KR20120081570A - Electronic component mounting apparatus - Google Patents

Abstract

PURPOSE: An electronic component mounting device is provided to accurately detect a load applied to an absorption nozzle and a nozzle shaft by detecting the load around a nozzle shaft. CONSTITUTION: A main body unit(60) is fixed to a head(106). A lifting element(14) is liftably supported by the main body. A lifting device(20) gives a lifting operation to the lifting element. A nozzle shaft(30) maintains an absorption nozzle on the lower side thereof. A rotating device(50) gives a rotation operation to the nozzle shaft through a spline nut(55).

Description

Electronic component mounting device {ELECTRONIC COMPONENT MOUNTING APPARATUS}

The present invention relates to an electronic component mounting apparatus for controlling the pressing force by the suction nozzle.

Conventional electronic component mounting apparatus includes a collet (nozzle) for adsorbing electronic components, a rotating mechanism for rotating the collet, a case incorporating the rotating mechanism, a guide for supporting the case so as to be movable, and a case up and down. A moving ball screw mechanism is mounted on the head, and the rotating mechanism and the collet are supported in the case so as to be movable in the case, and at the same time, the load cell has a protrusion extending horizontally from the rotating mechanism. A pressing force is detected (for example, refer patent document 1).

In such an electronic component mounting apparatus, the collet which is in the state of adsorption of the electronic component is lowered by the ball screw mechanism, and when the distal end portion of the collet contacts the lower substrate through the electronic component, the collet and the rotation mechanism are raised relative to the case. The load cell is pressed through, and the pressing force against the substrate at the collet tip is detected. When a predetermined predetermined pressing force is detected, the electronic component is released from the collet and the lowering is stopped to raise the collet. As a result, the electronic component is mounted on the substrate at a predetermined pressing force.

Further, another electronic component mounting apparatus includes an adsorption nozzle for adsorbing an electronic component, a nozzle holder for allowing the suction nozzle to be held while allowing the movement of the suction nozzle, and a support frame for rotatably supporting the nozzle holder around the adsorption nozzle. Rotational movement of the suction nozzle and the nozzle holder through the main body frame supporting the support frame to be movable, the ball screw mechanism for moving the support frame to the movable frame, and a spline shaft fixed to the upper end of the nozzle holder. It is provided with a rotating mechanism to be provided, a load cell which is installed on the nozzle holder and detects the pressing force above the suction nozzle, and a voice coil motor which is mounted on the support frame and which moves the suction nozzle through the spline shaft ( See, for example, Patent Document 2).

The electronic component mounting apparatus lowers the adsorption nozzle in the electronic component adsorption state by the ball screw mechanism, and when the tip of the adsorption nozzle contacts the lower substrate through the electronic component, the adsorption nozzle is raised to pressurize the load cell. The pressing force against the substrate at the tip of the suction nozzle is detected. Then, the voice coil motor is controlled to maintain a predetermined predetermined pressing force for a predetermined time, after which the electronic component is released from the suction nozzle and the suction nozzle is raised by the ball screw mechanism. As a result, the electronic component is mounted on the substrate at a predetermined pressing force.

Japanese Patent Laid-Open No. 2001-127081 Japanese Patent Laid-Open No. 2004-158743

However, in the electronic component mounting apparatus of Patent Document 1, since the collet is lowered integrally with the rotation mechanism, the response is reduced by increasing the total weight, which makes it difficult to control the pressurization of the electronic component to the substrate. There was.

In addition, the electronic component mounting apparatus of Patent Literature 2 separates the rotation mechanism from the suction nozzle by using a spline shaft, and lifts only the suction nozzle and the nozzle holder during pressurization control, thereby reducing operating weight and controlling high response. However, since the load detector is arranged at the upper end of the suction nozzle and the rotation mechanism is disposed above the suction nozzle concentrically, the suction nozzle could not be drawn out to the upper end of the apparatus. . For this reason, the hose for connection to a suction source to the suction nozzle extended laterally, and the rotation range of the suction nozzle was limited like patent document 1.

In addition, since the wiring of the load cell provided in the nozzle holder is also drawn out of the nozzle holder, such wiring also becomes a cause of limiting the rotation range of the suction nozzle.

It is an object of the present invention to improve the responsiveness of the suction nozzle at the same time and to allow the suction nozzle to be rotated more widely.

The invention according to claim 1 is an electronic component mounting apparatus for mounting an electronic component on the substrate by absorbing the electronic component by an adsorption nozzle provided in a head movable between the supply portion of the electronic component and the holding portion of the substrate. A main body fixed to the main body, an elevating body supported to be elevated relative to the main body, an elevating mechanism for giving an elevating operation to the elevating body, and the suction nozzle at the lower end thereof, ), A hollow nozzle shaft connected to the shaft, a rotation mechanism for forming a spline groove in the nozzle shaft and giving a rotational motion to the nozzle shaft through a spline nut, and a load upwardly received by the suction nozzle. The load detection unit to detect and the lifting body is lowered until the load detection unit detects a predetermined predetermined load, An electronic component mounting apparatus including an operation control unit for controlling a component to suck a component, wherein the elevating mechanism and the rotating mechanism are supported by the main body, and an upper end of the nozzle shaft is provided in a state protruding from an upper portion of the main body. The load detection unit is supported on the lifting body or the main body.

The invention according to claim 2 has a configuration similar to that of the invention according to claim 1, and the load detecting unit is provided on the lifting body and is rotatably held in a state where the nozzle shaft is penetrated. And a distortion detecting element for detecting a distortion of the connection portion and a connecting portion for connecting the heavy common supporting portion to the lifting body.

The invention according to claim 3 has the same configuration as that of the invention according to claim 1, and has a drive source for the lifting mechanism and a transfer member for transferring the lifting operation from the drive source to the lifting body, and the load detection unit includes: It characterized in that it has a distortion detecting element for detecting the distortion of the drive source or the portion supporting the transfer member.

The invention according to claim 4 has the same configuration as the invention according to claim 1, and the lifting body is divided into a lifting operation input part from the lifting mechanism and a support part of the nozzle shaft, and the support part and the An elastic body is provided for imparting a force to pull the mutually opposing portions of the lifting operation input portions closer to each other, and the support portion is disposed above the lifting operation input portion, and the load detection portion is provided with the support portion and the lifting operation. It is characterized in that it has a pressure detecting element for detecting the pressing force between the portions facing each other of the input unit.

