KR20100073540A - Apparatus for offsetting reaction force and paste dispenser having the same - Google Patents

Abstract

PURPOSE: A reaction force offsetting apparatus and a paste dispenser with the same are provided to offset reaction force generated by the motion of a moving object although a transfer system moves in the direction which is different with the motion direction of the moving object. CONSTITUTION: A reaction force offsetting apparatus(80) comprises a mass body(812), a returning mechanism(813), and a transmitting member(814). The mass body is connected to a supporting body(92). The mass body moves in the direction, which is the same as the motion direction of a moving object, by reaction force generated by the motion of the moving body. When the mass body is moved, the restoring tool restores the mass body to the initial position. The transmitting member is slidably installed to the moving object supporter(91). The support body and the mass body are combined so that the transmitting member can transmits the power, transmitted to the support body, to the mass body.

Description

Reaction force offset device and paste dispenser having same {APPARATUS FOR OFFSETTING REACTION FORCE AND PASTE DISPENSER HAVING THE SAME}

The present invention relates to a device for applying to the transfer system to cancel the reaction force generated by the movement of the moving body.

In the manufacturing process of various flat panel displays (FPDs) including liquid crystal displays (LCDs), transfer systems such as robots and cranes that transfer objects such as substrates, liquid discharge nozzles or nozzle transfer devices are applied. It is becoming.

Such a conveying system includes a movable body support, a support supported on the movable body support, and a movable body provided on the support and moving in one direction, and has a structure for moving the movable body for a predetermined purpose.

In the operation of the transport system, vibration occurs in the transport system due to the reaction force generated by the movement of the moving body, and there is a problem in that the precision of the work is deteriorated by the vibration caused by the reaction force.

In order to reduce such vibration, a method of applying a reaction force offset device to a transport system is being considered. For example, Korean Unexamined Patent Publication No. 10-2005-0003426 (name of the invention: a conveying force transmission system) also discloses a technique related to a reaction force offset device.

However, since the conventional reaction force offset device including the disclosed patent is disposed and fixed separately from the transfer system, when the transfer system including the movable body is moved in a direction other than the moving direction of the movable body, for example, the moving direction of the movable body If the X-axis direction and the movement direction of the feed system is the Y-axis direction, there is a problem that such a reaction force canceling device is not applicable.

In addition, the conventional reaction force offset device is disposed separately from the transport system has a problem that its configuration and installation is very complicated.

The present invention is to solve the above problems of the prior art, an object of the present invention is to transfer the reaction force generated by the movement of the moving body of the transfer system to the mass moving in the same direction as the moving direction of the moving body and to move the mass body By canceling and converting to the driving energy for the reaction, not only the configuration can be simplified, but also the reaction force canceling device that can cancel the reaction force generated by the movement of the movable body even when the transfer system is moved in a direction other than the moving direction of the movable body. Is in providing.

It is also an object of the present invention to provide a paste dispenser having a reaction force canceling device as described above.

Reaction force canceling apparatus according to the present invention for achieving the above object is installed in a transport system consisting of a support, a moving body moving on the support, and a moving body support on which the support is slidably supported, connected to the support to The mass body moved in the same direction as the moving direction of the moving body by the reaction force generated by the movement, the restoring mechanism for restoring the mass body to its initial position when the mass body is moved, and the support body and the mass body are slidably installed on the movable body support. It may be configured to include a transmission member connected to the mass generated by the movement of the moving body to be connected to the support.

Here, the transmission member may be made of a closed loop structure surrounding the moving body support, and the friction member for preventing friction between the inner surface of the transmission member and the outer peripheral surface of the moving body support is provided between the transmission member and the moving body support. desirable.

In addition, the paste dispenser according to the present invention includes a head support, a head unit which is installed to be movable on the head support, a stator slidably connected to the head support so as to move the head unit in the longitudinal direction of the head support, and A head moving device including a mover mounted on the head unit, a mass body connected to the stator and moved in the same direction as the moving direction of the mover by the reaction force generated by the movement of the head unit and the mover; It can be configured to include a restoring mechanism for restoring the initial position and a transmission member slidably installed in the head support and connecting the stator and the mass body to transfer the force generated by the movement of the mover to the mass body. have.

