KR20130088839A - 터치 패널에서 사용하기 위한 투명 보디를 제조하는 방법 및 시스템 - Google Patents

터치 패널에서 사용하기 위한 투명 보디를 제조하는 방법 및 시스템 Download PDF

Info

Publication number
KR20130088839A
KR20130088839A KR1020137002270A KR20137002270A KR20130088839A KR 20130088839 A KR20130088839 A KR 20130088839A KR 1020137002270 A KR1020137002270 A KR 1020137002270A KR 20137002270 A KR20137002270 A KR 20137002270A KR 20130088839 A KR20130088839 A KR 20130088839A
Authority
KR
South Korea
Prior art keywords
film
dielectric film
transparent
dielectric
deposition
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
KR1020137002270A
Other languages
English (en)
Korean (ko)
Inventor
한스-게오르그 로츠
Original Assignee
어플라이드 머티어리얼스, 인코포레이티드
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 어플라이드 머티어리얼스, 인코포레이티드 filed Critical 어플라이드 머티어리얼스, 인코포레이티드
Publication of KR20130088839A publication Critical patent/KR20130088839A/ko
Ceased legal-status Critical Current

Links

Images

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08—Oxides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0641—Nitrides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0676—Oxynitrides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0694—Halides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3464—Sputtering using more than one target
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
    • C23C14/352—Sputtering by application of a magnetic field, e.g. magnetron sputtering using more than one target
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/16—Optical coatings produced by application to, or surface treatment of, optical elements having an anti-static effect, e.g. electrically conducting coatings
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/13338—Input devices, e.g. touch panels
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • G06F3/044—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means
    • G06F3/0443—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means using a single layer of sensing electrodes
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • G06F3/044—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means
    • G06F3/0446—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means using a grid-like structure of electrodes in at least two directions, e.g. using row and column electrodes
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/11—Anti-reflection coatings
    • G02B1/113—Anti-reflection coatings using inorganic layer materials only
    • G02B1/115—Multilayers
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/11—Anti-reflection coatings
    • G02B1/113—Anti-reflection coatings using inorganic layer materials only
    • G02B1/115—Multilayers
    • G02B1/116—Multilayers including electrically conducting layers
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24942—Structurally defined web or sheet [e.g., overall dimension, etc.] including components having same physical characteristic in differing degree

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Engineering & Computer Science (AREA)
  • Theoretical Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Organic Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Materials Engineering (AREA)
  • Optics & Photonics (AREA)
  • Human Computer Interaction (AREA)
  • Inorganic Chemistry (AREA)
  • Nonlinear Science (AREA)
  • Mathematical Physics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Laminated Bodies (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
KR1020137002270A 2010-06-29 2011-06-15 터치 패널에서 사용하기 위한 투명 보디를 제조하는 방법 및 시스템 Ceased KR20130088839A (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP10167753A EP2402481A1 (en) 2010-06-29 2010-06-29 Method and system for manufacturing a transparent body for use in a touch panel
EP10167753.2 2010-06-29
PCT/EP2011/059944 WO2012000793A1 (en) 2010-06-29 2011-06-15 Method and system for manufacturing a transparent body for use in a touch panel

Related Child Applications (1)

Application Number Title Priority Date Filing Date
KR1020187012935A Division KR20180052777A (ko) 2010-06-29 2011-06-15 터치 패널에서 사용하기 위한 투명 보디를 제조하는 방법 및 시스템

Publications (1)

Publication Number Publication Date
KR20130088839A true KR20130088839A (ko) 2013-08-08

Family

ID=42351998

Family Applications (2)

Application Number Title Priority Date Filing Date
KR1020137002270A Ceased KR20130088839A (ko) 2010-06-29 2011-06-15 터치 패널에서 사용하기 위한 투명 보디를 제조하는 방법 및 시스템
KR1020187012935A Ceased KR20180052777A (ko) 2010-06-29 2011-06-15 터치 패널에서 사용하기 위한 투명 보디를 제조하는 방법 및 시스템

Family Applications After (1)

