TW201401334A - 維修系統與基板處理裝置 - Google Patents

維修系統與基板處理裝置 Download PDF

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Publication number
TW201401334A
TW201401334A TW102110589A TW102110589A TW201401334A TW 201401334 A TW201401334 A TW 201401334A TW 102110589 A TW102110589 A TW 102110589A TW 102110589 A TW102110589 A TW 102110589A TW 201401334 A TW201401334 A TW 201401334A
Authority
TW
Taiwan
Prior art keywords
living body
substrate processing
monitoring target
unit
processing apparatus
Prior art date
Application number
TW102110589A
Other languages
English (en)
Chinese (zh)
Inventor
廣木勤
Original Assignee
東京威力科創股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 東京威力科創股份有限公司 filed Critical 東京威力科創股份有限公司
Publication of TW201401334A publication Critical patent/TW201401334A/zh

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B9/00—Safety arrangements
    • G05B9/02—Safety arrangements electric
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J19/00—Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
    • B25J19/0066—Means or methods for maintaining or repairing manipulators
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Program-control systems
    • G05B19/02—Program-control systems electric
    • G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0451—Apparatus for manufacturing or treating in a plurality of work-stations
    • H10P72/0464—Apparatus for manufacturing or treating in a plurality of work-stations characterised by the construction of the transfer chamber
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/06—Apparatus for monitoring, sorting, marking, testing or measuring
    • H10P72/0606—Position monitoring, e.g. misposition detection or presence detection
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/10—Plc systems
    • G05B2219/14—Plc safety
    • G05B2219/14007—Plc as standalone for safety control of machine

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Quality & Reliability (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Safety Devices In Control Systems (AREA)
  • Testing And Monitoring For Control Systems (AREA)
  • Emergency Alarm Devices (AREA)
TW102110589A 2012-03-27 2013-03-26 維修系統與基板處理裝置 TW201401334A (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012071743A JP2013206962A (ja) 2012-03-27 2012-03-27 保守システム及び基板処理装置

Publications (1)

Publication Number Publication Date
TW201401334A true TW201401334A (zh) 2014-01-01

Family

ID=49259864

Family Applications (1)

Application Number Title Priority Date Filing Date
TW102110589A TW201401334A (zh) 2012-03-27 2013-03-26 維修系統與基板處理裝置

Country Status (5)

Country Link
US (1) US20150012124A1 (https=)
JP (1) JP2013206962A (https=)
KR (1) KR20140138768A (https=)
TW (1) TW201401334A (https=)
WO (1) WO2013146611A1 (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111372735A (zh) * 2017-11-17 2020-07-03 三菱电机株式会社 3维空间监视装置、3维空间监视方法及3维空间监视程序

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6026362B2 (ja) * 2013-07-09 2016-11-16 東京エレクトロン株式会社 基板処理システム、基板処理システムの制御方法、及び記憶媒体
US9918180B2 (en) * 2014-04-28 2018-03-13 Johnson Controls Technology Company Systems and methods for detecting and using occupant location in a building management system
JP6865079B2 (ja) * 2017-03-23 2021-04-28 東京エレクトロン株式会社 基板処理装置及び基板処理方法
JP6625597B2 (ja) * 2017-11-13 2019-12-25 平田機工株式会社 搬送チャンバ
KR102045826B1 (ko) * 2018-04-27 2019-11-18 주식회사 선익시스템 진공챔버용 비상 스위치 장치와 이를 포함하는 증착장치
KR102150450B1 (ko) * 2018-05-11 2020-09-01 주식회사 선익시스템 비상 탈출이 가능한 진공챔버 및 이를 포함하는 증착장치
KR102259282B1 (ko) * 2019-07-18 2021-06-01 세메스 주식회사 물류 저장 시스템 및 그 제어 방법
JP7388896B2 (ja) * 2019-12-04 2023-11-29 株式会社Ｓｃｒｅｅｎホールディングス 基板処理装置
CN114162450B (zh) 2020-09-11 2023-05-23 长鑫存储技术有限公司 曝光机台的门板密闭监测系统、方法、装置、介质和设备
KR102378366B1 (ko) * 2020-10-13 2022-03-25 주식회사 새한산업 안전펜스설비
CN118241174B (zh) * 2024-05-27 2024-08-06 上海米蜂激光科技有限公司 一种真空镀膜机安全控制方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4101166B2 (ja) * 2003-12-11 2008-06-18 大日本スクリーン製造株式会社 基板処理装置
JP5415832B2 (ja) * 2009-05-29 2014-02-12 株式会社竹中工務店 入退管理システム
JP5531003B2 (ja) * 2009-10-05 2014-06-25 株式会社日立国際電気 基板処理装置、基板処理装置のメンテナンス方法および半導体装置の製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111372735A (zh) * 2017-11-17 2020-07-03 三菱电机株式会社 3维空间监视装置、3维空间监视方法及3维空间监视程序

Also Published As

Publication number Publication date
JP2013206962A (ja) 2013-10-07
WO2013146611A1 (ja) 2013-10-03
KR20140138768A (ko) 2014-12-04
US20150012124A1 (en) 2015-01-08

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