JP2010149107A - Reaction force offset apparatus and paste dispenser equipped with the same - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a reaction force offset apparatus which simplifies the construction of a reaction force system and also offsets the reaction force generated by the transfer of a movable body even when the transfer system is transferred in another direction than the transferring direction of the movable body. <P>SOLUTION: The reaction force offset apparatus is mounted on the transfer system composed by a movable body fulcrum, a support that is supported on the movable body fulcrum to be slidable, and the movable body that is transferred on the support. The apparatus includes: a mass object which is connected with the support and is transferred in the same direction as the transferring direction of the movable body by the reaction force generated by the transfer of the movable body; a renaturation mechanism that renatures the mass object to the original position when the mass object is transferred; and a transmitting member which is installed on the movable body fulcrum to be slidable and transmits the force that is generated by the transfer of the movable body by binding the support with the mass object to the mass object and that has been transmitted to the support. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention is applied to a transfer system, and relates to an apparatus for canceling a reaction force generated by movement of a moving body.

  In the manufacturing process of flat panel displays (FPDs) including liquid crystal displays (LCDs), transfer systems such as robots and cranes that transfer objects such as substrates, nozzles for liquid discharge or nozzle transfer devices Has been applied.

  Such a transfer system includes a moving body support base, a support body supported on the mobile body support base, and a mobile body provided on the support body and moving in one side direction. It is configured to move for the purpose.

  In the operation process of the transfer system, a vibration is generated in the transfer system due to the reaction force generated by the movement of the moving body, and there is a problem that the precision of work is inferior due to the vibration due to the reaction force.

  In order to reduce such vibration, a method of applying a reaction force canceling device to the transfer system is considered. For example, Patent Document 1 discloses a technique related to a reaction force canceling apparatus.

  However, since the conventional reaction force canceling device including the above-mentioned Patent Document 1 is arranged and fixed separately from the transfer system, the transfer system including the moving body is moved in another direction other than the moving direction of the moving body. For example, when the moving direction of the moving body is the X-axis direction and the moving direction of the transfer system is the Y-axis direction, there is a problem that such a reaction force canceling device cannot be applied.

  Further, since the conventional reaction force canceling device is arranged separately from the transfer system, there is a problem that its configuration and installation work are very complicated.

Korean Published Patent Publication No. 10-2005-0003426

  The present invention is for solving the above-described problems of the prior art, and an object of the present invention is to move the reaction force generated by the movement of the moving body of the transfer system in the same direction as the moving direction of the moving body. By transferring to the mass body to be transferred and converting it to drive energy to move the mass body, it is possible not only to simplify the configuration, but also to other directions where the transfer system is not the moving direction of the moving body It is another object of the present invention to provide a reaction force canceling device that can cancel a reaction force generated by the movement of a moving body even when it is moved.

  Another object of the present invention is to provide a paste dispenser including the reaction force canceling device as described above.

  In order to achieve the above object, a reaction force canceling apparatus according to the present invention includes a movable body support base, a support body that is slidably supported by the movable body support base, and a movable body that is moved on the support body. A mass body connected to the support and moved in the same direction as the moving direction of the moving body by a reaction force generated by the movement of the moving body; Is moved to the initial position, and is provided slidably on the movable body support base, and the support body and the mass body are coupled to each other by moving the movable body. A transmission member configured to transmit the generated force transmitted to the support body to the mass body.

  Here, the transmission member may have a closed loop structure surrounding the movable body support base, and between the transmission member and the movable body support base, between the inner surface of the transmission member and the outer peripheral surface of the movable body support base. It is preferable that a friction preventing mechanism for preventing friction is provided.

  The paste dispenser according to the present invention includes: a head support; a head unit movably provided on the head support; and the head support so as to move the head unit in a longitudinal direction of the head support. A head moving device including a stator slidably coupled to the head unit and a mover attached to the head unit; and a reaction force coupled to the stator and generated by the movement of the head unit and the mover. A mass body that is moved in the same direction as the moving direction of the mover, and when the mass body is moved, a restoring mechanism that restores the mass body to an initial position, and a slidable provision on the head support, The stator and the mass body are coupled, and the force generated by the movement of the mover and transmitted to the stator is transmitted to the mass body. It may be constituted by; that consists of the transmission member and the reaction force cancellation apparatus.