Application Number Title Priority Date Filing Date
KR1020187012935A Ceased KR20180052777A (ko) 2010-06-29 2011-06-15 터치 패널에서 사용하기 위한 투명 보디를 제조하는 방법 및 시스템

Country Status (7)

Country Link
US (1) US20110318553A1 (enExample)
EP (1) EP2402481A1 (enExample)
JP (1) JP5978206B2 (enExample)
KR (2) KR20130088839A (enExample)
CN (1) CN102985589B (enExample)
TW (1) TWI541369B (enExample)
WO (1) WO2012000793A1 (enExample)

Families Citing this family (32)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2680111A4 (en) * 2011-11-11 2014-02-26 Kaneka Corp SUBSTRATE HAVING TRANSPARENT ELECTRODE, PRODUCTION METHOD THEREFOR, AND TOUCH SCREEN
CN104094200B (zh) * 2012-02-15 2017-02-22 刘兴商 形成有白色涂层的触摸屏面板及触摸屏面板的白色涂膜真空涂覆方法
US10281616B2 (en) 2012-03-30 2019-05-07 Applied Materials, Inc. Transparent body for use in a touch panel having structured transparent conductive film directly between first and second transparent layer stacks, method of making, and apparatus for making
EP2831707B1 (en) * 2012-03-30 2018-03-14 Applied Materials, Inc. Transparent body for use in a touch screen panel manufacturing method and system
JP2013214185A (ja) * 2012-04-02 2013-10-17 Toppan Printing Co Ltd タッチパネルセンサー及びその製造方法
US9696751B2 (en) * 2012-05-17 2017-07-04 Kaneka Corporation Substrate with transparent electrode, method for manufacturing same, and touch panel
JP6122253B2 (ja) * 2012-05-22 2017-04-26 株式会社オプトラン 静電容量型タッチパネル基板及びその製造方法並びに製造装置
TWI472977B (zh) * 2012-09-13 2015-02-11 Rtr Tech Technology Co Ltd 觸控面板及其製造方法
US9557871B2 (en) 2015-04-08 2017-01-31 Guardian Industries Corp. Transparent conductive coating for capacitive touch panel or the like
US10222921B2 (en) 2012-11-27 2019-03-05 Guardian Glass, LLC Transparent conductive coating for capacitive touch panel with silver having increased resistivity
KR20140071058A (ko) * 2012-12-03 2014-06-11 코닝정밀소재 주식회사 롤투롤 스퍼터링 장치
KR20140084686A (ko) * 2012-12-27 2014-07-07 코닝정밀소재 주식회사 투명 도전성 기재, 이의 제조방법, 및 이를 구비한 터치 패널
US10175829B2 (en) * 2013-03-15 2019-01-08 Applied Materials, Inc. Transparent body with single substrate and anti-reflection and/or anti-fingerprint coating at an opposite side of the substrate from a structured transparent conductive film, and method of manufacturing thereof
EP2957996A4 (en) * 2013-03-22 2016-11-02 Lg Chemical Ltd LADDER RAIL LAMINATE AND ELECTRONIC DEVICE THEREWITH
JP6505370B2 (ja) * 2013-03-26 2019-04-24 荒川化学工業株式会社 積層体およびインデックスマッチング層形成用組成物
CN103218102B (zh) * 2013-05-10 2015-11-18 洛阳康耀电子有限公司 一种电容屏用双面镀膜玻璃的加工方法及双面镀膜玻璃
CN103395247B (zh) * 2013-07-30 2015-05-13 深圳欧菲光科技股份有限公司 盖板玻璃及其制备方法
AT13879U1 (de) * 2013-10-04 2014-10-15 Plansee Se Berührungssensoranordnung
EP2863291A1 (en) * 2013-10-18 2015-04-22 Applied Materials, Inc. Transparent body for a touch panel manufacturing method and system for manufacturing a transparent body for a touch screen panel
KR102088769B1 (ko) * 2014-04-02 2020-04-16 한국전자통신연구원 터치 스크린 패널 제작 방법 및 터치 스크린 패널
CN104176947B (zh) * 2014-08-07 2016-08-24 宜昌南玻显示器件有限公司 Ito导电玻璃及其制备方法
WO2016034197A1 (en) * 2014-09-01 2016-03-10 Applied Materials, Inc. Assembly and method for deposition of material on a substrate
CN104240799A (zh) * 2014-09-28 2014-12-24 张家港康得新光电材料有限公司 Ito透明导电膜
CN104391609B (zh) * 2014-12-17 2017-11-10 合肥鑫晟光电科技有限公司 具有单层ito的触控传感器及其制造方法和触控屏
US10133108B2 (en) 2015-04-08 2018-11-20 Guardian Glass, LLC Vending machines with large area transparent touch electrode technology, and/or associated methods
JP6866353B2 (ja) * 2016-04-22 2021-04-28 ダウ・東レ株式会社 高誘電性フィルム、その用途および製造方法
CN109213347B (zh) * 2017-06-29 2021-08-13 南京瀚宇彩欣科技有限责任公司 可挠式面板以及可挠式面板的制造方法
DE202018006949U1 (de) 2017-09-21 2024-09-09 Applied Materials, Inc. Anodenelektrodenstruktur
WO2020025102A1 (en) * 2018-07-30 2020-02-06 Applied Materials, Inc. Method of coating a flexible substrate with a stack of layers, layer stack, and deposition apparatus for coating a flexible substrate with a stack of layers
US11631840B2 (en) 2019-04-26 2023-04-18 Applied Materials, Inc. Surface protection of lithium metal anode
US20210126247A1 (en) * 2019-10-28 2021-04-29 Applied Materials, Inc. Dielectric coated lithium metal anode
CN112526650A (zh) * 2020-12-09 2021-03-19 浙江日久新材料科技有限公司 一种低阻抗型ito导电膜

