JP2014035261A - Information processing method, information processor, program, imaging apparatus, inspection method, inspection device, and method of manufacturing substrate - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an information processing method which is capable of acquiring a color image of a subject with a high image quality at a low cost.SOLUTION: The information processing method comprises the step of acquiring a plurality of first color component images being color component images of a plurality of color components in a first region of a subject, which are imaged by an imaging apparatus which includes an optical element capable of selecting light of the plurality of components from light of the subject and is capable of photographing, per color component, color component images being images represented by the selected color component light, and a plurality of second color component images being color component images of the color components in a second region adjacent to the first region. The plurality of first color component images are corrected with respect to each color component, and the plurality of second color component images are corrected with respect to each color component. The plurality of first corrected color component images and the plurality of second corrected color component images are combined to generate a color composite image which has the plurality of color components in the entire region including the first and second regions.

Description

  The present technology relates to an information processing method, an information processing device, a program, an imaging device, an inspection method, an inspection device, and a substrate manufacturing method used for, for example, an appearance inspection of a substrate.

  An appearance inspection apparatus that inspects an inspection object such as a printed wiring board on which electronic components are mounted is used. As such an appearance inspection apparatus, an appearance inspection apparatus has been proposed in which an entire image of a printed wiring board is imaged by an imaging apparatus, and an inspection object is inspected based on the obtained color image.

  For example, in the appearance inspection apparatus described in Patent Document 1, color image data of an inspection object in which chromatic aberration of the imaging optical system is corrected is generated. An appearance inspection is performed by comparing the color image data with the inspection data. This reduces labor and cost required for appearance inspection (see paragraph [0006] of Patent Document 1).

JP 2011-38784 A

  In the above-described substrate visual inspection or the like, it is desirable that a high-quality color image be captured by the imaging device. For example, a high-quality color image is required to be acquired without cost even for a substrate having a large area.

  In view of the circumstances as described above, an object of the present technology is to provide an information processing method, an information processing apparatus, a program, an imaging apparatus, an inspection method, and an inspection apparatus that can acquire a high-quality color image of a subject at low cost. And a method of manufacturing a substrate.

In order to achieve the above object, an information processing method according to an aspect of the present technology is an image based on the selected color component light, which includes an optical element that can select light of a plurality of color components from light of a subject. A plurality of first color component images, which are the color component images for each of the color components in the first region of the subject, photographed by an imaging device capable of photographing a color component image for each of the color components; Obtaining a plurality of second color component images that are the color component images for each of the color components in a second region adjacent to one region.
The plurality of first color component images are corrected for each of the color components, and the plurality of second color component images are corrected for each of the color components.
The corrected plurality of first color component images and the plurality of second color component images are combined to have the plurality of color components in the entire area including the first and second areas. A color composite image is generated.

  In this information processing method, a plurality of first color component images for the first region of the subject and a plurality of second color component images for the second region adjacent to the first region are respectively acquired. The The plurality of first color component images are corrected for each color component, and the plurality of second color component images are also corrected for each color component. By combining the plurality of corrected first color component images and the plurality of second color component images, a color composite image that is a color image of the entire region including the first and second regions is obtained. Generated. This makes it possible to obtain a high-quality color image of the subject at a low cost.

The imaging device may be capable of capturing a monochrome image of the subject. In this case, the color component image may be a monochrome image by the selected color component light.
In this information processing method, a monochrome image by the selected color component light is photographed as a color component image. Therefore, a high-quality color image is generated as the color composite image.

The plurality of first color component images may be images captured by a first imaging device that captures the first region. In this case, the plurality of second color component images may be images captured by a second imaging device that captures the second region and is different from the first imaging device.
When the first and second regions are photographed using two imaging devices, for example, it is easy to photograph a large area as the entire region. It is possible to generate a high-quality color image of the entire area at a low cost by combining the first and second color component images thus captured.

In the correction step, the plurality of first color component images and the plurality of second color component images due to the difference between the imaging characteristics of the first imaging device and the imaging characteristics of the second imaging device The difference may be corrected.
As a result, it is possible to generate a high-quality color image of the entire area photographed using the two imaging devices.

The imaging characteristic may include any one of color sensitivity, distortion, and shading.
In this way, by correcting any one of color sensitivity, distortion, and shading, a high-quality color image is generated.

The generating step generates a color component connection image in which the first and second color component images having the same color component are connected to each other, and synthesizes the plurality of generated color component connection images. Thus, the color composite image may be generated. In this case, the correcting step may include correcting the plurality of color component connection images for each color component.
In this way, a color component connection image may be generated for each color component, and a color composite image may be generated by combining these images. In this case, the color component connection image may be corrected for each color component by the correction step.

The correction step may correct a difference between the color component connected images due to the difference in the color component.
As a result, a high-quality color image can be generated.

The correction step may correct a difference between the color component connection images due to chromatic aberration.
By correcting chromatic aberration in this way, a high-quality color image can be generated.

The information processing method may further include calculating correction data based on the plurality of first color component images and the plurality of second color component images of a calibration subject having a predetermined pattern. Good. In this case, the correction step may perform correction using the calculated correction data.
In this way, correction data calculated from the image of the calibration subject may be used as appropriate.

The information processing method may further include adjusting each imaging condition of the first and second imaging devices using the correction data.
In this way, the shooting conditions of each imaging device may be adjusted based on the correction data. As a result, a high-quality color image of the entire area can be generated.

The photographing condition may include any one of contrast and focal length.
By adjusting either one of the contrast and the focal length in this way, a high-quality color image is generated.

An information processing apparatus according to an embodiment of the present technology includes an acquisition unit, a correction unit, and a generation unit.
The acquisition unit includes an optical element that can select light of a plurality of color components from light of a subject, and can capture a color component image that is an image of the selected color component light for each color component A plurality of first color component images, which are the color component images for each of the color components in the first area of the subject, and the color components in the second area adjacent to the first area. A plurality of second color component images, which are the color component images for each, are acquired.
The correction unit corrects the plurality of first color component images for each color component, and corrects the plurality of second color component images for each color component.
The generating unit synthesizes the plurality of corrected first color component images and the plurality of second color component images, and the plurality of entire regions including the first and second regions. A color composite image having the following color components is generated.

A program according to an embodiment of the present technology causes a computer to execute the following steps.
Photographed by an imaging device that has an optical element that can select light of a plurality of color components from the light of the subject and that can capture a color component image that is an image of the selected color component light for each color component, A plurality of first color component images that are the color component images for each color component in the first region of the subject, and the color components for each color component in a second region adjacent to the first region. Obtaining a plurality of second color component images which are images;
Correcting each of the plurality of first color component images for each of the color components, and correcting each of the plurality of second color component images for each of the color components;
The corrected plurality of first color component images and the plurality of second color component images are combined to have the plurality of color components in the entire area including the first and second areas. Generating a color composite image;

An imaging device according to an embodiment of the present technology includes an optical element, one or more imaging units, an acquisition unit, a correction unit, and a generation unit.
The optical element can select light of a plurality of color components from the light of the subject.
The one or more imaging units can capture a color component image, which is an image of the selected color component light, for each color component.
The acquisition unit is adjacent to the first region and a plurality of first color component images, which are the color component images for each of the color components of the first region of the subject, captured by the imaging unit. A plurality of second color component images that are the color component images for each of the color components in the second region are acquired.
The correction unit corrects the plurality of first color component images for each color component, and corrects the plurality of second color component images for each color component.
The generating unit synthesizes the plurality of corrected first color component images and the plurality of second color component images, and the plurality of entire regions including the first and second regions. A color composite image having the following color components is generated.

  The one or more imaging units are different from the first imaging unit that captures the plurality of first color component images and the first imaging unit that captures the plurality of second color component images. You may have an imaging part.

The imaging apparatus further includes a reflective element that reflects light from the first region to the first imaging unit and reflects light from the second region to the second imaging unit. Also good.
By providing such a reflective element, the arrangement of the first and second imaging units can be set as appropriate. For example, by appropriately setting the arrangement of the reflective element and the first and second imaging units, it is possible to reduce the size of the entire imaging apparatus.

  The optical element may be a color filter including a red filter that transmits red component light, a green filter that transmits green component light, and a blue filter that transmits blue component light.

The thicknesses of the red filter, the green filter, and the blue filter in the light transmission direction are such that the focal lengths of the red component light, the green component light, and the blue component light transmitted through the filters are equal to each other. It may be adjusted to be.
Thereby, the quality of the color composite image produced | generated by synthesize | combining the color component image by each color component can be improved.

The optical element may include a transmission unit that transmits light from the subject so that a focal length of the light is equal to each focal length of the red component light, the green component light, and the blue component light. Good.
As a result, it is possible to generate both an image based on light from the subject and a color composite image with high accuracy.

