KR20160034090A - Apparatus for inspection of substrate - Google Patents

Apparatus for inspection of substrate Download PDF

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Publication number
KR20160034090A
KR20160034090A KR1020140125173A KR20140125173A KR20160034090A KR 20160034090 A KR20160034090 A KR 20160034090A KR 1020140125173 A KR1020140125173 A KR 1020140125173A KR 20140125173 A KR20140125173 A KR 20140125173A KR 20160034090 A KR20160034090 A KR 20160034090A
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KR
South Korea
Prior art keywords
stage
substrate
horizontally
fixing member
base
Prior art date
Application number
KR1020140125173A
Other languages
Korean (ko)
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KR102022471B1 (en
Inventor
이성헌
홍진광
Original Assignee
한화테크윈 주식회사
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Application filed by 한화테크윈 주식회사 filed Critical 한화테크윈 주식회사
Priority to KR1020140125173A priority Critical patent/KR102022471B1/en
Priority to PCT/KR2014/010945 priority patent/WO2016043379A1/en
Publication of KR20160034090A publication Critical patent/KR20160034090A/en
Application granted granted Critical
Publication of KR102022471B1 publication Critical patent/KR102022471B1/en

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined

Abstract

The present invention relates to a substrate inspection apparatus comprising: a first stage moving horizontally a loaded substrate in an aligned state, and moved autonomously in a horizontal direction at the same time; a second stage continuously moving horizontally the substrate received from the first stage, and autonomously moved horizontally; and a cameral arranged between the first stage and the second stage, and photographing the substrate being moved horizontally. The technical subject of the present invention is to provide the substrate inspection apparatus having a high speed to inspect a substrate, and having excellent location precision; thereby maximizing inspection efficiency.

Description

[0001] Apparatus for inspection of substrate [0002]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a substrate inspection apparatus, and more particularly, to a substrate inspection apparatus for inspecting the presence or absence of defects on a substrate by using a line scan camera.

Generally, a manufacturing process of a semiconductor or a flat panel display (FPD) includes a process of processing a substrate, a process of inspecting a substrate, and the like.

Since the inspection process of the semiconductor or the flat panel display device is applied in the same or similar manner, the background technology will be described below, focusing on the inspection process for manufacturing the flat panel display device.

As flat panel display devices, there are LCD (Liquid Crystal Display), PDP (Plasma Display Panel), OLED (Organic Light Emitting Diode) and the like. Such flat display devices are classified into Blister, Stone, And various defects such as stain, scratch, bevel chip, cutting chip, crack, etc. may be generated.

Therefore, development of a technique for stably and promptly inspecting such defects is required.

Korean Patent Publication No. 2006-0080561 Japanese Laid-Open Patent No. 2011-149701

SUMMARY OF THE INVENTION It is an object of the present invention to provide a substrate inspection apparatus in which the inspection speed of the substrate is fast and the position accuracy is excellent so that the efficiency of inspection is maximized.

The problems of the present invention are not limited to the above-mentioned problems, and other problems not mentioned can be clearly understood by those skilled in the art from the following description.

According to an aspect of the present invention, there is provided a substrate inspection apparatus including: a first stage capable of horizontally moving a loaded substrate in an aligned state and moving the substrate horizontally; A first stage capable of horizontally moving the substrate transferred continuously from the first stage and horizontally moving the substrate horizontally; And a camera disposed between the first stage and the second stage for photographing the horizontally moved substrate.

The first stage and the second stage each comprising: a base; And a fixing member and a deformable member which are disposed on the base in a state of being spaced apart from each other by a predetermined distance.

Here, a slide member may be formed on the base, and the slide member may be slid along the rail to move the first stage and the second stage in a horizontal direction.

In addition, the variable member may be adjusted to be spaced forward or backward from the base toward the fixing member.

At this time, it is preferable that an insertion groove is formed in one side of the variable member facing the fixing member, the upper surface forming the insertion groove is formed of an inclined surface, and the lower surface is formed in a horizontal plane and the entrance side width of the opening end is wide Do.

It is preferable that the camera is a line scan camera.

Other specific details of the invention are included in the detailed description and drawings.

As described above, according to the substrate inspection apparatus of the present invention, the inspection speed of the substrate is fast and the position accuracy is excellent, so that the efficiency of inspection of the presence or absence of a defect in the substrate can be maximized.

