JPH08330790A - Bare chip mounter - Google Patents

Bare chip mounter

Info

Publication number
JPH08330790A
JPH08330790A JP7132206A JP13220695A JPH08330790A JP H08330790 A JPH08330790 A JP H08330790A JP 7132206 A JP7132206 A JP 7132206A JP 13220695 A JP13220695 A JP 13220695A JP H08330790 A JPH08330790 A JP H08330790A
Authority
JP
Japan
Prior art keywords
bare chip
uniaxial
uniaxial table
pressure
suction nozzle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7132206A
Other languages
Japanese (ja)
Inventor
Katsumi Bouno
克己 防野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP7132206A priority Critical patent/JPH08330790A/en
Publication of JPH08330790A publication Critical patent/JPH08330790A/en
Pending legal-status Critical Current

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  • Supply And Installment Of Electrical Components (AREA)
  • Die Bonding (AREA)

Abstract

PURPOSE: To set a travel distance of a uniaxial table independent of a height difference between a bare chip and a board by a method wherein a table controller which controls a uniaxial table, which moves a suction nozzle in a vertical direction, comparing the detected pressure of a pressure detector with a reference pressure is provided. CONSTITUTION: This system comprises a first uniaxial table 6 which holds and guides a suction nozzle 2 in a vertical direction, a second uniaxial table 13 which holds and drives a bracket 7 in a vertical direction by a motor, and a table controller 14 which controls the motion of the uniaxial table 13 as connected to a pressure detecting section 12. A pressure outputted from a load cell 10 is detected by the pressure detecting suction 12 and compared with a prescribed reference pressure. The table controller 14 stops the uniaxial table 13 at the time when a pressure reaches the prescribed reference pressure.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明はベアチップマウンタ、特
に、ベアチップを加圧しながら印刷配線基板のプリント
パターン上に搭載するためのベアチップマウンタに関す
る。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a bare chip mounter, and more particularly to a bare chip mounter for mounting a bare chip on a print pattern of a printed wiring board while applying pressure.

【0002】[0002]

【従来の技術】図2は従来のベアチップマウンタの一例
を示す側面図である。本図の様な例は表面実装技術読本
(日刊工業新聞社)P187〜188に掲載されてお
り、モータの位置制御によってチップのマウントを行う
という一般的な従来例の一例である。ベアチップを加圧
しながら印刷配線基板(基板)のプリントパターン上に
搭載するための従来のベアチップマウンタは、図2に示
すような構成を有している。すなわち、上面に基板3を
搭載して水平面内に直角方向に移動させるXYテーブル
24と、XYテーブル24の上方に位置してベアチップ
1の上面を吸着する吸着ノズル部22と、吸着ノズル部
22と接触してベアチップ1の真空吸引を行う真空発生
器25と、吸着ノズル部22を保持してその上下動作の
案内を行う第一の一軸テーブル26と、一軸テーブル2
6を保持するブラケット27と、吸着ノズル部22を下
方に押下する圧縮ばね28と、下面において圧縮ばね2
8の上端と接触するロッド29と、ブラケット27を保
持してモータによってその上下動作の駆動を行う第二の
一軸テーブル32と、一軸テーブル32の動作の制御を
行うテーブルコントローラ33とを備えている。
2. Description of the Related Art FIG. 2 is a side view showing an example of a conventional bare chip mounter. An example as shown in this figure is published in P187 to 188, a surface mounting technology reader (Nikkan Kogyo Shimbun), and is an example of a general conventional example in which a chip is mounted by controlling the position of a motor. A conventional bare chip mounter for mounting a bare chip on a print pattern of a printed wiring board (substrate) while applying pressure has a structure as shown in FIG. That is, the XY table 24 that mounts the substrate 3 on the upper surface and moves in a direction perpendicular to the horizontal plane, the suction nozzle portion 22 that is located above the XY table 24 and that sucks the upper surface of the bare chip 1, and the suction nozzle portion 22. A vacuum generator 25 that comes into contact with each other to perform vacuum suction of the bare chip 1, a first uniaxial table 26 that holds the suction nozzle unit 22 and guides its vertical movement, and a uniaxial table 2
6, a bracket 27 for holding 6, a compression spring 28 for pressing down the suction nozzle portion 22, and a compression spring 2 on the lower surface.
8, a second uniaxial table 32 for holding the bracket 27 and driving the bracket 27 up and down by a motor, and a table controller 33 for controlling the operation of the uniaxial table 32. .