An inspection method according to an aspect of the present technology includes an optical element that can select light of a plurality of color components from light of a subject to be inspected, and a color component image that is an image of the selected color component light. A plurality of first color component images, which are the color component images for each color component of the first region of the subject, photographed by an imaging device capable of photographing for each color component, and the first region Obtaining a plurality of second color component images which are the color component images for each of the color components in the adjacent second region.
The plurality of first color component images are corrected for each of the color components, and the plurality of second color component images are corrected for each of the color components.
The corrected plurality of first color component images and the plurality of second color component images are combined to have the plurality of color components in the entire area including the first and second areas. A color composite image is generated.
The subject is inspected based on the generated color composite image.

An inspection apparatus according to an embodiment of the present technology includes an optical element, one or more imaging units, an acquisition unit, a correction unit, a generation unit, and an inspection unit.
The optical element can select light of a plurality of color components from light of a subject to be inspected.
The one or more imaging units can capture a color component image, which is an image of the selected color component light, for each color component.
The acquisition unit is adjacent to the first region and a plurality of first color component images, which are the color component images for each of the color components of the first region of the subject, captured by the imaging unit. A plurality of second color component images that are the color component images for each of the color components in the second region are acquired.
The correction unit corrects the plurality of first color component images for each color component, and corrects the plurality of second color component images for each color component.
The generating unit synthesizes the plurality of corrected first color component images and the plurality of second color component images, and the plurality of entire regions including the first and second regions. A color composite image having the following color components is generated.
The inspection unit inspects the subject based on the generated color composite image.

A substrate manufacturing method according to an aspect of the present technology includes an optical element that can select light of a plurality of color components from light of a substrate as a subject to be inspected, and an image based on the selected color component light. A plurality of first color component images, which are the color component images for each of the color components in the first region of the substrate, photographed by an imaging device capable of photographing a certain color component image for each of the color components; Obtaining a plurality of second color component images that are the color component images for each of the color components in a second region adjacent to the first region.
The plurality of first color component images are corrected for each of the color components, and the plurality of second color component images are corrected for each of the color components.
The corrected plurality of first color component images and the plurality of second color component images are combined to have the plurality of color components in the entire area including the first and second areas. A color composite image is generated.
The board is inspected based on the generated color composite image.
The quality of the substrate is determined based on the result of the inspection.

  As described above, according to the present technology, a high-quality color image of a subject can be acquired at low cost.

1 is a schematic block diagram illustrating a schematic system configuration of an appearance inspection apparatus according to an embodiment of the present technology. It is a schematic diagram which mainly shows the structural example of the imaging unit of an external appearance inspection apparatus. It is a typical top view which shows an example of the board | substrate test | inspected by an external appearance inspection apparatus. It is a schematic diagram which shows the image image | photographed with the 1st camera, and the image image | photographed with the 2nd camera. It is a typical figure which shows the hardware structural example of an information processing part. It is a typical figure which shows the software structural example of an information processing part. It is a flowchart which shows the operation example of an external appearance inspection apparatus. It is a schematic diagram for demonstrating a calibration process. It is a schematic diagram for demonstrating a calibration process. It is a schematic diagram for demonstrating calculation of the data for correction | amendment. It is a schematic diagram for demonstrating calculation of the data for correction | amendment. It is the flowchart which showed in detail the process from step 5 to step 10 shown in FIG. It is a schematic diagram for demonstrating the external appearance inspection of the board | substrate using CAE data.

  Hereinafter, embodiments according to the present technology will be described with reference to the drawings.

[Configuration of visual inspection equipment]
An appearance inspection apparatus according to an embodiment of the present technology will be described. The appearance inspection apparatus according to the present embodiment can take an image of a circuit board (hereinafter simply referred to as a board) on which a predetermined electronic component is mounted, and use the image to inspect the appearance of the board. Therefore, in this embodiment, the substrate is a subject to be inspected.

  FIG. 1 is a schematic block diagram showing a schematic system configuration of an appearance inspection apparatus according to the present embodiment. FIG. 2 is a schematic diagram mainly illustrating a configuration example of an imaging unit of the appearance inspection apparatus.

  The appearance inspection apparatus 100 includes an imaging unit 10, an illumination unit 20, a transport unit 30, an inspection stage 40, and an information processing unit 50. The imaging unit 10 includes a camera 11 as an imaging device, a lens 12, an optical filter wheel 13, and a reflection mirror 14 as a reflection element. The information processing unit 50 includes an operation display unit 51, an input / output control unit 52, and an arithmetic control storage unit 53.

  The inspection stage 40 has a flat placement surface 41, and the substrate 1 is placed on the placement surface 41. The substrate 1 is transported to the inspection stage 40 by the transport unit 30. In addition, the transport unit 30 transports the substrate 1 that has undergone the appearance inspection from the mounting surface 41 of the inspection stage 40. The configuration and the transport method of the transport unit 30 are not limited, and any configuration or method may be used.

  The illumination unit 20 is supported above the inspection stage 40 via a frame (not shown), and irradiates illumination light toward the mounting surface of the substrate 1 placed on the inspection stage 40. As a light source that emits illumination light, for example, an LED (Light Emitting Diode) or the like is used. The configuration of the illumination unit 20 is not limited, and other light sources may be used. By appropriately controlling the illumination unit 20, the color, light amount, and the like of illumination light to the substrate 1 are adjusted.

  FIG. 3 is a schematic plan view showing an example of the substrate 1 inspected by the appearance inspection apparatus 100 of the present embodiment.

  In the present embodiment, the rectangular substrate 1 is an inspection target. In addition, the shape of the board | substrate 1 used as a test object is not limited, For example, the board | substrate which has other shapes, such as a circle, is also testable.

  At least one surface of the substrate 1 is formed as a mounting surface 3 on which the electronic component 2 is mounted, and a plurality of alignment marks 4 are provided on the mounting surface 3. The alignment mark 4 is a reference point for the coordinate position when the appearance inspection is performed by the appearance inspection apparatus 100. In the present embodiment, four alignment marks 4 are formed, but the number of alignment marks 4 is not limited. Typically, three or more alignment marks 4 are formed.

  The substrate 1 includes a copper foil 5 formed on the mounting surface 3 of the substrate 1 and a resist 6 that covers the copper foil 5. The alignment mark 4 is formed by a portion of the copper foil 5 located inside the opening 7 provided in the resist 6 covering the copper foil 5. The method for forming the alignment mark 4 is arbitrary.

  In the present embodiment, the shape of the opening 7, that is, the shape of the alignment mark 4 is circular, but various shapes such as a rectangle, a triangle, and a polygon can be used as the shape of the alignment mark 4. The shape of is not limited. Here, the copper foil 5 has an orange color, and the resist 6 has a mixed color of green and blue.

  In the present embodiment, a digital camera that can capture a digital image of a subject is used as the camera 11 of the imaging unit 10. As the camera 11, a monochrome camera that captures a monochrome image of a subject is used. For example, a camera 11 having a CCD (Charge Coupled Device), a CMOS (Complementary Metal Oxide Semiconductor), or the like as an image sensor is used.

  As shown in FIG. 2, in this embodiment, the two cameras 11 of the first and second cameras 11A and 11B are used. Thus, one or more cameras may be provided in the appearance inspection apparatus. The first area 11A of the substrate 1 is photographed by the first camera 11A. Further, the second area 1B of the substrate is photographed by the second camera 11B. As shown in FIG. 3, the first area 1 </ b> A is the left half area of the substrate 1. The second region 1B is a right half region of the substrate 1. Note that which region of the substrate 1 is set as the first and second regions 1A and 1B is not limited.

  The first imaging area 15A, which is an area captured by the first camera 11A, is set to include the first area 1A. The second shooting area 15B, which is an area shot by the second camera 11B, is set so as to include the above-described second area 1B. Accordingly, the first and second regions 1A and 1B are photographed by the first and second cameras 11A and 11B, respectively. Note that the first and second imaging areas 15A and 15B are set to overlap each other in a predetermined overlapping area 15C.

  FIG. 4 is a schematic diagram showing an image taken by the first camera 11A and an image taken by the second camera 11B. As shown in FIG. 4, images 16A and 16B of the first and second regions 1A and 1B dividing the substrate 1 into two are taken. In this embodiment, as will be described below, these images 16A and 16B are taken for each color component. A region including the first and second regions 1A and 1B is defined as an entire region. The entire area corresponds to the entire area of the substrate 1.

  Thus, in this embodiment, since the board | substrate 1 is image | photographed and image | photographed by the 1st and 2nd cameras 11A and 11B, the board | substrate 1 is moved without moving the 1st and 2nd cameras 11A and 11B, the illumination unit 20, etc. Visual inspection is possible.