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08240800A (ja) * 1995-03-03 1996-09-17 Asahi Glass Co Ltd 液晶ディスプレイ用樹脂基板
DE69633631T2 (de) * 1995-08-23 2005-10-20 Asahi Glass Ceramics Co., Ltd. Target, verfahren zu dessen herstellung und herstellung hochrefraktiver filme
US6488824B1 (en) * 1998-11-06 2002-12-03 Raycom Technologies, Inc. Sputtering apparatus and process for high rate coatings
EP1132926B1 (en) * 1999-08-31 2011-03-23 Teijin Limited Transparent conductive multilayer body and touch panel comprising the same
US6896981B2 (en) * 2001-07-24 2005-05-24 Bridgestone Corporation Transparent conductive film and touch panel
US8307549B2 (en) * 2001-11-20 2012-11-13 Touchsensor Technologies, Llc Method of making an electrical circuit
CN1809799A (zh) * 2003-04-22 2006-07-26 触摸传感器技术有限责任公司 具有多个导电层的基板以及制造和使用该基板的方法
JP2005066937A (ja) * 2003-08-21 2005-03-17 Ｙｋｋ Ａｐ株式会社 機能性プラスチック部材
DE102004006131B4 (de) 2004-02-07 2005-12-15 Applied Films Gmbh & Co. Kg Bandbeschichtungsanlage mit einer Vakuumkammer und einer Beschichtungswalze
ATE437975T1 (de) 2004-04-13 2009-08-15 Applied Materials Gmbh & Co Kg Führungsanordnung mit mindestens einer führungswalze für die führung von bändern in bandbehandlungsanlagen
DE502004002296D1 (de) * 2004-05-22 2007-01-25 Applied Materials Gmbh & Co Kg Beschichtungsanlage mit einer Messvorrichtung für die Messung von optischen Eigenschaften von beschichteten Substraten
JP4532316B2 (ja) * 2005-03-22 2010-08-25 日本板硝子株式会社 タッチパネル
WO2007003488A1 (en) * 2005-06-30 2007-01-11 Bekaert Advanced Coatings A module for coating both sides of a substrate in a single pass
JP4762062B2 (ja) * 2006-06-22 2011-08-31 出光興産株式会社 焼結体、膜及び有機エレクトロルミネッセンス素子
JP4667471B2 (ja) * 2007-01-18 2011-04-13 日東電工株式会社 透明導電性フィルム、その製造方法及びそれを備えたタッチパネル
JP5160329B2 (ja) * 2008-07-24 2013-03-13 日東電工株式会社 透明導電性フィルム及びタッチパネル
JP2010069675A (ja) * 2008-09-17 2010-04-02 Toppan Printing Co Ltd 機能性フィルム、その製造方法、積層体および電子デバイス
JP4364938B1 (ja) * 2009-03-27 2009-11-18 尾池工業株式会社 透明導電積層体及びタッチパネル