【0003】このように構成したベアチップマウンタに
よってベアチップ1を基板3に搭載するときは、真空発
生器25を作動させて吸着ノズル部22によってベアチ
ップ1の上面を吸着し、XYテーブル24を動かしてベ
アチップ1と基板3のプリントパターンとの位置合せを
行い、次にテーブルコントローラ33によって一軸テー
ブル32を下方に動作させて吸着ノズル部22に吸着し
たベアチップ1を基板3のプリントパターン上に搭載す
る。
When the bare chip 1 is mounted on the substrate 3 by the bare chip mounter thus constructed, the vacuum generator 25 is operated to suck the upper surface of the bare chip 1 by the suction nozzle portion 22, and the XY table 24 is moved to move the bare chip 1. 1 and the print pattern of the substrate 3 are aligned, and then the uniaxial table 32 is moved downward by the table controller 33 to mount the bare chip 1 sucked by the suction nozzle portion 22 on the print pattern of the substrate 3.

【0004】このとき、一軸テーブル32は、ベアチッ
プ1の接触前移動距離Bよりも押し込み距離Aだけ余分
に移動させる。この余分に移動させた押し込み距離A
は、一軸テーブル26の上方向の移動によって吸収す
る。このため、吸着ノズル部22とロッド29との間に
装着されている圧縮ばね28は押し込み距離Aだけ圧縮
される。このときの[圧縮ばね28の圧縮力+吸着ノズ
ル22の自重+一軸テーブル26可動部の自重]が、ベ
アチップ1に対する加圧力となる。
At this time, the uniaxial table 32 is moved by a pushing distance A more than the moving distance B before contact of the bare chip 1. This extra moving distance A
Are absorbed by the upward movement of the uniaxial table 26. Therefore, the compression spring 28 mounted between the suction nozzle portion 22 and the rod 29 is compressed by the pushing distance A. At this time, [compressive force of the compression spring 28 + self-weight of the suction nozzle 22 + self-weight of the movable portion of the uniaxial table 26] is the pressure applied to the bare chip 1.

【0005】[0005]

【発明が解決しようとする課題】上述したような従来の
ベアチップマウンタは、第二の一軸テーブル32の位置
制御により押し込み距離Aを決定し圧縮ばね28により
基板に対するベアチップの加圧力を発生させるため、
(1)ベアチップの厚み及び基板の厚みに合わせて第二
の一軸テーブルの移動距離の設定を変更する必要がある
(2)ベアチップの厚み及び基板の厚みのばらつき、ま
たはそりにより圧縮ばねの押し込み距離が変わり加圧力
が変化してしまう(3)圧縮ばねが劣化等により特性変
化を起こしたとき、押し込み距離が一定でも加圧力が変
化してしまうという欠点がある。また、微少な荷重で搭
載したい場合、[吸着ノズル22の自重+一軸テーブル
26可動部の自重]が作用して、それ以下の荷重で搭載
できないという欠点がある。
In the conventional bare chip mounter as described above, the pushing distance A is determined by the position control of the second uniaxial table 32 and the pressing force of the bare chip against the substrate is generated by the compression spring 28.
(1) It is necessary to change the setting of the moving distance of the second uniaxial table according to the thickness of the bare chip and the thickness of the substrate. (2) The pushing distance of the compression spring due to the variation in the thickness of the bare chip and the thickness of the substrate or the warp. (3) When the compression spring changes its characteristics due to deterioration or the like, there is a disadvantage that the pressing force changes even if the pushing distance is constant. In addition, when it is desired to mount the device with a small load, there is a disadvantage that [the own weight of the suction nozzle 22 + the own weight of the movable portion of the uniaxial table 26] acts and the device cannot be mounted with a load less than that.