Here, the transmission member may be made of a closed loop structure surrounding the head support, it is preferred that a friction preventing mechanism for preventing friction between the inner surface of the transmission member and the outer peripheral surface of the head support between the transmission member and the head support. .

In addition, the paste dispenser according to the present invention is mounted on a support frame on which the head support on which the head unit is installed is supported, and a stator and a head support slidably connected to the support frame to move the head support in the longitudinal direction of the support frame. A support moving device including a mover, a mass body connected to the stator and moved in the same direction as the moving direction of the mover by the reaction force generated by the movement of the head support and the mover; And a restoring mechanism for slidably installed on the support frame, and including a transmission member connecting the stator and the mass to transfer the force transmitted by the mover to the mass. It can be configured to include.

Here, the transmission member may be made of a closed loop structure surrounding the support frame, and between the transmission member and the support frame is preferably provided with a friction preventing mechanism for preventing friction between the inner surface of the transmission member and the outer peripheral surface of the support frame. .

The reaction force canceling device according to the present invention can transfer the reaction force generated by the movement of the moving body to the mass moving in the same direction as the moving direction of the moving body and convert it into driving energy for moving the mass, thereby canceling the configuration. You can.

In addition, the reaction force generated by the movement of the moving body is converted into driving energy for moving the support, converted into driving energy for sliding the transfer member, and converted into driving energy for moving the mass body. Since it can be offset, there is an effect that can effectively exhibit the reaction force offset performance by the multiple complex reaction force offset effect. In addition, when all of the transmission member, the mass body, and the restoring mechanism are connected to the movable support, there is an effect that can cancel the reaction force generated by the movement of the movable body even when the transfer system is moved in a direction other than the moving direction of the movable body. .

In addition, the reaction force canceling apparatus according to the present invention includes a transmission member slidably installed on the movable body support, and transfers the reaction force of the movable body to the mass through the slide movement of the transmitting member, thereby transmitting the reaction force of the movable body to the mass body. There is an effect that can reduce the occurrence of shock or vibration in the.

In addition, when the reaction force offset device is applied to the head support of the paste dispenser, the reaction force generated by the movement of the head unit and the mover is transferred to the mass moving in the same direction as the moving direction of the mover, and used as driving energy for moving the mass. Since it can be canceled by converting, not only the configuration can be simplified, but also the reaction force generated by the movement of the head unit can be canceled even when the head support is moved vertically in the direction in which the head unit is moved. It works. In addition, since the reaction force generated by the movement of the head unit and the mover can be canceled through conversion into driving energy for sliding the transfer member and conversion into driving energy for moving the mass body, such multiple There is an effect that can effectively exhibit the reaction force offset performance by the complex reaction force offset effect.

In addition, when the reaction force offset device is applied to the support frame of the paste dispenser, the reaction force generated by the movement of the head support and the mover is transferred to the mass moving in the same direction as the moving direction of the mover, and used as driving energy for moving the mass. Since it can cancel by converting, there exists an effect which can simplify the structure. In addition, since the reaction force generated by the movement of the head support and the mover can be canceled through conversion into driving energy for sliding the transfer member and conversion into driving energy for moving the mass body, such multiple There is an effect that can effectively exhibit the reaction force offset performance by the complex reaction force offset effect.

Hereinafter, a reaction force offset device according to the present invention will be described with reference to the accompanying drawings.

1 is a schematic view showing a reaction force offset device according to the present invention.

As shown in FIG. 1, the reaction force canceling device 80 according to the present invention is installed in a transfer system 90 in which a moving object 93 is moved for a predetermined purpose, and is moved by the movement of the moving object 93. It may be configured to include a reaction force canceling unit 81 to cancel the generated reaction force. Here, the transfer system 90 may include a support 92 on which the movable body 93 is movably supported, and a movable body support 91 on which the support 92 is slidably supported.

