JPS63150186A - Part fixture - Google Patents

Part fixture

Info

Publication number
JPS63150186A
JPS63150186A JP61300378A JP30037886A JPS63150186A JP S63150186 A JPS63150186 A JP S63150186A JP 61300378 A JP61300378 A JP 61300378A JP 30037886 A JP30037886 A JP 30037886A JP S63150186 A JPS63150186 A JP S63150186A
Authority
JP
Japan
Prior art keywords
suction
mounting
component
drive means
force
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP61300378A
Other languages
Japanese (ja)
Inventor
暢彦 中野
敏文 木村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP61300378A priority Critical patent/JPS63150186A/en
Publication of JPS63150186A publication Critical patent/JPS63150186A/en
Pending legal-status Critical Current

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  • Manipulator (AREA)
  • Supply And Installment Of Electrical Components (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。
(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 この発明は、部品装着機に取付けられ、部品を吸着筒に
真空吸着し装着する部品装着装置に関する0 〔従来の技術〕 電子部品など小部品を吸着し、プリント基板などの被装
着体に装着する装置がある。第5図は部品装着機の従来
の部品装着装置r示す斜視図で、部品とじ1爾;子部品
を装置するものである。図において、1は部品装着機の
ロボットアーム、2はこのロボットアームに固定された
取付は体で、上下に取付板2aが一体に設けられである
。3はこれらの取付板2a間に固定さり、た一対の案内
棒、4はこれらの案内棒に上下動可能に支持された可動
支持体で、上方の取げ仮2aに取f=jけられた空気圧
シリンダ5によシ上下方向に移動される。上記取付は体
2.案内棒3.町動支持休4.空気モジリンダ5により
上下駆動手段6を構成している。7は可動支持体4に旋
回軸受8を介し回動可能に支持された取付具で、上端に
歯車9が固着されている。
[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a component mounting device that is attached to a component mounting machine and vacuum-chucks and mounts components onto a suction tube. [Prior Art] Small components such as electronic components There is a device that adsorbs and attaches it to an object to be attached, such as a printed circuit board. FIG. 5 is a perspective view showing a conventional component mounting device r of a component mounting machine, which is used for binding parts and attaching sub-components. In the figure, 1 is a robot arm of a component mounting machine, 2 is a mounting body fixed to this robot arm, and mounting plates 2a are integrally provided on the upper and lower sides. 3 is a pair of guide rods fixed between these mounting plates 2a; 4 is a movable support supported by these guide rods so that it can move up and down; It is moved in the vertical direction by a pneumatic cylinder 5. The above installation is for body 2. Guide rod 3. Town movement support holiday 4. The air modilinder 5 constitutes a vertical drive means 6. Reference numeral 7 denotes a fixture that is rotatably supported by the movable support 4 via a swing bearing 8, and has a gear 9 fixed to its upper end.

lOは支持板11を介し可動支持体4に支持された電動
機で、軸端の小歯車12により歯車9に回転を伝える。
IO is an electric motor supported by a movable support 4 via a support plate 11, and transmits rotation to a gear 9 by a small gear 12 at the end of the shaft.

上記取付具7.旋回軸受8.歯車9.電動機10.支持
板11.小歯車12により回動手段13を構成している
。14は取付具7に固定され回動されるようにされた吸
着装置で、支持筒15に支持された吸着筒16の下端で
電子部品50を真空吸着する0 上記吸着装置14は、第5塁に示すようになっている。
Above mounting tool 7. Swivel bearing8. Gear 9. Electric motor 10. Support plate 11. The small gear 12 constitutes a rotating means 13. Reference numeral 14 denotes a suction device which is fixed to the fixture 7 and is rotatable, and which vacuum suctions the electronic component 50 at the lower end of the suction tube 16 supported by the support tube 15. It is shown in the figure below.

