WO2009069526A1 - 研磨シートおよび研磨シートの製造方法 - Google Patents

研磨シートおよび研磨シートの製造方法 Download PDF

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Publication number
WO2009069526A1
WO2009069526A1 PCT/JP2008/071082 JP2008071082W WO2009069526A1 WO 2009069526 A1 WO2009069526 A1 WO 2009069526A1 JP 2008071082 W JP2008071082 W JP 2008071082W WO 2009069526 A1 WO2009069526 A1 WO 2009069526A1
Authority
WO
WIPO (PCT)
Prior art keywords
abrasive sheet
abrasive
abrasion
base material
efficiently
Prior art date
Application number
PCT/JP2008/071082
Other languages
English (en)
French (fr)
Inventor
Nobuyoshi Watanabe
Kazunori Tani
Original Assignee
Nihon Microcoating Co., Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Microcoating Co., Ltd. filed Critical Nihon Microcoating Co., Ltd.
Priority to US12/744,551 priority Critical patent/US20100293865A1/en
Publication of WO2009069526A1 publication Critical patent/WO2009069526A1/ja

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D11/00—Constructional features of flexible abrasive materials; Special features in the manufacture of such materials
    • B24D11/001—Manufacture of flexible abrasive materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D18/00—Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for
    • B24D18/0054—Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for by impressing abrasive powder in a matrix

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Mechanical Engineering (AREA)
  • Polishing Bodies And Polishing Tools (AREA)

Abstract

　研磨シートの各研磨砥粒の切り刃出しと、各切り刃を揃えることと同時に研磨残渣を効率的に排出する研磨シートを提供する。基材４と、基材４の表面上に接着樹脂５により固着される単一粒子層を形成する砥粒３１～３３と、を備えてなる研磨シートであって、砥粒３１～３３が、それぞれ被研磨体に当接する先端部を同一平面状に揃えると共に、離間して分布することを特徴とする。本発明は、研磨傷を発生せず、かつ効率的に面粗さの良好な研磨が行える。
PCT/JP2008/071082 2007-11-28 2008-11-20 研磨シートおよび研磨シートの製造方法 WO2009069526A1 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
US12/744,551 US20100293865A1 (en) 2007-11-28 2008-11-20 Method of producing polishing sheet

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007-307730 2007-11-28
JP2007307730A JP5209284B2 (ja) 2007-11-28 2007-11-28 研磨シートおよび研磨シートの製造方法

Publications (1)

Publication Number Publication Date
WO2009069526A1 true WO2009069526A1 (ja) 2009-06-04

Family

ID=40678428

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/071082 WO2009069526A1 (ja) 2007-11-28 2008-11-20 研磨シートおよび研磨シートの製造方法

Country Status (4)

Country Link
US (1) US20100293865A1 (ja)
JP (1) JP5209284B2 (ja)
KR (1) KR20100103473A (ja)
WO (1) WO2009069526A1 (ja)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5781371B2 (ja) * 2011-06-07 2015-09-24 三菱重工業株式会社 砥石工具の製造方法
GB201116305D0 (en) 2011-09-21 2011-11-02 Df & G Ltd Composition
GB201305217D0 (en) * 2013-03-21 2013-05-01 For Your Diamonds Only Ltd Cleaning method
DE102022211522A1 (de) 2022-10-31 2024-05-02 Robert Bosch Gesellschaft mit beschränkter Haftung Schleifelement, Schleifmittel und Verfahren zur Herstellung des Schleifelements und/oder des Schleifmittels

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02185375A (ja) * 1989-01-07 1990-07-19 Speedfam Co Ltd 研磨テープの製造方法及び製造装置
JPH08243931A (ja) * 1995-03-07 1996-09-24 Nippon Micro Coating Kk 研磨シート及びその製造方法
JP2001334473A (ja) * 2000-05-30 2001-12-04 Nihon Micro Coating Co Ltd 研磨シート及びその製造方法

