in, for example, a storage unit (not shown).

The evaluation-related information accepting unit 105 can be realized by inputting a driver of the device, a control software for the menu screen, or a receiving device.

The setting unit 106 uses the evaluation related information to acquire one or two or more critical values for the defective portion detection for the size of the defective portion. Then, using the obtained threshold value, the threshold value for the size of the defective portion detection by the acquisition unit 103 is set. The setting herein also includes, for example, an update of one or more threshold values (for example, overwrite) for the defective portion detection by the acquisition unit 103 set by a default (default default) or the like. .

For example, when the acquisition unit 103 has used the critical value of the distance from the edge 11 with respect to the defective portion and detects the defective portion of the workpiece 10, it is determined that one or two or more predetermined workpieces 10 of the defective portion are not detected. When the evaluation-related information indicating the information of the workpiece 10 determined to be the actual defective portion has been accepted by the evaluation-related information receiving unit 105, the setting unit 106 acquires the defective portion from the edge 11 which is used by the obtaining unit 103. The value of a threshold value of the calculated distance is more likely to detect the critical value of the defective portion (for example, the critical value of the smaller value), and the threshold value used by the acquisition portion 103 with respect to the distance from the edge 11 is updated with the threshold value. In this way, a portion having a smaller change in the distance from the edge 11 can also be detected as a defective portion, and the detection omission of the defective portion can be reduced. Further, in this case, it is also possible to accept the evaluation related information of the information indicating the distance from the edge 11 obtained by the re-inspection or the like, and use the workpiece which is not defective but which is actually defective. The information indicating the distance from the edge 11 of the defective portion is 10, and the critical value at which the defective portion can be detected is obtained.

Further, for example, in the one or more predetermined number of workpieces 10 in which the defective portion is detected, in the re-inspection or the like, the evaluation-related information including the information indicating that the defective portion is not actually detected has been accepted for the evaluation-related information. When the unit 105 is accepted, the setting unit 106 may acquire a threshold value (for example, a critical value for obtaining a larger value) that is more difficult to detect the defect than the value of the threshold value used by the acquisition unit 103 for the defect portion from the edge 11 . With this threshold value, the critical value obtained by the acquisition unit 103 from the edge 11 is used as the threshold value for the distance from the edge.

Furthermore, the setting unit 106 may perform machine learning using the evaluation related information having the correctness information and the critical value, and acquire one or more critical values regarding the size of the defective portion. For example, the setting unit 106 uses the error information of the plurality of pieces of the workpiece evaluation information received by the evaluation-related information receiving unit 105, one or more critical values regarding the size of the defective portion, and the subsequent program processing of the workpiece processing apparatus 1 described above. The information or a combination of one or more pieces of information on the information of the workpiece 10 (for example, information such as the type of the workpiece) or information on the defective portion is used as the learning data for learning. In addition, when the workpiece processing apparatus 1 performs processing for one or more workpieces 10, etc., when the defect detection threshold value is set, the workpiece 10 is subjected to information on the subsequent program processing of the workpiece processing apparatus 1 in the same manner as the above-described learning, or One or more pieces of information about the workpiece 10, information about the defective portion, and the like, and a plurality of threshold values for the size of the defective portion (for example, a critical value for a critical value or width from the edge) Each pair of the critical values is input through the evaluation-related information receiving unit 105 or the like, and each pair is evaluated using the learning result. Then, when an evaluation result having positive and negative information indicating that the defective portion can be correctly judged is obtained, one of the critical values included in the pair of pairs (for example, a maximum critical value or the like) may be obtained as one of the size of the defective portion. The above critical value. Further, the threshold value may be set as a critical value for detecting a defective portion.

In this way, it is possible to detect the defective portion of the edge 11 of the workpiece 10 with excellent precision using an appropriate threshold value in accordance with the processing of the subsequent program, the type of the workpiece, and the like.

Regarding learning using learning data, a learning model such as SVR is a well-known technique that can be utilized. At this time, the learning data can also be teacher data.

Further, the setting unit 106 may appropriately obtain the correctness information from the information on the defective portion of the workpiece 10 and the information indicating whether or not the edge 11 of the workpiece 10 is actually defective.

Furthermore, in the above, the processing result of the workpiece 10 (for example, whether the workpiece 10 is broken or the like) can be learned to replace the correct information, and the distance from the edge 11 of the defective portion of the workpiece 10 is learned to replace the critical value. At this time, one or more pieces of information having information on the subsequent processing of the workpiece processing apparatus 1, or information on the workpiece 10, or information on the defective portion, and the plurality of distances from the edge of the defective portion are transmitted. The plurality of groups can input the learning result, and can obtain the distance from the edge of the defect portion in which the subsequent program is not damaged. For example, the defect portion can be appropriately detected by using the distance as a critical value. In addition, it is also possible to set a critical value for the specification used for defect detection by performing machine learning other than these, and there is no doubt about it.

Further, the setting unit 106 may generate a prediction formula of a critical value using a combination of a threshold value used in the past for evaluating the related information, a process of the subsequent program, or a parameter obtained by the type of the workpiece, or the like, using multiple regression analysis or the like. The predictive formula is used to calculate an appropriate threshold corresponding to subsequent program processing, or workpiece type, etc., to set the calculated threshold.

Next, an example of the edge position detector 102 will be described with reference to Fig. 3 .

The edge position detector 102 is provided with a turntable rotation mechanism 53 for rotating the turntable 52 on which the workpiece 10 is placed, and the turntable rotation mechanism 53 is driven by the electric motor 54. The edge detecting portion 55 that detects the edge position of the workpiece 10 has a light projector 55a and a sensor 55b. The sensor 55b is, for example, a photo sensor. The sensor 55b is a device that continuously changes the output in accordance with the specific amount of received light, and can be used as an output pair such as a CCD (Charge Coupled Device) or a PSD (Position Sensitive Detector, trade name). A device in which the amount of light changes linearly. The sensor 55b corresponds to, for example, the sensor 15 of Fig. 2(a). The sensor 55b of the edge detecting unit 55 emits light by the light projector 55a, and reduces the amount of light by the workpiece 10 immediately below, thereby generating an output corresponding to the amount of light reached. This output becomes an index indicating the edge position of the workpiece 10. The encoder 56 detects the amount of rotation of the electric motor 54 and outputs a digital signal, and the amount of rotation of the electric motor 54 is equivalent to the rotation angle of the turntable 52. The storage unit 57 sets the output of the sensor 55b and the output of the encoder 56 as one pair of data, and stores it according to a certain rotation angle of the turntable 52. Further, the storage portion 57 may convert the output of the sensor 55b into a distance from the center of rotation of the workpiece 10 to the edge 11 and output it. In this specific example, the storage unit 57 sets the rotation angle and the pair of first distance information obtained by converting the output of the sensor 55b into the distance from the center of rotation of the workpiece 10 to the edge 11 as the first rotation distance information, and stores The first rotation distance information storage unit 101. When the output of the sensor 55b is an analog signal, an A/D (analog/digital) converter or the like may be provided between the storage unit 57 and the sensor 55b.

Further, the edge position detector 102 mentioned here is only an example, and in the present invention, as long as it is a device capable of acquiring a plurality of first rotation distance information about the workpiece 10 similarly to the edge position detector 102, other edge position detection is performed. The device 102 can also be used.

Further, the edge position detector 102 herein is represented as a part of the workpiece processing apparatus 1, but the edge position detector 102 may be set as, for example, a device different from the workpiece processing apparatus 1.

Next, an example of the workpiece transport system of the present embodiment will be described with reference to Fig. 4 .

The workpiece transport system 1000 includes a workpiece processing device 1 and a workpiece transport device 2 . The conveyance path 1001 of the workpiece conveyance system 1000 is covered with, for example, a cover (not shown).

The workpiece transport device 2 is a device that transports the workpiece 10. For example, the workpiece transport device 2 is provided with a transport arm or the like that can move the workpiece in the horizontal direction or the vertical direction. The workpiece 10 can be conveyed by moving the transport arm while the workpiece 10 is placed. The workpiece conveying device 2 itself may have a configuration that can be moved in the horizontal direction or in the vertical direction. However, the structure of the workpiece transport device 2 and the like are not limited.

The workpiece transport device 2 transports the workpiece 10 to the workpiece processing device 1. The conveyance of the workpiece 10 to the workpiece processing apparatus 1 means that the workpiece 10 is conveyed to the workpiece processing apparatus 1 during the conveyance of the workpiece 10, and the workpiece is delivered to the workpiece processing apparatus 1, and then received from the workpiece processing apparatus 1. The workpiece 10 is transported to other locations.

The workpiece transport device 2 is, for example, a device that performs transport from the first location to the workpiece processing apparatus 1 and transport from the workpiece processing apparatus 1 to the second location. The first place is a place where the workpiece 10 as a conveyance target is disposed. The second location is the location of the destination of the workpiece 10 to be transported. Further, the workpiece transporting apparatus 2 may perform the transport from the workpiece processing apparatus 1 to the third location, and the third location serves as a place for mounting the workpiece 10 for recycling. For example, the workpiece transport device 2 may transport the workpiece 10 to any of the second place or the third place in accordance with an instruction input from the outside or the like.

Here, as an example, the workpiece transport device 2 transports the workpiece 10 accommodated in the container 4 as the first place to the turntable 52 of the workpiece processing apparatus 1, and is placed on the turntable 52 of the workpiece processing apparatus 1. The case where the workpiece 10 is transported to the mounting table 6 of the pre-designated processing executing device (not shown) as the second place or the recycling container 5 as the third place will be described. In this case, for example, the workpiece transport device 2 receives the abnormal output output from the output unit 104 of the workpiece processing apparatus 1 via a receiving unit or the like (not shown), and immediately loads the abnormality output when it is received, and is placed on the workpiece processing apparatus 1 at the time of receiving the abnormal output. The workpiece 10 on the turntable 52 is conveyed to the recovery container 5 as the third place, and the workpiece 10 is recovered. When the abnormal output is not received, the workpiece 10 placed on the turntable 52 of the workpiece processing apparatus 1 is transported to The mounting table 6 of the execution device (not shown) of the second location is pre-designated.

Further, the workpiece transport apparatus 2 may include: means for receiving information for alignment of workpieces such as correction information outputted from the output unit 104 of the workpiece processing apparatus 1 and correcting the position of the workpiece 10; or receiving the output of the workpiece processing apparatus 1. The notch portion outputted by the portion 104 indicates a device such as information that faces the specific information and corrects the orientation of the workpiece 10.

Further, the workpiece transfer device 2 may include a device for receiving an abnormal output output from the output unit 104 of the workpiece processing device 1 and stopping the conveyance of the workpiece 10 in response to the received abnormal output.

Further, the configuration of the workpiece conveying device 2 is a well-known technique, and thus detailed description thereof is omitted here.

The mounting table 6 is a platform on which a workpiece 10 to be processed is placed on a device (not shown) that performs predetermined processing on the workpiece 10. The mounting table 6 corresponds to the second location described above. The device that performs the pre-specified processing may also be any device such as a CVD device or a surface grinding device. For example, a device that performs predetermined processing on the workpiece 10 placed on the mounting table 6 is used. .

The container 4 is a container for receiving and transporting one or more workpieces 10. The container 4 corresponds to the first location described above. The container 4 is for accommodating the workpiece 10 to be processed by the device (not shown). The workpiece 10 conveyed by the workpiece transport device 2 and placed on the mounting table 6 is housed in the container 4. The container 4 is, for example, a cassette that houses and transports one or more workpieces 10. The container 4 is, for example, a so-called FOUP (Front Open Unified Pod). The container 4 can be attached to or detached from a cover (not shown) of the transport path 1001. The cover of the conveyance path 1001 is provided with, for example, a sill (not shown) for mounting the container 4 or the like.

The container 5 is a container for housing and transporting one or more workpieces 10. The container 5 corresponds to the third place described above. The container 5 is a container for accommodating the workpiece 10 collected by the abnormal output output by the output unit 104. The container 5 accommodates the workpiece 10 conveyed by the workpiece transport device 2 in response to an abnormal output. The other constitution and the like of the container 5 are the same as those of the container 4.

Here, the case where the first location is the container 4, the second location is the mounting table 6, and the third location is the container 5 will be described here, but each location may be a place for any purpose. For example, the first location may be a mounting table or the like of an execution device that performs predetermined processing on the workpiece. Moreover, the second location may also be the same container as the container 4. Further, the third point may be a mounting table or the like for performing an inspection device for inspection of a workpiece (not shown).

Next, an operation example of the workpiece processing apparatus 1 will be described using the flowchart of Fig. 6 . Further, since the processing for obtaining the first rotational distance information by the edge position detector 102 is well known, the description thereof will be omitted. Further, the processing of storing the plurality of first rotation distance information acquired by the edge position detector 102 with respect to the workpiece 10 in the first rotation distance information storage unit 101 will be omitted here. At the same time, the case where the setting unit 106 acquires the critical value of the defect portion specification without using the machine learning will be described as an example.

(Step S100) The workpiece processing apparatus 1 determines whether or not the correction information, the information indicating the notch portion, and the information on the defective portion are output. For example, the workpiece processing apparatus 1 determines whether the first rotation distance information storage unit 101 has been stored for a plurality of first rotation distance information corresponding to one week of the workpiece 10 obtained for one workpiece 10, and if it has been stored, it is determined that the output is the above. The timing of the information; if not stored, it is judged as a non-output timing. Alternatively, when the acquisition processing of the plurality of first rotation distance information about one workpiece 10 executed by the edge position detector 102 is completed, it may be determined as an output timing. When the output is made, the process proceeds to step S101; if not, the process proceeds to step S120.

(Step S101) The synthesizing means 1031 compares the difference of the corresponding rotation angles in the plurality of first distance information included in the plurality of first rotation distance information corresponding to one workpiece 10 by four first distance information which are successively different by 90 degrees. Synthesize separately and obtain a plurality of synthetic distance information. For example, the synthesizing device 1031 continuously divides the plurality of first rotation distance information in which the rotation angle values are continuous into a plurality of groups in such a manner that the range of the rotation angle value is 90 degrees, and the arrangement order of the divided groups is the same. The first distance information of the first rotation distance information is synthesized with each other. The synthesis here refers to, for example, the calculation of the average value. The synthesizing device 1031 associates the acquired combined distance information with four rotation angles corresponding to the four first distance information that have been synthesized, and stores them in a storage unit (not shown).

(Step S102) The composition processing device 1032 substitutes 1 as the value of the counter p.

(Step S103) The composition processing device 1032 detects the p-th synthetic distance information from the smaller value of the combined distance information synthesized in step S102. The synthesis processing device 1032 gives, for example, the detected synthetic distance information, information indicating the detected flag or the flag indicating the deletion. Instead, the p-th synthetic distance information may be detected instead of the synthetic distance information indicating the minimum value. When deleting, the synthetic distance information indicating the minimum value is detected and deleted again in the remaining synthetic distance information that has not been deleted next time.

(Step S104) The synthesis processing means 1032 increments the value of the counter p by one.

(Step S105) The composition processing device 1032 determines whether or not the value of the counter p is a predetermined number or more specified in advance. If it is a predetermined number or more, the process proceeds to step S106; if it is not more than a predetermined number, the process returns to step S103.

(Step S106) The composition processing device 1032 substitutes 1 for the value of the counter q.

(Step S107) The synthesis processing device 1032 detects the qth synthesized distance information from the larger value in the synthesized distance information synthesized in step S102. The synthesis processing device 1032, for example, assigns information such as a detected flag or a flag indicating the deleted flag to the detected synthetic distance information. In addition, the combined distance information indicating the maximum value may be detected or deleted instead of detecting the qth synthesized distance information. If it is deleted, the remaining synthetic distance information that has not been deleted next time will be detected and deleted again.

(Step S108) The synthesis processing means 1032 increments the value of the counter q by one.

(Step S109) The composition processing device 1032 determines whether or not the value of the counter q is equal to or greater than a predetermined number. If it is a predetermined number or more, the process proceeds to step S110; if it is not more than the predetermined number, the process returns to step S107.

(Step S110) The composition processing device 1032 detects the synthesized distance information that is not detected (or not deleted) in steps S103 and S107 and that is specified in advance by a predetermined number or more.

(Step S111) The synthesis processing means 1032 detects a synthesized distance information (for example, the synthesized distance information in the center) from the phase continuous synthesis distance information which has been detected in the step S110, and obtains the detected combined distance information as a synthesis source. 4 first distance information and a rotation angle corresponding to one of the first distance information. For example, the smallest value is obtained as the rotation angle among the rotation angles corresponding to the four first distance information.