吸着筒16は内部に吸着口16aが設けられ、奥に連通
穴16bがあけられである。17は吸着筒16にはめら
れ支持筒15の内径部との間を真空漏れ防止する上下一
対のシール部材、15aは支持筒15にあけられた真空
引穴、1日は支持筒にねじ込まれ、真空引穴15aに連
通ずるニップルで、真空引源からの真空引管19が接続
されでいる。20は吸着筒16の下部に固着されたピン
固定具、21はこのピン固定具に下端が固着され、上端
部が支持筒15に設けられたピン案内穴15bに上下動
可能に案内された回り止めピン、22は支持筒15とピ
ン固定具20との間にはめられ、常時吸着筒16に押下
げ力を加える圧縮ばねである。
The suction tube 16 is provided with a suction port 16a inside and has a communication hole 16b drilled in the back. 17 is a pair of upper and lower sealing members that are fitted into the suction tube 16 and prevent vacuum leakage between the inner diameter part of the support tube 15; 15a is a vacuum hole drilled in the support tube 15; 1 is screwed into the support tube; A vacuum tube 19 from a vacuum source is connected to a nipple communicating with the vacuum hole 15a. 20 is a pin fixture fixed to the lower part of the adsorption tube 16; 21 is a ring whose lower end is fixed to this pin fixture, and whose upper end is guided in a pin guide hole 15b provided in the support tube 15 so as to be movable up and down. The stop pin 22 is a compression spring that is fitted between the support tube 15 and the pin fixture 20 and constantly applies a downward force to the suction tube 16.

上記従来装置の動作は、次のようになる。例えば、電子
部品50をプリント基板(図示していない)上に装着す
る場合を説明する。上下駆動手段6により吸着装置14
を下降し、吸着筒16の下端に電子部品50を真空吸着
させて上昇させ、プリント基板面の載置箇所上方に移動
する。載置箇所(で対し電子部品50の水平面上の角度
整調を回動手段13により行う。上下鳴動手段により吸
着装置14を下降させる。下降により吸着筒16下喘の
電子部品50がプリント基板上に接すると、回り止めピ
ン21により回シ止めされている吸着筒16は、シール
部材17によるしゆう動摩擦力と圧縮はね22による押
田力で、電子部品50を押けける。空気圧シリンダ5の
ストローク端で、吸着を解除し電子部品50をプリント
基板へ装着し、吸着装置14を上昇させる。
The operation of the conventional device described above is as follows. For example, a case will be described in which the electronic component 50 is mounted on a printed circuit board (not shown). The suction device 14 is moved by the vertical drive means 6.
is lowered, and the electronic component 50 is vacuum-suctioned to the lower end of the suction tube 16, raised, and moved above the mounting location on the printed circuit board surface. The rotation means 13 adjusts the angle of the electronic component 50 on the horizontal plane with respect to the mounting location. The suction device 14 is lowered by the vertical sounding means. By lowering, the electronic component 50 in the lower part of the suction cylinder 16 is placed on the printed circuit board. When they come into contact, the suction tube 16, which is prevented from rotating by the rotation stopper pin 21, can push the electronic component 50 by the dynamic friction force generated by the seal member 17 and the pushing force generated by the compression spring 22.The stroke of the pneumatic cylinder 5 At the end, the suction is released, the electronic component 50 is mounted on the printed circuit board, and the suction device 14 is raised.

〔発明が解決しようとする問題点〕[Problem that the invention seeks to solve]

上記のような従来の部品装着装置では、吸着筒16を押
圧している圧縮ばね22のばね圧によシ、機械的に装着
力が決まっており、電子部品50の形状、大きさ、ピン
数に対応する適当な装着力に変更することができず、多
品種、多種形状の部品を装着するには、その都度、適応
したばね田の圧縮ばねに交換する必要があるという問題
点があった。
In the conventional component mounting device as described above, the mounting force is mechanically determined by the spring pressure of the compression spring 22 pressing the suction cylinder 16, and the mounting force is determined mechanically by the shape, size, and number of pins of the electronic component 50. There was a problem in that it was not possible to change the mounting force to an appropriate level to accommodate various types of parts, and it was necessary to replace the compression spring with an appropriate spring field each time when mounting parts of various types and shapes. .