The reaction force canceling unit 81 is connected to the support body 92, and moves the mass body 812 and the mass body 812 that are moved in the same direction as the moving direction of the mobile body 93 by the reaction force generated by the movement of the mobile body 93. It may be configured to include a restoration mechanism 813 for restoring the mass 812 to the initial installation position when the mass 812 is moved in connection with one or both sides of the).

By such a configuration, the reaction force generated by the movement of the movable body 93 is transmitted to the support body 92 to move the support body 92, and the force for moving the support body 92 is transmitted to the mass body 812, The force transmitted to the mass 812 is converted into energy for moving the mass 812 and canceled out.

The reaction force canceling unit 81 transfers the force generated by the movement of the movable body 93 to the support body 92 to the mass body 812 that is moved in the same direction as the moving direction of the movable body 93. The transmission member is slidably installed on the support 91 and connects the support body 92 and the mass body 812 to transfer the force generated by the movement of the movable body 93 to the support body 92 to the mass body 812. 814.

The transmission member 814 may be formed in a closed loop structure surrounding the outer circumference of the movable support 91, and for example, may be formed of a belt, a chain or a rope.

As shown in FIG. 1, the support body 92 is coupled to the upper side of the transfer member 814, and the mass body 812 is coupled to the bottom side of the transfer member 814, thereby supporting the support body 92 and the mass body ( 812 is connected via a transfer member 814. However, the present invention is not limited to the direction shown in FIG. 1, and the support body 92 is coupled to one side of the transfer member 814 based on the movable support 91, and the mass body to the other side of the transfer member 814. A configuration in which 812 is combined can be applied.

Therefore, when the support member 92 is moved by the force generated by the movement of the movable body 93 and transmitted to the support member 92, the transmission member 814 is slidably moved in the circumferential direction of the movable body support member 91. By the slide movement of the member 814, the mass body 812 is moved in the same direction as the moving direction of the moving body 93. Through this process, the reaction force generated by the movement of the moving body 93 is changed into driving energy for moving the support body 92, driving energy for moving the transmission member 814, and driving energy for moving the mass body 812. To be destroyed.

As described above, the transmission member 814 slides on the outer circumferential surface of the movable body support 91, and serves to transmit the reaction force generated by the movement of the movable body 93 transferred to the support 92 to the mass body 812. The transfer of the force through the slide movement of the transfer member 814, as compared with the transfer of the force by the other link structure connecting the support 92 and the mass 812, may occur in the process of force transfer Vibration, shock and noise can be minimized.

Here, to minimize the friction between the inner surface of the transfer member 814 and the outer surface of the movable body support 91 that may occur in the slide movement process with respect to the outer peripheral surface of the movable body support 91 of the transfer member 814, The friction preventing mechanism 97 is preferably provided between the transmission member 814 and the movable support 91. As the anti-friction mechanism 97, for example, a ball bearing, a roller bearing, a roller or a housing in which friction oil is accommodated therein, and various configurations capable of preventing vibration transmission and friction between the transmission member 814 and the movable support 91. This can be applied.

The mass body 812 has a sufficiently large mass compared to the masses of the support body 92 and the movable body 93, and the reaction force generated by the movement of the movable body 93 is transferred to the mass body through the support body 92 and the transmission member 814. When transferred to 812 to move the mass 812, even a small amount of movement of the mass 812 can sufficiently cancel the reaction force generated by the movement of the movable body 93.

The restoring mechanism 813 serves to restore the mass body 812 to an initial installation position when the mass body 812 moves due to the reaction force generated by the movement of the moving body 93. ) May be applied to various configurations that can impart a predetermined restoring force to the mass body 812 such as an elastic coil spring, a leaf spring, or a hydraulic or pneumatic damper connected to the mass body 812.