【0006】[0006]

【課題を解決するための手段】本発明のベアチップマウ
ンタは、上面に印刷配線基板を搭載して水平面内に直角
方向に移動させるXYテーブルと、前記XYテーブルの
上方に位置してベアチップの上面を吸着する吸着ノズル
部と、前記吸着ノズル部と接続して前記ベアチップの真
空吸引を行う真空発生器と、前記吸着ノズル部を保持し
てその上下動作の案内を行う第一の一軸テーブルと、前
記第一の一軸テーブルを保持するブラケットと、前記吸
着ノズル部を下方に押下する圧縮ばねと、下面において
前記圧縮ばねの上端と接触するロッドと、前記ブラケッ
トに保持され前記ロッドの上面と接触するロードセル
と、前記第一の一軸テーブルの可動部をつり上げて前記
圧縮ばねの荷重方向と反対の方向に前記一軸テーブルの
可動部の自重以上の荷重を発生させる引っ張りばねと、
前記ロードセルに接続されて前記ロードセルの検出圧力
を出力する加圧力検出部と、前記ブラケットを保持して
モータによってその上下動作の駆動を行う第二の一軸テ
ーブルと、前記加圧力検出部に接続されて前記第二の一
軸テーブルの動作の制御を行うテーブルコントローラと
を備えている。
A bare chip mounter of the present invention mounts a printed wiring board on its upper surface and moves it in a direction perpendicular to a horizontal plane, and an upper surface of the bare chip located above the XY table. A suction nozzle portion for suctioning, a vacuum generator connected to the suction nozzle portion for vacuum suctioning the bare chip, a first uniaxial table for holding the suction nozzle portion and guiding the vertical movement thereof, A bracket that holds the first uniaxial table, a compression spring that presses down the suction nozzle portion, a rod that contacts the upper end of the compression spring on the lower surface, and a load cell that is held by the bracket and contacts the upper surface of the rod. And the movable part of the first uniaxial table is lifted so that the movable part of the uniaxial table has a weight equal to or more than its own weight in a direction opposite to the load direction of the compression spring. A tension spring for generating a heavy,
A pressing force detection unit connected to the load cell and outputting the detected pressure of the load cell, a second uniaxial table that holds the bracket and drives the vertical movement of the bracket by a motor, and is connected to the pressing force detection unit. And a table controller for controlling the operation of the second uniaxial table.

【0007】[0007]

【実施例】次に、本発明の実施例について図面を参照し
て説明する。
Embodiments of the present invention will now be described with reference to the drawings.

