KR20100103473A - 연마 시트 및 연마 시트의 제조 방법 - Google Patents

연마 시트 및 연마 시트의 제조 방법 Download PDF

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Publication number
KR20100103473A
KR20100103473A KR1020107011573A KR20107011573A KR20100103473A KR 20100103473 A KR20100103473 A KR 20100103473A KR 1020107011573 A KR1020107011573 A KR 1020107011573A KR 20107011573 A KR20107011573 A KR 20107011573A KR 20100103473 A KR20100103473 A KR 20100103473A
Authority
KR
South Korea
Prior art keywords
abrasive
abrasive grains
film
polishing
sheet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
KR1020107011573A
Other languages
English (en)
Korean (ko)
Inventor
노부요시 와따나베
가즈노리 다니
Original Assignee
니혼 미크로 코팅 가부시끼 가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 니혼 미크로 코팅 가부시끼 가이샤 filed Critical 니혼 미크로 코팅 가부시끼 가이샤
Publication of KR20100103473A publication Critical patent/KR20100103473A/ko
Withdrawn legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D11/00—Constructional features of flexible abrasive materials; Special features in the manufacture of such materials
    • B24D11/001—Manufacture of flexible abrasive materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D18/00—Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for
    • B24D18/0054—Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for by impressing abrasive powder in a matrix

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Mechanical Engineering (AREA)
  • Polishing Bodies And Polishing Tools (AREA)
KR1020107011573A 2007-11-28 2008-11-20 연마 시트 및 연마 시트의 제조 방법 Withdrawn KR20100103473A (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007307730A JP5209284B2 (ja) 2007-11-28 2007-11-28 研磨シートおよび研磨シートの製造方法
JPJP-P-2007-307730 2007-11-28

Publications (1)

Publication Number Publication Date
KR20100103473A true KR20100103473A (ko) 2010-09-27

Family

ID=40678428

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020107011573A Withdrawn KR20100103473A (ko) 2007-11-28 2008-11-20 연마 시트 및 연마 시트의 제조 방법

Country Status (4)

Country Link
US (1) US20100293865A1 (enrdf_load_stackoverflow)
JP (1) JP5209284B2 (enrdf_load_stackoverflow)
KR (1) KR20100103473A (enrdf_load_stackoverflow)
WO (1) WO2009069526A1 (enrdf_load_stackoverflow)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5781371B2 (ja) * 2011-06-07 2015-09-24 三菱重工業株式会社 砥石工具の製造方法
GB201116305D0 (en) 2011-09-21 2011-11-02 Df & G Ltd Composition
GB201305217D0 (en) * 2013-03-21 2013-05-01 For Your Diamonds Only Ltd Cleaning method
DE102022211522A1 (de) 2022-10-31 2024-05-02 Robert Bosch Gesellschaft mit beschränkter Haftung Schleifelement, Schleifmittel und Verfahren zur Herstellung des Schleifelements und/oder des Schleifmittels

