KR20140010073A - 판상체의 연마 방법 - Google Patents
판상체의 연마 방법 Download PDFInfo
- Publication number
- KR20140010073A KR20140010073A KR1020137024240A KR20137024240A KR20140010073A KR 20140010073 A KR20140010073 A KR 20140010073A KR 1020137024240 A KR1020137024240 A KR 1020137024240A KR 20137024240 A KR20137024240 A KR 20137024240A KR 20140010073 A KR20140010073 A KR 20140010073A
- Authority
- KR
- South Korea
- Prior art keywords
- plate
- polishing
- shaped
- grinding
- holding
- Prior art date
Links
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
- B24B37/07—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool
- B24B37/10—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for single side lapping
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/11—Lapping tools
- B24B37/20—Lapping pads for working plane surfaces
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/11—Lapping tools
- B24B37/20—Lapping pads for working plane surfaces
- B24B37/26—Lapping pads for working plane surfaces characterised by the shape of the lapping pad surface, e.g. grooved
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2201/00—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00
- G02F2201/48—Flattening arrangements
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Manufacturing & Machinery (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Grinding Of Cylindrical And Plane Surfaces (AREA)
- Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JPJP-P-2011-056732 | 2011-03-15 | ||
JP2011056732 | 2011-03-15 | ||
PCT/JP2012/056308 WO2012124663A1 (fr) | 2011-03-15 | 2012-03-12 | Procédé de polissage d'un corps en forme de plaque |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020187016539A Division KR20180069925A (ko) | 2011-03-15 | 2012-03-12 | 판상체의 연마 방법 |
Publications (1)
Publication Number | Publication Date |
---|---|
KR20140010073A true KR20140010073A (ko) | 2014-01-23 |
Family
ID=46830732
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020187016539A KR20180069925A (ko) | 2011-03-15 | 2012-03-12 | 판상체의 연마 방법 |
KR1020137024240A KR20140010073A (ko) | 2011-03-15 | 2012-03-12 | 판상체의 연마 방법 |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020187016539A KR20180069925A (ko) | 2011-03-15 | 2012-03-12 | 판상체의 연마 방법 |
Country Status (5)
Country | Link |
---|---|
JP (1) | JPWO2012124663A1 (fr) |
KR (2) | KR20180069925A (fr) |
CN (3) | CN103429383B (fr) |
TW (1) | TW201247362A (fr) |
WO (1) | WO2012124663A1 (fr) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR102027814B1 (ko) * | 2018-05-23 | 2019-10-02 | 주식회사 앤아이윈 | 디스플레이용 대면적 글라스의 cmp 장치의 상정반 |
KR20220066027A (ko) * | 2016-09-30 | 2022-05-23 | 가부시키가이샤 에바라 세이사꾸쇼 | 연마 장치 및 연마 방법 |
US11648636B2 (en) | 2016-12-22 | 2023-05-16 | Breton Spa | Machine and method for grinding and/or polishing slabs of stone material, such as natural or agglomerated stone, ceramic and glass |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101612928B1 (ko) * | 2013-01-04 | 2016-04-15 | 주식회사 엘지화학 | 연마용 백패드에 유리판을 마운팅하는 장치 및 방법 |
JP7217202B2 (ja) * | 2019-05-31 | 2023-02-02 | 株式会社荏原製作所 | 温度調整装置および研磨装置 |
CN110707670B (zh) * | 2019-10-24 | 2020-12-01 | 南方电网科学研究院有限责任公司 | 一种变电站小电阻接地装置的控制方法 |
CN111300240B (zh) * | 2020-02-22 | 2021-02-19 | 深圳市盛鸿运科技有限公司 | 一种钢板表面处理设备及钢板表面处理工艺 |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5094037A (en) * | 1989-10-03 | 1992-03-10 | Speedfam Company, Ltd. | Edge polisher |
JPH10291147A (ja) * | 1997-04-21 | 1998-11-04 | Nippon Electric Glass Co Ltd | 板ガラスの研磨方法及び装置 |