【0008】図1は本発明の一実施例を示す側面図であ
る。図1に示すベアチップマウンタは、上面に基板3を
搭載して水平面内に直角方向に移動させるXYテーブル
4と、XYテーブル4の上方に位置してベアチップ1の
上面を吸着する吸着ノズル部2と、吸着ノズル部2と接
続してベアチップ1の真空吸引を行う真空発生器5と、
吸着ノズル部2を保持してその上下動作の案内を行う第
一の一軸テーブル6と、一軸テーブル6を保持するブラ
ケット7と、吸着ノズル部2を下方に押下する圧縮ばね
8と、下面において圧縮ばね8の上端と接触するロッド
9と、ブラケット7に保持されロッド9の上面と接触す
るロードセル10と、一軸テーブル6の可動部をつり上
げて圧縮ばね8の荷重方向と反対の方向に一軸テーブル
6の可動部の自重以上の荷重を発生させる引っ張りばね
11と、ロードセル10に接続されてロードセル10の
検出圧力を出力する加圧力検出部12と、ブラケット7
を保持してモータによってその上下動作の駆動を行う第
二の一軸テーブル13と、加圧力検出部12に接続され
て一軸テーブル13の動作の制御を行うテーブルコント
ローラ14とを備えている。
FIG. 1 is a side view showing an embodiment of the present invention. The bare chip mounter shown in FIG. 1 includes an XY table 4 on which a substrate 3 is mounted on the upper surface and is moved in a horizontal direction at right angles, and an adsorption nozzle portion 2 which is located above the XY table 4 and adsorbs the upper surface of the bare chip 1. A vacuum generator 5 that is connected to the suction nozzle unit 2 to perform vacuum suction of the bare chip 1,
A first uniaxial table 6 that holds the suction nozzle unit 2 and guides its vertical movement, a bracket 7 that holds the uniaxial table 6, a compression spring 8 that presses the suction nozzle unit 2 downward, and a compression at the lower surface. The rod 9 that contacts the upper end of the spring 8, the load cell 10 that is held by the bracket 7 and that contacts the upper surface of the rod 9, and the movable portion of the uniaxial table 6 are lifted to move the uniaxial table 6 in the direction opposite to the load direction of the compression spring 8. Tension spring 11 for generating a load equal to or more than the own weight of the movable part, a pressure detection unit 12 connected to the load cell 10 for outputting the detected pressure of the load cell 10, and a bracket 7
And a second uniaxial table 13 for holding and driving the uniaxial table 13 by a motor to drive the uniaxial table 13 up and down, and a table controller 14 connected to the pressing force detection unit 12 to control the operation of the uniaxial table 13.

【0009】このように構成したベアチップマウンタ
は、次のように動作する。すなわち、真空発生器5を作
動させて吸着ノズル部2によってベアチップ1の上面を
吸着し、XYテーブル4を動かしてベアチップ1と基板
3のプリントパターンとの位置合せを行い、次にテーブ
ルコントローラ13によって一軸テーブル13を下方に
動作させて吸着ノズル部2に吸着したベアチップ1を基
板3のプリントパターン上に搭載する。
The bare chip mounter thus constructed operates as follows. That is, the vacuum generator 5 is operated to suck the upper surface of the bare chip 1 by the suction nozzle unit 2, the XY table 4 is moved to align the bare chip 1 and the print pattern of the substrate 3, and then the table controller 13 is used. The uniaxial table 13 is moved downward to mount the bare chip 1 sucked by the suction nozzle portion 2 on the printed pattern of the substrate 3.

【0010】これと同時に、加圧力検出部12によって
ロードセル10から出力される加圧力を検出し、所定の
基準加圧力と比較する。このときの基準加圧力は、吸着
ノズル部2が下方に移動し始める前にロードセル10に
よって検出した初期検出荷重に、押し込み距離Aによっ
て[圧縮ばね8+引っ張りばね11]が発生させる荷重
を加算した値とする。この押し込み距離Aによって[圧
縮ばね8+引っ張りばね11]が発生させる荷重がベア
チップ1を基板3に搭載するときの加圧力「搭載加圧
力」となる。ベアチップ1が基板3に接触してから更に
押し込み距離Aだけ移動すると、押し込み距離Aは一軸
テーブル6の上方向の移動によって吸収され、その分だ
け圧縮ばね8が圧縮され、また引っ張りばね11が戻さ
れ、所定の加圧力が発生し、加圧力検出部12により検
出される。加圧力が基準加圧力に到達した時点でテーブ
ルコントローラ14は、一軸テーブル13の動作を停止
させる。一軸テーブル13の停止後、真空発生器5を停
止させて吸着ノズル部2によるベアチップ1の吸着を開
放してベアチップ1を基板3上に載置し、一軸テーブル
13を上方向に移動させて一連の搭載動作を完了する。
At the same time, the pressing force detector 12 detects the pressing force output from the load cell 10 and compares it with a predetermined reference pressing force. The reference pressing force at this time is a value obtained by adding the load generated by the [compression spring 8 + tension spring 11] by the pushing distance A to the initial detection load detected by the load cell 10 before the suction nozzle unit 2 starts moving downward. And The load generated by the [compression spring 8 + tensile spring 11] due to the pushing distance A becomes the "loading pressure" when the bare chip 1 is mounted on the substrate 3. When the bare chip 1 contacts the substrate 3 and moves further by the pushing distance A, the pushing distance A is absorbed by the upward movement of the uniaxial table 6, the compression spring 8 is compressed by that amount, and the tension spring 11 is returned. Then, a predetermined pressing force is generated and detected by the pressing force detection unit 12. When the pressure reaches the reference pressure, the table controller 14 stops the operation of the uniaxial table 13. After stopping the uniaxial table 13, the vacuum generator 5 is stopped to release the suction of the bare chip 1 by the suction nozzle unit 2 to place the bare chip 1 on the substrate 3, and the uniaxial table 13 is moved upward to perform a series of operations. Complete the mounting operation of.

