KR20100053566A - 평평한 기판의 무접촉 운반용 장치 - Google Patents

평평한 기판의 무접촉 운반용 장치 Download PDF

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Publication number
KR20100053566A
KR20100053566A KR1020107003766A KR20107003766A KR20100053566A KR 20100053566 A KR20100053566 A KR 20100053566A KR 1020107003766 A KR1020107003766 A KR 1020107003766A KR 20107003766 A KR20107003766 A KR 20107003766A KR 20100053566 A KR20100053566 A KR 20100053566A
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KR
South Korea
Prior art keywords
bernoulli
flat substrates
transport
contactless transport
grippers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
KR1020107003766A
Other languages
English (en)
Korean (ko)
Inventor
한스-페터 보엘크
로베르트 미하엘 하르퉁
Original Assignee
쎈트로테름 서멀 솔루션즈 게엠베하 운트 콤파니 카게
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 쎈트로테름 서멀 솔루션즈 게엠베하 운트 콤파니 카게 filed Critical 쎈트로테름 서멀 솔루션즈 게엠베하 운트 콤파니 카게
Publication of KR20100053566A publication Critical patent/KR20100053566A/ko
Withdrawn legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
    • B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
    • B65G51/03—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • B65G49/065—Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/36—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations using air tracks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/04—Arrangements of vacuum systems or suction cups
    • B65G2249/045—Details of suction cups suction cups

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Fluid Mechanics (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
KR1020107003766A 2007-07-19 2008-07-21 평평한 기판의 무접촉 운반용 장치 Withdrawn KR20100053566A (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102007033944.7 2007-07-19
DE102007033944 2007-07-19

Publications (1)

Publication Number Publication Date
KR20100053566A true KR20100053566A (ko) 2010-05-20

Family

ID=39768792

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020107003766A Withdrawn KR20100053566A (ko) 2007-07-19 2008-07-21 평평한 기판의 무접촉 운반용 장치

Country Status (6)

Country Link
US (1) US20100290844A1 (enExample)
EP (1) EP2173645B1 (enExample)
JP (1) JP2010533970A (enExample)
KR (1) KR20100053566A (enExample)
DE (1) DE102008034119A1 (enExample)
WO (1) WO2009010592A1 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111824772A (zh) * 2019-04-19 2020-10-27 夏普株式会社 输送装置

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102008041250A1 (de) * 2008-08-13 2010-02-25 Ers Electronic Gmbh Verfahren und Vorrichtung zum thermischen Bearbeiten von Kunststoffscheiben, insbesondere Moldwafern
KR101537289B1 (ko) * 2010-04-12 2015-07-16 에이에스엠엘 네델란즈 비.브이. 기판 핸들링 장치 및 리소그래피 장치
US8905680B2 (en) 2011-10-31 2014-12-09 Masahiro Lee Ultrathin wafer transport systems
JP5979594B2 (ja) * 2012-09-13 2016-08-24 村田機械株式会社 吸引チャック、及びこれを備えた移載装置
JP2015162487A (ja) * 2014-02-26 2015-09-07 オイレス工業株式会社 非接触式浮上搬送装置
JP6288554B2 (ja) * 2014-03-11 2018-03-07 オイレス工業株式会社 非接触式浮上搬送装置
JP6288553B2 (ja) * 2014-03-11 2018-03-07 オイレス工業株式会社 非接触式浮上搬送装置およびその搬送方向切換方法と搬送速度調整方法
US9961783B2 (en) * 2016-07-08 2018-05-01 Kateeva, Inc. Guided transport path correction
CN106829481A (zh) * 2017-04-18 2017-06-13 武汉华星光电技术有限公司 一种传送装置
JP7437187B2 (ja) * 2020-02-26 2024-02-22 Ｊｓｗアクティナシステム株式会社 浮上搬送装置、及びレーザ処理装置

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US3614168A (en) * 1969-09-30 1971-10-19 Bowles Fluidics Corp Bernoulli conveyor
DK604074A (da) 1974-11-20 1976-05-21 Chemical Reactor Equip As Apparat til beroringsfri transport af sarbare, hovedsageligt skiveformede objekter, navnlig tyndfilmbelagte halvledersubstrater
US3976330A (en) 1975-10-01 1976-08-24 International Business Machines Corporation Transport system for semiconductor wafer multiprocessing station system
US4004349A (en) * 1975-10-21 1977-01-25 Oxy Metal Industries Corporation Method for fluid conveyance of articles
CA1054963A (en) * 1976-01-16 1979-05-22 John W. Neumann Fluid rail conveying apparatus
FR2504035B1 (fr) * 1981-04-21 1986-06-06 Mitsubishi Heavy Ind Ltd Machine a mouler par soufflage
US4630975A (en) * 1983-10-11 1986-12-23 Becker John H Air encasement system for transportation of particulates
JP2544911B2 (ja) * 1986-05-09 1996-10-16 曙ブレーキ工業株式会社 アンチスキツド制御方法
DE3936846C1 (enExample) * 1989-11-06 1991-04-18 Hilmar 5653 Leichlingen De Vits
JPH0818679B2 (ja) * 1989-12-28 1996-02-28 新明和工業株式会社 フローティング搬送装置
US5788425A (en) * 1992-07-15 1998-08-04 Imation Corp. Flexible system for handling articles
JPH07257715A (ja) * 1994-03-17 1995-10-09 Hiroshi Akashi 浮上搬送装置
US5468299A (en) * 1995-01-09 1995-11-21 Tsai; Charles S. Device comprising a flat susceptor rotating parallel to a reference surface about a shaft perpendicular to this surface
EP0902966A1 (en) * 1996-05-31 1999-03-24 IPEC Precision, Inc. Non-contact holder for wafer-like articles
US6074085A (en) * 1997-12-20 2000-06-13 Usbi Co. Cyclonic mixer
US6125754A (en) * 1998-10-30 2000-10-03 Harris; J. C. Web pressurizing channeled roller and method
JP2000191137A (ja) * 1998-12-28 2000-07-11 Nippon Electric Glass Co Ltd 板状物の非接触搬送装置
JP3981241B2 (ja) * 2000-06-09 2007-09-26 株式会社ハーモテック 旋回流形成体および非接触搬送装置
JP2005191464A (ja) * 2003-12-26 2005-07-14 Harmotec Corp アライメント機構およびウェハ搬送ハンド
JP4437415B2 (ja) * 2004-03-03 2010-03-24 リンク・パワー株式会社 非接触保持装置および非接触保持搬送装置
JP4168149B2 (ja) * 2004-09-08 2008-10-22 国立大学法人長岡技術科学大学 無接触搬送装置
JP4333879B2 (ja) * 2004-10-15 2009-09-16 太平洋セメント株式会社 非接触吸着治具及び非接触チャック装置
JP2007176638A (ja) * 2005-12-27 2007-07-12 Harmotec Corp 非接触搬送装置
JP4243766B2 (ja) * 2006-10-02 2009-03-25 Ｓｍｃ株式会社 非接触搬送装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111824772A (zh) * 2019-04-19 2020-10-27 夏普株式会社 输送装置

Also Published As

Publication number Publication date
WO2009010592A1 (de) 2009-01-22
US20100290844A1 (en) 2010-11-18
EP2173645B1 (de) 2012-05-30
DE102008034119A1 (de) 2009-01-22
EP2173645A1 (de) 2010-04-14
JP2010533970A (ja) 2010-10-28

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St.27 status event code: A-0-1-A10-A15-nap-PA0105

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PC1203 Withdrawal of no request for examination

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P22-X000 Classification modified

St.27 status event code: A-2-2-P10-P22-nap-X000