  Here, the transmission member may have a closed loop structure surrounding the head support, and friction between the inner surface of the transmission member and the outer peripheral surface of the head support is prevented between the transmission member and the head support. A friction prevention mechanism is preferably provided.

  The paste dispenser according to the present invention includes: a support base frame on which a head support base provided with a head unit is supported; and the support base frame so as to move the head support base in a longitudinal direction of the support base frame. A support base moving device including a stator slidably connected to the head support and a mover attached to the head support; and a reaction generated by movement of the head support and the mover connected to the stator. A mass body that is moved in the same direction as the moving direction of the mover by force, a restoration mechanism that restores the mass body to an initial position when the mass body is moved, and a slide that can slide on the support frame Provided, the stator and the mass body are coupled, and the force generated by the movement of the mover and transmitted to the stator is transmitted to the mass body. A reaction force cancellation apparatus comprising a reach member; may be configured in.

  Here, the transmission member may have a closed loop structure surrounding the support frame, and friction between the inner surface of the transmission member and the outer peripheral surface of the support frame is between the transmission member and the support frame. It is preferable that an anti-friction mechanism for preventing is provided.

  The reaction force canceling apparatus according to the present invention transmits a reaction force generated by the movement of the moving body to the mass body that is moved in the same direction as the moving direction of the moving body, and converts it into driving energy for moving the mass body. Since it can cancel, the structure can be simplified.

  The reaction force generated by the movement of the moving body is converted into driving energy for moving the support body, converted into driving energy for sliding the transmission member, and the mass body Since it can be canceled out by being converted into driving energy for movement, there is an effect that the reaction force canceling performance can be efficiently exhibited by such multiple composite reaction force canceling effects. Further, when all of the transmission member, the mass body, and the restoring mechanism are connected to the movable body support base, the movement of the movable body also occurs when the transfer system is moved in another direction other than the moving direction of the movable body. This has the effect of canceling out the reaction force.

  The reaction force canceling device according to the present invention includes a transmission member that is slidably provided on the movable body support base, and transmits the reaction force of the movable body to the mass body through the sliding movement of the transmission member. There is an effect that it is possible to reduce the occurrence of impact or vibration in the process of transmitting force to the mass body.

  Further, when the reaction force canceling device is applied to the head support of the paste dispenser, the reaction force generated by the movement of the head unit and the movable element is applied to the mass body that is moved in the same direction as the moving direction of the movable element. Through transmission and conversion to drive energy for moving the mass body, it can be canceled out, so that not only the configuration can be simplified, but also the head support is perpendicular to the direction in which the head unit is moved Even in the case of moving in the direction, there is an effect that the reaction force generated by the movement of the head unit can be offset. In addition, the reaction force generated by the movement of the head unit and the mover is converted into driving energy for sliding the transmission member and converted into driving energy for moving the mass body. Therefore, there is an effect that the reaction force canceling performance can be efficiently exhibited by such multiple complex reaction force canceling effects.

  Further, when the reaction force canceling device is applied to the support base frame of the paste dispenser, the mass body that moves the reaction force generated by the movement of the head support base and the mover in the same direction as the movement direction of the mover. Can be canceled through conversion to driving energy for moving the mass body, and thus the configuration can be simplified. Further, the reaction force generated by the movement of the head support and the mover is converted into driving energy for sliding the transmission member and converted into driving energy for moving the mass body. Since they can be canceled out, there is an effect that the reaction force canceling performance can be efficiently exhibited by such multiple complex reaction force canceling effects.

It is the schematic by which the reaction force cancellation apparatus which concerns on this invention was shown. 1 is a perspective view showing a paste dispenser according to the present invention. FIG. 3 is a perspective view showing a head unit of the paste dispenser of FIG. 2. It is sectional drawing of the head support stand of the paste dispenser provided with the reaction force cancellation apparatus which concerns on this invention. It is sectional drawing of the support stand frame of the paste dispenser provided with the reaction force cancellation apparatus which concerns on this invention.