The invention according to claim 5 has the same configuration as the invention according to claim 1, and the lifting body is divided into a lifting operation input part from the lifting mechanism and a support part of the nozzle shaft, and the load detection part is And a pressure detecting element for detecting the pressing force between the portions facing each other, wherein the lifting operation input portion is the upper side and the support portion is the lower side.

In the invention according to claim 1, since both the lifting mechanism and the rotating mechanism are supported by the main body, the weight can be reduced compared to the case where the lifting mechanism is mounted on the lifting body, and the load of the electronic component due to the lowering of the suction nozzle is added. It becomes easy to control, and it becomes possible to apply a load with high precision. Therefore, the responsiveness of the suction nozzle at the same time is improved. In addition, since the nozzle shaft is hollow and the upper end portion is provided in a state protruding from the upper portion of the main body portion, the upper end portion of the nozzle shaft can be connected to the intake source, and there is no need to extend the connecting tube or the like to the suction nozzle. Since the rotation of is not restricted, it is possible to enlarge the rotation angle.

In addition, since the load detection unit is supported on the lifting body or the main body portion, the load detection unit does not rotate when the suction nozzle is rotated, so that the rotation of the suction nozzle is not limited by the wiring of the load detection unit, and the like, even in this aspect. It is possible to enlarge the possible angles. In addition, the movable contact structure for transferring the wiring current of the load detection unit can be made unnecessary.

According to the invention of claim 2, since the load detection unit detects the distortion of the connecting portion connected to the heavy shared paper portion through which the nozzle shaft penetrates, the load detection unit is not hindered even when the nozzle shaft is arranged to penetrate up and down. Since the load is detected around the nozzle shaft, the load applied to the suction nozzle and the nozzle shaft can be detected more accurately.

In the invention according to claim 3, since the load detection unit detects distortion of the driving source of the elevating mechanism or the support portion of the transmission member, even if the load detection unit can be arranged away from the nozzle shaft, the nozzle shaft is arranged so as to penetrate the main body up and down. Since the load detection unit does not interfere and the load detection unit is installed in the main body, the wiring does not rotate or move up and down with the nozzle shaft, so that the wiring does not interfere with the lifting operation of the lifting body. The wiring structure can be eliminated.

According to the invention of claim 4, since the pressure detecting element is disposed between the lifting operation input unit and the support unit, and the support unit is disposed above the lifting operation input unit, the support unit rises when it comes in contact with the lower side by lowering the suction nozzle. Since the space | interval of the lifting operation input part and the support part opens, the load at the time of contact becomes large too much, and it can effectively avoid that a pressure detection element is destroyed.

According to the invention of claim 5, since the load detection unit detects the pressing force of the mutually opposing portions of the lifting operation input unit and the support unit, load detection is enabled by inserting a pressure detection element between the lifting operation input unit and the support unit, and the structure is simplified. And the number of components can be reduced.

1 is a perspective view of an electronic component mounting apparatus according to a first embodiment.
Fig. 2 is a side cross-sectional view of the nozzle driving device of the suction nozzle in the first embodiment.
3 is a cross-sectional view along the centerline of the load detection unit.
Fig. 4A is a plan view showing only a part of the load cell in the load detection unit, and Fig. 4B is a perspective view.
5 is a block diagram showing a control system of the electronic component mounting apparatus.
Fig. 6 is a flowchart showing driving control of the suction nozzle when the electronic component is mounted on the substrate.
7 is a timing chart showing driving control of an adsorption nozzle when an electronic component is mounted on a substrate.
8 is a partial cross-sectional view of another example of the nozzle driving apparatus according to the first embodiment.
9 is a partial sectional view of still another example of the nozzle driving apparatus according to the first embodiment.
Fig. 10 is a side sectional view of the nozzle drive device according to the second embodiment.
11 is a plan view of a load detection unit.
12 is a side sectional view of another example of the nozzle drive device according to the third embodiment.
It is a side sectional view of the nozzle drive apparatus which concerns on 3rd Embodiment.
14 is an enlarged cross-sectional view of the load detection unit, (A) shows a state in which the connecting portions are in close proximity, and (B) shows a state in which the connecting portions are spaced apart.
FIG. 15 is a diagram showing the relationship between the detection amount of the load detection unit and the adsorption nozzle lowering amount in the third embodiment. FIG.
16 is an enlarged cross-sectional view of another example of the load detection unit in the third embodiment.
17 is an enlarged cross-sectional view of still another example of the load detection unit in the third embodiment.
18 is a side sectional view of a nozzle drive device according to a fourth embodiment.
19 is a perspective view of a load detection unit in a fourth embodiment.
20 is a side sectional view of another example of the nozzle drive device according to the fourth embodiment.

(First Embodiment: Overall Configuration)

EMBODIMENT OF THE INVENTION The 1st Embodiment of this invention is described, referring drawings. 1 is a perspective view of the electronic component mounting apparatus 100. Hereinafter, as shown, two directions orthogonal to each other in the horizontal plane are referred to as the X axis direction, which is the substrate transport direction, and the Y axis direction, which is the direction orthogonal to the substrate transport direction, respectively, and the vertical direction perpendicular to these is called the Z axis direction. Let's do it.

The electronic component mounting apparatus 100 mounts various electronic components on a board | substrate. As shown in FIG. 1, the some electronic component feeder 101 and the some electronic component feeder 101 which supply the mounted electronic component are shown in FIG. 2 parts supply part which consists of feeder bank 102 which hold | maintains side by side, the board | substrate conveying means 103 which conveys a board | substrate to an X-axis direction, and the board | substrate conveyance path provided by the said board | substrate conveying means 103 provided in the middle. A substrate holding unit 104 for carrying out electronic component mounting work on the substrate, a nozzle driving device 10 for holding a plurality of (three in this example) suction nozzles 12 in a liftable manner, and each nozzle The head movement which drives the drive device 10 to hold an electronic component, and the head 106 drives and conveys the head 106 to arbitrary positions in the working area containing two sets of the component supply part and the board | substrate holding part 104 is carried out. Ｘ-Y gantry 107 as a mechanism; The electronic component C mounted on the 106 and adsorbed on the substrate recognition camera 108 as a plurality of imaging means for imaging the substrate, and adsorbed to the suction nozzle 12 vertically upward in the vicinity of the feeder bank 102. ) Is provided with a component recognition camera 120 for capturing the image from below, and an operation control means 70 for controlling the operation of each of the above configurations shown in FIG. 5.