When the moving object 93 moves on the support body 92 by such a configuration, reaction forces in a direction opposite to the moving direction of the moving object 93 are generated. The reaction force is partially transmitted to the support body 92. It is converted into driving energy for moving the support body 92 and is extinguished. The other part is transferred to the transmission member 814 through the support body 92 to move the transmission member 814 with respect to the outer circumferential surface of the movable support 91. The other part is converted to the driving energy for extinguishing, and the other part is transferred to the mass body 812 through the transmission member 814, and is converted into the driving energy for moving the mass body 812 and then extinguished. In this case, the mass of the mass 812 is sufficiently large as compared with the masses of the support body 92 and the moving body 93, so that the mass of the mass 812 is small.

On the other hand, after the mass 812 is moved by the force transmitted to the mass 812, the mass 812 is returned to the initial installation position by the restoring force of the restoring mechanism 813. At this time, when the restoring force of the restoring mechanism 813 is transmitted to the transmission member 814 having the closed loop structure through the mass body 812, the transmission member 814 is slid to the movable body support 91, and thus, the transmission is performed. Support 92 coupled to member 814 may also be returned to its initial position.

As described above, in the reaction force canceling device according to the present invention, the support 92 can also be returned to the initial position together with the mass 812 through the slide movement of the transfer member 814 having the closed loop structure. ) Does not require a separate configuration for returning to the initial position.

The reaction force canceling device 80 according to the present invention as described above transfers the reaction force generated by the movement of the moving object 93 to the mass body 812 through the slide movement of the transmission member 814, and transfers the mass body 812. Since the reaction force can be canceled by moving in the same direction as the moving direction of the moving object 93, the configuration of the reaction force system can be simplified. In addition, the reaction force generated by the movement of the moving object 93 can be converted into drive energy for moving the support body 92 and extinguished, and can be converted to drive energy for sliding the transfer member 814 and extinguished. In addition, since the mass body 812 can be converted into a driving energy for moving, it can be extinguished. Thus, the reaction force canceling performance can be efficiently exhibited by such multiple complex reaction force canceling effects. In addition, when all of the transmission member 814, the mass body 812, and the restoring mechanism 813 are connected to the movable body support 91, the transfer system 90 provided with the reaction force canceling unit 81 moves the movable body 93. In the case of moving in a direction other than the direction, there is an effect that can cancel the reaction force due to the movement of the moving object (93).

In addition, the reaction force canceling device 80 according to the present invention includes a transmission member 814 slidably installed on the movable body support 91, and the reaction force of the movable body 93 through the slide movement of the transmission member 814. Since it is transmitted to the mass body 812, shock or vibration is generated in the process of transmitting the reaction force of the movable body 93 to the mass body 812, as compared with the support body 92 and the mass body 812 in a complicated link structure. There is an effect that can be minimized.

The reaction force offset device 80 configured as described above and having an action effect can be applied to various transport systems such as cranes, robots, and FPD manufacturing equipment. Hereinafter, a case in which the reaction force canceling device 80 according to the present invention is applied to a paste dispenser will be described.

2 is a perspective view showing a paste dispenser having a reaction force canceling device 80 according to the present invention, Figure 3 is a perspective view showing a head unit of the paste dispenser of FIG.

As shown in FIG. 2, the paste dispenser according to the present invention includes a base frame 10, a stage 11 fixed to the base frame 10 and a substrate 20 seated thereon, and both sides of the stage 11. On the pair of support frames 40 installed in the Y-axis direction, and supported on the pair of support frames 40 and extending in the X-axis direction to the head support 50 and the head support 50. A plurality of head units 60 to be installed, a head moving device 70 for installing the head unit 60 to the head support 50 and horizontally moving the head unit 60 in the X-axis direction; 60 and the control unit (not shown) for controlling the operation of the head moving device 70 can be configured.

The base frame 10 may be provided with a stage driving device (not shown) for moving the stage 11 in the front-rear direction (Y-axis direction) of the base frame 10, and the head support 50 has a head support 50. ) May be provided with a support for moving the device 30 to move along the support frame (40). The head support 50 may be provided in plural so as to improve the productivity of the paste pattern formation when the substrate 20 has a large area.