  Hereinafter, a reaction force canceling apparatus according to the present invention will be described with reference to the accompanying drawings.

  FIG. 1 is a schematic view illustrating a reaction force canceling apparatus according to the present invention.

  As shown in FIG. 1, the reaction force canceling device 80 according to the present invention is provided in a transfer system 90 provided so that a moving body 93 moves for a desired purpose, and is generated by the movement of the moving body 93. The reaction force canceling unit 81 that cancels the reaction force may be included. Here, the transfer system 90 may be configured to include a support body 92 on which the moving body 93 is movably supported, and a moving body support base 91 on which the support body 92 is slidably supported.

  The reaction force canceling unit 81 is connected to the support body 92 and is moved in the same direction as the moving direction of the moving body 93 by the reaction force generated by the movement of the moving body 93, and one side of the mass body 812. Alternatively, it may be configured to include a restoring mechanism 813 that is connected to both sides and restores the mass body 812 to the initial installation position when the mass body 812 is moved.

  With such a configuration, the reaction force generated by the movement of the moving body 93 is transmitted to the support body 92, the support body 92 is moved, and the force for moving the support body 92 is transmitted to the mass body 812. The force transmitted to 812 is converted into energy for moving the mass body 812 and canceled.

  The reaction force canceling unit 81 is generated by the movement of the moving body 93 and transmits the force transmitted to the support body 92 to the mass body 812 that is moved in the same direction as the moving direction of the moving body 93. It includes a transmission member 814 that is slidably provided on the base 91 and that connects the support body 92 and the mass body 812 and transmits the force generated by the movement of the moving body 93 and transmitted to the support body 92 to the mass body 812. Can be configured.

  The transmission member 814 may be formed in a closed loop structure that surrounds the outer periphery of the movable body support base 91, and may be formed of, for example, a belt, a chain, or a rope.

  As shown in FIG. 1, a support body 92 is coupled to the upper side of the transmission member 814, and a mass body 812 is coupled to the lower side of the transmission member 814, whereby the support body 92 and the mass body 812 are transmitted. They are connected via a member 814. However, the present invention is not limited to the direction illustrated in FIG. 1, and the support 92 is coupled to one side of the transmission member 814 and the other side of the transmission member 814 is based on the movable body support base 91. The mass body 812 may be combined.

  Therefore, when the support 92 is moved by the force generated by the movement of the moving body 93 and transmitted to the support 92, the transmission member 814 is slid in the peripheral direction of the moving body support base 91, and the transmission member 814 slides. The mass body 812 is moved in the same direction as the moving direction of the moving body 93 by the movement. Through such a process, the reaction force generated by the movement of the moving body 93 is converted into driving energy for moving the support body 92, driving energy for moving the transmission member 814, and driving energy for moving the mass body 812, and disappears. Is done.

  Thus, the transmission member 814 transmits the reaction force generated by the movement of the moving body 93 transmitted to the support body 92 to the mass body 812 while being slid to the outer peripheral surface of the moving body support base 91. However, the transmission of the force through the sliding movement of the transmission member 814 occurs in the transmission process of the force as compared with the transmission of the force by the other link structure connecting the support body 92 and the mass body 812. Possible vibrations, shocks and noise can be minimized.

  Here, the transmission member 814 minimizes the friction between the inner surface of the transmission member 814 and the outer surface of the movable body support base 91 that may be generated during the sliding movement of the transmission member 814 with respect to the outer peripheral surface of the movable body support base 91. It is preferable that a friction prevention mechanism 97 is provided between 814 and the movable body support base 91. As the friction prevention mechanism 97, for example, vibration transmission and friction between the transmission member 814 and the movable body support base 91 such as a ball bearing, a roller bearing, a roller, or a housing in which friction oil is housed can be prevented. Various configurations can be applied.

  The mass body 812 has a mass sufficiently larger than the masses of the support body 92 and the moving body 93, and the reaction force generated by the movement of the moving body 93 is massed via the support body 92 and the transmission member 814. When the mass body 812 is moved by being transmitted to the body 812, the reaction force generated by the movement of the mobile body 93 can be sufficiently canceled even by a slight movement amount of the mass body 812.