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US3537121A (en) * 1968-01-17 1970-11-03 Minnesota Mining & Mfg Cleaning and buffing product
US3713795A (en) * 1971-06-04 1973-01-30 Ferro Corp Method of making diamond coated surface
US4240807A (en) * 1976-01-02 1980-12-23 Kimberly-Clark Corporation Substrate having a thermoplastic binder coating for use in fabricating abrasive sheets and abrasive sheets manufactured therewith
US4345545A (en) * 1980-07-28 1982-08-24 The Carborundum Company Apparatus for electron curing of resin coated webs
JPS5732749A (en) * 1980-08-06 1982-02-22 Toyota Motor Corp Rotary-atomizing electrostatic-coating device
JPH02232172A (ja) * 1989-03-06 1990-09-14 Speedfam Co Ltd 研磨部材の製造方法
US5152917B1 (en) * 1991-02-06 1998-01-13 Minnesota Mining & Mfg Structured abrasive article
JP3152968B2 (ja) * 1991-08-29 2001-04-03 科学技術振興事業団 研磨テープとその製造方法及び装置
US5681612A (en) * 1993-06-17 1997-10-28 Minnesota Mining And Manufacturing Company Coated abrasives and methods of preparation
US6007591A (en) * 1995-03-07 1999-12-28 Nihon Micro Coating Co., Ltd. Abrasive sheet and method for producing same
JPH09141547A (ja) * 1995-11-21 1997-06-03 Fuji Photo Film Co Ltd 超低反射光コネクターフェルールの研磨体
TW346426B (en) * 1995-12-06 1998-12-01 Idemitsu Kosan Co Method of flattening surfaces of sheet material, and method of manufacturing sheet material on the basis of same
JPH1158205A (ja) * 1997-08-25 1999-03-02 Unique Technol Internatl Pte Ltd 電解研磨併用ポリシング・テクスチャー加工装置および加工方法ならびにそれに使用する電解研磨併用ポリシング・テクスチャーテープ
US20020016139A1 (en) * 2000-07-25 2002-02-07 Kazuto Hirokawa Polishing tool and manufacturing method therefor
US8545583B2 (en) * 2000-11-17 2013-10-01 Wayne O. Duescher Method of forming a flexible abrasive sheet article
US7632434B2 (en) * 2000-11-17 2009-12-15 Wayne O. Duescher Abrasive agglomerate coated raised island articles
JP2002172563A (ja) * 2000-11-24 2002-06-18 Three M Innovative Properties Co 研磨テープ
JP2003071731A (ja) * 2001-09-03 2003-03-12 Three M Innovative Properties Co ディンプル構造の研磨材料
JP2003200353A (ja) * 2001-12-27 2003-07-15 Riken Diamond Industry Co Ltd 固定砥粒式の切断用工具及びその製造方法
US6841480B2 (en) * 2002-02-04 2005-01-11 Infineon Technologies Ag Polyelectrolyte dispensing polishing pad, production thereof and method of polishing a substrate
JP2003340730A (ja) * 2002-05-30 2003-12-02 Nippon Parkerizing Co Ltd 研磨布紙の製造方法及び装置
DE10261306B4 (de) * 2002-12-27 2010-02-25 Advanced Micro Devices, Inc., Sunnyvale Haltering mit reduzierter Abnutzungs- und Kontaminationsrate für einen Polierkopf einer CMP-Anlage und Polierkopf und CMP-Vorrichtung mit Haltering
US7232364B2 (en) * 2005-02-04 2007-06-19 3M Innovative Properties Company Abrasive cleaning article and method of making
JP5519507B2 (ja) * 2007-09-21 2014-06-11 キャボット マイクロエレクトロニクス コーポレイション アミノシランを用いて処理した研磨剤粒子を利用する研磨組成物および研磨方法
JP5207444B2 (ja) * 2007-11-22 2013-06-12 日本ミクロコーティング株式会社 研磨シート及び研磨シートの製造方法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02185375A (ja) * 1989-01-07 1990-07-19 Speedfam Co Ltd 研磨テープの製造方法及び製造装置
JPH08243931A (ja) * 1995-03-07 1996-09-24 Nippon Micro Coating Kk 研磨シート及びその製造方法
JP2001334473A (ja) * 2000-05-30 2001-12-04 Nihon Micro Coating Co Ltd 研磨シート及びその製造方法

Also Published As

Publication number Publication date
JP5209284B2 (ja) 2013-06-12
KR20100103473A (ko) 2010-09-27
US20100293865A1 (en) 2010-11-25
JP2009131909A (ja) 2009-06-18

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