  The lens 12 is provided in each of the first and second cameras 11A and 11B in order to magnify and photograph the substrate 1 at a predetermined magnification. The lens 12 is included in an imaging optical system in a lens barrel 121 attached in front of each camera. A plurality of lenses 12 may be provided in each lens barrel 121. The magnification is set by appropriately controlling the imaging optical system including the lens 12. Hereinafter, the lens 12 provided in each of the first and second cameras 11A and 11B will be referred to as first and second lenses 12A and 12B.

  As shown in FIG. 2, in the present embodiment, the first and second cameras 11 </ b> A and 11 </ b> B are disposed so as to face each other in the surface direction (xy plane direction) of the placement surface 41. When the xyz coordinates are set as shown in FIG. 2, FIG. 3, etc., the first and second cameras 11A and 11B are arranged along the x direction, respectively. Accordingly, the first photographing optical axis 17A incident on the first camera 11A and the second photographing optical axis 17B incident on the second camera are set along the x direction in the vicinity of the lenses 12A and 12B. .

  A reflection mirror 14 is provided between the first and second cameras 11A and 11B. The reflection mirror 14 includes a first reflection unit 14A that changes the first imaging optical axis 17A of the first camera 11A, and a second reflection unit that changes the second imaging optical axis 17B of the second camera 11B. 14B.

  By providing the reflection mirror 14, the photographing light beam 18A of the first camera 11A is set in the first photographing region 15A (see FIG. 3). Accordingly, the image of the first region 1A of the substrate 1 is reflected by the first reflecting portion 14A and guided to the first lens 12A. That is, the light from the first region 1A of the substrate 1 is reflected to the first camera 11A by the first reflecting portion 14A. Thereby, the image 16A of the first region 1A is taken by the first camera 11A.

  The imaging light beam 18B of the second camera 11B is set in the second imaging area 15B. Accordingly, the image of the second region 1B of the substrate 1 is reflected by the second reflecting portion 14B and guided to the second lens 12B. That is, the light from the second region 1B of the substrate 1 is reflected to the second camera 11B by the second reflecting portion 14B. Thereby, the image 16B of the second region 1B is taken by the second camera 11B.

  Since the reflection mirror 14 is provided in this manner, the arrangement of the first and second cameras 11A and 11B can be set as appropriate. For example, each camera 11 can be disposed in the vicinity of the inspection stage 40 while ensuring the optical path length between the substrate 1 and the imaging optical system of each camera 11. That is, by appropriately setting the arrangement of the reflection mirror 14 and the first and second cameras 11A and 11B, it is possible to reduce the size of the appearance inspection apparatus 100 as a whole.

  Other arbitrary elements may be used as reflecting elements for changing the first and second photographing optical axes 17A and 17B, respectively. For example, two reflecting mirrors may be provided at the positions of the first and second reflecting portions 14A and 14B, respectively. A prism or the like may be used as the reflective element.

  The optical filter wheel 13 is provided in the appearance inspection apparatus 100 as an optical element that can select light of a plurality of color components from light of the substrate 1 that is a subject. The optical filter wheel 13 is provided with a color filter including a red filter 19R that transmits red component light, a green filter 19G that transmits green component light, and a blue filter 19B that transmits blue component light. For example, a dichroic filter or the like is used as a filter that transmits each color.

  The optical filter wheel 13 is provided for each of the first and second cameras 11A and 11B. A first optical filter wheel 13 </ b> A is provided between the first camera 11 </ b> A and the reflection mirror 14. A second optical filter wheel 13 </ b> B is provided between the second camera 11 </ b> B and the reflection mirror 14. By rotating each optical filter wheel 13 as appropriate, filters of a predetermined color are arranged on the first and second photographing optical axes 17A and 17B. Thereby, each of red component light, green component light, and blue component light is appropriately selected from the light of the substrate 1 traveling along the photographing optical axis.

  The color component light selected by the optical filter wheel 13 is incident on the first and second cameras 11A and 11B, respectively. Then, the first and second cameras 11A and 11B capture color component images 21A and 21B, which are images of color component light, for each color component. That is, a red component image 21R1, a green component image 21G1, and a blue component image 21B1 are photographed by the first camera 11A. In addition, a red component image 21R2, a green component image 21G2, and a blue component image 21B2 are photographed by the second camera 11B. In the present embodiment, each color component image is captured as a monochrome image.

  As described above, the light from the first region 1A is incident on the first camera 11A. A predetermined color component light is selected from the light from the first region 1A by the first optical filter wheel 13A. Thereby, the color component image 21A for each color component in the first area 1A of the substrate 1 is photographed by the first camera 11A. Hereinafter, the red component image 21R1, the green component image 21G1, and the blue component image 21B1 in the first region 1A are referred to as a plurality of first color component images 21A.

  Light from the second region 1B is incident on the second camera 11B. The second optical filter wheel 13B selects a predetermined color component light from the light from the second region 1B. Thereby, the color component image 21B for every color component of the 2nd area | region 1B of the board | substrate 1 is image | photographed with the 2nd camera 11B. Hereinafter, the red component image 21BR, the green component image 21BG, and the blue component image 21BB in the second region 1B are referred to as a plurality of second color component images 21B.

  In the present embodiment, the thickness of each filter is appropriately adjusted in each of the first and second optical filter wheels 13A and 13B. That is, the thicknesses of the red filter 19R, the green filter 19G, and the blue filter 19B in the light transmission direction (directions of the photographing optical axes 17A and 17B) are respectively red component light, green component light, and blue light transmitted through the filters. The focal lengths of the component lights are adjusted to be equal to each other.

  Since the red component light, the green component light, and the blue component light have different wavelengths, the refractive indexes of the component light with respect to the first lens 12A and the second lens 12B are different. As a result, a difference occurs in the focal length of each color component light of the first lens 12A. Further, a difference also occurs in the focal length of each color component light of the second lens 12B.

  In the present embodiment, the difference in focal length due to the difference in color components is optimized by adjusting the thickness of each color filter. For example, the blue filter 19B, the green filter 19G, and the red filter 19R are set to increase in thickness in this order. In addition, the setting of the thickness of each color filter is arbitrary. Thus, by adjusting the thickness, it is possible to improve the quality of the color image in which the color component images of the respective color components are combined.

  In the present embodiment, the first and second optical filter wheels 13A and 13B are each provided with a transmission plate 19T that transmits light from the substrate 1 as it is. As the transmission plate 19T, for example, a transparent filter made of glass or the like is used. Others may be used. The transmission plate 19T corresponds to a transmission part.

  For example, when a transmission filter or the like is used as the transmission plate 19T, the thickness of the transmission filter in the photographing optical axis direction may be adjusted as appropriate. For example, the thickness of the transmission filter is adjusted so that the focal length of the light from the substrate 1 that passes through the transmission filter becomes equal to the focal lengths of the red component light, the green component light, and the blue component light adjusted as described above. The

  By providing the transmission plate 19T on the optical filter wheel 13, a monaural image of the substrate 1 can be taken. Since the focal length of the transmitted light and the focal length of each color component light are set to be equal, both the monaural image of the substrate 1 and the color image obtained by combining the color component images 21A and 21B are generated with high accuracy. It becomes possible to do.

  The operation display unit 51 of the information processing unit 50 includes an input unit that receives an operation of an operator who operates the appearance inspection apparatus 100, and a display unit that displays various information on the operator. The operation display unit 51 is, for example, a touch panel.

  The input / output control unit 52 acquires data of the plurality of color component images 21A and 21B photographed by the first and second cameras 11A and 11B and outputs the data to the arithmetic control storage unit 53. The arithmetic control storage unit 53 performs predetermined image processing on the output color component images 21A and 21B to generate a color image as a color composite image. Then, an appearance inspection of the substrate 1 is performed based on the color image. The input / output control unit 52 corresponds to the acquisition unit in the present embodiment. The arithmetic control storage unit 53 functions as an acquisition unit, a correction unit, a generation unit, an inspection unit, and the like in the present embodiment. These will be described later.

  In the present embodiment, the information processing method according to the present technology is mainly executed by the information processing unit 50. Hereinafter, the information processing unit 50 will be described in detail. FIG. 5 is a schematic diagram illustrating a hardware configuration example of the information processing unit 50. For example, a computer such as a PC (Personal Computer) having such a configuration may be used as the information processing unit 50.

  The information processing unit 50 includes a central processing unit (CPU) 501, a read only memory (ROM) 502, a random access memory (RAM) 503, an input / output interface 505, and a bus 504 that connects these components to each other.

  A display unit 506, an input unit 507, a storage unit 508, a communication unit 509, a drive unit 510, and the like are connected to the input / output interface 505. For example, the input / output interface 505 may function as the input / output control unit 52. Then, the imaging unit 10 may be connected to the input / output interface 505.

The display unit 506 includes, for example, liquid crystal, EL (Electro-Luminescence), CRT (Cathode Ray).
Tube) or the like.

The input unit 507 is, for example, a pointing device, a keyboard, a touch panel, or other operation device. When the input unit 507 includes a touch panel, the touch panel can be integrated with the display unit 506. For example, the operation display unit 51 is configured by the display unit 506 and the input unit 507.