  The restoring mechanism 813 plays a role of restoring the mass body 812 to the initial installation position when the mass body 812 is moved by the reaction force generated by the movement of the moving body 93. The restoring mechanism 813 is the mass body 812. Various configurations that can apply a predetermined restoring force to the mass body 812, such as an elastic coil spring, a plate spring, or a hydraulic or pneumatic damper that are coupled to the CG, can be applied.

  When the moving body 93 moves on the support body 92 with such a configuration, a reaction force in a direction opposite to the moving direction of the moving body 93 is generated, and a part of the reaction force is applied to the support body 92. It is transmitted, converted into driving energy for moving the support 92 and disappears, and the other part is transmitted to the transmission member 814 via the support 92, and the transmission member 814 is transferred to the outer peripheral surface of the mobile support base 91. On the other hand, it is converted into driving energy for sliding and disappears. Further, another part is transmitted to the mass body 812 via the transmission member 814, converted into driving energy for moving the mass body 812, and extinguished. In this case, since the mass of the mass body 812 is sufficiently larger than the masses of the support body 92 and the moving body 93, the moving amount of the mass body 812 is very small.

  On the other hand, after the mass body 812 is moved by the force transmitted to the mass body 812, the mass body 812 is returned to the initial installation position by the restoring force of the restoring mechanism 813. At this time, if the restoring force of the restoring mechanism 813 is transmitted to the transmission member 814 having a closed loop structure via the mass body 812, the transmission member 814 is slid to the movable body support base 91, thereby causing the transmission member 814 to move. The combined support 92 can be returned to its initial position.

  As described above, the reaction force canceling apparatus according to the present invention can return the support body 92 to the initial position together with the mass body 812 through the sliding movement of the transmission member 814 having the closed loop structure. There is an advantage that a separate configuration is not required.

  The reaction force canceling device 80 according to the present invention as described above transmits the reaction force generated by the movement of the moving body 93 to the mass body 812 through the sliding movement of the transmission member 814, and moves the mass body 812 to the moving body 93. Since the reaction force can be canceled by moving in the same direction as the direction, the structure of the reaction force system can be simplified. Further, the reaction force generated by the movement of the moving body 93 can be converted into driving energy for moving the support body 92 and disappear, and converted into driving energy for sliding the transmission member 814 to disappear. Can be converted into driving energy for moving the mass body 812 and extinguished. Therefore, the effect of effectively counteracting the reaction force canceling performance can be obtained by such multiple composite reaction force canceling effects. is there. Further, when all of the transmission member 814, the mass body 812, and the restoring mechanism 813 are coupled to the moving body support base 91, the transfer system 90 provided with the reaction force canceling portion 81 is not in the moving direction of the moving body 93. Also in the case of moving in this direction, there is an effect that the reaction force due to the movement of the moving body 93 can be offset.

  The reaction force canceling device 80 according to the present invention includes a transmission member 814 that is slidably provided on the movable body support base 91, and transmits the reaction force of the movable body 93 to the mass body 812 through the sliding movement of the transmission member 814. Therefore, compared with the case where the support body 92 and the mass body 812 are connected by a complicated link structure, the occurrence of impact or vibration in the process of transmitting the reaction force of the moving body 93 to the mass body 812 can be minimized. There is an effect that can be done.

  The reaction force canceling apparatus 80 configured as described above and having an effect can be applied to various transfer systems such as a crane, a robot, and an FPD manufacturing apparatus. Hereinafter, a case where the reaction force canceling device 80 according to the present invention is applied to a paste dispenser will be described.

  FIG. 2 is a perspective view illustrating a paste dispenser including the reaction force canceling device 80 according to the present invention, and FIG. 3 is a perspective view illustrating a head unit of the paste dispenser of FIG.