The operation control means 70 of the electronic component mounting apparatus 100 sucks the electronic component to each suction nozzle 12 from the electronic component delivery part 101a of the electronic component feeder 101. In addition, the operation control means 70 performs image processing from the captured image data obtained by capturing the electronic components adsorbed to the respective suction nozzles 12 with the component recognition camera 120 to position and position the electronic components with respect to the nozzle tip. The mounting angle of the electronic component is performed by obtaining the angle centered on the center line of the electronic component, correcting the positioning of the suction nozzle 12 with respect to the substrate, and rotating the suction nozzle 12 to correct the angle of the electronic component.

(Nozzle driving device of adsorption nozzle)

2 is a side cross-sectional view of the nozzle driving device 10 of the suction nozzle 12. As shown in the figure, the nozzle drive device 10 of the suction nozzle 12 sucks the main body frame 60 as the main body part fixedly supported by the head 106 and the electronic component C at its distal end. The nozzle holder 31 holding the suction nozzle 12, the nozzle shaft 30 holding the suction nozzle 12 at the lower end through the nozzle holder 31, and the body frame 60 so as to be movable. A movable bracket 14 as a supported lifting body, a lifting mechanism 20 for driving the movable bracket 14 in the vertical direction, a load detecting unit 40 for detecting a load applied to the suction nozzle 12, and Z The rotating mechanism 50 which adjusts the rotation angle of the suction nozzle 12 around the center line along an axial direction, and the operation control means 70 which control the operation | movement of each said structure are provided. Hereinafter, each part will be described in detail.

(Body frame)

The main body frame 60 includes a back plate 61 fixed to the head 106, first and second extended support parts 62 and 63 extending along the Y-axis direction from the top of the back plate 61. It is provided with the slide guide 64 which is provided in the lower part of the back plate 61, and supports the movable bracket 14 so that sliding along the Z-axis direction is possible.

The back plate 61 is a flat plate along the XZ plane, one surface of which is fixed to the head 106, and the first and second extension supports 62 and 63 and the linear guide 64 are installed on the other surface. It is.

The 1st extension part 62 is plate shape along the X-Y plane, and supports the lifting mechanism 20. As shown in FIG.

The 2nd extension part 63 is plate shape along the X-Y plane, and supports the rotation mechanism 50. As shown in FIG. Moreover, the said 2nd extension part 63 is located just under the 1st extension part 62. As shown in FIG.

(Movable bracket)

The movable bracket 14 is supported by the linear guide 64 provided in the lower part of the back plate 61 so that it can slide up and down via the movable block 14a. The movable bracket 14 is driven in the vertical direction by the elevating mechanism 20 provided in the first extension part 62.

(Elevation mechanism)

The elevating mechanism 20 includes a rotary drive Z-axis motor 21 (elevating drive source) provided in a state in which the first extended support portion 62 of the main body frame 60 is directed downward, and the amount of rotation angle thereof. Connected to the encoder 22 (see FIG. 5) and the output shaft of the Z-axis motor 21 through the coupling 26 to be rotatably supported in the main body frame 60 in the vertical direction. A ball screw shaft 23 as a transmission member and a ball screw nut 24 to which shanghai copper is applied by the ball screw shaft 23 are provided.

The ball screw shaft 23 is concentrically connected to the output shaft of the Z-axis motor 21, is lowered in a state along the Z-axis direction, and at the same time through the bearing 25 by the second extension support 63. It is rotatably supported.

The ball screw nut 24 is fixed to the movable bracket 14, and moves the movable bracket 14 in accordance with the rotation angle by the rotational drive of the Z-axis motor 21, and at the same time, positioning in the Z-axis direction. Is done. In addition, the encoder 22, the detection signal is output to the motion control means 70, the motion control means 70 recognizes the current position of the movable bracket 14 based on this Z-axis motor 21 It is possible to control the operation of.

(Nozzle shaft)

The suction nozzle 12 is a tubular body with a tapered end, and the suction nozzle 12 is held in a state in which the tip thereof faces the electronic component C.

The nozzle shaft 30 has a nozzle holder 31 at its lower end and holds the suction nozzle 12 through the nozzle holder 31. The nozzle shaft 30 is hollow throughout its entire length, and a joint 32 of a hose for connecting to a suction pump, an ejector or the like serving as a suction source is provided at an upper end of the nozzle shaft 30. . That is, when the suction by the suction source is made from the hose joint 32 of the upper end, the nozzle shaft 30 enables the suction by the suction nozzle 12 provided at the lower end.

In addition, the nozzle shaft 30 has a spline groove formed on an outer circumferential surface of the upper portion thereof, and the upper portion of the nozzle shaft 30 is rotated by the first and second extension supports 62 and 63. It fits in the state which penetrated the spline nut 55 mentioned later possibly supported.

In addition, the lower part of the nozzle shaft 30 is supported rotatably about the Z-axis with respect to the movable bracket 14 by the load detection part 40 attached to the movable bracket 14. For reference, the supporting state of the nozzle shaft 30 by the load detection unit 40 will be described later in detail.

By this structure, although the nozzle shaft 30 moves together with the movable bracket 14, the upper part is supported by the spline nut 55, and the moving part is not inhibited.

For reference, the nozzle shaft 30 is actually a spline shaft whose upper half is a hollow inside with spline grooves formed on its outer circumferential surface, and its lower half is a tubular body with a hollow inside where no spline grooves are formed. It is integrally connected by the coupling 35.

In addition, even when the movable bracket 14 descends to the lowest position in the movable range, the upper end of the nozzle shaft 30 is attached so as to protrude upward from the upper end surface of the main frame 60. Thereby, the hose attached to the joint 32 of the upper end part of the nozzle shaft 30 always maintains the state located above the main body frame 60, and even if the nozzle shaft 30 rotates, it will rotate accordingly. The possibility that the hose interferes with other surrounding configurations is sufficiently reduced, eliminating the need to limit the rotation angle range of the suction nozzle 12.