(Step S112) The correction information acquisition device 1033 acquires correction information for moving the rotation center of the workpiece 10 to the center of the workpiece 10 using the four first distance information acquired in step S111 and one rotation angle. For example, the correction information is obtained using the above equations (1) and (2). Then, the acquired correction information is temporarily stored in a storage unit (not shown).

(Step S113) The second distance information acquisition device 1034 acquires the relationship between the rotation angle when the workpiece 10 has a circular shape without the unevenness of the edge 11 and the second distance information corresponding to the rotation angle, using the correction information acquired in step S112. Relationship. For example, the correction information is substituted into the coefficient of the above formula (3) to obtain an ideal curve.

(Step S114) The second distance information acquiring means 1034 substitutes the plurality of rotation angles corresponding to the plurality of first rotation distance information corresponding to the one workpiece 10 into the relational expression obtained in the step S113, and obtains the rotation angles by one rotation angle. Second distance information. Next, the plurality of second rotation distance information having the rotation angle and the second distance information is stored in a storage unit (not shown).

(Step S115) The computing device 1035 acquires a plurality of distance difference information indicating the difference between the first distance information and the second distance information corresponding to the same rotation angle.

(Step S116) The notch detecting means 1036 acquires the information indicating the notch portion using the plurality of distance difference information and the first critical value.

(Step S117) The defect detecting device 1037 performs a process of acquiring the defective portion information using the plurality of distance difference information and the second critical value.

(Step S118) The output unit 104 performs abnormal output in accordance with the information on the defective portion. In addition, the abnormal output is performed in accordance with the information on the defective portion, and the concept of abnormal output is not performed without information on the defective portion, or when the information on the defective portion is not obtained.

(Step S119) The output unit 104 outputs the correction information, the information indicating the notch portion, and the information on the defective portion. Then, it returns to step S100. Further, when the abnormality output is performed in step S118, the output unit 104 may not output information indicating the correction information or the notch portion. Further, when the defect detecting means 1037 does not acquire the information on the defective portion, the output portion 10 may not output the information on the defective portion.

(Step S120) The evaluation related information accepting unit 105 determines whether or not the evaluation related information has been accepted. If it has been accepted, the process proceeds to step S121; if not, the process proceeds to step S122.

(Step S121) The evaluation related information accepting unit 105 stores the evaluation related information accepted in step S120 in a storage unit (not shown). Then, it returns to step S100.

(Step S122) The setting unit 106 determines whether or not it is a timing to set one or more critical values regarding the specifications of the defective portion. For example, when the threshold value setting instruction is received from the user via a receiving unit or the like (not shown), it is determined as the setting timing, and when it is not accepted, it is determined to be a non-time. In addition, when the evaluation related information is received in step S120, or when the predetermined number of evaluation related information is accepted in step S121, the setting timing may be determined. If the timing is set, the process proceeds to step S123; if the timing is not set, the process returns to step S100.

(Step S123) The setting unit 106 acquires one or more critical values regarding the specifications of the defective portion using the evaluation related information stored in step S121.

(Step S124) The setting unit 106 sets the threshold value obtained in step S123 as the threshold value to be used when the acquisition unit 103 detects the defective portion. For example, the threshold value is stored in a storage unit (not shown). Further, when the threshold value (for example, the threshold value for the same processing) corresponding to the threshold value acquired in step S123 is already set (for example, when a critical value of default is set), the setting unit 106 Then the threshold is updated. This update can be set. Next, the process returns to step S100.

In addition, in FIG. 6, the setting unit 106 acquires a critical value without using machine learning. However, when the setting unit 106 acquires a critical value by machine learning, for example, the setting unit 106 uses the evaluation correlation stored in step S121. The information is learned, and the information about the subsequent program processing of the workpiece processing apparatus 1 or the information about the workpiece 10, or the information about the defective portion, etc., which is the same as the evaluation related information learned by the information, is acquired before the threshold value is obtained in step S123. One or more of the information, and a pair of plural threshold values prepared in advance for one or more critical values regarding the size of the defective portion (for example, a critical value for the distance from the edge, or a critical value for the width), via The evaluation-related information receiving unit 105 accepts the result, and in step S123, the setting unit 106 acquires a critical value from the received information and the learning result. Further, a plurality of threshold values prepared in advance may be stored in advance in a storage unit or the like (not shown) by using an internal standard or the like.

In addition, in the flowchart of FIG. 6, the processing ends by the power-off or the insertion of the processing end.

Next, an operation example of the workpiece transport system 1000 will be described using the flowchart of Fig. 7 . Moreover, here, when the workpiece 10 is placed on the turntable 52 of the edge position detector 102 of the workpiece processing apparatus 1, the edge position detector 102 acquires a plurality of first rotation distance information for the workpiece 10, and takes the obtained rotation. The case 101 in which the distance information is stored in the first rotational distance information storage unit will be described as an example.

(Step S201) The workpiece transport device 2 takes out the workpiece 10 at the first location, for example, one workpiece 10 accommodated in the container 4, and transports it to the workpiece processing apparatus 1. Specifically, the workpiece is placed on the turntable 52 of the edge position detector 102.

(Step S202) The edge position detector 102 acquires a plurality of first rotation distance information for the workpiece placed on the turntable 52, and stores the obtained first rotation distance information in the first rotation distance information storage unit 101.

(Step S203) The workpiece processing apparatus 1 performs processing for acquiring correction information, information indicating a notch portion, processing of outputting information on a defective portion, and output of an abnormality. In addition, this processing corresponds to, for example, the processing of the workpiece processing apparatus 1 shown in step S100 to step S119 in the flowchart of FIG.

(Step S204) The workpiece conveyance device 2 determines whether or not the abnormal output has been received from the output portion 104 of the workpiece processing apparatus 1. When it has been received, the process proceeds to step S207; if it has not been received, the process proceeds to step S205.

(Step S205) The workpiece transport device 2 corrects and picks up the workpiece placed on the turntable 52 of the edge position detector 102 using the correction information output from the output unit 104 and the information indicating the notch portion, so that the position and direction are in accordance with the predetermined position. The location and direction. This correction can also change the workpiece support position or direction when the workpiece transport device 2 picks up the workpiece 10. It can also be performed by changing the position or direction of the turntable of the edge position detector 102.

(Step S206) The workpiece transport device 2 transports the workpiece 10 and places it on the second place (for example, the mounting table 6). Then, the conveying process is ended.

(Step S207) The workpiece transport apparatus 2 picks up the workpiece 10 from the turntable of the edge position detector 102, and transports it to the third place for collection, here the collection container 5, and accommodates the workpiece in the container 5. Then, the conveying process is ended.

Hereinafter, a specific operation example of the workpiece transport system 1000 of the present embodiment will be described. Here, the edge position detector 102 has a case where the correction information outputted by the output unit 104 or the device indicating the position or direction of the turntable 52 is changed according to the information indicating the notch portion. In addition, the case where the workpiece 10 is the wafer 10 is demonstrated here as an example.

The workpiece transport device 2 takes out a wafer 10 stored in the container 4, transports it to the workpiece processing apparatus 1, and mounts it on the turntable 52 of the edge position detector 102 as shown in FIG.

When the wafer 10 is placed on the turntable 52, the edge position detector 102 obtains the rotation angle and the first distance information while rotating the wafer 10, and the storage unit 57 sets the pair of the rotation angle and the first distance information. The plurality of first rotation distance information is stored in the first rotation distance information storage unit 101.

FIG. 8 is a diagram showing a first rotation distance information management table that performs management on the first rotation distance information stored in the first rotation distance information storage unit 101. The first rotational distance information is obtained using the edge position detector 102 as shown in FIG. 3 as described above. Here, for convenience of explanation, the first rotation distance information obtained by sequentially pressing 晶圆0.036 degrees when the wafer 10 is rotated is stored (that is, the first rotation distance information of 10000 records is stored for one wafer) The case is illustrated as an example.

The first rotation distance information management table has attributes such as "wafer ID", "rotation angle", and "first distance information". The "wafer ID" is the identification information of the wafer. The "rotation angle" is the rotation angle of the wafer. The "first distance information" is the distance from the center of rotation of the wafer to the edge of the wafer. Further, r _m (m is an integer from 1 to 10000) of the "first distance information" is first distance information in which the rotation angle corresponding to the rotation angle is 0.036 × m (degree). The value of r _m is set to an arbitrary value. In the first rotation distance information management table, each column (record) represents the first rotation distance information.

Fig. 9 is a graph for explaining the relationship between the rotation angle of the first rotation distance information and the first distance information. This graph is a graph showing the first rotation distance information of the wafer having the "wafer ID" of "W001" (hereinafter referred to as wafer W001), and shows the relationship between the rotation angle and the first distance information. When the center of rotation of the wafer is offset from the center of the wafer, as shown in FIG. 9, the graph as a whole depicts a curved waveform having a period of, for example, 360 degrees. In the figure, the recess 20 is a portion corresponding to the oriented flat portion of the wafer 10. Further, the recesses 21 and 22 are portions corresponding to the collapse of the wafer 10. At the same time, the convex portion 23 is a portion corresponding to the burr of the wafer 10.

First, the user or the like has performed an operation of designating, for example, the wafer W001 as the correction target.

FIG. 10 is a graph for explaining the relationship between the rotation angle indicating the first rotation distance information and the first distance information in the processing performed by the synthesizing device 1031 for the first rotation distance information, and FIG. 10(a) shows that the rotation angle is 0 degrees. The above graph is less than 90 degrees, FIG. 10(b) is a graph in which the rotation angle is less than 90 degrees and the range is less than 180 degrees, and FIG. 10(c) is a curve in which the rotation angle is less than 180 degrees and less than 270 degrees. Fig. 10(d) is a graph in which the rotation angle is less than 270 degrees and less than 360 degrees, and Fig. 10(e) is a diagram in which the graphs from Fig. 10(a) to Fig. 10(d) are arranged in accordance with the rotation angle. A graph of sequential synthesis. Fig. 10 (f) is a graph showing a state in which the change in the value of the graph of Fig. 10 (e) is largely changed.

The synthesizing device 1031 acquires a record in which the "wafer ID" is "W001" from the first rotational distance information management table shown in FIG. 8, and divides the acquired record into four at a "rotation angle" of 90 degrees. Specifically, it is divided into a group in which the "rotation angle" is less than 90 degrees and a record in which the "rotation angle" is less than 90 degrees in 90 degrees or more, and the "rotation angle" is not more than 180 degrees. A group with a record of 270 degrees and a group with a "rotation angle" of less than 270 degrees and less than 360 degrees. A graph showing the records of each group is a graph shown in Figs. 10(a) to 10(d).

Then, the synthesizing means 1031 synthesizes the first distance information included in the first rotation distance information in which the order of the divisions of the respective groups is the same. The synthesis here refers to the calculation of the average value. For example, the synthesizing device 1031 obtains the first record when the records of the respective groups are sequentially arranged from the smaller rotation angle value (that is, the "rotation angle" is "0", "90", "180", and "270". The "first distance information" values of the records "r ₁ ", "r ₂₅₀₁ ", "r ₅₀₀₁ ", and the average value R _{1 of} "r ₇₅₀₁ " are used as the first synthetic distance information and form with these rotation angles. Correspondingly, it is stored in a storage unit (not shown). Further, R ₁ is equal to (r ₁ + r ₂₅₀₁ + r ₅₀₀₁ + r ₇₅₀₁ ) / 4.

Secondly, in the same way, the second record of each group, that is, the "first distance information" value "r ₂ " of the records of "0.036", "90.036", "180.036" and "270.036" is obtained. The average value R _{2 of} "r ₂₅₀₂ ", "r ₅₀₀₂ ", and "r ₇₅₀₂ " is used as the second combined distance information, and is stored in a storage unit (not shown) in association with these rotation angles. The same processing is also performed for the third post-record.

FIG. 11 is a composite distance information management table that manages the combined distance information acquired by the synthesizing device 1031. The synthetic distance information management table has attributes such as "rotation angle" and "combination distance". The "rotation angle" refers to a rotation angle corresponding to each of the four first distance information synthesized. "Synthesis distance" refers to the composite distance information. Further, R _{m is} set equal to (r _m +r _{m + 2500} +r _{m + 5000} +r _{m + 7500} )/4.

Fig. 10(e) is a graph showing the combined distance information acquired by the synthesizing device 1031. Here, the angle at which the median value of each "rotation angle" is the smallest is shown on the horizontal axis. As shown in FIG. 10(e), the first distance information whose rotation angles are successively different by 90 degrees is synthesized, because the waveform generated by shifting the center of rotation from the center of the wafer as shown in FIG. 9 is eliminated. The whole graph is linear. However, the concave portions 20, 21, and 22 or the convex portions 23 corresponding to the notched portions such as the collapsed portion or the burr which are present in the plurality of first distance information before the synthesis, and the notched portion such as the oriented flat portion are generated by the synthesis. Change, but because it has not been eliminated, it has remained.

Next, the composition processing device 1032 repeatedly detects and deletes the combined distance information of the minimum value in the plurality of combined distance information synthesized by the combining device 1031 shown in FIG. 11 until the predetermined number of times is reached. The deletion may also be to assign the flag information indicating the deletion to the composite distance information. In this manner, for example, in FIG. 10(e), the plurality of combined distance information of the concave portion 20 corresponding to the orientation flat portion having a larger value change with respect to the other portion is sequentially deleted. Further, after the orientation of the flat portion, the combined distance information of the concave portions 21, 22 corresponding to the large collapse of the value with respect to the larger portion of the other portions is sequentially deleted.

Next, the composition processing device 1032 performs the process of detecting and deleting the maximum combined distance information in the same plurality of combined distance information remaining only by the minimum value of the predetermined number of times until the predetermined number of times is reached. . In this way, for example, in FIG. 10(e), the combined distance information of the convex portions 23 corresponding to the burrs whose values vary in size larger than the other portions is sequentially deleted. Further, the number of times of each of the above deletions is preferably determined by repeating an experiment or the like. Further, for example, the number of times of detection and deletion of the side of the notch portion such as the oriented flat portion (here, the number of detections and deletions of the minimum value) is preferably set to be more than the number of detection and deletion of the side where the notch portion such as the oriented flat portion is not present ( Here is the maximum detection and deletion number).

In this way, it is possible to detect and delete a portion where the magnitude of the value greatly changes from the synthesized distance information shown in FIG. The remaining uncombined synthetic distance information (i.e., the remaining synthesized distance information that has not been deleted) forms the appearance of Fig. 10(f). The two or more successive synthetic distance information in the undetected remaining synthetic distance information is a plurality of composite distance information having a small change.

Next, the synthesizing processing device 1032 detects a synthesized distance information from the unsynthesized (here, undeleted) remaining synthesized distance information. Here, the number of consecutive synthetic distance information is detected by a plurality of consecutive composite distance information, and a composite distance information whose order is located in the center of the most consecutive number is detected. Here, for example, the combined distance information of the rotation angle θ from the range of θ ₆₀₀ to θ ₁₂₀₀ , specifically, the composite distance information of the region 25 of FIG. 10( f ) is continuous, and the continuous number thereof is continuous with the other phases. For a long time, the synthesis processing device 1032 detects the synthetic distance information located at the center of the range, specifically, the combined distance information whose corresponding rotation angle is θ ₉₀₀ . Further, θ _m (m is an integer of 1 to 10000) represents, for example, a rotation angle at which the wafer W001 is rotationally moved 600 times by 0.036 degrees, that is, a rotation angle of 0.036 × m (degrees). θ _{600 is,} for example, a rotation angle when the wafer W001 is rotated by 0.036×600 (degrees).

Furthermore, the composition processing device 1032 acquires four rotation angles corresponding to the four first distance information before the combination of the detected combined distance information from the combined distance information management table shown in FIG. For example, in the synthetic distance information management table shown in FIG. 11, a record including a rotation angle θ degree corresponding to the detected combined distance information is detected as a value of "rotation angle", and all of the records included in the record are acquired. The value of the rotation angle. Alternatively, 90 degrees, 180 degrees, and 270 degrees are sequentially added to the rotation angle θ ₉₀₀ , and four pre-synthesis rotation angles are obtained. Here, it is assumed that θ ₉₀₀ , θ ₉₀₀ +90 degrees, θ ₉₀₀ +180 degrees, and θ ₉₀₀ +270 degrees have been acquired as the rotation angle. Next, the synthesis processing device 1032 acquires four first distance information r ₉₀₀ , r ₃₄₀₀ , r ₅₉₀₀ , and r ₈₄₀₀ respectively corresponding to the acquired four rotation angles from the first rotation distance information management table illustrated in FIG. 8 . .