The effects according to the present invention are not limited by the contents exemplified above, and more various effects are included in the specification.

1 is a schematic perspective view of a substrate inspection apparatus according to an embodiment of the present invention;
FIGS. 2 to 9 are planar views sequentially illustrating operation relationships of a substrate inspection apparatus according to an embodiment of the present invention. FIG.
10A and 10B are side structural views showing a stage configuration of a substrate inspection apparatus according to an embodiment of the present invention;

BRIEF DESCRIPTION OF THE DRAWINGS The advantages and features of the present invention and the manner of achieving them will become apparent with reference to the embodiments described in detail below with reference to the accompanying drawings. The present invention may, however, be embodied in many different forms and should not be construed as being limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the concept of the invention to those skilled in the art. Is provided to fully convey the scope of the invention to those skilled in the art, and the invention is only defined by the scope of the claims. Like reference numerals refer to like elements throughout the specification.

Further, the embodiments described herein will be described with reference to cross-sectional views and / or schematic drawings that are ideal illustrations of the present invention. Thus, the shape of the illustrations may be modified by manufacturing techniques and / or tolerances. In addition, in the drawings of the present invention, each component may be somewhat enlarged or reduced in view of convenience of explanation. Like reference numerals refer to like elements throughout the specification.

Hereinafter, preferred embodiments of a substrate inspection apparatus according to an embodiment of the present invention will be described in detail with reference to the accompanying drawings.

FIG. 1 is a schematic perspective view of a substrate inspecting apparatus according to an embodiment of the present invention, FIGS. 2 to 9 are plan views sequentially illustrating operation relationships of a substrate inspecting apparatus according to an embodiment of the present invention, And FIG. 10B is a side view showing a stage configuration of a substrate inspection apparatus according to an embodiment of the present invention.

A substrate inspection apparatus 100 according to an embodiment of the present invention includes a first stage 200 and a second stage 300 capable of moving horizontally and a first stage 200 and a second stage 300, And a camera 400 disposed between the first and second cameras 300 and 300.

The first stage 200 and the second stage 300 may be arranged in parallel on both sides of the camera 400 and moved in the horizontal direction while being advanced and retreated toward the camera 400. [

That is, the first stage 200 and the second stage 300 are configured such that the slide members 212 and 312 are formed on the bottom surfaces of the bases 210 and 310 and the slide members 212 and 312 are moved in the horizontal direction along the rail 250 Can be achieved.

Here, the movement of the first stage 200 and the second stage 300 in the horizontal direction along the rail 250 can be realized by a mechanical structure such as an actuator or a ball screw, And can be implemented by any known reciprocating means, such as being implemented by an electrical configuration, and thus a detailed description thereof will be omitted.

The first stage 200 includes a first base 210 on which a slide member 212 is formed and a first fixing member 230 disposed on both sides of the upper surface of the first base 210, And the first deformable member 220.

The first fixing member 230 includes a seating portion 234 fixed to the upper surface of the first base 210 and a support portion 232 formed in a vertical direction from one end of the seating portion 234. It can be formed by magnetization.

The first deformable member 220 may have a structure in which an inserting groove 224 formed inward is formed on one surface of the first fixing member 230 facing the first fixing member 230. In this case, And the upper surface of the seating portion 226 is formed in a horizontal plane so that the entrance side width of the opening end is preferably wide.

The first deformable member 220 may be moved forward or backward by a predetermined distance toward the first fixing member 230 on the first base 210.

1, a guide protrusion (not shown) is formed on the bottom surface of the first deformable member 220. The guide protrusion is inserted into a guide groove 214 formed on the upper surface of the first base 210, The first deformable member 220 can be moved forward and backward on the first base 210 by a predetermined distance.

The movement of the first deformable member 220 on the first base 210 by a predetermined distance may be realized by a mechanical structure such as an actuator or a ball screw or may be realized by an electrical structure using a motor or the like , And can be implemented by any known reciprocating means, and a detailed description thereof will be omitted.

A first sensing sensor 500 may be installed on one side of the first fixing member 230 to detect the entry of the substrate S to be loaded. It may be installed anywhere on the first base 210 as long as it is in the loading direction. That is, it may be formed on one side of the first deformable member 220.