(Meeting mechanism)

The rotation mechanism 50 includes a θ-axis motor 51 (rotary drive source) installed in the second extension support portion 63 in a state of facing upward in the output shaft, and an origin sensor 52 for detecting the home position of the rotation angle. (Refer FIG. 5) and the spline nut 55 connected through the timing belt 54 from the pulley 53 provided in the output shaft of the (theta) -axis motor 51. As shown in FIG.

As described above, the spline nut 55 is rotatably supported around the Z axis between the first extended support 62 and the second extended support 63, and when the nozzle shaft 30 is inserted, The spline grooves of are fitted together, which causes them to rotate simultaneously about the Z axis.

In addition, the spline nut 55 has its outer circumferential surface as a pulley of the timing belt 54, and is provided with a rotational motion by driving the θ-axis motor 51, and also transmits rotation to the nozzle shaft 30.

That is, when the rotation of the nozzle shaft 30 is performed by the rotation mechanism 50, the rotation of the nozzle shaft 30 is permitted by the load detection unit 40, and when the movement of the nozzle shaft 30 is performed by the lifting mechanism 20, the spline nut 55. Shanghai East is allowed. Thereby, the nozzle shaft 30 is supported by the movable bracket 14, and it can also rotate while moving.

Further, the home sensor 52 outputs the home position of the output shaft of the θ-axis motor 51 to the motion control means 70 at the time of home search. The rotational drive can be controlled so as to generate a rotation of a predetermined angle in the. As a result, the rotary drive of the suction nozzle 12 is carried out from the output shaft of the θ-axis motor 51 via the spline nut 55 and the nozzle shaft 30, and the electronic component held at the front end portion of the suction nozzle 12 ( It is possible to adjust the direction of C).

(Load detection part)

Next, the support state of the nozzle shaft 30 in the load detection part 40 and the movable bracket 14 is demonstrated.

3 is a cross-sectional view along the centerline of the load detection unit 40, FIG. 4A is a plan view showing only a part of the load cell in the load detection unit 40, and FIG. 4B is a perspective view. The load detection unit 40 is a movable bracket between the cylindrical heavy paper portion 41 and the heavy common paper portion 41 which are rotatably held by an internal bearing 47 while the nozzle shaft 30 is penetrated. A load cell 44 composed of a connecting arm portion 42 as a plurality of connecting portions connected to the 14 and a distortion gauge 43 as a distortion detecting element for detecting distortion of the connecting arm portion 42; The stopper 46 provided through the spacer 45 is provided in the upper side of ().

On the other hand, in the nozzle shaft 30, the flange-shaped end part 33 provided in the substantially intermediate position in the longitudinal direction contacts the inner ring of the bearing 47 from below, and the cylindrical collar 34 The coupling 35 fastens the inner ring of the bearing 47 from above. Accordingly, the nozzle shaft 30 forms a state in which the bearing 47 is inserted up and down, and is allowed to rotate about the Z axis with respect to the load cell 44 while being kept fixed in the Z axis direction. have.

For reference, the nozzle shaft 30 is supported on the movable bracket 14 by the stroke rotary bearing 36 under the load cell 44, and rotates around the Z axis with respect to the movable bracket 14. And linear motion along the Z-axis direction is allowed.

Two connecting arm portions 42 of the load cell 44 are provided in the heavy common branch portion 41, and each connecting arm portion 42 is centered on the heavy common branch portion 41 (a) of FIG. One each extends in the up-down direction in the plane. And each connecting arm part 42 is being fixed to the upper surface of the movable bracket 14 with the spacer 45 and the stopper 46 by the fixing screw (not shown) at the extended end part.

And each connection arm part 42 is formed integrally with the heavy common paper part 41, and each said connection arm part 42 is bent, and the heavy shared paper part 41 with respect to the movable bracket 14 is carried out. Makes it possible to swing in the Z-axis direction (up-down direction).

In addition, each of the connecting arm portions 42 is provided with two distortion gauges 43 in an adhesive state on the upper surface of the intermediate position of the extension portion. When oscillating along the direction, the detection control unit 70 outputs a detection output corresponding to the operation amount.

The stopper 46 is formed of a material having a higher rigidity than that of the connecting arm portion 42 and is provided at a distance corresponding to the thickness of the spacer 45 with respect to the upper end surface of the heavy common paper portion 41.

Then, when the suction nozzle 12 and the nozzle shaft 30 are pushed upward, the upper end surface of the heavy common paper sheet 41 contacts the stopper 46 to regulate further upward movement.

That is, in the electronic component mounting apparatus 100, the maximum pressure load applied by the electronic component C to the substrate by the suction nozzle 12 is set to 50 N, and the suction nozzle 12 at the maximum pressure load 50 N is used. The thickness of the spacer 45 is set to be equal to the amount of upward movement generated in the heavy paper support portion 41 when pressed downward.

As a result, the stopper 46 is restricted so that only the amount of warpage according to the maximum pressure load is generated in each of the connecting arm portions 42, so that an excessively large load is not generated in each distortion gauge. In addition, the stopper 46 restricts excessive warping of each connecting arm portion 42, thereby preventing breakage.

(Control system of electronic component mounting device)

5 is a block diagram showing a control system of the electronic component mounting apparatus 100. As shown in FIG. 5, the electronic component mounting apparatus 100 includes operation control means 70 for controlling the operation of each part of the electronic component mounting apparatus 100. The operation control means 70 includes: Z-axis motor 121 and Y-axis motor 122 of the X-Y gantry 107 for moving the head 106 in the X-axis direction and the Y-axis direction, and the Z-axis motor for moving the suction nozzle 12 up and down. Reference numeral 21 and the θ-axis motor 51 for rotating the suction nozzle 12 are connected via the drive circuits 121a, 122a, 21a, and 51a, respectively.