Since the four first distance information obtained in this manner is the first distance information obtained by the edge of the wafer without the notch portion, the burr, the collapse, and the like, it is from the notch portion or the defective portion having less influence. The distance from the center of the wafer to the edge.

The correction information acquisition device 1033 reads the above equations (1) and (2) from, for example, a storage unit (not shown), and the four first distance information acquired by the synthesis processing device 1032 and the first distance information. One of the corresponding rotation angles (here, the rotation angle θ ₉₀₀ of the minimum value obtained above) is substituted into the equations (1) and (2) to calculate the center of rotation of the wafer W001 to the center of the wafer W001. Correction information (that is, the angle of the information indicating the direction of movement and the length of the movement amount). Here, it is assumed that the angle α ₁ and the length h ₁ have been acquired as correction information. The correction information acquisition device 1033 temporarily stores the acquired correction information in, for example, a storage unit (not shown).

The second distance information acquiring device 1034 that has received the correction information reads the above formula (3) from a storage unit (not shown), and substitutes the angle α ₁ and the length h ₁ as the correction information into the equation (3) to obtain an ideal. Curved.

The second distance information acquiring device 1034 sequentially substitutes the plurality of rotation angles corresponding to the plurality of first rotation distance information into the obtained ideal curve formula, and sequentially obtains the second distance information. Specifically, the rotation angles are sequentially incremented from 0 degrees by 0.036 degrees until the respective rotation angles immediately before reaching 360 degrees are substituted into the ideal curve to sequentially calculate the second distance information. Then, the second rotation distance information having the rotated rotation angle and the acquired second distance information is stored in a storage unit (not shown).

FIG. 12 is a diagram showing a second rotational distance information management table for managing the second rotational distance information acquired and stored by the second distance information acquiring device 1034. The second rotation distance information management table has a "rotation angle" and a "second distance information". The "second distance information" is, for example, a distance from the rotation center to the edge of the wafer W001 in accordance with the rotation angle when the wafer W001 is an ideal circular wafer having no unevenness at the edge. Further, the "second distance information" r _im (m is an integer from 1 to 10000) is set as the second distance information of the corresponding rotation angle of 0.036 × m (degrees).

FIG. 13 is a graph showing the relationship between the rotation angle of the plurality of second rotation distance information acquired by the second distance information acquiring device 1034 and the second distance information. The horizontal axis represents the rotation angle θ, and the vertical axis represents the second distance information r _i .

The computing device 1035 sequentially obtains a plurality of first distance information stored in the first rotation distance information and a first distance corresponding to the same rotation angle among the plurality of second distance information acquired by the second distance information acquiring device 1034. The difference between the information and the second distance information. Here, the computing device 1035 is a value obtained by subtracting the first distance information from the second distance information as an example of the difference. For example, the first distance information "r ₁ " corresponding to the rotation angle "0" is subtracted from the second distance information "r _i1 " corresponding to the rotation angle "0 degree", and the rotation angle "0 degree" is obtained. The distance difference information "r _i1 -r ₁ ". Further, for example, the first distance information "r ₂ " corresponding to the rotation angle "0.036" is subtracted from the second distance information "r _i2 " corresponding to the rotation angle "0.036 degrees", and the rotation angle "0.036 degrees" is obtained. Corresponding distance difference information "r _i2 -r ₂ ". The same processing is performed for other rotation angles. The calculation device 1035 uses the acquired value as the distance difference information, and stores it in a storage unit (not shown) in association with the rotation angle.

FIG. 14 is a distance difference information management table for managing distance difference information acquired by the computing device 1035. The distance difference information management table has attributes such as "rotation angle" and "distance difference". "Distance difference" refers to the distance difference information.

15 is a graph showing the relationship between the distance difference information acquired by the computing device 1035 and the rotation angle (FIG. 15(a)), and a graph for explaining the processing executed by the notch detecting device 1036 (FIG. 15(b) And a graph for explaining the processing performed by the defect detecting device 1037 (Fig. 15(c)). In the figure, the horizontal axis represents the rotation angle, and the vertical axis represents the value of the distance difference information. In addition, the vertical axis scale used here for explaining, for example, the graph of FIG. 15 is a scale which is enlarged using the vertical axis scale of FIG. 9 or FIG.

When the distance difference information acquired by the computing device 1035 is represented by a graph, it becomes a graph as shown in Fig. 15(a). The graph is obtained by subtracting the crystal having the unevenness of the edge shown in FIG. 13 from the value of the longitudinal axis direction of the graph having the first distance information such as the measured flat portion or the burr or the collapse of the image shown in FIG. A graph of the value of the longitudinal axis direction of an ideal graph when the circle is rotated. Therefore, for the distance difference information obtained in the portion where the edge of the wafer W001 has no irregularities, the value becomes a certain value which is approximately close to 0, and only the positive or negative value which is different in size from the other portions appears in the uneven portion. In the graph. For example, in the graph shown in FIG. 15, the convex portion 20a corresponding to the oriented flat portion, the convex portions 21a and 22a corresponding to the collapse, and the concave portion 23a corresponding to the burr are displayed in a portion having a change in value. The other part is in a nearly linear shape substantially parallel to the x-axis.

The gap detecting device 1036 detects the distance difference information having a larger value than the predetermined first threshold value T _H1 in the distance difference information acquired by the computing device 1035. The first critical value T _H1 is a length which is larger than the depth of collapse which generally occurs at the edge of the wafer, and is set to a positive value in advance, which is a depth indicating that the length thereof is sufficiently shorter than the oriented flat portion. The first critical value T _H1 is, for example, a critical value for the size. Here, in order to detect the positive or negative distance difference information that is larger than the first threshold value T _H1 , the distance difference information larger than T _H1 is detected, or the value is detected to be smaller than −T _H1 . Distance information.

When the first critical value T _{H1 is} expressed in a graph indicating the relationship between the distance difference information and the rotation angle, the state as shown in FIG. 15(b) is formed.

In addition, in the case where the known distance difference information is a value obtained by subtracting the value of the first distance information from the second distance information, since the distance difference information value corresponding to the oriented flat portion is a positive value, the value is detected as -T _H1 The processing of small distance difference information can be omitted.

The notch detecting means 1036 detects the distance difference information whose size is larger than the first critical value T _H1 and obtains the rotation angle corresponding to the detected distance difference information. For example, the notch detecting device 1036 detects the distance difference information of the convex portion 20a corresponding to the oriented flat portion of Fig. 15(b) which is larger than T _H1 . Then, the notch detecting device 1036 acquires the minimum value and the maximum value of the rotation angle corresponding to the detected distance difference information, and displays the position as the position of the oriented flat portion of the notch portion of the wafer W001. For example, the minimum value obtained by the notch detecting hand device 036 is θ ₃₈₀₀ and the maximum value is θ ₄₄₀₀ . The notch detecting device 1036 stores the obtained minimum value θ ₃₈₀₀ and maximum value θ ₄₄₀₀ in a storage unit (not shown).

The defect detecting device 1037 detects the distance difference information whose size is larger than a predetermined second threshold value T _H2 in the distance difference information acquired by the computing device 1035. However, here, the distance difference information having a size larger than the first threshold value T _H1 described above is not detected. The second critical value T _H2 is a value whose magnitude is smaller than the first critical value T _H1 and is set to a value greater than zero. Further, since the distance difference information acquires a value other than 0 due to the measurement error of the first distance information or the like, the second threshold value T _{H2 is} set to a value obtained by measuring the error score. The second threshold value T _H2 is, for example, a threshold value for detecting the size of the edge defect portion. Here, in order to detect a positive or negative distance difference information whose size is larger than the second threshold value T _{H2 ,} a distance difference information larger than T _H2 or a distance difference information whose value is smaller than −T _H2 is used. Test it.

When the second critical value T _{H2 is} expressed in a graph indicating the relationship between the distance difference information and the rotation angle, it is as shown in FIG. 15(c).

Further, in the same manner as described above, the detection processing of the distance difference information smaller than -T _{H2 may} be omitted.

The defect detecting device 1037 detects the distance difference information having a value larger than the second critical value T _H2 and obtains a rotation angle corresponding to the detected distance difference information. For example, the defect detecting device 1037 detects a portion whose value is larger than T _H2 of the convex portions 21a, 22a (corresponding to the defective portion of Fig. 15 (c)), and a concave portion 23a whose value is larger (corresponding to the defective portion) -T _H2 is a small part. Then, the defect detecting device 1037 detects the distance difference information that is continuous with the corresponding rotation angle in the detected distance difference information, and obtains the minimum value and the maximum value of the rotation angle corresponding to the continuous distance difference information. They are respectively used as information indicating the position of the defective portion of the wafer W001. For example, regarding the convex portion 21a, the minimum value θ ₅₅₀ and the maximum value θ _{558 of} the rotation angle are obtained. Further, for example, regarding the convex portion 22a, the minimum value θ _{7446 of} the rotation angle and the maximum value θ _{7450 are obtained} . Further, for example, regarding the concave portion 23a, the minimum value θ ₈₇₃₈ and the maximum value θ _{8743 of} the rotation angle are obtained.

Further, regarding the distance difference information detected as a portion larger than T _H2 , that is, the minimum value and the maximum value of the rotation angles corresponding to the convex portions 21a and 22a, respectively, information indicating the collapse is also obtained as a representation. Information on the types of defects. Further, the rotation angle corresponding to the distance difference information detected as a portion smaller than -T _H2 , that is, the minimum value and the maximum value corresponding to the concave portion 23a, the information indicating the burr is also obtained as the type indicating the defective portion. News.

Further, the defect detecting device 1037 obtains the maximum value of the absolute value of the distance difference information in which the rotation angle is continuous, and as information indicating the size of the defective portion, for example, the height of the burr or the depth of the collapse. For example, when the maximum value of the absolute value of the distance difference information of the rotation angle from θ ₈₇₃₈ to θ ₈₇₄₃ is r _{i8741 -} r ₈₇₄₁ , the defect detecting means 1037 obtains the maximum value as information indicating the size of the defective portion.

Next, the defect detecting device 1037 stores the acquired information on the defective portion, that is, the rotation angle indicating the range of the defective portion, the information indicating the type of the defective portion, and the information indicating the size of the defective portion in the storage portion (not shown). .

The output unit 104 performs an abnormality output in accordance with the information on the defective portion acquired by the defect detecting device 1037. Here, since the defect detecting device 1037 detects one or more defective portions, the output portion 104 performs an abnormal output. Further, in the case where the output indicates that the defect detecting means 1037 has detected the information on the defective portion with respect to the defective portion, the output portion 104 can also perform the abnormal output. Specifically, the output unit 104 transmits information indicating that an abnormality is detected to the workpiece transport device 2 as an abnormal output.

Furthermore, the output unit 104 outputs the related information of the defective portion detected by the defect detecting device 1037. For example, the output unit 104 outputs information indicating the range of the rotation angle as the information indicating the defective portion in the related information of the defective portion detected by the defect detecting device 1037. Further, the output unit 104 outputs information indicating the type of the defective portion as information indicating the type of the defective portion. Further, the output unit 104 outputs information indicating the size of the defective portion. For example, information indicating that a burr having a height of r _{i8741 -} r ₈₇₄₁ exists in a range in which the rotation angle is from θ ₈₇₃₈ to θ ₈₇₄₃ is output. For example, the output unit 104 associates the information on the defective portion with the identifier of the wafer 10 and stores it in a predetermined storage unit or the like. The information about the defective portion stored may also be, for example, log information indicating the processing of the workpiece processing apparatus 1.

In addition, in the graph of the first distance information and the rotation angle shown in FIG. 9, the background of the range corresponding to the range of the rotation angle indicated by the information on the defective portion may be set as a graph different from the background color of the other portions. It is displayed on a monitor or the like, but the description is omitted here. Moreover, at this time, it is preferable to set a different background color for the collapse and the burrs. Further, the range of each rotation angle may be displayed as a value indicating the size of the defective portion or the like.

When the workpiece conveyance device 2 receives the information indicating the abnormality from the output unit 104 of the workpiece processing apparatus 1, the wafer 10 placed on the turntable 52 of the edge position detector 102 is picked up and moved to the recovery container 5 The wafer 10 is housed in the container 5. By this operation, the wafer 10 judged to be abnormal can be recovered as the container 5 without being transported to the subsequent processing steps.

Here, for example, the defect detecting device 1037 does not detect one or more defective portions, and does not acquire information on the defective portion.

When the output unit 104 determines that the defect detecting device 1037 has not detected one or more defective portions, the output unit 104 does not perform abnormal output.

Then, the output unit 104 outputs the correction information acquired by the correction information acquiring unit 1033 to the edge position detector 102.

Further, the output unit 104 outputs the notch information detected by the notch detecting device 1036 to the edge position detector 102. For example, the output unit 104 outputs a range of rotation angle detected by the notch detecting device 1036 from θ ₃₈₀₀ to θ ₄₄₀₀ as position information indicating that the directional flat portion is provided.

When the edge position detector 102 receives the correction information from the output unit 104, the disk 52 is moved in the horizontal direction in accordance with the correction information, so that the center of the wafer 10 is located on the moving front disk 52 (the wafer 10 before the movement) ) The center of rotation.

Further, when the edge position detector 102 receives the information indicating the notch portion, the disk 52 is moved or rotated in the horizontal direction, and the notch portion is directed in a predetermined direction.

The workpiece transport device 2 picks up the wafer 10 whose configuration or orientation is changed from the turntable 52 by the movement of the turntable 52, and transports it to the mounting table 6 of the next placement destination.

By feeding the wafer 10 whose position and orientation is corrected by the information indicating the correction information and the notch in this manner to the workpiece transport device 2, the workpiece transport device 2 can place the wafer 10 in the proper position in the appropriate position. The mounting table 6 is the next conveyance destination. Thus, the positioning of the wafer 10 can be performed for the wafer of the defect-free portion.

In addition, here, the position or orientation of the wafer 10 is changed by the edge position detector 102, but the output portion 104 may also transmit information indicating the correction information and the notch portion to the workpiece transport device 2, but is changed by the workpiece transport device 2. The position or orientation of the wafer 10.

Further, the output unit 104 outputs information indicating the notch portion and information on the defective portion detected by the defect detecting device 1037 to a monitor (not shown) or the like.

FIG. 16 is a diagram showing an example in which the information indicating the notch portion and the information on the defective portion are outputted by the output unit 104.

With the output of such an output portion 104, the user can easily know, for example, whether or not there is an oriented flat portion at the edge of the wafer W001, or where there is such a defect. Further, when such information indicating the position of the oriented flat portion or the position or type indicating the defective portion is output to another device (not shown), in other devices, for example, the position of the defective portion of the oriented flat portion can be considered. Processing inside.

Here, for example, as a result of processing one wafer 10 conveyed to the mounting table 6 by the workpiece transport system 1000, cracking due to collapse of the edge 11 occurs in the wafer 10. This case may be a defective portion that cannot be detected in the defect detecting process of the workpiece processing apparatus 1. Therefore, for example, the user inputs the evaluation-related information having the related information to the evaluation-related information receiving unit 105, and the related information indicates that there is a defect portion that cannot be detected by the current defect detection processing.

When the evaluation-related information receiving unit 105 receives the evaluation-related information having the information indicating the defective portion that cannot be detected, the setting unit 106 obtains a threshold value that can detect a smaller defect portion than the threshold value for the defect detection. Specifically, a threshold value is obtained, which is changed from the value of the second threshold value T _H2 for detecting the defective portion to less than the current value (the second threshold value T _H2 before the change) Pre-specified values are used to calculate values such as subtraction. For example, a value obtained by subtracting a predetermined value from the value of the current second critical value T _H2 is obtained as a new second critical value. The subtraction value here is preferably a small value. Moreover, the size of the second critical value after the subtraction is preferably not below zero.

Next, the setting unit 106 updates the second threshold value used by the defect detecting device 1037 with the acquired new second threshold value.

In this way, by detecting the detection result of the defective portion, it is possible to detect a smaller defect portion than when the critical value before the update is used, and it is possible to reduce the omission of the defect detection.

(Modification 1)
Hereinafter, in the specific example described above, the setting unit 106 will be described using a case in which a threshold value when detecting a defective portion is obtained by machine learning.