As shown in FIG. 3, the head unit 60 includes a syringe 61 filled with a paste, a nozzle 62 communicating with the syringe 61 and discharged from the paste, and adjacent to the nozzle 62. Laser displacement sensor 63 for measuring gap data between the nozzle 62 and the substrate 20, and a Y-axis driving portion 64 for moving the nozzle 62 and the laser displacement sensor 63 in the Y-axis direction; , Z-axis driving unit 65 for moving the nozzle 62 and the laser displacement sensor 63 in the Z-axis direction. Here, the laser displacement sensor 63 is composed of a light emitting unit 631 for emitting a laser, and a light receiving unit 632 spaced apart from the light emitting unit 631 at a predetermined interval to receive the laser reflected from the substrate 20. And outputs an electric signal according to an imaging position of the laser reflected by the light emitting unit 631 to the controller to measure the gap data between the substrate 20 and the nozzle 62. .

In addition, the head unit 60 may be provided with a cross-sectional area sensor 66 for measuring the cross-sectional area of the paste pattern (P) applied to the substrate. The cross-sectional area sensor 66 measures the cross-sectional area of the paste pattern P by continuously emitting a laser to the substrate 20 and scanning the paste pattern P. The cross-sectional area data of the paste pattern P measured from the cross-sectional area sensor 66 is used to determine whether the paste pattern P is defective.

Hereinafter, an embodiment in which the reaction force canceling device 80 according to the present invention is applied to the head support 50 of the paste dispenser will be described.

4 is a cross-sectional view of the head support 50 of the paste dispenser according to the present invention, showing a configuration in which the reaction force offset device 80 is applied to the head support 50.

As shown in Figure 4, the head support 50 is connected to the head unit 60 through the head moving device 70. The head moving device 70 is configured to include a stator 71 extending in the longitudinal direction of the head support 50 and a mover 72 mounted to the head unit 60. Accordingly, the head unit 60 may be moved in the X-axis direction, that is, in the longitudinal direction of the head support 50 by the electromagnetic interaction between the stator 71 and the mover 72.

The reaction force canceling device 80 is a mass body 812 which is generated by the movement of the head unit 60 and the mover 72 and moves the force acting on the stator 71 in the same direction as the moving direction of the mover 72. It may be configured to include a reaction force canceling unit 81 for transmitting to the), and converts and extinguishes the driving energy for moving the mass body 812. The reaction force canceling unit 81 is connected to the stator 71 and the mass moves in the same direction as the moving direction of the mover 72 by the reaction force generated by the movement of the head unit 60 and the mover 72. 812 and a restoring mechanism 813 for restoring the mass 812 to an initial installation position when the mass 812 is moved.

The reaction force canceling unit 81 is slidably mounted to the head support 50 in order to transfer the force transmitted to the stator 71 to the mass body 812 which is moved in the same direction as the moving direction of the mover 72. And a transmission member 814 which connects the stator 71 and the mass body 812 and is generated by the movement of the mover 72 to transmit the force transmitted to the stator 71 to the mass body 812. Can be.

Here, the stator 71 is coupled to one side of the transmission member 814 based on the head support 50, and the mass body 812 is coupled to the other side of the transmission member 814. The transmission member 814 is a closed loop structure surrounding the outer circumference of the head support 50, and may be formed of, for example, a belt, a chain, or a rope.

The mass body 812 has a sufficiently large mass compared to the masses of the head unit 60, the stator 71, and the mover 72, and the reaction force generated by the movement of the head unit 60 and the mover 72. When the mass body 812 is transferred to the mass body 812 through the stator 71 and the transmission member 814, the movement of the movable element 72 occurs even with the small amount of mass 812 moving. It is possible to sufficiently offset the reaction force.

It is preferable that a friction preventing mechanism 97 is provided between the transmission member 814 and the head support 50 to prevent friction between the inner surface of the transmission member 814 and the outer circumferential surface of the movable support 91. As the anti-friction mechanism 97, for example, a ball bearing, a roller bearing, a roller or a housing in which friction oil is accommodated therein, and various configurations capable of preventing vibration transmission and friction between the transmission member 814 and the head support 50. This can be applied.