【0011】[0011]

【発明の効果】以上説明したように、本発明のベアチッ
プマウンタは、ベアチップを基板上に載置したときのベ
アチップに対する搭載加圧力を検出するロードセルと、
このロードセルからの出力を入力して加圧力の検出を行
う加圧力検出部と、加圧力検出部からの検出加圧力と基
準加圧力と比較して吸着ノズル部の上下動作を駆動する
一軸テーブルの動作を制御するテーブルコントローラと
を設けることにより、(1)吸着ノズル部の上下動作を
駆動する一軸テーブルの移動距離の設定を、基板に対す
るベアチップの高さに合わせて変更する必要がなくなる
という効果があり、また(2)基板及びベアチップの厚
みのばらつき或はそりによる加圧力の変化、或は圧縮ば
ねの特性変化による加圧力の変化がなくなり常にベアチ
ップに対する搭載加圧力を一定にすることができる
(3)引っ張りばねでつり上げることで第一の一軸テー
ブルの可動部の自重を打ち消しロードセルの初期検出荷
重にすることで、微少な荷重でも搭載できるという効果
がある。
As described above, the bare chip mounter of the present invention includes a load cell for detecting the mounting pressure applied to the bare chip when the bare chip is mounted on the substrate,
A pressure detection unit that inputs the output from this load cell to detect the pressure, and a uniaxial table that drives the vertical movement of the suction nozzle unit by comparing the pressure detected by the pressure detection unit and the reference pressure. By providing the table controller for controlling the operation, (1) it is not necessary to change the setting of the moving distance of the uniaxial table for driving the vertical movement of the suction nozzle unit according to the height of the bare chip with respect to the substrate. (2) There is no change in the pressing force due to variations in the thickness of the substrate and the bare chip or warpage, or a change in the pressing force due to a change in the characteristics of the compression spring, so that the mounting pressing force on the bare chip can always be kept constant ( 3) Lifting up with a tension spring cancels out the self-weight of the movable part of the first uniaxial table, and makes it the initial detection load of the load cell. There is an effect that can also be equipped with a load.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の一実施例を示す側面図である。FIG. 1 is a side view showing an embodiment of the present invention.

【図2】従来の一例を示す側面図である。FIG. 2 is a side view showing a conventional example.

【符号の説明】[Explanation of symbols]

1 ベアチップ 2 吸着ノズル部 3 基板 4 XYテーブル 5 真空発生器 6 一軸テーブル 7 ブラケット 8 圧縮ばね 9 ロッド 10 ロードセル 11 引っ張りばね 12 加圧力検出部 13 一軸テーブル 14 テーブルコントローラ 22 吸着ノズル部 24 XYテーブル 25 真空発生器 26 一軸テーブル 27 ブラケット 28 圧縮ばね 29 ロッド 32 一軸テーブル 33 テーブルコントローラ DESCRIPTION OF SYMBOLS 1 Bare chip 2 Adsorption nozzle part 3 Substrate 4 XY table 5 Vacuum generator 6 Uniaxial table 7 Bracket 8 Compression spring 9 Rod 10 Load cell 11 Tension spring 12 Pressurizing force detection part 13 Uniaxial table 14 Table controller 22 Adsorption nozzle part 24 XY table 25 Vacuum Generator 26 Uniaxial table 27 Bracket 28 Compression spring 29 Rod 32 Uniaxial table 33 Table controller