Here, for example, the transport destination of the workpiece transport system 1000 is a CVD apparatus (not shown), and the mount 6 is a mount of the CVD apparatus.

The evaluation related information accepting unit 105 receives a plurality of evaluation related information and stores them in a storage unit (not shown), and the plurality of evaluation related information is a defect partial detection result executed by the following three and the represented workpiece processing apparatus 1. Whether the information corresponding to the correct information is the second critical value used for detecting the defective portion of the wafer 10, the processing temperature at which the processing destination of the wafer 10 (the CVD apparatus) is performed, and the processing time.

The setting unit 106 sequentially learns the second threshold value, the processing temperature, the processing time, and the correctness information included in the plurality of evaluation related information received as the teacher data.

Next, in the case where the user processes one wafer 10 by one processing condition using the same CVD apparatus, the processing of the one processing condition is performed in order to obtain a critical value of the defective portion capable of detecting a problem such as cracking during the processing. The temperature and the processing time and the plurality of values as the candidates of the second threshold value respectively form a plurality of groups, and the plurality of groups are respectively input into the learning result, and the second critical value detection defect included in each group is obtained. The judgment result of whether the test result is correct or not. In this way, it is possible to determine whether the defect detection is appropriate using the second threshold value for the combination of the input processing temperature, the processing time, and the second threshold value. The plurality of values as the second critical value candidate are, for example, a plurality of values separated by a predetermined value. The plurality of values as the second critical value candidate are, for example, a plurality of values used in the periphery of the predetermined second critical value.

Next, one of the second critical values corresponding to the judgment result judged to be correct, for example, the maximum value is obtained. Then, the second threshold is set to the second threshold value that the defect detecting device 1037 is to utilize for defect detection.

In this way, for the wafer 10 having the defective portion of the CVD process which has a subsequent procedure, the wafer 10 can be appropriately detected by using the learning result while having the unevenness of the wafer 10 having no problem in the subsequent process at the edge. A second threshold value that is not detected can also be obtained. As a result, the sorting of the wafer 10 can be performed, for example, with excellent precision.

As described above, according to the present embodiment, when the workpiece is conveyed and the position and orientation of the workpiece are aligned, the edge defect portion of the workpiece can be detected, and the detection of the workpiece defect can be appropriately performed.

Furthermore, according to the embodiment, the composite distance information obtained by synthesizing a plurality of first distance information whose rotation angles are successively different by 90 degrees is detected, and the continuous plurality of combined distance information having a small change is detected by using And a plurality of first distance information of the synthetic source corresponding to one of the plurality of combined distance information detected, obtaining correction information for moving the workpiece rotation center to the center of the workpiece, and using the concave and convex from the edge of the workpiece The first distance information obtained by a small portion is appropriately obtained with high-accuracy correction information.

Further, according to the present embodiment, the relational expression indicating the relationship between the rotation angle and the distance to the edge when the workpiece is a circle having no unevenness is obtained by using the above-described correction information, and the second distance obtained from the obtained relational expression is used. The difference between the information and the first distance information is used to obtain information indicating the notch portion of the workpiece or information on the defective portion of the workpiece, and the unevenness of the edge of the workpiece can be appropriately indicated. For example, the position of the notch portion of the workpiece can be appropriately indicated. Moreover, the position of the defective portion of the edge of the workpiece or its kind can be appropriately indicated.

Further, in the present embodiment, the workpiece processing apparatus 5 shown in FIG. 25 can perform the first rotation distance information storage unit 101, the synthesizing apparatus 1031, and the synthesizing processing apparatus 1032 in the workpiece processing apparatus described in the above embodiment. The configuration of the correction information acquisition device 1033, the second distance information acquisition device 1034, the calculation device 1035, the notch detection device 1036, and the defect detection device 1037 is appropriately omitted, and a correction information output device 1038 is provided, and the correction information acquisition device 1033 is provided. The obtained correction information is output; and the distance difference correlation output device 1039 obtains information about the difference between the first distance information and the second distance information and the information about the defective portion detected by the defect detecting device 1037 by the computing device 1035. The second distance information obtaining means 1034 can also use the correction information outputted by the correction information output means 1038 to obtain the second distance information.

The correction information output device 1038 outputs the correction information acquired by the correction information acquisition device 1033. The output here is a message transmission to an external device such as an aligner (not shown) of a workpiece, a transfer to an internal processing device, etc., storage of a recording medium, and display on a monitor (not shown). Concepts such as the transfer of processing results to other processing devices or other programs.

For example, the correction information output device 1038 is configured to output the correction information obtained by the correction information acquisition device 1033 to the interface of the second distance information acquisition device 1034 or the like for temporarily storing the correction information to the second distance information. A device that stores a medium such as a memory (not shown) of the device 1034. For example, the second distance information acquiring device 1034 accepts the correction information outputted by the correction information output device 1038, and acquires the second distance information using the received correction information. Further, the second distance information acquiring means 1034 reads the correction information stored in the memory medium by the second distance information acquiring means 1034, and acquires the second distance information using the read correction information.

The distance difference correlation output device 1039 forms an information output corresponding to the distance difference information with the same rotation angle calculated by the computing device 1035. The information about the difference may be, for example, information having the distance difference information itself, a rotation angle corresponding to one or more distance difference information, or a combination of the distance difference information and the rotation angle. For example, the output unit 104 may store information included in the distance difference information and the rotation angle in a storage unit (not shown). It is also possible to output a graph indicating the relationship between the distance difference information and the rotation angle, for example, to display it.

The so-called information on distance difference information also includes the concept of information obtained using distance difference information. For example, the distance difference correlation output device 1039 may output the information indicating the notch portion of the workpiece 10 obtained by the gap detecting device 1036 using the distance difference information as the information about the difference calculated by the computing device 1035. By outputting the information indicating the notch portion, the user or other device can recognize the portion of the workpiece 10 where the notch portion exists. The distance difference related output device 1039 may represent other portions different from the other colors or patterns by using a portion corresponding to the rotation angle indicating the notch portion, for example, on a graph indicating the relationship between the distance difference information and the rotation angle. The aspect (for example, the background on the graph corresponding to the range corresponding to the rotation angle of the notch) is used as an output indicating the information of the notch.

Further, the distance difference correlation output device 1039 may calculate the information about the distance difference information using the calculation device 1035, and output the information about the defective portion obtained by the defect detecting device 1037 as the information about the distance difference information calculated by the computing device 1035. Since the information indicating the defective portion is information having the position information of the defective portion (for example, the rotation angle) and the position thereof, the user or other device can recognize the defective portion of the size of the portion of the workpiece 10. When the information indicating the defective portion has information indicating whether or not the defective portion is convex toward the outer side of the wafer 10, it is also possible to recognize that the defective portion is a burr or a chipping. The distance difference-related output device 1039 can also use a different pattern from the portion corresponding to the rotation angle of the defective portion, as in the case of the notch portion, for example, on the graph indicating the relationship between the distance difference information and the rotation angle. Display, as an output of information indicating the defective part.

In the workpiece processing apparatus 5, for example, the difference from the center of rotation to the edge and the distance actually to the edge when the desired edge is obtained can be obtained and output, and the edge of the workpiece (for example, wafer) can be represented with excellent precision. Bump. In this way, the position of the notch portion of the workpiece can be appropriately indicated by, for example, the output of the distance difference correlation output device 1039. Furthermore, by obtaining and outputting defect information, it is possible to indicate appropriate information about the defective portion of the workpiece edge. For example, the position of the defective portion or its kind can be appropriately indicated.

Further, the above-described workpiece processing apparatus 5 is, for example, a workpiece processing apparatus of the following embodiment. That is, the workpiece processing apparatus 5 includes: a first rotation distance information storage unit for storing a plurality of first rotation distance information when the workpiece is rotated, and the first rotation distance information is formed by the rotation angle and the first distance information. Corresponding information, wherein the first distance information is information about a distance from a rotation center to an edge of the workpiece corresponding to the rotation angle; and a synthesizing device, in the first distance information included in the plurality of first rotation distance information, Combining a plurality of first distance information whose corresponding rotation angles are successively different by 90 degrees; the synthesizing processing device, in the plurality of combined distance information of the information obtained by synthesizing and obtaining the first distance information by the synthesizing device, corresponding rotation The plurality of composite distance information consecutively having a plurality of synthetic distance information and having a small change in the magnitude of the value are detected, and a plurality of first distances before the synthesis corresponding to one or more of the plurality of composite distance information obtained by the detection are obtained. Information, and the angle of rotation corresponding to more than one first distance information before synthesis; And using the plurality of first distance information and the rotation angle obtained by the synthesizing processing device to obtain correction information for aligning the rotation center of the workpiece with the center of the workpiece; and correcting the information output device to obtain the correction information The correction information output obtained by the device; the second distance information acquisition device uses the correction information outputted by the correction information output device to obtain the relationship between the rotation angle and the second distance information when the workpiece is a circle having no unevenness at the edge The second distance information is information about the distance from the workpiece to the edge corresponding to the rotation angle, and the plurality of rotation angles corresponding to the plurality of first rotation distance information are respectively substituted into the acquired relationship, and the second is obtained. a distance information; the computing device uses the plurality of first rotation distance information and the plurality of second distance information obtained by the second distance information acquisition device to obtain the first distance information and the first rotation information corresponding to the same rotation angle The difference between the two distance information; and the distance difference related output device, Information about the output of said difference computing means computing.

In the above-described workpiece processing apparatus, the defect detecting device detects the edge of the workpiece by using a difference between the first distance information and the second distance information calculated by the computing device and one or more critical values regarding the size of the defective portion. The defective part, and obtain information about the detected defective part.

Further, in the above-described workpiece processing apparatus 5, the second distance information acquiring means 1034, the calculating means 1035, the notch detecting means 1036, the defect detecting means 1037, and the distance difference related output means 1039 can be omitted. The workpiece processing apparatus obtained by this means is, for example, a device for acquiring workpiece correction information and the like.

With such a configuration, information obtained by sequentially changing the edge distance of the rotation angle by 90 degrees is synthesized, and information obtained by changing the information about the edge distance due to the difference between the rotation center and the wafer center is obtained. With regard to the information on the distance of the uneven portion of the edge, the correction information for aligning the center of rotation of the workpiece with the center of the workpiece can be obtained, so that the correction information with high accuracy can be obtained.

In this way, for example, by using the correction information, a device (not shown) for performing workpiece alignment can appropriately correct the position of the workpiece so that the center of rotation of the workpiece becomes the center of the workpiece.

Further, the workpiece processing apparatus is, for example, a workpiece processing apparatus described below. That is, the workpiece processing apparatus includes: a first rotation distance information storage unit for storing a plurality of first rotation distance information, wherein the first rotation distance information has a rotation angle when the workpiece is rotated and corresponds to the first distance information Information, and the first distance information is information about a distance from a rotation center to an edge of the workpiece corresponding to the rotation angle; and a synthesizing device, in the first distance information included in the plurality of first rotation distance information, Combining a plurality of first distance information whose corresponding rotation angles are different by 90 degrees successively; the synthesizing processing device, in the plurality of combined distance information of the information obtained by synthesizing the first distance information by the synthesizing device, corresponding rotation The angle is a plurality of consecutive synthetic distance information, and the plurality of combined distance information whose value changes little is detected, and obtains a plurality of first distances before the synthesis corresponding to one or more of the plurality of combined distance information obtained by the detection. Information, and the rotation angle corresponding to more than one first distance information before synthesis; And using the plurality of first distance information and the rotation angle obtained by the synthesizing processing device to obtain correction information for aligning a rotation center of the workpiece with a center of the workpiece; and correcting the information output device to modify the information The correction information output obtained by the device is obtained.

(Embodiment 2)
According to the second embodiment of the present invention, in the first embodiment, the image obtained by capturing the defective portion of the edge of the workpiece is output.

Fig. 17 is a block diagram showing the workpiece processing apparatus 3 of the embodiment.

The workpiece processing apparatus 3 includes a first rotation distance information storage unit 101, an acquisition unit 103, an output unit 104, an evaluation related information receiving unit 105, a setting unit 106, an edge position detector 301, an imaging unit 303, and a corrected defect position acquisition unit 304. The video output unit 305, the detection unit 306, the evaluation unit 307, the evaluation result output unit 308, the situation accepting unit 309, the video situation information storage unit 310, and the video situation information accumulation storage unit 311. The edge position detector 301 includes a moving unit 302.

The acquisition unit 103 includes, for example, a synthesis device 1031, a synthesis processing device 1032, a correction information acquisition device 1033, a second distance information acquisition device 1034, a calculation device 1035, a notch detection device 1036, and a defect detection device 1037.

The first rotation distance information storage unit 101, the acquisition unit 103, the output unit 104, the evaluation related information reception unit 105, and the setting unit 106, and the synthesizing device 1031 and the synthesizing processing device 1032 and the correction information acquiring device 1033 that constitute the acquisition unit 103. The configuration and operation of the second distance information acquiring device 1034, the computing device 1035, the notch detecting device 1036, and the defect detecting device 1037 are the same as those in the first embodiment, and the detailed description thereof will be omitted.

FIG. 18 is a perspective view showing an embodiment of the workpiece processing apparatus 3 (FIG. 18(a)) and an example of the edge position detector 301 of the present embodiment (FIG. 18(b)). The workpiece processing apparatus 3 includes a mounting table 3021 for mounting the pedestal of the workpiece 10, and an imaging unit 303 for capturing an edge defect portion of the workpiece 10 placed on the mounting table 3021. An edge detecting portion 55 is provided inside the cover 3025.

The edge position detector 301 acquires a plurality of first rotation distance information for the workpiece 10. Specifically, the edge position detector 301 detects the edge position of the workpiece 10 and acquires a plurality of first rotation distance information for the workpiece 10 and stores it in the first rotation distance information storage unit 101.

The edge position detector 301 includes, for example, an edge detecting unit 55 that detects an edge position of the workpiece 10, a moving unit 302, an encoder 56, and a storage unit 57. The edge detecting unit 55 has a light projector 55a and a sensor 55b. Since the configuration, processing, and the like of the edge detecting unit 55, the encoder 56, and the storage unit 57 are the same as those of the edge position detector 102 shown in Fig. 3, the description thereof will be omitted.

The moving portion 302 moves the workpiece 10. The moving unit 302 moves, for example, the workpiece 10 placed on the mounting table 3021. The movement of the workpiece 10 by the moving portion 302 means, for example, a movement that rotates the workpiece 10 or a movement that moves the workpiece 10 in parallel. The parallel movement of the workpiece 10 means, for example, a case where the workpiece 10 is moved in a plane including the surface of the workpiece 10.

The moving portion 302 rotates the workpiece 10. The moving unit 302 has, for example, a mounting table 3021 and a rotating mechanism 3022 that rotates the mounting table 3021 with the central axis as a rotation axis. Then, the workpiece 10 placed on the mounting table 3021 is rotated by, for example, rotating the mounting table 3021 by the rotating mechanism 3022 so that the mounting surface thereof is positioned in the same plane. The rotation mechanism 3022 has an electric motor (not shown) or the like that transmits rotation (power) to the mounting table 3021. The upper surface of the mounting table 3021 on which the workpiece 10 is placed is provided with, for example, a so-called adsorption seat (not shown) having an adsorption surface for adsorbing the mounted workpiece 10. The encoder 56 detects, for example, the amount of rotation of an electric motor (not shown) included in the rotating mechanism 3022, and outputs a digital signal, which is equivalent to the rotation angle of the workpiece 10.

The edge position detector 301 obtains, for example, a measured value indicating the edge position when the moving portion 302 rotates the workpiece 10 by a predetermined rotation angle. Then, the first distance information and the rotation angle are sequentially obtained using the rotation angle and the measured value. The measured value indicating the edge position is, for example, a measured value of the distance from the rotation center of the workpiece 10 to the edge. The edge position detector 301, when acquiring the first rotation distance information for different workpieces, for example, causes the plurality of first rotation distance information acquired for each workpiece to be associated with the workpiece identifier of each workpiece, and is stored at the first rotation distance. Information storage unit 101.