In the embodiment of the present invention, a configuration in which the mass body 812 is disposed inside the head support 50 is shown, but a configuration in which the mass body 812 is disposed outside the head support 50 may be applied.

The restoring mechanism 813 serves to restore the mass body 812 to the initial installation position when the mass body 812 is moved by the reaction force generated by the movement of the head unit 60 and the stator 71. In addition, the restoring mechanism 813 may be applied to various configurations that may impart a predetermined restoring force to the mass body 812 such as an elastic coil spring, a leaf spring, or a hydraulic or pneumatic damper connected to the mass body 812.

When the mover 72 and the head unit 60 move on the stator 71 by such a configuration, reaction forces in a direction opposite to the moving direction of the mover 72 are generated. A part is transferred to the stator 71 and converted to drive energy for moving the stator 71 and is extinguished. The other part is transferred to the transfer member 814 through the stator 71 to slide the transfer member 814. The other part is converted to the driving energy for extinguishing, and the other part is transferred to the mass body 812 through the transmission member 814, and is converted into the driving energy for moving the mass body 812 and then extinguished. In this case, the mass of the mass 812 is sufficiently large as compared with the masses of the stator 71, the mover 72, and the head unit 60, so that the mass of the mass 812 is small. On the other hand, after the mass body 812 is moved by the force transmitted to the mass body 812, the mass body 812 is returned to the initial installation position by the restoring mechanism 813, and at the same time, the stator 71 is also initialized. Return to the position of.

The paste dispenser according to the present invention as described above is a head support for the reaction force generated by the movement of the head unit 60 and the mover 72 to the head support 50 to which the head unit 60 is movably supported. Reaction force which transfers to the mass body 812 through the transmission member 814 slidably installed in the 50, and cancels the reaction force by moving the mass body 812 in the same direction as the moving direction of the mover 72 Since the offset device 80 is provided, not only the configuration can be simplified, but also caused by the movement of the head unit 60 and the mover 72 even when the head support 50 moves in the Y-axis direction. There is an effect that can counteract the reaction. In addition, the reaction force generated by the movement of the head unit 60 and the mover 72 can be converted into drive energy for moving the stator 71 to be extinguished, and the drive for sliding the transfer member 814. It can be converted into energy and extinguished, and can be converted into drive energy for moving the mass body 812 and then extinguished. Therefore, the effect of effectively counteracting the offset performance by multiple complex reaction force canceling effects can be obtained. have.

In addition, since the paste dispenser according to the present invention can transmit the reaction force generated by the movement of the head unit 60 and the mover 70 to the mass body 812 through the slide movement of the transfer member 814, the reaction force It is possible to reduce the occurrence of shock or vibration during the transmission and cancellation of the.

Hereinafter, an embodiment in which the reaction force canceling device 80 according to the present invention is applied to the support frame 40 of the paste dispenser will be described.

5 is a cross-sectional view of the support frame 40 of the paste dispenser according to the present invention, showing a configuration in which the reaction force offset device 80 is applied to the support frame 40.

As shown in FIG. 5, the head support 50 is connected to the support frame 40 through the support movement device 30. The support movement device 30 is configured to include a stator 31 extending in the longitudinal direction of the support frame 40, and a mover 32 mounted to the head support (50). Accordingly, the head support 50 may be moved in the Y-axis direction, that is, in the longitudinal direction of the support frame 40 by the electromagnetic interaction between the stator 31 and the mover 32.

The reaction force offset device 80 is generated by the movement of the head support 50 and the mover 32 to convert the direction of action of the force acting on the stator 31 in the same direction as the move direction of the mover 32. It may be configured to include a reaction force canceling unit 81 to be transferred to the mass 812 to be moved, converted to a driving energy for moving the mass 812 to disappear. The reaction force canceling unit 81 is connected to the stator 31 and moves in the same direction as the moving direction of the mover 32 by the reaction force generated by the movement of the head support 50 and the mover 32. 812 and a restoring mechanism 813 for restoring the mass 812 to an initial installation position when the mass 812 is moved.