In addition, the operation control means 70 includes the encoder 22 of the Z-axis motor 21, the origin sensor 52 of the θ-axis motor 51, and the load detection unit 40 through the interface 71. The distortion gauge 43 and the image recognition device 123 for performing position recognition and the like of the substrate and the electronic component from the captured images of the substrate recognition camera 108 and the component recognition camera 120 are connected.

For reference, a plurality of Z-axis motors 21, θ-axis motors, encoders 22, origin sensors 52, and distortion gauges 43 are actually mounted, but only one is shown in FIG. .

The operation control means 70 includes a ROM 72 in which a control program for performing various controls described later with respect to the nozzle drive device 10 of the suction nozzle 12 is stored, and a CPU for centrally controlling various configurations according to the control program. 73, a RAM 74 serving as a work area for storing processing data of the CPU 73, and a data memory 75 for storing processing data and setting data.

(Drive control method of adsorption nozzle)

Next, a driving control method of the suction nozzle 12 executed by the CPU 73 when the electronic component C is mounted on the substrate will be described with reference to the flowchart of FIG. 6 and the timing chart of FIG. 7. . This is a process performed by the CPU 73 executing a predetermined program stored in the ROM 72.

For reference, in this case, the suction nozzle 12 sucks the electronic component C, and the direction of the electronic component C sucked by the θ-axis motor 51 at the distal end of the suction nozzle 12 is already adjusted. It is assumed that the head 106 has been conveyed to the mounting position of the board | substrate. This control is drive control for one adsorption nozzle 12. When a plurality of adsorption are performed, the following control is executed in order for each adsorption nozzle 12 in order.

First, the CPU 73 drives the Z-axis motor 21, and the upper end portion of the suction nozzle 12 is moved from the height Z4 (1 in FIG. 7) at the time of conveyance of the head 106 (1 in FIG. 7). It descends at high speed to the height Z3 near the mounting surface '(step S1: ② in Fig. 7). For reference, the height Z3 is set to a height close to the mounting surface Z0 but the lower end of the suction nozzle 12 does not touch the electronic component C. In addition, the detection load by the distortion gauge 43 in this state is set to L0.

Thereafter, waiting for the operation of the suction nozzle 12 to be stabilized (3 in Fig. 7), the gain of the Z-axis motor 21 is switched to the low speed load control mode to start the low speed falling (step S3: ④ of FIG. 7.

Then, the CPU 73 monitors whether or not the detection load by the distortion gauge 43 rises from L0 as the electronic component C sucked by the suction nozzle 12 reaches the mounting surface (step S5). : ⑤) in FIG. 7.

Then, when it is detected that the electronic component C has reached the mounting surface (6 in Fig. 7, the height Z1 (height when the electronic component C contacts the mounting surface), the lowering is continued (step). S7), it is also monitored whether the detection load has reached the target load (distortion gauge output L1) (step S9).

When it is detected that the detection load has reached the target load (distortion gauge output L1), the Z-axis motor 21 is stopped, the movable bracket 14 is kept at that height, and the time measurement of the predetermined pressurization time is performed. (Step S11: 7 in FIG. 7 and 8 in FIG. 7).

When the elapse of the preset pressurization time T1 is detected (step S13: 9 in FIG. 7 and X in FIG. 7), the Z-axis motor 21 is driven to raise the suction nozzle 12 to the height Z2. (Step S15: Fig. 7B).

For reference, the height Z2 is located slightly above the mounting surface Z0 and lower than the height Z3, but may be the same height as Z3.

After the Z-axis motor 21 is paused, the gain of the Z-axis motor 21 is switched to the high speed normal mode, and the high speed is increased to the height Z4 (step S17: FIG. 7). End drive control.

(Effect in 1st Embodiment)

Since the elevating mechanism 20 and the rotating mechanism 50 are both supported by the main body frame 60, the electronic component mounting apparatus 100 mounts the rotating mechanism 50 to the movable bracket 14, and Alternatively, the weight of the structure for performing the lifting operation can be reduced, and the addition control of the load of the electronic component C by the lowering of the suction nozzle 12 becomes easy, and the load can be applied with high precision.

Moreover, since the nozzle shaft 30 was made hollow and the upper end part was provided in the state which protruded from the upper part of the main body frame 60, piping, such as a tube which connects with an intake source, is accompanied with the nozzle shaft 30. Even when the rotation is performed, it is easy to avoid interference with the surroundings, and the rotation angle of the suction nozzle 12 can be increased.

Furthermore, since the load detection unit 40 is provided in the movable bracket 14, the load detection unit 40 does not rotate at the time of the rotation of the suction nozzle 12, and the suction nozzle 12 is connected by the wiring of the distortion gauge 43 or the like. The rotation of is not limited, and in this respect, it is possible to expand the angle of rotation.

In addition, since the load detection part 40 has a distortion gauge 43 which detects the distortion of the connection arm part 42 connected to the heavy paper support part 41 which penetrated the nozzle shaft 30, the nozzle shaft 30 was carried out. Is extended to the upper portion of the main body frame 60, the load detection unit 40 is not obstructed, and since the load is detected around the nozzle shaft 30, the suction nozzle 12 and the nozzle shaft 30 It is possible to more accurately detect the load applied to the.

(Other example of 1st embodiment)

For reference, in the above-mentioned electronic component mounting apparatus 100, the case where the load detection part 40 is mounted on the upper part of the movable bracket 14 was illustrated, but the arrangement is not limited to this. For example, as shown in FIG. 8, the load detection part 40 may be provided in the lower part of the movable bracket 14. As shown in FIG. The load detector 40 has the same structure as the load detector 40 described above. In this case, the end portion 33 of the nozzle shaft 30 is formed near the lower end portion, thereby holding the bearing 47 of the load detection portion 40. In addition, the collar and coupling which hold the bearing 47 from upper direction are abbreviate | omitted.

In the electronic component mounting apparatus 100 described above, the nozzle shaft 30 is disposed near the head 106 and the lifting mechanism 20 is disposed far from the head 106, but the present invention is not limited thereto. As shown in FIG. 9, the nozzle shaft 30 may be disposed away from the head 106, and the lifting mechanism 20 may be disposed in the vicinity of the head 106 (in FIG. 9, the lifting mechanism 20). Only ball screw shaft 23 and ball screw nut 24). Similarly, the arrangement of the rotation mechanism 50 may be changed.