  As shown in FIG. 2, the paste dispenser according to the present invention includes a base frame 10, a stage 11 that is fixed to the base frame 10 and on which a substrate 20 is seated, and a pair provided on both sides of the stage 11 in the Y-axis direction. The support base frame 40, the head support base 50 provided to be supported by the pair of support base frames 40 and extending in the X-axis direction, a plurality of head units 60 provided on the head support base 50, and the head unit 60 is provided on the head support 50, and includes a head moving device 70 that horizontally moves the head unit 60 in the X-axis direction, and a control unit (not shown) that controls operations of the head unit 60 and the head moving device 70. Can be configured.

  The base frame 10 may be provided with a stage drive device (not shown) that moves the stage 11 in the front-rear direction (Y-axis direction) of the base frame 10. The head support base 50 includes the head support base 50. A support base moving device 30 that moves along the support base frame 40 may be provided. A plurality of head support bases 50 may be provided so that the productivity of paste pattern formation can be improved when the substrate 20 has a large area.

  As shown in FIG. 3, the head unit 60 includes a syringe 61 filled with a paste, a nozzle 62 that communicates with the syringe 61 and discharges the paste, and is disposed adjacent to the nozzle 62. A laser displacement sensor 63 that measures gap data between the substrate 20, a Y-axis drive unit 64 that moves the nozzle 62 and the laser displacement sensor 63 in the Y-axis direction, and a nozzle 62 and the laser displacement sensor 63 in the Z-axis direction. A Z-axis drive unit 65 to be moved may be included. Here, the laser displacement sensor 63 includes a light emitting unit 631 that emits a laser, and a light receiving unit 632 that is spaced apart from the light emitting unit 631 at a predetermined interval and receives the laser reflected from the substrate 20. It plays the role of measuring the gap data between the substrate 20 and the nozzle 62 by outputting an electrical signal based on the imaging position of the laser beam emitted from 631 and reflected by the substrate 20 to the control unit.

  The head unit 60 is provided with a cross-sectional area sensor 66 that measures the cross-sectional area of the paste pattern P applied to the substrate. Such a cross-sectional area sensor 66 measures the cross-sectional area of the paste pattern P by continuously emitting laser to the substrate 20 and scanning the paste pattern P. The cross-sectional area data of the paste pattern P measured from the cross-sectional area sensor 66 is used to determine the malfunction of the paste pattern P.

  Hereinafter, an embodiment in which the reaction force canceling device 80 according to the present invention is applied to the head support 50 of a paste dispenser will be described.

  FIG. 4 is a cross-sectional view of the head support 50 of the paste dispenser according to the present invention, showing a configuration in which the reaction force canceling device 80 is applied to the head support 50.

  As shown in FIG. 4, a head unit 60 is connected to the head support 50 via a head moving device 70. The head moving device 70 includes a stator 71 extending in the longitudinal direction of the head support 50 and a mover 72 attached to the head unit 60. As a result, the head unit 60 is moved in the X-axis direction, that is, in the longitudinal direction of the head support 50 by the electromagnetic interaction between the stator 71 and the mover 72.

  The reaction force canceling device 80 is generated by the movement of the head unit 60 and the mover 72 and transmits the force acting on the stator 71 to the mass body 812 that is moved in the same direction as the movement direction of the mover 72. It may be configured to include a reaction force canceling unit 81 that converts to drive energy for moving the body 812 and extinguishes it. The reaction force canceling unit 81 is connected to the stator 71 and is moved in the same direction as the moving direction of the mover 72 by the reaction force generated by the movement of the head unit 60 and the mover 72. When the 812 is moved, a restoring mechanism 813 for restoring the mass body 812 to the initial installation position may be included.

  The reaction force canceling unit 81 is slidably provided on the head support base 50 in order to transmit the force transmitted to the stator 71 to the mass body 812 that is moved in the same direction as the moving direction of the mover 72. A transmission member 814 that connects the child 71 and the mass body 812 and transmits the force generated by the movement of the movable element 72 and transmitted to the stator 71 to the mass body 812 may be included.

  Here, with respect to the head support 50, the stator 71 is coupled to one side of the transmission member 814, and the mass body 812 is coupled to the other side of the transmission member 814. The transmission member 814 has a closed loop structure that surrounds the outer periphery of the head support 50, and may be composed of, for example, a belt, a chain, or a rope.