Family Cites Families (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3260582A (en) * 1961-08-10 1966-07-12 Norton Co Polishing and abrading materials
US3537121A (en) * 1968-01-17 1970-11-03 Minnesota Mining & Mfg Cleaning and buffing product
US3713795A (en) * 1971-06-04 1973-01-30 Ferro Corp Method of making diamond coated surface
US4240807A (en) * 1976-01-02 1980-12-23 Kimberly-Clark Corporation Substrate having a thermoplastic binder coating for use in fabricating abrasive sheets and abrasive sheets manufactured therewith
US4345545A (en) * 1980-07-28 1982-08-24 The Carborundum Company Apparatus for electron curing of resin coated webs
JPS5732749A (en) * 1980-08-06 1982-02-22 Toyota Motor Corp Rotary-atomizing electrostatic-coating device
JPH02185375A (ja) * 1989-01-07 1990-07-19 Speedfam Co Ltd 研磨テープの製造方法及び製造装置
JPH02232172A (ja) * 1989-03-06 1990-09-14 Speedfam Co Ltd 研磨部材の製造方法
US5152917B1 (en) * 1991-02-06 1998-01-13 Minnesota Mining & Mfg Structured abrasive article
JP3152968B2 (ja) * 1991-08-29 2001-04-03 科学技術振興事業団 研磨テープとその製造方法及び装置
US5681612A (en) * 1993-06-17 1997-10-28 Minnesota Mining And Manufacturing Company Coated abrasives and methods of preparation
JPH08243931A (ja) * 1995-03-07 1996-09-24 Nippon Micro Coating Kk 研磨シート及びその製造方法
US6007591A (en) * 1995-03-07 1999-12-28 Nihon Micro Coating Co., Ltd. Abrasive sheet and method for producing same
JPH09141547A (ja) * 1995-11-21 1997-06-03 Fuji Photo Film Co Ltd 超低反射光コネクターフェルールの研磨体
KR19990071956A (ko) * 1995-12-06 1999-09-27 이데미쓰 유지 시트상 재료의 표면의 평탄화법 및 그에 기초하는시트상 재료의 제조 방법
JPH1158205A (ja) * 1997-08-25 1999-03-02 Unique Technol Internatl Pte Ltd 電解研磨併用ポリシング・テクスチャー加工装置および加工方法ならびにそれに使用する電解研磨併用ポリシング・テクスチャーテープ
JP2001334473A (ja) * 2000-05-30 2001-12-04 Nihon Micro Coating Co Ltd 研磨シート及びその製造方法
US20020016139A1 (en) * 2000-07-25 2002-02-07 Kazuto Hirokawa Polishing tool and manufacturing method therefor
US8545583B2 (en) * 2000-11-17 2013-10-01 Wayne O. Duescher Method of forming a flexible abrasive sheet article
US7632434B2 (en) * 2000-11-17 2009-12-15 Wayne O. Duescher Abrasive agglomerate coated raised island articles
JP2002172563A (ja) * 2000-11-24 2002-06-18 Three M Innovative Properties Co 研磨テープ
JP2003071731A (ja) * 2001-09-03 2003-03-12 Three M Innovative Properties Co ディンプル構造の研磨材料
JP2003200353A (ja) * 2001-12-27 2003-07-15 Riken Diamond Industry Co Ltd 固定砥粒式の切断用工具及びその製造方法
US6841480B2 (en) * 2002-02-04 2005-01-11 Infineon Technologies Ag Polyelectrolyte dispensing polishing pad, production thereof and method of polishing a substrate
JP2003340730A (ja) * 2002-05-30 2003-12-02 Nippon Parkerizing Co Ltd 研磨布紙の製造方法及び装置
DE10261306B4 (de) * 2002-12-27 2010-02-25 Advanced Micro Devices, Inc., Sunnyvale Haltering mit reduzierter Abnutzungs- und Kontaminationsrate für einen Polierkopf einer CMP-Anlage und Polierkopf und CMP-Vorrichtung mit Haltering
US7232364B2 (en) * 2005-02-04 2007-06-19 3M Innovative Properties Company Abrasive cleaning article and method of making
JP5519507B2 (ja) * 2007-09-21 2014-06-11 キャボット マイクロエレクトロニクス コーポレイション アミノシランを用いて処理した研磨剤粒子を利用する研磨組成物および研磨方法
JP5207444B2 (ja) * 2007-11-22 2013-06-12 日本ミクロコーティング株式会社 研磨シート及び研磨シートの製造方法

Also Published As

Publication number Publication date
US20100293865A1 (en) 2010-11-25
JP5209284B2 (ja) 2013-06-12
WO2009069526A1 (ja) 2009-06-04
JP2009131909A (ja) 2009-06-18

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Legal Events

Date Code Title Description
PA0105 International application

Patent event date: 20100527

Patent event code: PA01051R01D

Comment text: International Patent Application

PG1501 Laying open of application
PC1203 Withdrawal of no request for examination
WITN Application deemed withdrawn, e.g. because no request for examination was filed or no examination fee was paid