In addition, in the electronic component mounting apparatus 100, the movable shaft 14 supports the nozzle shaft 30 so as to be rotatable and swingable by the stroke rotary bearing 36. However, for example, the electronic component mounting apparatus 100 supports the load detecting unit 40. When the displacement in the Z-axis direction generated at the time of load addition is sufficiently small, instead of the stroke rotary bearing 36, the nozzle shaft 30 is supported by a normal ball bearing, and the inner ring and the outer ring are noisy. It is good also as a structure which allows displacement of the nozzle shaft 30 in the Z-axis direction.

(Second Embodiment)

The nozzle drive device 10A according to the second embodiment of the present invention will be described with reference to the drawings. Since the second embodiment is characterized by the nozzle driving apparatus 10A, and the rest of the configuration is the same as that of the electronic component mounting apparatus 100 described above, the nozzle driving apparatus 10A will mainly be described. In addition, the same configuration as the nozzle driving apparatus 10 described above uses the same reference numerals and redundant description will be omitted.

FIG. 10 is a side cross-sectional view of the nozzle driving device 10A, and FIG. 11 is a plan view of the load detection unit 40A.

The nozzle driving device 10A is different from the nozzle driving device 10 in that the load detection unit 40A is provided on the main frame 60 instead of the movable bracket 14A.

That is, in the second extended support portion 63 of the main body frame 60, the through holes 41A are formed substantially in the shape of a fan about four circumferences of the bearing 25, whereby the bearing 25 and its peripheral portion are formed. Four beam structures 42A supported from all sides are formed, and the load detection unit 40A is constituted by providing the distortion gauge 43A in the adhesive state on the upper and lower surfaces of the beam structures 42A, respectively.

Moreover, since the load detection part 40A is provided on the main body frame 60 side, the movable bracket 14A does not need to support the nozzle shaft 30 so as to be able to swing in the Z-axis direction, so that the stroke rotary bearing 36 The ball bearings are supported by ordinary ball bearings 36A and 36A, and no swing occurs in the Z-axis direction, but the structure is rotatably supported around the Z-axis.

With the above configuration, the nozzle driving device 10A lowers the adsorption nozzle 12 toward the substrate in a state where the electronic component C is attracted, and when the electronic component C reaches the substrate, the reaction force ( Due to the force, the circumference of the bearing 25 and the second extended support portion 63 through the nozzle shaft 30, the movable bracket 14A, the ball screw nut 24, and the ball screw shaft 23 is reduced. Is supported upward. As a result, distortion occurs in each of the beam structures 42A, and the pressure load on the substrate can be obtained by the detection of each distortion gauge 43A.

In addition, operation control with respect to the said nozzle drive apparatus 10A can be performed by the same process as the process based on the flowchart of FIG. 6 mentioned above, and the timing chart of FIG.

(Effect in 2nd Embodiment)

The nozzle driving device 10A has the same effect as the nozzle driving device 10 described above, and the load detection unit 40A detects the distortion of the support portion of the ball screw shaft 23 of the elevating mechanism 20. 40 A of load detection parts can be arrange | positioned away from the nozzle shaft 30, and when the nozzle shaft 30 is arrange | positioned so that the main body frame 60 may penetrate up and down, the load detection part 40A will interfere with the arrangement | positioning. It doesn't work.

In addition, since the load detection unit 40A is provided in the main frame 60, the load detection unit 40A does not rotate or move up and down, so that the wiring of each distortion gauge 43A of the load detection unit 40A is raised and lowered by the lifting body. It is possible to make the wiring structure corresponding to the lifting and lowering operation unnecessary, without obstructing the operation.

(Other example of 2nd embodiment)

In addition, although the case where the load detection part 40A is installed in the circumference | surroundings of the bearing 25 in the 2nd extended support part 63 was demonstrated in 10 A of above-mentioned nozzle drive apparatuses, the arrangement is not limited to this. For example, as shown in FIG. 12, you may provide 40 A of load detection parts in the position of the base side (back plate 61 side) in the 2nd extended support part 63 rather than the bearing 25. As shown in FIG.

For example, the through hole 41A is drilled and installed in the X-axis direction so that the thickness in the Z-axis direction becomes thinner for a portion of the root side of the second extended support portion 63 than the bearing 25, and the thickness is thinner. The beam structure part 42A may be formed, and the load detection part 40A may be comprised by providing the distortion gauge 43A in the adhesive state two places on the upper surface and the lower surface.

In addition, when the 2nd extended support part 63 does not support the ball screw shaft 23 but the reaction force at the time of pressurization is transmitted to the Z-axis motor 21, it is the position of S1 of FIG. You may form the load detection part 40A of the same structure. Or even if the load detection part 40A of the structure similar to FIG. 12 is formed in the position S2 of the fundamental side (back plate 61 side) in the 1st extended support part 62 rather than the Z-axis motor 21. FIG. do.

(Third Embodiment)

The nozzle drive apparatus 10B which is 3rd Embodiment of this invention is demonstrated, referring drawings. Since the third embodiment is characterized by the nozzle driving device 10B, and the rest of the configuration is the same as that of the electronic component mounting device 100 described above, the nozzle driving device 10B will be mainly described. In addition, the same configuration as the nozzle driving apparatus 10 described above uses the same reference numerals and redundant description will be omitted.

FIG. 13 is a side cross-sectional view of the nozzle driving device 10B, and FIG. 14 is an enlarged cross-sectional view of the load detection unit 40B.

The nozzle driving device 10B is configured by dividing the movable bracket 14B into the lifting operation input unit 141B from the lifting mechanism 20 and the supporting portion 142B of the nozzle shaft 30, and the supporting portion at the connecting portion thereof. 142B is disposed above the lifting operation input unit 141B, and a tension spring 143B is provided as an elastic body that pulls the mutually facing portions of the supporting unit 142B and the lifting operation input unit 141B closer to each other. And a load detection part 40B is provided between the parts facing each other.

In accordance with the above-described premise, the movable bracket 14B is divided into the lifting operation input unit 141B and the support portion 142B of the nozzle shaft 30, and the lifting operation input unit 141B has a ball of the lifting mechanism 20. The screw nut 24 is provided, and the support portion 142B is provided with the nozzle shaft 30 rotatably around the Z axis by the two ball bearings 36B and 36B.