  The storage unit 508 is a non-volatile storage device, such as an HDD (Hard Disk Drive), a flash memory, or other solid-state memory.

  The drive unit 510 is a device that can drive a removable recording medium 511 such as an optical recording medium, a floppy (registered trademark) disk, a magnetic recording tape, a flash memory, or the like. On the other hand, the storage unit 508 is often used as a device mounted in advance in the information processing unit 50 that mainly drives a non-removable recording medium. For example, the storage unit 508 and the drive unit 510 operate as a part of the calculation control storage unit 53.

  The communication unit 509 is a modem, a router, or other communication equipment that can be connected to a network such as a LAN (Local Area Network) or a WAN (Wide Area Network) and communicates with other devices. The communication unit 509 may communicate using either wired or wireless communication. The communication unit 509 is often used separately from the information processing unit 50.

  For example, when the imaging unit 10 and an information processing apparatus (PC or the like) as the information processing unit 50 are connected via a LAN or the like, image data is acquired via the communication unit 509. In that case, the communication unit 509 operates as a part of the input / output control unit 52.

  Information processing by the information processing unit 50 having the above-described hardware configuration is realized by cooperation between software stored in the storage unit 508 or the ROM 502 and hardware resources of the information processing unit 50. Specifically, it is realized by the CPU 501 loading a program constituting the software stored in the storage unit 508 or the ROM 502 to the RAM 503 and executing it. The program is installed in the information processing unit 50 via, for example, a recording medium. Alternatively, the program may be installed via a global network or the like.

  FIG. 6 is a schematic diagram illustrating a software configuration example of the information processing unit 50. For example, each software block shown in FIG. 6 is realized by the CPU 501 that executes a predetermined program. The operation control storage unit 53 shown in FIG. 1 is realized by operating these blocks, the storage unit 508, and the like. Note that dedicated hardware for realizing each block may be used as appropriate.

  The information processing unit 50 includes a device control unit 512, a color component image correction unit 513, a color component connection image generation unit (hereinafter referred to as a connection image generation unit) 514, a chromatic aberration correction unit 515, and a composite image generation unit. 516, a correction data generation unit 517, and an appearance inspection unit 518.

  The storage unit 508 stores in advance imaging setting data for setting the imaging unit 10 and the illumination unit 20. The storage unit 508 stores CAE (Computer Aided Engineering) data. The CAE data includes data defining the shape of the electronic component 2 mounted on the substrate 1 and the coordinate position where the electronic component 2 is to be mounted. The CAE data includes data defining the shape and dimensions of the substrate 1.

  The device control unit 512 controls the imaging unit 10, the lighting unit 20, the transport unit 30, the storage unit 508, the display unit 506, and the like. For example, the device control unit 512 adjusts the shooting conditions of the first and second cameras 11A and 11B.

  The color component image correction unit 513 corrects a plurality of first color component images 21A, which are color component images for each color component in the first area 1A output from the imaging unit 10, for each color component. The color component image correction unit 513 corrects a plurality of second color component images 21B, which are color component images for each color component in the second region 1B, for each color component.

  The color component image correction unit 513 causes a plurality of first color component images 21A and a plurality of second color component images 21B due to the difference between the imaging characteristics of the first camera 11A and the imaging characteristics of the second camera 11B. The difference from is corrected. In the present embodiment, the first and second regions 1A and 1B of the substrate 1 are photographed by the two cameras, the first and second cameras 11A and 11B. Therefore, there may be a difference between the captured images due to the difference in the imaging characteristics of the first and second cameras 11A and 11B. Since such a difference is appropriately corrected, it is possible to generate a high-quality color image when the first and second color component images 21A and 21B are combined to generate a color image of the entire area. Become. The color component image correction unit 513 corresponds to the correction unit in the present embodiment.

  The correction data generation unit 517 calculates correction data used for correction by the color component image correction unit 513. The correction data is generated by photographing the calibration subject 200 (see FIG. 8) having a predetermined pattern with the first and second cameras 11A and 11B, and the plurality of first color component images 221A and the plurality of color component images 221A. Is calculated based on the second color component image 221B. In the present embodiment, the correction data is also used for adjustment of shooting conditions by the device control unit 512. The calculation of the correction data will be described in detail later.

  The connection image generation unit 514 generates, for each color component, a color component connection image in which the first and second color component images 21A and 21B having the same color component are connected to each other. For example, a red connection image is generated by connecting the red component images 21R1 and 21R2. A green connection image is generated by connecting the green component images 21G1 and 21G2. Further, a blue connection image is generated by connecting the blue component images 21B1 and 21B2.

  The connection method of the first and second color component images 21A and 21B is not limited. For example, various stitching techniques are used. For example, the optimum connection position (coordinates) is calculated by performing a matching process on the image of the overlapping region 15C of the first and second imaging regions 15A and 15B shown in FIG. Based on the calculated connection position, the first and second color component images 21A and 21B are connected to generate a color component connection image for each color component.

  The chromatic aberration correction unit 515 corrects the red connection image, the green connection image, and the blue connection image for each color component. The chromatic aberration correction unit 515 corrects the difference between the color component connected images due to the difference in the color components. For example, a difference between the color component connection images due to chromatic aberration is corrected. In addition, the magnification of each connected image may be different due to the difference in color components. Such a magnification difference is also corrected.

  For correction by the chromatic aberration correction unit 515, CAE data stored in the storage unit 508 is used. Based on the position information of the alignment mark 4 included in the CAE data, the color component connection image of each color is corrected. Details will be described later.

  Note that the color component image correction unit 513 and the chromatic aberration correction unit 515 correspond to the correction unit according to the present embodiment. That is, in the present embodiment, correcting the plurality of first color component images 21A for each color component and correcting the plurality of second color component images 21B for each color component respectively include a plurality of color component connections. And correcting the image for each color component. In other words, the correction for the first and second color component images 21A and 21B means both a case where the correction is performed in a state where the images are not connected and a case where the correction is performed in a state where they are connected.

  The composite image generation unit 516 generates a color image as a color composite image by combining the plurality of generated color component connection images. Therefore, the red connection image, the green connection image, and the blue connection image are combined to generate a substrate 1 color image. The method for synthesizing the three connected images is not limited, and any method may be used.

  The connection image generation unit 514 and the composite image generation unit 516 correspond to the generation unit according to the present embodiment. The connection image generation unit 514 and the composite image generation unit 516 combine the corrected first color component images 21A and the second second color component images 21B, and first and second regions 1A and 1B. A color composite image (color image) having a plurality of color components in the entire region including is generated.

  The appearance inspection unit 518 inspects the substrate 1 based on the generated color image. In the present embodiment, the appearance inspection unit 518 collates the color image generated by the composite image generation unit 516 with the CAE data, and executes the appearance inspection of the substrate 1. It should be noted that the information on the area to be subjected to the appearance inspection included in the CAE data may be converted and arranged in the color image coordinate system.

[Operation of visual inspection equipment]
Next, the operation of the appearance inspection apparatus 100 will be described with reference to the flowchart of FIG. First, as a preliminary process, for example, a calibration process is executed by an operator instruction or factory adjustment. The calibration process is a process for calculating the correction data described above.

  8 and 9 are schematic diagrams for explaining the calibration processing of this embodiment. In the present embodiment, the calibration subject 200 having a predetermined pattern is photographed by the first and second cameras 11A and 11B. For example, as shown in FIG. 8, a calibration subject 200 having a dot pattern 230 as a calibration pattern is photographed.

  The calibration subject 200 is placed on the placement surface 41 of the inspection stage 40. The first imaging region 15A of the first camera 11A is set to include the first region 201A (left half region) of the calibration subject 200. The second imaging region 15B of the second camera 11B is set so as to include the second region 201B (right half region) of the calibration subject 200.

  As shown in FIG. 9, by appropriately controlling the first and second optical filter wheels 13A and 13B, a color component image for each color component in the first region 201A of the calibration subject 200 is photographed. As a result, a plurality of first color component images 221A of the calibration subject 200 are photographed (three images 221R1, 221G1, and 221B1). Further, a color component image for each color component in the second region 201B of the calibration subject 200 is photographed. As a result, a plurality of second color component images 221B of the calibration subject 200 are photographed (three images of 221R2, 221G2, and 221B2).

  The first and second color component images 221A and 221B of the calibration subject 200 are output to the correction data generation unit 517 shown in FIG. The correction data generation unit 517 calculates correction data based on the six color component images 221A and 221B divided for each color component.

  In the present embodiment, correction data used for correction related to the difference between the imaging characteristics of the first and second cameras 11A and 11B by the color component image correction unit 513 is calculated. For example, the imaging characteristics include color sensitivity, distortion, shading, and the like. In the present embodiment, correction is performed for these three imaging characteristics. Correction may be performed on any one or any two of these three. In this way, by correcting any one of color sensitivity, distortion, and shading, a high-quality color image is generated. Note that other imaging characteristics may be corrected.

