KR20180002689A - 파라미터의 데이터 구조 및 반도체 장치의 제조 장치 - Google Patents

파라미터의 데이터 구조 및 반도체 장치의 제조 장치 Download PDF

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Publication number
KR20180002689A
KR20180002689A KR1020177033047A KR20177033047A KR20180002689A KR 20180002689 A KR20180002689 A KR 20180002689A KR 1020177033047 A KR1020177033047 A KR 1020177033047A KR 20177033047 A KR20177033047 A KR 20177033047A KR 20180002689 A KR20180002689 A KR 20180002689A
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KR
South Korea
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KR1020177033047A
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English (en)
Korean (ko)
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코타로 키타하라
신지 마스이
Original Assignee
토와 가부시기가이샤
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Publication of KR20180002689A publication Critical patent/KR20180002689A/ko

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    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67276—Production flow monitoring, e.g. for increasing throughput
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
    • Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

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  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Automation & Control Theory (AREA)
  • General Engineering & Computer Science (AREA)
  • Quality & Reliability (AREA)
  • General Factory Administration (AREA)
  • Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
KR1020177033047A 2015-05-13 2016-01-07 파라미터의 데이터 구조 및 반도체 장치의 제조 장치 KR20180002689A (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2015097924A JP2016213396A (ja) 2015-05-13 2015-05-13 パラメータのデータ構造および半導体装置の製造装置
JPJP-P-2015-097924 2015-05-13
PCT/JP2016/050303 WO2016181662A1 (ja) 2015-05-13 2016-01-07 パラメータのデータ構造および半導体装置の製造装置

Publications (1)

Publication Number Publication Date
KR20180002689A true KR20180002689A (ko) 2018-01-08

Family

ID=57248005

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020177033047A KR20180002689A (ko) 2015-05-13 2016-01-07 파라미터의 데이터 구조 및 반도체 장치의 제조 장치

Country Status (5)

Country Link
JP (1) JP2016213396A (ja)
KR (1) KR20180002689A (ja)
CN (1) CN107533954A (ja)
TW (1) TWI625760B (ja)
WO (1) WO2016181662A1 (ja)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20220018553A (ko) * 2020-07-01 2022-02-15 도시바 미쓰비시덴키 산교시스템 가부시키가이샤 제조 설비의 진단 지원 장치
JP7472186B2 (ja) 2022-03-28 2024-04-22 アンリツ株式会社 移動端末試験システム及び移動端末試験方法
JP7381811B1 (ja) * 2023-05-09 2023-11-16 ファナック株式会社 加工情報表示装置
JP7415094B1 (ja) 2023-05-09 2024-01-16 ファナック株式会社 加工情報表示装置
JP7381810B1 (ja) * 2023-05-09 2023-11-16 ファナック株式会社 加工情報表示装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08195407A (ja) * 1995-01-12 1996-07-30 Toshiba Corp 半導体装置生産における品質管理システム
JP2002202806A (ja) * 2000-12-28 2002-07-19 Mitsubishi Electric Corp 工程管理システム及び物品の製造方法
JP2005190031A (ja) * 2003-12-25 2005-07-14 Renesas Technology Corp 半導体デバイス製造におけるボトルネック発生回避方法およびシステム
JP5696194B2 (ja) * 2013-10-11 2015-04-08 株式会社キーエンス プログラム作成支援装置及び画像処理装置

Also Published As

Publication number Publication date
CN107533954A (zh) 2018-01-02
JP2016213396A (ja) 2016-12-15
TWI625760B (zh) 2018-06-01
WO2016181662A1 (ja) 2016-11-17
TW201709260A (zh) 2017-03-01

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