The moving portion 302 also has a structure in which the workpiece 10 placed on the mounting table 3021 is moved in a direction parallel to the surface of the workpiece 10. The parallelism here also contains a substantially parallel concept. The direction parallel to the surface of the workpiece 10 may be a direction parallel to the mounting surface on which the mounting table 3021 on which the workpiece 10 is placed. The moving unit 302 moves the workpiece 10 in the horizontal direction, for example. For example, the moving unit 302 has a configuration in which the workpieces 10 are respectively moved in two orthogonal directions that are parallel to the surface of the workpiece 10. The moving portion 302 moves the workpiece 10 in parallel by, for example, a combination of movements in the respective directions of the two axes. Here, for convenience of explanation, the two axes are referred to as an x-axis direction and a y-axis direction. Specifically, the moving unit 302 is provided with an x-axis moving mechanism 3023 that moves the rotating mechanism 3022 in the x-axis direction, and a y-axis moving mechanism 3024 that moves the x-axis moving mechanism 3023 in the y-axis direction. For example, the x-axis moving mechanism 3023 and the y-axis moving mechanism 3024 are configured by a combination of a ball screw and an electric motor that are provided to extend in the x-axis direction and the y-axis direction, respectively. However, the moving unit 302 does not limit the configuration in which the workpiece 10 placed on the mounting table 3021 is moved in a direction parallel to the surface of the workpiece 10.

The moving unit 302 moves the workpiece 10 by using information such as correction information for the alignment position of the workpiece 10 outputted from the output unit 104 described in the first embodiment, for example, so that the center of the workpiece 10 is located at a predetermined position. The moving unit 302 is configured to appropriately move the mounting table 3021 on which the workpiece 10 is placed in a direction parallel to the mounting surface of the mounting table 3021 and the movement mode in which the mounting table 3021 is rotated. mobile.

The moving unit 302 moves the workpiece 10 using the information on the edge defective portion of the workpiece 10 outputted from the output unit 104, so that the edge defective portion of the workpiece 10 is disposed in the image capturing region. The photographing area is a pre-designated area, specifically, an area photographable by the photographing unit 303. The photographing area may also be a range that the photographing unit 303 can photograph. The moving portion 302 is preferably such that the workpiece 10 is moved to a predetermined position in which the edge defective portion of the workpiece 10 is located in the photographing region, such as the center or the like.

For example, the moving portion 302 may use information on the position of the defective portion regarding the information of the edge defective portion, for example, information indicating the angle of the defective portion with respect to the rotation center of the workpiece 10, etc., in such a manner that the position of the defective portion is located in the shooting region. The workpiece 10 is moved. Here, at least one or more types of movements (hereinafter, referred to as "rotational movements") for rotating the workpiece 10 and movements (hereinafter referred to as parallel movements) for moving the workpiece 10 in parallel with the surface of the workpiece 10 are combined.

Hereinafter, a process in which the moving unit 302 moves the position of the defective portion into the imaging region will be described as an example.

(1) When the workpiece is moved so that the center of the workpiece is placed at a predetermined position, the moving portion 302 moves the workpiece 10, for example, so that the center of the workpiece 10 is placed at a predetermined position, and the edge defective portion of the workpiece 10 is placed in the photographing region. Inside. The pre-designated position means, for example, a position at which the center of the workpiece 10 should be placed or a position at which the workpiece 10 is aligned with the position. For example, the workpiece 10 is delivered to the first embodiment described above. The workpiece conveying device 2 is configured to position the center of the workpiece 10 at the same time. The workpiece 10 is placed on the mounting table 3021 by the workpiece transfer device 2 or the like while the rotation center of the mounting table 3021 of the moving unit 302 is placed at the predetermined position. The moving unit 302 moves the workpiece 10 to the above position by, for example, appropriately combining the rotational movement and the parallel movement.

The moving unit 302 performs the above-described movement using, for example, information for aligning the workpiece 10 output from the output unit 104 with information on the defective portion. For example, the moving portion 302 uses correction information for aligning the center of rotation of the workpiece 10 output from the output portion 104 with the center of the workpiece 10, and information indicating the rotation angle of the edge defective portion of the workpiece 10 (for example, indicating a defective portion) The angle information of the range is such that the center of the workpiece 10 is placed at a predetermined position and the edge defective portion of the workpiece 10 is disposed in the imaging region, so that the workpiece 10 is moved.

19 is a view for explaining a processing example of moving a defective portion of the workpiece 10 into the imaging region, and includes an illustration showing a state before the rotation of the workpiece 10 (FIG. 19(a)), and rotation. Illustration of the subsequent state (Fig. 19(b)). In the figures, the same reference numerals as in Fig. 2 denote the same or corresponding parts.

In the figure, the xy coordinate is a coordinate system set in advance to the edge position detector 301 of the workpiece processing apparatus 3, and the origin O is a position to be placed at the center of the workpiece 10. The rotation center of the mounting table 3021 on which the workpiece 10 is placed is placed at a position that coincides with the origin O when the workpiece 10 is placed, for example. At the time after the workpiece 10 is placed, the center Q of the workpiece 10 is not located at the origin O, and the workpiece 10 is rotated at the position of the origin O as a center of rotation. The center of the workpiece 10 is located at a position away from the origin h from the origin O in the direction of the angle α.

The point P ₁ is a point in the imaging area AP ₁ , for example, a center point of the imaging area, and is a position set at a predetermined rotation angle with respect to the origin O and away from the same radius as the workpiece 10 . In this way, when the center of the workpiece 10 is placed on the origin O, the point P _{1 is} positioned on the edge of the workpiece 10.

Further, in FIG. 19, in the positive range of the x-axis, the position at which the edge of the workpiece 10 intersects with the x-axis and the position of the line connecting the center of rotation O of the workpiece 10 as the origin are the positions of the rotation angle of 0°, and the rotation angle Then set to add value to the counterclockwise direction.

Hereinafter, a specific example will be described using FIG. In the state shown in Fig. 19 (a), the moving unit 302 obtains the angle θ _t indicated by the correction information described in the first embodiment, and the angle θ _{t is} obtained by aligning the center of rotation of the workpiece 10 with the workpiece 10. The reference line for the center angle α (here, the x-axis) is formed by an orthogonal line (here, the y-axis) and a connecting line at both ends of a defective portion 1901 which is an object moving in the imaging region. The angle θ _t can also be a misalignment angle. For example, by using information such as the radius of the workpiece 10 stored in a storage unit or the like (not shown) and the rotation angles of the ends A and B of the defective portion 1901, the coordinates of the ends A and B of the defective portion 1901 can be calculated. Therefore, the coordinates of the ends A and B can be used to calculate the angle θ _t . The angle θ _t corresponds to an angle formed by the connection line QM between the midpoints M on the connecting lines A and B at the both ends of the defective portion 1901 and the center of the workpiece 10 to the reference line (for example, the x-axis).

Next, the connecting line 10 and the midpoint M QM center line connecting both ends of the workpiece defect portion 1901, so long as to be parallel to a line segment OP _1, through the workpiece 10 after the horizontal direction (e.g., x-axis direction or y-axis direction) moving, so that the defect portion 1901 can be connected to both ends of the line connecting the midpoint 10 of the center line M and the workpiece QM overlapping line segment OP _1. Thus, the workpiece 10 is calculated for the origin O of the rotation center of the rotation angle γ of the center of rotation, so that a defective portion 1901 connecting line 10 connecting both ends of the center line of the middle point M and the workpiece QM formed parallel to a line segment OP _1. For example, when the angle formed by the connecting line OP ₁ of the imaging region center point P ₁ and the origin O and the reference line (for example, the x-axis) is β, the rotation angle γ is β-θ _t .

By the rotation angle γ, the workpiece 10 is rotated about the origin O, that is, as shown in FIG. 19(b), the midpoint M on the connecting line at both ends of the defective portion 1901 and the connecting line QM at the center of the workpiece 10 are is formed parallel to a line segment OP _1.

At this time, by the γ rotation of the workpiece 10, the center Q of the workpiece 10 is at a position away from the distance h with respect to the origin O toward the angle α+γ. Therefore, the workpiece 10 is moved so that the center Q of the workpiece 10 overlaps with the origin O. That is, by moving the workpiece 10 by the distance h in the opposite direction of the angle α + γ, the line segment QM moves in parallel with the center Q overlapping with the origin O, and overlaps with the line segment OP ₁ , and the midpoint M of the defective portion 1901 AP ₁ is arranged in the imaging area. Further, here, the defect portion 1901 midpoint M will be located on a straight line connecting the origin O of the photographing area of an AP ₁ of the center point P should be configured with _a center position of the workpiece 10.

Therefore, as described above, for each defective portion to be photographed, information indicating the defective portion and information indicating the position of the photographing region AP ₁ (for example, information indicating the center point P ₁ , etc.) are used, and the two ends of the defective portion are calculated. The midpoint of the line segment is the angle θ _t formed by the line orthogonal to the angle reference line, and the angle θ _{t is} used to calculate the rotation angle γ of the workpiece 10 rotating around the rotation center, and is used to make the correction information The rotation center of the workpiece 10 is an angle α indicating the moving direction for the purpose of moving the center, and an angle α+γ indicating the moving direction for moving the center of the workpiece 10 having the rotation angle γ to a predetermined position is calculated. Then, when each defective portion is to be photographed, the workpiece 10 is placed in the initial state of being placed on the mounting table 3021, and each defective portion is rotated at a rotation angle γ, and the correction information is moved in the horizontal direction in the opposite direction to the direction indicated by the angle α+γ. The amount of movement h shown.

Whereby embodiment, the center of the workpiece 10 can be arranged at a pre-specified location, and the defective portion 1901 is disposed in the photographing region AP _1.

Further, since the defective portion can be photographed in a state where the center of the workpiece 10 is disposed at a predetermined position, for example, when the shape of the workpiece 10 is circular or the like, the edge position of the workpiece 10 in the captured image can be aligned. At approximately the same position, it is easy to view when comparing a plurality of images, and provides a highly convenient image.

In addition, the above-described rotational movement and the order of horizontal movement are not limited.

In addition, the calculation formula and the like used in the above are merely examples, and in the present invention, other calculation formulas or the like may be used as long as substantially the same value can be obtained. In addition, the angle or the like used in the above may be appropriately changed and used by the rotation direction of the workpiece 10, the position of 0°, or the setting of the reference line.

Further, the straight line or the line segment in which the x-axis or the like is specified in advance may not necessarily be a reference straight line or line segment indicating the rotation angle α for moving the center of rotation of the workpiece 10 to the center of the workpiece 10, in which case, for example, The difference between the reference straight line of the rotation angle α and the inclination of the straight line or the line segment or the like in which the x-axis or the like is specified in advance, and the moving direction, the moving distance, or the rotation angle obtained may be appropriately corrected when the workpiece 10 is moved. Further, the predetermined position at which the center of the workpiece 10 should be disposed may not be the position of the center of rotation of the workpiece when the workpiece 10 is placed on the moving portion 302. In this case, the moving direction, the moving distance, or the rotation angle obtained when the workpiece 10 is moved may be appropriately corrected in accordance with the positional relationship between the position of the center of rotation at the time of mounting and the predetermined position at which the workpiece 10 is placed.

In the above-described processing, the moving direction is mainly expressed by an angle or the like, but a coordinate obtained by an angle or a moving amount or the like may be used instead of the angle.

In addition, the above-described processing is only an example, and other methods may be used in the present invention as long as substantially the same rotation angle γ or the moving direction of the rotation center can be obtained.

(2) When the workpiece is not moved in the horizontal direction, for example, in order to obtain the first rotation distance information, the moving portion 302 can also perform only the rotational movement of the workpiece 10 placed on the stage 3021 to make the defective portion Move to the shooting area. Specifically, the moving unit 302 can rotate the workpiece 10 in accordance with the rotation angle indicating the position of the defective portion output from the output unit 104, and appropriately arrange the defective portion in the imaging region. For example, an average angle representing an angle of the position of both ends of the defective portion can be calculated, and the workpiece 10 is rotated so that the angle coincides with the direction of the center point of the shooting region based on the rotation center and the predetermined reference line, and the workpiece 10 is made Move so that the center of the defective portion is roughly at the center of the shooting area.

(3) When the workpiece center is aligned with the rotation axis of the workpiece rotation mounting table, for example, the moving unit 302 is provided to move the workpiece 10 from the mounting table 3021, and then moves in the horizontal direction, and again mounts the workpiece 10 on the load. The lifting device (not shown) or the like on the table 3021 is used, and the correction information output from the output unit 104 is used to pick up the workpiece 10 from the mounting table 3021 by the lifting device, and the workpiece 10 is corrected by the correction information output from the output unit 104. The center movement is overlapped with the rotation center of the mounting table 3021 that rotates the workpiece 10, and the workpiece 10 is placed on the mounting table 3021. Further, as described above, the defect portion may be rotated by a rotation angle γ by the angle θ _t indicating the position of the defective portion obtained from the defective portion, and the defective portion may be moved into the imaging region.

Further, on the mounting table 3021, a device other than the above-described lifting device may be used as long as the position of the workpiece 10 can be moved.

In the following, the case where the moving unit 302 moves the workpiece 10 by the above-described processing (1) will be described as an example.

When a plurality of defective portions exist at the edge of one workpiece 10, the moving portion 302 can also sequentially move the defective portions to the photographing region. For example, when the imaging unit 303 ends the imaging of the defective portion moved to the imaging region, the moving portion 302 moves the next defective portion to the imaging region.

Moreover, the moving portion 302 may also uniformly move the plurality of defective portions that are close to each other to the same photographing region in a plurality of defective portions existing at the edge of one workpiece 10. The defective portion that is close to the position refers to, for example, a defective portion located in a predetermined range, and in a specific example, the rotation angle indicating the position of the defective portion is a defective portion positioned in a predetermined range. The pre-specified range means, for example, a range in which the edge of the workpiece 10 can fall below the range within the imaging area at a time. For example, the moving portion 302 can also move the workpiece 10 such that a position that bisects the positions of the defective portions at both ends of the plurality of defective portions that are close to and located at the edge is located at the center of the photographing region. In this case, as long as the plurality of defective portions that are close to each other are regarded as one defective portion, a plurality of defective portions that are close to each other are moved to the imaging region by using a rotation angle or the like indicating the positions of both ends thereof. This processing may also be a process of grouping the adjacent defective portions.

The moving portion 302 can also move only one or more defective portions detected by the detecting portion 306 to the photographing region in the edge defective portion of the workpiece 10. The defective portion detected by the detecting portion 306 means one or more defective portions whose size is larger than the other defective portions at the edge of the workpiece 10. The processing and the like of the detecting unit 306 are described later.

Further, when the photographing of one or more defective portions of one workpiece 10 is completed, the moving portion 302 can also use the output portion 104 to output, for example, to deliver the workpiece 10 in the aligned position state to the workpiece transporting device 2 in the subsequent stage. The workpiece 10 is moved by the alignment position information of the workpiece 10 or the orientation specific information of the workpiece 10, and the center of the workpiece 10 is placed at the above-mentioned predetermined position, and the orientation of the workpiece 10 is formed in a predetermined direction. .

Further, when one workpiece 10 has no defective portion, the moving portion 302 may not perform a process of moving the above-described defective portion to the image capturing region. For example, when the output unit 104 outputs the information on the defective portion indicating that the workpiece 10 is free from defects, the processing of moving the defective portion described above to the imaging region may not be performed.

In addition, the moving unit 302 can perform the same operation and the like as the turntable 52, the turntable rotation mechanism 53, the electric motor 54, and the like described in the first embodiment, as appropriate.

The moving unit 302 may be provided with an MPU or a memory for calculating information such as a moving distance or a rotation angle. A processing program or the like for calculating a moving distance, a rotation angle, and the like is generally implemented by software, and the software is recorded on a recording medium such as a ROM. However, it can also be implemented by hardware (dedicated circuit).

Here, the case where the moving portion 302 constitutes a part of the edge position detector 301 will be described as an example, but the moving portion 302 may be a part of the non-edge position detector 301.

The imaging unit 303 captures an edge defect portion of the workpiece disposed in the imaging region. The photographing of the defective portion refers to, for example, shooting in an image capturing area in which a defective portion is disposed. The imaging unit 303 is a camera including an image sensor such as a CCD (Photosensitive Coupling Element) or a CMOS (Complementary Metal Oxygen Semiconductor). The imaging unit 303 can be configured, for example, such that its imaging region includes a portion of the edge of the workpiece 10 and its periphery in a configuration state in which the center is disposed at a predetermined position. The imaging unit 303 is generally disposed such that its optical axis is perpendicular to the surface of the workpiece 10. It is preferable that the installation position of the imaging unit 303 is movable in the horizontal direction, and the imaging area can be changed in accordance with the specifications of the workpiece 10. The imaging unit 303 is attached to the workpiece processing apparatus 3 by, for example, a jig. In this case, even if the moving unit 302 moves the workpiece 10, the position of the imaging unit 303 does not move.