The second stage 300 includes a second base 310 on which a slide member 312 is formed and a second fixing member 330 disposed on both sides of the upper surface of the second base 310, And the second deformable member 320 may be formed.

The second fixing member 330 includes a seating portion 334 fixed to the upper surface of the second base 310 and a support portion 332 formed in a vertical direction from one end of the seating portion 334. Shape.

In addition, the second deformable member 320 may have a structure in which an inserting groove 324 is formed at one side facing the second fixing member 330. In this case, And the top surface of the seating portion 326 is formed in a horizontal plane so that the entrance side width of the opening end is preferably wide.

The second deformable member 320 may be moved forward or backward by a predetermined distance toward the second fixing member 330 on the second base 310.

1, a guide projection (not shown) is formed on the bottom surface of the second deformable member 320, and the guide protrusion (not designated) is provided on the upper surface of the second base 310 The second deformable member 320 can be moved forward and backward by a predetermined distance on the second base 310 while moving along the guide groove 314 formed therein.

The movement of the second deformable member 320 on the second base 310 by a predetermined distance may be realized by a mechanical structure such as an actuator or a ball screw or may be realized by an electrical structure using a motor or the like And can be implemented by any conventionally known reciprocating means, and thus a detailed description thereof will be omitted.

A second detection sensor 510 may be installed on one side of the second fixing member 330 to sense the entry of the substrate S transferred from the first stage 200. The second detection sensor 510 may be installed anywhere on the second base 310 as long as the substrate S is conveyed. That is, it may be formed on one side of the second deformable member 320.

A third sensing sensor 520 may be installed on the other side of the second fixing member 330 to detect that the substrate S is unloaded. It may be installed anywhere on the second base 310 if it is in the unloading direction. That is, on the other surface of the second deformable member 320.

For reference, the camera 400 applied to the embodiment of the present invention is preferably a line scan camera. However, the present invention is not limited thereto, and any camera 400 may be used as long as it photographs a substrate S to be transferred.

As described above, the first stage 200 and the second stage 300 have substantially the same configuration, and are horizontally moved in the direction opposite to each other with the camera 400 interposed therebetween on the rail 250 In the following, the operation of the substrate inspecting apparatus 100 constructed as described above will be described with reference to FIGS. 2 and 9. FIG.

First, when the substrate S is loaded from a substrate loading unit (not shown) to inspect the substrate S, the first stage 200 horizontally moves toward the substrate loading unit, and the second stage 300 moves horizontally The first stage 200 is moved to the initial stage.

At this time, the first deformable member 220 and the second deformable member 320 of the first stage 200 and the second stage 300 are retracted from the first fixing member 230 and the second fixing member 330, Thereby maintaining a constant interval.

2, when the substrate S is loaded from the substrate loading part and the front end of the substrate S enters the first stage 200, the first sensing sensor 500 outputs this signal And the control unit applies a driving signal to the first deformable member 220 by this signal.

10A, when the substrate S is detected by the first sensing sensor 500 to enter the first stage 200, the first fixing member 230 is rotated in the state of FIG. So that both ends of the substrate S are gripped as shown in Fig. 10B.

One end of the substrate S is fitted into the insertion groove 224 of the first deformable member 220 and is in close contact with the other surface of the supporting portion 232 of the first fixing member 230 So that it can be stably gripped.

The insertion groove 224 of the first deformable member 220 has an opening width that is wide from the entrance side to the downward inclined surface 222 so that the insertion groove 224 of the first deformable member 220 is not limited by the thickness of the substrate S The gripping can be easily performed.

The first stage 200 moves the substrate S in the horizontal direction as shown in FIG. 3 in a state where the substrate S is loaded and held in the first stage 200. The substrate S The horizontal movement is performed by sliding means such as a roller on each of the seating portions 226 and 234 of the first fixing member 220 and the first fixing member 230 Therefore, the horizontal movement can be performed by any conventionally known moving means, and a detailed description thereof will be omitted.

Meanwhile, the first stage 200 may horizontally move the substrate S, as well as the horizontal movement itself, as shown in FIGS. 4 and 5.

That is, the slide member 212 formed on the bottom surface of the first base 210 of the first stage 200 moves horizontally toward the camera 400 and the second stage 300 along the rail 250 .