In addition, as shown in FIG. 14, the connection part 144B, 145B of the elevating operation | movement input part 141B and the support part 142B is arrange | positioned to superpose | polymerize with respect to a Z-axis direction, and the opposing surface which mutually faces is formed. .

And the connection part 144B of the lifting operation input part 141B is arrange | positioned under the connection part 145B of the support part 142B.

In addition, each of the connecting portions 144B and 145B is provided with connecting pins 146B and 147B along the Z-axis direction extending toward each other, and each of the connecting portions 144B and 145B has an opposite connecting pin ( Thrust collars (148B, 149B) for inserting 147B, 146B are provided.

Accordingly, the connecting portion 144B of the lifting operation input portion 141B and the connecting portion 145B of the support portion 142B can be moved relative to each other along the Z-axis direction.

In addition, as described above, the connecting portion 144B of the elevating operation input portion 141B and the connecting portion 145B of the support portion 142B are connected by the tension spring 143B, so that the opposing surfaces are always close to each other. Is under tension.

And on the opposing surface of the support part 142B by the side of the connection part 145B, the load cell (pressure detection element) as the load detection part 40B which detects the contact pressure with the opposing surface by the side of the connection part 144k is provided, In a state where no external force is applied to the movable bracket 14B, the tension spring always receives a constant pressing force and detects it (FIG. 14A).

Here, when the maximum set load applied to the electronic component C by the suction nozzle 12 is 50 N, the tension spring 143B generates a pressurized load slightly larger than the maximum set load (for example, 60 N). do.

When the electronic component C is pressed against the substrate by the lowering of the suction nozzle 12, the connection portion 144B and the connection portion 145B act in a direction to be spaced apart from each other by resisting the tension spring 143B. As the pushing of the nozzle 12 progresses, as shown in FIG. 15, the detection output by the load detection part 40B will gradually decrease from 60N which is the load of the tension spring 143B. When the suction nozzle 12 is pushed in until the load exceeds the load of the tension spring 143B, the connecting portion 144B and the connecting portion 145B are spaced apart from each other as shown in FIG. Although it becomes impossible, since the tension spring 143B which has a tension load larger than the maximum set load is selected, such a situation does not arise at the time of normal electronic component mounting operation.

For reference, the operation control for the nozzle driving apparatus 10B can be executed by the same processing as that based on the flowchart of FIG. 6 and the timing chart of FIG. 7 described above.

(Effect in 3rd Embodiment)

The nozzle driving device 10B has the same effect as the nozzle driving device 10 described above, and the load detection unit 40B is disposed between the lifting operation input unit 141B and the support unit 142B, so that the suction nozzle 12 When the electronic component C comes into contact with the substrate due to the lowering of the support member, the support part 142B rises and the gap between the lifting operation input part 141B and the support part 142B increases, and the load at the time of contact becomes too large. It is possible to effectively avoid that the load detection unit 40B is destroyed.

(Other example of 3rd embodiment)

For reference, the connecting portions 144B and 145B of the elevating motion input portion 141B and the support portion 142B of the movable bracket 14B described above are connected to each other by an axis along the X-axis direction as shown in FIG. 16A. The hinge 150B may be rotatably connected to each other, and a tension spring 143B may be provided so that the opposite surfaces of each other attract each other. And you may equip the other opposing surface with the load detection part 40B in any one of the opposing surfaces which can contact / separate. In this case, as shown in Fig. 16B, even when the load detection unit 40B is pressed at the maximum set load so that the load detection unit 40B is not separated from the other opposite surface, the opposite surface of the load detection unit 40B is not separated. It is necessary to select the tension spring 143B of the unloaded load.

Further, as shown in FIG. 17A, the elevating motion input portion 141B of the movable bracket 14B and the connecting portions 144B, 145B of the support portion 142B are parallel to each other to form a four-section link mechanism. It is good also as a structure which connects by two link bodies 151B and 152B of the same length, and provides the tension spring 143B so that the opposing surfaces may mutually attract each other. And you may equip the other opposing surface with the load detection part 40B in any one of the opposing surfaces which can contact / separate. Also in this case, as shown in FIG. 17 (B), even when the load detection unit 40B is pressed at the maximum set load so that the load detection unit 40B is not separated from the other opposite surface, the opposite surface of the load detection unit 40B is far from the other side. It is necessary to select the tension spring 143B for the load that is not supported.

(Fourth Embodiment)

The nozzle drive device 10C according to the fourth embodiment of the present invention will be described with reference to the drawings. The fourth embodiment is characterized by the nozzle driving apparatus 10C, and the rest of the configuration is the same as that of the electronic component mounting apparatus 100 described above. Therefore, the nozzle driving apparatus 10C will be mainly described. In addition, the same configuration as the nozzle driving apparatus 10 described above uses the same reference numerals and redundant description will be omitted.

FIG. 18 is a side sectional view of the nozzle driving device 10C, and FIG. 19 is a plan view of the load detection unit 40C.

The nozzle drive device 10C divides the movable bracket 14C into a lifting operation input part 141C from the lifting mechanism 20 and the support part 142C of the nozzle shaft 30, and lifts the support part 142C. It is disposed below the operation input unit 141C, and the load detection unit 40B is provided between the portions of the support unit 142C and the lifting operation input unit 141C facing each other, and the lifting operation input unit 141C and the support unit are provided. 142C is connected by the load detection part 40C.

According to the premise, the movable bracket 14C is divided into a lifting operation input unit 141C and a support portion 142C of the nozzle shaft 30, and the lifting screw input unit 141C has a ball screw of the lifting mechanism 20. The nut 24 is provided, and the support portion 142C is provided with the nozzle shaft 30 rotatably around the Z axis by the two ball bearings 36C and 36C.

Further, the nozzle shaft 30 is simultaneously arranged through through holes formed concentrically in the support portion 142C and the lifting operation input portion 141C.

Further, the lower surface of the elevating operation input portion 141C and the upper surface of the support portion 142C face each other, and these opposing surfaces are attached so that the load detection portion 40C connects them.