  In the present embodiment, correction data used to adjust the shooting conditions of the first and second cameras 11A and 11B by the device control unit 512 is calculated. For example, imaging conditions include contrast or focal length (working distance: WD (working distance)). A high-quality color image can be generated by performing either one or both of the contrast adjustment and the focal length adjustment using the correction data. Note that adjustments may be performed regarding other imaging conditions.

  For example, according to the substrate 1 to be inspected, the inspection stage 40, the first and second cameras 11A and 11B, the first and second lenses 12A and 12B, the first and second optical filter wheels 13A and 13B, and the reflection mirror 14 and the lighting unit 20 are set as appropriate. At this time, the focal length (working distance) and the like are appropriately adjusted using the correction data.

  10 and 11 are schematic diagrams for explaining calculation of correction data. As shown in FIG. 10, when the dot pattern 230 is photographed for each color component, distortion occurs in the dot patterns 230R, 230G, and 230B in the red component image R, the green component image G, and the blue component image B, respectively. . This distortion is a distortion caused by the distortion of the lens, and is different between the first and second cameras 11A and 11B. Further, the distortions generated in the dot patterns 230R, 230G, and 230B of the color component images are also different due to the difference in wavelength of the RGB color component lights.

  The coordinate information of each dot 231 of the dot pattern 230 is stored in advance. For example, the coordinates of each dot 231 are determined using the center O of the dot pattern 230 as a reference point. The coordinates are determined in units of pixels, for example. That is, the coordinate information of each dot 231 when the image is taken without distortion in consideration of the magnification and the like is calculated and stored. These stored coordinate information is described as theoretical dot coordinate information.

  The center coordinates O of the red component image R, the green component image G, and the blue component image B shown in FIG. 10 are measured. The coordinates of the dots 231R, 231G, and 231B on the color component images R, G, and B with respect to the center coordinate O are calculated. The coordinates of each dot are calculated based on pixel value information, for example. Alternatively, the coordinates of the dots 231R, 231G, and 231B on the color component images R, G, and B may be calculated by an arbitrary image analysis process.

  In each of the red component image R, the green component image G, and the blue component image B, a correction vector map as correction data is calculated. The correction vector map is generated by comparing the dot coordinate information calculated in each color component image with the theoretical dot coordinate information. That is, a correction vector map is generated such that the positions of the dots 231R, 231G, and 231B on the color component images R, G, and B are the theoretical positions of the dots 231.

  The method for generating the correction vector map is not limited. For example, position information of all dots may be used, or predetermined dots may be selected and their position information may be used. A correction vector map may be generated by using the calculated dot position information appropriately converted.

  Such processing is executed for the plurality of first color component images 221A and the plurality of second color component images 221B of the calibration subject 200 shown in FIG. Accordingly, the distortion aberration of the first and second lenses 12A and 12B used in the first and second cameras 11A and 11B can be corrected for each color component. As a result, the difference between the images due to distortion between the first and second cameras 11A and 11B is corrected. In addition, distortion due to the difference in RGB color components is also corrected.

  Since the correction vector is calculated for each of the RGB color component images 221A and 221B, a highly accurate correction vector map can be calculated as correction data for correcting distortion. Since the color component images 21A and 21B are corrected for each color component by the correction vector map, chromatic aberration is also corrected.

  In the present embodiment, the color sensitivity between the two cameras 11A and 11B is based on the six images of the plurality of first color component images 221A and the plurality of second color component images 221B of the calibration subject 200. Correction data for correcting the difference and the shading difference is also calculated. The calculation method of these correction data is arbitrary, for example, a well-known technique may be used suitably.

  FIG. 11 is a photograph for explaining correction data used for contrast adjustment of the first and second cameras 11A and 11B.

  For example, there may be a difference in contrast in the captured image due to tilting (tilting) of the first and second cameras 11A and 11B. In this embodiment, the difference in contrast between the first and second cameras 11A and 11B and the variation in contrast in the same image can be corrected.

  In the present embodiment, four corner areas 221A1 to 221A4 of the first color component image 221A photographed by the first camera 11A and four corners of the second color component image 221B photographed by the second camera 11B. The respective contrast levels of the regions 221B1 to 221B4 are measured. That is, the contrast level is digitized using these eight regions as eight measurement points.

  The method for quantifying the contrast level is arbitrary, and for example, the quantification is performed using binarization calculation or calculation of the luminance variation width in the image. The degree of blurring of the shape of the dot 241 may be digitized by detecting the edge of the dot 241 or the like.

  Based on the digitized data, correction data for adjusting the settings of the imaging unit 10 and the illumination unit 20 so that the contrast levels of the eight regions are uniform is generated. The captured first and second color component images 21A and 21B may be corrected using the generated correction data.

  In the present embodiment, correction data related to adjustment of contrast and focal length is calculated for each of the color component images 221A and 221B. The present invention is not limited to this, and for example, correction data relating to correction of contrast and focal length may be used from two images taken using the transmission plates 19T of the first and second optical filter wheels 13A and 13B. Other correction data may be calculated using only an image having a predetermined color component.

  The size and number of the dots 231 constituting the dot pattern 230 or the interval between the dots 231 is arbitrary. The color of the dot 231 can also be selected. A plurality of calibration subjects 200 having different color dots 231 may be used in accordance with the photographing of the respective color component images 221A and 221B. A plurality of color component images 221A and 221B may be taken from one calibration subject 200.

  As the calibration subject 200, one used as a calibration target chart can be appropriately employed. The calibration subject 200 is not limited to one having a dot pattern. A calibration subject 200 having a checker pattern, an MTF (Modulation Transfer Function) pattern, or the like as a calibration pattern may be used.

  As described above, correction data PR0 to PR4 for contrast adjustment, WD adjustment, lens distortion correction, shading correction, and camera color sensitivity correction shown in FIG. 7 are calculated.

  Returning to the flowchart of FIG. 7, the information processing unit 50 reads imaging setting data stored in advance in the storage unit 508 (step 1). Then, the device control unit 512 sets the imaging unit 10 and the illumination unit 20 based on the imaging setting data (Step 2). Specifically, the device control unit 512 sets the color and amount of light of the illumination light of the illumination unit 20, and sets the aperture and shutter speed of each of the first and second cameras 11A and 11B. .

  In the setting step by the device control unit 512, the adjustment data PR0 for contrast adjustment and the correction data PR1 for WD adjustment are used to perform setting adjustment of the imaging unit 10 and the like. As a result, a high-quality color image of the substrate 1 can be generated.

  Next, the device control unit 512 controls the transport unit 30 to transport the substrate 1 to be visually inspected and place it on the mounting surface 41 of the inspection stage 40 (step 3). Arbitrary techniques may be used for a configuration, a method, and the like for positioning the substrate 1 at a predetermined position on the placement surface 41.

  Next, the device control unit 512 captures a plurality of first color component images 21A by controlling the first camera 11A and the first optical filter wheel 13A. As a result, the red component image 21R1, the green component image 21G1, and the blue component image 21B1 in the first region 1A are photographed (step 4).

  In addition, the device control unit 512 captures a plurality of second color component images 21B by controlling the second camera 11B and the second optical filter wheel 13B. As a result, the red component image 21R2, the green component image 21G2, and the blue component image 21B2 in the second region 1B are photographed (also step 4).

  The plurality of photographed first color component images 21A and the plurality of second color component images 21B are supplied to the information processing unit 50 (step 5).

  The color component image correction unit 513 corrects the plurality of first color component images 21A and the plurality of second color component images 21B, respectively (step 6). In the present embodiment, the lens distortion aberration correction data PR2, the shading correction data PR3, and the camera color sensitivity correction data PR4 are used. Thus, by correcting the color component images 21A and 21B for each image, it is possible to generate a color image of the entire region of the substrate 1 that is a composite image of these images with high image quality.

  The connection image generation unit 514 connects the red component images 21R1 and 21R2, the green component images 21G1 and 21G2, and the blue component images 21B1 and 21B2, respectively. As a result, a red connection image, a green connection image, and a blue connection image, which are color component connection images for each color component, are generated (step 7).

  The CAE data stored in the storage unit 208 is read (step 8). Based on the read CAE data, the chromatic aberration correction unit 515 corrects the difference between the color component connected images due to chromatic aberration (step 9). The composite image generation unit 516 combines the corrected color component connection images of each color, and generates a color image of the entire region of the substrate 1.

  FIG. 12 is a flowchart showing in detail the processing from step 5 to step 10 shown in FIG. That is, FIG. 12 shows processing from when the plurality of first color component images 21A and the plurality of second color component images 21B are acquired until the color image of the substrate 1 is generated.