GB2378683B (en) * | 2000-05-01 | 2003-12-03 | Honda Motor Co Ltd | Side panel assembly line |
JP2004034216A (ja) * | 2002-07-02 | 2004-02-05 | Tamagawa Machinery Co Ltd | 研磨機および研磨方法 |
JP4207153B2 (ja) * | 2002-07-31 | 2009-01-14 | 旭硝子株式会社 | 基板の研磨方法及びその装置 |
EP1559507B1 (fr) * | 2002-10-11 | 2009-01-07 | Bando Kiko Co., Ltd | Dispositif d'usinage de vitres |
JP5009101B2 (ja) * | 2006-10-06 | 2012-08-22 | 株式会社荏原製作所 | 基板研磨装置 |
JP5028354B2 (ja) * | 2008-07-31 | 2012-09-19 | 信越半導体株式会社 | ウェーハの研磨方法 |
JP4654275B2 (ja) * | 2008-07-31 | 2011-03-16 | 信越半導体株式会社 | 両面研磨装置 |
JP5408790B2 (ja) * | 2009-03-06 | 2014-02-05 | エルジー・ケム・リミテッド | フロートガラス研磨システム |
JP5408788B2 (ja) * | 2009-03-06 | 2014-02-05 | エルジー・ケム・リミテッド | フロートガラス研磨システム |
-
2012
- 2012-03-12 CN CN201280013296.XA patent/CN103429383B/zh active Active
- 2012-03-12 KR KR1020187016539A patent/KR20180069925A/ko active Search and Examination
- 2012-03-12 CN CN201610211050.3A patent/CN105798767B/zh active Active
- 2012-03-12 WO PCT/JP2012/056308 patent/WO2012124663A1/fr active Application Filing
- 2012-03-12 CN CN201610211042.9A patent/CN105856061B/zh active Active
- 2012-03-12 KR KR1020137024240A patent/KR20140010073A/ko not_active Application Discontinuation
- 2012-03-12 JP JP2013504723A patent/JPWO2012124663A1/ja not_active Withdrawn
- 2012-03-15 TW TW101108932A patent/TW201247362A/zh unknown
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20220066027A (ko) * | 2016-09-30 | 2022-05-23 | 가부시키가이샤 에바라 세이사꾸쇼 | 연마 장치 및 연마 방법 |
US11648636B2 (en) | 2016-12-22 | 2023-05-16 | Breton Spa | Machine and method for grinding and/or polishing slabs of stone material, such as natural or agglomerated stone, ceramic and glass |
KR102027814B1 (ko) * | 2018-05-23 | 2019-10-02 | 주식회사 앤아이윈 | 디스플레이용 대면적 글라스의 cmp 장치의 상정반 |
Also Published As
Publication number | Publication date |
---|---|
KR20180069925A (ko) | 2018-06-25 |
CN105856061B (zh) | 2019-06-11 |
WO2012124663A1 (fr) | 2012-09-20 |
JPWO2012124663A1 (ja) | 2014-07-24 |
CN103429383A (zh) | 2013-12-04 |
TW201247362A (en) | 2012-12-01 |
CN103429383B (zh) | 2016-05-11 |
CN105798767A (zh) | 2016-07-27 |
CN105856061A (zh) | 2016-08-17 |
CN105798767B (zh) | 2018-01-30 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
KR20140010073A (ko) | 판상체의 연마 방법 | |
JP4744250B2 (ja) | 角形状基板の両面研磨装置および両面研磨方法 | |
KR101490458B1 (ko) | 모바일 기기의 곡면 윈도우 글라스 내경 및 평면 연마기 | |
CN102284910B (zh) | 研磨垫的修整方法和修整装置 | |
JP2010064196A (ja) | 基板研磨装置および基板研磨方法 | |
JP2004122351A (ja) | 基板の研磨方法及びその装置 | |
KR101490462B1 (ko) | 모바일 기기의 곡면 윈도우 글라스 외경 연마기 | |
US20100248597A1 (en) | Equipment and method for cleaning polishing cloth | |
US11370080B2 (en) | Polishing head for holding substrate and substrate processing apparatus | |
KR20160078403A (ko) | 화학 기계적 평탄화 후의 기판 버프 사전 세정을 위한 시스템, 방법 및 장치 | |
JP2009016759A (ja) | 半導体ウェーハ端面研磨装置およびこれに用いる研磨ヘッド | |
JP4751115B2 (ja) | 角形状基板の両面研削装置および両面研削方法 | |
WO2012077427A1 (fr) | Broyeur | |
KR100926025B1 (ko) | 직사각형 기판의 양면 연마 장치 및 양면 연마 방법 | |
TW201302381A (zh) | 板狀體之研磨裝置 | |
JP5348531B2 (ja) | 研磨装置 | |
WO2013118578A1 (fr) | Tampon de polissage et appareil de polissage | |
KR102143751B1 (ko) | 글라스 폴리싱 장치 | |
JP2001148361A (ja) | 研磨装置、研磨パッド部材交換装置および方法 | |
JP2002355759A (ja) | ウエハ研磨装置 | |
KR100624662B1 (ko) | 박형기판용 밸트샌딩기용 샌딩유니트 | |
KR100427858B1 (ko) | 글래스 패널 연마장치 | |
JP2022134856A (ja) | チャックテーブルの洗浄方法 | |
JPH0717733A (ja) | ガラス板の加工機械 | |
JP2007007769A (ja) | 研磨機 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A201 | Request for examination | ||
E902 | Notification of reason for refusal | ||
E601 | Decision to refuse application |