The reaction force canceling unit 81 is slidably mounted to the support frame 40 in order to transfer the force transmitted to the stator 31 to the mass body 812 that is moved in the same direction as the moving direction of the movable element 32. And a transmission member 814 that connects the stator 31 and the mass body 812 and is generated by the movement of the mover 32 to transmit the force transmitted to the stator 31 to the mass body 812. Can be.

Based on the support frame 40, the stator 31 is coupled to one side of the transmission member 814, and the mass body 812 is coupled to the other side of the transmission member 814. The transmission member 814 is a closed loop structure surrounding the outer circumference of the support frame 40, and may be formed of, for example, a belt, a chain or a rope.

The mass body 812 has a sufficiently large mass compared to the mass of the head support 50, the stator 31, and the mover 32, and the reaction force generated by the movement of the head support 50 and the mover 32. When the mass body 812 is transferred to the mass body 812 through the stator 31 and the transmission member 814, the movement of the mover 32 occurs even with a small amount of movement of the mass body 812. It is possible to sufficiently offset the reaction force.

Between the transmission member 814 and the support frame 40 is preferably provided with an anti-friction mechanism 97 to prevent friction between the inner surface of the transmission member 814 and the outer peripheral surface of the support frame 40. As the anti-friction mechanism 97, for example, a ball bearing, a roller bearing, a roller or a housing having a friction oil contained therein, such as a vibration transmission and friction between the transmission member 814 and the support frame 40, etc. The configuration can be applied.

In the embodiment of the present invention, a configuration in which the mass body 812 is disposed in the internal space of the support frame 40 is presented, but a configuration in which the mass body 812 is disposed on one side of the support frame 40 may be applied.

The restoring mechanism 813 serves to restore the mass 812 to an initial installation position when the mass 812 is moved by the reaction force generated by the movement of the head support 50 and the stator 31. In addition, the restoring mechanism 813 may be applied to various configurations that may impart a predetermined restoring force to the mass body 812 such as an elastic coil spring, a leaf spring, or a hydraulic or pneumatic damper connected to the mass body 812.

When the mover 32 and the head support 50 move on the stator 31 by such a configuration, reaction forces in a direction opposite to the moving direction of the mover 32 are generated. Is transferred to the stator 31 is converted into drive energy for moving the stator 31 is extinguished, and the other part is transferred to the transfer member 814 through the stator 31 to slide the transfer member 814 Is converted to drive energy for extinction, and another part is transferred to the mass body 812 through the transfer member 814 and converted to drive energy for moving the mass body 812 and then extinguished. In this case, the mass of the mass 812 is sufficiently large as compared with the masses of the stator 31, the mover 32 and the head support 50, so that the mass of the mass 812 is small. On the other hand, after the mass 812 is moved by the force transmitted to the mass 812, the mass 812 is returned to the initial installation position by the restoring mechanism 813, and at the same time, the stator 31 is also initially initialized. Return to the position of.

The paste dispenser according to the present invention as described above supports the reaction force generated by the movement of the head support 50 and the mover 32 to the support frame 40 to which the head support 50 is movable. A reaction force offset to cancel the reaction force by transferring the transmission member 814 slidably installed to the mass 40 to the mass body 812 and moving the mass body 812 in the same direction as the moving direction of the mover 32. Since the device 80 is provided, there is an effect that can simplify the configuration. In addition, the reaction force generated by the movement of the head support 50 and the mover 32 can be converted into drive energy for moving the stator 31 to be extinguished, and the drive for sliding the transfer member 814. It can be converted into energy and extinguished, and can be converted into drive energy for moving the mass body 812 and then extinguished. Therefore, the reaction force canceling performance can be efficiently exhibited by such multiple complex reaction force canceling effects. .

In addition, since the paste dispenser according to the present invention can transmit the reaction force generated by the movement of the head support 50 and the mover 32 to the mass body 812 through the slide movement of the transfer member 814, the reaction force It is possible to reduce the occurrence of shock or vibration during the transmission and cancellation of the.

