KR20100073540A - 반력상쇄장치 및 이를 구비한 페이스트 디스펜서 - Google Patents

반력상쇄장치 및 이를 구비한 페이스트 디스펜서 Download PDF

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Publication number
KR20100073540A
KR20100073540A KR1020080132245A KR20080132245A KR20100073540A KR 20100073540 A KR20100073540 A KR 20100073540A KR 1020080132245 A KR1020080132245 A KR 1020080132245A KR 20080132245 A KR20080132245 A KR 20080132245A KR 20100073540 A KR20100073540 A KR 20100073540A
Authority
KR
South Korea
Prior art keywords
support
reaction force
mass
mass body
head
Prior art date
Application number
KR1020080132245A
Other languages
English (en)
Korean (ko)
Inventor
방규용
서용규
Original Assignee
주식회사 탑 엔지니어링
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 주식회사 탑 엔지니어링 filed Critical 주식회사 탑 엔지니어링
Priority to KR1020080132245A priority Critical patent/KR20100073540A/ko
Priority to TW098137760A priority patent/TWI361253B/zh
Priority to JP2009259207A priority patent/JP5065359B2/ja
Priority to CN200910223781XA priority patent/CN101758007B/zh
Publication of KR20100073540A publication Critical patent/KR20100073540A/ko

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
    • B23Q1/38—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members using fluid bearings or fluid cushion supports
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/18—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form
    • G05B19/404—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by control arrangements for compensation, e.g. for backlash, overshoot, tool offset, tool wear, temperature, machine construction errors, load, inertia

Landscapes

  • Engineering & Computer Science (AREA)
  • Coating Apparatus (AREA)
  • Human Computer Interaction (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Mechanical Engineering (AREA)
  • Liquid Crystal (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Details Of Measuring And Other Instruments (AREA)
  • Automatic Analysis And Handling Materials Therefor (AREA)
KR1020080132245A 2008-12-23 2008-12-23 반력상쇄장치 및 이를 구비한 페이스트 디스펜서 KR20100073540A (ko)

Priority Applications (4)

Application Number Priority Date Filing Date Title
KR1020080132245A KR20100073540A (ko) 2008-12-23 2008-12-23 반력상쇄장치 및 이를 구비한 페이스트 디스펜서
TW098137760A TWI361253B (en) 2008-12-23 2009-11-06 Apparatus for offsetting reaction force and paste dispenser having the same
JP2009259207A JP5065359B2 (ja) 2008-12-23 2009-11-12 反力相殺装置及びそれを備えたペーストディスペンサー
CN200910223781XA CN101758007B (zh) 2008-12-23 2009-11-19 抵消反作用力的设备和具有该设备的涂胶机

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020080132245A KR20100073540A (ko) 2008-12-23 2008-12-23 반력상쇄장치 및 이를 구비한 페이스트 디스펜서

Publications (1)

Publication Number Publication Date
KR20100073540A true KR20100073540A (ko) 2010-07-01

Family

ID=42489482

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020080132245A KR20100073540A (ko) 2008-12-23 2008-12-23 반력상쇄장치 및 이를 구비한 페이스트 디스펜서

Country Status (4)

Country Link
JP (1) JP5065359B2 (ja)
KR (1) KR20100073540A (ja)
CN (1) CN101758007B (ja)
TW (1) TWI361253B (ja)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101502786B1 (ko) * 2012-12-17 2015-03-17 주식회사 프로텍 Ｔｆｔ ｌｃｄ 패널 제조 장치

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0529442A (ja) * 1991-07-18 1993-02-05 Toshiba Corp テ−ブル装置
JP3920514B2 (ja) * 1999-12-20 2007-05-30 東京エレクトロン株式会社 塗布膜形成装置
JP2005331402A (ja) * 2004-05-20 2005-12-02 Sumitomo Heavy Ind Ltd ステージ装置
JP4130837B2 (ja) * 2006-06-16 2008-08-06 住友重機械工業株式会社 ステージ用反力処理装置

Also Published As

Publication number Publication date
JP2010149107A (ja) 2010-07-08
TWI361253B (en) 2012-04-01
CN101758007B (zh) 2012-07-04
TW201040408A (en) 2010-11-16
JP5065359B2 (ja) 2012-10-31
CN101758007A (zh) 2010-06-30

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