  A plurality of first color component images 21A and a plurality of second color component images 21B are read (step 51). The color sensitivity difference and shading between the first and second cameras 11A and 11B are corrected (step 52). Further, the distortion aberration of the first and second lenses 12A and 12B attached to the first and second cameras 11A and 11B is corrected. At this time, in the present embodiment, the connection positions of the first and second color component images 21A and 21B are corrected. Thereby, the information of the optimal connection position of the first and second color component images 21A and 21B is calculated (step 53). Then, the first and second color component images 21A and 21B are connected to generate a color component connection image (step 54). The processing from step 52 to step 54 is performed for each color component.

  The CAE data stored in the storage unit 508 is read (step 55). The position information of the alignment mark 4 included in the CAE data is read (step 56). This is information registered in advance for each position of the four alignment marks 4 shown in FIG. The positional information defines the positional relationship between the four alignment marks 4 in the image, the size of the image, and the like. Hereinafter, the registered position information is referred to as registered position information.

  The position of the alignment mark 4 is extracted from the color component connection image for each RGB color component (step 57). Thereby, the position information of the four alignment marks 4 is calculated in each of the red connection image, the green connection image, and the blue connection image. The method for detecting the position information of the alignment mark 4 from each color component connection image that is a monochrome image (gray image) is not limited. For example, any technique such as edge detection may be used. Hereinafter, the position information calculated for each RGB color component connection image is referred to as calculated position information.

  Each of the red connection image, the green connection image, and the blue connection image is converted based on the registered position information read in step 56 and the calculated position information calculated in step 57. That is, image conversion is performed so that the position of the alignment mark 4 of each color component connection image is the position of the registered position information. As a result, the positions of the alignment marks 4 of the color component connection images are matched between the images, and the difference in magnification and the like between the images is corrected (step 58). For image conversion, coordinate matching such as affine transformation or projection transformation is used. Other techniques may be used. Note that the projection transformation is also expressed as a projective transformation or a projective transformation.

  For example, RGB color component connection images are generated from images (first and second color component images 221A and 221B) taken of the calibration subject 200, and correction data for correcting the color component connection images is generated from these. May be. The color component connection image of each color may be corrected based on the correction data. In the present embodiment, the reason why such correction data is not generated is to make it difficult to generate an influence error due to the variation in height due to the wavy deformation of the substrate 1. That is, it is possible to generate a color image with higher image quality by correcting the RGB color component connection images for each substrate 1.

  The color component connection images in which the positions of the alignment marks 4 are matched are combined to generate a color image of the entire region of the substrate 1 (step 59).

  After step 11 in FIG. 7, an appearance inspection of the substrate 1 is performed using the color image generated as described above. In the appearance inspection of the substrate 1, CAE data is used. For example, in FIG. 13, a frame line 90 indicated by a two-dot chain line is information included in the CAE data, and the frame line 90 defines the shape of each electronic component 2 and the coordinate position where the electronic component 2 is to be mounted. A frame line 91 in FIG. 7 represents registration position information of the alignment mark 4 used in the above processing.

  The appearance inspection unit 518 performs collation between the coordinate position of the color image and the coordinate position of the CAE data (step 11), and determines whether or not the collation results match (step 12). In this case, the coordinate position to be collated is, for example, the coordinate position of an index (mark) at a predetermined location on the mounting surface of the substrate 1.

  If step 12 is negative, 1 is added to the retry counter, and it is determined whether or not the count value N of the retry counter exceeds the reference value a (step 21). If the determination result is negative, retry is performed. That is, it is determined that the posture or position of the substrate 1 currently being inspected is deviated from the position to be positioned for some reason, and the process returns to step 3 and the operations of carrying and placing on the inspection stage 40 are performed again.

  If step 21 is affirmative, it is assumed that there is an abnormality in the substrate 1, and an alarm is displayed on the display unit 506 to notify the operator (step 22). As a cause of the occurrence of such an abnormality, for example, a substrate different from the substrate 1 to be inspected is erroneously placed on the inspection stage 40.

  When the alarm display of the abnormality of the substrate 1 is performed, the process proceeds to step 16 and data indicating the occurrence of the abnormality is stored in the storage unit 508.

  If step 12 is positive, the appearance inspection unit 518 performs an appearance inspection of the substrate 1 by comparing the color image with the CAE data (step 13).

  For example, as shown in FIG. 13, the appearance inspection unit 518 detects the size of the positional deviation of the electronic component 2 with respect to the frame line 90, and detects a missing item if there is no electronic component 2 on the frame line 90. In other words, based on the image shift between the electronic component 2 and the frame line 90 or the mismatch between the frame line 90 and the electronic component 2, the size of the position shift of the electronic component 2 is detected and the missing item is detected. . Further, for example, a situation such as a deviation amount or an area of the printed paste-like solder, a solder amount, or a foreign matter contamination is detected. Various conventionally known inspections can be adopted as the appearance inspection of the substrate 1.

  For example, as an appearance inspection, 3D information of the substrate 1 may be measured using an illuminance difference stereo method or a fringe interference method. In the present embodiment, since it is not necessary to move the first and second cameras 11A and 11B, the illumination unit 20, and the like, the camera 11 and the substrate 1 to be inspected are maintained in exactly the same positional relationship when measuring 3D information. Is possible. Accordingly, the missing (large error) portion of the 3D measurement information can be corrected with high accuracy by using the boundary information between the resist and the paste solder of the 2D imaging data (generated color image). Since a high-quality image is generated as a color image, it is advantageous for measurement of 3D information using color image information.

  In the process of calculating the paste solder volume, for example, the pre-printed inspected substrate (raw substrate) sample resist and land unevenness information is used to calculate the paste solder volume in the inspection target area. It is possible to calculate with high accuracy by the difference between the two. It is also possible to set the measurement reference surface to the resist surface and confirm that there is no abnormality such as foreign matter or scratches on the resist surface by color discrimination.

  Next, the appearance inspection unit 518 calculates a determination value from the numerical value indicating the positional deviation or missing part of the electronic component 2 detected in Step 13 (Step 14). Then, the determination value is compared with a reference value to make a pass / fail determination (step 15).

  If step 15 is affirmative, the data including the numerical value detected in step 13 and the determination value calculated in step 14 are aggregated and stored in the storage unit 508 (step 16). On the other hand, if step 15 is negative, an alarm is displayed in step 22, and then the process proceeds to step 16.

  As described above, in the appearance inspection apparatus according to the present embodiment, by executing the information processing method described above, a plurality of first color component images 21A for the first region 1A of the substrate 1 and the first region 1A. A plurality of second color component images 21B for the second region 1B adjacent to the second region 1B are acquired. The plurality of first color component images 21A are corrected for each color component, and the plurality of second color component images 21B are also corrected for each color component. By combining the plurality of corrected first color component images 21A and the plurality of second color component images 21B, the entire region including the first and second regions 1A and 1B (of the substrate 1). A color composite image that is a color image of the entire area) is generated. As a result, a high-quality color image of the substrate 1 can be obtained at low cost.

  For example, when an image of a substrate is taken to perform an appearance inspection of the substrate, the following problems may occur.

  In an inspection apparatus that images a substrate using two area scan type imaging devices with a narrow field of view, a high resolution image can be obtained in each imaging device, but it is difficult to properly connect the two images. Therefore, it becomes difficult to detect parts and foreign matters that span areas. For example, a connecting portion between areas is not connected due to the influence of parallax, and may be erroneously detected as a foreign object or a result component.

  In an inspection apparatus having a line scan type imaging apparatus with a wide field of view, a wide range of images can be acquired, but there is a restriction on the direction of the light source angle. For this reason, the detection performance of foreign matter and glossy part surface characters is low. Further, the line scan type inspection apparatus has a slow scanning speed and requires an expensive large lens.

  In an inspection device that has multiple area scan type imaging devices, when storing inspection images and ensuring traceability, it is necessary to link the substrate serial number and multiple area images using a database, resulting in operational loss and risk. To do.

  When a Bayer color camera is used, the resolving power is lower than that of a monochrome camera. A color camera equipped with a high-pixel imager cannot be used in an inspection apparatus because there is no other market than the Bayer color system. Also, the focal length for each color component does not match and the focus is blurred. Color cameras are less sensitive than monochrome cameras. A camera with a large imager is expensive.

  For example, there may be a configuration in which the camera and the illumination head are moved in the xy plane direction for visual inspection of the substrate. In such a case, when managing past manufacturing quality, it is assumed that means for calling up measurement data at the time of in-process inspection is used. Then, in order to collate the defective part of the actual board with the past measurement data, an advanced management tool that links the coordinate data of the operating head and the captured image at that time is necessary, and inconsistencies due to machine differences etc. Also occurs.

  For example, in order to adapt the resolution of the camera or sensor to the tendency for each substrate such as “small substrates have a high degree of difficulty”, a plurality of lenses and a variable magnification can be cited. However, in such a configuration, there is a possibility that the positional information of the image deteriorates due to the influence of the vibration of the operation axis, the lens rotation, etc., and the image cannot be corrected.