また、基板のそりなどにより高さ変化が生じた場合、設
定した装着力で装着することができず、部品装着が安定
しない問題点があった。
Further, when a change in height occurs due to warpage of the board, etc., it is not possible to mount the component with the set mounting force, resulting in the problem that component mounting is unstable.

この発明は、上記のような問題点を解決するだめになさ
れたもので、装着する部品の形状、大きさ、ビン数に対
応して装着力が自動的に制御されるとともに、被装着板
のそシなどによる高さ変化に対しても、設定された装着
力で装着できる部品装着装置を得ることを目的としてい
る。
This invention was made to solve the above-mentioned problems, and the mounting force is automatically controlled according to the shape, size, and number of bins of the parts to be mounted. The object of the present invention is to provide a component mounting device that can be mounted with a set mounting force even when the height changes due to bending or the like.

〔問題点を解決するだめの手段〕[Failure to solve the problem]

この発明にかかる部品装着装置は、支持筒内に支持され
た吸着筒の上端に当接して荷重検出器を配設し、部品を
真空吸着し装着する際の吸着筒が受ける力を検出し、こ
の検出信号を制御装置で演算し、設定してある装着力に
なるように制御するようにしたものである。
The component mounting device according to the present invention includes a load detector disposed in contact with the upper end of the suction cylinder supported in the support cylinder, and detects the force applied to the suction cylinder when vacuum suctioning and mounting the component. This detection signal is calculated by a control device and controlled to achieve a set mounting force.

〔作用〕[Effect]

この発明においては、吸着した部品を被装着体に押付け
た吸着筒の反力を、荷重検出器で検出し、この検出信号
を制御装置に入れて演算して設定値と比較し、制御信号
を出し上下駆動手段を制御し、所定の装着力になるよう
にする。
In this invention, a load detector detects the reaction force of the suction tube that presses the suctioned part against the object to be mounted, and this detection signal is input to the control device and calculated and compared with a set value to generate a control signal. The ejection vertical drive means is controlled to achieve a predetermined mounting force.

〔実施例〕〔Example〕

第1図はこの発明による部品装着装置の一実施例を示す
斜視図であり、1〜4,7〜13.15,16.2aは
上記従来装置と同一のものである。図は部品として電子
部品の場合を示し、30は取付体2の上下の取付は板2
日間に回転自在に支持されたねじ軸で、上端にプーリ3
1を固着している。32は取付は体2に一体に設けられ
た取付は板2bに取付けられた電動機で、パルスモータ
などからなり、軸端に駆動のプーリ33を固着している
。34はプーリ郡と31 K掛けられたベルトである。
FIG. 1 is a perspective view showing an embodiment of the component mounting device according to the present invention, in which numerals 1 to 4, 7 to 13.15, and 16.2a are the same as those of the conventional device. The figure shows the case where electronic parts are used as parts, and 30 is a board 2 for mounting the upper and lower parts of the mounting body 2.
It is a screw shaft that is rotatably supported during the day, and a pulley 3 is attached to the upper end.
1 is fixed. Reference numeral 32 denotes an electric motor mounted on the plate 2b, which is integrally provided with the body 2, and is composed of a pulse motor or the like, and has a driving pulley 33 fixed to the shaft end. 34 is the Puri county and 31 K hanging belt.

上記取付体2゜2a、2b 、案内棒3.可動支持体4
.ねじ軸30 、プーリ31 、33 、電動@32.
ベルト34.により上下駆動手段35を4’%r成する
Said mounting body 2゜2a, 2b, guide rod 3. Movable support 4
.. Screw shaft 30, pulleys 31, 33, electric @32.
Belt 34. Thus, the vertical drive means 35 is made 4'%r.