  The mass body 812 has a mass sufficiently larger than the mass of the head unit 60, the stator 71 and the mover 72, and the reaction force generated by the movement of the head unit 60 and the mover 72 is the stator 71 and When the mass body 812 is moved by being transmitted to the mass body 812 via the transmission member 814, the reaction force generated by the movement of the mover 72 can be sufficiently canceled even by a slight movement amount of the mass body 812.

  It is preferable that a friction preventing mechanism 97 for preventing friction between the inner surface of the transmission member 814 and the outer peripheral surface of the movable body support base 91 is provided between the transmission member 814 and the head support base 50. As the friction preventing mechanism 97, there are various configurations capable of preventing vibration transmission and friction between the transmission member 814 and the head support 50, such as a ball bearing, a roller bearing, a roller, or a housing in which friction oil is housed. Can be applied.

  In the embodiment of the present invention, a configuration in which the mass body 812 is arranged inside the head support base 50 is presented, but the mass body 812 may be arranged outside the head support base 50.

  The restoring mechanism 813 plays a role of restoring the mass body 812 to the initial installation position when the mass body 812 is moved by the reaction force generated by the movement of the head unit 60 and the stator 71. Various configurations capable of applying a predetermined restoring force to the mass body 812 such as an elastic coil spring, a plate spring, or a hydraulic or pneumatic damper coupled to the mass body 812 can be applied.

  When the mover 72 and the head unit 60 move on the stator 71 with such a configuration, a reaction force in a direction opposite to the moving direction of the mover 72 is generated. It is transmitted to the stator 71, converted into driving energy for moving the stator 71 and extinguished, and the other part is transmitted to the transmission member 814 via the stator 71, for sliding the transmission member 814. It is converted into driving energy and extinguished, and another part is transmitted to the mass body 812 via the transmission member 814 and converted into driving energy for moving the mass body 812 and extinguished. In this case, since the mass of the mass body 812 is sufficiently larger than the masses of the stator 71, the mover 72, and the head unit 60, the movement amount of the mass body 812 is very small. On the other hand, after the mass body 812 is moved by the force transmitted to the mass body 812, the mass body 812 is returned to the initial installation position by the restoring mechanism 813, and at the same time, the mass body 812 is returned to the initial position of the stator 71. Is done.

  In the paste dispenser according to the present invention as described above, the reaction force generated by the movement of the head unit 60 and the movable element 72 can be slid to the head support base 50 on the head support base 50 on which the head unit 60 is movably supported. Is provided with a reaction force canceling device 80 that cancels the reaction force by transmitting the mass body 812 in the same direction as the moving direction of the mover 72. In addition to simplifying the configuration, the reaction force generated by the movement of the head unit 60 and the mover 72 can be offset even when the head support base 50 moves in the Y-axis direction. . Further, the reaction force generated by the movement of the head unit 60 and the mover 72 can be converted into drive energy for moving the stator 71 and disappear, and the drive energy for sliding the transmission member 814 can be reduced. Since it can be converted and extinguished, and converted into driving energy for moving the mass body 812 and extinguished, reaction force canceling performance can be efficiently achieved by such multiple complex reaction force canceling effects. There is an effect that can be demonstrated.

  Further, the paste dispenser according to the present invention can transmit the reaction force generated by the movement of the head unit 60 and the mover 70 to the mass body 812 through the sliding movement of the transmission member 814. Generation of shock or vibration in the canceling process can be reduced.

  Hereinafter, an embodiment in which the reaction force canceling device 80 according to the present invention is applied to the support base frame 40 of the paste dispenser will be described.

  FIG. 5 is a cross-sectional view of the support base frame 40 of the paste dispenser according to the present invention, and shows a configuration in which the reaction force canceling device 80 is applied to the support base frame 40.

  As shown in FIG. 5, a head support 50 is connected to the support frame 40 via a support moving device 30. The support base moving device 30 includes a stator 31 extending in the longitudinal direction of the support base frame 40 and a movable element 32 attached to the head support base 50. Thereby, the head support 50 can move in the Y-axis direction, that is, the longitudinal direction of the support frame 40 by the electromagnetic interaction between the stator 31 and the mover 32.