When the front end of the substrate S enters the second stage 300 by the horizontal movement of the first stage 200, the second sensing sensor 510 transmits the signal to the control unit, To the first deformable member 220 along with the second deformable member 320. [

10A, when the substrate S is detected by the second detection sensor 510 to enter the second stage 300, the second deformable member 320 is moved to the second fixing member 330, So that both ends of the substrate S are gripped as shown in FIG. 10B.

One end of the substrate S is fitted into the insertion groove 324 of the second deformable member 320 and is in close contact with the other surface of the supporting portion 332 of the second fixing member 330 So that a stable gripping state can be achieved.

The insertion groove 324 of the second deformable member 320 also has an upper opening formed by the downward inclined surface 322 from the entrance side and a wide opening width at the opening end so that the thickness of the substrate S is not limited The gripping can be easily performed.

10B, when the substrate S is detected by the second sensing sensor 510 to enter the second stage 300, the first deformable member 220 of the second stage 300 So as to be separated from the first fixing member 230 so as to release both end grips of the substrate S as shown in Fig. 10A (see Fig. 6)

The substrate S is transferred from the first stage 200 to the second stage 300 so that the first stage 200 moves horizontally toward the substrate loading part along the rail 250 again, The second stage 300 moves horizontally along the rail 250 toward the substrate loading portion (not shown).

Further, the second stage 300 horizontally moves to the substrate loading section, and at the same time, horizontally moves the substrate S as shown in Fig.

In this case, as described above, the substrate S may be moved horizontally by air lift, and on the seating portions 326 and 334 of the second deformable member 320 and the second fixing member 330, Or the like, so that horizontal movement can be performed by any conventionally known moving means.

The second stage 300 horizontally moves along the rail 250 and the substrate S horizontally moves on the second stage 300 so that the other end of the substrate S moves on the second stage 300 The third sensing sensor 520 transmits the signal to the control unit, and the control unit applies the driving signal to the second deformable member 320 by the signal.

10B, the second deformable member 320 of the second stage 300 is moved backward to be separated from the second fixing member 330 in the state of FIG. 10B, And the thus released substrate S can be unloaded and loaded into the substrate loading section.

The second stage 300 unloading the substrate S to the substrate loading unit horizontally moves along the rail 250 again to move the substrate S from the first stage 200 back to the substrate S, To the position for receiving the signal.

Then, the first stage 200 receives the substrate S loaded from the substrate loading unit again, and repeats the above-described process to inspect a plurality of substrates S sequentially.

The camera 400 disposed between the first stage 200 and the second stage 300 is moved in the horizontal direction by the first stage 200 and is transferred to the surface of the substrate S transferred to the second stage 300 And transmits it to the control unit, whereby it is possible to check the presence or absence of a defect in the substrate S.

In this case, the substrate S is transferred in a floating state in the process of being transferred from the first stage 200 to the second stage 300, so that the camera 400 is moved along with the upper surface of the substrate S The substrate S can be simultaneously or wholly defected on the upper and lower surfaces thereof.

Particularly, since the first stage 200 and the second stage 300 horizontally move the substrate S while horizontally moving the substrate S horizontally as well as horizontally moving the substrate S, The inspection speed of the substrate S can be greatly improved.

The first stage 200 and the second stage 300 can stably support both ends of the substrate S in the process of transferring the substrate S from the first stage 200 to the second stage 300 The position of the substrate S can be improved and the efficiency of the inspection can be greatly improved.

For example, in the inspection apparatus according to the embodiment of the present invention, inspection of the substrate of the flat panel display device has been described as an example. However, any inspection method for surface defects such as a cover glass for a display device, will be.

It will be understood by those skilled in the art that the present invention may be embodied in other specific forms without departing from the spirit or essential characteristics thereof. It is therefore to be understood that the above-described embodiments are illustrative in all aspects and not restrictive. The scope of the present invention is defined by the appended claims rather than the detailed description and all changes or modifications derived from the meaning and scope of the claims and their equivalents are to be construed as being included within the scope of the present invention do.

