KR20170096574A - 압력 검출 유닛 및 이것을 이용한 압력 센서 - Google Patents

압력 검출 유닛 및 이것을 이용한 압력 센서 Download PDF

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Publication number
KR20170096574A
KR20170096574A KR1020160163520A KR20160163520A KR20170096574A KR 20170096574 A KR20170096574 A KR 20170096574A KR 1020160163520 A KR1020160163520 A KR 1020160163520A KR 20160163520 A KR20160163520 A KR 20160163520A KR 20170096574 A KR20170096574 A KR 20170096574A
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KR
South Korea
Prior art keywords
base
pressure
pressure detecting
detecting unit
terminal pin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
KR1020160163520A
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English (en)
Korean (ko)
Inventor
토모히사 아오야마
모토히사 무카이
요우코 타무라
Original Assignee
가부시기가이샤 후지고오키
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Application filed by 가부시기가이샤 후지고오키 filed Critical 가부시기가이샤 후지고오키
Publication of KR20170096574A publication Critical patent/KR20170096574A/ko
Withdrawn legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/08—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of piezoelectric devices, i.e. electric circuits therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/0061—Electrical connection means
    • G01L19/0069—Electrical connection means from the sensor to its support
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/0007—Fluidic connecting means
    • G01L19/0046—Fluidic connecting means using isolation membranes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/0061—Electrical connection means
    • G01L19/0084—Electrical connection means to the outside of the housing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
    • G01L19/0627—Protection against aggressive medium in general
    • G01L19/0645—Protection against aggressive medium in general using isolation membranes, specially adapted for protection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
    • G01L19/0672—Leakage or rupture protection or detection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings
    • G01L19/147—Details about the mounting of the sensor to support or covering means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0042—Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/008—Transmitting or indicating the displacement of flexible diaphragms using piezoelectric devices

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
KR1020160163520A 2016-02-16 2016-12-02 압력 검출 유닛 및 이것을 이용한 압력 센서 Withdrawn KR20170096574A (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPJP-P-2016-026706 2016-02-16
JP2016026706A JP6624966B2 (ja) 2016-02-16 2016-02-16 圧力検出ユニット及びこれを用いた圧力センサ

Publications (1)

Publication Number Publication Date
KR20170096574A true KR20170096574A (ko) 2017-08-24

Family

ID=58094195

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020160163520A Withdrawn KR20170096574A (ko) 2016-02-16 2016-12-02 압력 검출 유닛 및 이것을 이용한 압력 센서

Country Status (5)

Country Link
US (1) US10215654B2 (https=)
EP (1) EP3208588B1 (https=)
JP (1) JP6624966B2 (https=)
KR (1) KR20170096574A (https=)
CN (1) CN107084815A (https=)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017146137A (ja) * 2016-02-16 2017-08-24 株式会社不二工機 圧力検出ユニット及びこれを用いた圧力センサ、並びに圧力検出ユニットの製造方法
JP6703850B2 (ja) * 2016-02-16 2020-06-03 株式会社不二工機 圧力検出ユニット及びこれを用いた圧力センサ
DE102017122607A1 (de) * 2017-09-28 2019-03-28 Tdk Electronics Ag Mediengetrennter Drucktransmitter
DE102018206477B3 (de) * 2018-04-26 2019-02-07 Robert Bosch Gmbh Vorrichtung zur Abdichtung zweier mit unterschiedlichen Fluiden gefüllter Räume bei einer MEMS-Sensoranordnung
US11435249B2 (en) * 2018-06-12 2022-09-06 Dwyer Instruments, Inc. Electrostatic discharge resistant pressure sensor
JP2020008307A (ja) * 2018-07-03 2020-01-16 株式会社不二工機 圧力検出ユニット及びこれを用いた圧力センサ
JP6688512B2 (ja) * 2018-07-06 2020-04-28 株式会社不二工機 圧力検出ユニット及びこれを用いた圧力センサ
US11460363B2 (en) * 2019-03-29 2022-10-04 Honeywell International Inc. Pressure sensors and methods of manufacturing a pressure sensor
CN110333027A (zh) * 2019-06-19 2019-10-15 感知城市（天津）物联网科技股份有限公司 一种二级管网测温测压系统
JP2021056071A (ja) * 2019-09-30 2021-04-08 株式会社不二工機 圧力検出ユニット及びこれを用いた圧力センサ
JP7291948B2 (ja) * 2019-10-04 2023-06-16 株式会社不二工機 圧力センサ

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07209125A (ja) * 1994-01-17 1995-08-11 Matsushita Electric Ind Co Ltd 燃焼圧センサ
JPH1153502A (ja) * 1997-08-04 1999-02-26 Toshiba Corp 接触及び非接触複合型メモリカード、送受信素子の接続構造、及びメモリカードの製造方法
EP0905496A3 (en) * 1997-09-30 1999-10-13 Matsushita Electric Works, Ltd. Pressure sensor
WO2003008921A1 (en) * 2001-07-17 2003-01-30 Measurement Specialties, Inc. Isolation technique for pressure sensing structure
US7538401B2 (en) 2005-05-03 2009-05-26 Rosemount Aerospace Inc. Transducer for use in harsh environments
JP4719727B2 (ja) 2007-09-05 2011-07-06 長野計器株式会社 圧力センサの製造方法および圧力センサ
ITTO20080485A1 (it) * 2008-06-19 2009-12-20 Eltek Spa Dispositivo sensore di pressione
CN102980713B (zh) * 2011-09-02 2016-04-27 株式会社不二工机 压力传感器
JP6028557B2 (ja) * 2012-12-19 2016-11-16 横河電機株式会社 センサユニット
JP6111151B2 (ja) * 2013-06-21 2017-04-05 株式会社不二工機 圧力センサ
TWI633289B (zh) 2013-03-13 2018-08-21 不二工機股份有限公司 壓力感測器
JP6205145B2 (ja) 2013-03-13 2017-09-27 株式会社不二工機 圧力センサ
WO2015161904A1 (de) 2014-04-23 2015-10-29 Endress+Hauser Gmbh+Co. Kg Drucksensor mit einem keramischen grundkörper
CN105004469B (zh) * 2015-06-09 2018-01-05 中北大学 一种微波散射原理的无源高温压力传感器与制备方法
JP6703850B2 (ja) * 2016-02-16 2020-06-03 株式会社不二工機 圧力検出ユニット及びこれを用いた圧力センサ
JP2017146137A (ja) * 2016-02-16 2017-08-24 株式会社不二工機 圧力検出ユニット及びこれを用いた圧力センサ、並びに圧力検出ユニットの製造方法

Also Published As

Publication number Publication date
EP3208588A3 (en) 2017-11-22
US10215654B2 (en) 2019-02-26
US20170234751A1 (en) 2017-08-17
JP6624966B2 (ja) 2019-12-25
EP3208588B1 (en) 2019-04-10
JP2017146138A (ja) 2017-08-24
CN107084815A (zh) 2017-08-22
EP3208588A2 (en) 2017-08-23

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PA0109 Patent application

Patent event code: PA01091R01D

Comment text: Patent Application

Patent event date: 20161202

PG1501 Laying open of application
PC1203 Withdrawal of no request for examination
WITN Application deemed withdrawn, e.g. because no request for examination was filed or no examination fee was paid