  The reaction force canceling device 80 is generated by the movement of the head support 50 and the mover 32, converts the direction of the force applied to the stator 31, and moves in the same direction as the move direction of the mover 32. It may be configured to include a reaction force canceling unit 81 that is transmitted to the body 812 and converted into driving energy for moving the mass body 812 and extinguished. The reaction force canceling unit 81 is connected to the stator 31 and is moved in the same direction as the moving direction of the mover 32 by the reaction force generated by the movement of the head support 50 and the mover 32. When the body 812 is moved, it may be configured to include a restoring mechanism 813 that restores the mass body 812 to the initial installation position.

  The reaction force canceling portion 81 is slidably provided on the support base frame 40 in order to transmit the force transmitted to the stator 31 to the mass body 812 moved in the same direction as the moving direction of the mover 32. A transmission member 814 that connects the child 31 and the mass body 812 and transmits the force generated by the movement of the movable element 32 and transmitted to the stator 31 to the mass body 812 may be included.

  With reference to the support frame 40, the stator 31 is coupled to one side of the transmission member 814, and the mass body 812 is coupled to the other side of the transmission member 814. The transmission member 814 has a closed loop structure surrounding the outer periphery of the support base frame 40, and may be composed of, for example, a belt, a chain, or a rope.

  The mass body 812 has a mass sufficiently larger than the mass of the head support base 50, the stator 31 and the mover 32, and the reaction force generated by the movement of the head support base 50 and the mover 32 is fixed. When the mass body 812 is transmitted to the mass body 812 via the child 31 and the transmission member 814 and the mass body 812 is moved, the reaction force generated by the movement of the mover 32 can be sufficiently canceled even by a slight movement amount of the mass body 812. Can do.

  A friction preventing mechanism 97 that prevents friction between the inner surface of the transmission member 814 and the outer peripheral surface of the support base frame 40 is preferably provided between the transmission member 814 and the support base frame 40. As the friction preventing mechanism 97, there are various configurations capable of preventing vibration transmission and friction between the transmission member 814 and the support frame 40, such as a ball bearing, a roller bearing, a roller, or a housing in which friction oil is housed. Can be applied.

  In the embodiment of the present invention, a configuration in which the mass body 812 is disposed in the internal space of the support frame 40 is presented, but the mass body 812 may be disposed on one side of the support frame 40. Good.

  The restoring mechanism 813 plays a role of restoring the mass body 812 to the initial installation position when the mass body 812 is moved by the reaction force generated by the movement of the head support 50 and the stator 31. Various configurations that can apply a predetermined restoring force to the mass body 812 such as an elastic coil spring, a plate spring, or a hydraulic or pneumatic damper connected to the mass body 812 can be applied to the 813.

  When the mover 32 and the head support 50 are moved on the stator 31 with such a configuration, a reaction force in the direction opposite to the moving direction of the mover 32 is generated. Is transmitted to the stator 31, converted into driving energy for moving the stator 31 and disappears, and the other part is transmitted to the transmission member 814 via the stator 31, and the transmission member 814 is slid. Further, a part of the energy is converted to the driving energy for the mass body 812 via the transmission member 814, and converted to the driving energy for moving the mass body 812 to be extinguished. In this case, since the mass of the mass body 812 is sufficiently larger than the masses of the stator 31, the mover 32, and the head support base 50, the moving amount of the mass body 812 is very small. On the other hand, after the mass body 812 is moved by the force transmitted to the mass body 812, the mass body 812 is returned to the initial installation position by the restoring mechanism 813. At the same time, the stator 31 is also returned to the initial position. Is done.