The imaging unit 303 generally has an optical system for imaging light from the subject to the light receiving surface of the image sensor. Further, the imaging unit 303 may include a lighting fixture for illuminating the imaging region or its surroundings, such as an annular illumination. In the imaging unit 303, it is preferable to use a high-resolution image-detectable defective portion. As an example of the imaging unit 303, for example, a CCD camera having a viewing angle of 3 mm square and a pixel number of 350,000 pixels can be used. Further, as the imaging unit 303, for example, a digital camera for the livelihood can be used. The image captured by the imaging unit 303 may be a color image or a grayscale image. The color depth of the image is not limited. The image captured by the imaging unit 303 is generally a still image, but may be a moving image. The imaging unit 303 may perform fixation by fixing the focus, or may perform imaging by autofocus. The data format of the video acquired by the imaging unit 303 is not limited. Further, as the imaging unit 303, a so-called scanner or the like that performs imaging by line sensor scanning may be used.

When, for example, the moving portion 302 moves a defective portion or a group of an adjacent defective portion to the imaging region, the imaging portion 303 performs imaging of the defective portion. However, it is also possible to perform imaging in accordance with an instruction of a user who is accepted by an accepting unit or the like (not shown).

The imaging unit 303 can capture only the defective portion detected by the detecting unit 306, which will be described later, in the edge defective portion of the workpiece 10. In this way, among the plurality of defective portions of the edge of the workpiece 10, only one or more defective portions whose size is larger than the other defective portions can be selectively taken.

Further, the workpiece processing apparatus 3 may include a plurality of imaging units 303. For example, a plurality of imaging units 303 having different imaging regions or partially overlapping imaging regions may be provided. The plurality of imaging units 303 are, for example, a plurality of imaging units each having an arrangement area along the center of the workpiece disposed at a predetermined position. The plurality of imaging units 303 may simultaneously perform imaging or the like in substantially the same manner as one imaging unit. By adopting this method, it is possible to simultaneously shoot a group of a plurality of defective portions that exist simultaneously in a wide range, and the time taken for photographing or moving for shooting can be shortened.

The corrected defect position acquisition unit 304 uses the information for aligning the workpiece 10 with the output of the workpiece 10, the orientation information for the workpiece 10, and the information about the edge defect portion of the workpiece 10, and the center of the workpiece 10 and The specific orientation of the workpiece is used as a reference, and the corrected defect position information is obtained, and the corrected defect position information is information indicating the position of the defective portion of the workpiece. The corrected defect position information is, for example, position information of a defect corrected based on the center of the workpiece 10 and a specific orientation with respect to the workpiece. The orientation specific information of the workpiece 10 is, for example, position information indicating a notch portion of the workpiece 10 such as an oriented flat surface. The information indicating the position of the notch portion is, for example, information indicating the midpoint position of the line segment connecting the both ends of the notch portion. The information indicating the position of the notch portion is, for example, the rotation angle of the connecting line segment at the midpoint of the connecting line segment at both ends of the notch portion and the center of the workpiece 10. The corrected defect position information is, for example, information indicating the edge defect position of the workpiece 10 based on the position of the center of the workpiece 10 and the position of the notch portion. Specifically, the corrected defect position information is an angle formed by a line connecting the point of the notch portion and the center of the workpiece 10, and a line connecting the point of the edge defect portion of the workpiece 10 and the center of the workpiece 10. The point indicating the position of the notch is, for example, the midpoint of the line segment connecting the ends of the notch. The point indicating the position of the defective portion is, for example, the midpoint of the line segment connecting the ends of the defective portion.

The reference to the center of the workpiece 10 and the orientation specific to the workpiece is set to a position corresponding to the rotation angle, for example, at a position corresponding to 0°, but may be set to be 0° or more. The rotation angle is desired, and the orientation specified in accordance with the orientation may be set as a reference of the rotation angle or the like.

As described above with reference to Fig. 19, the angle formed by the connecting line segment at the center of both ends of the defective portion and the center of the workpiece 10 and the straight line orthogonal to a predetermined straight line (for example, the y-axis of Fig. 19, etc.) is The line connecting the ends of the defective portion is formed at the same angle as the pre-specified straight line (for example, the x-axis of Fig. 19), and the angle can be obtained from information indicating the position of both ends of the defective portion. Therefore, by obtaining the angle for each defective portion, the rotation angle at the midpoint of the both ends of the defective portion with the center of the workpiece 10 as the center of rotation can be calculated. The same rotation angle can be calculated for the notch portion by using the information of the positions of both ends of the notch portion outputted by the output portion 104 or the like. Then, by subtracting the rotation angle of the notch portion from the rotation angle of each defect portion calculated in this way, the corrected defect position information is obtained, and the corrected defect position information is a connection line between the notch portion and the center of the workpiece 10. The angle of rotation of each defective portion as a reference.

In addition, the corrected defect position acquisition unit 304 may appropriately use the rotation angle information of the connection line between the midpoint of the defect portion and the center of the workpiece 10 calculated when the workpiece 10 is moved by the movement unit 302 when acquiring the corrected defect position information. In this manner, the position information for the workpiece 10, the direction-specific information of the workpiece 10, the information on the edge defect portion of the workpiece 10, the operation for correcting the defect position information, the moving portion 302, and the like can be used for the workpiece 10 outputted directly by the output unit 104. The information obtained by the information is used to obtain the information of correcting the defect position information, and here also the information of the alignment position of the workpiece 10 outputted by the output unit 104, the orientation specific information of the workpiece 10, and the edge defect of the workpiece 10 Part of the information to get the action to correct the defect location information.

The video output unit 305 outputs the video captured by the imaging unit 303. The output referred to here includes, for example, a concept of being displayed on a monitor screen, projected by a projector, printed by a printer, transmitted to an external device, stored in a recording medium, and processed to another processing device or other program.

The video output unit 305, for example, associates and outputs an image captured by the imaging unit 303 with at least one of an identifier of the workpiece 10 corresponding to the image or a defective portion identifier. The identifier of the workpiece 10 may be a code assigned to the workpiece 10 or the like, or may be an identifier (for example, code, etc.) and a representation of a batch of the workpiece group including the plurality of workpieces as the workpiece to be photographed. A combination of information (for example, information such as the first few pieces) of the order of the workpieces to be photographed in the lot. The identifier of the defective portion is a code such as a number assigned to the defective portion. The identifier of the workpiece 10 corresponding to the image refers to the identifier of the workpiece 10 as the image capturing target. Furthermore, the identifier of the defective portion corresponding to the image refers to the identifier of one or more defective portions as the image capturing target. The image output unit 305 may cause the corrected defect position acquisition unit 304 to output and output the corrected defect position information acquired for the defective portion of the image capturing target in association with the image.

In the video output unit 305, it is preferable to perform enlargement and reduction of the display image, movement of the display range, and the like in accordance with an instruction from a user or the like received via a receiving unit or the like (not shown). In this way, since it is possible to enlarge, if the image captured by the imaging unit 303 is a high-resolution person, the defective portion of the edge can be enlarged and displayed, and the shape of the edge-defective portion which is difficult to visually recognize can be easily confirmed.

Furthermore, when displaying an image, information indicating the image scale, such as a scale or a scale, may be superimposed on the image. In this way, the specifications of the defective part are easy to grasp. Further, the display position or the like of the information indicating the image scale may be changed in accordance with the user's instruction. In addition, the scale, the scale, and the like may be appropriately calculated in accordance with the resolution of the imaging unit 303 or the distance from the imaging unit 303 to the workpiece 10, or may be obtained by a predetermined degree or a resolution or a distance from a storage unit or the like (not shown). The scale can be used. The distance from the imaging unit 303 to the workpiece 10 or the like can also be obtained using, for example, a distance measuring sensor (not shown).

The video output unit 305 may be an output device including or not including a display, a printer, a communication device, a storage device, or the like. The video output unit 305 is realized by a drive software of the output device, a drive software of the output device, an output device, and the like.

The detecting unit 306 outputs information on the edge defective portion of the workpiece 10 using the output portion 104, and detects one or more defective portions having a large defect size in the edge defective portion of the workpiece 10. The more than one defective portion having a larger size may be a defective portion that is larger in conformity with a predetermined condition of the relevant size.

The detecting unit 306 detects, for example, the information indicating the range of the rotation angle of the defective portion with respect to the information of the defective portion by the output portion 104 to detect one or more defective portions. The detecting unit 306 detects, for example, a defective portion having a rotation angle range equal to or greater than a critical value of the rotation angle range, and is regarded as a small one or more defective portion of the defective portion. Further, it is also possible to sequentially detect a predetermined number of defective portions in a defective portion of one workpiece 10 from a larger range of rotation angles, and to treat one or more defective portions having a larger size of the defective portion.

Further, the detecting unit 306 detects, for example, the information indicating the distance difference information about the information of the defective portion by the output unit 104 to detect one or more defective portions. The detecting unit 306 detects, for example, a defective portion having a maximum value of the distance difference information corresponding to the defective portion in advance as a critical value or more as one or more defective portions having a large size of the defective portion. Further, in a defective portion of one workpiece 10, a predetermined number of defective portions may be sequentially detected from a larger value forming a corresponding distance difference information as one or more defective portions having a larger size of the defective portion. The distance difference information corresponding to the defective portion may also be information indicating the depth or height of the defective portion.

Further, the detecting unit 306 may detect the combination of the information indicating the range of the rotation angle and the information on the distance difference information as one or more defective portions having a large size of the defective portion. For example, it is also possible to detect a defective portion in which the rotation angle range is above the critical value and the value of the distance difference information is above the critical value. In addition, it is also possible to detect the size of the range of the rotation angle and the defect portion of the distance difference information within the predetermined order.

Further, the detecting unit 306 may detect a defective portion that satisfies the above-described conditions as one or more defective portions having a large size of the defective portion.

The evaluation unit 307 uses the video output from the video output unit 305 to evaluate the defective portion indicated by the video. The evaluation of the defective portion refers to, for example, an evaluation of the influence of the defective portion on the workpiece 10. For example, when the workpiece 10 in which the defective portion is detected is used in a subsequent procedure, whether the defective portion affects the workpiece 10, what effect it is, and the like are evaluated. In the evaluation of the defective portion, for example, when the defective portion is generated, the workpiece 10 having the defective portion may be evaluated for the possibility of breakage such as cracking in a subsequent process or the like. The evaluation of the defective portion can also be an evaluation of whether the workpiece 10 has an abnormality.

For example, the evaluation unit 307 performs evaluation of the defective portion shown by the image by pattern matching. For example, one or more pieces of evaluation pattern management information for composing information of the image and the evaluation result of the defect portion are stored in a storage unit or the like (not shown). Next, it is determined whether or not the image output by the image output unit 305 matches the image pattern of each evaluation pattern management information. When there is a match, an evaluation result corresponding to the image pattern is obtained. The image image refers to information such as image feature points. The image feature points refer to, for example, information on the number of lobes of the defective portion, the position of the lobes, and the width or depth of the defective portion. An image having a feature point that can be determined to coincide with a feature point indicated by the image pattern is determined as an image that matches the image pattern. The evaluation unit 307 may perform image processing such as binarization on the image output from the image output unit 305 before pattern matching is performed.

In addition, the processing for performing pattern matching on an image is a well-known technique, and a detailed description thereof will be omitted herein.

Furthermore, the evaluation unit 307 can also perform an image-like search to perform an evaluation of the defective portion indicated by the image. For example, one or more pieces of evaluation image management information of information composed of the evaluation image and the evaluation result of the defective portion are stored in advance in a storage unit or the like (not shown). Then, when the similarity between the video output from the video output unit 305 and each evaluation video is obtained, and the similarity is equal to or greater than a predetermined threshold value, the evaluation unit 307 obtains the evaluation result corresponding to the evaluation video image. The evaluation image is, for example, one or more images captured by the imaging unit 303. The evaluation image can be a color image, a grayscale image, or a binarized image. The degree of similarity between the images may be, for example, a comparison of the average of the pixel values constituting the image, a histogram of the pixel values, a comparison of the amplitude width of each frequency calculated from the image, or the like, or may be binarized images of each other. The ratio of consistent pixels, etc.

Furthermore, the evaluation unit 307 can also search for similar searches as images using other well-known similar images such as image search using mean square error.

Further, the similar search performed on the image, the process of obtaining the similarity between the images, and the like are well-known techniques, and detailed description thereof will be omitted.

As long as the evaluation result is information indicating the evaluation result related to the defective part, any information can be used. For example, it may be information indicating a defective portion that is highly likely to be associated with breakage of the workpiece 10, or information indicating a damage occurrence rate range (for example, 50% or more). In addition, it may be information indicating what kind of abnormality has occurred. Further, it may be information indicating that the workpiece 10 is damaged. Further, two or more combinations of these pieces of information may be used.

Further, the evaluation unit 307 can estimate the defective portion displayed on the video output by the video output unit 305 by using the video situation information stored in the video situation information storage unit 310 to be described later. For example, it is also possible to evaluate the defective portion by using information on the defective portion image captured by the imaging unit 303 and information on the workpiece condition of the workpiece 10 displayed on the image of the image information. Information about the workpiece situation will be described later. The information about the defective part of the image information can be the image of the defective part or the feature point information obtained from the defective part of the image.

For example, when the information on the defective portion image refers to the image of the defective portion, the evaluation unit 307 uses the image having the image information, and performs the same similar search as that described above on the image output from the image output unit 305, and obtains the image information from the image. The image determined to be similar forms the corresponding workpiece situation information as the evaluation result. The image information of this case can also be the above-mentioned evaluation image management information.

Further, for example, when the information on the defective partial image is the information of the feature point of the defective partial image, the evaluation unit 307 performs the same image as the above using the image feature point information of the image output information for the image output from the video output unit 305. The pattern matching is obtained from the image situation information to form corresponding workpiece situation information with the feature point information determined to be matched, as the evaluation result. The image situation at this time can be the above-mentioned evaluation graph management information.

Further, the evaluation unit 307 can perform machine learning using the video situation information stored in the video situation information storage unit 310, which will be described later, and perform the evaluation of the video output by the video output unit 305 using the result of the machine learning. For example, one or two or more groups of image feature points of the image situation information and the workpiece situation information of the defective portion indicated by the image may be learned, and the learning result may be used to obtain the output from the image output unit 305. The workpiece situation information corresponding to the feature points obtained by the image is used as the evaluation result. The configuration and processing of the machine learning are the same as those of the first embodiment, and detailed description thereof will be omitted.

The evaluation result output unit 308 outputs the evaluation result obtained by the evaluation unit 307. The evaluation result output unit 308 may, for example, associate and output the evaluation result with the workpiece identifier corresponding to the image of the evaluation target as the evaluation result, or the identifier of the defective portion, or the corrected defect position information.

The output here includes, for example, display on a monitor screen, projection using a projector, printing on a printer, transmission to an external device, storage to a recording medium, processing of a processing result to other processing devices or other programs, and the like. concept.

The evaluation result output unit 308 may or may not include an output device such as a display, a printer, a communication device, or a storage device. The video output unit 305 is realized by a drive software of the output device, a drive software of the output device, an output device, and the like.

The situation accepting unit 309 receives the workpiece situation information indicating that one or more of the defective portions of the workpiece 10 that have been imaged by the imaging unit 303 are photographed, and that one or more processes are specified in advance for the workpiece 10 Information on the situation afterwards. For example, the situation accepting unit 309 accepts the workpiece situation information from the user or the like.

The pre-designation processing refers to, for example, processing performed on the workpiece 10. If the workpiece 10 is a semiconductor wafer, the predetermined processing means, for example, one or more processes constituting a semiconductor manufacturing process.

The case of the workpiece 10 can be regarded as the state of the workpiece 10, for example, whether the workpiece 10 is abnormal such as breakage, and what kind of abnormality is abnormal. What kind of abnormality, for example, when the abnormality is broken, refers to a situation in which cracking or cracking occurs. The case of the workpiece 10 may also be a case of a workpiece due to a defective portion existing in the workpiece 10. The case of the workpiece which is present due to a defective portion of the workpiece 10 means, for example, a case where cracks are generated from the defective portion at a position corresponding to one defective portion of the workpiece 10.

The workpiece condition information is information indicating the state of the workpiece 10 described above. The workpiece condition information is, for example, information indicating whether or not the workpiece 10 is normal even in the processing after shooting. Alternatively, it may be information indicating what kind of abnormality has occurred in the workpiece 10 during the processing after the shooting. Further, the workpiece condition information may be an evaluation value or an index of the workpiece 10 whose processing has ended after the shooting.