次に、36は取付具7に固定され回動される吸着装[N
で、第2図に示すように構成されており、15〜22.
L5a、15b、16a、16bは」二記第5図に示す
従来のものと同一のものである。3″7は吸着筒16の
上端に接する荷重検出器で、例えば圧力変換素子を有し
、吸着筒16が上向きに受ける力を検出し、その力に対
応する検出信号を出す。38は荷重検出器3′7を保持
する保持具で、取付具7に固着された案内具3つに控部
38aで上下動可能に案内されている。40は控部38
aの上端に固定され、待機状態の荷重検出器37を所定
の下降付性に受止めておくための固定具、41は保持具
38を介し荷重検出器37に所定の押圧力を−与える圧
縮ばねである。
Next, 36 is a suction device [N
It is configured as shown in FIG. 2, and includes 15 to 22.
L5a, 15b, 16a, and 16b are the same as the conventional one shown in FIG. 5 of Section 2. 3''7 is a load detector that is in contact with the upper end of the suction tube 16, and has, for example, a pressure conversion element, detects the force that the suction tube 16 receives upward, and outputs a detection signal corresponding to the force.38 is a load detection device. It is a holder for holding the container 3'7, and is guided so as to be movable up and down by a retaining part 38a by three guide tools fixed to the fixture 7. 40 is a retaining part 38
A fixing device fixed to the upper end of a for holding the load detector 37 in a standby state with a predetermined downward force; It's a spring.

第3図に荷重検出器37の検出により上下駆動手段35
を制御する制御手段の構成図を示す。42は荷重検出器
37の検出信号を増幅する増幅器、43は部品装着機全
体を制御する制御装置であり、増幅器42からの信号に
より演算し、設定されてある装着力と比較し、不足分に
対し制御信号を出し上下、駆動手段35を作動させ、吸
着装置36をさらに下降させ、電子部品50への装着力
を増させる。荷重検出器37からの検出信号が設定値に
達すると、制御装置は上下駆動手段35による下降加圧
作用を停止させる。
In FIG. 3, the vertical drive means 35 is detected by the load detector 37.
The block diagram of the control means which controls is shown. 42 is an amplifier that amplifies the detection signal of the load detector 37, and 43 is a control device that controls the entire component mounting machine, which calculates based on the signal from the amplifier 42, compares it with a set mounting force, and corrects the shortfall. On the other hand, a control signal is issued to operate the driving means 35 up and down, thereby further lowering the suction device 36 and increasing the mounting force on the electronic component 50. When the detection signal from the load detector 37 reaches the set value, the control device stops the downward pressurizing action by the vertical drive means 35.

上記−実施例の装置の動作は、次のようになる。The operation of the apparatus of the above embodiment is as follows.

吸着筒16の先端に電子部品50才真空吸着し、ロボッ
トアーム1によ)プリント基板(図示は略す)而の装着
箇所上方に移動する。回動手段13によシ宙、子部品5
0の水平面上の角度の修正をする。上下駆動手段35の
電動機32を始動し、可動支持体4を介し吸着装置36
を下降させる。吸着筒16の下端に吸着されている電子
部品5oがプリント基板上に接触し、支持筒15は圧縮
ばね22のばね圧に抗し下降する。これにより、吸着筒
16の上端に受けられている荷重検出1ei36は、取
付具15の下降により圧縮ばね41を介し加圧される。
The electronic component 50 years old is vacuum-suctioned to the tip of the suction tube 16, and moved by the robot arm 1 above the attachment point of the printed circuit board (not shown). The child part 5 is rotated by the rotation means 13.
Correct the angle on the 0 horizontal plane. The electric motor 32 of the vertical drive means 35 is started, and the suction device 36 is moved through the movable support 4.
lower. The electronic component 5o suctioned to the lower end of the suction cylinder 16 comes into contact with the printed circuit board, and the support cylinder 15 descends against the spring pressure of the compression spring 22. As a result, the load detection element 1ei36 received at the upper end of the adsorption cylinder 16 is pressurized via the compression spring 41 as the attachment 15 descends.

この加圧力は゛重子部品50への加圧力となっている。This pressing force serves as a pressing force to the heavy element component 50.

加重検出器37による検出信号は増幅器42を介して制
御装置43に入力され、部品装着力として演算され、設
定値と比較し制御信号を出し、不足であると上下駆動手
段35を作動させ、吸着装し36を下降させる。
The detection signal from the weighted detector 37 is input to the control device 43 via the amplifier 42, where it is calculated as the component mounting force, compared with a set value, and a control signal is issued. Lower the mounting 36.