The technical idea described in each embodiment of the present invention may be implemented independently, or may be implemented in combination with each other.

In addition, the reaction force canceling device 80 according to the present invention can be applied to a plurality of devices for moving the components in the paste dispenser, such as a stage driving device for moving the stage 11, in addition to the configuration described in the above-described embodiment.

As described above, the present invention has been described through the embodiments described in the drawings and the detailed description of the present invention, which is merely exemplary, and various modifications and equivalent other embodiments of the present invention may be made by those skilled in the art. Yes it is possible. Accordingly, the technical scope of the present invention should be determined by the appended claims.

1 is a schematic view showing a reaction force offset device according to the present invention.

2 is a perspective view showing a paste dispenser according to the present invention.

3 is a perspective view illustrating a head unit of the paste dispenser of FIG. 2.

4 is a cross-sectional view of the head support of the paste dispenser provided with a reaction force cancellation device according to the present invention.

5 is a cross-sectional view of the support frame of the paste dispenser is installed with a reaction force cancellation device according to the present invention.

*** Explanation of symbols of main part of drawing ***

10: Baseframe 11: Stage

20: substrate 30: support for moving the device

40: support frame 50: head support

60: head unit 70: head moving device

80: reaction force offset device 814: transmission member

812: mass 813: restoring mechanism

91: mobile support 92: support

93: moving body 97: friction preventing mechanism

Claims (9)

It is installed in a transport system consisting of a movable body support, a support slidably supported on the movable body support, and a movable body moved on the support, A mass body connected to the support and moved in the same direction as the movement direction of the movable body by reaction force generated by the movement of the movable body; A restoring mechanism for restoring the mass to an initial position when the mass is moved; And Slidably installed on the movable support, the support and the mass is coupled to the reaction force offset device comprising a transfer member for transmitting the force generated by the movement of the movable body transferred to the support to the mass. The method of claim 1, The transmission member is a reaction force offset device, characterized in that consisting of a closed loop structure surrounding the movable support. The method according to claim 1 or 2, And a friction preventing mechanism for preventing friction between an inner surface of the transfer member and an outer circumferential surface of the movable support between the transfer member and the movable support. Head support; A head unit installed to be movable on the head support; A head moving device including a stator slidably connected to the head support so as to move the head unit in the longitudinal direction of the head support, and a mover mounted to the head unit; And A mass body connected to the stator and moved in the same direction as the moving direction of the movable body by reaction force generated by the movement of the head unit and the movable body, and restoring the mass body to an initial position when the mass body is moved; A reaction force offset device comprising a mechanism and a slide member slidably installed on the head support and including a stator and the mass body coupled to each other to transfer the force transmitted by the stator to the mass body. Paste dispenser comprising a. The method of claim 4, wherein The transfer member is a paste dispenser, characterized in that the closed loop structure surrounding the head support. The method according to claim 4 or 5, Paste dispenser, characterized in that the friction preventing mechanism for preventing the friction between the inner surface of the transfer member and the outer peripheral surface of the head support between the transfer member and the head support. A support frame on which the head support on which the head unit is installed is supported; A support moving apparatus including a stator slidably connected to the support frame to move the head support in the longitudinal direction of the support frame, and a mover mounted to the head support; And A mass body connected to the stator and moved in the same direction as the moving direction of the movable body by reaction force generated by the movement of the head support and the movable body, and restoring the mass body to an initial position when the mass body is moved; A reaction force offset device comprising a mechanism and a slide member slidably installed in the support frame and including a stator and the mass body coupled to each other to transfer the force generated by the movement of the mover to the mass body. Paste dispenser comprising a. The method of claim 7, wherein The transfer member is a paste dispenser, characterized in that the closed loop structure surrounding the support frame. 9. The method according to claim 7 or 8, Paste dispenser, characterized in that the friction preventing mechanism for preventing the friction between the inner surface of the transmission member and the outer peripheral surface of the support frame between the transfer member and the support frame.

Images