  In the paste dispenser according to the present invention as described above, the reaction force generated by the movement of the head support 50 and the mover 32 is applied to the support frame 40 on the support frame 40 on which the head support 50 is movably supported. A reaction force canceling device 80 is provided that transmits the mass body 812 via a transmission member 814 that is slidable and moves the mass body 812 in the same direction as the moving direction of the mover 32 to cancel the reaction force. Therefore, there is an effect that the configuration can be simplified. Further, the reaction force generated by the movement of the head support 50 and the mover 32 can be converted into drive energy for moving the stator 31 and disappear, and the drive energy for sliding the transmission member 814. Since it can be converted into driving energy for moving the mass body 812 and extinguished, the reaction force canceling performance can be made efficient by such multiple combined reaction force canceling effects. There is an effect that can be demonstrated.

  Further, the paste dispenser according to the present invention can transmit the reaction force generated by the movement of the head support base 50 and the mover 32 to the mass body 812 through the sliding movement of the transmission member 814. In addition, the occurrence of shock or vibration in the canceling process can be reduced.

  The technical ideas described in the embodiments of the present invention can be implemented independently, and can be implemented in combination with each other.

  Further, the reaction force canceling device 80 according to the present invention is applied to a number of devices for moving components in the paste dispenser such as a stage driving device for moving the stage 11 in addition to the configurations presented in the above-described embodiments. Can do.

DESCRIPTION OF SYMBOLS 10 Base frame 11 Stage 20 Board | substrate 30 Holding stand moving apparatus 40 Support stand frame 50 Head support stand 60 Head unit 70 Head moving apparatus 80 Reaction force cancellation apparatus 814 Transmission member 812 Mass body 813 Restoration mechanism 91 Moving body support stand 92 Support body 93 Moving body 97 Anti-friction mechanism

Claims (9)

Provided in a transfer system comprising a moving body support, a support that is slidably supported on the moving body support, and a moving body that is moved on the support,
A mass body connected to the support and moved in the same direction as the moving direction of the moving body by a reaction force generated by the movement of the moving body;
A restoring mechanism that restores the mass body to an initial position when the mass body is moved; and a slidably provided on the movable body support base, the support body and the mass body are coupled, and the movable body A transmission member that transmits to the mass body the force generated by the movement of
Including reaction force canceling device.   The reaction force canceling device according to claim 1, wherein the transmission member has a closed loop structure surrounding the movable body support.   The friction prevention mechanism for preventing the friction between the inner surface of the transmission member and the outer peripheral surface of the movable body support base is provided between the transmission member and the movable body support base. The reaction force canceling device according to 1 or 2. Head support;
A head unit movably provided on the head support;
A head moving device including a stator slidably coupled to the head support so as to move the head unit in a longitudinal direction of the head support; and a mover attached to the head unit; A mass body that is connected to a child and is moved in the same direction as the moving direction of the mover by a reaction force generated by the movement of the head unit and the mover, and when the mass body is moved, the mass body Is restored to the initial position, and is slidably provided on the head support. The stator and the mass body are coupled, generated by the movement of the mover, and transmitted to the stator. A reaction force canceling device comprising a transmission member for transmitting force to the mass body;
Including paste dispenser.   5. The paste dispenser according to claim 4, wherein the transmission member has a closed loop structure surrounding the head support.   The friction prevention mechanism which prevents the friction between the inner surface of the said transmission member, and the outer peripheral surface of the said head support stand is provided between the said transmission member and the said head support stand. 5. The paste dispenser according to 5. A support frame on which a head support provided with a head unit is supported;
A support table moving device including a stator slidably connected to the support table frame and a mover attached to the head support table so as to move the head support table in the longitudinal direction of the support table frame; and When the mass body is connected to the stator and moved in the same direction as the moving direction of the mover by the reaction force generated by the movement of the head support and the mover, and the mass body is moved, A restoring mechanism that restores the mass body to an initial position and a slide frame provided on the support frame, the stator and the mass body are coupled, generated by the movement of the mover, A reaction force canceling device comprising a transmission member for transmitting the transmitted force to the mass body;
Including paste dispenser.   The paste dispenser according to claim 7, wherein the transmission member has a closed loop structure surrounding the support base frame.   The friction prevention mechanism for preventing friction between the inner surface of the transmission member and the outer peripheral surface of the support base frame is provided between the transmission member and the support base frame. Paste dispenser.

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