検出さノ1.た装着力が設定(直に達すると、制御装置
43が制御化→Jを出し、電子部品50の1吸着を解除
し、上下駆動手段35により吸着装置36を」二昇させ
、部品装着が完了する。
Detected 1. When the mounting force reaches the setting (direction), the control device 43 outputs control→J, releases the first suction of the electronic component 50, raises the suction device 36 by the vertical drive means 35, and completes the component mounting. do.

なお、上記実施例では、装着する部品として電子部品の
場合を示しだが、これに限らず、真空吸着し所要の装着
力で装着を′紗する部品であれば、他の種の部品の名合
にも摘用できるものである。
In the above embodiment, the part to be mounted is an electronic component, but this is not limited to this, and other types of parts may be used as long as the part can be vacuum-adsorbed and mounted with the required mounting force. It can also be used.

〔発明の動体〕[Movement of invention]

以上のように、この発明によれば、支持筒内に支持され
た吸着筒の上端に電接して荷重検出器を配設し、吸着し
た゛電子部品を被装着体に押例けた吸着筒の反力を荷重
検出器で検出し、この検出信号を制御装置に入れて演算
し、設定値と比較し、制御信号を出して上下駆動手段を
制御し、所定の装着力にするようにしたので、部品を所
要の装着力で、安定した信頼件の高い装着ができ、一台
の装着機で多品種の部品の装着ができる。
As described above, according to the present invention, a load detector is disposed in electrical contact with the upper end of the suction cylinder supported in the support cylinder, and the suction cylinder which presses the suctioned electronic component onto the object to be mounted is mounted. The reaction force is detected by a load detector, this detection signal is input to the control device, calculated, compared with a set value, and a control signal is issued to control the vertical drive means to achieve a predetermined mounting force. , parts can be mounted stably and reliably with the required mounting force, and a wide variety of parts can be mounted with a single mounting machine.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図はこの発明による部品装着装置の一実施例を示す
斜視図、第2図は第1図の吸着装置の縦断面図、第3図
は第1図の装置の制御手段構成図、第4図は従来の部品
装着装置の企1視図、第5図は第4図の吸着装置の縦断
面図である。 4・・・可動支持体、ワ・・・取付具、10・・・電動
機、13・・・回動手段、15・・・支持筒、16・・
・吸着筒、16a・・・吸着口、22・・・圧縮ばね、
32・・・電動機、35・・・上下動駆動手段、36・
・・吸着装置、57・・・荷重検出器、43・・・制御
装置。
FIG. 1 is a perspective view showing an embodiment of a component mounting device according to the present invention, FIG. 2 is a vertical cross-sectional view of the suction device shown in FIG. 1, and FIG. FIG. 4 is a perspective view of a conventional component mounting device, and FIG. 5 is a vertical sectional view of the suction device shown in FIG. 4. 4... Movable support body, W... Fixture, 10... Electric motor, 13... Rotating means, 15... Support cylinder, 16...
・Suction cylinder, 16a... Suction port, 22... Compression spring,
32... Electric motor, 35... Vertical movement drive means, 36.
...Adsorption device, 57...Load detector, 43...Control device.

Claims (2)