  When the entire substrate is imaged in one frame, information on the peripheral portion of the image is deteriorated due to chromatic aberration and distortion by the lens, and it becomes very difficult to match the CAE data with the coordinates.

  For example, with respect to the above problems, the appearance inspection apparatus according to the present embodiment corrects the plurality of first color component images 21A and the plurality of second color component images 21B for each color component. Therefore, the first color component image 21A and the second color component image 21B can be properly connected, and a high-quality color image can be generated. As a result, high-accuracy and high-speed appearance inspection without erroneous detection becomes possible.

  Since the two cameras 11A and 11B are used to photograph the first and second regions 1A and 1B, respectively, for example, it is easy to photograph a large area as an entire region. The first and second color component images 21A and 21B thus photographed can be combined to generate a high-quality color image of the entire area at a low cost.

  Since the board | substrate 1 is image | photographed with the 1st and 2nd cameras 11A and 11B, it is not necessary to operate | move a camera + illumination head on XY plane. Therefore, the frame rigidity necessary for the operation accuracy is not required, so that the system casing can be configured at a very low cost. Furthermore, a mechanism for fixing the substrate 1 to be inspected is not necessary, and the conveyance trouble risk can be reduced.

  Since there is no need to move the first and second cameras 11A and 11B, the illumination unit 20, and the like, a lighting device that irradiates the illumination system with a high-precision striped pattern, a high-precision actuator, and the like are unnecessary, and the cost is low. Configuration is possible. Therefore, a high-quality color image can be acquired at low cost.

  Further, since it is not necessary to manage the coordinate data and the like of the operating head, an advanced management tool is not required and costs can be reduced. Inconsistencies due to machine differences can also be eliminated. In addition, a highly accurate color image can be generated without using a plurality of lenses or a variable magnification.

  Coordinate displacement when the width method dimension decreases due to substrate warpage and 3D measurement errors due to warpage height are less likely to occur. For this reason, for example, debugging work after automatically creating inspection data from CAE data can be reduced. In addition, since only the volume of the paste solder can be extracted, even if there is some printing deviation, more accurate determination is possible if it is desired to make a non-defective determination if the volume is within a specified range.

  When the chromatic aberration due to the lens is corrected using the alignment mark, the contrast deterioration of the boundary between different colors in the image generated at the lens end portion is improved, so that the coordinate correction accuracy is improved. In addition, since the boundary edge between the solder and the resist becomes clear, the measurement accuracy of the area, volume, and deviation of the paste solder is improved.

  Since one frame of image can be generated using the two cameras 11A and 11B, the same resolution as an expensive large format camera can be obtained at low cost. Also, the repair risk at the time of failure is halved. Also,

  For example, even when the two cameras 11A and 11B are arranged back to back, the contrast is adjusted by 8 measurement points. Therefore, it is possible to shoot with a stable contrast with less distortion than a single-lens wide-angle lens.

  In the present embodiment, since the monochrome image by the selected color component light is photographed as the color component images 21A and 21B, a high-quality color image is generated as the color composite image. That is, since a color image can be obtained without a Bayer filter, it has high sensitivity / high resolution, which is advantageous for wide-field image inspection. In addition, when the solder grain and the pixel size are approximately the same, there is a high possibility that even if the solder grain becomes a bright spot with high brightness, the spot pattern of RGB does not occur.

  Since the entire substrate 1 to be inspected is captured in one frame by the two cameras 11A and 11B, it is easy to detect abnormality of the substrate. In addition, the risk of missing foreign objects is low.

  Since both 2D and 3D can be continuously measured and imaged without moving the positions of the cameras 11A and 11B and the substrate 1 to be inspected, there is no tact loss due to switching movement time. Further, calibration for correlating the 2D / 3D positional relationship is not necessary. Therefore, the coordinate correction amount between the 2D / 3D measurement data can be made zero.

  Since the color information of the substrate 1 to be inspected is known from the 2D color image, it is possible to complement the color influence level during the illuminance difference stereo process.

  When trying to achieve traceability, the image information of one board can be composed of one file, so that it is easy to collate defective returns and production data, and the configuration of the data management system is simple.

  Since the focal points of the filters of the respective colors of the optical filter wheel 13 are matched, image processing with high contrast can be performed even with color component images having different wavelength ranges.

[Substrate manufacturing method]
The quality of the substrate 1 is determined based on the result of the inspection by the appearance inspection apparatus 100 according to the present embodiment, and the substrate 1 determined as a non-defective product is selected. Thereby, the substrate manufacturing method according to the present embodiment is realized.

<Modification>
The embodiment according to the present technology is not limited to the embodiment described above, and various modifications are made.

  In the above-described embodiment, the case in which the object to be inspected is a circuit board such as a printed wiring board has been described. That is, the first and second regions of the inspection object are photographed for each color component. The image for each color component is corrected for each color component, and a color image is generated by the synthesis process. As a result, a high-quality color image can be generated at low cost.

  In the above embodiment, the appearance inspection apparatus, the inspection method, the information processing apparatus (information processing unit), the information processing method, the program, and the substrate manufacturing method according to the present embodiment have been described. The imaging device according to the present embodiment may be realized by the imaging unit and the information processing unit described above. In this case, the first and second cameras function as first and second imaging units, respectively. A high-quality color image of the subject may be taken by such an imaging device. The color image is not limited to the inspection of the subject, and may be used for various purposes. It may be used simply to generate a high-quality color image of the subject.

  An optical element other than the optical filter wheel may be used as an optical element that can select light of a plurality of color components from the light of the subject. For example, a prism or the like may be used as an optical element, and the optical element may be disposed at a predetermined position. For example, a predetermined color component light may be selected by one optical element, and the color component light may be incident on a plurality of imaging devices. .

  In the above, the first and second areas were respectively photographed by two cameras. However, the present invention is not limited to this. For example, the first and second regions may be photographed by appropriately moving one imaging device. A plurality of first color component images and a plurality of second color component images may be taken.

  A method of generating a color image by combining a plurality of first color component images and a plurality of second color component images is not limited. A color image may be generated without generating a connection image for each color component as described above. For example, a plurality of first color component images are combined to generate a color image of the first region. A plurality of second color component images are combined to generate a color image of the second region. A color image of the subject may be generated by connecting the color images of the first and second regions.

  It is also possible to combine at least two feature portions among the feature portions of each embodiment described above.

In addition, this technique can also take the following structures.
(1) An image pickup device that has an optical element that can select light of a plurality of color components from light of a subject and that can capture a color component image that is an image of the selected color component light for each color component. A plurality of first color component images that are the color component images for each of the color components in the first region of the subject, and the color components in the second region adjacent to the first region. Obtaining a plurality of second color component images which are the color component images;
Correcting each of the plurality of first color component images for each of the color components, correcting each of the plurality of second color component images for each of the color components,
The corrected plurality of first color component images and the plurality of second color component images are combined to have the plurality of color components in the entire area including the first and second areas. An information processing method for generating a color composite image.
(2) The information processing method according to (1),
The imaging device can capture a monochrome image of the subject;
The information processing method, wherein the color component image is a monochrome image by the selected color component light.
(3) The information processing method according to (1) or (2),
The plurality of first color component images are images captured by a first imaging device that captures the first region,
The plurality of second color component images are images captured by a second imaging device different from the first imaging device that images the second region.
(4) The information processing method according to (3),
In the correction step, the plurality of first color component images and the plurality of second color component images due to the difference between the imaging characteristics of the first imaging device and the imaging characteristics of the second imaging device An information processing method that corrects the difference between the two.
(5) The information processing method according to (4),
The image pickup characteristic includes any one of color sensitivity, distortion, and shading.
(6) The information processing method according to any one of (1) to (5),
The generating step generates a color component connection image in which the first and second color component images having the same color component are connected to each other, and synthesizes the plurality of generated color component connection images. To generate the color composite image,
The correction step includes correcting each of the plurality of color component connection images for each color component.
(7) The information processing method according to (6),
The information processing method, wherein the correcting step corrects a difference between the color component connected images due to the difference in the color component.
(8) The information processing method according to (7),
The correction step corrects a difference between the color component connection images due to chromatic aberration.
(9) The information processing method according to any one of (1) to (8),
Calculating correction data based on the plurality of first color component images and the plurality of second color component images of a calibration subject having a predetermined pattern;
The information processing method, wherein the correction step performs correction using the calculated correction data.
(10) The information processing method according to (9), further comprising:
An information processing method for adjusting each imaging condition of the first and second imaging devices using the correction data.
(11) The information processing method according to (10),
The imaging condition includes any one of contrast and focal length.
(12) an optical element capable of selecting light of a plurality of color components from the light of the subject,
One or more imaging units capable of photographing a color component image, which is an image of the selected color component light, for each color component;
A plurality of first color component images, which are the color component images for each of the color components of the first area of the subject, photographed by the imaging unit; and a second area adjacent to the first area An acquisition unit that acquires a plurality of second color component images that are the color component images for each of the color components;
A correction unit that corrects each of the plurality of first color component images for each of the color components, and corrects each of the plurality of second color component images for each of the color components;
The corrected plurality of first color component images and the plurality of second color component images are combined to have the plurality of color components in the entire area including the first and second areas. An imaging device comprising: a generation unit that generates a color composite image.
(13) The imaging apparatus according to (12),
The one or more imaging units are different from the first imaging unit that captures the plurality of first color component images and the first imaging unit that captures the plurality of second color component images. An imaging device.
(14) The imaging device according to (13), further including:
An imaging apparatus comprising: a reflective element that reflects light from the first region to the first imaging unit and reflects light from the second region to the second imaging unit.
(15) The imaging apparatus according to any one of (12) to (14),
The optical element is a color filter including a red filter that transmits red component light, a green filter that transmits green component light, and a blue filter that transmits blue component light.
(16) The imaging apparatus according to (15),
The thicknesses of the red filter, the green filter, and the blue filter in the light transmission direction are such that the focal lengths of the red component light, the green component light, and the blue component light transmitted through the filters are equal to each other. An imaging device that is adjusted to be.
(17) The imaging device according to (16),
The imaging device includes: a transmission unit that transmits light from the subject so that a focal length of the light is equal to each focal length of the red component light, the green component light, and the blue component light.

