KR20190036538A - 기체상 또는 액상 에피택시를 이용한 gan 후막화를 위한 시드 웨이퍼 - Google Patents

기체상 또는 액상 에피택시를 이용한 gan 후막화를 위한 시드 웨이퍼 Download PDF

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KR20190036538A
KR20190036538A KR1020197004750A KR20197004750A KR20190036538A KR 20190036538 A KR20190036538 A KR 20190036538A KR 1020197004750 A KR1020197004750 A KR 1020197004750A KR 20197004750 A KR20197004750 A KR 20197004750A KR 20190036538 A KR20190036538 A KR 20190036538A
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gan
substrate
layer
energy
cleaving
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프란시스 제이. 헨리
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큐맷, 인코포레이티드
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