Also Published As

Publication number Publication date
TW201226593A (en) 2012-07-01
CN102985589B (zh) 2016-08-03
TWI541369B (zh) 2016-07-11
KR20180052777A (ko) 2018-05-18
US20110318553A1 (en) 2011-12-29
JP5978206B2 (ja) 2016-08-24
JP2013532231A (ja) 2013-08-15
EP2402481A1 (en) 2012-01-04
WO2012000793A1 (en) 2012-01-05
CN102985589A (zh) 2013-03-20

Similar Documents

Publication Publication Date Title
KR20130088839A (ko) 터치 패널에서 사용하기 위한 투명 보디를 제조하는 방법 및 시스템
JP6096195B2 (ja) タッチパネルで使用される透明体を製造するための方法およびシステム
TWI606373B (zh) 用於觸控面板之透明體及製造用於觸控螢幕面板之透明體的方法與系統
KR101890790B1 (ko) 터치 스크린 패널에서 이용하기 위한 투명 바디 및 그 제조 방법 및 시스템
JP6377735B2 (ja) タッチパネル用透明体の製作方法及びタッチスクリーンパネル用透明体を製作するシステム
CN118792623A (zh) 多层膜的成膜方法

Legal Events

Date Code Title Description
PA0105 International application

Patent event date: 20130128

Patent event code: PA01051R01D

Comment text: International Patent Application

AMND Amendment
AMND Amendment
PG1501 Laying open of application
PA0201 Request for examination

Patent event code: PA02012R01D

Patent event date: 20160615

Comment text: Request for Examination of Application

E902 Notification of reason for refusal
PE0902 Notice of grounds for rejection

Comment text: Notification of reason for refusal

Patent event date: 20171013

Patent event code: PE09021S01D

AMND Amendment
E601 Decision to refuse application
PE0601 Decision on rejection of patent

Patent event date: 20180108

Comment text: Decision to Refuse Application

Patent event code: PE06012S01D

Patent event date: 20171013

Comment text: Notification of reason for refusal

Patent event code: PE06011S01I

AMND Amendment
PX0901 Re-examination

Patent event code: PX09011S01I

Patent event date: 20180108

Comment text: Decision to Refuse Application

Patent event code: PX09012R01I

Patent event date: 20171212

Comment text: Amendment to Specification, etc.

Patent event code: PX09012R01I

Patent event date: 20130403

Comment text: Amendment to Specification, etc.

Patent event code: PX09012R01I

Patent event date: 20130130

Comment text: Amendment to Specification, etc.

PX0601 Decision of rejection after re-examination

Comment text: Decision to Refuse Application

Patent event code: PX06014S01D

Patent event date: 20180405

Comment text: Amendment to Specification, etc.

Patent event code: PX06012R01I

Patent event date: 20180312

Comment text: Decision to Refuse Application

Patent event code: PX06011S01I

Patent event date: 20180108

Comment text: Amendment to Specification, etc.

Patent event code: PX06012R01I

Patent event date: 20171212

Comment text: Notification of reason for refusal

Patent event code: PX06013S01I

Patent event date: 20171013

Comment text: Amendment to Specification, etc.

Patent event code: PX06012R01I

Patent event date: 20130403

Comment text: Amendment to Specification, etc.

Patent event code: PX06012R01I

Patent event date: 20130130

A107 Divisional application of patent
PA0104 Divisional application for international application

Comment text: Divisional Application for International Patent

Patent event code: PA01041R01D

Patent event date: 20180504