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 上面に印刷配線基板を搭載して水平面内
に直角方向に移動させるXYテーブルと、前記XYテー
ブルの上方に位置してベアチップの上面を吸着する吸着
ノズル部と、前記吸着ノズル部と接続して前記ベアチッ
プの真空吸引を行う真空発生器と、前記吸着ノズル部を
保持してその上下動作の案内を行う第一の一軸テーブル
と、前記第一の一軸テーブルを保持するブラケットと、
前記吸着ノズル部を下方に押下する圧縮ばねと、下面に
おいて前記圧縮ばねの上端と接触するロッドと、前記ブ
ラケットに保持され前記ロッドの上面と接触するロード
セルと、前記第一の一軸テーブルの可動部をつり上げて
前記圧縮ばねの荷重方向と反対の方向に前記一軸テーブ
ルの可動部の自重以上の荷重を発生させる引っ張りばね
と、前記ロードセルに接続されて前記ロードセルの検出
圧力を出力する加圧力検出部と、前記ブラケットを保持
してモータによってその上下動作の駆動を行う第二の一
軸テーブルと、前記加圧力検出部に接続されて前記第二
の一軸テーブルの動作の制御を行うテーブルコントロー
ラとを備えることを特徴とするベアチップマウンタ。
1. An XY table which mounts a printed wiring board on its upper surface and moves in a direction perpendicular to a horizontal plane, an adsorption nozzle portion which is located above the XY table and which adsorbs an upper surface of a bare chip, and said adsorption nozzle portion. A vacuum generator that is connected to a vacuum suction device for performing vacuum suction of the bare chip, a first uniaxial table that holds the suction nozzle unit and guides the vertical movement thereof, and a bracket that holds the first uniaxial table.
A compression spring that pushes down the suction nozzle portion, a rod that contacts the upper end of the compression spring on the lower surface, a load cell that is held by the bracket and that contacts the upper surface of the rod, and a movable portion of the first uniaxial table. A tension spring for lifting a load to generate a load equal to or more than its own weight of the movable portion of the uniaxial table in a direction opposite to the load direction of the compression spring, and a pressing force detection unit connected to the load cell and outputting a detected pressure of the load cell. And a second uniaxial table that holds the bracket and drives the motor to move up and down, and a table controller that is connected to the pressing force detector to control the operation of the second uniaxial table. Bare chip mounter characterized by the following.
JP7132206A 1995-05-30 1995-05-30 Bare chip mounter Pending JPH08330790A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7132206A JPH08330790A (en) 1995-05-30 1995-05-30 Bare chip mounter

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Application Number Priority Date Filing Date Title
JP7132206A JPH08330790A (en) 1995-05-30 1995-05-30 Bare chip mounter

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JPH08330790A true JPH08330790A (en) 1996-12-13

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Cited By (13)