PR0 to PR4 ... correction data 1 ... substrate 1A ... first area 1B ... second area 10 ... imaging unit 11A ... first camera 11A ... second camera 13 ... optical filter wheel 14 ... reflection mirror 19R ... red Filter 19G ... Green filter 19B ... Blue filter 19T ... Transmission plate 21A ... First color component image 21B ... Second color component image 50 ... Information processing unit 51 ... Operation display unit 52 ... Input / output control unit 53 ... Calculation control storage Unit 100 ... Appearance inspection apparatus 200 ... Calibration subject 230 ... Dot pattern

Claims (20)

Photographed by an imaging device that has an optical element that can select light of a plurality of color components from the light of the subject and that can capture a color component image that is an image of the selected color component light for each color component, A plurality of first color component images that are the color component images for each color component in the first region of the subject, and the color components for each color component in a second region adjacent to the first region. A plurality of second color component images that are images,
Correcting each of the plurality of first color component images for each of the color components, correcting each of the plurality of second color component images for each of the color components,
The corrected plurality of first color component images and the plurality of second color component images are combined to have the plurality of color components in the entire area including the first and second areas. An information processing method for generating a color composite image. An information processing method according to claim 1,
The imaging device can capture a monochrome image of the subject;
The information processing method, wherein the color component image is a monochrome image by the selected color component light. An information processing method according to claim 1,
The plurality of first color component images are images captured by a first imaging device that captures the first region,
The plurality of second color component images are images captured by a second imaging device different from the first imaging device that images the second region. An information processing method according to claim 3,
In the correction step, the plurality of first color component images and the plurality of second color component images due to the difference between the imaging characteristics of the first imaging device and the imaging characteristics of the second imaging device An information processing method that corrects the difference between the two. An information processing method according to claim 4,
The image pickup characteristic includes any one of color sensitivity, distortion, and shading. An information processing method according to claim 1,
The generating step generates a color component connection image in which the first and second color component images having the same color component are connected to each other, and synthesizes the plurality of generated color component connection images. To generate the color composite image,
The correction step includes correcting each of the plurality of color component connection images for each color component. An information processing method according to claim 6,
The information processing method, wherein the correcting step corrects a difference between the color component connected images due to the difference in the color component. The information processing method according to claim 7,
The correction step corrects a difference between the color component connection images due to chromatic aberration. The information processing method according to claim 1, further comprising:
Calculating correction data based on the plurality of first color component images and the plurality of second color component images of a calibration subject having a predetermined pattern;
The information processing method, wherein the correction step performs correction using the calculated correction data. The information processing method according to claim 9, further comprising:
An information processing method for adjusting each imaging condition of the first and second imaging devices using the correction data. The information processing method according to claim 10,
The imaging condition includes any one of contrast and focal length. Photographed by an imaging device that has an optical element that can select light of a plurality of color components from the light of the subject and that can capture a color component image that is an image of the selected color component light for each color component, A plurality of first color component images that are the color component images for each color component in the first region of the subject, and the color components for each color component in a second region adjacent to the first region. An acquisition unit that acquires a plurality of second color component images that are images;
A correction unit that corrects each of the plurality of first color component images for each of the color components, and corrects each of the plurality of second color component images for each of the color components;
The corrected plurality of first color component images and the plurality of second color component images are combined to have the plurality of color components in the entire area including the first and second areas. An information processing apparatus comprising: a generation unit that generates a color composite image. Photographed by an imaging device that has an optical element that can select light of a plurality of color components from the light of the subject and that can capture a color component image that is an image of the selected color component light for each color component, A plurality of first color component images that are the color component images for each color component in the first region of the subject, and the color components for each color component in a second region adjacent to the first region. Obtaining a plurality of second color component images that are images;
Correcting each of the plurality of first color component images for each of the color components, and correcting each of the plurality of second color component images for each of the color components;
The corrected plurality of first color component images and the plurality of second color component images are combined to have the plurality of color components in the entire area including the first and second areas. A program for causing a computer to execute a step of generating a color composite image. An optical element capable of selecting light of a plurality of color components from the light of the subject,
One or more imaging units capable of photographing a color component image, which is an image of the selected color component light, for each color component;
A plurality of first color component images, which are the color component images for each of the color components of the first area of the subject, photographed by the imaging unit; and a second area adjacent to the first area An acquisition unit that acquires a plurality of second color component images that are the color component images for each of the color components;
A correction unit that corrects each of the plurality of first color component images for each of the color components, and corrects each of the plurality of second color component images for each of the color components;
The corrected plurality of first color component images and the plurality of second color component images are combined to have the plurality of color components in the entire area including the first and second areas. An imaging device comprising: a generation unit that generates a color composite image. The imaging device according to claim 14,
The one or more imaging units are different from the first imaging unit that captures the plurality of first color component images and the first imaging unit that captures the plurality of second color component images. An imaging device. The imaging device according to claim 14,
The optical element is a color filter including a red filter that transmits red component light, a green filter that transmits green component light, and a blue filter that transmits blue component light. The imaging device according to claim 16,
The thicknesses of the red filter, the green filter, and the blue filter in the light transmission direction are such that the focal lengths of the red component light, the green component light, and the blue component light transmitted through the filters are equal to each other. An imaging device that is adjusted to be. An imaging device having an optical element capable of selecting light of a plurality of color components from light of a subject to be inspected and capable of photographing a color component image, which is an image of the selected color component light, for each color component A plurality of first color component images, which are the color component images for each color component of the first region of the subject, and the color components of the second region adjacent to the first region. A plurality of second color component images that are the color component images of
Correcting each of the plurality of first color component images for each of the color components, correcting each of the plurality of second color component images for each of the color components,
The corrected plurality of first color component images and the plurality of second color component images are combined to have the plurality of color components in the entire area including the first and second areas. Generate a color composite image,
An inspection method for inspecting the subject based on the generated color composite image. An optical element capable of selecting light of a plurality of color components from the light of the subject to be inspected,
One or more imaging units capable of photographing a color component image, which is an image of the selected color component light, for each color component;
A plurality of first color component images, which are the color component images for each of the color components of the first area of the subject, photographed by the imaging unit; and a second area adjacent to the first area An acquisition unit that acquires a plurality of second color component images that are the color component images for each of the color components;
A correction unit that corrects each of the plurality of first color component images for each of the color components, and corrects each of the plurality of second color component images for each of the color components;
The corrected plurality of first color component images and the plurality of second color component images are combined to have the plurality of color components in the entire area including the first and second areas. An inspection apparatus comprising: a generation unit that generates a color composite image; and an inspection unit that inspects the subject based on the generated color composite image. An optical element that can select light of a plurality of color components from light of a substrate as an object to be inspected can be selected, and a color component image that is an image of the selected color component light can be photographed for each color component A plurality of first color component images, which are the color component images for each of the color components of the first region of the substrate, photographed by the imaging device, and the second region adjacent to the first region Obtaining a plurality of second color component images that are the color component images for each color component;
Correcting each of the plurality of first color component images for each of the color components, correcting each of the plurality of second color component images for each of the color components,
The corrected plurality of first color component images and the plurality of second color component images are combined to have the plurality of color components in the entire area including the first and second areas. Generate a color composite image,
Inspecting the substrate based on the generated color composite image,
A method for manufacturing a substrate, wherein the quality of the substrate is determined based on a result of the inspection.