The load detecting portion 40C forms a substantially rectangular parallelepiped standing distortion body 41C and a standing hole 41C in the standing distortion body by forming a through hole along the X-axis direction so that the upper and lower surfaces thereof are thin. It is a load cell which consists of the distortion gauge 43C provided two each symmetrically along the Y-axis direction in the part with thin thickness of an upper surface and a lower surface. In the standing distortion body 41C, an insertion hole 44C of the nozzle shaft 30 penetrating to the lower surface is formed in the central portion of the upper surface.

When such a load detection part 40C receives a load from the upper surface center part in the direction along the Z-axis direction, each distortion gauge 43C can detect a load by performing detection output according to a load.

And the upper surface center part of the standing distortion body 41C is provided in the fixed state on the lower surface of the lifting motion input part 141C, and the lower surface center part of the standing distortion body 41C is provided in the fixed state on the upper surface of the support part 142C, The lift operation input unit 141C and the support unit 142C are connected.

Accordingly, when the suction nozzle 12 descends while absorbing the electronic component C and pressurizes the substrate, the standing distortion body 41C is pressurized between the lift operation input unit 141C and the support unit 142C. Each distortion gauge 43C performs a detection output in accordance with the pressure load, and the pressure load by the electronic component C can be detected.

For reference, the operation control for the nozzle drive apparatus 10C can be executed by the same processing as the processing based on the flowchart of FIG. 6 and the timing chart of FIG. 7 described above.

(Effect in 4th Embodiment)

The nozzle driving device 10C has the same effect as the nozzle driving device 10 described above, and the pressing force between the portions of the load detection unit 40C facing each other between the lifting operation input unit 141C and the support unit 142C. Since it is possible to detect the load by sandwiching the standing distortion body 41C of the load detection unit 40C between the lifting operation input unit 141C and the support unit 142C, the structure can be simplified and the number of components can be reduced. It becomes possible.

Further, in the standing distortion body 41C, an insertion passage hole 44C is formed in the center portion of the XY plane, and the nozzle shaft 30 is inserted through the load detecting portion 40C. The lifting motion input portion 141C and the support portion are provided. Since it is arrange | positioned between 142C, the load applied to the adsorption nozzle 12 can be detected in the position immediately above, and the detection of higher precision is attained.

(Other example of 4th embodiment)

For reference, the above-described load detection unit 40C is provided in an arrangement in which the nozzle shaft 30 penetrates between the lifting operation input unit 141C and the support unit 142C, but is not limited thereto, as shown in FIG. 20. It is good also as an arrangement which avoided the nozzle shaft 30 between the lifting operation input part 141C and the support part 142C.

In this case, the insertion through hole 44C does not need to be formed in the standing distortion body 41C, and the attachment of the load detection unit 40C does not require positioning such that it is aligned with the centerline of the nozzle shaft 30. As a result, the structure can be simplified and the productivity can be improved.

10, 10A, 10B, 10C: nozzle drive device
12: adsorption nozzle
14, 14A, 14B, 14C: movable bracket (elevating body)
20: lifting mechanism
23: ball screw shaft (transfer member)
24: Ball screw nut
30: nozzle shaft
40, 40A, 40C: load detection unit
40B: Load detecting part (pressure detecting element)
41: the heavy common branch
41A: Through Hole
41C: Standing Dwarf
42: connecting arm part (connection part)
42A: Beam Structure
43, 43A: distortion gauge (distortion detection element)
43C: distortion gauge (pressure detection element)
44: load cell
50: rotating mechanism
55 spline nut
60: main body frame (main frame)
70: motion control means
100: electronic component mounting device
106: head
141B, 141C: lifting operation input unit
142B, 142C: Supporting part
143B: Spring (elastic material)
144B, 145B: Connection
C: Electronic parts

Claims (5)

An electronic component is sucked by the suction nozzle 12 provided in the movable head 106 between the supply portion 101-102 of the electronic component and the holding portion 104 of the substrate, and the electronic component is mounted on the substrate. Component mounting apparatus 100,
A main body 60 fixed to the head,
A lifting body 14 supported to be liftable with respect to the main body,
An elevating mechanism 20 for giving an elevating operation to the elevating body;
A hollow nozzle shaft 30 which maintains the suction nozzle at the lower end and whose upper end is connected to an intake source;
A rotation mechanism 50 which forms a spline groove in the nozzle shaft and simultaneously imparts a rotational motion to the nozzle shaft through a spline nut 55;
A load detector 40 for detecting a load upwardly received by the suction nozzle;
An electronic component mounting apparatus comprising an operation control unit 70 for lowering the lifting body until the load detection unit detects a predetermined predetermined load to control the suction of the electronic component from the supply unit.
The lifting mechanism and the rotation mechanism are supported by the main body portion,
The upper end of the nozzle shaft is provided in a state protruding from the upper portion of the main body,
And the load detection unit is supported by the lifting body or the main body unit. The method of claim 1,
The load detection unit,
A heavy common paper portion 41 installed on the lifting body and rotatably maintained in a state where the nozzle shaft is penetrated; An electronic part mounting apparatus comprising a distortion detecting element (43) for detecting. The method of claim 1,
It has a drive source 21 of the lifting mechanism and the transmission member 23 for transferring the lifting operation from the drive source to the lifting body,
And the load detecting unit has a distortion detecting element (43) for detecting distortion of a drive source of the lifting mechanism or a portion supporting the transfer member. The method of claim 1,
The elevating body is divided into an elevating operation input unit 141B from the elevating mechanism and a support unit 142B of the nozzle shaft 35, and at the same time a portion facing each other of the supporting unit and the elevating operation input unit is provided. An elastic body 143B is provided that gives a force to pull closer to each other,
The support portion is disposed above the lifting operation input portion,
The load detecting unit has a pressure detecting element (43C) for detecting the pressing force between the support portion and the portions of the lifting operation input portion facing each other. The method of claim 1,
The lifting body is divided into a lifting operation input part from the lifting mechanism and a support part of the nozzle shaft,
The load detection unit has an electronic component mounting, characterized in that it has a pressure detection element (43C) for detecting the mutual pressure of the parts facing each other, the lifting operation input portion is the upper side (141C) and the support portion is the lower side (142C). Device.

Images