【特許請求の範囲】[Claims] (1)可動支持体を上下動させる上下動駆動手段と、上
記可動支持体に回動可能に支持された取付具を水平方向
の回動調整させるための回動手段と、上記取付具に取付
けられた立て方向の支持筒内に上下動可能に吸着筒を支
持しており、この吸着筒は中心に下端から吸着口が設け
られており、真空引きにより下端で部品を吸着するよう
にされ、常時は圧縮ばねにより押下げるようにした吸着
装置とからなり、上下動駆動手段による上記吸着装置の
下降で、上記吸着筒の下端に吸着してある部品を被吸着
体上に押付け装着するようにした部品装着装置において
、上記被装着体に上記部品を押付ける吸着筒に加わる装
着力を検出しその力に応じた検出信号を出す荷重検出器
、及びこの荷重検出器の検出信号と、設定されてある所
要装着力値とを比較し、所要装着力にするための制御信
号を上記上下動駆動手段に送り制御する制御装置を備え
た部品装着装置。
(1) Vertical drive means for moving the movable support up and down, rotation means for adjusting the rotation in the horizontal direction of a fixture rotatably supported by the movable support, and mounting on the fixture. A suction cylinder is supported in a vertically vertical support cylinder so as to be movable up and down, and this suction cylinder is provided with a suction port from the bottom end in the center, and the parts are sucked at the bottom end by vacuuming. It usually consists of a suction device that is pressed down by a compression spring, and when the suction device is lowered by a vertical movement drive means, the parts that are suctioned at the lower end of the suction cylinder are pressed onto the object to be sucked. The component mounting device includes a load detector that detects a mounting force applied to a suction tube that presses the component onto the object to be mounted and outputs a detection signal according to the force, and a detection signal of the load detector and a set A component mounting device comprising: a control device that compares a required mounting force value with a required mounting force value, and sends a control signal to the vertical drive means to control the vertical movement drive means to achieve the required mounting force.
(2)部品は電子部品からなる特許請求の範囲第1項記
載の部品装着装置。
(2) The component mounting device according to claim 1, wherein the component is an electronic component.
JP61300378A 1986-12-16 1986-12-16 Part fixture Pending JPS63150186A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61300378A JPS63150186A (en) 1986-12-16 1986-12-16 Part fixture

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61300378A JPS63150186A (en) 1986-12-16 1986-12-16 Part fixture

Publications (1)

Publication Number Publication Date
JPS63150186A true JPS63150186A (en) 1988-06-22

Family

ID=17884059

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61300378A Pending JPS63150186A (en) 1986-12-16 1986-12-16 Part fixture

Country Status (1)

Country Link
JP (1) JPS63150186A (en)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0250499A (en) * 1988-08-11 1990-02-20 Sanyo Electric Co Ltd Device for mounting of electronic component
JPH04130499U (en) * 1991-05-24 1992-11-30 日本電気株式会社 Surface mount component mounting equipment
JPH0715183A (en) * 1993-06-29 1995-01-17 Matsushita Electric Ind Co Ltd Electronic component mounting device
WO1998023141A1 (en) * 1996-11-19 1998-05-28 Matsushita Electric Industrial Co., Ltd. Device and method for mounting electronic parts
JP2010201557A (en) * 2009-03-03 2010-09-16 Honda Motor Co Ltd Workpiece pickup device and method
JP2012174822A (en) * 2011-02-21 2012-09-10 Juki Corp Compression control head of mounter device
JP2014168838A (en) * 2013-03-05 2014-09-18 Hioki Ee Corp Suction mechanism and suction device
JP2020203361A (en) * 2019-06-19 2020-12-24 株式会社Ihi Robot control device and method for controlling the same

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0250499A (en) * 1988-08-11 1990-02-20 Sanyo Electric Co Ltd Device for mounting of electronic component
JPH04130499U (en) * 1991-05-24 1992-11-30 日本電気株式会社 Surface mount component mounting equipment
JPH0715183A (en) * 1993-06-29 1995-01-17 Matsushita Electric Ind Co Ltd Electronic component mounting device
WO1998023141A1 (en) * 1996-11-19 1998-05-28 Matsushita Electric Industrial Co., Ltd. Device and method for mounting electronic parts
US6282779B1 (en) 1996-11-19 2001-09-04 Matsushita Electric Industrial Co., Ltd. Device and method for mounting electronic parts
JP3574666B2 (en) * 1996-11-19 2004-10-06 松下電器産業株式会社 Electronic component mounting apparatus and method
JP2010201557A (en) * 2009-03-03 2010-09-16 Honda Motor Co Ltd Workpiece pickup device and method
JP2012174822A (en) * 2011-02-21 2012-09-10 Juki Corp Compression control head of mounter device
JP2014168838A (en) * 2013-03-05 2014-09-18 Hioki Ee Corp Suction mechanism and suction device
JP2020203361A (en) * 2019-06-19 2020-12-24 株式会社Ihi Robot control device and method for controlling the same

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