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Publication number Priority date Publication date Assignee Title
EP1321967A1 (en) * 2001-12-05 2003-06-25 Esec Trading S.A. Apparatus for mounting semiconductor chips
JP2003318226A (en) * 2002-04-26 2003-11-07 Nippon Avionics Co Ltd Ultrasonic flip chip bonding device
CN1321435C (en) * 2002-11-08 2007-06-13 重机公司 Part retainer
US7284318B2 (en) 2001-12-05 2007-10-23 Esec, Trading Sa Apparatus for mounting semiconductor chips
JP2007335894A (en) * 2007-08-23 2007-12-27 Matsushita Electric Ind Co Ltd Device and method for pressing electronic component
JP2008078213A (en) * 2006-09-19 2008-04-03 Sanwa System Engineering Kk Device for assembling precision component
US20100269330A1 (en) * 2007-11-06 2010-10-28 Panasonic Corporation Component mounting apparatus, component mounting head, and component mounting method
KR20120081570A (en) * 2011-01-11 2012-07-19 쥬키 가부시키가이샤 Electronic component mounting apparatus
JP2013254785A (en) * 2012-06-05 2013-12-19 Samsung Techwin Co Ltd Electronic component mounting apparatus
CN110231770A (en) * 2019-06-28 2019-09-13 杨少宏 A kind of glass fetching device
CN113977028A (en) * 2021-10-28 2022-01-28 恩纳基智能科技无锡有限公司 Eutectic welding equipment
CN114370964A (en) * 2021-10-13 2022-04-19 苏州汇创芯精密智能装备有限公司 Pressure maintaining detection device based on pressure compensation and detection method thereof
CN114918963A (en) * 2022-05-31 2022-08-19 三一汽车制造有限公司 Sucker mechanism and truss manipulator

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH052039B2 (en) * 1985-10-07 1993-01-11 Nippon Electric Co
JP4130499B2 (en) * 1998-07-15 2008-08-06 内橋エステック株式会社 Substrate type temperature fuse manufacturing method

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH052039B2 (en) * 1985-10-07 1993-01-11 Nippon Electric Co
JP4130499B2 (en) * 1998-07-15 2008-08-06 内橋エステック株式会社 Substrate type temperature fuse manufacturing method

Cited By (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7284318B2 (en) 2001-12-05 2007-10-23 Esec, Trading Sa Apparatus for mounting semiconductor chips
EP1321967A1 (en) * 2001-12-05 2003-06-25 Esec Trading S.A. Apparatus for mounting semiconductor chips
JP2003318226A (en) * 2002-04-26 2003-11-07 Nippon Avionics Co Ltd Ultrasonic flip chip bonding device
CN1321435C (en) * 2002-11-08 2007-06-13 重机公司 Part retainer
JP2008078213A (en) * 2006-09-19 2008-04-03 Sanwa System Engineering Kk Device for assembling precision component
JP2007335894A (en) * 2007-08-23 2007-12-27 Matsushita Electric Ind Co Ltd Device and method for pressing electronic component
JP4530009B2 (en) * 2007-08-23 2010-08-25 パナソニック株式会社 Electronic component pressing device and pressing method
US8413322B2 (en) * 2007-11-06 2013-04-09 Panasonic Corporation Component mounting apparatus, component mounting head, and component mounting method
US20100269330A1 (en) * 2007-11-06 2010-10-28 Panasonic Corporation Component mounting apparatus, component mounting head, and component mounting method
KR20120081570A (en) * 2011-01-11 2012-07-19 쥬키 가부시키가이샤 Electronic component mounting apparatus
JP2012146762A (en) * 2011-01-11 2012-08-02 Juki Corp Electronic component mounting apparatus
JP2013254785A (en) * 2012-06-05 2013-12-19 Samsung Techwin Co Ltd Electronic component mounting apparatus
CN110231770A (en) * 2019-06-28 2019-09-13 杨少宏 A kind of glass fetching device
CN110231770B (en) * 2019-06-28 2024-04-02 杨少宏 Glass taking and placing mechanism
CN114370964A (en) * 2021-10-13 2022-04-19 苏州汇创芯精密智能装备有限公司 Pressure maintaining detection device based on pressure compensation and detection method thereof
CN113977028A (en) * 2021-10-28 2022-01-28 恩纳基智能科技无锡有限公司 Eutectic welding equipment
CN113977028B (en) * 2021-10-28 2023-04-25 恩纳基智能科技无锡有限公司 Eutectic welding equipment
CN114918963A (en) * 2022-05-31 2022-08-19 三一汽车制造有限公司 Sucker mechanism and truss manipulator

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