KR20140138768A - 보수 시스템 및 기판 처리 장치 - Google Patents

보수 시스템 및 기판 처리 장치 Download PDF

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Publication number
KR20140138768A
KR20140138768A KR20147026644A KR20147026644A KR20140138768A KR 20140138768 A KR20140138768 A KR 20140138768A KR 20147026644 A KR20147026644 A KR 20147026644A KR 20147026644 A KR20147026644 A KR 20147026644A KR 20140138768 A KR20140138768 A KR 20140138768A
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KR
South Korea
Prior art keywords
substrate processing
processing apparatus
living body
sensor
unit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
KR20147026644A
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English (en)
Korean (ko)
Inventor
츠토무 히로키
Original Assignee
도쿄엘렉트론가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 도쿄엘렉트론가부시키가이샤 filed Critical 도쿄엘렉트론가부시키가이샤
Publication of KR20140138768A publication Critical patent/KR20140138768A/ko
Withdrawn legal-status Critical Current

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    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B9/00—Safety arrangements
    • G05B9/02—Safety arrangements electric
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J19/00—Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
    • B25J19/0066—Means or methods for maintaining or repairing manipulators
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Program-control systems
    • G05B19/02—Program-control systems electric
    • G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0451—Apparatus for manufacturing or treating in a plurality of work-stations
    • H10P72/0464—Apparatus for manufacturing or treating in a plurality of work-stations characterised by the construction of the transfer chamber
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/06—Apparatus for monitoring, sorting, marking, testing or measuring
    • H10P72/0606—Position monitoring, e.g. misposition detection or presence detection
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/10—Plc systems
    • G05B2219/14—Plc safety
    • G05B2219/14007—Plc as standalone for safety control of machine

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  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • Robotics (AREA)
  • Quality & Reliability (AREA)
  • Manufacturing & Machinery (AREA)
  • General Engineering & Computer Science (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Testing And Monitoring For Control Systems (AREA)
  • Safety Devices In Control Systems (AREA)
  • Emergency Alarm Devices (AREA)
KR20147026644A 2012-03-27 2013-03-22 보수 시스템 및 기판 처리 장치 Withdrawn KR20140138768A (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2012071743A JP2013206962A (ja) 2012-03-27 2012-03-27 保守システム及び基板処理装置
JPJP-P-2012-071743 2012-03-27
PCT/JP2013/058375 WO2013146611A1 (ja) 2012-03-27 2013-03-22 保守システム及び基板処理装置

Publications (1)

Publication Number Publication Date
KR20140138768A true KR20140138768A (ko) 2014-12-04

Family

ID=49259864

Family Applications (1)

Application Number Title Priority Date Filing Date
KR20147026644A Withdrawn KR20140138768A (ko) 2012-03-27 2013-03-22 보수 시스템 및 기판 처리 장치

Country Status (5)

Country Link
US (1) US20150012124A1 (https=)
JP (1) JP2013206962A (https=)
KR (1) KR20140138768A (https=)
TW (1) TW201401334A (https=)
WO (1) WO2013146611A1 (https=)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20190125050A (ko) * 2018-04-27 2019-11-06 주식회사 선익시스템 진공챔버용 비상 스위치 장치와 이를 포함하는 증착장치
KR20190129418A (ko) * 2018-05-11 2019-11-20 주식회사 선익시스템 비상 탈출이 가능한 진공챔버 및 이를 포함하는 증착장치
KR20210009856A (ko) * 2019-07-18 2021-01-27 세메스 주식회사 물류 저장 시스템 및 그 제어 방법
KR102378366B1 (ko) * 2020-10-13 2022-03-25 주식회사 새한산업 안전펜스설비

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6026362B2 (ja) * 2013-07-09 2016-11-16 東京エレクトロン株式会社 基板処理システム、基板処理システムの制御方法、及び記憶媒体
US9918180B2 (en) * 2014-04-28 2018-03-13 Johnson Controls Technology Company Systems and methods for detecting and using occupant location in a building management system
JP6865079B2 (ja) * 2017-03-23 2021-04-28 東京エレクトロン株式会社 基板処理装置及び基板処理方法
JP6625597B2 (ja) * 2017-11-13 2019-12-25 平田機工株式会社 搬送チャンバ
CN111372735A (zh) * 2017-11-17 2020-07-03 三菱电机株式会社 3维空间监视装置、3维空间监视方法及3维空间监视程序
JP7388896B2 (ja) * 2019-12-04 2023-11-29 株式会社Ｓｃｒｅｅｎホールディングス 基板処理装置
CN114162450B (zh) 2020-09-11 2023-05-23 长鑫存储技术有限公司 曝光机台的门板密闭监测系统、方法、装置、介质和设备
CN118241174B (zh) * 2024-05-27 2024-08-06 上海米蜂激光科技有限公司 一种真空镀膜机安全控制方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4101166B2 (ja) * 2003-12-11 2008-06-18 大日本スクリーン製造株式会社 基板処理装置
JP5415832B2 (ja) * 2009-05-29 2014-02-12 株式会社竹中工務店 入退管理システム
JP5531003B2 (ja) * 2009-10-05 2014-06-25 株式会社日立国際電気 基板処理装置、基板処理装置のメンテナンス方法および半導体装置の製造方法

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20190125050A (ko) * 2018-04-27 2019-11-06 주식회사 선익시스템 진공챔버용 비상 스위치 장치와 이를 포함하는 증착장치
KR20190129418A (ko) * 2018-05-11 2019-11-20 주식회사 선익시스템 비상 탈출이 가능한 진공챔버 및 이를 포함하는 증착장치
KR20210009856A (ko) * 2019-07-18 2021-01-27 세메스 주식회사 물류 저장 시스템 및 그 제어 방법
KR102378366B1 (ko) * 2020-10-13 2022-03-25 주식회사 새한산업 안전펜스설비

Also Published As

Publication number Publication date
US20150012124A1 (en) 2015-01-08
JP2013206962A (ja) 2013-10-07
WO2013146611A1 (ja) 2013-10-03
TW201401334A (zh) 2014-01-01

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PA0105 International application

St.27 status event code: A-0-1-A10-A15-nap-PA0105

PG1501 Laying open of application

St.27 status event code: A-1-1-Q10-Q12-nap-PG1501

PC1203 Withdrawal of no request for examination

St.27 status event code: N-1-6-B10-B12-nap-PC1203

WITN Application deemed withdrawn, e.g. because no request for examination was filed or no examination fee was paid
P22-X000 Classification modified

St.27 status event code: A-2-2-P10-P22-nap-X000