For example, the situation accepting unit 309 accepts the identifier of the workpiece 10 or the workpiece situation information corresponding to the defective portion identifier. For example, when an abnormality is detected in a subsequent program of the workpiece 10 after the photographing, that is, the identifier of the workpiece 10 and the workpiece condition information are simultaneously accepted.

The term "acceptance" as used herein refers to, for example, reception from an input device, reception of an input signal transmitted from another device, or reading of information from a recording medium or the like. The input device for accepting the information of the workpiece condition may be any one of a numeric key, a keyboard, a mouse or a menu screen. The situation accepting unit 309 can be realized by a device driver of an input device such as a numeric keypad or a keyboard, a control software for a menu screen, and the like.

The image situation information storage unit 310 is for storing image situation information, and the information in the image situation information has information on the defective portion image output by the image output unit 305 and workpiece condition information. The information about the defective partial image refers to information obtained by, for example, using image matching or image similar search. The information about the image of the defective portion may be, for example, the image of the defective portion itself, the image obtained by binarizing the image of the defective portion, or the image of the feature point obtained from the image of the defective portion, or the information of the defective portion. The image is subjected to filtering processing such as filtering processing in advance. Further, the information on the defective partial image may have two or more kinds of information among the information. The workpiece situation information stored in the video situation information storage unit 310 is, for example, situation information accepted by the situation reception unit 309.

The image situation information accumulation storage unit 311 stores the image situation information in the video situation information storage unit 310, and the video situation information includes the information on the defective portion image output by the video output unit 305 and the workpiece received by the situation accepting unit 309 regarding the defective portion. Situation information. For example, the image situation information accumulation storage unit 311 accumulates the image situation information, and the image situation information has the defect portion image output by the image output unit 305 and the workpiece condition information about the defect portion. In addition, for example, the image situation information accumulation storage unit 311 may obtain the information about the image from the defective portion image output by the image output unit 305, and may have information about the image acquired and information about the workpiece condition of the defect portion. The image information is accumulated and stored.

The so-called workpiece condition information about the defective part may be information about the workpiece condition of a defective part, or may be information about the workpiece condition of the workpiece having a defective part. When the image situation information accumulation storage unit 311 accepts, for example, information specifying one or more defective partial images and one workpiece situation information on the defective portion indicated by the image, the information about the defective partial image and the received workpiece situation information are formed. Correspondingly, it is stored in the image situation information storage unit 310.

For example, when the situation receiving unit 309 receives the workpiece situation information corresponding to the identifier of the workpiece and the defect portion identifier of the workpiece, the image situation information accumulation storage unit 311 can store the image situation information in the image situation information storage unit 310. And the image situation information is formed in a corresponding manner: the workpiece identifier corresponding to the workpiece identifier in the defective portion image output by the image output unit 305 is formed to correspond to the defect portion identifier corresponding to the defect portion identifier More than one defective part of the image, and information about the accepted workpiece.

For example, when the situation receiving unit 309 receives the workpiece situation information corresponding to the identifier of the workpiece, the image situation information accumulation storage unit 311 can store the image situation information in the image situation information storage unit 310, and the image situation information is formed to correspond. In the method, the workpiece identifier corresponding to the workpiece identifier in the defective portion image outputted by the image output unit 305 forms one or more defective partial images and the received workpiece situation information.

Further, the workpiece transport system may be configured by the workpiece processing apparatus 3 of the present embodiment and the workpiece transport apparatus 2 described in the first embodiment. For example, the workpiece transport system is a workpiece transport system obtained by providing the workpiece processing apparatus 3 in the workpiece transport system 1000 of the above-described first embodiment shown in FIG. 4 and the like instead of the workpiece processing apparatus.

Next, the operation of the workpiece processing apparatus 3 of the present embodiment will be described using the flowchart of Fig. 20 . The processing performed by the workpiece processing apparatus 3 of the present embodiment is the same as the workpiece processing apparatus 1 of the first embodiment shown in FIG. 6, and the processing shown in FIG. 6 performs the processing shown in FIG. 20 below as the processing from step S119. The process returns to step S100. Specifically, the process of FIG. 20 is started after step S119 of FIG. 6, and when the process of FIG. 20 is completed, the process returns to step S100 of FIG. In addition, the description about the process shown in FIG. 6 is omitted here.

(Step S301) The moving unit 302 outputs information on the defective portion from the output unit 104 to determine whether or not there is one or more defective portions at the edge of the workpiece 10. If yes, go to step S302; if not, go to step S314.

(Step S302) The detecting unit 306 detects one or more defective portions having a large size from the defective portion. Also, when there is only one defective portion, the processing can be omitted. Further, when the defective portion having a large size cannot be detected, the process proceeds to step S314.

(Step S303) The moving unit 302 substitutes 1 into the counter k.

(Step S304) The moving unit 302 displays the information of the position using the rotation angle or the like of the kth defective portion, moves the center of the workpiece 10 to a predetermined position, and acquires a workpiece required to move the kth defective portion to the shot region. The angle of rotation of 10.

(Step S305) The moving unit 302 acquires the amount of horizontal movement of the workpiece 10 required to move the workpiece 10 and the kth defective portion to the same position as described above. The amount of horizontal movement refers to information such as a distance, an angle, a moving direction, a moving distance in the x-axis direction, and a moving distance in the y-axis direction for moving the workpiece 10 in the horizontal direction.

(Step S306) The moving unit 302 moves the workpiece 10 in accordance with the rotation angle information and the horizontal movement amount acquired in steps S304 and S305, and moves the kth defective portion to the imaging region.

(Step S307) The imaging unit 303 images the kth defective portion of the workpiece 10.

(Step S308) The corrected defect position acquisition unit 304 acquires the corrected defect position information for the kth defective portion. For example, for the kth defective portion and the notched portion, the rotation angle when the center of the workpiece 10 is the center of rotation is obtained, and the difference is obtained as the corrected defect position information.

(Step S309) The video output unit 305 outputs the video captured by the imaging unit 303. For example, the video output unit 305 associates the video with the identifier of the workpiece 10 or the identifier of the kth defective portion, or the corrected defect position information of the kth defective portion in step 308, and outputs the image. For example, the video output unit 305 stores the video in a storage unit (not shown). Further, the video output unit 305 can display the video on a monitor or the like.

(Step S310) The evaluation unit 307 performs evaluation of the kth defective portion displayed on the image using the image stored in step S309. For example, from the image pattern of the image situation information stored in the image situation information storage unit 310, the image pattern matching the image of the kth defective portion is detected by pattern matching, and the detected pattern is obtained. The corresponding workpiece situation information is used as the evaluation result.

(Step S311) The evaluation result output unit 308 outputs the evaluation result. For example, it is displayed on a monitor or the like.

(Step S312) The moving unit 302 increments the value of the counter k by one.

(Step S313) The moving unit 302 determines whether or not the kth defective portion exists. If yes, the process returns to step S304; if not, the process goes to step S314.

(Step S314) The moving unit 302 moves the notch portion in a predetermined direction and acquires the rotation angle of the workpiece 10 necessary for the center of the workpiece 10 to move to a predetermined position.

(Step S315) The moving unit 302 moves the notch portion in a predetermined direction and acquires the amount of horizontal movement of the workpiece 10 necessary to move the center of the workpiece 10 to a predetermined position.

(Step S316) The moving unit 302 moves the workpiece 10 in accordance with the rotation angle acquired in step S314 and the movement amount acquired in step S315. This movement is, for example, a movement for aligning the workpiece 10 with the workpiece conveying device 2 and the like. Then, the process ends. When the process ends, the process returns to step S100 of Fig. 6 .

Further, in the workpiece processing apparatus 3 of the present embodiment, after the timing of not setting the threshold value is determined in step S122 of the flowchart shown in FIG. 6, the determination unit 309 has received the processing of the workpiece situation information. When the workpiece situation information is received, the image situation information accumulation storage unit 311 can store the image situation information having the received workpiece situation information and the information about the defective partial image corresponding to the workpiece situation information in the video situation information storage unit 310. The process returns to step S100; if not, the process returns to step S100.

Further, in the flowchart shown in FIG. 20, after the moving unit 302 moves the workpiece 10 in step S316, the workpiece 10 is transported from the workpiece processing apparatus 3 to another apparatus or the like by the workpiece transport apparatus 2 or the like, for example. In addition, when the workpiece transport apparatus 2 is placed on the mounting table 3021 of the moving unit 302 or the like, the workpiece processing apparatus 3 can rotate the workpiece 10 and obtain the workpiece 10 in the same manner as a general so-called aligner or the like. The first rotation distance information is stored in the first rotation distance information storage unit 101.

In addition, in FIG. 20, the process of step S310, step S311, etc., or the process which the video output part 305 outputs the video of a defective part, for example, can be performed suitably according to the instruction of a user, etc..

Further, in the flowchart shown in FIG. 20, the processing of steps S314 and S315 can be performed immediately before step S301; when it is determined in step S301 that there is no defective portion, the processing proceeds to step S316; and in step S313, it is determined that there is no In the case of k defective portions, the process proceeds to step S316, and the workpiece 10 is moved using the information obtained in steps S314 and S315.

Next, a specific example of the workpiece processing apparatus 3 of the present embodiment will be described. Here, a case where the workpiece processing system is constituted by the workpiece processing apparatus 3 and the workpiece transport apparatus 2 will be described as an example. In addition, the workpiece processing apparatus 3 and the like can perform the same processing as the specific example described in the first embodiment, but a detailed description of the processing and the like will be omitted.

Similarly to the specific example of the first embodiment, the workpiece processing apparatus 3 acquires correction information, information on the defective portion, and specific workpiece orientation information for the workpiece alignment position for one workpiece 10, and sets the output unit 104. Output this information. The correction information outputted by the output unit 104 is set to a rotation angle α ₁ and a movement length h ₁ indicating the movement direction. Further, the information about the defective portion output by the output unit 104 is set to be the same as the one shown in FIG. 16 and is a group indicating the maximum value of the range of the rotation angle and the size of the defect portion of the defect portion with respect to the plurality of defective portions, or There is information such as the length from the center of rotation of the workpiece 10 to the ends of each defective portion. Further, the specific workpiece orientation information output by the output unit 104 is a range of rotation angles indicating the range of the oriented flat portion similar to that shown in FIG. 16.

When the moving unit 302 receives the above information from the output unit 104, first, it is determined whether or not the defective portion is present in the workpiece 10. Here, since the information on the defective portion indicates that there is a defective portion, it is determined to be a defective portion.

Since the moving portion 302 determines that there is a defective portion in the workpiece 10, the detecting portion 306 detects a defective portion having a large size from the defective portion. Here, the defective portion whose absolute value of the defect portion is equal to or greater than the critical value is detected. Here, for example, the size of all the defective portions is determined to be equal to or greater than the critical value.

The moving portion 302 causes the first defect portion of the defective portion detected by the detecting portion 306 so that the midpoint of the connecting end line segment of the defective portion is located in the imaging range of the imaging portion 303, and is obtained to move the workpiece 10 in the following manner. The combination of the rotational angle of the rotational movement and the amount of horizontal movement is such that when the pre-designated workpiece 10 is handed over to the workpiece transport device 2, the center of the workpiece 10 is placed at its intended position.

Specifically, using the information indicating the range of the rotation angle indicating the range of the first defect portion, or the length from the rotation center of the workpiece 10 to the both ends of the defect portion, etc., the coordinates of the both ends of the defective portion are obtained, and the ends of the defect portion are obtained. The angle formed by the line segment for a line segment with a 90° rotation angle. Here, the line segment having a rotation angle of 90° is a line segment having an angle of 90 degrees formed by a straight line indicating 0° when the rotation angle α ₁ is obtained, and the angle corresponds to θ _t of FIG. 19 .

Next, the moving unit 302 reads a rotation angle indicating a center position in the imaging region, which is stored in advance in a storage unit or the like (not shown), and subtracts the rotation angle of the line segment pair at both ends of the passing defect portion obtained from the above angle. The angle formed by a 90° line segment. The angle obtained by this method is the rotation angle used when the workpiece 10 is rotated, and corresponds to the angle γ of Fig. 19 .

Further, the moving portion 302 obtains the value obtained by adding the rotation angle α ₁ of the correction information to the angle formed by the line segment at both ends of the defective portion obtained by the line segment at the rotation angle of 90° as the rotation of the workpiece 10 as described above. The angle and the length h _{1 of the} correction information are obtained as the moving distance of the workpiece 10. However, since the rotation angle obtained here is an angle indicating the moving direction for superimposing the center of rotation of the workpiece 10 on the center of the workpiece 10, when the workpiece 10 is moved, the direction of rotation of the workpiece is reversed ( , that is, the direction of rotation 180°).

The moving portion 302 rotates the workpiece 10 by the angle indicated by the rotation angle obtained above with respect to the rotation center of the workpiece 10, and moves the workpiece 10 by a length h ₁ in the opposite direction to the direction indicated by the rotation angle obtained above.

The photographing unit 303 photographs the first defective portion of the workpiece 10 that has been located in the photographing region by such movement.

In addition, the correction defect position acquisition unit 304 performs the same processing as the movement unit 302 by using the rotation angle indicating the range of the orientation flat portion included in the correction information output from the output unit 104, and obtains a straight line pair connecting the ends of the orientation flat portion. An angle formed by a line segment having a rotation angle of 90°, and subtracted from an angle formed by a line segment passing through the first defect portion obtained by the moving portion 302 to a line segment having a rotation angle of 90°, and obtained by the subtraction The value is used as the corrected defect position information on the first defect portion. The corrected defect position information is a rotation angle of the first defective portion when the center of the workpiece 10 is regarded as a center of rotation, based on the rotation angle of the oriented flat portion (that is, 0°).

The video output unit 305 captures an image of the first defective portion captured by the imaging unit 303, an identifier of the workpiece 10 (for example, a code assigned to the workpiece 10), and an ID of the defective portion (for example, a number of the defective portion, etc.) And correcting the defect position information, the shooting date, the depth (height) of the defect portion outputted from the output unit 104, and the defect portion width of the value obtained by converting the range of the defect portion output from the output unit 104 into a length, and storing it in a not shown At the same time, the captured image is associated with the information and displayed on a monitor or the like (not shown).

21 is an image management table for managing a defective portion of the image stored in the image output unit 305. The image management table has "image", "workpiece ID", "defect ID", "corrected defect position", "date", "height", and "width". "Image" is the image of the defective part, here is the file name indicating the image. The "workpiece ID" is the identifier of the workpiece. The "defect ID" is an identifier of a defective portion in the workpiece 10, and is a number assigned to the defective portion detected by the detecting portion 306 in such a manner that the smaller the rotation angle is in the ascending order. The "corrected defect position" is the corrected defect position information acquired by the corrected defect position obtaining unit 304. "Date" is a video shooting date obtained from a clock or the like that is not shown. "Height" is the height or depth of the defective portion, and "Width" refers to the width of the defective portion.

FIG. 22 is a view showing an example of image display of a defective portion output from the video output unit 305. In the figure, the image of the defective portion is displayed in the area 211. In the image displayed in the area 212, the image output unit 305 displays the position on the edge of the direction indicated by the rotation angle indicated by the defect position information in the image of the workpiece 10 which is displayed in the defect-free portion prepared in advance. The mark of the defective part. In the area 213, an identifier of the workpiece corresponding to the defective partial image is displayed. In the area 214, the rotation angle indicated by the corrected defect position information corresponding to the defective portion image, the width and the depth of the defective portion are displayed. In the area 215, the shooting date is displayed. Further, the image displayed on the area 211 can be enlarged, reduced, moved in the display range, or the like in accordance with an instruction from the user or the like.

FIG. 23 is a diagram showing an image situation information management table for managing image situation information stored in the image situation information storage unit 310. The image situation information management table has attributes such as "graphics" and "situation". "Graphics" refers to a graph of the feature amount of a defective portion obtained from a defective portion image. The "case" refers to the workpiece condition information of the workpiece having the defective portion corresponding to the "graphic".