100: substrate inspection apparatus 200: first stage
210: first base 212: slide member
214: guide groove 220: first variable member
222: inclined surface 224: insertion groove
226: seat part 230: first fixing member
232: Support portion 234:
250: rail 300: second stage
310: second base 312: slide member
314: guide groove 320: second deformable member
322: inclined surface 324: insertion groove
326: seat part 330: second fixing member
332: Support portion 334:
400: camera 500: first detection sensor
510: second sensing sensor 520: third sensing sensor

Claims (6)

A first stage capable of horizontally moving the loaded substrate in an aligned state and capable of horizontally moving itself;
A first stage capable of horizontally moving the substrate transferred continuously from the first stage and horizontally moving the substrate horizontally;
And a camera disposed between the first stage and the second stage for imaging the horizontally moved substrate. The method according to claim 1,
Wherein the first stage and the second stage comprise:
Respectively;
And a fixing member and a deformable member disposed on the base in a state of being spaced apart from each other by a predetermined distance. 3. The method of claim 2,
A slide member is formed on the base,
Wherein the slide member is slid along the rail so that the first stage and the second stage are moved in the horizontal direction. 3. The method of claim 2,
The variable-
Wherein the gap is adjusted by advancing or retracting from the base toward the fixing member. 5. The method of claim 4,
An insertion groove is formed in one side of the deformable member facing the fixing member,
Wherein the upper surface forming the insertion groove has an inclined surface, and the lower surface has a horizontal surface, and the entrance side width of the opening end is wider. The method according to any one of claims 1 to 5,
Wherein the camera is a line scan camera.
KR1020140125173A 2014-09-19 2014-09-19 Apparatus for inspection of substrate KR102022471B1 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
KR1020140125173A KR102022471B1 (en) 2014-09-19 2014-09-19 Apparatus for inspection of substrate
PCT/KR2014/010945 WO2016043379A1 (en) 2014-09-19 2014-11-14 Substrate inspection device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020140125173A KR102022471B1 (en) 2014-09-19 2014-09-19 Apparatus for inspection of substrate

Publications (2)

Publication Number Publication Date
KR20160034090A true KR20160034090A (en) 2016-03-29
KR102022471B1 KR102022471B1 (en) 2019-09-18

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KR102284046B1 (en) 2020-03-23 2021-08-02 주식회사 나노프로텍 Bad inspection system of substrates using image tracking

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KR20070070736A (en) * 2005-12-29 2007-07-04 주식회사 탑 엔지니어링 Apparatus for transferring substrate using hydroplaning
JP2008263044A (en) * 2007-04-12 2008-10-30 Ckd Corp Substrate transfer apparatus
JP2011149701A (en) 2010-01-19 2011-08-04 Shonai Create Kogyo:Kk X-ray inspection apparatus using line sensor camera
KR20120035790A (en) * 2010-10-06 2012-04-16 엘아이지에이디피 주식회사 Apparatus for inspecting substrate
KR101479633B1 (en) * 2013-07-22 2015-01-07 바이옵트로 주식회사 Clamping apparatus

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JP3928373B2 (en) * 2001-06-12 2007-06-13 株式会社日立製作所 Sample stage
KR101225884B1 (en) * 2003-04-11 2013-01-28 가부시키가이샤 니콘 Apparatus and method for maintaining immersion fluid in the gap under the projection lens during wafer exchange in an immersion lithography machine
JP4426276B2 (en) * 2003-10-06 2010-03-03 住友重機械工業株式会社 Conveying device, coating system, and inspection system
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Publication number Priority date Publication date Assignee Title
KR20070070736A (en) * 2005-12-29 2007-07-04 주식회사 탑 엔지니어링 Apparatus for transferring substrate using hydroplaning
KR20060080561A (en) 2006-05-11 2006-07-10 (주)와이티에스 Laser marking system with inspecting id position and the inspecting method therethrough
JP2008263044A (en) * 2007-04-12 2008-10-30 Ckd Corp Substrate transfer apparatus
JP2011149701A (en) 2010-01-19 2011-08-04 Shonai Create Kogyo:Kk X-ray inspection apparatus using line sensor camera
KR20120035790A (en) * 2010-10-06 2012-04-16 엘아이지에이디피 주식회사 Apparatus for inspecting substrate
KR101479633B1 (en) * 2013-07-22 2015-01-07 바이옵트로 주식회사 Clamping apparatus

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WO2016043379A1 (en) 2016-03-24

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