The evaluation unit 307 evaluates the first defective partial image output from the video output unit 305 using the image situation information shown in FIG. Specifically, the evaluation unit 307 sequentially acquires the attribute values of the "graphics" from the respective records (columns) of the video situation information management table of FIG. 23, and sequentially determines whether the image graphics represented by the acquired attribute values are the first. Image matching of the defective part. When there is a match, the attribute value of the "case" corresponding to the matched attribute value is obtained as the evaluation result. In addition, when a recorded graph has a matching time point, the processing can be ended, and all records can be processed. At this time, the attribute values of a plurality of "cases" can be obtained as the evaluation result. When there is no matching figure, the evaluation unit 307 obtains an evaluation result specified by the default or the like, for example, an evaluation result such as "no abnormality". Here, for example, the image of the first defective portion is captured, and the "pattern 2" in the "graphic" is matched, so that the evaluation result of "large workpiece fracture" is obtained.

Then, the evaluation result output unit 308 associates and stores the evaluation result acquired by the evaluation unit 307 with the video image, and displays it on a monitor or the like (not shown).

FIG. 24 is a diagram showing an example of the output of the evaluation result obtained by the evaluation result output unit 308.

With this output, the user can recognize the defective portion as a defective portion of the possibility of occurrence of a large workpiece rupture in the subsequent program.

Further, the above-described processing is repeated for the other defective portions detected by the detecting unit 306.

Then, when the processing of all the defective portions detected by the detecting unit 306 is completed, the moving unit 302 arranges the oriented flat portion of the workpiece 10 in a predetermined direction, similarly to when the defective portion is moved to the imaging region, and acquires The center of the workpiece 10 is placed at a predetermined position of the workpiece 10 at a rotation angle and a horizontal movement amount, and the workpiece 10 is moved using the obtained rotation angle and the amount of movement in the horizontal direction. In this way, the workpiece 10 can be placed at a predetermined position in a predetermined direction.

The workpiece transport device 2 picks up and transports the workpiece 10 aligned in this position and direction. Since the conveyance of the workpiece conveyance device 2 and the like are the same as those of the specific example of the first embodiment, the description thereof will be omitted.

In addition, when the user receives an instruction to display a video of a defective portion or the like via a receiving unit or the like (not shown), the video output unit 305 may display the designated defective partial image as shown in FIG. 21 .

Here, for example, in the subsequent program, the user sets an abnormality such as a crack in the workpiece in which the identifier "W001" is detected on one workpiece 10. Then, when the user inputs the identifier of the workpiece 10 that has been broken and the workpiece situation information about the crack by using an input interface (not shown), the situation accepting unit 309 accepts the information. For example, "W001" which has accepted the identifier of the workpiece 10, and "workpiece fracture" of the workpiece situation information are set.

Then, the video situation information accumulation storage unit 311 reads all the images corresponding to the identifier "W001" of the accepted workpiece 10 from the video management table shown in FIG. 21, specifically "img1001" to "img1005". The feature points are obtained from the respective images, and the graphic information of the feature points of the defective portion is obtained for each image. Then, each of the graphic information is associated with the workpiece situation information received by the situation reception unit 309, and stored in the video situation information storage unit 310. In this way, five records (columns) can be added to the video situation information management table shown in FIG. In this way, information about the image of the defective portion and the influence of the defective portion on the workpiece 10 can be correspondingly stored and stored, and the accuracy of the defect portion evaluation using the defective portion image can be improved.

Further, when the defective portion of the cause of the workpiece breakage may be specified, the defective portion of the workpiece 10 may be specified by, for example, a combination of the workpiece identifier and the defective portion identifier, etc., instead of specifying the workpiece 10 in which the abnormality occurs and the workpiece condition information is Input. Alternatively, the designation of the defective portion is accepted from the image indicated by the area 212 of the display screen shown in FIG.

Further, the acquisition of the subsequent program abnormality detection of the workpiece 10 and the acquisition of the workpiece situation information indicating the abnormality can be automated using an abnormality detecting device or the like (not shown). At this time, the device inputs the identifier of the workpiece 10 and the workpiece situation information which are outputted by the device or the like to the situation receiving unit 309.

As described above, according to the present embodiment, by moving the edge defective portion of the workpiece into the image capturing region to capture the defective portion, the edge of the workpiece can be easily confirmed by the image.

Further, by outputting the defective portion of the edge by capturing the image, the defective portion of the edge can be easily enlarged and displayed, and the shape of the defective portion which is difficult to be visually recognized can be easily confirmed.

Further, according to the present invention, when the workpiece 10 is moved by the moving portion 302 and the center of the workpiece 10 is placed at a predetermined position (for example, when the workpiece 10 is delivered to the workpiece conveying device 2, the center of the workpiece 10 should be disposed. Further, by performing the photographing of the defective portion such that the defective portion is disposed in the photographing range of the photographing portion 303, the position of the defective portion of the workpiece 10 in the image is recorded between images shot with different defective portions of the workpiece 10 of the same specification. Or the edge position other than the defective portion can be maintained at the same position. In this way, the comparison between the images is easy, and when the feature points are acquired from the images or the similarity of the images is judged, the processing with excellent precision can be performed.

Further, in each of the above embodiments, each processing (each function) may be realized by performing centralized processing through a single device (system), or may be realized by performing distributed processing by a plurality of devices.

Furthermore, in each of the above embodiments, each component may be configured by a dedicated hardware, or a component that can be implemented by a software may be realized by an execution program. For example, a program execution unit such as a CPU reads and executes a software-program recorded on a recording medium such as a hard disk or a semiconductor memory, and each component is realized. When the software-program is executed, the program execution unit can execute the program while entering and leaving the storage unit (for example, a recording medium such as a hard disk or a memory). Further, the workpiece processing apparatus of the above embodiment can also be realized by software.

The present invention is not limited to the above embodiments, but various changes can be made, and such changes are also included in the scope of the present invention, and it goes without saying.

[Industrial availability]
As described above, the workpiece processing apparatus of the present invention is suitable as a device for processing a workpiece, particularly as a device for performing positioning of a workpiece or the like.

1, 2, 3‧‧‧ workpiece processing equipment

4‧‧‧ Container

5‧‧‧Container/workpiece handling unit

6‧‧‧ mounting table

10‧‧‧Workpiece

11‧‧‧Workpiece edge

14‧‧‧ segments

15‧‧‧ Sensor

17‧‧‧Directed flat

20, 21, 22, 23a‧‧‧ recess

20a, 21a, 22a, 23‧‧ ‧ convex

25‧‧‧Area

52‧‧‧ Turntable

53‧‧‧ Turntable rotating mechanism

54‧‧‧Electric motor

55‧‧‧Edge Detection Department

55a‧‧‧Light projector

55b‧‧‧Sensor

56‧‧‧Encoder

57‧‧‧ Storage Department

101‧‧‧First Rotation Distance Information Storage Department

102‧‧‧Edge position detector

103‧‧‧Acquisition Department

104‧‧‧Output Department

105‧‧‧Evaluation of relevant information reception department

106‧‧‧Setting Department

211, 212, 213, 214, 215‧‧‧ areas

301‧‧‧Edge position detector

302‧‧‧Mobile Department

303‧‧‧Photography Department

304‧‧‧Revised Defect Location Acquisition Department

305‧‧‧Image output

306‧‧‧Detection Department

307‧‧‧Evaluation Department

308‧‧‧Evaluation Results Output Department

309‧‧‧Situation Department

310‧‧‧Image Information Storage Department

311‧‧‧Image Information Accumulation and Storage Department

1000‧‧‧Workpiece conveying system

1001‧‧‧Transportation path

1031‧‧‧Synthesis device

1032‧‧‧Synthesis treatment device

1033‧‧‧Revised information acquisition device

1034‧‧‧Second distance information acquisition device

1035‧‧‧ Computing device

1036‧‧‧Gap detection device

1037‧‧‧ Defect detection device

1038‧‧‧Revised information output device

1039‧‧‧Distance related output device

1901‧‧‧Defects

3021‧‧‧mounting table

3022‧‧‧Rotating mechanism

3023‧‧‧x-axis moving mechanism

3024‧‧‧y-axis moving mechanism

3025‧‧‧ Cover

Figure 1 is a block diagram of a workpiece processing apparatus according to a first embodiment;

2(a) is a schematic view for explaining an example of a circular workpiece used in a workpiece processing apparatus;

2(b) is a schematic view for explaining correction information acquisition processing of the workpiece processing apparatus;

3 is a schematic view showing an example of an edge position detector of a workpiece processing apparatus;

4 is a plan view showing an example of a workpiece transport system including a workpiece processing apparatus;

Figure 5 is a diagram for explaining the relationship used by the workpiece processing apparatus;

Figure 6 is a flow chart for explaining the operation of the workpiece processing apparatus;

7 is a flow chart for explaining an operation of a workpiece transport system including a workpiece processing apparatus;

Figure 8 is a diagram of a first rotation distance information management table of the workpiece processing apparatus;

Figure 9 is a graph for explaining first rotation distance information of the workpiece processing apparatus;

Figure 10 (a) is a graph of the first rotation distance information of the workpiece processing apparatus in a range in which the rotation angle is 0 degrees or more and less than 90 degrees;

Figure 10 (b) is a graph of the first rotation distance information of the workpiece processing apparatus at a rotation angle of 90 degrees or more and less than 180 degrees;

Figure 10 (c) is a graph of the first rotation distance information of the workpiece processing apparatus at a rotation angle of 180 degrees or more and less than 270 degrees;

Figure 10 (d) is a graph of the first rotation distance information of the workpiece processing apparatus in a range of a rotation angle of 270 degrees or more and less than 360 degrees;

Figure 10 (e) is a composite graph of the first rotational distance information of the workpiece processing apparatus;

Figure 10 (f) is a graph showing a smaller portion of the change in the first rotational distance information of the workpiece processing apparatus;

Figure 11 is a diagram showing a synthetic distance information management table of the workpiece processing apparatus;

Figure 12 is a diagram showing a second rotation distance information management table of the workpiece processing apparatus;

Figure 13 is a diagram showing a plurality of second rotational distance information of the workpiece processing apparatus;

Figure 14 is a diagram showing a distance difference information management table of the workpiece processing apparatus;

Fig. 15 (a) is a graph showing the relationship between the distance difference information acquired by the workpiece processing apparatus and the rotation angle;

Figure 15 (b) is a graph for explaining processing performed by the notch detecting device of the workpiece processing apparatus;

Figure 15 (c) is a graph for explaining processing performed by the defect detecting device of the workpiece processing apparatus;

Figure 16 is a diagram showing an example of an output of a workpiece processing apparatus;

Figure 17 is a block diagram of a workpiece processing apparatus according to a second embodiment;

18 is a schematic view showing an example of a workpiece processing apparatus (FIG. 18(a)) and an example of an edge position detector of the workpiece processing apparatus (FIG. 18(b));

19 is a view for explaining a process of moving a defective portion of the workpiece processing apparatus into an imaging region, wherein FIG. 19(a) is a front view before rotation and FIG. 19(b) is a rear view after rotation;

Figure 20 is a flow chart for explaining the operation of the workpiece processing apparatus;

21 is a view showing an example of a image management table of the workpiece processing apparatus;

Figure 22 is a view showing a display example of the workpiece processing apparatus;

23 is a view showing an example of an image situation information management table of the workpiece processing apparatus;

Figure 24 is a diagram showing an example of display of a workpiece processing apparatus;

Fig. 25 is a block diagram showing another example of the workpiece processing apparatus of the first embodiment.

Claims (15)

A workpiece processing apparatus having: a first rotation distance information storage unit for storing a plurality of first rotation distance information, wherein the first rotation distance information is information having a rotation angle when the circular workpiece is rotated and the first distance information is formed, and the first The distance information is information about the distance from the center of rotation of the workpiece corresponding to the angle of rotation to the edge; a synthesizing device synthesizing a plurality of first distance information corresponding to the rotation angles of the first distance information included in the plurality of first rotation distance information by 90 degrees; The synthesis processing device detects a plurality of composite distance information in which the corresponding rotation angle is continuous and the magnitude of the value changes little in the plurality of combined distance information of the information obtained by synthesizing and acquiring the first distance information by the synthesizing device, and Obtaining, according to one or more of the plurality of composite distance information obtained by the detection, a plurality of first distance information before synthesis and a rotation angle corresponding to one or more first distance information before synthesis; a correction information acquisition device that obtains correction information for aligning a rotation center of the workpiece with a center of the workpiece using a plurality of first distance information and a rotation angle obtained by the synthesis processing device; The correction information output device outputs the correction information acquired by the correction information acquisition device. The workpiece processing apparatus according to claim 1, comprising: The second distance information acquisition device acquires a relational expression indicating a relationship between a rotation angle and a second distance information when the workpiece is a circle having no unevenness at the edge, using the correction information outputted by the correction information output device, and the second distance information acquisition device The information is information about the distance from the workpiece to the edge corresponding to the rotation angle, and the plurality of rotation angles corresponding to the plurality of first rotation distance information are respectively substituted into the acquired relationship, and the second distance information is obtained; The computing device obtains the first distance information and the second distance information corresponding to the same rotation angle by using the plurality of first rotation distance information and the plurality of second distance information obtained by the second distance information acquisition device Poor; and The distance difference related output device outputs information about the difference calculated by the aforementioned computing device. The workpiece processing apparatus according to claim 1, wherein the synthesis processing means sequentially detects, in the plurality of combined distance information, a first process and a slave value of one or more synthetic distance information from a larger value. The smaller one performs at least one of the second processes of detecting more than one synthetic distance information in sequence, and obtains the corresponding rotation angle in the remaining combined distance information in which the first processing and the second processing are not detected. A pair of a plurality of first distance information before synthesis and one or more rotation angles corresponding to one or more first distance information corresponding to one or more synthetic distance information of the continuous synthesis distance information of a plurality or more are specified in advance. The workpiece processing apparatus according to claim 2, wherein the synthesis processing device sequentially detects the first processing and the slave value of the one or more synthetic distance information from the larger one of the plurality of combined distance information The smaller one performs at least one of the second processes of detecting more than one synthetic distance information in sequence, and obtains the corresponding rotation angle in the remaining combined distance information in which the first processing and the second processing are not detected. A pair of a plurality of first distance information before synthesis and one or more rotation angles corresponding to one or more first distance information corresponding to one or more synthetic distance information of the continuous synthesis distance information of a plurality or more are specified in advance. The workpiece processing apparatus according to claim 3, wherein the synthesis processing device performs the first processing and the second processing one or more times. The workpiece processing apparatus according to claim 4, wherein the synthesis processing device performs the first processing and the second processing one or more times. The workpiece processing apparatus according to claim 2, further comprising: The gap detecting device calculates the difference between the first distance information and the second distance information calculated by the calculation device, and obtains information indicating the orientation of the workpiece toward the specific notch as the orientation specific information of the workpiece; The distance difference correlation output device outputs information indicating the gap portion obtained by the notch detecting device, and outputs information as a difference calculated by the calculation device. The workpiece processing apparatus according to claim 7, wherein the notch detecting device uses a difference between the first distance information and the second distance information calculated by the calculating device and one or more critical values regarding a size of the notch portion. And detecting a notch portion provided at an edge of the workpiece, and acquiring information indicating the notch portion. The workpiece processing apparatus according to any one of claims 1 to 5, further comprising: The defect detecting device obtains information about a defective portion of the edge of the workpiece by using a difference between the first distance information and the second distance information calculated by the computing device; The distance difference correlation output device outputs information on the defective portion acquired by the defect detecting device as information on the difference calculated by the aforementioned computing device. The workpiece processing apparatus according to claim 9, wherein the defect detecting device uses a difference between the first distance information and the second distance information calculated by the calculating device and one or more critical values regarding a size of the defective portion, The defective portion of the edge of the workpiece is detected, and information about the detected defective portion is obtained. The workpiece processing apparatus according to claim 1, wherein the synthesizing device sequentially changes the corresponding rotation angle by four degrees in the first distance information included in the plurality of first rotation distance information. The first distance information is separately synthesized, and a plurality of composite distance information is obtained. The workpiece processing apparatus according to claim 2, wherein the synthesizing means sequentially differentiates the corresponding rotation angles by 90 degrees in the first distance information included in the plurality of first rotation distance information. The first distance information is separately synthesized, and a plurality of composite distance information is obtained. A workpiece conveying system having: The workpiece processing apparatus according to any one of claims 1 to 8, 11 and 12; A workpiece transport device that transports a workpiece to the workpiece processing apparatus. A workpiece conveying system having: a workpiece processing apparatus according to claim 9; A workpiece transport device that transports a workpiece to the workpiece processing apparatus. A workpiece conveying system having: a workpiece processing apparatus according to claim 10; and A workpiece transport device that transports a workpiece to the workpiece processing apparatus.